LOW-ΔP-FLOW

Mass Flow Meters/Controllers for

low pressure drop or corrosive gas service

> Introduction
Bronkhorst High-Tech B.V., the European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has more than 35 years experience in designing and manufacturing
precise and reliable measurement and control devices. With a wide
range of instruments, Bronkhorst offers innovative ­solutions for
many different applications in many different markets.
The instruments are made to customers’ specification, in various
styles, suitable for use in laboratory, industrial and hazardous
areas, in such diverse applications as semiconductor and analytical
installations, to name but two.

> LOW-ΔP-FLOW series for low pressure

drop or corrosive gases
In a number of applications for measuring and controlling gas flows
there is only little differential pressure available and/or a­ llowable.
These are the applications for which Bronkhorst d ­ eveloped the > Mass flow control with low differential
LOW-ΔP-FLOW series, in which the flow resistance is minimised by using pressure
a large bore capillary (thermal bypass sensor) in combination with a The control of mass flow with small pressure difference comprises
cylindrical flow splitter (­laminar flow element). Based on this concept, the LOW-ΔP-FLOW Mass Flow Controllers in compact construction
mass flow ­capacities between 0…10 mln/min and 0…1000 m3n/h can (model series F-200/201/202). The integrated proportional,
be measured. At a flow up to 2 ln/min a pressure drop of less than 1 mbar ­electromagnetic control valves of these MFC’s have extremely fast
is required. and smooth control characteristics. Depending on the operating
properties, the maximum flow in these models is 1…50 ln/min
Furthermore the larger flow channels minimise the risk of clogging air-equivalent.
and facilitate the cleaning and purging of these LOW-ΔP-FLOW
instruments, which will contribute to a significantly longer lifetime For the control of higher flow rates at very low differential pressures
when the instruments are used on corrosive gas service. All fluid Bronkhorst High-Tech have devised special control valves with
wetted parts are of electro-polished stainless steel. Optionally the pressure compensation bellows (series F-004). These control
flow meter body, sensor and flow element can be supplied in valves are close-coupled to the flow meter while the electric
Hastelloy or Monel. PI-control function is an integral part of the flow meter. This F-004
valve has proven to be an excellent alternative to large, slow and
> For laboratory or industrial conditions expensive servo driven valves.
The LOW-ΔP-FLOW series are derived from the laboratory style
EL-FLOW series, however they can also be supplied with a rugged > LOW-ΔP-FLOW features
IP65 (dust and waterproof) IN-FLOW housing, suitable for industrial u very low pressure drop
environments. The latter are also ATEX Category 3, approved for u suitable for corrosive gases
use in Zone 2 hazardous areas. In addition to the standard analog u wetted parts: electro-polished stainless steel; other on request
I/O-signals and the RS232 connection, there is the possibility of u also available with IP65 housing, ATEX approval Cat.3, Zone 2
integrating an interface board with DeviceNetTM, PROFIBUS DP, u analog and digital (fieldbus) communication
EtherCAT®, PROFINET, Modbus or FLOW-BUS protocol. u alarm and counter functions
> Technical specifications > Models and flow ranges (based on Air)

Measurement / control system Mass Flow Meters (MFM)

Accuracy (incl. linearity) : ± 1% FS (of Full Scale) Model min. flow max. flow
(based on actual calibration) F-100D/F-100DI 0,2…10 mln/min 0,44…22 mln/min
Turndown : 1 : 50 (2 … 100%) F-101D/F-101DI 0,42…21 mln/min 0,042…2,1 ln/min
Repeatability : < 0,2% Rd (of Reading) F-101E/F-101EI 0,028…1,4 ln/min 0,24…12 ln/min
Settling time (controller) : standard: 2…3 seconds F-102E/F-102EI 0,17…8,5 ln/min 1…50 ln/min
Control stability : < ±0,1% FS (typical for 1 ln/min N2) F-103E/F-103EI 0,9…45 ln/min 4…200 ln/min
Operating temperature : -10…+70°C for ATEX Cat.3 0... 50°C F-106Z/F-107Z 0,2…10 m3n/h 20…1000 m3n/h
Max. operating pressure : 10 bar
Temperature sensitivity : 0,1% FS/°C; Mass Flow Controllers (MFC)
Pressure sensitivity : 0,1%Rd/bar typical N2 Model min. flow max. flow
Leak integrity : tested < 2 x 10-9 mbar l/s He F-200DV/F-200DI 1)
0,2…10 mln/min 0,44…22 mln/min
Mounting position : horizontal F-201DV/F-201DI 1)
0,42…21 mln/min 0,042…2,1 ln/min
Warm-up time : 30 min. for optimum accuracy; F-201EV/F-201EI 1)
0,028…1,4 ln/min 0,24…12 ln/min
2 min for accuracy ± 2% FS F-202EV/F-202EI 1)
0,17…8,5 ln/min 1…50 ln/min

Mechanical parts 1)
Kv-max = 6,6 x 10-2
Material (wetted parts) : stainless steel, other on request
Process connections : compression type or face seal Control Valve series F-004
couplings; wafer type on series F-106; F-004AC/F-004AI F-004BI
DIN or ANSI flanges on series F-107 Kv-value 0,3 1,0
Seals : standard: Viton® Max. operating press ure 10 bara 10 bara
options: EPDM, Kalrez (FFKM) ®
Min. ΔP (approx.) 1 mbard 1 mbard
Ingress protection (housing) : IP40 or IP65 Max. ΔP 5 bard 5 bard
Max. power (at 15 Vdc) 3,5 Watt 3,5 Watt
Electrical properties Protection class F-004AC: IP40 IP65
Power supply : +15…24 Vdc F-004AI: IP65
Max. power consumption : Supply at voltage I/O at current I/O
Meter: 15 V 95 mA 125 mA
24 V 65 mA 85 mA
Controller: 15 V 290 mA 320 mA
24 V 200 mA 215 mA
Extra for fieldbus: PROFIBUS DP: add 53 mA (at 15 V) or 30 mA (at 24 V)
(if applicable) EtherCAT® : add 66 mA (at 15 V) or 41 mA (at 24 V)
PROFINET : add 77 mA (15 V supply) or 48 mA (24 V supply)
DeviceNetTM: add 48 mA (at 24 V)
Analog output/command : 0 ...5 (10) Vdc or 0 (4)…20 mA
(sourcing output)
Digital communication : standard: RS232
options: PROFIBUS DP, DeviceNetTM, EtherCAT®,
Modbus-RTU/ASCII, PROFINET, FLOW-BUS
Electrical connection IP40 configuration
Analog/RS232 : 9-pin D-connector (male);
PROFIBUS DP : bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
DeviceNetTM : 5-pin M12-connector (male);
Modbus/FLOW-BUS : RJ45 modular jack
EtherCAT®/PROFINET : 2 x RJ45 modular jack (in/out)
Electrical connection IP65 configuration Models F-004BI and F-004AC bellows operated control valves
Analog/RS232 : 8 DIN (male);
PROFIBUS DP : bus: 5-pin M12 (female);
power: 8 DIN (male)
DeviceNetTM : 5-pin M12 (male)
Modbus/FLOW-BUS : 5-pin M12 (male)

Technical specifications subject to change without notice.

> Conversion factor calculations for model
selection

To select the right model for other gases than Air, we have to carry
out two calculations:

∅vn gas
1. ∅vn Air =
conversion factor

∅vn gas
2. ∅vn Air =
viscosity factor

The highest flow rate calculated determines the flow capacity.

Example: Freon-22, 1 ln/min

Conversion factor = 0,49 (see table below)
Viscosity factor = 0,34 (see table below)

1. ∅vn Air = 1/0,49 = 2,04 ln/min

2. ∅vn Air = 1/0,34 = 2,94 ln/min

Highest flow rate = 2,94 ln/min so we can select model F-201EI LOW-ΔP-FLOW Mass Flow Controller, IP65 configuration
F-101E or F-101EI MFM resp. F-201EV or F-201EI MFC.

> Conversion factors and viscosity factors

Name A B C Name A B C Name A B C

Acetylene (ethyne) C2H 2 0,62 0,61 Ethylchloride C2H5Cl 0,44 0,31 Molybdenum hexafluoride MoF6 0,23 0,16
Air Air 1,00 1,00 Fluorine F2 0,93 0,96 Mono-ethylamine C 2H 7N 0,38 0,32
Allene (Propadiene) C 3H 4 0,46 0,38 Freon-11 CCl3F 0,36 0,22 Monomethylamine CH5N 0,55 0,46
Ammonia NH3 0,79 0,87 Freon-113 C2Cl3F3 0,22 0,14 Neon Ne 1,40 1,86
Argon Ar 1,40 1,12 Freon-1132A C 2H 2F 2 0,47 0,39 Nitric oxide NO 0,97 0,98
Arsine AsH3 0,72 0,48 Freon-114 C2Cl2F4 0,24 0,16 Nitrogen N2 1,00 1,00
Boron trichloride BCl3 0,45 0,27 Freon-115 C2ClF5 0,25 0,18 Nitrogen dioxide NO2 0,75 0,57
Boron trifluoride BF3 0,56 0,47 Freon-116 C 2F 6 0,26 0,21 Nitrogen trifluoride NF3 0,53 0,47
Bromine pentafluoride BrF5 0,28 0,20 Freon-12 CCl2F2 0,38 0,25 Ntrosyl chloride NOCl 0,62 0,42
Butadiene (1,3-) C 4H 6 0,33 0,27 Freon-13 CClF3 0,42 0,30 Nitrous oxide N 2O 0,73 0,62
Butane C4H10 0,27 0,23 Freon-13B1 CBrF3 0,40 0,26 Oxygen O2 0,99 1,00
Butene (1-) C 4H 8 0,38 0,30 Freon-14 CF4 0,46 0,39 Oxygen difluoride OF2 0,66 0,62
Butene (2-) (cis) C 4H 8 0,31 0,26 Freon-21 CHCl2F 0,46 0,28 Ozone O3 0,72 0,59
Butene (2-) (trans) C 4H 8 0,35 0,27 Freon-22 CHClF2 0,49 0,34 Pentane C5H12 0,23 0,19
Carbonylfluoride COF2 0,58 0,40 Freon-23 CHF3 0,54 0,42 Perchlorylfluoride ClO3F 0,42 0,33
Carbonylsulfide COS 0,67 0,46 Freon-C318 C 4F 8 0,16 0,12 Perfluoropropane C 3F 8 0,18 0,14
Carbon dioxide CO2 0,76 0,63 Germane GeH4 0,61 0,44 Performa-ethylene C 2F 4 0,35 0,27
Carbon disulfide CS2 0,63 0,36 Helium He 1,40 3,35 Phosgene COCl2 0,48 0,30
Carbon monoxide CO 1,00 0,97 Helium (3-) 3He 1,41 3,55 Phosphine PH3 0,76 0,65
Chlorine Cl2 0,82 0,50 Hydrogen H2 1,01 2,66 Phosphorous pentafluoride PF5 0,32 0,25
Chlorine trifluoride ClF3 0,44 0,33 Hydrogen bromide HBr 0,98 0,59 Propane C 3H 8 0,37 0,32
Cyanogen C 2N 2 0,49 0,40 Hydrogen chloride HCl 0,99 0,80 Propylene (Propene) C 3H 6 0,43 0,37
Cyanogen chloride ClCN 0,64 0,37 Hydrogen cyanide HCN 0,75 0,22 Silane SiH4 0,65 0,61
Cyclopropane C 3H 6 0,48 0,39 Hydrogen fluoride HF 0,95 0,95 Silicon tetrafluoride SiF4 0,38 0,30
Deuterium D2 1,00 2,14 Hydrogen iodide HI 0,97 0,46 Sulfurylfluoride SO2F2 0,41 0,31
Diborane B 2H 6 0,47 0,46 Hydrogen selenide H2Se 0,81 0,50 Sulfur dioxide SO2 0,69 0,46
Dibromo difluoromethane CBr2F2 0,21 0,14 Hydrogen sulfide H 2S 0,83 0,67 Sulfur hexafluoride SF6 0,28 0,22
Dichlorosilane SiH2Cl2 0,44 0,28 Isobutane C4H10 0,27 0,23 Sulfur tetrafluoride SF4 0,36 0,29
Dimethylamine C 2H 7N 0,40 0,33 Isobutylene (Isobutene) C 4H 8 0,30 0,25 Trichlorosilane SiHCl3 0,36 0,22
Dimethylpropane (2,2-) C5H12 0,23 0,19 Kryton Kr 1,42 0,83 Trimethylamine C 3H 9N 0,30 0,24
Dimethylether C 2H 6O 0,41 0,35 Methane CH4 0,80 0,93 Tungsten hexafluoride WF6 0,28 0,16
Disilane Si2H6 0,33 0,28 Methylacetylene C 3H 4 0,45 0,38 Vinylbromide C2H3Br 0,50 0,30
Ethane C 2H 6 0,53 0,50 Methylbromide CH3Br 0,64 0,37 Vinylchloride C2H3Cl 0,50 0,36
Ethylene (Ethene) C 2H 4 0,64 0,60 Methylchloride CH3Cl 0,67 0,48 Vinylfluoride C 2H 3F 0,53 0,46
Ethylene oxide C 2H 4O 0,56 0,44 Methylfluoride CH3F 0,74 0,70 Xenon Xe 1,38 0,63
Ethylacetylene (1-Butyne) C 4H 6 0,34 0,28 Methylmercaptan CH4S 0,56 0,42

A = Symbol - B = conversion factor @ 20ºC. 1 atm. - C = viscosity factor @ 20ºC. 1 atm.

> Dimensions (mm)

C C

H H

A K A K

B B

IP40 Mass Flow Meter IP40 Mass Flow Controller

Model A B C H K Weight (kg) Model A B C H K Weight (kg)
F-100D (1/8” OD) 47 98 47 111 25 0,4 F-200DV (1/8” OD) 77 128 47 111 25 0,6
F-101D/F-101E (1/4” OD) 69 126 47 111 25 0,5 F-201DV/F-201EV (1/4” OD) 77 134 47 111 25 0,6
F-102E (1/2” OD) 69 134 47 123 26 0,6 F-202EV (1/2” OD) 78 143 47 123 26 0,8
F-103E (1/2” OD) 110 177 47 168 89 4,0

IP65 Mass Flow Meter, low/medium flow IP65 Mass Flow Controller
Model A B C H K L Weight (kg) Model A B C H K L Weight (kg)
F-100DI (1/8” OD) 47 98 74 125 25 36 0,8 F-200DI (1/8” OD) 112 164 74 125 25 36 1,3
F-101DI/F-101EI (1/4” OD) 69 126 74 125 25 36 0,9 F-201DI/F-201EI (1/4” OD) 112 169 74 125 25 36 1,3
F-102EI (1/2” OD) 69 134 74 137 26 36 1,0 F-202EI (1/2” OD) 112 169 74 139 59 36 1,5
F-103EI (1/2” OD) 110 177 74 182 89 36 4,4

IP65 Mass Flow Meter, high flow, wafer type F-004 series Control Valves
Model A C H K L Weight (kg) Model A B H K Weight (kg)
F-106AZ 125 74 192 75 36 4,0 F-004AC/AI (1/4” OD) 64 121 122 45 1,2
F-106BZ 125 74 205 85 36 4,6 F-004BI (1/2” OD) 85 152 174 65 3,4
F-106CZ 125 74 234 115 36 6,8
F-106DZ 125 74 264 145 36 9,5 Dimensions subject to change without notice. For certified drawings and for dimensions
F-106EZ 125 74 319 198 36 13,3 of F-107Z series flanged type mass flow meters please contact factory.
> Ranges and pressure drop Mass Flow > Fields of application
Meters The LOW-ΔP-FLOW series have been successfully applied in a
wide variety of both OEM and laboratory applications, e.g.:
Flow ΔP (mbar) at atm. u Environmental air sampling at atmospheric conditions
Model mln/min Air 1/8” tube 1/4” tube u Leak rate and permeability measurements
F-100D/F-100DI 10 0,8 0,8 u Burner control
F-100D/F-100DI 15 0,8 0,8 u Measurement of gas consumption, for example of natural gas,
F-101D/F-101DI 20 0,8 0,8 in low pressure gas distribution systems
F-101D/F-101DI 50 0,8 0,8
F-101D/F-101DI 100 0,8 0,8 > Air sampling
F-101D/F-101DI 200 0,8 0,8
F-101D/F-101DI 500 0,8 0,8
F-101D/F-101DI 1000 0,8 0,8
F-101D/F-101DI 2000 - 0,8

Flow ΔP (mbar) at atm.

Model ln/min Air 1/4” tube 1/2” tube
F-101E/F-101EI 5 5,5 5
F-101E/F-101EI 10 6 5,5
F-102E/F-102EI 20 8,5 6,5
F-102E/F-102EI 50 - 15

Flow ΔP (mbar) at atm.

Model ln/min Air 1/2” tube 3/4” tube
F-103E/F-103EI 100 - 8
F-103E/F-103EI 200 - 15

Size Flow ΔP(mbar)

Model DIN ANSI m3n/h Air at atm.
F-106AZ/F-107AZ DN40 1 1/ 2” 10 7
F-106AZ/F-107AZ DN40 1 1/ 2” 20 13
F-106AZ/F-107AZ DN40 1 1/ 2” 50 35
F-106BZ/F-107BZ DN50 2” 20 7 An interesting example to control a flow rate is using a
F-106BZ/F-107BZ DN50 2” 50 18 LOW-ΔP-FLOW Mass Flow Meter in combination with a sampling
F-106BZ/F-107BZ DN50 2” 100 39 pump. In this configuration the speed of the pump is controlled
F-106CZ/F-107CZ DN80 3” 50 7 to obtain the required mass flow rate, determined by the
F-106CZ/F-107CZ DN80 3” 100 15 setpoint value.
F-106CZ/F-107CZ DN80 3” 200 32
F-106DZ/F-107DZ DN100 4” 100 9 > Burner control
F-106DZ/F-107DZ DN100 4” 200 17
F-106DZ/F-107DZ DN100 4” 500 48
F-106EZ/F-107EZ DN150 6” 200 7
F-106EZ/F-107EZ DN150 6” 500 19
F-106EZ/F-107EZ DN150 6” 1000 41

Burner control using Mass Flow Controllers brings many

­advantages compared to conventional systems, where flow is
adjusted through needle valves. When burner orifices get clogged
or when gas supply pressure varies, an MFC will automatically
adapt to the changed conditions. For the control of relatively large
flows with low differential pressure, which is typical for natural gas
or CH4, LOW-ΔP-FLOW Mass Flow Meters in combination with
F-004 pressure compensated bellow valves have proven to be a
F-106CZ Mass Flow Meter successful solution.
> Model number identification F - N N NAA - A A A - NN - A

Base
0 Valve only
1 Meter Communication (I/O)
2 Controller A RS232 + analog (n/c control) Connections (in/out)
B RS232 + analog (n/o control) compression type couplings
Pressure rating D RS232 + DeviceNetTM (n/c control) 11 1
/8“ OD compression type
0 64 bar E RS232 + DeviceNetTM (n/o control) 22 1
/4“ OD compression type
M RS232 + Modbus (n/c control) 33 6 mm OD compression type
Ranges N RS232 + Modbus (n/o control) 44 12 mm OD compression type
See page 2 of this leaflet, P RS232 + PROFIBUS DP (n/c control) 55 1
/2” OD compression type
“Models and flow ranges” Q RS232 + PROFIBUS DP (n/o control) 66 20 mm OD compression type
R RS232 + FLOW-BUS (n/c control) 88 1
/4” Face seal male
S RS232 + FLOW-BUS (n/o control) 99 other
T RS232 + EtherCAT® (n/c control)
U RS232 + EtherCAT® (n/o control) mounting between flanges
V RS232 + PROFINET (n/c control) 01 mounting betw. flange, DIN PN10
W RS232 + PROFINET (n/c control) 02 mounting betw. flange, DIN PN16
03 mounting betw. flange, DIN PN40
Analog output 06 mounting betw. flange, ANSI 150
A 0…5 Vdc 07 mounting betw. flange, ANSI 300
B 0…10 Vdc 13 Flanged connection, DIN PN40
F 0…20 mA sourcing 26 Flanged connection, ANSI 150
G 4…20 mA sourcing 99 other

Supply voltage Internal seals

D +15…24 Vdc V Viton® (factory standard)
E EPDM
K Kalrez® (FFKM)

F-101DI Mass Flow Meter, IP65 configuration F-102E Mass Flow Meter, IP40 configuration
©Bht1163395
9.60.008B

Bronkhorst High-Tech B.V. Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands

T +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E [email protected]