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GENESIS Specification

The GENESIS-1000 scanning electron microscope has a resolution of 3.0nm at 30kV for SE imaging and 10.0nm at 3kV for BSE imaging. It has a magnification range of x10 to x300,000 and an acceleration voltage range of 200V to 30kV. The microscope features a 5-axis manual stage, variable objective aperture, automatic brightness/contrast and focus functions, and a fully automated vacuum system that achieves high vacuum within 3 minutes. Optional detectors include BSE, EBSD, EDS, WDS, CL, and a chamber camera.

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45 views1 page

GENESIS Specification

The GENESIS-1000 scanning electron microscope has a resolution of 3.0nm at 30kV for SE imaging and 10.0nm at 3kV for BSE imaging. It has a magnification range of x10 to x300,000 and an acceleration voltage range of 200V to 30kV. The microscope features a 5-axis manual stage, variable objective aperture, automatic brightness/contrast and focus functions, and a fully automated vacuum system that achieves high vacuum within 3 minutes. Optional detectors include BSE, EBSD, EDS, WDS, CL, and a chamber camera.

Uploaded by

imoon63
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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▣ GENESIS-1000 Specifications

Resolution 3.0nm (30kV, SE Image) 10.0nm (3kV, BSE Image)


Magnification x10 ~ x300,000
Acceleration Voltage 200V ~ 30kV
Filament Precentered Tungsten Filament
SE Detector ET-Style Detector
Objective IRIS Variable aperture with for different diameters (20/20/50/100μm)
Image Shift ±50μm
5-Axis Manual Stage
X: -20 ~ 20mm
Y: -20 ~ 20mm
Stage
Z: 5 ~ 45mm
T: -20 ~ 90°(Euccentric)
R: 360°
Maximum Horizontal: 96mm
Sample Size Vertical: 50mm
Advanced scan Dynamic Focus, Point & Line scan, Tilt compensation
Automatic Function Auto Brightness/Contrast, Auto Focus, Auto Gun Alignment
Focus Mode : 320 x 240 pixel, Resizable
Preview Mode : 800 x 600 pixel
Display Mode
Slow Mode : Applicable to both preview and focus mode
Photo Mode : Up to 3200 x 2400
Fully Automated Evacuation System
- turbo molecular pump(Vacuum ready within 3 minutes)
Vacuum System
- rotary vane pump
- electrical valve system (compressor NOT required)
Vacuum Mode High Vacuum Mode (< 9x10-3 Pa)
Installation Dimension : 1000 x 2000
- main system: 600(W) x 623(D)
Dimension(mm)
- operation table : 700 x 1400
- rotary pump : 200 x 500
Weight(kg) 120
Supplied Accessories Filament : 1box (10 units)

Windows 8-based All-in-One 20" Workstation


Operation Device
- 100% controlled by keyboard and mouse

BSE (Back Scattered Electron)


EBSD (Electron Back Scattered Diffraction)
Optional EDS (Energy Dispersive Spectroscopy)
Detector WDS (Wavelength Dispersive Spectroscopy)
CL (Cathodoluminescent)
Chamber Camera

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