Cmos Vlsi Design-1
Cmos Vlsi Design-1
The beginning
2
Microprocessors are essential to many of the products we use every day such as TVs, cars,
radios, home appliances and of course, computers. Transistors are the main components of
microprocessors.
At their most basic level, transistors may seem simple. But their development actually required
many years of painstaking research. Before transistors, computers relied on slow, inefficient
vacuum tubes and mechanical switches to process information. In 1958, engineers managed to
put two transistors onto a Silicon crystal and create the first integrated circuit, which
subsequently led to the first microprocessor.
In 1976, Steve Jobs and Steve Wozniak built the Apple II, the first personal computer in a
garage in California.
Then, in 1981, IBM introduced its first personal computer. The personal computer was such a
revolutionary concept and was expected to have such an impact on society that in 1982, "Time"
magazine dedicated its annual "Man of the Year Issue" to the computer. The other feature of
the microprocessor is its versatility. Whereas previously the integrated circuit had had to be
manufactured to fit a special purpose, now one microprocessor could be manufactured and then
programmed to meet any number of demands. Soon everyday household items such as
microwave ovens, television sets and automobiles with electronic fuel injection incorporated
microprocessors.
The 1980's saw an expansion in computer use in all three arenas as clones of the IBM PC made
the personal computer even more affordable. The number of personal computers in use more
than doubled from 2 million in 1981 to 5.5 million in 1982. Ten years later, 65 million PCs
were being used. Computers continued their trend toward a smaller size, working their way
down from desktop to laptop computers (which could fit inside a briefcase) to palmtop (able to
fit inside a breast pocket).
By the 1980's, very large scale integration (VLSI) squeezed hundreds of thousands of components
onto a chip. The ability to fit so much onto an area about half the size of a U.S. dime helped
diminish
the size and price of computers. It also increased their power, efficiency and reliability. Marcian
Hoff
invented a device which could replace several of the components of earlier computers, the
microprocessor. The microprocessor is the characteristic of fourth generation computers, capable of
performing all of the functions of a computer's central processing unit. The reduced size, reduced
cost, and increased speed of the microprocessor led to the creation of the first personal computers.
Until now computers had been the almost exclusively the domain of universities, business and
government.
Prepared Friday, May 23, 2025
Introduction
6
Silicon is a semiconductor
Pure silicon has no free carriers and conducts poorly
Adding dopants increases the conductivity
At the engineering level, digital VLSI chips are classified by the approach
used to implement and build the circuit
Full-custom Design: where every circuit is custom designed for the project
Extremely tedious
Time-consuming process
MOS (Metal-oxide-silicon)
although invented before bipolar transistor,
was initially difficult to manufacture
nMOS (n-channel MOS) technology developed in 1970s
required fewer masking steps, was denser, and consumed less power than equivalent
bipolar ICs => an MOS IC was cheaper than a bipolar IC and led to investment and growth
of the MOS IC market.
aluminum gates for replaced by polysilicon by early 1980
CMOS (Complementary MOS): n-channel and p-channel MOS transistors =>
lower power consumption, simplified fabrication process
Bi-CMOS - hybrid Bipolar, CMOS (for high speed)
GaAs - Gallium Arsenide (for high speed)
Si-Ge - Silicon Germanium (for RF)
Less volume
Less yield
n+ n+
p bulk Si
nMOS Operation
• Body is commonly tied to ground (0 V)
• When the gate is at a low voltage:
» P-type body is at low voltage
» Source-body and drain-body diodes are OFF
» No current flows, transistor is OFF
Source Gate Drain
Polysilicon
SiO2
0
n+ n+
S D
p bulk Si
nMOS Operation
• When the gate is at a high voltage:
» Positive charge on gate of MOS capacitor
» Negative charge attracted to body
» Inverts a channel under gate to n-type
» Now current can flow through n-type silicon from source
through channel to drain, transistor is ON
Source Gate Drain
Polysilicon
SiO2
1
n+ n+
S D
p bulk Si
pMOS Transistor
• Similar, but doping and voltages reversed
» Body tied to high voltage (VDD)
» Gate low: transistor ON
» Gate high: transistor OFF
» Bubble indicates inverted behavior
Source Gate Drain
Polysilicon
SiO2
p+ p+
n bulk Si
Power Supply Voltage
➢ GND = 0 V
➢ In 1980’s, VDD = 5V
➢ VDD has decreased in modern processes due to scaling
» High VDD would damage modern tiny transistors
» Lower VDD saves power (Dynamic power is
propotional to C.VDD2.f.a)
➢ VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0, …
Transistors as Switches
• We can view MOS transistors as electrically controlled
switches
• Voltage at gate controls path from source to drain
g=0 g=1
d d d
nMOS g OFF
ON
s s s
d d d
pMOS g OFF
ON
s s s
Why “CMOS VLSI”?
CMOS circuits have several advantages over NMOS and PMOS circuits, including:
Power consumption: CMOS circuits consume less power than NMOS and PMOS
circuits. CMOS circuits can be operated at lower voltages and currents, which reduces
heat dissipation and extends battery life.
Noise margins: CMOS circuits have better noise margins than NMOS and PMOS
circuits.
Switching speed: CMOS circuits have fast low-to-high and high-to-low output
transitions.
Integration: CMOS circuits have a high degree of integration, with the entire circuit
integrated in the chip.
p+ diffusion
n+ diffusion
Contact cuts
n-well process
p-doped Wafer
Oxidation
SiO2
Oxidation
p-substrate
p-substrate
Photoresist
Photo-resist
Oxidation
p-substrate
Photolithography
UV
rays
Photo-resist
Oxidation
p-substrate
Removal of soluble photoresist
Photoresist
Oxidation
p-substrate
Removal of exposed SiO2
Photo-resist
Oxidation
p-substrate
Removal of remaining
photoresist
Oxidation
p-substrate
N-well formation using diffusion
Oxidation
n-well
p-substrate
Removal of remaining SiO2
n-well
p-substrate
Gate oxide and Polysilicon Layer
n-well
p-substrate
Photolithography
UV
rays
n-well
p-substrate
Removal of soluble polysilicon
n-well
p-substrate
Gate oxide masking
Thick
gate
oxide
n-well
p-substrate
Photolithography
UV
rays
n-well
p-substrate
Removal of exposed gate oxide
n-well
p-substrate
Ion implantation of n+ dopants
n+ n+ n+
n-well
p-substrate
Ion implantation of p+ dopants
(similar way)
p+ n+ n+ p+ p+ n+
n-well
p-substrate
Metallization
(uses Aluminum)
p+ n+ n+ p+ p+ n+
n-well
p-substrate
Removal of excess metal
p+ n+ n+ p+ p+ n+
n-well
p-substrate
Terminals: pMOS and nMOS
B S G D D G S B
p+ n+ n+ p+ p+ n+
n-well
p-substrate
Drawbacks of N-well &p-well
In both N-WELL and P-WELL we may got come across two problems.
✓ Body Effect
✓ Latch Up problem
The body terminal of the MOSFET plays a crucial role in controlling the transistor's
behavior.
Body biasing refers to applying a voltage to the body terminal to modulate the
threshold voltage (Vₜ) of the MOSFET, influencing its switching speed and power
consumption.
Figure: Simplified display of
how the body bias effect can
alter the tON for a PMOS
transistor. Vs remains at
nominal voltage, while
Vb increases (reverse bias) or
decreases (forward bias).
This produces a similar
increase or decrease in tON,
respectively.
Effect of Body Bias on MOSFET Operation
Types of Body Biasing
Is body bias and body effect are same in MOSFET?
No, while closely related, "body bias" and "body effect" are not exactly the same in a
MOSFET:
➢ "body effect" refers to the phenomenon where the threshold voltage of a MOSFET
changes due to a voltage difference between the source and the body (substrate),
➢ while "body bias" is the intentional act of applying a specific voltage to the body to
deliberately manipulate the threshold voltage and control the transistor's
behavior; essentially, body bias is a technique that leverages the "body effect" to
achieve desired circuit characteristics.
Body effect:
• A natural phenomenon occurring when the source and body voltages are not
identical, causing a change in the threshold voltage.
Causes
•Supply voltages: Supply voltages that exceed the maximum ratings can cause latch-up.
•Transient voltages: Transient voltages on supply rails can cause latch-up.
•Input/output pin voltage: When the input/output pin voltage exceeds either supply rail by more than a diode
drop, latch-up can occur.
•Electrostatic discharge (ESD): ESD events can trigger latch-up due to the large currents and voltages
involved.
•Ionizing radiation: Ionizing radiation, such as that found in space or nuclear environments, can trigger latch-
up.
Effects
•Latch-up can cause circuits to malfunction or consume excessive power.
•Latch-up can permanently damage the device.
Prevention
There are several design techniques that can reduce the susceptibility of CMOS circuits to latch-up. The
Hughes Aircraft company invented an industry-standard technique to prevent CMOS latch-up in 1977.
Twin-tub Process
* It is made with both n-well and p-well region.
* Epitaxial layer: High purity silicon grown with
accurately determined dopant concentrations
Comparison table of p-well n-well and twin-tub process of CMOS fabrication
Feature P-Well Process N-Well Process Twin-Tub Process
A fabrication process where A fabrication process where a A process where both P-well
Definition an N-type substrate has a P- P-type substrate has an N-well and N-well are created
well for NMOS transistors. for PMOS transistors. independently.
Can use both N-type and P-
Substrate Type N-type substrate P-type substrate
type wells independently.
Both P-well and N-well
Well Type P-well (for NMOS) N-well (for PMOS)
coexist.
NMOS transistors in the P- PMOS transistors in the N- Allows independent
MOSFET Type Supported well, PMOS transistors in the well, NMOS transistors in the optimization of NMOS and
N-substrate. P-substrate. PMOS transistors.
More complex than P-well Most complex due to the
Simple process but requires
Process Complexity due to additional well presence of both wells but
additional steps for PMOS.
formation. provides better performance.
NMOS performs well, but Provides better performance
PMOS performs better than in
PMOS has lower performance due to independent
Performance P-well, but NMOS may be
due to the use of an N-type optimization of NMOS and
slightly compromised.
substrate. PMOS.
Better control over both
Limited control over PMOS Limited control over NMOS
Threshold Voltage Control NMOS and PMOS threshold
transistor characteristics. transistor characteristics.
voltages.
Lowest risk due to separate
Higher risk due to single well Moderate risk, but still
Latch-up Immunity wells reducing parasitic
structure. possible.
interactions.
Common in CMOS Advanced CMOS
Older CMOS technologies,
Applications fabrication, used in VLSI technologies, high-
low-power applications.
circuits. performance circuits.
CONT…
At present the CMOS technologists are using “TWIN TUB” process.
As It is giving effective result.
Also it is more efficient.
Drawbacks of cmos
CMOS is quite good for all the ELECTRONIC Gadgets.
As they required 0-5V voltage.
But coming to the ANALOG Equipment's … CMOS is poor to use.
For that problem we are going to use BICMOS technology.
BICMOS…
BICMOS → BJT + CMOS
As the drawback of CMOS is output load.
At the output of the circuits we use BJT.
Entire circuit is designed with CMOS.
Cross sectional view
Bi-CMOS(n-p-n Transistor (orbit 2 um CMOS)
B F P
I A R
C B O
M R C
O I E
S C S
A S
T
I
O
N n-well BiCMOS fabrication process
steps
Comparison between CMOS
and Bipolar technologies
CMOS Bipolar technologies
Low static power dissipation High power dissipation
High input impedance
Low input impedance
High noise margin
High packing density Low voltage swing logic
High delay sensitivity to load Low packing density
Low output drive current
Low delay sensitivity to
Low gm
Bidirectional capability load
A near ideal switching device High output drive current
Scalable threshold voltage High gm
Essentially unidirectional
Fabrication Technology
• Silicon of extremely high purity
» chemically purified then grown into large crystals
• Wafers
» crystals are sliced into wafers
» wafer diameter is currently 150mm, 200mm, 300mm
» wafer thickness <1mm
» surface is polished to optical smoothness
• Wafer is then ready for processing
• Each wafer will yield many chips
» chip die size varies from about 5mmx5mm to 15mmx15mm
» A whole wafer is processed at a time
Fabrication Technology
• All the devices on the wafer are made at the same time
• After the circuitry has been placed on the chip
» the chip is over-glassed (with a passivation layer) to protect it
» only those areas which connect to the outside world will be left
uncovered (the pads)
• The wafer finally passes to a test station
» test probes send test signal patterns to the chip and monitor the
output of the chip
• The yield of a process is the percentage of die which
pass this testing
• The wafer is then scribed and separated up into the
individual chips. These are then packaged
• Chips are ‘binned’ according to their performance
VLSI Design
In present days all the Electronic Devices are made of
using these VLSI CHIPS.
These VLSI are designed by CMOS.
In Earlier they used several types of active devices.
SYSTEM
MODULE
+
GATE
CIRCUIT
DE VICE
G
S D
n+ n+
Design Hierarchy (1/2)
75
Hierarchical design
Top-down design
the initial work is quite abstract and theoretical and
there is no direct connection to silicon until many
steps have been completed
Acceptable in modern digital system design
Co-design with combining HW/SW is critical
Similar to Cell-based Design Flow
Bottom-up design
starts at the silicon or circuit level and builds
primitive units such as logic gates, adders, and
registers as the first steps
Acceptable for small projects
Similar to Full-custom Design Flow
➢DESIGN SPECIFICATION
➢DESIGN ENTRY
➢FUNCTIONAL SIMULATION
➢PLANNING PLACEMENT AND ROUTING(PPR)
➢TIMING SIMULATION
➢FUSING/FABRICATION IN TO THE CHIP
FLOW CHART FOR VLSI DESIGN FLOW
DESIGN SPECIFICATION
➢ Number of inputs and outputs in the design and number of bits in each of them.
➢TWOTYPES
➢ Schematic Entry
➢ HDL Flow-It is performed after the design has been entered and synthesized.
FUNCTIONAL SIMULATION
OF T- FLIPFLOP
PLANNING PLACEMENT AND
ROUTING(PPR)
➢ VLSI physical design or Layout phase
➢ Various phases
➢ Partitioning
➢ Floor planning
➢ Placement
➢ Routing
PLANNING PLACEMENT AND
ROUTING(PPR)
➢ PARTITIONING:-
Task of dividing a circuit in such a way so that the area of each sub-circuit is well
with in the prescribed range and number of interconnection between sub-circuits is
also minimized.
➢ FLOOR PLANNING:-
Step to determine the shape of each sub circuit module and pin location at their
boundary and find out the approximate location of each module in a rectangular chip.
PLANNING PLACEMENT AND
ROUTING(PPR)
➢ PLACEMENT:-
It is the problem of determination of best position of each module, when each module
has a fixed shape , area and terminals .
➢ ROUTING:-
It is the method of interconnection of different circuit components, with an aim to
minimize the chip area and also reduction of total wire-length.
➢ Two types
✓ Global Routing
✓ Channel Routing
PARTITIONING &
FLOORPLANNING
PLACEMENT & ROUTING
TIMING SIMULATION
➢ Delays encountered by a signal for traversing from output of one gate to the
input of another gate is called NET Delays.
➢ Delays from input of one gate to the output of same gate due to propagation
time of the gate is called GATE Delays.
➢ FULL CUSTOM:-
The semiconductor chips are ASIC’s which are designed
specifically for a given application or application domain.
➢ SEMI-CUSTOM:-
➢ CELL BASED DESIGN – uses libraries of predesigned cells which are then
placed and wired to complete the design.
➢ ARRAY BASED DESIGN – uses a prefabricated matrix of non-connected
components. FPGA uses programmable logic modules and also
programmable interconnections in which configuration data is loaded
during each application.
μm-based (Micron-based) Design Rules in VLSI
- μm-based design rules use absolute dimensions in
micrometers (μm).
- Define minimum width, spacing, and alignment of
semiconductor components.
- Technology-specific, designed for nodes like 180nm, 90nm,
65nm.
Example (180nm
Design Parameter Description
Technology)
Minimum Gate Length Smallest possible channel
0.18μm
(Lmin) length of a transistor.
Minimum Gate Width Smallest width of a
0.24μm
(Wmin) transistor channel.
Smallest width of metal
Minimum Metal Width 0.25μm
interconnects.
Minimum distance between
Minimum Metal Spacing 0.30μm
two metal wires.
Minimum size of a via or
Contact Size 0.24μm × 0.24μm
contact cut.
Distance between two
Active Area Spacing 0.35μm
active diffusion regions.
Each of these rules ensures that the fabricated devices function correctly without
defects due to process limitations.
For a 90nm Technology, the design rules might look like this:
P -Type diffusion
Polysilicon
Metal 1
Contact Cut
Ion implantation
Buried contact
❑ Metal
❑ Polysilicon
❑ Metal Contact
❑ P-Doping
❑ N-Doping
Stick Diagram & Corresponding
Mask Layout
Layout: Do not forget the
implants for depletion mode
transistors and to write in the
length to width (L:W) ratio for
each transistor
Stick Diagram & Corresponding
Mask Layout Depletion
Stick Diagram of NMOS &
PMOS
N-Well Area
P-Well Area
N-MOS (Enhancement &
Depletion)
Complete n-MOS-Stick
Diagram
CMOS Inverter
Layout & Stick Diagram of CMOS
Inverter
Depletion Load Inverter
CMOS-2 Input NAND &
NOR GATE
Stick Diagram of CMOS NAND
Gate-
Euler’s Path
Example:
Example 3-Eular Path:
Example 3-Stick Diagram
Example: z=(DC+A+B)bar
One More Example