MoMaExampleLD90 PDF
MoMaExampleLD90 PDF
LD90 + TM12M-SEMI
01/2020 – Rev. 1
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Contents
Revision Log ........................................................................................................................................................... 2
1 Introduction................................................................................................................................................... 5
1.1 Disclaimer.............................................................................................................................................. 5
1.2 Application Summary ............................................................................................................................. 5
1.3 Further Reading ..................................................................................................................................... 6
2 2. Safety......................................................................................................................................................... 7
2.1 Defining Safety Requirements ................................................................................................................ 7
2.2 Safety System Implementation .............................................................................................................. 8
2.3 Safety PLC Example Program.................................................................................................................. 9
2.4 Sistema Report .................................................................................................................................... 14
3 Power .......................................................................................................................................................... 15
3.1 Power Management ............................................................................................................................ 15
3.2 Battery Life Test Results....................................................................................................................... 15
4 Software ...................................................................................................................................................... 17
4.1 Overview ............................................................................................................................................. 17
4.2 TMflow ................................................................................................................................................ 19
5 Mechanical .................................................................................................................................................. 22
5.1 Safety Switch Mount Design ................................................................................................................ 22
5.2 Mounting frame with Outrigger mechanism:........................................................................................ 22
5.3 TechMan Remote Stick ........................................................................................................................ 23
6 Conclusion and Future Work ........................................................................................................................ 24
Appendix A – Parts List ......................................................................................................................................... 25
Appendix B – Labelled Exploded View ................................................................................................................... 26
Appendix C – Simplified SISTEMA Report .............................................................................................................. 28
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Figures
Figure 2-1 The LD is ready to move because the two sides of the non-contact switch are in proximity to
each other. .............................................................................................................................................. 8
Figure 2-2 The LD robot is E-stopped because the two sides of the non-contact switch are separated. .... 8
Figure 2-3 abstract diagram of the safety system E-stop signals ............................................................... 9
Figure 2-4 physical representation of the safety system hardware ......................................................... 10
Figure 2-5 implementation of the safety units with hardware model numbers ...................................... 10
Figure 2-6 function block ‘GlobalEmergency1’ represents the state of the first system E-stop button. ... 11
Figure 2-7 function block ‘GlobalEmergency2’ represents the state of the second system E-stop button.
.............................................................................................................................................................. 12
Figure 2-8 “TM_Estop_Out_Trigger” becomes HIGH when either system E-stop button is pressed ........ 12
Figure 2-9 EDM function block that controls and monitors the TM E-stop relays.................................... 12
Figure 2-10 internal variable ‘LD_Estop_Out_Trigger’ is based on various input signals ......................... 13
Figure 2-11 EDM function block that controls and monitors the LD E-stop relays ................................... 13
Figure 2-12 TM_EMO function block which sets the internal variable ‘TM_EMO_Out_Trigger’ based on
various input signals .............................................................................................................................. 14
Figure 2-13 EDM function block that controls and monitors TM’s EMO relays ....................................... 14
Figure 3-1 the map used for battery life testing ..................................................................................... 16
Figure 4-1 example using ‘Engage’ in Mobile Planner............................................................................. 17
Figure 4-2 Mobile Planner example of using ARCL to direct the TM robot after the LD has arrived at its
goal. ...................................................................................................................................................... 18
Figure 4-3 the ‘Main’ TMflow program .................................................................................................. 19
Figure 4-4 visual representation of how each example TMflow program uses Warp nodes to transition
between eachother ............................................................................................................................... 20
Figure 4-5 the expression checked for running the “GoHome” flow under the Gateway in the ‘Main’
TMflow program ................................................................................................................................... 20
Figure 5-1 the MoMa with outriggers extended ..................................................................................... 23
Figure 5-2 graph of the LD-90’s acceptable center of gravity before tipping occurs (side and isometric
views).................................................................................................................................................... 24
Figure 5-3 graph of the LD-90’s acceptable center of gravity before tipping occurs (front view) ............. 24
Tables
Table 1-1 recommended reading for full understanding of this guide. ..................................................... 6
Table 2-1 list of components and model numbers ................................................................................. 10
Table A-1 Hardware used in the first proof-of-concept-prototype. ......................................................... 25
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1 Introduction
This guide was created by Omron Robotics and Safety Technologies, Inc. (ORT) to be used as a reference for creating
a system that utilizes both the LD mobile platform, and the TechMan (TM) robot arm. The purpose of this guide is
to provide examples that help users understand the considerations needed for a safe and efficient fusion of the two
systems. The guide is divided into four sections: Safety, Power, Software and Mechanical.
1.1 Disclaimer
The ideas and suggestions in this guide are the result of testing done by the ORT Mobile Application Development
Engineering (ADEM) team. This design is a conceptual prototype for demonstration purposes. It is not intended to
be a final product for selling or to be deployed as a final piece for customer use.
This guide is intended for use by the Omron Advanced Technical Center (ATC) teams for the purpose of internal
development. Any issues or concerns that arise while following this guide should be conveyed to the ORT ADEM
team so that they may assist and improve design recommendations. It is always necessary to reference the most
updated versions of the ISO 10218-2 and ISO/TS 15066 in order to do a full risk assessment of the resulting integrated
robotic system. If a robotic system does not meet the necessary safety requirements for the intended application,
then the system must be reevaluated.
ORT is not responsible for any modification made by ATC beyond the scope of ORT training and this guide. ORT does
not recommend that ATC engineers, system integrators, or end users modify our suggested usage and/or go beyond
the designed specifications (and thus intended use). Additionally, ORT advises that it is the responsibility of the user
of this guide to calculate the electrical power load for any additional load (grippers, sensors, etc.) that may cause an
electrical risk or hazard.
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1.3 Further Reading
Title Reference
Mobile Robot LD Safety Guide I616-E-01
Mobile Robot Software Suite User’s Guide I614-E-01
LD Platform Peripherals User’s Guide I613-E-03
LD Platform User’s Guide I611-E-05
Advanced Robotics Command Language Mobile Robots Reference Guide I617-E-01
Software Manual TMflow I626-E-01
TM Safety Manual I625-E-01
TM12 TM14 Hardware Installation Manual I624-E-01
TM5 Hardware Installation Manual I623-E-01
Sysmac Studio User Guide W504-E1-19
Expression Editor and Listen Node -
TM Modbus TCP Communication with NJ and NX Controllers -
Mobile Robot Function Blocks for Sysmac Studio – User’s Manual -
Mobile Robot Function Blocks for Sysmac Controllers – Starting Guide -
Table 1-1 recommended reading for full understanding of this guide.
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2 2. Safety
This section reviews the thought process behind a specific safety system, and offers an explanation of its
implementation using the NX-SL 3300 safety PLC.
Since the target application is handling of semiconductor devices, the “SEMI” version of the TM will be used, as well
as the black, ESD safe LD skin set. Additionally, semiconductor applications typically have an Emergency Off (EMO)
button for the robot arm. Per the “SEMI S2” standard, some passive voltage is allowed so long as the power
consumed remains below 240 watts. Therefore, depending on the situation, it is permissible to allow the LD to
remain powered ON and to E-stop the LD instead of turning it off. This is helpful because the LD does not have an
emergency off input.
The ‘SEMI’ option of the TM robot adds an EMO input on the TM controller. This can be used to meet this
requirement - with some minor modifications. In order for the entire system to become aware that the TM’s EMO
is pressed, the button itself is wired to the safety PLC. When the button is pressed, the safety PLC will send an E-stop
signal to the LD and cut power to the TM controller. To prevent a user from pressing an E-stop and not stopping the
system, all E-stop inputs will be forwarded to a safety PLC. In this example, all E-stop button presses will result in the
entire system becoming E-stopped.
Lastly, all users and operators interacting with the TM robot should be knowledgeable of the system and be aware
of any possible dangers.
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2.2 Safety System Implementation
An abstract diagram of the safety system for this prototype is shown in Figure 2-3.
2.2.1 Safety Requirements 1&2: Only one robot should move at a time and TM should remain in LD
footprint during LD motion.
One side of the switch is mounted near the joint six of the TM, and the other side is mounted in a fixed location of
the mounting platform. Effectively, when the TM robot’s tool center point (TCP) is not in a designated home position,
the safety PLC will E-stop the LD. This way, if the TM robot is extended, the LD robot will be unable to move. This is
demonstrated in Error! Reference source not found. and Error! Reference source not found.. Additionally, if for any re
ason the TM robot is powered OFF, the LD would still be unable to move if the TM were in an unsafe position.
Moreover, if the TM tries to move while the LD is already moving, then the LD will immediately become E-stopped.
When this door switch returns to the closed position, the LD will not automatically recover and will require the user
to manually enable motors by pressing the LD on button or a command in software. For smooth operation, the TM
will enable motors in the LD in software, but only immediately after returning to its home position.
LD (E-stopped)
LD (can move)
Figure 2-1 The LD is ready to move because the two sides of the Figure 2-2 The LD robot is E-stopped because the two
non-contact switch are in proximity to each other. sides of the non-contact switch are separated.
2.2.2 Safety Requirement 3: If any E-stop is pressed, the entire system should be E-stopped.
The E-stop built into the LD’s HMI is re-routed as an input to the safety PLC. Also, the TM controller’s remote stick
has an E-stop which is forwarded to the safety PLC through its E-stop output. This way, the safety PLC can use its
internal logic to handle both HMI and TM remote stick E-stops as system E-stops.
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Figure 2-3 abstract diagram of the safety system E-stop signals
2.3.1 Introduction
This section describes a specific, example implementation, created in Sysmac Studio, which can be used to meet the
proposed safety suggestions. The goal of this section is to provide a starting point for other designs, and to give an
idea of the approach taken and reasoning behind certain design decisions. Based on a risk assessment, different
applications will require different approaches.
The TM and LD robots have high levels of safety individually and the goal is to maintain this level of safety while
combining the systems. An Omron safety PLC (NX-SL 3300) is used for overseeing the safety of the combined
systems. Combining the safety CPU unit with an Ethernet Coupler Unit (NX-EIC202), input/output safety cards and
safety rated relays gives us the tools to ensure the combined system is safe.
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2.3.2 Components
Figure 2-5 describes the components used for safety. Unit 0 is the NX-EIC 202 Ethernet/IP coupler which can be used
to communicate with the safety CPU. Unit 1 is the NX-SL3300, and is the safety CPU unit that controls the safety
logic of the system. Units 2 to 6 include input (NX-SID800) and output (NX-SOD400) safety cards. These interact with
safety rated inputs and outputs to form an essential part of the logic.
Figure 2-5 implementation of the safety units with hardware model numbers
Table 2-1 shows a list of components and model numbers need for this implementation. Additional components
include force guided relays (G7SA) and their corresponding push-in sockets (P7SA) for triggering safety-rated E-stops
from the safety CPU unit.
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2.3.3 Coding Explanations
In all, there are three outputs from the Safety PLC: ‘LD_Estop’, ‘TM_Estop’ and ‘TM_EMO’. For each output there
must be an External Device Monitoring (EDM) function block. EDM blocks verify channel mismatch and reset the
output signal. Within each EDM block, the inputs for ‘S_EMD1’ and ‘S_EDM2’ are used as feedback from the dry-
contact relays to ensure successful E-stops and releases. The G7SA relays have two normally open (NO) and two
normally closed (NC) outputs. The NO contact on a single G7SA is used for opening and closing one E-stop channel
and the NC contact is used as an EDM feedback for verification.
The LD and the TM individually require a reset after becoming E-stopped. The LD and the TM both can use an external
input to trigger this reset, so a new reset button can be used to trigger a reset on all the systems simultaneously.
Pressing the button would be the same as pressing the ON button on the LD, the STOP button on the TM and
resetting the Safety PLC’s EDM blocks.
The monitoring time gives the maximum response time for the connected, monitored actuators. Monitoring time is
set to 500ms on each of the EDM function blocks. During startup, the feedback from the safety relays may take a
few seconds to become HIGH thus an ON delay timer is used to enable the EDM function blocks after 15s. The
enabling delay only happens during a power cycle (i.e. startup) and does not affect the EDM function blocks during
normal operation.
Figure 2-6 function block ‘GlobalEmergency1’ represents the state of the first system E-stop button.
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Figure 2-7 function block ‘GlobalEmergency2’ represents the state of the second system E-stop button.
Figure 2-8 “TM_Estop_Out_Trigger” becomes HIGH when either system E-stop button is pressed
Figure 2-9 EDM function block that controls and monitors the TM E-stop relays
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Figure 2-10 internal variable ‘LD_Estop_Out_Trigger’ is based on various input signals
All conditions that can trigger an LD E-stop are handled in the code of Figure 2-10. The input named ‘TM_TCP’
represents the non-contact switch with one side mounted near or, on the TM’s tool and the other side on the
mounting frame. When the TM leaves its home position, the dual channel safety-rated non-contact switch will open.
The input named ‘TM_Remote’ represents the E-stop on the TM robot’s remote stick. The remaining inputs,
‘G_Estop_1’ and ‘G_Estop_2’ are the system E-stop button inputs and ‘TM_EMO_In’ is the emergency off (EMO)
button input. All these inputs are fed into an AND gate so that if any input goes low, the LD becomes E-stopped.
Figure 2-11 EDM function block that controls and monitors the LD E-stop relays
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Figure 2-12 TM_EMO function block which sets the internal variable ‘TM_EMO_Out_Trigger’ based on various input signals
Figure 2-13 EDM function block that controls and monitors TM’s EMO relays
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3 Power
3.1.2 On Sequence
A single LD battery powers both the TM and the LD, and in order for the battery to output power it must actively
communicate with the LD core. Therefore, to start the system, the LD must be powered on as usual through the
HMI.
The TM and the LD were each given tasks in a 90 second cycle. The LD travelled 20 meters within in 47 seconds
between two goals, while the TM ran a 43 second routine in which it picked up and moved around a 4.2 kg payload.
The system ran for 450 minutes from 100% to 0% battery charge.
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Figure 3-1 the map used for battery life testing
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4 Software
In the example system described in this section, the Advanced Robot Control Language (ARCL) interface is used as
the primary interaction between the LD and the TM robots.
4.1 Overview
When the LD robot arrives at a goal, it first begins an engage task. The engage task calls a macro called “FoupRoutine”
which then extends the outriggers and places the LD into a ‘waitActive’ state with lockMode enabled. The engage
task of this example is shown in Figure 4-1. The first task of the “FoupRoutine” macro is to extend the outriggers, as
shown in Figure 4-2Figure 4-3.
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Figure 4-2 Mobile Planner example of using ARCL to direct the TM robot after the LD has arrived at its goal.
After extending the outriggers, the LD uses ‘arclSendText’ task to instruct the TM robot on which program to run.
The TM program uses the ConnectARCL custom component and parses the incoming string over ARCL to determine
which program to run. Then, the TMflow uses a Gateway node to select which sub-program it should warp to. A
more detailed description of the TMflow can be found in section 4.2.
Using ‘lockMode’ prevents the LD from doing any further actions until it is told to continue. In this way, the LD is
able to become E-stopped without losing its assignment to the current job. This is critical to use since the queuing
manager would otherwise change the status of the job to ‘Failed’ and could possibly reassign the job to another
robot.
After returning to the home position, the TM sends the ‘continue’ command to the LD through ARCL. Finally, the TM
program warps back to Main. Figure 4-2 shows the progression for normal operation.
Figure 4-2 using ARCL to direct the TM robot after the LD has arrived at its goal
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4.2 TMflow
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Main Pick Go Home
Place
Figure 4-4 visual representation of how each example TMflow program uses Warp nodes to transition between eachother
Figure 4-5 the expression checked for running the “GoHome” flow under the Gateway in the ‘Main’ TMflow program
As shown in Figure 4-5, if the variable “lastMsgRcvd” within the custom component ConnectARCL is equal to the
string “GoHome” then the program will warp to the program ‘GoHome’.
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Figure 4-7. example ‘Pick’ program Figure 4-8. example ‘Place’ Program
Since the TM robot is responsible for returning control to the LD, in this home routine the TM robot sends a
‘continue’ command and an ‘enableMotorsInstant’ command to allow the LD to continue.
Figure 5-5 x-ray view of the inside of an example system which would be used to transport SMIF pods
The door switch used has a range of about 40mm, which allows for minor error in the home position. When the TM
robot recovers from an E-stop or turns on, there is a slight motion in all joints to capture its current position. There
is no specific pattern to which direction each joint rotates during this motion, therefore, this range allows for
sufficient space for movement of the arm without colliding with the frame.
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Figure 5-1 the MoMa with outriggers extended
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Figure 5-2 graph of the LD-90’s acceptable center of Figure 5-3 graph of the LD-90’s acceptable center of
gravity before tipping occurs (front view)
gravity before tipping occurs (side and isometric views)
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Appendix B – Labelled Exploded View
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# Description
1 TM Robot
2 D40R-SPU Actuator
3 EOA Tool
4 D40R-SPU Switch
5 Sheet_Top
6 Sheet_Right_Side
7 EStop
8 Side Laser Mount
9 EStop Mount
10 Side Laser
11 Sheet_Bottom_Rear
12 Sheet_Front
13 Sheet_Payload
14 Drawer Slide
15 Sheet_Rear
16 TM Control Box
17 Magnetic Latch
18 HMI Panel
19 Mounting Plate
20 Sheet_Bottom_Rear_Left
21 EMO Mount
22 EMO
23 Sheet_Left_Side
24 Mounting Structure
25 LD TopPlate
26 PLC Assembly
27 LD90
28 Antenna
29 Spacer
30 HMI Mount
31 Actuator Mount BRK-14
32 Sheet_L_Bracket_Welded
33 Actuator Mount BRK-03
34 Actuator PA-14P
35 Foot Plate
Table D-1: Reference to the exploded view parts.
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Appendix C – Simplified SISTEMA Report
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