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MEMS Microsensors for Engineers

MEMS sensors integrate electrical and mechanical components on a single chip using microfabrication technologies. They are smaller, use less power, and are more sensitive than larger sensors. Common MEMS sensor types include capacitive accelerometers, piezoresistive pressure sensors, and conductometric gas sensors. MEMS sensors are used in applications like portable blood analyzers and in cars for functions like airbag deployment and emission monitoring.

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98 views4 pages

MEMS Microsensors for Engineers

MEMS sensors integrate electrical and mechanical components on a single chip using microfabrication technologies. They are smaller, use less power, and are more sensitive than larger sensors. Common MEMS sensor types include capacitive accelerometers, piezoresistive pressure sensors, and conductometric gas sensors. MEMS sensors are used in applications like portable blood analyzers and in cars for functions like airbag deployment and emission monitoring.

Uploaded by

rahul
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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MEMS MICROSENSORS

 MEMS or Micro-Electro Mechanical System is a technique of combining Electrical and Mechanical


components together on a chip, to produce a system of miniature dimensions.
 MEMS is the integration of a number of microcomponentson a single chip which allows the
microsystem to both sense and control the environment.
 The components are integrated on a single chip using micro fabrication technologies.

What is a Sensor?
A device used to measure a physical quantity (such as temperature) and convert it into an electronic
signal of some kind (e.g. a voltage), without modifying the environment.

Why MEMS for sensors?


• Smaller in size
• Have lower power consumption
• More sensitive to input variations
• Cheaper due to mass production
• Less invasive than larger devices

Micro sensors have the advantages of being sensitive and accurate with minimal amount of required
sample substance. They are primarily employed to observe the temporal effects of the environment and
subsequently to calibrate the observed values in order to produce meaningful information. Sensors
vary from simple to highly complex.

1
Applications of microsensors

2
Examples of microsensors

• Capacitive accelerometer

• Piezo‐resistive pressure sensor


• Conductometric gas sensor

• Virus‐detecting micro cantilever

• Fibre‐optic crack sensor

3
• Portable blood analyser

Mems based sensors used in typical car

1. Air conditioning and compression sensor


2. Force sensor
3. Pressure and inertial sensor for braking control
4. Inertial navigation sensor for sensing acceleration
5. Tire pressure sensor
6. Crash sensor
7. Mass air flow sensor
8. Exhaust gas sensor
9. Microphone for noise cancellation
10. Air bag side impact sensor
11. Fuel sensor
12. Nozzle sensor for checking fuel injection

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