Performance Thori Mass Flow Controller
Accuracy at calibration conditions after tare ±(2% F.S)
Zero Shift and Span Shift ± 0.2% FS / °C
Repeatability ± 0.5% Reading
Long term drift 0.05% Full Scale / Year
Operating Range / Turndown Ratio 0 : 25
Maximum Controllable Flow Rate 102% Full Scale
Typical Response Time 100 ms
Warm-up Time 70 ms to full scale accuracy
Valve Leak Specifications Internal (leak through) 10-5 atm – cc/sec He External (leak out) 10-9 atm – cc/sec He
Operating Conditions Thori Mass Flow Controller
Calibration Conditions 25°C, 14.696 psia
Operating Temperature 0 to +50 ºCelsius
Humidity Range (Non–Condensing) <90%
Maximum Internal Pressure (Static) 100 PSIG 100 PSIG
Proof Pressure 100 psig
Vibration Nil.
Mounting Attitude Sensitivity Yes.
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials Aluminium & Brass.
Communications / Power Thori Mass Flow Controller
Digital Input / Output Signal Via 4-20 mA
Analog Input / Output Signal 0-5 Vdc Optional.
Electrical Connection Options 9-pin male D-sub (DB9)
Supply Voltage 10 to 30 Vdc or Works On Loop Power.
Supply Current 200 mA
Features Thori Mass Flow Controller
Units calibrated with Air have built-in correction equations that allow you to use the gas select command to
switch to Argon, Carbon Dioxide, Nitrogen, Oxygen, or Nitrous Oxide.
Note: PFC-CC-1000 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate
of 750 sccm instead of 1000 sccm due to the correction factor equations used for these gases. Note: PFC-
Notes. L020 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate of 15 slpm
instead of 20 slpm due to the correction factor equations used for these gases. Note: Units calibrated with
Hydrogen or Helium can function only with that gas.
Model No Flow Range Min Flow Max Flow Accuracy
PFC-CC-002 0 to 2 SCCM 0.1 SCCM 0 to 2 SCCM +/- 2 %
PFC-CC-005 0 to 5 SCCM 0.1 SCCM 0 to 5 SCCM +/- 2 %
PFC-CC-010 0 to 10 SCCM 0.1 SCCM 0 to 10 SCCM +/- 2 %
PFC-CC-020 0 to 20 SCCM 0.1 SCCM 0 to 20 SCCM +/- 2 %
PFC-CC-050 0 to 50 SCCM 0.1 SCCM 0 to 50 SCCM +/- 2 %
PFC-CC-0100 0 to 100 SCCM 0.1 SCCM 0 to 100 SCCM +/- 2 %
PFC-CC-0200 0 to 200 SCCM 0.1 SCCM 0 to 200 SCCM +/- 2 %
PFC-CC-0250 0 to 250 SCCM 0.1 SCCM 0 to 250 SCCM +/- 2 %
PFC-CC-0500 0 to 500 SCCM 0.1 SCCM 0 to 500 SCCM +/- 2 %
PFC-CC-0750 0 to 750 SCCM 0.1 SCCM 0 to 750 SCCM +/- 2 %
PFC-CC-1000 0 to 1000 SCCM 0.1 SCCM 0 to 1000 SCCM +/- 2 %
PFC-L-002 0 to 2 LPM 0.1 LPM 0 to 2 LPM +/- 2 %
PFC-L-005 0 to 5 LPM 0.1 LPM 0 to 5 LPM +/- 2 %
PFC-L-010 0 to 10 LPM 0.1 LPM 0 to 10 LPM +/- 2 %
PFC-L-020 0 to 20 LPM 0.1 LPM 0 to 20 LPM +/- 2 %
PFC-L-050 0 to 50 LPM 0.1 LPM 0 to 50 LPM +/- 2 %
PFC-L-0100 0 to 100LPM 0.1 LPM 0 to 100 LPM +/- 2 %
PFC-L-0200 0 to 200LPM 0.1 LPM 0 to 200 LPM +/- 2 %
PFC-L-0250 0 to 250LPM 0.1 LPM 0 to 250 LPM +/- 2 %
PFC-L-0500 0 to 500LPM 0.1 LPM 0 to 500 LPM +/- 2 %
PFC-L-0750 0 to 750LPM 0.1 LPM 0 to 750 LPM +/- 2 %
PFC-L-1000 0 to 1000LPM 0.1 LPM 0 to 1000LPM +/- 2 %
