Light Source Tlsz0001e
Light Source Tlsz0001e
Long Life
High Stability L I G H T
CONTENTS
1 2
Selection Guide by Applications
APPLICATIONS
Hamamatsu light source has been distributing in world wide, and well known for plenty of application besides below figures.
Semiconductor Medical
Wafer surface inspection system Blood analyzer
Mirror
Xenon lamp
Condenser lens
Mirror
Excitation filter
Mirror
Condenser lens
Sample blood
Condenser lens
High sensitivity
image sensor
Fluorescent filter
Condenser lens
Silicon wafer
Environment
Water pollution analysis
Deuterium Lamps
Photodiode Condenser lens Condenser lens Sample (water) Condenser lens Filter Condenser lens Deuterium lamp
TLSOC0051EA
3
Selection Guide by Applications
Applications
UV EXPOSURE SYSTEMS
ON THE WAFER ● SPOT LIGHT
SOURCES
Semiconductor
UV CURING SYSTEMS
UV-LED MODULE
UV INK DRY OR FREEZE ● ● SPOT LIGHT SOURCES
UV-LED MODULE
SOLAR SIMULATORS ●
Information
COLOR SCANNERS ●
COLOR ANALYZERS ● ●
FLUORESCENCE MICROSCOPES ● ●
DNA SEQUENCERS ●
IN-VITRO DIAGNOSIS ●
BLOOD ANALYZERS ● ● ● ●
Medical
FLOW CYTOMETERS ● ●
CAPILLARY ELECTROPHORESIS ● ●
ENDOSCOPES ●
FLUORESCENCE
SPECTROPHOTOMETERS ● ● ● ●
POLARIMETERS ● ●
● ●
Environment
BOD/COD ANALYZERS
LIQUID CHROMATOGRAPHY
WAVELENGTH CALIBRATION ● ● ●
UV / VISIBLE
SPECTROPHOTOMETERS ● ● ●
PHOTOIONIZATION ● VUV LIGHT
SOURCE UNITS
●
logical
WAVELENGTH
Hamamatsu light sources can be broadly divided by radiant spectrum distribution into two groups: one is "broad spectrum
light sources" that cover a wide spectral range from "UV to visible" or "UV through infrared", and the other is "line spectrum
light sources" that emit sharp line spectrum characterized by the metallic elements sealed within the lamp.
(546)
(436)
(577)
10
1
XENON LAMPS (150 W)
0.1
XENON LAMPS (35 W)
XENON FLASH LAMPS (20 W)
DEUTERIUM LAMPS (30 W)
0.01
200 300 400 500 600 700 800 900 1000
WAVELENGTH (nm)
5
Selection Guide by Characteristics
WATTAGE
Light output from a lamp is basically proportional to the input power. However, pulsed lighting can provide a momentary (in
microseconds) higher brightness than the continuous lighting type. This makes pulsed lighting ideally suited for applications
requiring high output power for a short duration. The radiant distribution of lamps must also be taken into account in order to
utilize the optimum emission point with high stability and high output power.
■ INPUT WATTAGE
10 W 100 W 1 kW
35
Xenon Lamps 300
-1
usually increases in 10
10-2
evaluating intensity in
XENON FLASH LAMP (15 W)
units of an extremely
short duration, pulsed
10-3
lighting can momentar- Xenon flash lamps
XENON LAMP (35 W)
ily provide a very in-
tense light output. For several microseconds, this is
10-4
about 1000 times higher than that in continuous
mode lamps. (For more details, refer to our techni-
cal data sheet on Xenon flash lamps.) -5
10
0 20 40 60 80 100
TIME (µs)
6
Selection Guide by Characteristics
STABILITY
Light output stability can be classified into "fluctuation" (short-term stability) and "drift" (long-term stability ). To select
optimum lamps that meet your application, these stability characteristics must be taken into account.
Lamp light output stability is an important factor that affects measurement accuracy and reliability of equipment. To supply
lamps with high output stability, Hamamatsu has made consistent efforts to achieve "ideal electrode construction and positioning
accuracy" and also to develop "optimum power supplies".
LIFE
Lamp life characteristics directly affect maintenance costs of the equipment in which the lamp is installed. In view of this,
Hamamatsu define the lamp life end as the time when the output fluctuation exceeds a specified range (excluding some
types of lamps), in addition to the guaranteed life generally used to define the life end (the time when the light output falls to
a certain point).
■ OPERATION TIME
0 hour 1000 hours 2000 hours 3000 hours 4000 hours 5000 hours 6000 hours
Xenon Lamps
1000 4000
* Hollow Cathode Lamps Life is defined at the operation current and the operation time
Using a lamp with a longer service life leads to the reduction of "maintenance cost and time" and "running cost" of equipment.
Due to unique electrode structures with minimum electrode wear, Hamamatsu lamps feature unprecedented high stability over
extended periods of operating time.
7
Selection Guide by Characteristics
FEATURES
Output
Features Spectral Stability Life
Lamp Features of Lamp Wattage Accessory
Made in Hamamatsu Distribution Fluctuation
(nm) (W) (p-p) (hour)
Lamp Housing
Trigger Socket
• Broad spectrum from
UV to IR
• Color temperature:
Xenon 15000K • Long life: 5000 hours 400 to 5000 Shield Box
• High stability Less than Depends on the
Flash
Lamp
• Pulse light
• Instantaneously high
peak output
Fluctuation (p-p):
1.0 % Typ.
160 to 2000 2 to 60
3% (
repetition rate )
Power Supply
• Low heat
• Point source
Lamp Housing
• Continuous spectrum
• Long life: 3000 hours
Mercury from UV to IR and
• Instantaneous starting
strong line spectra in Less than
Xenon and restarting 185 to 2000 50 to 500 500 to 3000
the UV to visible 2% Power Supply
Lamp • High UV intensity
• Point source
• High stability:
0.005 % (Typ.) Lamp Housing
• Broad spectrum in UV - L2D2®, X2D2®, S2D2®
range • Long life:
Deuterium • High stability: 4000 hours - L2D2® 0.005 %
115 to 400 5 to 150 Typ. 2000 / 4000 Power Supply
Lamp 0.005 % typ. • Stationary emission point
• Point source ensures high accuracy
(Flange type)
• Less variation of intensity
• 66 types of single 5% ——
Hollow to 20 % (Depends on
• Metal-vapor discharge element lamps and 11 Less than
Cathode lamp types of multi-element 193 to 852
10
(Depends the type and ——
Lamp lamps on the operating
element) condition)
8
SUPER-QUIET XENON LAMPS
Semiconductor Information Medical Environment Analysis
TLSXF0024
10 % 1.0 %
300 W
10
150 W 10 MINUTES 10 MINUTES
10 % 1.0 %
0.01 10 % 1.0 %
200 300 400 500 600 700 800 900 1000
100 100
90 90
80 80
70 70
60 60
50 50
40 40
30 30
LONG LIFE LAMP LONG LIFE LAMP
20 20
CONVENTIONAL TYPE CONVENTIONAL TYPE
10 10
0 0
0 500 1000 1500 2000 2500 3000 0 500 1000 1500 2000 2500 3000 3500 4000
9
XENON LAMPS
■ Characteristics
Output Stability Operating Life
Lamp Arc Dimen- Spectral Lamp Lamp A
Window Fluctuation
Type No. Rating Length sional Distribution Current Voltage Drift (p-p) Guaranteed Average
Material Typ. Life Life
Outline Max.
(W) (mm) (nm) (A dc) (V dc) (%/h) (%) (h) (h)
L2173 Fused Silica 185 to 2000
35 1.0 1 3.5±0.2 11 ±0.5 1.0 1000 2000
L2193 Ozone-free Silica 240 to 2000
L2174 1
L2174-01 1.3 2 5.4±0.5 15 1000 2000
L2174-02 3
Fused Silica 185 to 2000 ±0.5 1.0
L10725 1
L10725-01 1.0 2 5.7±0.3 13.5 2000 3000
L10725-02 3
L2194 75 1
L2194-01 1.3 2 15
5.4±0.5 1000 2000
L2194-02 3
L2194-11 2 Ozone-free Silica 240 to 2000 13 ±0.5 1.0
L10726 1
1.0
L10726-01 2 5.7±0.3 13.5 2000 3000
L10726-02 3
L11307 1
Fused Silica 185 to 2000
L11307-01 2
100 1.3 7.0±0.5 15 ±0.5 1.0 1500 2500
L9289 1
Ozone-free Silica 240 to 2000
L9289-01 2
L2175 Fused Silica 185 to 2000
2.5 7.5±0.5 19 1200 2500
L2195 Ozone-free Silica 240 to 2000
L2273 (GS Type)B Fused Silica 185 to 2000
150 4 ±0.5 1.0 1800 3000
L2274 (GS Type)B Ozone-free Silica 240 to 2000
2.0 8.5±0.5 17
L11033 Fused Silica 185 to 2000
3000 4000
L11034 Ozone-free Silica 240 to 2000
L2479 Fused Silica 185 to 2000
300 3.0 5 15.0±1.0 20 ±0.5 1.0 1000 2000
L2480 Ozone-free Silica 240 to 2000
AThe life end is defined as the time at which the radiant intensity falls to 50 % of its initial value or when the output fluctuation (p-p) exceeds 1.0 %. BGS (short gap) type
UP UP UP
9 9 9
(L2194-11, L10725-01, L10726-01:
(L10725-02, L10726-02:
82
82
82
(L10725, L10726:
37.0 ± 0.5
36.85 ± 0.50)
37.0 ± 0.5
37.0 ± 0.5
36.85 ± 0.50)
36.85 ± 0.50)
9 9
7.5
13
13
11
METAL BASE
2 METAL BASE TLSXA0101EA
2 METAL BASE TLSXA0102EA M2.3 TLSXA0007ED
UP
UP
12 13
20 26
150 MAX.
175 MAX.
125
150
58.0 ± 0.5
65.0 ± 0.5
12 13
15
20
METAL BASE
METAL BASE
M4 M5
TLSXA0103EA TLSXA0104EA
10
SUPER-QUIET XENON FLASH LAMPS
Semiconductor FA Information Medical Environment Analysis
■ Spectral Distribution (20 W Type) ■ Flash Pulse Waveform (60 W type) [Typ.]
TLS B0014EA TLSXB0084EA
1.2 100
Operating conditions
Main voltage: 1000 V
1.0 Main capacitor: 1.0 µF 1 J/flash
IRRADIANCE (µW·cm-2 ·nm-1)
80
Repetition rate: 40 Hz
RELATIVE INTENSITY (%)
Borosilicate glass
0.8 UV glass
60 FWHM
Sapphire glass
Fused silica 2.90 µs
0.6 (Approx.)
40 0.15 J/flash
0.4 FWHM
1.75 µs
20
(Approx.)
0.2
0
0
200 300 400 500 600 700 800 900 1000 1100
Related Power supplies, trigger sockets, shield box and cooling jacket are also available.
Products Please refer to the individual catalog for details.
11
XENON FLASH LAMPS
■ Characteristics
A A
Recom- Max. Max. Repeti- Output Guaranteed
Dimen- Stability Suitable
mended Trigger Average Average tion Life
Type No. Type Arc sional Bulb Window Spectral Output D Trigger
Supply Voltage Power Energy Rate Min.
Size Outline Shape Material Distribution Fluctuation Socket
Voltage p-p [Continuous] per Flash Max. Max. (Number
(mm) (nm) (V dc) (kV) (W) (J/Flash) (Hz) (%) of Flashes)
L4644 1-a Hemisphere
UV Glass 185 to 2000
L4646 2-a Flat 700 to E2418
3.0 5 to 7 10 0.1 100 3D 1.0 × 109
L4645 1-a Hemisphere 1000 E6188
Borosilicate Glass 240 to 2000
L4647 10 W 2-a Flat
L4640 HQ Type 1-b Hemisphere
UV Glass 185 to 2000
L4642 2-b Flat 700 to E2442
1.5 5 to 7 10 0.1 100 3.5 D 1.0 × 109
L4641 1-b Hemisphere 1000 E6186
Borosilicate Glass 240 to 2000
L4643 2-b Flat
L2358 Synthetic Silica 160 to 2000
15 W 700 to E2361
L2359 3.0 3-b Flat UV Glass 185 to 2000 5 to 7 15 0.15 100 2.5 D 1.2 × 109
SQ Type 1000 Series
L2360 Borosilicate Glass 240 to 2000
L4633 15 W 4 Converging 700 to
1.5 Borosilicate Glass 240 to 2000 5 to 7 15 0.15 100 5D 5.0 × 108 E4370-01
L4634 Built-in Reflector Type —F Collimating 1000
L11957 Flat UV Glass 185 to 2000
3.0 5-a E10978
L11956 Flat Borosilicate Glass 240 to 2000 700 to
20 W Type 5 to 7 20 0.5 300 2 %CV E 1.0 × 108
L11937 Flat UV Glass 185 to 2000 1000
1.5 5-b E10977
L11936 Flat Borosilicate Glass 240 to 2000
L11967 Flat C UV Glass 185 to 2000
3.0 5-a E10978
L11966 20 W Flat C Borosilicate Glass 240 to 2000 700 to
5 to 7 20 0.5 300 2 %CV E 1.0 × 108
L11947 Built-in Reflector Type Flat C UV Glass 185 to 2000 1000
1.5 5-b E10977
L11946 Flat C Borosilicate Glass 240 to 2000
L6604 Borosilicate Glass 240 to 2000
60 W Type Flat
L6605 Sapphire Glass 190 to 2000 700 to
3.0 6 5 to10 60 1 60 3 BD 8.0 × 107 E6647
L7684 60 W Borosilicate Glass 240 to 2000 1000
Flat C
L7685 Built-in Reflector Type Sapphire Glass 190 to 2000
A Measured with supply voltage of 1000 V, main discharge capacitor of 0.1 µF, repetition rate of 50 Hz and wavelength of 400 nm.
B Measured with supply voltage of 1000 V, main discharge capacitor of 2 µF, repetition rate of 10 Hz and wavelength of 400 nm.
C Built-in reflector
(Max. output – Min. output) Light output standard deviation
D Output stability (%) = × 100 E Light output stability (%CV) = × 100
Average output Average light output
F Please refer to the individual catalog for detailed information.
1 L4644, L4645, L4640, L4641 2 L4646, L4647, L4642, L4643 3 L2358, L2359, L2360
26 ± 1
20 ± 1
20 ± 1 3.0
L
L
19.5 MAX.
30 MAX.
19.5 MAX.
19.0 ± 0.5
6.5 MAX. 12.7 ± 0.5
L L
a 3.0 a 3.0
7.5 MAX.
b b
7.5 MAX.
1.5 1.5
12.2 MAX.
9 MAX.
14.3 ± 0.15
34.8 ± 0.5
34.8 ± 0.5
28.9 ± 0.3
θ: 17°
L
ANODE
60 CATHODE REFLECTOR* REFLECTOR*
L
a 3.0 * L1194X, L1196X only * L7684, L7685 only
b 1.5
TLSXA0003ED TLS A0011EA TLSXA0049EC
12
SUPER-QUIET MERCURY XENON LAMPS
Semiconductor FA Information Medical Environment
(546)
365
(405)
(436)
MERCURY-XENON
IRRADIANCE (µW/cm2 ·nm-1) at 50 cm
(577)
MERCURY LAMP
(200 W)
1
436
40
546
0.1
30
297
0.01
405
577
20
0.001
200 300 400 500 600 700 800 900 1000
WAVELENGTH (nm)
248
10
0
200 300 400 500 600
WAVELENGTH (nm)
13
MERCURY XENON LAMPS
■ Characteristics
Output Stability Operating Life
Lamp Arc Dimen- Spectral Lamp Lamp A
Type No. Window Fluctuation
Rating Length sional Material Distribution Current Voltage Drift (p-p) Guaranteed Average
Outline Typ. Max. Life Life
(W) (mm) (nm) (A dc) (V dc) (%) (%) (h) (h)
L2421 50 1.0 1 Fused Silica 185 to 2000 3.5±0.2 14 ±0.5 2.0 500 1000
L2481 2
L2481-01 75 1.0 3 Fused Silica 185 to 2000 5.4±0.5 14 ±0.5 2.0 500 1000
L2481-02 4
L2422 2
L2422-01 3 Fused Silica 185 to 2000
1.3
L2422-02 4 500 1000
100 5.5±0.5 18 ±0.5 2.0
L7046 2 Ozone-free Silica 240 to 2000
L8029
0.8 3 Fused Silica 185 to 2000
L8029-01 1000 2000
L2482 Fused Silica 185 to 2000
150 1.7 5 7.5±0.5 20 ±0.5 2.0 1000 2000
L7047 Ozone-free Silica 240 to 2000
L2423 Fused Silica 185 to 2000
200 2 5 8.0±0.5 24 ±0.5 2.0 1000 2000
L2570 Ozone-free Silica 240 to 2000
L8706 250 1.8 6 Fused Silica 185 to 2000 8.5±0.5 27 ±0.5 3.0 2000 3000
L2483 Fused Silica 185 to 2000
350 2.5 7 14.0±1.0 25 ±0.5 2.0 500 1000
L2917 Ozone-free Silica 240 to 2000
L8288 500 3.0 7 Fused Silica 185 to 2000 20.0±1.0 25 ±0.5 2.0 1000 2000
AThe life end is defined as the time at which the radiant intensity falls to 50 % of its initial value or when the output fluctuation (p-p) exceeds 2.0 % (3.0 % for 250 W type L8706).
3 L2481-01, L2422-01,
1 L2421 2 L2481, L2422, L7046 4 L2481-02, L2422-02
L8029/-01
2 M2.3
2 2
13
11
13
13
UP UP UP
UP
7.5 9 9 9
(L8029, L8029-01: 36.75 ± 0.50)
12 14 14 14
95 MAX.
90 MAX.
90 MAX.
90 MAX.
82
82
82
82
37.0 ± 0.5
37.0 ± 0.5
37.0 ± 0.5
37.0 ± 0.5
9 7.5 9
7.5
13
13
11
11
M4 M5 M5
20
15
20
UP UP
UP
12 13
13
153 MAX.
175 MAX.
125
125
150
57.9 ± 0.5
65.0 ± 0.5
12 13
13
15
20
20
METAL BASE
METAL BASE
M4 M5 METAL BASE
M5
TLSXA0103EA TLSXA0092EB TLSXA0104EA
14
DEUTERIUM LAMPS (L2D2® LAMPS / X2D2® LAMPS / S2D2® LAMPS)
Semiconductor Medical Environment Analysis
15
10
SYNTHETIC SILICA 5
(L9519, L10904) 0
-5
-10
0.1 -15
-20
0 100 200 300 400 500 600 700 800
100 s/div.
TLSOB0096EA
UV GLASS
(L9518, L10804) 0h 20
15
ABS (10-5 A.U.)
0.01 10
5
0
-5
2000 h -10
-15
-20
0 100 200 300 400 500 600 700 800
0.001 100 s/div.
160 200 240 280 320 360 400
WAVELENGTH (nm)
S2D2® Module
The S2D2 compact deuterium lamp is a UV point light source with a drastically
reduced size compared to ordinary deuterium lamps.
This compact size of the S2D2 module makes it easy to install in all types of
equipment. The dedicated lamp housing and power supply are designed to ex-
tract maximum performance from the S2D2 lamp.
■ Usage Example
Power Supply for S2D2® Lamp
●Installation Example ●Customized Example * L10671P
S2D2® Lamp
L10671D
L10671P Lamp Housing for S2D2® Lamp
L10671D L10671H
PC BOARD
L10671H
* Lamp housing is supplied with attached cover.
15
DEUTERIUM LAMPS
■ Characteristics
A Output Stability B C Filament Ratings
at 230 nm Required Tube
Dimen- Guaranteed Discharge Anode Drop Warm-up Operating
Spectral Aperture Fluctuation Starting
Series Type No. sional
Distribution Diameter Drift (p-p) Life Voltage Current Voltage Voltage Current Time Voltage Current
Outline Max. Typ. (at 230 nm) Min. Typ. Typ. Min. Typ.
(nm) (mm) (%/ h) (%) (h) (V dc) (mA dc) (V dc) (V dc, ac) (A dc, ac) (s) (V dc) (A dc)
Standard type
L6565 1 2.5±0.25 4 1.0±0.1 1.8
L2D2-4000 185 to 400 1.0 ±0.3 0.005 4000 350 300±30 80 20
L6566 —E 3.0±0.3 5 0 to 1 0 to 1.8
L6301 1
1.0±0.1 1.8
L6301-50 5 185 to 400 4
0.5 ±0.3 0.005 2000 400 2.5±0.25
L6303 1 1.7±0.2 3.3
L2D2-2000 300±30 80 20
L7296 2-a 160 to 400 1.2 7.0±0.5 1
L7292 2-b D 10±1 0.8 2.5 to 6.0 0.3 to 0.6
115 to 400 1.0 — — 2000 350
L7293 2-b 2.5±0.25 4 1.0±0.1 1.8
L9518 3 185 to 400 90
X2D2 L9519 4-a 160 to 400 0.5 ±0.3 0.005 2000 400 300±30 2.5±0.25 4 20 1.7±0.2 3.3
85
L9841 4-b 115 to 400
See-through Type
L6999 1
185 to 400
L2D2-2000 L6999-50 5 0.5 ±0.3 0.005 2000 400 300±30 80 2.5±0.25 4 20 1.0±0.1 1.8
L9030 2-a 160 to 400
L10804 3 185 to 400 90
X2D2 0.5 ±0.3 0.005 2000 400 300±30 2.5±0.25 4 20 1.7±0.2 3.3
L10904 4-a 160 to 400 85
Compact type
S2D2 L10671D 6 185 to 400 1.0 ±0.25 0.005 1500 250 30±2 135 4.2±0.2 0.6 25±5 3.5±0.2 0.5
ALamps with an aperture of 0.5 mm diameter are high brightness types. These lamps provide 1.4 times higher brightness than standard lamps with an aperture of 1.0 mm diameter.
BThe lamp life end is defined as the point when the light output falls to 50 % of its initial value at 230 nm or when output fluctuation (p-p) exceeds 0.05 %.
CA trigger voltage higher than this value is required to start lamp discharge. For reliable lighting, an application of 500 V to 600 V is recommended.
DOperating life depends on environmental conditions (vacuum atmosphere). It is recommended that these lamps be used in an oil-free environment.
EPlease refer to the individual catalog for detailed information.
7 MAX.
30±1 +0.15
3 + 0.05
ARC POINT
15.0±0.5
ARC POINT
68±2
68±2
22 - 0.1
59 MAX.
+0
42±2
50
42±2
10
32
B 2- 3.3
ARC POINT
5
ARC POINT
22±0.05 22±0.05
9 MAX.
AUXILIARY
160±10
IGNITION
160±10
20
+0
22.0 - 0.1
POINT
+0
20.5 MAX.
ARC
68±2
50
10
POINT ARC
15±0.5
32
2- 3.3
37
B POINT
7.5
A
5
+0.15
3 +0.05
15
5
6
9 MAX.
9- 0.7
DEVICE
LIGHT OUTPUT LIGHT OUTPUT
160±10
160±10
36° 36°
PCD10.72 ± 0.2
CONNECTOR (MOLEX) CONNECTION
20
6
4 A ●CONNECTION
18°
18°
7
9
A 5: AUXILIARY ELECTRODE
FILAMENT : BLUE 9- 0.7 9: GND
a 14±1 FILAMENT : BLUE 36° 36° 2, 4, 6, 8: N.C.
b 25±1 ANODE : RED
TLSOA0106ED TLSOA0051ED B TLSOA0109EA
16
HOLLOW CATHODE LAMPS
Analysis Environment
TLSOF0133
■ Single-Element Lamps: L233 Series (38mm dia.), L2433 Series (for S-H background correction)
Type No. Analysis Lines Type No. Analysis Lines Type No. Analysis Lines
Elements Elements Elements
(suffix) (nm) (suffix) (nm) (suffix) (nm)
'
Ag Silver -47NB
328.07 ∗ Hg Mercury -80NU
253.65 ∗ Rh Rhodium -45NB
343.49 ∗
338.28
'
Al Aluminum -13NB
309.27 ∗ '
Ho Holmium -67NB
410.38 ∗ '
Ru Ruthenium -44NB
349.89 ∗
396.15 416.30
'
As Arsenic -33NQ
193.70 ∗ In Indium -49NB
303.94 ∗ '
Sb Antimony -51NQ
217.58 ∗
197.20 325.61 231.15
'
Au Gold -79NQ
242.80 ∗ Ir Iridium -77NQ
208.88 ∗ Sc Scandium -21NB
390.74
267.59 266.47 391.18 ∗
'
B Boron -5NQ
249.68 ∗ '
K Potassium -19NB
766.49 ∗ '
Se Selenium -34NQ
196.03 ∗
249.77 769.90
'
Ba Barium -56NB
553.55 ∗ '
La Lanthanum -57NB
357.44 '
Si Silicon -14NU
251.61 ∗
550.13 ∗ 288.16
'
Be Beryllium -4NQ
234.86 ∗ '
Li Lithium -3NB
610.36 '
Sm Samarium -62NB
429.67 ∗
670.78 ∗ 484.17
'
Bi Bismuth -83NQ
223.06 ∗ Lu Lutetium -71NB
328.17 '
Sn Tin -50NQ
224.61 ∗
306.77 331.21 ∗ 286.33
'
Ca Calcium -20NU
422.67 ∗ '
Mg Magnesium -12NU
285.21 ∗ '
Sr Strontium -38NB
460.73 ∗
'
Cd Cadmium -48NQ
228.80 ∗ '
Mn Manganese -25NU
279.48 ∗ Ta Tantalum -73NU
271.47 ∗
403.08 ∗ 275.83
'
Co Cobalt -27NU
240.73 ∗ '
Mo Molybdenum -42NB
313.26 ∗ Tb Terbium -65NB
431.88
346.58 320.88 432.64 ∗
'
Cr Chromium -24NB
357.87 ∗ '
Na Sodium -11NB
589.00 ∗ '
Te Tellurium -52NQ
214.27 ∗
425.44 589.59
Cs Cesium -55NB
852.11 ∗ Nb Niobium -41NB
334.91 ∗ '
Ti Titanium -22NB
364.27 ∗
405.89 365.35
'
Cu Copper -29NB
324.75 ∗ Nd Neodymium -60NB
463.42
Tl Thallium -81NU
276.78 ∗
327.40 492.45 ∗ 377.57
'
Dy Dysprosium -66NB
404.59 ∗ '
Ni Nickel -28NQ
232.00 ∗ Tm Thulium -69NB
371.79 ∗
421.17 341.48 410.58
'
Er Erbium -68NB
400.79 ∗ Os Osmium -76NU
290.90 ∗ '
V Vanadium -23NB
306.64
415.11 305.86 318.40 ∗
'
Eu Europium -63NB
459.40 ∗ '
Pb Lead -82NQ
217.00 ∗ W Tungsten -74NU
255.14 ∗
462.72 283.30 400.87
'
Fe Iron
■
-26NU
248.33 ∗ '
Pd Palladium -46NQ
244.79 ∗ '
Y Yttrium -39NB
410.23 ∗
371.99 247.64 412.83
'
Ga Gallium -31NU
287.42
Pr Praseodymium -59NB
495.13 ∗ '
Yb Ytterbium -70NB
346.43
294.36 ∗ 513.34 398.79 ∗
Gd Gadolinium -64NB
407.87 '
Pt Platinum -78NU
265.95 ∗ '
Zn Zinc -30NQ
213.86 ∗
422.58 ∗ 299.80 307.59
'
Ge Germanium -32NU
265.16 ∗ Rb Rubidium -37NB
780.02 ∗ Zr Zirconium -40NB
360.12 ∗
794.76 468.78
'
Hf Hafnium -72NU
286.64 ∗ Re Rhenium -75NB
346.05 ∗ D2 Deuterium -1DQ
240.00
307.29 346.47 (peek)
17
∗
" " mark indicates the maximum absorption wavelength. "■" mark indicates that the final suffix will be “NQ” instead of “NU” in the case of the L2433 series.
"'" mark indicates L2433 series element.
APPLIED PRODUCTS
40
■ Applications Before irradiation After irradiation
●Surface reforming with light ●Dry cleaning of gold-coated mirror for laser 20
Bonding pre-processing
Adhesion improvement during
0
printing 150 175 200 225 250 275 300
100 100
●Compact 60 60
50 50
●Easy control from your PC 40 40
30 30
20 20
■ Applications 10
0
10
0
350 400 450 500 550 600 650 700 750 800 850 350 400 450 500 550 600 650 700 750 800 850
●Light stimulus to living body WAVELENGTH (nm) WAVELENGTH (nm)
●Spectral characteristic evaluation * Each graph shows emission spectra at a wavelength interval of 40 nm.
of devices
●Optical property evaluation of ■ Connection Example
Light guide
materials (sold separately)
Power
supply
●Illumination Uniform irradiation lens
(AC)
or condenser lens
(sold separately) RS-232C cable
(sold separately)
Opto-Spectrum Generator
Object PC (sold separately)
18
APPLIED PRODUCTS
■ Application Examples
●UV curing for CD/DVD pick up ■ Spectral Distribution
TLSXB0144EA
100
60
●UV curing for FPD manufacturing
Alignment of LCD Seal of LCD Coating for protection
of flexible circuit 40
Glue port
Panel Glass
LCD 20
Seal port
0
UV curing Cut line LCD TAB 200 300 400 500 600 700 800
WAVELENGTH (nm)
80
50 ■ Applications
■ Applications 40 ●UV curing
●Compact 30 ●High output UV irradiation
●High stability and high output 20
●Low cost 10
0
300 350 400 450
WAVELENGTH (nm)
60
50
40
30
20
10
0
0 5000 10000 15000 20000
MIRROR
GRATING
X2D2® UV-VIS 1
FIBER LIGHT SOURCE
0.1
MIRROR 200 300 400 500 600 700 800 900 1000 1100
IMAGE SENSOR TLSOC0048EA WAVELENGTH (nm)
0.8
1
USB CABLE
0.6 3
0.4
Times
S2D2® UV-VIS 0.1
LIGHT GUIDE
FIBER LIGHT SOURCE 0.2 A7969-08AS
CORE DIAMETER= 0.8 mm
LIGHT GUIDE
0 A7969-08AS
200 202 204 206 208 210 212 214 216 218 220 CORE DIAMETER= 0.8 mm
QUARZ CELL
WAVELENGTH (nm) 0.01
200 300 400 500 600 700 800 900 1000 1100
WAVELENGTH (nm)
20
APPLIED PRODUCTS
large areas due to their limited irradiation angle. The 20 10° ■ Applications
L12542 solves this problem and efficiently neutral- 0 0° ANGLE ●Dechucking of electrostatic chunks
izes large areas in a vacuum. -20 -10° ●Semiconductor manufacturing equipment
-20°
●LCD manufacturing equipment
■ Features -40
-60
-30°
●Organic EL manufacturing equipment
●Large irradiation(neutralizing) area ●Hard disk manufacturing equipment
●Highly efficient ion generation in vacuum -80
●Film manufacturing equipment
●No air flow needed -100
450
cooled operation by a specially designed 400
housing. This feature makes it much 350
H2D2 Lamp
CONVENTIONAL MODEL
■ Applications
more convenient and easy to use than or-
300
X2D2 Lamp
●Semiconductor Inspection
dinary water-cooled lamps. L2D2 Lamp ( 0.5 mm)
●Compact
●Spectral Distribution: REDUCED-PRESSURE
RELATIVE IRRADIANCE (%)
80
ATMOSPHERE
115 nm to 400 nm
■ Applications 60
●Electrostatic Remover
40
●VUV Spectrophotometer
●Photoionization
●UV Resistance Testing of S2D2® VUV 20
LIGHT SOURCE
Various Material UNIT
●Excitation Light Source
0
100 120 140 160 180 200 220 240 400
21
APPLIED PRODUCTS
■ Applications 1
●Light level control of light source
●Sensitivity control of optical sensor CONVENTIONAL HALOGEN LAMP
0.1
●Light intensity measurement and studies of photoreactions CALIBRATED DEUTERIUM LIGHT SOURCE
L7820-02 (200 nm to 400 nm)
(Light resistance, light curing, etc.)
●Quality control of photometric equipment 0.01
WAVELENGTH (nm)
CAUTIONS AND
WARRANTY
1. These lamps radiate strong UV rays which are harmful to the eyes and skin. Do not
look directly into the lamp or allow the light rays to directly strike the skin. Always
wear protective glasses or other protective gear when operation.
2. The bulbs of some lamps become extremely hot during operation. Do not touch them
with bare hands or bring the hot lamp bulbs close to flammable material.
3. Do not subject these lamps to mechanical vibration or shock, as this type of treat-
ment can cause the stability to deteriorate.
4. Before operating the lamp, wipe the bulb and/or window with cloth moistened with al-
cohol or acetone, otherwise dirt or contaminant on the window may cause a signifi-
cant drop in UV transmittance. To prevent such contamination on the window, avoid
touching it with your bare hands.
5. Lamps use high voltages, so take sufficient care to avoid electrical shocks.
6. Hamamatsu lamps come with a warranty valid for one year from the date of delivery.
The warranty is limited to replacement of the lamp. The warranty shall not apply,
even within this one year period, to cases where the operating time of the lamp ex-
ceeds the guaranteed life, or in cases where trouble or failure has been encountered
as a result of natural calamity, accident, or misuse.
* For more details, refer to the technical data sheet for each lamp.
●WHEN SCRAP When scrap the product, please follow the appropriate disposal regulation for wasted
products, if any, of the country/state/region/province in use, or pass to those who can
THE PRODUCT handle the disposal at proper manner like approved/licensed.
Further detail can be obtained from technical literature or instruction manual provided
with each product, if any. Any question may arise, feel free to contact at nearby our of-
fice shown on the last page.
22
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan
Telephone: (81)539/62-5248, Fax: (81)539/62-2205
www.hamamatsu.com