Haselman 2010
Haselman 2010
P A P E R
0018-9219/$26.00 Ó 2009 IEEE Vol. 98, No. 1, January 2010 | Proceedings of the IEEE 11
Haselman and Hauck: The Future of Integrated Circuits: A Survey of Nanoelectronics
A. MOSFET Basics
The MOSFET has been the building block for most
Fig. 2. Illustration of the operation of a p-type MOSFET. (a) With no
computing devices for the last several decades. A MOSFET potential difference between the gate and bulk, a depletion region
is a four-terminal device made up of a drain, source, gate, forms around the source and drain blocking current flow.
and bulk (see Fig. 1). In digital circuits, the MOSFET is (b) When the gate voltage drops a threshold voltage ðVth Þ below Vdd ,
essentially used as a switch. The source and drain are two the bulk just below the gate inverts to p-type, allowing current
flow from the source to drain.
ends of the switch, with the channel being turned on and
off under the control of the gate. The gate controls the
conduction through the channel through an electric field
and is insulated from the channel by a thin of layer of in Fig. 2) combine around the interface to create a region
silicon dioxide. void of any free carriers. As the gate voltage drops, the
There are two types of MOSFETs, nMOS and pMOS, electrons in the bulk are Bpushed[ away from the gate.
differing in the voltages that turn on the switch. The type is When the voltage drops enough (beyond the threshold
dependent on element used to dope the silicon. Semicon- voltage) and enough electrons have left, the region just
ducting materials such as silicon are not good conductors, below the gate inverts to become p-type material (more
so they are doped with other elements that either contain holes than free electrons). There is now a continuous band
extra electrons (n-type) or are missing an electron of p-type material from the source to drain. This, along
(p-type). When the doping material has an extra electron, with an electric field set up from source to drain, causes
the majority carriers are electrons. When the dopant is electrons to move from hole to hole, creating a current.
missing an electron, the majority carrier is called a Bhole.[ In addition to its ability to perform logic, the MOSFET
The extra holes and electrons are called carriers because isolates the input from the output (gate to source or drain),
they are the charged particles that allow current to flow. which allows the transistor to exhibit gain. Gain is the
An nMOS transistor is a MOSFET with the drain and ability for output voltage to reach the maximum operating
source heavily doped with an n-type material such as voltage, even if the input to the gate is slightly less than the
phosphorous, and the channel is lightly doped with a maximum operating voltage. This is important because a
p-type material such as boron. A pMOS transistor, on the signal can go through thousands of transistors, and if a
other hand, has p-type source and drains and an n-type little voltage were lost at each, the final signal would be
bulk and channel. severely degraded. Another key feature of MOSFETs is the
The operation of a p-type MOSFET (where the drain ability to use them to build more complex structures.
and source are p-type semiconductors and the channel is Complementary MOS (CMOS), the most common logic
n-type) is illustrated in Fig. 2. Fig. 2(a) shows a MOSFET in family, uses complimentary nMOS and pMOS transistors
the Boff[ state, where no current it present in the channel. to build logic gates such as inverters and NAND gates.
With no voltage potential across the gate and bulk, a de- The MOSFET has been the primary building block of
pletion region forms around the drain and source, blocking integrated circuits for more than 40 years. The advances in
any current flow. A depletion region forms at a p-n junction electronics have been driven primarily by the ability to
when holes from the p-type material (source and drain scale down the size of the MOSFETs used in integrated
in Fig. 2) and electrons from the n-type material (channel circuits. This scaling achieves improvements on many
fronts. Smaller transistors allow more to be put on the
same size chip, which has allowed integration levels to rise
from the hundreds of transistors when Moore made his
prediction in 1965 to hundreds of millions of transistors
today. Shrinking the feature size also makes each transistor
faster and consumes less power (This should not be con-
fused with lower chip power, since the number of tran-
sistors per chip generally increases faster than the power
per transistor decreases). The increase in speed comes
from two factors: decreased capacitance and increased
current. The capacitance of wires and gates lowers as these
Fig. 1. Illustration of a generic MOSFET. elements decrease in size, so the amount of charge a
transistor has to place on a wire or gate decreases. The currents (the leakage current discussed above is a portion
increase in current can be seen from the current flow of static current). Dynamic current, and thus dynamic
equation for a transistor when the gate voltage is at its power, occurs when transistors are actively switching.
highest value. A first-order approximation of the current Dynamic power per transistor is reduced with scaling, as
through the channel is given by the equation ID ¼ less current is required to switch the transistor. However,
Cox W 2
2L ðVGS Vth Þ [2]. the static currents, and thus static power, are increasing
The important part of (1) shows how different param- with scaling because of the leakage currents discussed
eters of the MOSFET affect its performance. As the gate- above. Overall, power consumption is rising because of
oxide thickness decreases, Cox increases, which leads to the increase in leakage currents as well as the integration
higher current. A smaller feature size also means the of more and more transistors. For example, the Intel
length of the channel (L) decreases, which reduces the Itanium 2 processor (90 nm process) consumes about
channel resistance. However, as the transistor scales 177 W at peak usage, while the Intel Pentium (250 nm
down, VGS (voltage gate to source) and Vth (threshold process) consumes about 15 W.2 Besides decreasing battery
voltage that turns Bon[ transistor) are reduced. Until life of portable devices, power consumption creates heat,
recently, engineers have been reaping the benefits of the which degrades the chips’ performance and must be
scaling down transistors without any significant disadvan- dissipated. With increasing transistor density, localized
tages. That is beginning to change as the feature size (1/2 heating can become a large problem. Heat increases the
of the minimum distance between two adjacent gates) is resistance of a transistor, thus decreasing its performance.
reduced to tens of nanometers. This sets up the risk of thermal runaway, which can destroy
a chip. Thermal runaway is a destructive cycle of increasing
B. Issues Around MOSFET Scaling resistance’s causing increasing power consumption (heat
The current projections by the International Tech- generation), which in turn further increases the resistance.
nology Roadmap for Semiconductors (ITRS) say that the Another drawback of scaling down the transistors is the
end of the road on MOSFET scaling will arrive some- decreased ability to handle fabrication process variations.
time around 2022 with an 11 nm process.1 Even getting to As transistors and wires become smaller, fewer atoms
22 nm presents some major unsolved hurdles. Among make up the individual parts. For example, the gate oxide
these are increasing power consumption (particularly is currently only about five atoms thick. If merely a single
through leakage currents), less tolerance for process va- atom is out of place, the gate-oxide thickness varies by
riation, and increasing cost. Each of these issues is de- 20%. This lack of predictability significantly complicates
scribed in the following sections. the design process, and it will only become worse as
An ideal transistor only has current flow when it is scaling continues.
Bon[; when the channel is Boff,[ there is no current. This Probably the largest hurdle to further scaling of the
means that the transistor should consume no power if it is MOSFET is simple economics. The cost of a fabrication
Boff.[ Unfortunately, transistors are not ideal; and, as they facility is growing exponentially, along with the exponen-
get smaller, they get less ideal. Leakage current, the flow of tial growth of the number of transistors per chip. As of
electrons through paths that should not conduct in an ideal 2005, a new fabrication facility cost around $3 billion to
transistor, now constitutes almost half of the power con- construct. This cost is rising exponentially as a direct result
sumed by a chip. Leakage currents come from two primary of the increase in mechanical precision required to fabri-
sources. Gate-oxide leakage occurs when electrons jump cate the integrated circuits. Since the cost of the fabri-
(Btunnel[) from the gate to the channel through the gate cation plant is spread across the cost of each chip, this
oxide. Scaling reduces the thickness of the oxide. The drives up either the cost-per-chip or the number of chips
thinner the oxide, the higher the leakage due to tunneling that must be produced.
becomes. Subthreshold leakage occurs when a current
between the drain and source is present even though the C. Nanoelectronics
gate voltage is below Vth and the channel should be Boff.[ Given the history of the semiconductor industry, most
Subthreshold leakage becomes worse as Vth is lowered and of these issues can probably be solved with current pro-
as the channel length is decreased, both of which generally cesses. However, there are two significant exceptions.
occur when a transistor is scaled down. Physical size limitations and astounding costs may require
With the advent of portable computing devices, power a shift in the fundamental way integrated circuits are
consumption is becoming a primary focus of IC manu- fabricated. Many researchers believe this shift will be to
facturers. Power is the product of current and voltage. The nanoelectronics. With a mix of chemistry, physics, biology,
fabrication process sets the voltage, so power is essentially and engineering, nanoelectronics may provide a solution
dependent on the current levels in a device. Currents are to increasing fabrication costs and may allow integrated
considered in two separate areas: dynamic and static
2
See http://download.intel.com/design/PentiumXE/datashts/
1
See http://www.itrs.net. 31030602.pdf.
Fig. 8. Cross-sectional view of a CNT memory cell with 1) Fabrication: The growth of NWs has been achieved by
metal electrodes [14]. methods such as laser ablation [17], chemical vapor de-
position [18], and vapor–liquid–solid (VLS) synthesis [17],
[18], or a combination of a couple of these methods. These
between the perpendicular CNTs, are a B0.[ To read a cell, methods are also employed to produce carbon nanotubes,
current is sent down one CNT; if current is detected on the except that instead of carbon, a semiconductor is used for
output of the orthogonal CNT, the two CNTs are making the raw material. If a nanowire is going to be used as a
contact. A like charge can be placed on two contacting semiconductor, the method of growth should have enough
CNTs to separate them and erase a 1. Mechanical forces control that the dopant levels of the nanowire can be
will keep the two CNTs separated when the like charges controlled along its length. One such method of controlled
are removed. The fact that the CNTs stay in their confi- growth is VLS (see Fig. 9). VLS growth is a method of
guration without electrical charge due to van der Waals or growing crystalline structures using a liquid catalyst or
mechanical forces makes this memory nonvolatile. seed such as gold or iron. The catalyst is in a chamber with
The RAM in Fig. 7 requires two layers of CNTs, with a vaporized nanowire materials (silicon or germanium plus a
placement of the top layer over the spacers. This is a possible dopant). All of this is done in a heated chamber,
difficult task with CNTs, so the design was modified to only where the temperature is kept high enough that the cata-
have one layer of CNTs, which are suspended over metal lyst remains a liquid. The liquid catalyst absorbs the va-
electrodes (see Fig. 8) [14]. The metal electrodes are porized materials until it becomes supersaturated, at
arranged in long troughs, and the CNTs are placed orthog- which point a solid crystal begins to form. The nanowire
onally over the troughs, eliminating the need for exact will continue to grow until the catalyst is cooled and be-
placement. To increase the robustness of the memory, each comes solid or the vaporized crystalline material is used up.
cell contains multiple CNTs connected to a contact. The The size of the catalyst determines the diameter of the
read/write procedure is identical to the above architecture. nanowire [16]. The catalysts are composed of metals such
Despite the many good qualities of CNTs, many hurdles as gold or iron and can be created with laser ablation [17]
must still be overcome before devices built with this of a target that contains both the metal and the nanowire
technology are feasible. Most of these issues surround the material. Laser ablation has been shown to create very
fabrication of the CNTs [4]. One problem is that while it is uniform diameter catalysts, which in turn creates uniform
possible to bias the process to produce more of more of one diameter nanowires. This provides relatively uniform elec-
kind of CNT (semiconducting or metallic), all methods of trical characteristics.
fabrication produce some of both. A method has been When dopant materials such as boron or phosphorus
developed to separate the two varieties [15] but requires are added to the vapor, the nanowire will become
suspending the CNTs in a solution. This will not work for semiconducting. It can act as a p-type or n-type conductor,
CNTs that are grown in place with CCVD. Since CCVD is
likely the best solution for getting CNTs arranged into
some kind of structure, putting the CNTs into solution
seems impractical. Other aspects of fabrication that are not
currently controllable include the diameter and the chi-
rality of the nanotube. Since chirality and diameter affect
the electrical properties of the nanotubes, and uniform
device characteristics are critical to circuit design, it is very
important to devise a method for obtaining consistent
nanotubes.
B. Semiconducting Nanowires Fig. 9. A proposed silicon nanowire growth method. Laser ablation
is used to vaporize an iron and silicon target. The hot vapor condenses
Semiconducting nanowires (NWs), like CNTs, can be in a liquid catalyst, and the temperature is kept such that the
used as interconnect wires to carry signals as well as an iron/silicon seed remains liquid. The silicon nanowire grows as the
active device. While one CNT is either an active device or a catalyst absorbs more silicon and becomes saturated [17].
depending on the dopant [19]. In addition, the NWs can be conduction, nanowire conduction is influenced by edge
so heavily doped that they begin to conduct like a metal effects. The tube structure of carbon nanotubes dictates
[19]. The controlled growth of the nanowires also allows that all atoms are fully bonded to other atoms (in a defect-
for the doping to be varied along the length of the nano- free structure). However, NWs are a solid wire, and
wire. Controlling the type and amount of dopant material therefore atoms on the edge are not completely bonded.
present in the vapor at specific time intervals does this. While the core of the NW is metallic, and thus conducting,
Nanowires can also be coated with different materials after the atoms on the outside of the wire lower the conductivity
fabrication [20], resulting in a wire with a semiconducting of the wire because they often contain defects in the
core and an insulative covering. To form this covering, crystalline structure. As the nanowire shrinks, the atoms
once the nanowire is made, a new material is vaporized so on the surface of the wire represent more and more of the
that it will bind to the whole wire, leading to a thin, overall structure. The edge effects become more promi-
uniform sheath. If this sheath is composed of an insulative nent, worsening the overall conduction of the NW.
material such as silicon dioxide, it can electrically isolate At first glance, NWs and CNTs seem to be very similar.
the NW. This can insulate overlapping wires from one Both are capable of forming active devices and interconnect
another, or it can separate parallel wires [21] to help form wires with dimensions of a few nanometers. However,
an array (Section III-A). there are some differences that make NWs more promising
than CNTs. While CNTs are physically strong, and their
2) Nanowire Electrical Devices: By controlling the doping metallic form has excellent conduction properties, the
profile along the length of the NW, active devices can be inability to grow CNTs with desired properties is a major
integrated into a NW. A field-effect transistor (FET) can be obstacle to their large-scale usage. Current methods for
created if a nanowire has a small section that contains creating CNTs produce both semiconducting and metallic
fewer carriers than the rest of the wire [22]. Lowering the structures, and their semiconducting characteristics even
concentration of the dopant atoms in the growing atmo- vary from tube to tube. On the other hand, the doping levels
sphere for a period of time can make this lesser doped of NWs, and thus their conduction properties, can be very
region. If another wire is placed over the top of this region, tightly controlled. The doping levels can also be varied
with an insulator separating the two wires, a FET is along the length of a NW, while a CNT is either all semi-
created. To control the current, a charge is place on the top conducting or all metallic. As discussed previously, this
wire to deplete the carriers in the FET regions of the lower control provides many more active device possibilities for
wires [23]. The rest of the wire is not affected because its NWs. Also, techniques for creating regular arrays are much
concentration of carriers is high enough that it is not more developed for NWs (Section III-A) than for CNTs.
depleted. Another way to create a device, which does not
require another controlling wire, is to create a p-n junction C. Molecular Devices
diode. This can be done in two different manners; the Even though NWs and CNTs can be used as active
easiest is simply to cross one p-type and one n-type semi- devices as well as wires in nanoelectronics, there is also a
conducting NWs, creating a connection [24]. Where the set of molecules that could be used as the active devices.
two wires contact each other, a p-n junction is formed. The These molecules behave as diodes or programmable
other way to create a p-n diode with a nanowire is to create switches that can make up the programmable connections
one on a single wire [22]. This is done by growing part of between wires. Chemists have designed these carbon-
the nanowire with a p-type dopant and then switching to based molecules to have electrical properties similar to
an n-type dopant for the remainder of the nanowire their solid-state counterparts. Molecular devices have one
growth. huge advantage over solid-state devices: their size.
There have also been experiments using nanowires as Thousands of molecules can be sandwiched between two
the channel in a more conventional FET, similar to what is crossing microscale wires to create an active device that
done with CNTs [25] (as in Fig. 5). NW FETs have a few takes up very little area. Current VLSI crosspoints made of
advantages over CNT FETs. One is that NWs will remain pass transistors are 40–100 times larger than a wire
n-type and p-type when exposed to oxygen, while CNTs crossing or via [26]. Since molecular devices fit between
will revert from n-type to p-type. A much larger advantage the wires, large area savings could be achieved. For exam-
is the ability to control the doping, and therefore the ple, it has been estimated that the use of nanowires and
semiconducting properties of the NW during construction. molecular switches could reduce the area of an FPGA by
Recall that with CNTs, the conduction is dependent on the 70% over a traditional SRAM-based design at a 22 nm
chirality of the tube, which cannot currently be controlled process [27]. In addition to being very small, molecular
during fabrication. devices tend to be nonvolatile: the configuration of the
The ability to grow NWs hundreds of micrometers long molecules remains stable in the absence of electrical
makes them attractive as interconnect wires as well as stimulation. In the presence of electrical stimulation,
devices. Due to their size, nanowires show unusual elec- programmable molecular device can be turned Bon[ and
trical properties. Unlike CNTs, which exhibit ballistic Boff,[ which can be used to perform logic.
with two stable states. Hysteresis in this case means that the
current through the other, thus changing the data node device turns on and off at different voltages. This is
voltage. illustrated in Fig. 15, where the molecule starts conducting
To store a new value in the latch, V is lowered to (turns on) at about 1 V and stops conducting (turns off) at
Vmono , as shown in Fig. 12. Once the latch has reached the about 1.5 V. The molecules are switched Bon[ and Boff[
new steady state, V is raised back to Vref while the input with high voltage and operated with lesser voltages. For
current is applied to the in node. If the input current is example, [2]catenane is switched on with 2 V and off with
above a certain threshold, Vout will be high and the latch 2 V, and is read with 0.1 V [44]. These molecules are
will stabilize in the B1[ state. Likewise, if the input current mechanically switched Bon[ and Boff[ when one compo-
is low, Vout will be low and the latch will settle in the B0[ nent is moved in relation to the other by either oxidation
state. These latches have been used to make memory cells (removal of electrons) or reduction (addition of electrons).
where Vref is a clock signal and the latch is refreshed on For [2]catenane, one ring rotates through the other; for
each clock cycle [39]. [2]rotaxane, the ring slides back and forth on the rod. These
While the previous diodes have nonlinear current– molecules are essentially variable resistors that can be
voltage characteristics, it is important in some architec- switched between two resistance values. For example,
tures to restrict current to one direction. In semiconductor [2]rotaxane has a 200x difference in resistance between its
electronics, this is achieved by a rectifying diode. Bon[ and Boff[ state. Since they are resistors, current can
Researchers have been able to build rectifying diodes pass both ways through the molecule, as shown in Fig. 15, as
with molecules as well [40]. Although these devices cannot opposed to the diode discussed above. Note that some of the
be switched Bon[ and Boff[ like the RTDs discussed above, references show molecular switches behaving as diodes,
they still may have a place in molecular electronics. They but this is an artifact of the material that the molecules are
can be used in logic, as shown in Fig. 11. They also can be connected to for testing rather than the molecular switch
used to control the direction of current flow in an array itself [44].
structure (Section III-A). Since these molecules conduct current in both direc-
tions, this may limit the applications in which molecular
2) Molecular Switches: In addition to molecular diodes, switches can be used. Although architectures based on
there are also molecules that behave like simple switches. these molecular switches have been proposed [46],
The most widely known molecular switches are from a
group of molecules called rotaxanes and catenanes.
Rotaxanes and catenanes are molecules that are made up
of two or more components that are mechanically linked
[41]. This means that the components can move in relation
to one another without breaking covalent bonds. Cate-
nanes are made up of two or more interlocking rings, as
shown in Fig. 14(a). Rotaxanes consist of at least one ring
(called a macrocycle) that is trapped on a rod that has two
bulky ends, which prevents the ring from Bsliding[ off
[see Fig. 14(b)].
Certain rotaxane and catenane molecules have been
shown to behave as molecular switches that can be prog-
rammed on and off [42]–[44]. [2]Rotaxane [43], [45]
(the B[2][ is common chemistry nomenclature for the
Fig. 15. I–V curve of a [2]rotaxane molecule cycled on and off
number of components in the molecule) and [2]catenane multiple times. The curve is linear when the molecule is ‘‘on,’’
[42], [44] are molecules that have been fabricated and but the current drops off when it reaches the ‘‘off’’ threshold,
shown to exhibit hysteretic I–V characteristics (see Fig. 15) around 1.5 V. It turns back ‘‘on’’ at about 1 V [45].
resistors alone are not ideally suited for performing logic nanowire FETs, diodes, and molecular switches
because of signal degradation. These switches will have will be preferred.
to be incorporated with other devices to create logic 3) Wire-to-wire connections will need to be achieved
(Section III). Molecular switches are probably better by orthogonal overlapping of the two wires. The
suited for memory devices where only one transistor is inability to manipulate individual wires means
encounter per memory read. that it will likely be impossible to assure two
Even though these molecules conduct in both direc- parallel wires will line up end-to-end or even
tions, it is important to orient these molecules. This is overlap.
important because if molecules are arranged in both 4) Nanoscale to microscale connections will have to
Bdirections,[ an attempt to turn Boff[ the molecules will be sparse and should be done with orthogonal
turn Boff[ some but will also turn Bon[ others. This is overlapping. Similarly to point 3), it will likely be
accomplished by engineering different characteristics for impossible to assure an end-to-end connection of
each end of the molecule. For example, making one end microscale and nanoscale wires. Even if connec-
hydrophobic (repels water) and the other end hydrophilic tion could be assured, the microscale wire pitch
(attracts water) could be used to help align the molecules would greatly spread out the nanowires, negating
in that same direction during assembly. the area savings of nanowires. Also, because of the
size difference, nanoscale elements will be slow
when driving microscale devices.
II I. ARCHITECTURES
All of the devices discussed above have been fabricated and A. Array-Based
tested to differing degrees. However, a crucial step is to Currently, the most popular architecture for nanoelec-
integrate these devices into an architecture that takes tronics is array-based design with nanowires or nanotubes
advantage of their strengths and overcomes their limita- overlapped to make a grid. The reason for their popularity
tions. An efficient architecture is strongly dependent on is that techniques for creating them are well established,
the available devices and manufacturing capabilities. With and such arrays address many of the issues discussed
current transistors and lithography, essentially any circuit above. It is impossible to select individual junctions of an
can be created and manufactured with high reliability. array to contain switches, so arrays will likely be full
This level of control is unlikely to be possible for crossbars. This full-crossbar nature makes it easy to avoid
nanoelectronics. Because of their small size, nanoelec- defects since any line can be replaced by another line with
tronic devices will likely not be able to be deterministically the same orientation (horizontal or vertical) [49]. The
placed. Researchers have been able to manipulate positions where two wires overlap can create many two-
components with atomic force microscopes, but this will terminal devices, including ohmic contacts [50], program-
be impractical for full chips. Even if advances in mable switches [42]–[45], and diodes [28], [29], [37].
manufacturing allow other ways to manipulate at this Finally, as we will discuss, parallel nanoscale wires attach
scale, the tolerances required will likely make the costs more easily to microscale wires than trying to line up two
prohibitive. Current approaches to these problems include wires end-to-end [51]–[53].
three major ideas.
1) Let the circuits assemble themselves (self-assembly). 1) Array Creation: There are several methods that can
2) Manipulation at a higher level (i.e., guide a group align nanowires and nanotubes into parallel rows several
of wires so they line up in the same direction). nanometers apart; the Langmuir–Blodgett flow is one such
3) Use a totally random process (i.e., place enough technique [21], [40], [54]. Langmuir and Blodgett
elements until statistics imply that things should discovered this technique in the early 1900s for depositing
work). a single layer of molecules on a film. The nanowires or
This is a significant departure from microscale fabrica- nanotubes are suspended in a liquid that flows over a sub-
tion, where carefully controlled lithographic processes strate. As the liquid flows over a Langmuir–Blodgett
dictate the placement of each individual element. There trough, the wires are compressed in order to line them up
are some consequences to this bottom-up approach to (see Fig. 16).
assembly [47], [48]. A layer of oxidation grown around the wires (see
1) Defects are inevitable and must be handled Section II-B) controls how closely the wires can be packed
(Section IV). together (their pitch). Once one layer of wires is deposited
2) Three-terminal devices will be hard to fabricate. on a substrate, another flow can be performed and depo-
While a two-terminal connection can be estab- sited at a right angle to the first layer, thus creating a grid.
lished merely by overlapping two wires perpen- Notice that while this technique can control the alignment
dicularly, the stochastic nature of the assembly of most of the wires in the direction of the flow to within a
means that the probability of aligning three things few degrees [40], there is no control over where the end of
will be very low. Two-terminal devices such as a wire will line up or where any particular wire is
deposited in the array. This lack of precise control will 2) Array-Based Logic: An array of nanowires or
have large implications when circuits are fabricated nanotubes alone is not enough to create most electrical
with this technique. This technique has been able to circuits. These nanowires or nanotubes need to be
deposit nanowires with an average pitch of 90 nm [21], integrated with computation elements for the array to do
but it is believed that pitches 3–4 smaller will be something useful. There are several ways to integrate these
achievable. devices into an array. One is to place molecule devices
Nanoimprint lithography is also a well-established (Section II-C) between two wires at junction points where
technique for producing aligned nanowires [56], [57]. It is one wire crosses over another. Another method to create a
similar to conventional lithography except that instead of device is to selectively dope a section of a nanowire
using light to etch a pattern, this technique uses a mold. (Section II-B) to create a FET, provided another wire is
The first step is to create a mold in the pattern of the placed across the FET to control conduction (this cannot
desired array. This is done with electron beam lithography. be done with CNTs currently).
Electron beam lithography can achieve significantly One design that uses both molecular switches and FETs
smaller feature sizes than current lithographic processes. is the nanoPLA [60]–[63]. NanoPLA is a programmable logic
Current technologies use light and a mask to pattern VLSI array (PLA) that uses a combination of nanowires, con-
circuits. The light is Bshined[ on the mask, which has figurable molecular switches, and nanowire FETs (Fig. 18).
cutouts of the desired pattern, and the light passes through A PLA is a reconfigurable logic architecture that directly
the cutouts to create a pattern on the photoresist. This implements a two level sum-of-products computation. It
method is quick because the whole pattern is etched at does this with a programmable AND plane that leads to a
once, but it has a resolution limit of about 45 nm due to the programmable OR plane (created by NOR-NOR planes in
mask’s causing the light to diffract. Electron beam lithogra- nanoPLA). The input NOR plane in nanoPLA is accomplished
phy uses an electron beam to pattern a circuit. The elec- by programmable diode crosspoints (OR plane in Fig. 18) that
tron beam draws out the desired pattern on the photoresist perform a wired-OR, followed by an array of nanowire FETs.
directly instead of using a mask. This method can achieve a The nanowire FETs provide signal restoration or signal
resolution of about 10 nm [57], but it is a slow process.
This time-consuming process is acceptable for nano-
imprint lithography though because it only has to be
done once per mold. That mold can be copied countless
times [58], and those copies can be used to make imprints
very rapidly.
The second step in nanoimprint lithography is to press
the mold into a layer of resist over a substrate [see
Fig. 17(a)]. After the mold is removed [Fig. 17(b)], some
resist remains in the compressed channels. This extra re-
sist is etched away with a process called reactive ion etch-
ing to reveal the substrate [see Fig. 17(c)]. The final step is
to deposit metal onto the pattern to fill in the channels and
create the wires. Even though this process has been used to
create a 1-kbit memory at a 30-nm half-pitch (half the
distance between two lines) [59], there is some doubt
about how small a pitch is achievable and whether multiple
molds will be able to be aligned [48], [57]. Fig. 18. Organization of a nanoPLA block [61].
both directions, rows that are charged could then charge microscale wires directly to each nanoscale wire to access
other columns that were not charged with the column the memories. While this is adequate for proof-of-concept
decoder. These other charged columns could then charge for the small array, this is impractical for large memory or
the output row erroneously. logic devices since the microscale wires will dominate the
When the CMOL circuit in Fig. 19 is fabricated as a area. Thus, there cannot be an input/output pin for each
memory, nanoscale devices are used as the memory cell to wire in the array. This problem is addressed in the memory
achieve a high density, while the microscale infrastructure in Fig. 21 with a decoder to connect microscale wires to
is used to configure the molecular switches (write opera- nanoscale wires [51]. If microscale wires and nanoscale
tion) and to read the memory. While this has a density wires were attached end to end, the pitch of the microscale
advantage over standard lithographic memories, since the wires would set the pitch of the nanoscale wires,
memory bits themselves are essentially free in area, the use eliminating many of the area gains of nanoscale electron-
of lithographic wires inside the array makes this device ics. The alternative is to cross the two sets of wires at a
much larger than most potential nanowire-based devices. right angle to one another (see Fig. 22).
However, the simplicity makes these devices much easier DeHon’s proposed decoder uses microscale wires to
to fabricate. control the FETs in the nanowires. The nanowires are
Nanoscale memories, if realized, will drastically change coded with an (n=2)-hot scheme, where n is the number of
the current memory model. The memories will be very possible controllable regions (number of microscale
compact because the area required to store a bit is only the wires). This means that each nanowirehas (n=2) FETs
cross point of two wires. This memory would also be non- n
that are controllable, and there can be uniquely
volatile because the molecular switches do not lose their n=2
state without power. This means that it may be possible to coded nanowires. For example, in Fig. 22, n equals six, so
have memory as fast as DRAM but nonvolatile like FLASH. each nanowire has three controllable p-type FETs, and
there can be 20 unique codes. In order to make a nanowire
4) Interfacing Nanoscale to Microscale: For at least the conduct, zeroes are driven over each FET of that wire,
first couple of generations of nanoelectronics, lithography- while ones are driven on all other (n=2) wires to stop all
based nanoscale electronics will probably be required for other nanowires from conducting.
things such as I/O, signal restoration, and Vdd =Gnd There are many issues that make this decoder
distribution. The importance of this is illustrated by two complicated. One concern is that there is no way to
memory designs discussed above. HP memories attached control how the FETs of a nanowire will line up with the
at address zero (on microwires a–d in Fig. 23) and to tolerate errors. These parameters are the code length,
increases the address until one that is working is found. weight, and Hamming distance (six, three, and four, re-
Working means that one of the microwires is charged up. spectively, in Fig. 24). The code length is the number of
When a working stochastic address is discovered through lines coming out of the address encoder. The weight of the
the stochastic decoder, it is assigned a deterministic or code is the number of ones in the code. Each output of the
known address by configuring the programmable FETs. encoder always has the same weight. The Hamming dis-
The FETs are programmed to be controlling or not con- tance is the number of bit flips required to go from one
trolling, using an (n/2)-hot scheme again. For example, in address to another. This limits the number of possible
Fig. 23, if the nanowire was p-type, when the address on addresses, but it also is the mechanism for fault tolerance.
micorwires a–d is 0101, the nanowire will be discovered to Notice in Fig. 24 that if the decoder is free of defects, then
conduct. If the next deterministic address to be prog- one output nanowire is at full voltage while the rest are at
rammed is 0011, the programmable FETs over microwires 1 some lesser voltage. Assuming only stuck-open defects, a
and 2 will be configured as controlling while microwires 3 fault in a molecular switch or wire for the targeted line will
and 4 will be configured noncontrolling. Now only the still result in a full voltage output. If the fault is on a 0 V
address 0011 will allow the nanowire to conduct because line for an output line that is not intended to be charged,
any other address in a (n/2)-hot scheme will have a B1[ on the voltage will increase, but there is still enough of a
microwire 1 or 2. Once the FETs are programmed, only the difference between the two output lines to determine
deterministic addresses are used, and the controlling wires which line is being selected, as it takes multiple faults to
for the stochastic decoder are set such that the nanowires create an error.
conduct through that region. This converts addresses that Although in Fig. 24 it appears that it would be better to
are randomly placed in the address space into known just connect the output lines directly to the CMOS circuits,
addresses. Two suitable technologies for the programmable there are several reasons that this is not the case. One is
FETs have been proposed [50], [67]. that many more output lines can be controlled as the
Another proposed decoder also uses an (n/2)-hot number of address lines out of the address encoder in-
scheme but approaches the need for deterministic address- creases. For example, 237 output lines can be controlled
ing and fault tolerance very differently [68]. The decoder with only 22 address lines [68]. Another advantage is that
in Fig. 24 uses a combination of a CMOS address encoder if one of the address nanowires is broken, this scheme still
and a nanowire crossbars to Bturn on[ a single nanowire works. This decoder does have some pieces that will not be
with a deterministic address. The deterministic addresses easy to fabricate. One difficult part would be the need to
are expanded to a sparse, redundant code by the address place the programmable molecular switches at certain
encoder. The sparse code has three parameters that can be nanowire–nanowire junctions. Current techniques for de-
tuned to change the number of output lines and the ability positing molecules, such as the Langmuir–Blodgett flow,
distribute a layer of molecules and cannot place individual
molecules. There is also no discussion of how the vertical
nanowires would be connected to the CMOS address
encoder.
Each of these three encoders has its strengths and
weaknesses. While the first decoder has a digital output
(ideally only one output has any voltage), it has many dif-
ferent parts, which may be difficult to achieve in nano-
electronics. The last two are simpler approaches, but they
have outputs that are controlled by voltage divider circuits.
This means that the connecting circuitry has to be de-
signed to handle intermediate voltage values properly. The
last two decoders also have the advantage of not having to
use high-impedance semiconducting nanowires. Finally,
the last decoder does not require the discovery of ad-
dresses, as the first two decoders do.
B. Random Structures
In contrast to the regular structure of an array, there
are a few architectures that are much more random. One
example, Nanocell [30], is a block that has a random
Fig. 24. Microscale wire to nanoscale wire decoder [68]. network of molecules that act as negative differential
The 2-bit input address is expanded by the address encoder to a resistors (see Fig. 25). The network is created by randomly
redundant 6-bit address that selects one output nanowire. depositing very small conductive particles (nanoparticles)
be 1000 [75]. A defect probability of 109 is about what is due to an error in a prior stage, and the other bundle has
being achieved with the state-of-the-art (2006) VLSI no stimulated lines (all zeroes). The output of the execu-
processes. The second issue is the requirement that the tion stage has only three stimulated lines because the
voting circuit must be fault-free. As discussed previously, random permutation unit (block U in Fig. 32) groups
there should not be any single component in nanoelec- inputs to the majority gates (block M in Fig. 32) so each
tronics that must be fault-free in order for a chip to be majority gate has a random input from each of the three
functional. input bundles. In this case, the execution stage degraded
the signal because it outputs two zeroes and only three
2) Von Neumann Multiplexing: Von Neumann multi- ones. If you follow the signals through the restoration unit,
plexing (see Fig. 32) is very similar to NMR but removes and again assume that the Brandom[ permutation unit
the reliance on a single voting circuit. As in NMR, the logic does not pair wires from the same bundle together or
units and inputs are duplicated N times, but instead of create the same permutation for more than one majority
voting on the outputs to produce a single output, all of the block (i.e., pairing the output from the first three execu-
outputs are kept. If all of the inputs are correct and all of tion majority blocks into the first two restoration majority
the logic gates are defect-free, then all of the outputs will blocks), then four of the five lines will be stimulated and
be correct. However, if some of the inputs are incorrect sent on to the next stage as a Btrue[ bundle. It is also
(errors from a previous stage) or there are faults in the possible for a given permutation to output a Bfalse[ bundle,
logic, some of the outputs will be incorrect. The outputs but this scheme can be done with NAND or NOR gates in
are considered true if ð1 ÞN or more signals are true place of the majority gates in Fig. 32 except two restoration
and false if N or fewer signals are false, where is a stages are needed because of the inverting nature of NAND
predetermined threshold (0 G G :5). If the distribution and NOR. Since NAND and NOR are universal logic gates, any
of the outputs lies between these two values, then the circuit could be transformed to be multiplexed. One issue
circuit is considered to have malfunctioned. Fig. 32 shows with this scheme is what happens to the final output.
that there are two stages in a multiplexing circuit: the Conceivably, the bundled signals could be used throughout
execution and restoration stages. The execution stage is the whole circuit, and external circuitry such as CMOS
where the desired function is performed. The purpose of could Bvote[ on the output.
the restoration stage is to correct any Bdegradation[ of It has been shown that NAND multiplexing could be a
signal caused by the execution stage. A degraded signal is viable fault-tolerance technique for nanoelectronics, but
when the output bundle from the execution unit contains only at high levels of redundancy [38], [39], [77]–[80].
more errors than any of the input signals. An example will Simulations have determined that with a fault rate of 103
show how a multiplexer can resolve faults. per device, a redundancy level (number of times circuit is
Von Neumann gave examples using NAND and majority replicated) 105 is needed to assure 90% of the chips will
gates (this is why this technique is often called nand or work correctly [61]. This means that a chip with 1012
majority multiplexing). A majority gates example is shown devices will actually function as a chip with 107 devices. It
in Fig. 32. If N ¼ 5 and ¼ 1=5, then at least four lines should be noted that some of the redundancy is in the form
need to be true for a bundle of lines to be considered true. of extra stages in the restoration stage. Fig. 32 was shown
The inputs come in as bundles that consist of the same with only one restoration stage for simplicity, but it has
signal duplicated N times. In Fig. 32, two of the input been shown that multiple stages increase the reliability of a
bundles have only four of the five lines stimulated (logic 1) design [38], [77], [78], [80].
Fig. 32. Majority multiplexing example that shows the function D. Fault Tolerance Conclusion
of the restoration stage. Block U is a random permutations unit Fault tolerance has come full circle since the pioneer-
and block M is a majority gate. ing work by von Neumann, but with a much different
knowledge of the underlying technology can provide better local minimum created if a greedy algorithm was used. The
implementations. first step of simulated annealing is to create a random
The technology mapping step is responsible for feasible placement. The next step is to swap two random
implementing the circuit netlist in the components that blocks of the circuit (LUTs in FPGAs). If the new place-
are available in the target. The basic logic element in most ment is better than the previous, then the move is ac-
modern FPGAs is an SRAM-based LUT that can perform cepted. The unique feature of simulated annealing is that
any arbitrary N-to-1 logic function (N is normally between along with accepting the good moves, a certain percentage
4 and 6, depending on the manufacturer). Most modern of bad moves are accepted. The rate at which bad moves
FPGAs contain dedicated resources such as multipliers, are accepted is a function of the temperature, so that as the
memories, and carry chains for fast addition. Technology placement progresses and the temperature is lowered,
mapping for FPGAs takes the netlist produced by logic fewer bad moves are accepted. The most difficult and
synthesis and decomposes it into LUTs and the dedicated important part of a simulated annealing algorithm is de-
resources. Optimizations for power, area, and performance termining what Bbetter[ is. Better is determined by a cost
can be made in technology mapping by making economic function that takes into account parameters such as critical
use of an FPGA’s resources. For example, if many 4-LUTs path delay, signal congestion, and overall wire length
are used for two or three input functions, the area will be needed to route the placement.
larger than necessary. For most proposed nanoelectronics, the problem of
For nanoelectronics, logic synthesis and technology placement will be similar to FPGA placement. However,
mapping will closely resemble the algorithms for FPGAs while a placer will still try to minimize communications
because both nanoelectronics and FPGAs contain very costs, it must now be aware that some parts are defective
regular structures. The main difference will be customiz- and cannot be used in a placement. There may also be
ing to logic resources such as crossbars and diodes instead additional constraints, depending on the architecture. For
of LUTs. Technology mapping may be easier for nanoelec- example, nanowires and nanotubes tend to be short, so
tronics because of their homogeneous nature. Most of the long-distance communications may be very costly.
proposed architectures have only one or two methods for After placement, routing selects the interconnect re-
performing logic, eliminating the need to target embedded sources to carry signals from their source to their desti-
multipliers, carry chains, etc. The impact of possible de- nations within the chip. The main goal of routing is to
fects at this stage depends on the architecture and fault- reduce delay without overusing any routing channel.
tolerance scheme used. For example, if the architecture is FPGAs have a fixed number of wires in the rows and
a PLA-based design, and a fault in the PLA is handled by columns between the logic, which means that congestion
reducing the amount of inputs, outputs, and/or product can occur. Congestion is when the optimum routing solu-
terms available, the technology mapper will need to be tion places more signals in a row or column than there are
aware of the reductions. An algorithm may decompose the wires. The crux of most routing algorithms is to start a
logic into a range of PLA sizes and let the next step find systematic search for paths from the signal source. For
PLAs that meet the requirements. On the other hand, if the FPGAs, extra steps may be required because of congestion.
architecture is LUT based and entire LUTs are thrown out To handle congestion, the signals are rated by their criti-
if a defect is present, then the technology mapper will not cality (how close the signal delay is to the longest delay
need to be concerned with defects. path), and the signals that are less critical are forced to
Placement, the next step in the CAD flow, decides route somewhere else.
exactly what components on the chip will be used to im- Routing of nanoelectronic circuits again will be similar
plement each logic function. While technology mapping to FPGAs, since most nanoelectronic systems have prefab-
determines whether a function should go into a 4-LUT, the ricated routing channels that are customized to a specific
placer determines exactly which 4-LUT on the FPGA to use application. However, the router must be defect-aware to
for that function. The goal of placement is to minimize the avoid using defective interconnect resources. This can be
communication costs by keeping cells that communicate accomplished by removing the defective resources from the
with each other close. This step can save area, power, and routing graph.
delay by minimizing the lengths of interconnect wires. In addition to the steps above, an additional step must
The most popular placement algorithm is simulated be added to a nanoelectronic CAD flow to handle faults.
annealing [82], which was inspired from metallurgical The most effective way of mitigating defects is to test and
annealing. The idea in metallurgy annealing is to slowly configure around them. This requires a step before the
cool the metal so that crystals (which represent the lowest placement so that no defective parts are used. As discussed
energy state) can form. In order for this to occur, mole- in Section IV-A, this will be difficult and time-intensive,
cules must gain energy in the form heat to escape from given the number of possible devices. On the other hand, if
their local minimum configuration. In placement, this software-inserted redundancy is used for fault tolerance,
equates to accepting some moves that actually make the some additions to the front end of the CAD flow will be
placement worse so that the placement can escape any needed to add that redundancy. A step at the start of the
flow will need to add the required redundancy automatic- chips must be shipped working and require no user
ally, along with any needed voting circuitry. The technology intervention to keep working.
mapping will then be able to map the circuit, including the If nanoelectronic circuits are going to be used more
redundancy and voting circuits, just like any other circuit. like FPGAs, configured by the end user, there are other
After a design is routed, it can be deployed. This is possible methods for deploying the fault map. The map
where FPGAs and nanoelectronics are different from other may be kept in software. This could put the responsibility
chips. For custom integrated circuits, each chip is tested to of mapping the faults on the end user as a part of the
check for fabrication errors and any defective parts are normal CAD flow. Alternatively, since nanoelectronic
thrown out, while the working chips are deployed. This is arrays seem to be well suited to memories, putting the map
possible because the probability of a device’s being in memory on the chip may be a viable option.
defective is about 109 , while there are on the order of Overall, many parts of the FPGA CAD flow will be
108 devices per chip . The manufacturer must test FPGAs, useful for nanoelectronics, but there will have to be some
but their homogeneity and reprogrammability mean nontrivial additions. Technology mapping, placement, and
defective chips might still be deployed with a few defects. routing will not be very different after the faults are
Some manufacturers put in extra resources that can be discovered and mapped except for the problem size. Given
permanently swapped in for any defective hardware.3 This that current projections are for nanoelectronics to be three
is possible because the LUTs are identical and can be or four orders of magnitude more devices than current ICs,
swapped, and defects are rare. It is safe to assume that once their size cannot be ignored. Their size, along with the
a chip is verified defect-free, it will remain defect-free for need for additional steps of defect detection and deploy-
many years, and the transient faults will be too rare to cause ment, will make nanoelectronics CAD difficult.
concern.
While the FPGA manufacturer tests that the device can
support any user design, the user actually configures the VI . CONCLUSION
chip for their desired computation. Fortunately, once a The invention of the transistor in 1947 is one of the most
design is finalized and compiled, the same configuration important inventions of the twentieth century. Since its
file can be used to configure many identical chips. If a inception, the transistor has been reduced so that now
design works on one chip, it is safe to assume it will work modern devices are orders of magnitude smaller than their
on all other chips of the same family and size with the same earliest counterparts. Unfortunately, the scaling down
timing and power characteristics. This makes the config- must eventually end. Increasing power, capital costs, and,
uration and deployment of large numbers of chips fast and ultimately, theoretical size limitations are poised to halt
inexpensive. the process of continually shrinking the transistor. Nano-
Unfortunately, the deployment method for nanoelec- electronics show promise as a technology to continue the
tronics chips will not be as straightforward. This is due to miniaturization of ICs. However, whether nanoelectronics
the random nature of faults that will be present. Like will be a replacement for conventional ICs, or as a com-
FPGAs, chips will be customized after fabrication. How- plimentary technology, is yet to be determined. What
ever, unlike FPGAs, each chip will have a unique set of has already been shown is that components such as
defects. This means that it will be difficult to generate one wires and molecular switches can be fabricated and
configuration file to configure multiple chips. Defect de- integrated into architectures. It is also known that these
tection and defect-aware configuration will likely be a part devices will be prone to defects and that fault-tolerance
of fault-tolerant schemes. This means that perhaps 1011 schemes will be an integral part of any architecture.
faults will need to be discovered and stored. This will be an Finally, the preliminary research indicates that while
enormous task if a manufacturer ships millions of chips, existing parts of the CAD tools will be useful for nano-
and could be a hurdle to widespread use of nanoelectro- electronics, there will need to be some additions and
nics. If a manufacturer shipped millions of functionally changes made.
identical chips, each one would need to be tested, their The greatest progress has been made in the research of
fault map created, and the CAD flow run on each using the components that may make up nanoelectronics.
that fault map. This would be prohibitive, in time and cost, Chemists have been able to fabricate molecules that have
for a device manufacturer. One possible solution is to two states, such that the molecules can be switched Bon[
bootstrap the devices to test and configure themselves. and Boff.[ Some of these molecules have shown the
However, we must still handle faults that arise during use. functionality of diodes or variable resistors. Chemists have
If nanoelectronics are to become a replacement for also been able to fabricate silicon nanowires and carbon
application-specific integrated circuits (ASICs), the de- nanotubes. Both of these technologies can be used as wires
ployment method must become similar to that of an ASIC: or devices, and in some cases both. Nanoimprint
lithography, probably the most promising wire fabrication
technique, has been used to produce working memories on
3
http://www.altera.com/index.jsp. the nanometer scale. While all of these devices have been
demonstrated, more research is required to reliably transient faults, a hardware redundancy method such as
produce these devices and to create better devices. multiplexing or NMR will have to be used to dynamically
One of the big questions for the future of nanoelec- detect and repair faults. Unfortunately, these methods
tronics is whether nanoscale devices can be reliably would require too much redundancy to handle the number
assembled into architectures. Some small-scale successes of manufacturing defects expected.
have been achieved, but the benefit of nanoelectronics is One aspect of nanoelectronics that resembles current
the enormous integration levels they may be able to technologies is their CAD flow. Much of the software for
achieve. The most promising architectures to date are utilizing nanoelectronics will resemble that of FPGAs. A
array-based. This is because arrays have a regular structure, nanoelectronic CAD flow will still have technology
which is easier to build with self-assembly. Arrays also mapping, placement, and routing to produce configuration
make good use of the available devices (nanowires, carbon files, plus some additional steps. The additions will be a
nanotubes, and molecular electronics), and they are easy routine to detect the defects before placement and some
to configure in the presence of defects. There are other kind of backend step to handle the unique circumstances
more random architectures that would require even less surrounding deployment. The big issue is how to deploy a
stringent fabrication techniques, but there is some doubt circuit on a nanoelectronic chip when each chip is unique.
about how they will scale to larger systems. Overall, it is With current reliable devices, one design can be used to
difficult to evaluate architectures, as the underlying com- produce millions of chips. If nanoelectronics are to
ponents are not fully understood or developed yet. One become more than a niche computing tool, a deployment
thing that seems clear: nanoelectronics will, at least for the model must be developed that does not burden the end
first few generations, need the support of conventional user or cost the manufacturer excessive testing time.
lithography-based electronics for things such as I/O, fault As can be seen, a substantial amount of research has
tolerance, and even simple signal restoration. been conducted on nanoelectronics. Many working
Fault tolerance is another big problem for nanoelec- devices have been designed and fabricated, along with a
tronics. It seems evident that the manufacturing tech- number of small-scale memory chips, but there are some
niques may never be able to produce defect-free chips, so big hurdles to overcome. These hurdles include lowering
fault tolerance will be key to the success of nanoelec- defect levels to a point that reasonable redundancy levels
tronics. For manufacturing defects, detecting and config- can be used, integrating billions of devices, and developing
uring around the defects is the most economical software tools to complement the new technologies.
technique, since nanoelectronics will be configurable However, the prospect of cheaply integrating 1012 devices
devices. The hard problems are detecting the defects per chip is a powerful incentive to overcome the
among 1012 devices in an economical manner and how best challenges. With a little more than ten years before the
to manage the large defect map. It also appears that projected end of scaling for lithography-based circuits,
transient faults will be a problem with nanoelectronics due answers to these questions will hopefully come within the
to their small size and low current levels. To handle decade. h
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