1200ECT362052302
Scheme of Valuation/Answer Key
(Scheme of evaluation (marks in brackets) and answers of problems/key)
APJ ABDUL KALAM TECHNOLOGICAL UNIVERSITY
SIXTH SEMESTER B.TECH DEGREE (R,S) EXAMINATION, JUNE 2023
Course Code: ECT362
Course Name: INTRODUCTION TO MEMS
Max. Marks: 100 Duration: 3 Hours
PART A
Answer all questions, each carries 3 marks. Marks
1 A neat diagram of a microelectromechanical system - 2 (3)
Description - 1
Fig: Major constituents in a typical MEMS
2 Shape memory alloys - A neat diagram - 2 (3)
Description - 1
Fig: Actuation Using Shape Memory Alloys
Please note: Marks may be given if shape memory alloys are explained using a
different diagram explaining the same concept
3 Definitions of the terms stress, strain, and modulus of elasticity – 1 mark each (3)
4 Three strategies for minimizing undesirable intrinsic bending- 1 mark each (3)
5 Definition of the surface to volume ratio- 1.5 mark (3)
Significance of surface to volume ratio- 1.5 mark
6 Definition-1 mark (3)
Significance -2 marks
Page 1of 16
1200ECT362052302
7 3 differences – 3 marks (3)
8 3 advantages- 3 marks (3)
9 3 needs for microsystem packaging – 3 marks (3)
10 3 features- 3 marks (3)
PART B
Answer one full question from each module, each carries 14 marks.
Module I
11 a) Operating principle of the cantilever beam accelerometer – 4 marks (8)
Relevant sketches - – 4 marks
❖ Cantilever beam accelerometer
❖ In this design: Cantilever beam = coil spring;
❖ Surrounding viscous fluid = dashpot for damping of the proof mass
❖ The movement of the proof mass is carried out by the attached piezoresistor.
❖
b) Operating principle of the microgripper – 3 marks (6)
Relevant sketches - – 3 marks
Page 2of 16
1200ECT362052302
❖ An essential component in micro-robots in assembly micro-assemblies and
surgery
❖ Arrangement of the fingers are like comb. Two sets of comb architectures are
arranged in such a way that the fingers are inter-digital fashion.
❖ While we apply the external force, the combs comes closer and thereby the arms
connected to the combs come closer and work like a gripper.
❖ Drastic reduction in required actuation voltage with increase of number of pairs
of electrodes:
OR
12 a) Sketches – 4 marks (8)
Equations – 2 marks
Operation - 2 marks
Page 3of 16
1200ECT362052302
b) Sketch- 3 marks (6)
Operation – 3 marks
❖ A certain crystals, e.g., quartz exhibit an interesting behavior when subjected to
a mechanical deformation or an electric voltage.
Page 4of 16
1200ECT362052302
❖ This behavior may be illustrated as follows:
❖ This peculiar behavior makes piezoelectric crystals an ideal candidate for
micro-actuation as illustrated in the following case:
Module II
13 a) Relation between tensile stress (4 marks) and strain (4 marks) In terms of the compliance (8)
matrix.
b) List any 3 commonly used mechanical structures in MEMS – 3 marks. (6)
Operation of any one of the mechanical structures mentioning the application – 3 marks.
OR
14 a) Relevant sketches -3 marks. (8)
Page 5of 16
1200ECT362052302
Derivation- 5 marks
Page 6of 16
1200ECT362052302
Page 7of 16
1200ECT362052302
b) Relevant sketches -3 marks (3)
Explaining a strategy for minimizing undesirable intrinsic bending – 3 marks
Module III
15 a) Trimmer Force Scaling Vector- 2 marks. (8)
Deriving acceleration a, time t, and power density P/V – 2 marks each
Page 8of 16
1200ECT362052302
b) First silicon compound - features-1, manufacturing (chemical equations/figure)- 2 (6)
marks
Second silicon compound - features-1, manufacturing (chemical equations/figure)- 2
marks
OR
16 a) Derivation - electrostatic forces -4 marks (8)
Derivation - electromagnetic forces -4 marks
Prove that electromagnetic actuation is least preferred over electrostatic actuation for
scaling.- 1 marks
Page 9of 16
1200ECT362052302
Page 10of 16
1200ECT362052302
Page 11of 16
1200ECT362052302
b) Diagram/ list of the processes involved in the fabrication of the SU-8 films- 2 marks (5)
Description of processes- 3 marks
Page 12of 16
1200ECT362052302
Fabrication process of the SU-8 films
Module IV
17 a) Diffusion- fig-2 marks Description-2 marks (8)
Ion implantation- fig-2 marks Description-2 marks
b) Two problems -3 marks (1.5 for figure and 1.5 for description) each (6)
OR
18 a) neat sketches- 4 marks (8)
equations- 2 marks
Description- 2 marks
Page 13of 16
1200ECT362052302
b) Diagram- 3 marks (6)
Description- 3 marks
Module V
19 a) Diagram-6 marks, Description- 4 marks (10)
Page 14of 16
1200ECT362052302
b) Explaining 4 applications of BioMEMS- 4 marks (4)
OR
20 a) Neat sketches of sealing in micro pressure sensors, microvalves, and micropumps- 6 (10)
marks (2 marks each)
Description – 4 marks
Page 15of 16
1200ECT362052302
b) Explaining 2 applications of RFMEMS- 4 marks (4)
****
Page 16of 16
