Verotti 2017
Verotti 2017
A Comprehensive Survey on
Microgrippers Design: Mechanical Structure
Nicola P. Belfiore
Department of Mechanical and
Aerospace Engineering
Sapienza University of Rome
Rome, Italy, 00184
Email: [email protected]
ABSTRACT
An Atlas of 98 microgrippers that recently appeared in Literature is herein presented by using four different
forms: a) a restyled layout of the original mechanical structure, b) its corresponding pseudo-rigid body model
(PRBM), c) its kinematic chain and, finally, d) its related graph. Homogeneity in functional sketching (a) is as-
sumed to be greatly helpful to understand how these grippers work and what are the most significant differences
between them. Therefore, a unified and systematic set of aesthetics and proportionality criteria have been adopted.
Analogously, unified criteria for obtaining pseudo-rigid (b), kinematic (c), and graph (d) representations have been
also used, which made the Atlas easy to be read and inspected. The distinction among lumped and distributed
compliance has been also accepted to develop the structure of the Atlas. A companion paper has been prepared to
present a survey on the variety of operational strategies that are used in these microgrippers.
1 Introduction
High precision manipulation of micro and nano objects is a critical issue for a large class of applications, such as MEMS
development, optical fiber alignment, electronic packaging of micro-components and biomedical engineering [1–3]. In
particular, micromanipulation devices are becoming fundamental tools in the microbiology and in the microassembly fields.
In microbiology, new technological advances at the microscale allow scientists to characterize microorganisms from a
new perspective [4]. Furthermore, the manipulation of a single cell represents an essential tasks to understand individual
cell behaviors and interactions, since heterogeneity in cell populations has been ascertained [5]. Related activities in cellular
∗
Corresponding author.
Matteo Verotti Paper MD-16-1535 1
microsurgery allow researchers also to modify the cell structure and to understand cell mechanics. These techniques played
an important role in the development of assisted reproductive technology, expanding the repertoire of clinical methodology
and options [6]. As well, new operations, such as intracellular injections, can be performed when conventional methods, such
as concentration gradients or electroporation, are not applicable or fail [7–9]. Finally, it was found that cells are sensible to
mechanical stimulation and give a response through cytoskeletal re-organization and force generation [10, 11]. In fact, the
study of cell mechanical behaviors has been related to morphological changes and diseases [12].
Micro devices assembly (MDA) becomes necessary when a microsystem can not be constructed by means of MEMS-
based technologies, because of its geometry, required materials, or, more in general, limitations due to its technological
process. Many investigations were focused on the development of tools for handling micro-objects [13–16], and on the
microassembly of 3D structures [17, 18]. Generally, MDA operations, such as manipulation, insertion, and fixturing are
difficult, costly, time-consuming and require systems that are able to perform gripping, releasing, precise positioning and
joining. For these reasons, computer-based automated micro devices assembly (AMDA) could increase efficiency, reliabil-
ity, and reduce costs [19, 20]. However, both accurate positioning of micro-objects and automated microassembly remain
A considerable amount of work has been devoted to satisfy the increasing demand of high-efficiency, high-precision
and reliable microgrippers and some state-of-the-art surveys have been already completed to analyze micromanipulation
systems under different points of view. Cecil et al. considered gripping and manipulation techniques for microassembly
applications [19, 20], whereas Fantona and Porta focused on the releasing strategies [22]. Manipulation of micro and nano
objects in electron microscopes was investigated by Denisyuk et al. [23]. Wei and Xu analyzed working principles, detec-
tion accuracies, advantages and disadvantages of microforce sensing methods [24], whereas an overview on gripping force
measurement (using two-fingered microrobotic systems) was presented by Boudaoud and Regnier [25]. A review of concep-
tual designs of nanoscale manipulators was presented by Mekid et al. [26], who described the characteristics of forty recent
patents. Several MEMS microgripper actuators and sensors were compared by Jia and Xu, who suggested some guidelines
for different scenarios [27]. Nikoobin and Niaki compared several types of microgrippers and then they were able to de-
rive effective design and performance parameters, such as displacement amplification factor, gripping range and stroke, jaw
motion characteristic, ideal shape of tips, number of degree of freedom and microactuator specifications [28].
The present contribution is exclusively dedicated to the electro mechanical microgrippers because these structures are
widely used in research and applications and also because their large number makes it interesting to compare them with one
another. Therefore, some peculiar classes of tweezers, such as ultrasonic, molecular, fluorescence resonance energy transfer,
optical, laser, acoustic, dielectrophoretic or freezer tweezers, were not investigated. A selection and analysis process was
necessary to build the group of structures, and a new Atlas was created by gathering the different elements in three classes.
These categories were established on the basis of classical mechanical characteristics. Compliance played a fundamental
role in classification because the mechanical component of any MEMS consists conceptually in a compliant mechanism.
The first two classes are composed of micromechanisms which embody either lumped (Class I) or distributed (Class II)
compliance, whereas those microgrippers which do not obey to the two previous criteria have been gathered into the third
An effort has been made in order to extract not only the functional representation of the microgrippers, but also their
most popular corresponding simplified representations, namely, the Pseudo-Rigid Body Models (PRBMs) [29–34]. Such
model is obtained by reducing the original compliant mechanism to an ordinary one (i.e. composed of only rigid bodies
and kinematic pairs). Both the functional and the PRBM representations can not be uniquely defined. However, while the
functional sketch is quite simple and straightforward, a more complex procedure must be used to obtain the PRBM.
Once the PRBM has been defined, the resulting ordinary mechanism gives rise to its corresponding kinematic chain and
graph, which can be allocated to a family and a group, according to a classic method of mechanisms categorization [35]. As
a consequence, the Atlas becomes an effective and systematic tool which is well integrated to Number and Type Synthesis,
and which allows designers to appreciate the microgrippers topological characteristics .
The mechanical structure of a microgripper is strictly related to the adopted actuation strategy, because the value of the
actuating force or torque depends on the mechanical constraints which characterize the corresponding kinematic chain. Both
the elastic joints configuration and the mechanism posture have a great effect on actuation. For this reason, a comparative
analysis of the possible actuation strategies has been developed and proposed in a companion paper [36]. This analysis,
which includes force feedback, sensing and releasing strategy, represents a complementary part of the present paper. A
wide range of different actuator types, specially designed for microgrippers, is therein explored and some survey tables are
introduced. At the same time, a comparison of the basic performance characteristics of three major actuator types, namely,
electrostatic, thermal and piezoelectric, is proposed.
Since decades, the systematic development of Mechanisms Atlases (see for example Refs. [37–40]) has been supported
by Type and Number Synthesis. Graph Theory played an important role in separating the concepts of structure and function,
as recently remarked [41], and therefore it has been widely adopted as the main and preferred resource in generating Atlases
of kinematic structures of mechanisms. Provided that a systematic approach is adopted for enumeration (for example,
algorithms based on Graph Theory), the Atlases are, generally, both exhaustive (i.e. all the structures with the selected
characteristics are considered) and not redundant (i. e. there are no idle copies of the same structure in the group). Graph-
based algorithms perform best during the generation of large classes of kinematic structures with specified topological
characteristics (i.e. up to a given number l links, with specified F degrees of freedom, LIND loops, and so on). Taking l = 4,
F = 1 and LIND = 1, an Atlas of grippers (at the macro scale) has been presented in 1997 [40]. This contribution offered a
full Atlas of grippers obtained by combining two elementary four bar linkages in symmetric and asymmetric arrangements,
by attaching the jaws to the couplers. This Atlas has been used as a source for generating new microgrippers. For example,
in 2005, Tsai et al. [42] applied the operation of kinematic joint transformation to the grippers reported in Atlas [40] and
generated 28 compliant microgrippers. The compliant mechanisms and their corresponding pseudo-rigid body models have
In the present investigation, an inverse process, namely, from the compliant mechanism to a corresponding PRBM,
has been used to generate the PRBMs that appear in the new Atlas. In fact, the adopted inclusion criterion consisted in
considering only those mechanisms which have been really fabricated or, at least, simulated and, then, presented in Literature.
Although the topological approach has not been adopted for enumeration purposes, it has been used as a fundamental tool for
classifying the structures. Another interesting difference between the review approach adopted in this paper and the typical
enumeration algorithms consists in the contents of the Atlas itself. In fact, whereas enumeration is tailored for generating
classes of kinematic structures with a great number of links (i.e. l ≥ 8), the actual microgrippers used in applications have
rarely more than 8 links.
3 Classification
In this Atlas, micromechanisms are classified considering three levels. The first level focuses on the compliant structures,
and defines a class of mechanisms. The second level assesses a classification of compliant structures according to the
topological nature of the corresponding PRBMs, whereas the third one considers the family and the group.
A compliant mechanism modifies its neutral configuration either through the elastic deformations of its flexible parts
The advantages of flexure-based mechanisms (e.g. high accuracy, no backlash, no need of lubrication) provide great
opportunities for high-precision microgrippers establishment [43]. For example, beams with uniform cross-section in straight
configuration can serve as flexures in leaf-spring guidance systems [44] or as amplification beams in MEMS devices [45,
46]. Constant-curvature beams, with uniform cross-section, have also been considered as primitive flexures for compliant
mechanism [47, 48], or employed to realize complex flexures [49] and micromechanisms [50–53].
Beams with variable cross-section have also been considered as flexures. Notch hinges, for example, are characterized by
the geometric configuration (circular, corner-filleted, parabolic, hyperbolic, elliptical, inverse parabolic, and secant designs)
[54–57] and by axial symmetry [58, 59]. Figure 1 shows a circular, an elliptical and a corner-filleted notch hinge.
Whereas notch hinges are peculiar elements of the compliant mechanisms that are characterized by lumped compliance,
uniform cross-section beams, in straight or curved configuration, may introduce both lumped and distributed compliance,
To improve the performance of compliant mechanisms in terms of stress concentration, off-axis-to-axial stiffness ratio,
range of motion and precision of rotation [60], complex flexures have been developed combining more flexible elements or
involving contact systems [49, 61–63]. Large deflections, within the elastic range, and precision of motion are among the
most important features of microgrippers, and such characteristics are often in contrast to each other.
The goal of recent investigations [64,65] has been the realization of advanced flexures, with capability of achieving wide
Some microgrippers embed both long beams and notch hinges within their compliant structure. In fact, these structures
combine both lumped and distributed compliance to guarantee motion. All these mechanisms have been grouped in the above
mentioned third group, namely, the Special Structures Group. The mechanical structure has an effect on its compliance
response to externally applied load. The importance of such response has been recently pointed out by Rabenorosoa et
al. [21], and compliance optimization, well-established in rigid-body mechanics (for example, by means of active stiffness
regulation [66–69]) has been recently considered in the design of a microgripper [70].
A kinematic chain is characterized by its degrees of freedom (F), number of links (ℓ), number of joints (m), and number
of independent loops (LIND ). These parameters are related by Grübler’s and Euler’s equations,
F = 3(ℓ − 1) − 2m ,
(1)
LIND = m − ℓ + 1 ,
and so only two of these parameters are independent. The pair F-ℓ defines a family of kinematic chains. The kinematic
chains of the same family have the same number of links ℓ, but, generally, different numbers of binary, ternary and j−nary
links (ℓ j ). Then, within the same family, it is possible to define groups of linkages having the same numbers of binary,
ternary, j−nary links.
In Sections 5, 6 and 7, microgrippers presentation has been ordered according to the following criteria:
1. special topological cases as first, including those mechanisms which are not classifiable as members of a family (e.g.
open chain with LIND = 0);
2. increasing degrees of freedom;
4. increasing group, starting from the minimum number of the lowest j-nary links l j .
4 The adopted representation methods for the gripper layout and the PRBM
Anyone who wish to achieve a complete picture of the actual State of the Art of microgripper design, encounters many
difficulties because each contribution is depicted through an individual sketching style. The variety of applications leads
to a rather inhomogeneous set, where the representations are neither standard, nor uniform. As a consequence, comparing
different microgrippers can be a time consuming and inaccurate task. For example, two different layouts may seem rather
similar, while two similar structures may be treated as very different microgrippers. The quality of the present Atlas,
according to the Authors experience [37–40,71], depends strongly on how much systematic is the representation method and
on the efficacy of the adopted aesthetics. The representation method is based on four main features:
• an appropriate and effective way of representing the geometrical and structural characteristics of the microsystems,
Furthermore, the following general criteria to represent mechanism geometry, PRBM, kinematic chains and graphs have
been adopted:
• drawings have been positioned inside widows which have all an equal size and rectangular shape;
• pin joints have been all represented by circles with equal size, whereas a generic prismatic pair has been represented as
• sensible points, such as the centers of the revolute joints or the polygons vertices, have been positioned on a base grid;
• graph nodes has been represented by characterizing the nature of their corresponding link: actuator, frame or output
Moreover, the following general criteria have been adopted to represent mechanisms geometry:
• geometrical re-mapping of the original design (in order to locate the jaws always on the right hand side);
• introduction of a minimum size for the compliant parts of the compliant mechanism;
• introduction of a maximum size for the pseudo-rigid parts of the compliant mechanism;
• introduction of a maximum-to-minimum size ratio for the parts of the compliant mechanism.
• simplification of truss structures and possible substitution of truss regions with T labeled block.
Finally, the following actions have been applied to determine the PRBM corresponding to the analyzed structures:
• notch hinges have been replaced by revolute (pin) joints located in correspondence of the minimum cross-sectional area
of the flexure;
• flexible beams have been also replaced by revolute joints, placing the pin joint in the center of the beam elastic weights;
• revolute joints which are incident to the frame link have been represented with the same shape and size in all the
drawings;
• actuator producing a linear displacement (such as piezoelectric or chevron) have been replaced by a prismatic joint;
• actuation forces or torques, or their effects on specific parts of the structures, have been schematically represented with
• sensing elements, or their effects on specific parts of the structures, have been schematically represented with white-
The class of microgrippers based on lumped compliance shows a large variety of structures. In this investigation this
group counts 35 different mechanisms, which have been illustrated in Figs. 2-7.
The common feature consists in the presence of some zones, with restricted width, which operates as flexures. The
conceptual stage of design, which most includes designer’s creativity, can be based on the invention of a PRBM which can
be easily transformed into a compliant mechanism. There are not canonical transformation rules, although the Authors of
the paper think that the criterion based on the selection of the center of elastic weights can be adopted with great accuracy
to detect the center of relative rotations between two rigid parts. In fact, as demonstrated in Ref. [47] in case of uniform
flexures, the position of the center of rotation can be found analytically. The center lies on the axis of symmetry of the flexure
In the devices belonging to Class I, motion relies on the deflections of flexures that are considerably smaller than the rest
of the structure. These regions are exposed to stress levels that could compromise the device, if not adequately considered in
the design steps. This condition could be worsened by possible imperfections due to the fabrication processes, that give rise
to stress concentrations.
Usually, Class I is characterized by a fair correspondence between the original compliant mechanism and its correspond-
ing PRBM, because it is quite easy to identify, with a good approximation, the relative rotation center between two adjacent
pseudo-rigid links within a restricted region around the flexure. This allows designers to adopt more easily the classical
algorithms from kinematic synthesis. However, an accurate detection of the above mentioned center is still quite challenging
because its position actually depends on the loads applied on the pseudo-rigid links.
Table 1 reports the microgrippers with lumped compliance classified in terms of families and groups.
The class of microgrippers that are based on distributed compliance shows also a similarly large variety of structures.
This group counts 32 different mechanisms, which have been illustrated in Figs. 8-13.
Embedded in these mechanisms there may be also some thin beams with higher flexibility. However, in such case,
these regions are as large as the pseudo-rigid ones and therefore it is not easy to predict where the centers of relative
rotations between the two adjacent pseudo-rigid parts are, for a given static load on the structure. As a consequence, the
conceptual stage of design relies on the designer’s mastery of Statics, which must include the capability of deciphering the
compliance behavior of the whole complex structure, rather than of its simplified PRBM. It is still possible to find a PRBM
corresponding to a given microgripper with distributed compliance. However, for the class of distributed compliance, the
equivalence among the original compliant mechanism and its corresponding PRBM will be rather weaker than for the class
of lumped compliance.
With respect to lumped compliance structures, the devices belonging to Class II are characterized by flexible elements
whose dimensions are comparable to the dimensions of the whole structure. Stress is then distributed along extended regions
and not concentrated to small parts of the device. For this reason, distributed compliance structures could be less vulnerable
The PRBM reported in Figures 8, 9 and 10 have been still developed by using the criterion based on the selection
of elastic weights center of the most flexible parts of the structures. However, the variation of the position of the relative
rotation center could imply a loss of significance for the PRBM, determining also a loss of precision in case designers apply
Table 2 reports the microgrippers with distributed compliance classified in terms of family and group.
As in any human activity, creativity is something which can be hardly classified. In fact, together with structures for
which a lumped or distributed compliance is self evident, some other structures did not showed neither the former nor the
This particular class of microgrippers counts 31 very different mechanisms, which have been illustrated in Figs. 14-19
and consist of
• structures with one or more parallel substructures embedded in the mechanical structure (see, for example, Fig. 17a);
• structures for which motion and operation are due to a particular symmetry (as in Fig. 18b) ;
• structures for which sliding is allowed (as in Fig. 16f);
• distributed compliance simple cantilever structures (Figs. 14b, 14c, 15c to 15f, 16a, 16d, 16e, 17b and 17d),
• out-of-plane simple cantilever structures with two (Fig. 15f), four (Fig. 14c) or six (Fig. 15e) fingers,
• distributed compliance parallel cantilevers structures (Figs. 17f, 18a, 18c to 18e and 19a).
As for the case of distributed compliance, it is not easy to predict where the relative rotations centers (between any two
adjacent pseudo-rigid parts) are, and therefore the conceptual stage of design relies only on designer’s individual skills in
understanding and interpreting the compliance of the whole structure due to its peculiar geometrical characteristics. Fur-
thermore, similarly to the case of distributed compliance, the equivalence among the original compliant mechanism and its
corresponding PRBM will be rather weak. However, the specification of a PRBM is still of great importance in order to
The PRBM reported in Figures 14, 15 and 16 have been developed by using the criterion based on the selection of
the rotation centers as coincident to the center of elastic weights of the most flexible parts of the structures. Furthermore,
Table 3 lists the microgrippers with distributed compliance classified in terms of families and groups.
8 Discussion
Structures representations have been built to convey to the reader some reasonable interpretations of the topological
characteristics of the microgrippers. Of course, it will be the readers tolerance and understanding that the actual mechanical
features of any discussed microgripper are those described in the original paper (always referenced in Figures captions). In
fact, while the Atlas has been built by taking into account aesthetics, the original layouts have been developed for the sake
of functionality.
Actuation, sensing and operation will be discussed systematically in the above mentioned companion paper. However,
before addressing the reader to that work [36], it is worth noting that the morphology has some direct implication on some
For example, the jaws motion, usually rather limited in amplitude, can be enhanced involving different kinds of dis-
placement amplification, such as Scott-Russel mechanism [72] (see Fig. 7b), leverage mechanism [73] (see Fig.5f), the
combination of flexure hinge and flexure beam [43] (see Fig.5e), the integration of lever and parallelogram mechanisms [74]
Furthermore, most of the existing microgrippers are designed with parallelogram flexures [76–78] (see Figures 6a, 4d,
11b) to generate a pure translational motion of gripper tips [79] (see Fig.12e), that makes the architecture of the gripper
mechanism rather complex. Another side-effect of the displacement amplification is the reduction of the actuation force [80]
(see Fig. 11a). The last, in turn, may require high input voltage [43, 76, 81] (see Figures 5e, 6a and 4d). Sometime,
piezoelectric bimorph [82–84] or linear actuators employing a lever mechanism [85] can be conveniently used. The designs
adopted in this kind of microgrippers are mainly asymmetric [75] (see Fig. 7e) and improves gripping accuracy as well [74]
(see Fig. 7a). Moreover, grasping can be performed asymmetrically: the left jaw accomplishes grasping, while the right one
provides rotations [75].
Finally, other interesting morphology–to–function relations appear, for example, in multi-finger grasping and rotating
operations [86] (see Fig.5d), piezoelectric stack actuator (PSA) driven mechanisms [79] (see Fig. 12e), and Roberts mecha-
nisms combined in parallel to provide both grasping and rotating capability [86].
9 Conclusions
Optimal criteria and graphical aesthetics have been used to generate an Atlas of microgrippers composed of a large
selection of structures from the recent Literature. Each mechanism has been represented by means of a functional form,
which is quite similar to the original layout, a pseudo-rigid body equivalent mechanism, together with the corresponding
kinematic chain and graph. The collected structures have not been obtained by means of Type or Number Synthesis because
the purpose of the present investigation consists in offering a survey of those microgrippers that have been actually fabricated
or, at least simulated. All the sketches that have been included in the Atlas appear homogeneous, easy to inspect and quite
useful to understand the basic ideas standing behind the reviewed microgrippers. This feature does not appear in any other
review dedicated to micro-gripping. The strategies employed to operate all the collected devices have been also reviewed,
but, for the sake of brevity, such additional survey has been presented in another contribution, namely, the second part of the
present paper. The Authors hope that their new catalog could help designers to develop their own new microgrippers.
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List of Tables
List of Figures
a) b) c)
Fig. 1. Circular (a), elliptical (b), and corner-filleted (c) notch hinge