FreePDK3

Design Rule Manual

Revision: 1.0
Process Node: 3nm
Release Date: August 30, 2021
Copyright © 2021 Sushant Sadangi and W. Rhett Davis, North Carolina State University
This manual is licensed under Creative Commons Attribution 4.0 (CC BY 4.0) license.
1.Layer Information

1.1 Front-End-of-Line (FEOL) Layers

Layer Description Lithography Patterning
NW N – Well 193i SE
BPR Buried Power Rail 193i LE2
VBPR Via connecting BPR to M0A 193i LE2
ACT Active for Nanosheet Layers 193i SADP
GATE Gate Metal EUV SADP
GCUT Gate Cut Metal 193i SPT
DUMMY Dummy Poly EUV SAQP
NIM N - implant 193i SE
PIM P - implant 193i SE

1.2 Middle-of-Line (MOL) Layers

Layer Description Lithography Patterning
M0A Metal M0A interconnect layer EUV DPT
V0A Via connecting M0A to M0B EUV DPT
GCON Gate interconnect layer EUV DPT
M0B Metal M0B interconnect layer EUV SALELE
V0B Via connecting M0B to M1 EUV DPT

1.3 Back-End-of-Line (BEOL) Layers

Layer Description Lithography Patterning
M1 Metal 1 interconnect layer EUV DPT
V1 Via connecting M1 to M2 EUV DPT
M2 Metal 2 interconnect layer EUV DPT
V2 Via connecting M2 to M3 EUV DPT
M3 Metal 3 interconnect layer EUV DPT
V3 Via connecting M3 to M4 EUV DPT
M4 Metal 4 interconnect layer EUV SPT
V4 Via connecting M4 to M5 EUV SPT

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 M5 Metal 5 interconnect layer EUV SPT
V5 Via connecting M5 to M6 EUV SPT
M6 Metal 6 interconnect layer EUV SPT
V6 Via connecting M6 to M7 EUV SPT
M7 Metal 7 interconnect layer 193i LE2
V7 Via connecting M7 to M8 193i LE2
M8 Metal 8 interconnect layer 193i LE2
V8 Via connecting M8 to M9 193i LE2
M9 Metal 9 interconnect layer 193i LE2
V9 Via connecting M9 to M10 193i LE2
M10 Metal 10 interconnect layer 193i SE
V10 Via connecting M10 to M11 193i SE
M11 Metal 11 interconnect layer 193i SE
V11 Via connecting M11 to M12 193i SE
M12 Metal 12 interconnect layer 193i SE
V12 Via connecting M12 to M13 193i SE
M13 Metal 13 interconnect layer 193i SE
VRDL Via connecting M13 to RDL 193i SE
RDL Metal RDL interconnect layer 193i SE

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2. Physical Design Rules

2.1 Geometry Check

Rule Value Description
1 - Non-orthogonal shapes are not allowed

2.2 N-Well (NW) Rules

Rule Value Description
NW.1 57.5 nm Minimum vertical width of NW
NW.2 84 nm Minimum horizontal width of NW
NW.3 6237 nm2 Minimum area/enclosed area of NW
NW.4 - NW must be orthogonal
NW.5 7 nm Minimum extension of NW past GATE (not cut by GCUT)

NW.1 NW.5

NW.2

GATE

3
 2.3 Active (ACT) Rules
Rule Value Description
ACT.1 21 nm Minimum vertical width of ACT
ACT.2 21.5 nm Minimum vertical spacing of ACT
ACT.3 84 nm Minimum horizontal width of ACT
ACT.4 ACT should be continuous
ACT.5 10 nm Minimum vertical spacing between ACT and BPR
ACT.6 ACT may not bend
ACT.7 ACT must end inside DUMMY layer.

ACT.1 ACT.7
ACT.4
ACT.3

ACT.2 DUMMY

ACT.5
ACT.6
BPR

4
2.4 Buried Power Rail (BPR) Rules
Rule Value Description
BPR.1 31.5 nm BPR Vertical Width
BPR.2 84 nm Minimum vertical spacing between BPR layers
BPR.3 BPR must be continuous
BPR.4 BPR might not bend

BPR.1

BPR.3
BPR.4
BPR.2

2.5 Via Buried Power Rail (VBPR) Rules

Rule Value Description
VBPR.1 VBPR Must be rectangle
VBPR.2 10.5 nm Exact VERTICAL width of VBPR
VBPR.3 15 nm Exact HORIZONTAL length of VBPR
VBPR.4 13.5 nm VBPR enclosure by BPR on two opposite sides, horizontal direction
VBPR.5 0 nm VBPR enclosure by M0A on two opposite sides, vertical direction
VBPR.6 27 nm Minimum horizontal spacing between two VBPR layer
VBPR.7 10 nm Minimum vertical spacing between two VBPR layer
Minimum spacing between VBPR and ACTIVE layer polygons not on the
VBPR.8 10 nm same net
VBPR.9 VBPR may not interact with GCUT or GATE or DUMMY

BPR
VBPR.2 VBPR.5
VBPR.5 VBPR.4
VBPR.3
VBPR.8
VBPR.7

VBPR.6

M0A

5
2.6 Gate Layer
Rule Value Description
GATE.1 15 nm GATE exact horizontal width
GATE.2 27 nm Minimum horizontal spacing between GATE or DUMMY layers
GATE.3 GATE may not bend
GATE.4 21.5 nm GATE min extension past ACT
GATE.5 40 nm GATE minimum vertical length
GATE may not be discontinuous along the vertical axis. Use GCUT layer to
GATE.6 mark cuts in the GATE
GATE.7 ACT layer vertical edge may not lie inside, or coincide with, the GATE layer
Minimum horizontal spacing between ACT and GATE (not cut by GCUT and
6 nm
GATE.8 not interacting with ACT)

GATE.2
GATE.1 GATE.4

s
GATE

GATE.6

GATE.3
GATE.5

6
2.7 Gate Contact (GCON) Layer
Rule Value Description
GCON.1 13 nm Exact VERTICAL width of GCON
GCON.2 15 mn Exact HORIZONTAL length of GCON
GCON.3 GCON must overlap gate
GCON.4 1 nm Extension past M0B in vertical direction
GCON.5 25 nm Minimum horizontal spacing between two GCON layer
GCON.6 28 nm Minimum vertical spacing between two GCON layer
GCON.7 6 nm Minimum spacing between GCON and M0A layer polygons
GCON.8 25 nm Minimum horizontal spacing between GCON and GATE layer
GCON.9 13.5 nm Minimum vertical spacing between GCON and GCUT
GCON.10 180 nm2 Minimum GCON Area
GCON.11 GCON may not bend
GCON.12 165 nm2 Minimum area of overlap between GCON and M0B
GCON.13 180 nm2 Minimum area of overlap between GCON and GATE
GCON.14 GCON may not interact with GCUT or DUMMY

GATE GATE GATE GATE

GCON.3

M0A GCON.4 GCON.13

GCON.5
GCON
GCON.11 M0B
GCON.1

GCON.6
GCON.2 GCON.4

GCON.4
GCON.11
DUMMY
GCON.9 GCON.10

GCON.14
GCUT GCUT

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2.8 Dummy Layer
Rule Value Description
DUMMY.1 15 nm DUMMY exact horizontal width
DUMMY.2 40 nm DUMMY minimum vertical length
DUMMY.3 115.5 nm Minimum vertical space
DUMMY.4 DUMMY may not bend
DUMMY.5 DUMMY must completely overlap GATE

DUMMY GATE

DUMMY.2
DUMMY
DUMMY.1
DUMMY.5

DUMMY.3

DUMMY

DUMMY.4

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2.9 Gate Metal Cut (GCUT) Layer
Rule Value Description
GCUT.1 10.5 nm Exact vertical width of GCUT (shape is oriented horizontally)
GCUT.2 42 nm Minimum horizontal length of GCUT(shape is oriented horizontally)
GCUT.3 69 nm Minimum horizontal space of GCUT
GCUT.4 20.5 nm GCUT minimum space to ACT (must be 20.5 = 10 + 10.5 //)
GCUT.5 GCUT may not bend
GCUT.6 GCUT vertical edge must coincide with DUMMY vertical edge
GCUT.7 GCUT layer may not exist without the layer GATE
GCUT layer vertical edge may not lie inside, or coincide with, the GATE
GCUT.8 layer
GCUT.9 GCUT may not interact with ACT
GCUT.10 105 nm Minimum vertical spacing between two GCUT layer

GCUT GCUT.1 GCUT.3

GCUT.2 GCUT.6 GCUT.9

GCUT.5

GCUT.4 GCUT.10

ACT

DUMMY

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2.10 NIM/PIM Layer
Rule Value Description
NIM/PIM.1 84 nm Minimum width/spacing/notch of NIM/PIM
NIM/PIM.2 57.5 nm Minimum vertical width of NIM/PIM
NIM/PIM.3 20 nm Minimum enclose of ACT by NIM/PIM on vertical direction
NIM/PIM.4 13.5 nm Minimum enclose of ACT by NIM/PIM on horizontal direction
NIM/PIM.5 4830 nm2 Minimum NIM/PIM area/enclosed area
NIM/PIM.6 NIM and PIM may not overlap

NIM/PIM.1
NIM/PIM.2
NIM NIM/PIM.3

NIM/PIM.4
ACT

NIM/PIM.1

NIM/PIM.1
DUMMY

PIM
NIM/PIM.6

NIM/PIM.7

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2.11 M0A Layer
Rule Value Description
M0A.1 15 nm Minimum width of M0A
M0A.2 6 nm Minimum spacing of M0A to GATE
M0A.3 5 nm Minimum extension of ACT past M0A (horizontal direction)
M0A.4 21.5 nm Vertical length of M0A
M0A.5 10 nm Vertical spacing of M0A
M0A.6 M0A may not bend
M0A.7 11 nm Minimum vertical overlap between M0A and ACTIVE
M0A.8 M0A may not be outside ACTIVE
M0A.9 322.5 nm2 Minimum M0A area

M0A M0A
M0A M0A.2 GATE
M0A.3
M0A.4 M0A.8

M0A.9
M0A.7

M0A.5

M0A.1

M0A

M0A.6

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2.12 V0A Layer
Rule Value Description
V0A.1 V0A shape is a square
V0A.2 13 nm V0A is a square with 13nm edge length
V0A.3 29 nm Minimum spacing of V0A - Full alignment
V0A.4 30 nm Minimum corner-to-corner spacing between two V0A instances
V0A.5 V0A must always interact with M0A and M0B
V0A.6 6 nm V0A enclosure by M0B on two opposite sides, horizontal direction
V0A.7 -1 nm V0A enclosure by M0B on two opposite sides, vertical direction
V0A.8 1 nm V0A enclosure by M0A on two opposite sides, horizontal direction
V0A.9 -1 nm V0A enclosure by M0A on opposite sides, vertical direction
V0A.10 8 nm Minimum space of V0A and M0B of different net
V0A.11 16.5 nm Minimum space of V0A and M0A of different net
V0A.12 V0A may not interact with DUMMY or GATE layer
V0A.13 156 nm2 Minimum area overlap between M0A and V0A

DUMMY GATE

M0A M0A V0A.12 V0A.12

V0A.2
V0A.8 V0A.8
V0A.7
V0A.3 M0B
V0A.2 V0A.12
V0A.6

V0A.9 V0A.7

V0A.4

V0A.11

DUMMY
GCUT
V0A.4

V0A.10

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2.13 M0B Layer
Rule Value Description
M0B.1 11 nm Minimum Vertical width of M0B
M0B.2 10 nm Minimum Vertical spacing of M0B
M0B.3 22 nm Minimum Horizontal width of M0B
M0B.4 20 nm M0B minimum horizontal spacing
M0B.5 M0B may not bend
M0B.6 3.5 nm Minimum extension of MOB past GCON
M0B.7 242 nm2 Minimum M0B area

M0B.4
M0B.3
M0B.1 M0B M0B

M0B.5

M0B.2
M0B.6

M0B.7 M0B

13
2.14 V0B Layer
Rule Value Description
V0B.1 V0B shape is a rectangle
V0B.2 14 nm V0B exact horizontal width
V0B.3 10 nm V0B exact vertical width
V0B.4 10.5 nm Minimum vertical spacing of V0B - Full alignment
V0B.5 20 nm Minimum horizontal spacing of V0B - Full alignment
V0B.6 22 nm Minimum corner-to-corner spacing between two V0B instances
V0B.7 V0B must always interact with M0B and M1
V0B.8 4 nm V0B enclosure by M0B on two opposite sides, horizontal direction
V0B.9 0 nm V0B enclosure by M0B on two opposite sides, VERTICAL direction
V0B.10 0 nm V0B enclosure by M1 on two opposite sides, horizontal direction
V0B.11 2.5 nm V0B enclosure by M1 on two opposite sides, VERTICAL direction

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2.15 Metalx (Mx) Layers
Rule Value Description
Mx.1 (x=1,2) 14 nm METALx width minimum
Mx.1 (x=3) 15 nm METALx width minimum
Mx.1 (x=4-6) 24 nm METALx width minimum
Mx.1 (x=7-9) 40 nm METALx width minimum
Mx.1 (x=10-11) 80 nm METALx width minimum
Mx.1 (x=12-13) 160 nm METALx width minimum
Mx.2 (x=1-3) 15 nm METALx spacing minimum
Mx.2 (x=4-6) 24 nm METALx spacing minimum
Mx.2 (x=7-9) 40 nm METALx spacing minimum
Mx.2 (x=10-11) 80 nm METALx spacing minimum
Mx.2 (x=12-13) 160 nm METALx spacing minimum
Mx.3 (x=2-3) 750 nm METALx maximum width
Mx.3 (x=4-6) 1200 nm METALx maximum width
Mx.3 (x=7-9) 2000 nm METALx maximum width
Mx.3 (x=10-11) 4000 nm METALx maximum width
Mx.3 (x=12-13) 8000 nm METALx maximum width
Mx.4 (x=1-3) 45 nm Minimum spacing of METALx wider than 45nm and longer than 45nm
Mx.4 (x=4-6) 72 nm Minimum spacing of METALx wider than 72nm and longer than 72nm
Mx.4 (x=7-9) 120 nm Minimum spacing of METALx wider than 120nm and longer than 120nm
Mx.4 (x=10-11) 240 nm Minimum spacing of METALx wider than 240nm and longer than 240nm
Mx.4 (x=12-13) 480 nm Minimum spacing of METALx wider than 480nm and longer than 480nm
Mx.5 (x=1-3) 135 nm Minimum spacing of METALx wider than 135nm and longer than 135nm
Mx.5 (x=4-6) 216 nm Minimum spacing of METALx wider than 216nm and longer than 216nm
Mx.5 (x=7-9) 360 nm Minimum spacing of METALx wider than 360nm and longer than 360nm
Mx.5 (x=10-11) 720 nm Minimum spacing of METALx wider than 720nm and longer than 720nm
Minimum spacing of METALx wider than 1440nm and longer than
1440 nm
Mx.5 (x=12-13) 1440nm
Mx.6 (x=1-3) 405 nm Minimum spacing of METALx wider than 405nm and longer than 405nm
Mx.6 (x=4-6) 648 nm Minimum spacing of METALx wider than 648nm and longer than 648nm
Minimum spacing of METALx wider than 1080nm and longer than
1080 nm
Mx.6 (x=7-9) 1080nm
Minimum spacing of METALx wider than 2160nm and longer than
2160 nm
Mx.6 (x=10-11) 2160nm
Minimum spacing of METALx wider than 4320nm and longer than
4320 nm
Mx.6 (x=12-13) 4320nm
Mx.7(x=1-3,7-
9) Double patterning Error
Mx.8(x=1-3,7- Density Balancing Rule: The density of decomposed metals should be
9) between 23 and 77%

15
16
2.16 ViaX (Vx) Layers
Rule Value Description
Vx.1 (x=1,2,
4,5,7,8,10,12,VRDL) Vx shape is square
Vx.1 (x=3,6,9,11) Vx shape is rectangle
Vx.2 (x=1,2) 14 nm Vx is a square with 14nm edge length
Vx.2 (x=3) 15, 24 nm Vx is a rectangle with 15nm horizontal edge and 24nm vertical edge
Vx.2 (x=4,5) 24 nm Vx is a square with 24nm edge length
Vx.2 (x=6) 40,24 nm Vx is a rectangle with 40nm horizontal edge and 24nm vertical edge
Vx.2 (x=7,8) 40 nm Vx is a square with 40nm edge length
Vx.2 (x=9) 40,80 nm V9 is a rectangle with 40nm horizontal edge and 80nm vertical edge
Vx.2 (x=10) 80nm V10 is a square with 80nm edge length
V11 is a rectangle with 80nm horizontal edge and 160nm vertical
80, 160 nm
Vx.2 (x=11) edge
Vx.2 (x=12,VRDL) 160 nm V12 is a square with 160nm edge length
Vx.3 (x=1,2) 14 nm Minimum spacing of Vx - Full alignment
Vx.3a (x=3) 15 nm Minimum horizontal spacing of Vx - Full alignment
Vx.3b (x=3) 24 nm Minimum vertical spacing of Vx - Full alignment
Vx.3 (x=4,5) 24 nm Minimum spacing of Vx - Full alignment
Vx.3a (x=6) 40 nm Minimum horizontal spacing of Vx - Full alignment
Vx.3b (x=6) 24 nm Minimum vertical spacing of Vx - Full alignment
Vx.3 (x=7,8) 40 nm Minimum spacing of Vx - Full alignment
Vx.3a (x=9) 40 nm Minimum horizontal spacing of Vx - Full alignment
Vx.3b (x=9) 80 nm Minimum vertical spacing of V9 - Full alignment
Vx.3 (x=10) 80 nm Minimum spacing of V10 - Full alignment
Vx.3a (x=11) 80 nm Minimum horizontal spacing of V11 - Full alignment
Vx.3b (x=11) 160 nm Minimum vertical spacing of V11 - Full alignment
Vx.3 (x=12,VRDL) 160 nm Minimum spacing of V12 - Full alignment
Vx.4 (x=1-12) Vx should be enclosed between Mx and Mx+1
Vx.4 (x=VRDL) Vx should be enclosed between M13 and RDL
Vx.5
0 nm
(x=1,3,5,7,9,11,VRDL) Vx enclosure by Mx on two opposite sides, horizontal direction
Vx.5 (x=2) 3 nm Vx enclosure by Mx on two opposite sides, horizontal direction
Vx.5
10 nm
(x=4,6,8,10,12) Vx enclosure by Mx on two opposite sides, horizontal direction
Vx.6 (x=1,3) 3 nm Vx enclosure by Mx on two opposite sides, vertical direction
Vx.6
0 nm
(x=2,4,6,8,10,12) Vx enclosure by Mx on two opposite sides, vertical direction
Vx.6
10 nm
(x=5,7,9,11,VRDL) Vx enclosure by Mx on two opposite sides, vertical direction
Vx.7 (x=1,3) 3 nm Vx enclosure by Mx+1 on two opposite sides, horizontal direction
Vx.7
0 nm
(x=2,4,6,8,10,12) Vx enclosure by Mx+1 on two opposite sides, horizontal direction
Vx.7 (x=5,7,9,11) 10 nm Vx enclosure by Mx+1 on two opposite sides, horizontal direction
Vx.7 (x=VRDL) 80 nm VRDL enclosure by RDL in horizontal direction
Vx.8
0 nm
(x=1,3,5,7,9,11) Vx enclosure by Mx+1 on two opposite sides, vertical direction
Vx.8 (x=2) 3 nm Vx enclosure by Mx+1 on two opposite sides, vertical direction
Vx.8
10 nm
(x=4,6,8,10,12) Vx enclosure by Mx+1 on two opposite sides, vertical direction

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 Vx.8 (x=VRDL) 80 nm VRDL enclosure by RDL in vertical direction
Vx.9 (x=1,2) 196 nm2 Minimum area overlap between Mx and Vx
Vx.9 (x=3) 360 nm2 Minimum area overlap between Mx and Vx
Vx.9 (x=4,5) 576 nm2 Minimum area overlap between Mx and Vx
Vx.9 (x=6) 960 nm2 Minimum area overlap between Mx and Vx
Vx.9 (x=7,8) 1600 nm2 Minimum area overlap between M7 and V7
Vx.9 (x=9) 3200 nm2 Minimum area overlap between M9 and V9
Vx.9 (x=10) 6400 nm2 Minimum area overlap between M10 and V10
Vx.9 (x=11) 12800 nm2 Minimum area overlap between M11 and V11
Vx.9 (x=12,VRDL) 25600 nm2 Minimum area overlap between M12 and V12

18
2.17 RDL Layer
Rule Value Description
RDL.1 1.6 μm RDL width minimum
RDL.2 1.6 μm RDL spacing minimum

2.18 Other Rules

Rule Value Description
GRID 0.5 nm Shapes on all layers must be on a 0.5 nm grid
Ratio of Maximum Allowed (GATE or Metal Layer Area) to transistor Gate
50:1
ANTENNA Area

19