Introduction to BioMEMS & Medical Microdevices
Sensor Principles and Microsensors Part 2
Companion lecture to the textbook: Fundamentals of BioMEMS and Medical Microdevices, by
Dr. Steven S. Saliterman, www.tc.umn.edu/~drsteve
Electrochemical Sensors
Potentiometry Sensors
Ion selective electrodes (ISE) into the nanodimension range
New ion recognition chemistries
New ion selective membranes
Importance of the reference electrode
Voltametric Sensors
Carbon paste electrodes (CPE) for organic
molecule detection
Micro and Ultramicro electrodes
Environmental monitoring
Carbon nanotubules
Stripping voltammetry
Steven S. Saliterman, MD, FACP
Privett, Benjamin J., Jae H. Shin, and Mark H. Schoenfisch. 2010.
Electrochemical Sensors. Analytical Chemistry 82, no. 12:4723-4741.
Electrochemical Sensors
Electrochemical Biosensors
Immunosensors
Selective and sensitive biological binding
Aptamer-based biosensors
Glucose, creatinine, pathologic bacteria, DNA
Enzyme biosensors
Bacteria, virus and cancer biomarkers
Ion Selective Field Effect Transistors
Based on the electrochemical phenomena
occurring within the chemically sensitive membrane
placed on top of the transistor gate and on
electrical transduction of the signal by this
semiconductor device.
Steven S. Saliterman, MD, FACP
Privett, Benjamin J., Jae H. Shin, and Mark H. Schoenfisch. 2010.
Electrochemical Sensors. Analytical Chemistry 82, no. 12:4723-4741.
Ion Selective FET
Photocurable polymers have been used for
encapsulation of ion selective field effect
transistors (ISFET) and for membrane formation
in chemical sensitive field effect transistors
(ChemFET).
Charge Carriers In
D
Charge Carriers Out
D
G
S
P- Channel
S
N- Channel
Shown: Insulated Gate Field-Effect Transistor
(IGFET). MOSFET (metal oxide is common).
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Electric Field Allows Electron Flow
- - - -+ -+ +--+
+ + + +
Silicon (Semiconductor)
- - - - - - - +
Steven S. Saliterman, MD, FACP
+ + + + + + +
+
ISFET Fabrication
Polyimide covered by a standard photoresist and photocurable
epoxy acrylate.
The polymer layer after being applied to a wire bonded sensor
glued to some substrate can be patterned using traditional
photolithography techniques.
Left: ISFET with photocurable encapsulate (1), with openings
over the gate (2), contact pads (3) and scribing lines (4).
Center and Right: Mounting, wire bonding and encapsulation.
3mm opening
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Membrane Formation
The best known method of ISFET membrane
formation comes from traditional ion selective
electrodes and is based on using a polymer
matrix which is deposited over an ISFET gate
and contains the required ion active
components, like ionophore, plasticizer and
lipophilic additives.
Achievements in development of traditional ISE
with liquid inner contact resulted in hundreds of
different membrane compositions that can be
used as well in case of ISFETs.
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Applied Polymer and Analyte
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Steven S. Saliterman, MD, FACP
Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective
Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.
Optical Sensors
Optical chemical sensors are usually configured as
transducers, with transductions steps of electricaloptical-chemical-optical-electrical conversion:
Steven S. Saliterman, MD, FACP
Boisde, G. and A. Harmer, Chemical and Biochemical Sensing with Optical
Fibers and Waveguides, Artech House, Boston (1996)
Optical Fiber Blood Pressure Sensor
Steven S. Saliterman, MD, FACP
Esashi, Masayoshi. 2012. Revolution of Sensors in Micro-Electromechanical
Systems. Japanese Journal of Applied Physics 51, no. 8:080001.
Optical Fibers
An optical fiber consists of a solid cylindrical core of
transparent material surrounded by a cladding of
similar material but of lower refractive index than the
core:
Steven S. Saliterman, MD, FACP
Refractive Index & Snells Law
The refractive index is the ratio of the speed of light in
a vacuum to the speed of light in the medium:
cvacuum
1
n=
cmaterial
Snells law defines the relationship between incident
and refracted light, measured as an angle from a
perpendicular to the surface:
ni sin I = nr sin R
Steven S. Saliterman, MD, FACP
Critical Angle
Refraction can not take place when the angle of
incidence is too large, or greater than the critical
angle. For air (refractive index of 1) and glass
(refractive index of 1.5), the critical angle is defined as:
qc = arcsin( nr / ni ) = 41.8
Steven S. Saliterman, MD, FACP
Acceptance Angle
The acceptance angle is the angle over which light
rays entering the fiber will be guided along its core:
Steven S. Saliterman, MD, FACP
Numeric Aperture
Numeric Aperture (NA) is the light gathering ability of
a fiber. The material NA relates to the refractive
indices of the core and cladding:
NA = n02 - n12 = sin q = n0 sin qc
Where
n0 is the core index,
n1 is the cladding index, and
q is half the acceptance angle, and
qc is the confinement angle.
Steven S. Saliterman, MD, FACP
Modes
Light propagates through the core in a series of wave
fronts or modes.
Steven S. Saliterman, MD, FACP
Sterling, D.J., Technicians Guide to Fiber Optics, 3rd ed. Delmar
Publishers, Albany, N.Y. (2000)
Applications in Medicine
Glucose and anticoagulation monitoring:
Steven S. Saliterman, MD, FACP
Images courtesy of LifeScan, Inc. and HemoSense, Inc.
Temperature:
Image courtesy of Braun
Steven S. Saliterman, MD, FACP
Harsanyi, G., Sensors in Biomedical Applications, Technology and
Applications. Technomic Pub. Co., Lancaster, PA (2000)
Pressure:
Steven S. Saliterman, MD, FACP
Fraden, J. Noncontact temperature measurement in medicine.
Bioinstrumentation and Biosensors, D.L. Wise, Ed, Marcel Dekker (1991).
Intraocular pressure:
Steven S. Saliterman, MD, FACP
Bergveld, A.P., The merit od using silicon for the development of hearing aid
microphones and intraocular pressure sensors. Senors and Actuators 41:42, pp.
223-229 (1994)
Pulse oximetry:
Steven S. Saliterman, MD, FACP
Steven S. Saliterman, MD, FACP
Parker, D. Sensors for monitoring blood gasses in intensive care.
J Phys. E. Sci. Instrum. 20, pp. 1103-1112 (1987).
Respiratory spirometry and CO2:
Steven S. Saliterman, MD, FACP
Implanted pacemaker and rhythm monitor:
Steven S. Saliterman, MD, FACP
Summary
Electrochemical Sensors
Ion Selective Field Effect Transistors (ISFET)
and Chemical Sensitive FET (ChemFET).
Optical Sensors
Potentiometry Sensors
Voltametric Sensors
Electrochemcial Biosensors
Immunosensors
Optical chemical sensors
Fiber optics
Clinical Applications
Steven S. Saliterman, MD, FACP
