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What is the Finite Element Method?
• The Finite Element Method (FEM) is a computer
Introduction to Finite Elements added mathematical technique for obtaining
approximate numerical solutions to the abstract
and its equations of calculus that predict the response of
Utility in MEMS Design and the physical systems subjected to external
influences.
Manufacturing
ECE Harish Sharma ECE Harish Sharma
Finite Element Method Finite Element Method
ECE Harish Sharma ECE Harish Sharma
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Finite Element Method Finite Element Method
ECE Harish Sharma ECE Harish Sharma
Finite Element Method Finite Element Method
PREPROCESSING
1. Create a geometric model
2. Develop the finite element model
Solid model Finite element model
ECE Harish Sharma ECE Harish Sharma
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Finite Element Method Finite Element Method
FEM analysis scheme
FEM analysis scheme
Step 1: Divide the problem domain into non
overlapping regions (“elements”) connected to each Step 2: Describe the behavior of each element
other through special points (“nodes”) Step 3: Describe the behavior of the entire body by
putting together the behavior of each of the elements
(this is a process known as “assembly”)
Finite element model
ECE Harish Sharma ECE Harish Sharma
Finite Element Method Finite Element Method
FEM solution to mathematical model 2 (plane stress)
Moment at section AA M = 27,500 N cm
Deflection at load δat load W = 0.064 cm
Conclusion: With respect to the questions we posed,
the beam model is reliable if the required bending
moment is to be predicted within 1% and the deflection
is to be predicted within 20%. The beam model is also
highly effective since it can be solved easily (by hand).
What if we asked: what is the maximum stress in the
bracket?
would the beam model be of any use?
POSTPROCESSING: Compute moment at section AA
ECE Harish Sharma ECE Harish Sharma
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Finite Element Method Finite Element Method
Modeling a physical problem
1. The selection of the mathematical model
depends on the response to be predicted.
2. The most effective mathematical model is the
one that delivers the answers to the questions in
reliable manner with least effort.
3. The numerical solution is only as accurate as
the mathematical model.
ECE Harish Sharma ECE Harish Sharma
How does the FEM work? How does the FEM work?
• A problem domain is divided into regions called • Integration using Numerical method:
elements. The collection of elements is called a mesh Example :
• Governing equations are transformed into approximate
algebraic (element) equations.
• Equations are numerically evaluated for each element in Exact solution:
the mesh and assembled based on the element
connectivity.
• Boundary conditions are imposed that modify the system
of equations: value are added to existing terms and
terms are shifted from one side of the equations to the
other side.
• The system of equations is solved.
• Post-processing of the solution provides display in
The integration represent the area under the curve
tabular, graphical or pictorial form.
ECE Harish Sharma ECE Harish Sharma
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How does the FEM work? How does the FEM work?
Integration using numerical methods :
Numerical integration
Scheme 1 :
1. Divide the interval of integration into N sections.
2. Choose a function to approximate the variation of f(x)
in each section, the simplest such function is a constant
function that equals to the value of f(x) at the midpoint
of each section.
3. The product of this constant function and the length of
the section approximate the integration of f(x) over the
section.
4. Summing the products of all sections give an
approximate answer to the integration of f(x) over (-
1,1) • As the number of section increases error decreases.
ECE Harish Sharma ECE Harish Sharma
How does the FEM work? How does the FEM work?
Integration using numerical methods:
Two key steps:
1. Divide the interval of integration.
2. In each sub-interval, choose proper simple
functions to approximate the true function.
Two key features:
1. The numerical result is an approximation to an
• Different functions can be chosen to approximate f(x). exact solution.
2. The accuracy of numerical result depends on
the number of sub-interval and approximate
function.
ECE Harish Sharma ECE Harish Sharma
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How does the FEM work? How can the FEM Help the Design
Engineer?
The FEM offers many important advantages to the design
engineer:
• Easily applied to complex, irregular-shaped objects
composed of several different materials and having
complex boundary conditions.
• Applicable to steady-state, time dependent and eigen
value problems.
• Applicable to linear and nonlinear problems.
• One method can solve a wide variety of problems,
including problems in solid mechanics, fluid mechanics,
chemical reactions, electro-magnetics, biomechanics,
heat transfer and acoustics, to name a few.
ECE Harish Sharma ECE Harish Sharma
How can the FEM Help the Design How can the FEM Help the Design
Engineer?(Cont.) Organization?
• Simulation using the FEM also offers important
• General-purpose FEM software packages are business advantages to the design organization:
available at reasonable cost, and can be readily • Reduced testing and redesign costs thereby
executed on microcomputers, including workstations shortening the product development time.
and PCs. • Identify issues in designs before tooling is committed.
• The FEM can be coupled to CAD programs to facilitate • Refine components before dependencies to other
solid modeling and mesh generation. components prohibit changes.
• Many FEM software packages feature GUI interfaces, • Optimize performance before prototyping.
auto meshers, and sophisticated postprocessors and • Discover design problems before litigation.
graphics to speed the analysis and make pre and • Allow more time for designers to use engineering
post-processing more user friendly. judgment, and less time “turning the crank.”
ECE Harish Sharma ECE Harish Sharma
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MEMS design modes
Difference between Micro electronics
and MEMS Design Process
ECE Harish Sharma ECE Harish Sharma
FEM‐Physical Simulation
Difference between Micro electronics
• Simulation is important ingredient of MEMS
and MEMS Design Process • FEM – Finite Element Method
• Standard method for the simulation of field phenomenon
• Calculation of the behaviour of the physical system based
on discrete models.
• Graphical representation of physical properties
• Most MEMS Structures can be modeled as rods, beams or
plates
• The DOFS can be displacements, Velocities, Electric
• field. Magnetic field, Temperature etc.
• Need Good Optimization tool that is coupled with FEM
model to obtain the optimum design
ECE Harish Sharma ECE Harish Sharma
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Purpose of FEA EXAMPLE: Stresses in a C(T) specimen
• Make development cycle short and cost effective
• To understand behaviors, limits and interactions of
complex processes
• To optimize designs
• For failure analysis
ECE Harish Sharma ECE Harish Sharma
MODELING CAPABILITIES MODELING CAPABILITIES
Microelectronic device reliability
- Prediction of spatial distribution of physical parameters –Fatigue life of compressor components
– Identify critical locations at early stage of design
-Prediction of damage evolution
characteristics
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MODELING CAPABILITIES MODELING CAPABILITIES
– Prediction of composite behavior – Deflection of composite laminates beam
ECE Harish Sharma ECE Harish Sharma
References
• G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan,
K. N. Bhat, V. K. Aatre - Micro and Smart Systems_
Technology and Modeling (2012, Wiley)
• nptel.ac.in › content › storage2 › courses › module4 ›
lec25
• www.fkm.utm.my › ~taminmn ›
SME3033_Sem1_1112_Slides › 02
ECE Harish Sharma
