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ACU30FC Tech Data

The ACU30FC series is a high-precision differential pressure mass flow controller and flow meter designed for various applications including vacuum coating and semiconductor industries. It features real-time data feedback, supports multiple gas types without calibration, and offers extensive connectivity options. The device measures various parameters such as mass flow and temperature, ensuring accurate flow control through a built-in PID adjustment function.

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0% found this document useful (0 votes)
4 views5 pages

ACU30FC Tech Data

The ACU30FC series is a high-precision differential pressure mass flow controller and flow meter designed for various applications including vacuum coating and semiconductor industries. It features real-time data feedback, supports multiple gas types without calibration, and offers extensive connectivity options. The device measures various parameters such as mass flow and temperature, ensuring accurate flow control through a built-in PID adjustment function.

Uploaded by

velosombruno
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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ACU30FC

Differential Pressure
Mass Flow Controller/Flow Meter

Features

No "specific heat capacity" error, Adopt DSP master control to further


high-precision data real-time feedback improve accuracy and reliability

Compact design, large screen experience Nearly 100 kinds of gases can be
is more intuitive switchedfreely without factorycalibration

Support multi-parameter measurement to Supports USB Type C and Bluetooth,


facilitate data analysis flexible and diverse device connection

Applications

Vacuum Coating Solar energy Various analyzers Petroleum and petrochemical

Gas production distribution and environment protection Semiconductor Coal metallurgy

BEIJING ACCUFLOW TECHNOLOGY CO., LTD.


Performance and Principle

The ACU30FC series flowmeter uses the differential pressure principle to calculate the flow rate through the pressure
difference generated when the fluid passes through the throttling element. The product has a built-in PID adjustment
function and is used in conjunctionwith an electromagnetic proportional control valve to achieve precise control of the flow
rate.
When the fluid flows from the pipeline through the throttling element, the flow rate increases and the static pressure
decreases, thereby generating a differential pressure before and after the throttling element. The sensor measures the differ-
ential pressure, converts the differential pressure signal into an electrical signal and outputs it. The controller calculates the
output differential pressure signal using the flow equation(Hagen-Poiseuille formula) to ultimately obtain the fluid flow rate.
ACU30FC can measure multiple parameters such as gas mass flow, volume flow, pressure and temperature, and display
a series of parameters through touch screen or other external devices and control systems through RS485/232 and other
communication methods to facilitate data monitoring and analysis.

Specifications

High accuracy mass flow controller High accuracy mass flow meter
Range 2SCCM~3000SLM
Measurement and
control range controller valve control range50:1 flow meter range ratio100:1
Accuracy ±0.5%F.SS(full scale)
Linearity ±0.5%F.S
Repeatability ±0.2%F.S
Stability <±0.1%F.S
Technical
specifications Response time 50mS
Temperature
coefficient ±0.015%F.S/℃
Working -10℃~60℃
temperature
Working pressure working differential pressure: 0.05~0.5Mpa
Max. operating
pressure 1MPa
Leakage rate 1 X 10-9 Pa m3 /S
Base material stainless steel

Connector VCR,LOK,flange installation,etc

Mechanical Sealing material Vilton,NBR,FFKM,EPDM


parts Shell protection level IP40

Installation position horizontal installation


Monochrome LED
display screen simultaneously displaying flow, setting

Electrical connections DB9 hole, RJ11, 5.5×2.1 power fast plug

Display status with display, without display


Electrical
properties Digital output Modbus protocol(RS232/485),ProfiBus protocol,DeviceNet protocol

Analog output 0~5V、4-20mA、1-5V

Power supply ±15VDC,24VDC

Model No.& Ranges

Model No. ACU30FC-S ACU30FC-L ACU30FC-MC ACU30FCR-BC


Ranges 2SCCM~30SLM 2SCCM~30SLM 30SLM~300SLM 300SLM~3000SLM

400-005-7868 www.accu-flow.com.cn
Model chart

ACU30FC L C M N 200L A1 B1 5 8 V C
Serial number

Range select
S Small Communication
Input signals
L Low 8 RS485
M A1 0~5VDC
Middle 2 RS232
B A2 4~20mA
Big
A3 1~5VDC
Ranges
Product type Sealing material
002C 2 SCCM V Vilton
C Mass flow controller 001L 1 SLM

L
T NBR
M Mass flow meter 10L 10 SLM
Output signals N Neoprene
20L 20 SLM Y
Pressurization B1 0~5VDC Other
30L 30 SLM
M 1MPa B2 4~20mA
50L 50 SLM
B3 1~5VDC
M

100L 100 SLM Connectors


Display 200L 200 SLM C φ8
N Without display 300L 300 SLM Power D φ10
X With display 500L 500 SLM 5 ±15VDC E φ12
B

1000L 1000 SLM 4 24VDC Y Others, Contact


3000L 3000 SLM with manufac-
turer

Dimensions (mm)
96
9

32 81 32
21

4-
M4
40.5 21

ACU30FC-SC

BEIJING ACCUFLOW TECHNOLOGY CO., LTD.


126
121

13.50
36.50
30
100
154

23
12 45 2-M4

ACU30FC-LC

136
131

17.50
43

130 35
184
23

50 45 2-M4

ACU30FC-MC

400-005-7868 www.accu-flow.com.cn
144.5

29
203 G3/4
57
38

26.5 61 4-M4 8

ACU30FCR-BC

400-005-7868 www.accu-flow.com.cn

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