modalanalyse

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ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)

FASENS-Messprotokolle: optische POLYTEC + elektrische Impedanz/GAIN-PHASE Messungen an Silizium-Strukturen

sensor frequency-analysis silicon mems resonant zno polytec resonant-frequency modalanalyse fasens bmft

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