MEMS INTRODUCTION

WHAT IS MEMS?
Any engineering system that performs electrical and mechanical functions with
components in micrometers is MEMS. (1 μm = 1/10 of human hair)
MEMS = Micro Electro Mechanical System A micro-electromechanical system
(MEMS) is a process technology used to create tiny integrated devices or
systems that combine mechanical and electrical components. They are
fabricated using integrated circuit
(IC) batch processing techniques
and can range in size from a few
micrometers to millimeters. These
devices (or systems) have the
ability to sense, control and
actuate on the micro scale, and
generate effects on the macro scale. In the most general form, MEMS consist of
mechanical microstructures, micro sensors, micro actuators and
microelectronics, all integrated onto the same silicon chip
Available MEMS products include: Micro sensors (acoustic wave, biomedical,
chemical, inertia, optical, pressure, radiation, thermal, etc.) Micro actuators
(valves, pumps and microfluidics electrical and optical relays and switches
grippers, tweezers and tongs; linear and rotary motors, etc.) ● Read/write
heads in computer storage systems. ● Inkjet printer heads. ● Micro device
components (e.g., palm-top reconnaissance aircrafts, minirobots and toys,
micro surgical and mobile telecom equipment, etc.)
WHY MEMS OR MINIATURIZATION IS NEEDED?

1. High-Level Integration
• A microsystem can combine sensors, actuators, electronics, control
systems, communication, power sources, and even chemical or biological
processes.
• Miniaturization helps in combining all these functions in a small area
(like on a chip or package).
2. Multi-Functionality in One Device
• Big systems like ships or power plants serve only one main function.
• But miniaturized systems can perform many functions together—like
sensing, processing, and communication—on a single chip.
3. Cost-Effective Production
• Using microfabrication, many MEMS devices can be produced at once
on a silicon wafer.
• This reduces the cost per device—just like in microelectronics.
4. Smaller Devices = Less Power Needed
• Smaller systems consume less energy, which is crucial today due to:
o Battery demand for mobile gadgets.
o Energy crisis and rising energy costs.
5. More Powerful, Yet Cheaper Devices
• Thanks to miniaturization, today’s computers, phones, and smart devices
are:
o Faster
o More energy-efficient
o Much cheaper than those made 20–30 years ago.
6. Better Performance in Optics & Bio Applications
 • In optics (MOEMS), micro devices can control light precisely using micro-
sized components.
• In bio-MEMS, miniaturized systems can mimic cells, the natural micro
units in our bodies, for better medical applications.
7. Higher Efficiency in Chemical Processing
• Small volume = better control of temperature, pressure, and reaction
rate.
• This makes chemical reactions more efficient in MEMS-based systems.
8. Faster Devices & Better Heat Control
• Smaller devices have shorter response times.
• They also manage heat better, improving device lifespan and reliability.
9. Reduced Material Use
• Less material is used to make smaller parts.
• Lower raw material cost and less energy needed during manufacturing.
10. Easy Integration with Electronics
• MEMS can include mechanical, fluidic, and electronic parts together.
• This simplifies the overall design and reduces power and space needs.
11. Improved Accuracy and Reliability
• MEMS devices have:
o Better sensitivity
o Wider operating range
o More accurate measurements
o Improved reproducibility during manufacturing
12. High-Density Device Arrays
• Many MEMS components can fit in a small space.
 • Redundancy (backup devices) can be added easily for safety and
performance.
13. MEMS Market is Growing Rapidly
• The MEMS industry is already worth millions to billions of dollars.
• It plays a major role in modern technology markets like smartphones,
cars, health devices, and communication tools.

Microsystem:
A microsystem is an engineering system that contains MEMS components that
are designed to perform specific engineering functions. MEMS components can
be produced in the size of micrometers.
A microsystem includes three major
components of micro sensors, actuators,
and a processing unit.
• Signals received by a sensor in a
microsystem are converted into forms
compatible with the actuator through the
signal transduction and processing unit.
Example- airbag deployment system in an
automobile
Microsystem Products • Micro gears. • Micromotors. • Microturbines.
Micro Sensors: • Acoustic wave sensors • Biomedical and biosensors •
Chemical sensors • Optical sensors • Pressure sensors • Stress sensors •
Thermal sensors
Micro Actuators: • Grippers, tweezers and tongs • Motors - linear and rotary •
Relays and switches • Valves and pumps Optical equipment (switches, lenses &
mirrors, shutters, phase modulators, filters, waveguide splitters, latching &fiber
alignment mechanisms)
Microsystems = sensors + actuators+ signal transduction

Transducer
A transducer is a device that transforms one form of signal or energy into
another form. The term transducer can therefore be used to include both
sensors and actuators and is the most generic and widely used term in MEMS.
Sensor
A sensor is a device that measures information from a surrounding
environment and provides an electrical output signal in response to the
parameter it measured.
Actuator
An actuator is a device that converts an electrical signal into an action. It can
create a force to manipulate itself, other mechanical devices, or the
surrounding environment to perform some useful function.

Microsystems and Microelectronics

There are significant differences in the design and packaging of microsystems
from that of integrated circuits and microelectronics.
• Microsystems involve more different materials than microelectronics.
Polymers and metallic materials are common in microsystems produced by
LIGA processes. Packaging materials for microsystems include glasses, plastic,
and metals, which are excluded in microelectronics
• Microsystems are designed to perform a greater variety of functions than
microelectronics. The latter are limited to specific electrical functions only.
• Many microsystems involve moving parts such as microvalves, pumps, and
gears. Many require fluid flow through the systems such as biosensors and
analytic systems. Micro-optical systems need to provide input/output (I/O)
ports for light beams. Microelectronics does not have any moving component
or access for lights or fluids.
• Integrated circuits are primarily a two-dimensional structure that is confined
to the silicon die surface, whereas most microsystems involve are in three
dimensions. Mechanical engineering design is essential in the product
development of microsystems
• The integrated circuits in microelectronics are isolated from the surroundings
once they are packaged. The sensing elements and many core elements in
microsystems, should be in contact with working media, which creates many
technical problems in design and packaging.
• Manufacturing and packaging of microelectronics are mature technologies
with well documented industry standards. The production of microsystems is
far from that level of maturity. In microsystems, the packaging of these
products is in its infant stage at the present time.
Application Areas of MEMS Technology
1. Automotive Safety Systems: MEMS accelerometers detect collisions for
airbag deployment, gyroscopes support vehicle stability in ESC, and
pressure sensors monitor tire health in TPMS — making driving safer.
2. Smartphones and Tablets: MEMS accelerometers help auto-rotate
screens, gyroscopes aid in gaming and stabilization, magnetometers act
as digital compasses, and pressure sensors enable altitude-based
features.
3. Wearable Health & Fitness Devices: Smartwatches and fitness bands use
MEMS to track steps, sleep, and movements, while some advanced
models monitor heart rate and glucose using tiny biomedical MEMS
sensors.
4. Medical Diagnostics: MEMS lab-on-a-chip devices allow fast testing of
blood, urine, or saliva in small volumes, while biosensors detect disease
markers for early diagnosis and targeted treatment.
5. Industrial Automation: MEMS sensors detect machine vibration,
temperature, and fluid flow, helping prevent breakdowns and enabling
precise control in automated manufacturing systems.
6. Aerospace Navigation: MEMS-based IMUs combine accelerometers and
gyroscopes to navigate drones, aircraft, and missiles in real-time,
especially in GPS-denied environments.
7. Environmental Monitoring: MEMS gas sensors detect harmful gases like
CO₂, NOx, and VOCs in air and water, helping monitor pollution and
maintain environmental safety.
8. Drug Delivery Systems: MEMS micropumps deliver medicine in accurate
doses over time in insulin pumps or chemotherapy devices; MEMS
microneedles offer painless drug delivery and fluid sampling.
9. Consumer Audio: MEMS microphones and speakers are compact and
efficient, enabling clear voice input, noise cancellation, and smart
assistant features in phones, earbuds, and smart home devices.
10.Inkjet Printing: MEMS-based printheads control the release of tiny ink
droplets, enabling sharp, high-quality prints for photos, labels, or 3D
printing applications.
11.Microactuators: These tiny mechanical devices move small components
in optical switches (for telecom) or control fluid flow in microfluidic chips
used in diagnostics and research.
12.Versatile Microsensors: MEMS can detect a wide range of parameters
like temperature, pressure, acceleration, magnetic fields, light intensity,
and specific chemicals, making them useful in nearly every industry.
Disadvantages of MEMS Technology

1. Complex Manufacturing
Making MEMS devices is more difficult than normal electronics because it involves
many materials and tiny moving parts.
2. High Initial Cost
Setting up MEMS fabrication labs and equipment costs a lot of money.
3. Difficult Packaging
MEMS devices often need special packaging to protect moving parts and still allow
contact with air, fluids, or light — this is not easy.
4. Fragility
Because MEMS devices are very small and delicate, they can break easily during
handling or use.
5. Limited Force and Power
Tiny MEMS actuators can’t produce much force or power, which limits their use in
heavy tasks.
6. Material Limitations
MEMS devices can’t be made with just any material — only a few are suitable for
microfabrication.
7. Thermal and Mechanical Stress
MEMS can be affected by temperature changes or mechanical stress, which may
cause failure or incorrect readings.
8. Difficult Repair
If a MEMS device fails, it’s usually impossible to repair — the whole unit must be
replaced.
9. Short Lifespan in Harsh Environments
MEMS devices may not work well in extreme heat, moisture, dust, or vibration
without special protection.
10. Limited Testing and Standardization
MEMS testing methods are still developing, and there are fewer standards compared
to traditional electronics.