MICRO

MACHINING
2024 - 2025
WHAT IS
MICROMACHNING
Micromachining is a process used

Types of Micromachining
to make tiny, precise features on
materials. It uses methods like
laser cutting or etching to shape Mechanical Micromachining
materials into small parts. This is Laser Micromachining
often used in electronics to make Electrochemical Micromachining (ECM
parts for devices like Ultrasonic Micromachining
smartphones. Micromachining Electrical Discharge Micromachining
enables the creation of detailed (micro-EDM)
structures that traditional Chemical Micromachining (Wet Etching)
methods can't craft. Dry Micromachining (Plasma Etching)
 MECHANICAL MICROMACHINING
How it works:
Uses very small cutting tools (micro-drills, micro-end mills, etc.)
to physically remove material from a workpiece, similar to
conventional machining but at a much smaller scale.
Features:
High precision (features down to a few microns).
Can work with metals, plastics, ceramics.
Pros:
Precise control over material removal.
Compatible with many conventional materials.
Cons:
Tool wear is significant at small scales.
Hard to machine extremely hard or brittle materials.
Applications:
Microgears, micro-molds, small optical components.
 Tools in Mechanical Micromachining
In mechanical micromachining, several tools are used to create
intricate parts and features at the microscale. These tools include:
Micro-endmills: Used for milling operations to create detailed
features on a workpiece.
Micro-drill bits: Used for drilling small holes in materials.
Diamond-tipped tool bits: Used in diamond turning to create
precision elements with high surface finish.
Spherical diamond tools: Used in diamond milling to generate
aspheric lens arrays.
Microgrinding wheels: Used for grinding micropins and
microgrooves, as well as for fabricating 2D or 3D microcavities.
Cutting tools: These can be as small as 0.001 inch in diameter and
are used for various mechanical micromachining processes.
MICROMACHNING TOOLS
Micro Lathe A micro lathe is a miniature version of a traditional
lathe machine, designed for precision turning of small
parts, typically for hobbyists, prototyping, or
precision engineering.

Size: Compact and lightweight; fits on a

benchtop.
Workpiece Size: Ideal for small
components (1–6 inches in length).
Materials: Works on soft metals
(aluminum, brass), plastics, and
sometimes steel.
Operations: Turning, facing, threading,
drilling, and boring—just like a full-size
lathe.
 LASER MICROMACHINING
How it works:
Uses tightly focused laser beams (often ultra-short pulse lasers)
to ablate or vaporize material in specific patterns. The beam can
be controlled via mirrors or moved using CNC systems.
Features:
Non-contact process.
Can process metals, polymers, ceramics, glass.
Pros:
No tool wear.
Very high precision (sub-micron possible).
Works on complex geometries.
Cons:
Expensive equipment.
Heat-affected zones (HAZ) can alter material properties.
Applications:
Drilling micro-holes in stents, cutting flexible circuits,
marking microchips.
 ELECTROCHEMICAL
MICROMACHINING (ECM)
How it works:
Involves removing material through anodic dissolution in an
electrolyte solution, with the workpiece as anode and the tool as
cathode.
Features:
Non-thermal, non-contact process.
Only works on conductive materials.
Pros:
No thermal damage.
No mechanical stress or tool wear.
Cons:
Limited to conductive materials.
Difficult to control on a very fine scale.
Applications:
Medical implants, micro fuel cells, turbine blades (in
aerospace).
 ULTRASONIC MICROMACHINING

How it works:
A tool vibrating at ultrasonic frequencies drives abrasive
particles (usually in a slurry) into the workpiece, eroding material
through micro-chipping.
Features:
Best for brittle materials.
Pros:
Can machine hard, brittle materials like glass and ceramics.
No heat-affected zones.
Cons:
Slower material removal rate.
Tool wear can be an issue.
Applications:
Dental parts, microfluidic channels, precision optics.
 ELECTRICAL DISCHARGE
MICROMACHINING (MICRO-EDM)
How it works:
Material is eroded from a conductive workpiece by electrical
discharges between a tool electrode and the workpiece,
submerged in dielectric fluid.
Features:
Extremely precise.
Suitable for hard conductive materials.
Pros:
Complex 3D geometries.
Very tight tolerances (±1 µm or better).
Cons:
Slow process.
Requires conductive materials.
Tool wear can affect accuracy over time.
Applications:
Micro-injection molds, tiny fuel injector nozzles, surgical
tools.
CHEMICAL MICROMACHINING (WET
ETCHING)
How it works:
Selective chemical etchants remove material from exposed areas
of the workpiece, often using photolithographic masks to define
patterns.
Features:
Mostly used in semiconductors and MEMS.
Pros:
Very clean, accurate patterns.
Batch processing possible (high throughput).
Cons:
Difficult to control etch depth precisely.
Undercutting and isotropic etching can reduce accuracy.
Applications:
Microchannels, microfilters, MEMS devices.
DRY MICROMACHINING (PLASMA OR
REACTIVE ION ETCHING - RIE)
How it works:
Ionized gases (plasma) are used to chemically and physically
etch away material in a vacuum chamber. Often used after
lithographic patterning.
Features:
Anisotropic etching (etches mainly in one direction).
Pros:
High aspect ratio features.
Excellent control over etch profiles.
Cons:
Requires vacuum system and cleanroom.
Expensive and complex setup.
Applications:
Microprocessors, micro-mirrors, photonic devices.
 High precision and
accuracy.

Ability to create complex

3D microstructures.

ADVANTAGES Suitable for a variety of

materials.

Enables miniaturization of device

 High setup and
equipment costs.

Limited material
removal rates (for
some processes).

Tool wear and thermal

CHALLENGES effects (depending on
the method).
Requires cleanroom or highly controlled environments for some methods.
 CONCLUSION
Micromachining is a set of precision
manufacturing processes used to create tiny
features (micron-scale) on various materials. It
includes methods like mechanical cutting, laser
ablation, EDM, chemical etching, and more. Each
technique has its own strengths depending on
the material, accuracy, and application. It's
essential for making components in electronics,
medical devices, MEMS, and other high-tech
fields.
THANK
YOU
BASUNDHARA SINGH