Sentaurus™ Structure Editor User

Guide
Version V-2024.03, March 2024
Copyright and Proprietary Information Notice
© 2024 Synopsys, Inc. This Synopsys software and all associated documentation are proprietary to Synopsys, Inc. and
may only be used pursuant to the terms and conditions of a written license agreement with Synopsys, Inc. All other
use, reproduction, modification, or distribution of the Synopsys software or the associated documentation is strictly
prohibited.
Destination Control Statement
All technical data contained in this publication is subject to the export control laws of the United States of America.
Disclosure to nationals of other countries contrary to United States law is prohibited. It is the reader’s responsibility to
determine the applicable regulations and to comply with them.
Disclaimer
SYNOPSYS, INC., AND ITS LICENSORS MAKE NO WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, WITH
REGARD TO THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF
MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.
Trademarks
Synopsys and certain Synopsys product names are trademarks of Synopsys, as set forth at
https://www.synopsys.com/company/legal/trademarks-brands.html.
All other product or company names may be trademarks of their respective owners.
Free and Open-Source Licensing Notices
If applicable, Free and Open-Source Software (FOSS) licensing notices are available in the product installation.
Third-Party Links
Any links to third-party websites included in this document are for your convenience only. Synopsys does not endorse
and is not responsible for such websites and their practices, including privacy practices, availability, and content.

www.synopsys.com

Sentaurus™ Structure Editor User Guide 2

V-2024.03
Contents

Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Acknowledgments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Statement on Inclusivity and Diversity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

1. Introduction to Sentaurus Structure Editor. . . . . . . . . . . . . . . . . . . . . . . . . 36

Sentaurus Structure Editor Functionality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
ACIS Geometry Kernel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Starting Sentaurus Structure Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Batch Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Heap Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Scheme Script Syntax-Checking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Literal Evaluation of Scheme Script . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Interactive Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Loading Boundary and Mesh Command Files at Startup . . . . . . . . . . . . 42
Loading an ACIS File at Startup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Exiting Sentaurus Structure Editor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
TCAD Sentaurus Tutorial: Simulation Projects . . . . . . . . . . . . . . . . . . . . . . . . 43

2. Graphical User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Introduction to Graphical User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
GUI Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Toolbars . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Restoring GUI Settings From Previous Session . . . . . . . . . . . . . . . 50
Manipulating the View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
View Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Command-Line Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Opening and Saving Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Opening Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

3
Contents

Saving Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Saving Boundaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Importing Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Recording Actions to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
Undoing and Redoing Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Customization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Configuring the Command-Line Window . . . . . . . . . . . . . . . . . . . . . . . . . 57
Changing GUI Attributes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Background Color. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
GUI Style . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Font Size of Menu Bar of Main Window . . . . . . . . . . . . . . . . . . . . . . 59
Size of Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Position of Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Restoring GUI Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Selecting Entities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Snapping Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Printing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Defining Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Parameterizing Dialog Boxes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63

3. Controlling Views. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Zooming, Panning, and Orbiting With Mouse Operations . . . . . . . . . . . . . . . . 65
Interactive Cutting Plane Viewer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Perspective and Orthographic Views in Three Dimensions . . . . . . . . . . . . . . . 67
Selecting the DATEX Color Scheme . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Selecting the Rendering Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Showing and Hiding Coordinate Axes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
View Orientation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Displaying Grid Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Displaying Rulers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Scaling the View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Visualizing Selected Geometric Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Quick Access to Placements, Refinements, and Doping Profiles . . . . . . . . . . 73

4
Contents

Visualizing the Internal Entity Representation . . . . . . . . . . . . . . . . . . . . . . . . . 74

4. Generating Geometric Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

Modeling Unit and Modeling Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
Creating a New Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Setting Interactive Work Preferences . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Exact Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Snapping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Active Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Naming Regions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
Overlap Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
Drawing Basic 2D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Drawing Rectangles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Drawing Regular Polygons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
Drawing Polygons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
Drawing Circles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
Drawing Ellipses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Drawing Ruled Regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Drawing Other Basic 2D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Editing 2D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Adding a Vertex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Moving a Vertex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
Moving Region Edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Moving Regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Deleting Vertices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
Rounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
Chamfering. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Cutting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Creating a Convex Hull . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Splitting Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Simplifying 2D Structures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Aligning Vertices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Merging Collinear Edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
Breaking Nearly Axis-Aligned Edges . . . . . . . . . . . . . . . . . . . . . . . . 99
Two-Dimensional Boundary Smoothing . . . . . . . . . . . . . . . . . . . . . . 101
Edge Length Queries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
Drawing Basic 3D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104

5
Contents

Drawing Cuboids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104

Drawing Cylinders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Drawing Spheres . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Drawing Ellipsoids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Drawing Other Basic 3D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Import Capability of User-Defined Data . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Creating a Layered Lens Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Creating a Solid Body From Faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Editing 3D Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Chamfering Edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Rounding Edges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Tapering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Creating 3D Objects From 1D and 2D Objects . . . . . . . . . . . . . . . . . . . . . . . . 118
Wires . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118
Extruding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
Sweeping a 2D Object . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Sweep Distance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Sweep Along a Vector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
Sweep Around an Axis (Regular and Corner Sweeps). . . . . . . . . . . 126
Sweep Along a Wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
Sweep Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Sweeping Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
Skinning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
Default Skinning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
Skinning With Normals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
Skinning With Vectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Skinning With Guides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Skinning Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
Editing 2D and 3D Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Explicit Boolean Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Changing the Material of a Region. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
Changing the Name of a Region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
Deleting Regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
Separating Lumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145
Two-Dimensional Cuts From a 3D Structure . . . . . . . . . . . . . . . . . . . . . . 146
Split–Insert Stretching of a Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Extending a 2D Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
Trimming a 3D Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
Coordinate Systems and Transformations. . . . . . . . . . . . . . . . . . . . . . . . . . . . 151

6
Contents

Work Planes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152

Local Coordinate Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154
Device Scaling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
Entity Transformations: Scaling, Translation, Rotation, and Reflection . . 156
Local Scaling of Entities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 157
Difference Between sdegeo:scale and sdegeo:scale-selected . . . . 158
Translation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160
Rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
Reflection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
Scheme Functions for Transformations . . . . . . . . . . . . . . . . . . . . . . . . . . 164

5. Structure Generation Using Etching and Deposition. . . . . . . . . . . . . . . . . 165

Overview of Process Emulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
Base Coordinate System Orientation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Unified Coordinate System Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Traditional (DF–ISE) Coordinate System Orientation . . . . . . . . . . . . . . . 167
Selecting the Coordinate System Orientation . . . . . . . . . . . . . . . . . . . . . 167
Mask Layout Input and Mask Generation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167
Mask Generation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169
Offsetting (Biasing) Mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170
TCAD Layout Reader of Sentaurus Structure Editor . . . . . . . . . . . . . . . . . . . . 170
Loading TCAD Layouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
Finding Layer Names and Layer IDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
Applying a Stretch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
Selecting the Simulation Domain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
Finding Coordinates of Bounding Box . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
Creating and Using Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
Support for Coordinate System Orientation . . . . . . . . . . . . . . . . . . . . . . . 173
Layout-Driven Contact Assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
Layout-Driven Meshing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
Process Emulation Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
Syntax and Keywords . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
Process Emulation Algorithms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187
The lop-move Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188
The lopx Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188
The PT Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188
The sweep Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189

7
Contents

Restrictions on Handling Mixed Models. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190

Process Emulation Steps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190
Defining Domain. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190
Generating Substrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191
Patterning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191
Patterning Keywords and Keyword Combinations . . . . . . . . . . . . . . 191
Anisotropic Patterning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192
Isotropic Patterning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192
Photo Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193
Photo Keywords and Keyword Combinations . . . . . . . . . . . . . . . . . 193
Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193
Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194
Deposition Keywords and Keyword Combinations. . . . . . . . . . . . . . 194
Anisotropic Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
Isotropic Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
Selective Deposition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Directional Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
Shadowing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
Rounding and Advanced Rounding . . . . . . . . . . . . . . . . . . . . . . . . . 205
Etching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
Etching Keywords and Keyword Combinations . . . . . . . . . . . . . . . . 206
Example: Etching Operation Using Different Etch Options . . . . . . . 207
Example: Multimaterial Etching . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
Some Notes About Multimaterial Etching . . . . . . . . . . . . . . . . . . . . . 209
Some Notes About Shadowing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
Fill. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
Polishing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
Interconnect Layer Generation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
Example: Generating an Interconnect Structure . . . . . . . . . . . . . . . 213
Shape Library. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214
PolygonSTI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
PolygonWaferMask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
PolyHedronCylinder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216
PolyHedronEllipticCylinder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216
PolyHedronEpiDiamond . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218
PolyHedronSTI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218
PolyHedronSTIaccc . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
PolyHedronSTIaccv . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221
Removing Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222
Doping and Implantation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222
Process Emulation Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224

8
Contents

6. Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228
Defining and Activating a Contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Deleting a Contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 230
Assigning Edges or Faces to a Contact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 230
Assigning a Region Boundary to a Contact . . . . . . . . . . . . . . . . . . . . . . . . . . . 231
Removing Edges or Faces From a Contact. . . . . . . . . . . . . . . . . . . . . . . . . . . 232
Creating Edges or Faces for Use in Contacts . . . . . . . . . . . . . . . . . . . . . . . . . 233
Protecting Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
Examples of Contact Assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235
Creating Different 2D Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235
Creating Different 3D Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 236

7. Generating Mesh and Doping Profiles. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239

Overview of Meshing Operations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
Defining Areas for Mesh Refinement or Doping. . . . . . . . . . . . . . . . . . . . . . . . 240
Line-Segment Ref/Eval Windows. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240
Rectangular and Polygonal Ref/Eval Windows . . . . . . . . . . . . . . . . . . . . 240
Cuboidal Ref/Eval Windows. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 242
Extracting Ref/Eval Window From Face . . . . . . . . . . . . . . . . . . . . . . . . . 242
Extracting Ref/Eval Window From Body Interface . . . . . . . . . . . . . . . . . . 243
Extracting Ref/Eval Window From 3D Solid Body . . . . . . . . . . . . . . . . . . 243
Extracting Ref/Eval Windows From 3D Solid Body Interfaces . . . . . . . . . 244
Deleting Ref/Eval Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246
Defining Mesh Refinements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
Regular Mesh Refinement Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
Multibox Refinements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252
Offsetting Refinements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254
Defining Doping Profiles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256
Defining Constant Doping Profiles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256
Defining Analytic Doping Profiles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 258
Including External 2D and 3D Doping Profiles . . . . . . . . . . . . . . . . . . . . . 263
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
Defining Particle Doping Profiles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 270
Controlling the Boundary Tessellation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272

9
Contents

Global Tessellation Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272

Available Faceters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273
Tessellating Spherical Faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
Boundary Tessellation in Three Dimensions . . . . . . . . . . . . . . . . . . . . . . 277
Defining Command File Sections Specific to Sentaurus Mesh . . . . . . . . . . . . 278
IOControls Section and Interpolate Section . . . . . . . . . . . . . . . . . . . . . . . 278
AxisAligned Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 279
Delaunizer Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 281
Tensor Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283
Boundary Section. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283
Boundary Section. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 284
Tools Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 286
QualityReport Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 286
Building the Mesh . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 288

8. Creating Planar Layer Stacks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289

Using the sdeepi:create-layerstack Scheme Extension. . . . . . . . . . . . . . . . . . 289
Command File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 290
Global Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 291
Size and Position of Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294
Global Refinement Strategy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296
User-Defined Extension Columns . . . . . . . . . . . . . . . . . . . . . . . . . . 296
Layers Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297
Region Column. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
Material Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
SourceParFile Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
Thickness Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
Doping Column. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 299
MoleFraction Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303
Refinement Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 306
Extension Columns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 308
Processing the Layer Stack . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 309
References. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 310

9. Working With Scheme and Scheme Extensions. . . . . . . . . . . . . . . . . . . . . 311

Scheme Data Types. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 311

10
Contents

Basic Scheme Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 312

Basic Scheme Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 313
Defining Simple Variables and Data Types . . . . . . . . . . . . . . . . . . . . . . . 313
Printing Text to Standard Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 314
String Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 314
Lists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 315
Arithmetic Expressions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316
Boolean Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 317
If Blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 318
Simple Do Loops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 319
For Each Loops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 319
Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 320
System Calls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 321
Error Signaling to Sentaurus Workbench. . . . . . . . . . . . . . . . . . . . . . . . . 321

10. Geometric Query Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322

Entity IDs and Attributes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322
Topological Entity Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323
Selecting Geometric Objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325
Graphic-Supported Object Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325
Script-Based Object Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325
Finding Region Names and Material Properties . . . . . . . . . . . . . . . . . . . . . . . 327
Automatic Region-Naming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 328
List of Supported Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329
Finding Vertex Positions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329
Vertex–Vertex Distance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 330
Debugging Topological Entities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 330
Finding Edges, Faces, and Other Elements of a Body . . . . . . . . . . . . . . . . . . 331
Bounding Box Query . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 332
Scheme Functions for Entity Queries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 333

11. Miscellaneous Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 335

Background Image Loader. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 335
User-Defined Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 336
Example: Defining a Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 337

11
Contents

Step 1: Define a Scheme Function That the Dialog Box Executes . 337
Step 2: Define and Configure the Dialog Box. . . . . . . . . . . . . . . . . . 337
Step 3: Launch the Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 338
Starting Sentaurus Structure Editor With User-Defined Variables . . . . . . . . . . 338
User-Defined GUI Interactions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
Dialog Boxes for Obtaining Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
GUI Actions for Obtaining Positions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
Message Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 340

A. Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 341
Presentation of Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 341
Renamed Commands and Obsolete Commands . . . . . . . . . . . . . . . . . . 341
afm-smooth-layers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344
bbox . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 345
bbox-exact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 346
body? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 347
build-csv-lens . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 348
color:rgb . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 349
complete-edge-list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 350
convert-to-degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 351
convert-to-radian . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 351
edge? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 352
edge:circular . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 353
edge:circular? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354
edge:elliptical? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354
edge:end . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355
edge:length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355
edge:linear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 356
edge:linear? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
edge:mid-point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
edge:start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
edge:type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 359

12
Contents

entity:box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 359
entity:copy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 360
entity:debug . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 361
entity:deep-copy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 362
entity:delete . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 362
entity:dist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 363
entity:edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 364
entity:erase . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 364
entity:faces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 365
entity:loops. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 366
entity:lumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 367
entity:set-color . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 368
entity:shells . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 369
entity:vertices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 370
env:set-tolerance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 371
env:tolerance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 372
erf. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 372
erfc . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 373
exists-empty-mask-name. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 373
exists-mask-name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 374
extract-interface-normal-offset-refwindow . . . . . . . . . . . . . . . . . . . . . . . . . . . . 375
extract-interface-offset-refwindow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 376
extract-refpolyhedron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 377
extract-refpolyhedron-facets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 377
extract-refwindow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 379
face:area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 380
face:conical? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 381
face:cylindrical? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 381
face:planar? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 382
face:plane-normal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 382
face:spherical?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 383

13
Contents

face:spline? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 383
face:toroidal? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384
filter:type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384
find-body-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385
find-body-id-drs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385
find-drs-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 386
find-edge-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 387
find-edge-id-drs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 388
find-face-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 388
find-face-id-drs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 389
find-material-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 389
find-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 390
find-region-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
find-vertex-id . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
find-vertex-id-drs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
generic:get . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
generic:list-attributes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394
generic:set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 395
get-body-list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 396
get-drs-list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 396
get-empty-mask-list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 397
get-mask-list. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 397
gvector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 398
gvector? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
gvector:+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
gvector:- . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
gvector:copy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
gvector:cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 401
gvector:dot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 401
gvector:from-to. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 402
gvector:length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 402

14
Contents

gvector:parallel?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 403
gvector:perpendicular? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 403
gvector:reverse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
gvector:scale . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
gvector:set! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 405
gvector:set-x! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 406
gvector:set-y! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 407
gvector:set-z! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 408
gvector:transform . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 409
gvector:unitize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 409
gvector:x . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 410
gvector:y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 410
gvector:z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 411
journal:abort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 411
journal:append . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 412
journal:clean. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 412
journal:load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 413
journal:off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 413
journal:on . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 414
journal:pause . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
journal:resume . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
journal:save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
journal:step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416
loop? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 417
loop:external? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 417
lump? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 418
mask-refevalwin-extract-2d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 419
mask-refevalwin-extract-3d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 420
member? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 421
merge-collinear-edges-2d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 422
part:entities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 423

15
Contents

part:load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 424
part:save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425
part:save-selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 426
part:set-name. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 427
position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 428
position?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 429
position:+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 430
position:- . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 430
position:distance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 431
position:set! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 432
position:set-x!. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 433
position:set-y!. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 433
position:set-z!. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434
position:x . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 434
position:y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 435
position:z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 435
protect-all-contacts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436
random-sd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 437
remove-body-ABA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 438
remove-body-BAB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 439
render:rebuild. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 440
roll . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 440
sde:add-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 441
sde:back-coord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 442
sde:bg-image-transparency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 442
sde:bool-regularise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 443
sde:bottom-coord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 443
sde:build-mesh. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 444
sde:change-datex-color-scheme . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 445
sde:check-3d-license-status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 445
sde:check-model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 446

16
Contents

sde:checkout-3d-license . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 446
sde:clear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 447
sde:create-bg-image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 448
sde:create-dialog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 449
sde:define-parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 450
sde:delay-graphics-update. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 451
sde:delay-graphics-update?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 451
sde:delete-bg-image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 452
sde:delete-materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 452
sde:delete-parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 453
sde:dialog-add-input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454
sde:dialog-add-pixmap. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 455
sde:dialog-delete . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456
sde:dialog-ok-command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 457
sde:dialog-show . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 458
sde:display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
sde:display-err . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
sde:display-std . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460
sde:draw-ruler . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 462
sde:dump-non-default-options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 464
sde:exact-coords? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 464
sde:extract-tdr-boundary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465
sde:fix-imprint. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465
sde:fix-orientation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 466
sde:front-coord. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 466
sde:ft_scalar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 467
sde:get-backwards-compatibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 468
sde:get-datex-color-scheme . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 468
sde:get-default-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 469
sde:get-view-params . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 469
sde:gui-get-integer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 470

17
Contents

sde:gui-get-real . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 471
sde:gui-get-string . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 472
sde:hide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 473
sde:hide-bg-image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 473
sde:hide-contact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 474
sde:hide-interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 474
sde:hide-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 475
sde:hide-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 476
sde:hide-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 477
sde:hide-ruler . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 478
sde:info . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 478
sde:left-coord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 479
sde:load-sat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 479
sde:material-type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 480
sde:max-x . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 480
sde:max-y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 481
sde:max-z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 481
sde:merge-materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 482
sde:min-x . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 483
sde:min-y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 483
sde:min-z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
sde:new-region-name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
sde:off-lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
sde:offset-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485
sde:on-lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485
sde:open-model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 486
sde:part-load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 487
sde:pick-point-on-wp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
sde:pick-two-points-on-wp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
sde:post-message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 489
sde:project-name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 489

18
Contents

sde:refresh . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 490
sde:rename-regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 491
sde:restore-cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 491
sde:right-coord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 492
sde:save-model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 493
sde:save-parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 494
sde:save-tcl-parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495
sde:scale-scene . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 497
sde:scmwin-get-font-families . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 497
sde:scmwin-get-font-family . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 498
sde:scmwin-get-font-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 498
sde:scmwin-get-font-style . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 498
sde:scmwin-get-window-height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 499
sde:scmwin-select-font . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 499
sde:scmwin-set-font-family . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 499
sde:scmwin-set-font-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 500
sde:scmwin-set-prefs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 500
sde:scmwin-set-window-height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
sde:scmwin-suppress-output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
sde:selected-entities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 502
sde:selected-refeval-windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 502
sde:separate-lumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 503
sde:set-background-color . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505
sde:set-backwards-compatibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 506
sde:set-default-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 507
sde:set-menubar-font-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 507
sde:set-process-up-direction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 508
sde:set-project-name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 509
sde:set-rendering-mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 509
sde:set-selection-level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 510
sde:set-translucency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 511

19
Contents

sde:set-view-mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 512
sde:set-view-operator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 512
sde:set-view-params . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 513
sde:set-window-position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 514
sde:set-window-size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 514
sde:set-window-style . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 515
sde:setrefprops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 516
sde:setup-grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 517
sde:show . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 518
sde:showattribs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 519
sde:show-bg-image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 519
sde:show-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 520
sde:show-grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 520
sde:show-interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 521
sde:show-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 521
sde:show-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 522
sde:show-pcurves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 523
sde:show-region. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 524
sde:split-solid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 525
sde:stripextension . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 526
sde:substring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 526
sde:test-entity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 527
sde:toggle-lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 527
sde:top-coord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 528
sde:tr-get . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 528
sde:view-filter-reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 529
sde:view-set-light-intensity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 529
sde:view-set-visible-area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 530
sde:wait-cursor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 530
sde:window-select-2d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 531
sde:window-select-3d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 532

20
Contents

sde:xshow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 533
sde:xshow-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 534
sde:xshow-interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 535
sde:xshow-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 536
sde:xshow-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 537
sde:xshow-region. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 538
sde:zoom-all. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 539
sdedr:append-cmd-file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 539
sdedr:clear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 540
sdedr:clear-multibox-definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 540
sdedr:clear-multibox-placements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 540
sdedr:clear-profile-definitions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 541
sdedr:clear-profile-placements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 541
sdedr:clear-ref-windows. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 541
sdedr:clear-refinement-definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 542
sdedr:clear-refinement-placements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 542
sdedr:clear-submesh-placement-transform . . . . . . . . . . . . . . . . . . . . . . . . . . . 543
sdedr:convert-mask-to-drs-body . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 543
sdedr:define-1d-external-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 544
sdedr:define-analytical-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 546
sdedr:define-analytical-profile-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . 547
sdedr:define-body-interface-refwin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 549
sdedr:define-constant-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 550
sdedr:define-constant-profile-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 551
sdedr:define-constant-profile-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 552
sdedr:define-constant-profile-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 553
sdedr:define-erf-profile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 554
sdedr:define-gaussian-profile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555
sdedr:define-multibox-placement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 557
sdedr:define-multibox-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 558
sdedr:define-particle-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 559

21
Contents

sdedr:define-particle-profile-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 560
sdedr:define-refeval-window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 561
sdedr:define-refinement-function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 564
sdedr:define-refinement-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 565
sdedr:define-refinement-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 566
sdedr:define-refinement-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 567
sdedr:define-refinement-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 568
sdedr:define-submesh . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 569
sdedr:define-submesh-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 570
sdedr:del-selected-drentity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 571
sdedr:delete-multibox-placement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 571
sdedr:delete-profile-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 572
sdedr:delete-refeval-window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 572
sdedr:delete-refinement-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 573
sdedr:delete-submesh-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 574
sdedr:get-cmdprecision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 574
sdedr:get-definition-list. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 574
sdedr:get-placement-list. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 575
sdedr:hide-mbox . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 575
sdedr:hide-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 576
sdedr:hide-refinement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 576
sdedr:hide-rewin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 577
sdedr:offset-block. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 578
sdedr:offset-interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 579
sdedr:read-cmd-file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 580
sdedr:redefine-refeval-window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 581
sdedr:refine-box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 582
sdedr:refine-doping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 583
sdedr:refine-interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 584
sdedr:set-cmdprecision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 585
sdedr:set-title . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 586

22
Contents

sdedr:show-mbox. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 586
sdedr:show-profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 587
sdedr:show-refinement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 587
sdedr:show-rewin. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 588
sdedr:transform-submesh-placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 589
sdedr:write-cmd-file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 590
sdedr:write-scaled-cmd-file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 590
sdeepi:create-layerstack . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 591
sdeepi:publish-global-vars . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 592
sdeepi:scm. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 593
sdeepi:tcl . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 594
sdegeo:2d-cut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 595
sdegeo:3d-cut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 596
sdegeo:align-horizontal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 598
sdegeo:align-horizontal-aut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 599
sdegeo:align-to-line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 600
sdegeo:align-vertical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 601
sdegeo:align-vertical-aut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 602
sdegeo:average-edge-length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 603
sdegeo:body-trim . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 604
sdegeo:bool-intersect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 605
sdegeo:bool-subtract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 606
sdegeo:bool-unite . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 607
sdegeo:break-nearly-axis-aligned-edges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 608
sdegeo:chamfer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 609
sdegeo:chamfer-2d . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 611
sdegeo:check-overlap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 612
sdegeo:chop-domain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 613
sdegeo:chull2d. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 614
sdegeo:contact-sets. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 614
sdegeo:create-circle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 615

23
Contents

sdegeo:create-cone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 616
sdegeo:create-cuboid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 618
sdegeo:create-cylinder. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 619
sdegeo:create-ellipse. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 621
sdegeo:create-ellipsoid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 622
sdegeo:create-ellipsoid-d. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 623
sdegeo:create-linear-edge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 624
sdegeo:create-ot-ellipsoid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 624
sdegeo:create-ot-sphere . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 626
sdegeo:create-polygon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 627
sdegeo:create-polyline-wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 628
sdegeo:create-prism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 629
sdegeo:create-pyramid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 630
sdegeo:create-rectangle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 632
sdegeo:create-reg-polygon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 633
sdegeo:create-ruled-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 634
sdegeo:create-sphere . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 635
sdegeo:create-spline-wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 636
sdegeo:create-torus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 637
sdegeo:create-triangle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 639
sdegeo:curve-intersect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 640
sdegeo:define-3d-contact-by-polygon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 641
sdegeo:define-contact-set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 642
sdegeo:define-coord-sys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 643
sdegeo:define-work-plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 644
sdegeo:del-short-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 645
sdegeo:delete-collinear-edges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 646
sdegeo:delete-contact-boundary-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 646
sdegeo:delete-contact-boundary-faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 647
sdegeo:delete-contact-edges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 648
sdegeo:delete-contact-faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 648

24
Contents

sdegeo:delete-contact-set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 649
sdegeo:delete-coord-sys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 649
sdegeo:delete-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 650
sdegeo:delete-nearly-collinear-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 651
sdegeo:delete-region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 652
sdegeo:delete-short-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 652
sdegeo:delete-vertices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 653
sdegeo:delete-work-plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 653
sdegeo:distance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 654
sdegeo:dnce . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 654
sdegeo:extend-device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 655
sdegeo:extrude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 657
sdegeo:face-find-interior-point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 658
sdegeo:fillet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 659
sdegeo:fillet-2d. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 661
sdegeo:find-closest-edge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 662
sdegeo:find-closest-face . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 662
sdegeo:find-closest-vertex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 663
sdegeo:find-touching-faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 664
sdegeo:find-touching-faces-global . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 665
sdegeo:get-active-work-plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 665
sdegeo:get-auto-region-naming. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 666
sdegeo:get-contact-edgelist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 666
sdegeo:get-contact-facelist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 667
sdegeo:get-current-contact-set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 667
sdegeo:get-default-boolean . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 668
sdegeo:get-region-counter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 668
sdegeo:imprint-circular-wire. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 669
sdegeo:imprint-contact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 670
sdegeo:imprint-polygonal-wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 671
sdegeo:imprint-rectangular-wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 672

25
Contents

sdegeo:imprint-triangular-wire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 673
sdegeo:insert-vertex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 673
sdegeo:max-edge-length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 674
sdegeo:min-edge-length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 675
sdegeo:mirror-selected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 676
sdegeo:move-2d-regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 677
sdegeo:move-edge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 678
sdegeo:move-vertex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 679
sdegeo:point-entity-relationship . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 680
sdegeo:polygonal-split . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 681
sdegeo:prune-vertices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 682
sdegeo:ray-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 683
sdegeo:reflect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 684
sdegeo:rename-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 685
sdegeo:revolve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 686
sdegeo:rotate-selected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 687
sdegeo:scale . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 689
sdegeo:scale-selected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 690
sdegeo:set-active-coord-sys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 691
sdegeo:set-active-work-plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 691
sdegeo:set-auto-region-naming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 692
sdegeo:set-contact. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 693
sdegeo:set-contact-boundary-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 694
sdegeo:set-contact-boundary-faces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 695
sdegeo:set-contact-edges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 696
sdegeo:set-contact-faces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 697
sdegeo:set-contact-faces-by-polygon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 698
sdegeo:set-current-contact-set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 699
sdegeo:set-default-boolean . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 700
sdegeo:set-region-counter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 701
sdegeo:set-region-counter-aut. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 702

26
Contents

sdegeo:skin-wires . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 703
sdegeo:skin-wires-guides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 704
sdegeo:skin-wires-normal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 705
sdegeo:skin-wires-vectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 706
sdegeo:split-insert-device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 707
sdegeo:sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 708
sdegeo:sweep-corner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 710
sdegeo:taper-faces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 711
sdegeo:translate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 712
sdegeo:translate-selected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 713
sdegeo:vsmooth. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 714
sdeicwb:clear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 714
sdeicwb:contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 715
sdeicwb:create-boxes-from-layer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 720
sdeicwb:define-refinement-from-layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 721
sdeicwb:down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 724
sdeicwb:gds2mac . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 725
sdeicwb:generate-mask-by-layer-name. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 728
sdeicwb:get-back . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 729
sdeicwb:get-dimension . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 729
sdeicwb:get-domains . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 730
sdeicwb:get-front . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 730
sdeicwb:get-global-bot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 731
sdeicwb:get-global-top . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 731
sdeicwb:get-label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 732
sdeicwb:get-label-for-layer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 732
sdeicwb:get-labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 733
sdeicwb:get-layer-ids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 733
sdeicwb:get-layer-names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 733
sdeicwb:get-layer-polygon-midpoints. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 734
sdeicwb:get-left . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 735

27
Contents

sdeicwb:get-polygon-bounding-boxes-by-layer-name . . . . . . . . . . . . . . . . . . . 735
sdeicwb:get-polygon-by-name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 736
sdeicwb:get-polygon-names-by-layer-name . . . . . . . . . . . . . . . . . . . . . . . . . . 736
sdeicwb:get-region-bot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 737
sdeicwb:get-region-top. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 738
sdeicwb:get-right . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 739
sdeicwb:get-xmax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 739
sdeicwb:get-xmin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 740
sdeicwb:get-ymax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 740
sdeicwb:get-ymin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 741
sdeicwb:get-zmax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 741
sdeicwb:get-zmin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 742
sdeicwb:load-file . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 743
sdeicwb:mapreader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 744
sdeicwb:set-domain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 745
sdeicwb:stretch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 745
sdeicwb:up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 746
sdeio:read-dfise-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 747
sdeio:read-tdr. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 748
sdeio:read-tdr-bnd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 749
sdeio:save-1d-tdr-bnd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 750
sdeio:save-tdr-bnd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 752
sdepe:add-substrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 755
sdepe:clean . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 756
sdepe:define-pe-domain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 757
sdepe:depo . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 759
sdepe:doping-constant-placement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 761
sdepe:etch-material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 762
sdepe:extend-masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 763
sdepe:fill-device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 764
sdepe:generate-domainboundary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 765

28
Contents

sdepe:generate-empty-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 766
sdepe:generate-mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 767
sdepe:icon_layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 769
sdepe:implant. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 771
sdepe:pattern . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 773
sdepe:photo . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 774
sdepe:polish-device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 775
sdepe:remove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 776
sdepe:trim-masks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 777
sdesnmesh:axisaligned . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 778
sdesnmesh:boundary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 781
sdesnmesh:boundary-clear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 782
sdesnmesh:delaunizer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 783
sdesnmesh:delaunizer-tolerance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 785
sdesnmesh:interpolate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 786
sdesnmesh:iocontrols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 787
sdesnmesh:offsetting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 788
sdesnmesh:qualityreport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 789
sdesnmesh:tensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 791
sdesnmesh:tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 792
sdesp:begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 793
sdesp:define-step. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 794
sdesp:finalize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 794
sdesp:restore-state . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 795
sdestr:capitalize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 796
sdestr:casefold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 797
sdestr:center . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 798
sdestr:concat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 799
sdestr:count . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 800
sdestr:endswith . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801
sdestr:expandtabs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 802

29
Contents

sdestr:find . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 803
sdestr:format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 804
sdestr:index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 806
sdestr:isalnum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 807
sdestr:isalpha. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 808
sdestr:isdecimal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 809
sdestr:isdigit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 810
sdestr:islower . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 811
sdestr:isnumeric. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 812
sdestr:isspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 813
sdestr:istitle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 814
sdestr:isupper . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 815
sdestr:join. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 816
sdestr:length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 817
sdestr:ljust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 818
sdestr:lower . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 819
sdestr:lstrip. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 820
sdestr:partition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 821
sdestr:replace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 822
sdestr:rfind . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 823
sdestr:rindex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 824
sdestr:rjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 825
sdestr:rpartition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 826
sdestr:rsplit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 827
sdestr:rstrip . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 828
sdestr:split . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 829
sdestr:splitlines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830
sdestr:startswith . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 832
sdestr:swapcase . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 833
sdestr:upper . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 834
sdestr:zfill . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 835

30
Contents

set-interface-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 836
shell? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 837
skin:options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 838
solid? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 841
solid:area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 841
solid:massprop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 842
sort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 843
string:head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 844
string:tail. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 845
sweep:law . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 846
sweep:options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 848
system:command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 850
system:getenv . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 850
timer:end . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 851
timer:get-time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 851
timer:show-time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 852
timer:start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 852
transform:reflection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 853
transform:rotation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 854
transform:scaling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 855
transform:translation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 856
util:make-bot-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 857
util:make-top-contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 858
vertex? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 859
view:set-point-size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 859
wire? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 860
wire-body? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 860
wire:planar? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 861

B. Error Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 862

Workflow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 862

31
Contents

Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 863
Enable Verbosity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 863
Set Verbosity Level. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 863
Check Verbosity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 863
Output Message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 864
Output in SSE Console . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 864
Output in SSE Console and Break Function . . . . . . . . . . . . . . . . . . 864
Output in Terminal Console . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 864
Output in Terminal Console and SSE Console. . . . . . . . . . . . . . . . . 865
Display and Highlight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 865
Show Entity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 865
Hide Entity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 865
Highlight Entity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 865
Disable Highlight Entity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 865
Highlight Vertices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 866
Disable Highlight Vertices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 866
Check Quality. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 866
Check Entity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 866
Find Geometric Issue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 869
Filter Useful Polygons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 871
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 872
Skinning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 872
sdegeo:skin-wires With Problematic poly-line Wires . . . . . . . . . . . . 872
Sweeping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 875
Example With a Problematic poly-line Wire . . . . . . . . . . . . . . . . . . . 875
Example With a Problematic Sweeping Result . . . . . . . . . . . . . . . . 878

Index of Scheme Extensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 884

32
About This Guide
The Synopsys® Sentaurus™ Structure Editor tool is a two-dimensional (2D) and
three-dimensional (3D) device structure editor, and a 3D process emulator. Its operational
modes – 2D structure editing, 3D structure editing, and 3D process emulation – share a
common data representation. Geometric and process emulation operations can be mixed
freely, adding more flexibility to the generation of 3D structures.
Two-dimensional models can be used to create 3D structures, or 3D structures can be
defined directly. When a 3D model is created, three-dimensional device editing operations
and process emulation operations can be applied interchangeably to the same model. The
2D and 3D structure editing modes include geometric model generation, doping and
refinement definition, and submesh inclusion (to generate the mesh command file).
For additional information, see:
• The TCAD Sentaurus release notes, available on the Synopsys SolvNetPlus site (see
Accessing SolvNetPlus on page 34)
• Documentation available on the SolvNetPlus site

Conventions
The following conventions are used in Synopsys documentation.

Convention Description

Bold text Identifies a selectable icon, button, menu, or tab. It also indicates the name
of a field or an option.

Courier font Identifies text that is displayed on the screen or that the user must enter. It
identifies the names of files, directories, paths, parameters, keywords, and
variables.

Italicized text Used for emphasis, the titles of books and journals, and non-English words.
It also identifies components of an equation or a formula, a placeholder, or
an identifier.

Key+Key Indicates keyboard actions, for example, Ctrl+I (press the I key while
pressing the Control key).

Menu > Command Indicates a menu command, for example, File > New (from the File menu,
choose New).

Sentaurus™ Structure Editor User Guide 33

V-2024.03
About This Guide
Customer Support

Customer Support
Customer support is available through the SolvNetPlus site.

Accessing SolvNetPlus
The SolvNetPlus site includes a knowledge base of technical articles and answers to
frequently asked questions about Synopsys tools. The site also gives you access to a wide
range of Synopsys online services including software downloads, documentation, and
technical support.
To access the SolvNetPlus site:
1. Go to https://solvnetplus.synopsys.com.
2. Enter your user name and password. (If you do not have a Synopsys user name and
password, follow the instructions to register.)

Contacting Synopsys Support

If you have problems, questions, or suggestions, contact Synopsys support in the following
ways:
• Go to the Synopsys Global Support Centers site on www.synopsys.com to find email
addresses and telephone numbers for Synopsys support centers throughout the world.
• Go to the SolvNetPlus site and open a case (Synopsys user name and password
required).

Contacting Your Local TCAD Support Team Directly

Send an email message to:
• [email protected] from within North America and South America
• [email protected] from within Europe
• [email protected] from within Asia Pacific (China, Taiwan, Singapore,
Malaysia, India, Australia)
• [email protected] from Korea
• [email protected] from Japan

Sentaurus™ Structure Editor User Guide 34

V-2024.03
About This Guide
Acknowledgments

Acknowledgments
Portions of this software are owned by Spatial Corp. © 1986–2024. All rights reserved.

Statement on Inclusivity and Diversity

Synopsys is committed to creating an inclusive environment where every employee,
customer, and partner feels welcomed. We are reviewing and removing exclusionary
language from our products and supporting customer-facing collateral. Our effort also
includes internal initiatives to remove biased language from our engineering and working
environment, including terms that are embedded in our software and IPs. At the same time,
we are working to ensure that our web content and software applications are usable to
people of varying abilities. You may still find examples of non-inclusive language in our
software or documentation as our IPs implement industry-standard specifications that are
currently under review to remove exclusionary language.

Sentaurus™ Structure Editor User Guide 35

V-2024.03
1
Introduction to Sentaurus Structure Editor
1

This chapter introduces the Sentaurus Structure Editor tool and describes its basic
operations.

Sentaurus Structure Editor Functionality

Sentaurus Structure Editor can be used as a two-dimensional (2D) or three-dimensional
(3D) structure editor, and a 3D process emulator to create TCAD devices.
In Sentaurus Structure Editor, structures are generated or edited interactively using the
graphical user interface (GUI). Doping profiles and meshing strategies can also be defined
interactively. Sentaurus Structure Editor features an interface to configure and call the
Synopsys meshing engines. In addition, it generates the necessary input files (the TDR
boundary file and mesh command file) for the meshing engines, which generate the TDR
grid and data file for the device structure.
Alternatively, devices can be generated in batch mode using scripts. Scripting is based on
the Scheme scripting language. This option is useful, for example, for creating
parameterized device structures. Sentaurus Structure Editor records interactive actions in
the form of script commands (journaling). Therefore, it is easy to generate a script from
recorded interactive operations. These scripts can be parameterized afterwards.
Command-Line Window on page 52 provides information regarding the Scheme scripting
language. When a GUI action is performed, Sentaurus Structure Editor prints the
corresponding Scheme command in the command-line window. This facilitates another
convenient way to generate and work with scripts. Open a text editor and use cut-and-paste
operations to transfer the Scheme commands, which Sentaurus Structure Editor prints in the
command-line window, to a script file. In the text editor, the commands can be edited as
needed and pasted back into the command window for execution.
In addition, Scheme resources are listed in Basic Scheme Programming on page 312.
Device structures are defined by using geometric operations such as:
• Generation of 2D and 3D primitives (rectangles, circles, cuboids, cylinders)
• Filleting, chamfering, 3D vertex and edge blending, face-tapering operations

Sentaurus™ Structure Editor User Guide 36

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Sentaurus Structure Editor Functionality

• Boolean operations between bodies

• General extrusion, sweep, and skinning and lofting operations
In addition, device structures can be defined using emulated process steps such as:
• Import or define mask layouts
• Substrate generation
• Patterning
• Isotropic and anisotropic etching and deposition, with or without shadowing and
directional effects
• Polishing and fill operations
• Implantation
Sentaurus Structure Editor can be used in different ways or modes:
• Two-dimensional device editor
• Three-dimensional device editor
• Three-dimensional process emulator (Procem)
The common characteristics of these modes are:
• The use of a state-of-the-art geometry modeling kernel (ACIS, from Dassault Systèmes
S.A.) that provides a robust and reliable base for model generation
• A high-quality rendering engine and GUI
• A scripting interface, which is based on the Scheme scripting language
• All modes share a common kernel that provides TDR file input and output, conformal
model tessellation for the 2D and 3D Synopsys meshing engines, a link to the meshing
engines (with an appropriate user interface to the selected engine), refinement control
for tessellated curved boundaries, and other support functionalities
The 2D and 3D device editors provide a GUI and scripting support to:
• Generate the model geometry
• Define contact regions
• Add constant, analytic, and externally generated doping profiles to the model
• Define local refinements
• Include external submeshes
• Interface to the Synopsys meshing engines

Sentaurus™ Structure Editor User Guide 37

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Starting Sentaurus Structure Editor

The process emulator provides additional scripting functions to emulate TCAD process
steps.
All three modes share the same software infrastructure and internal data representation,
and can be combined freely. A 2D model can be extruded or swept along a curve to
generate a 3D model. Afterwards, process steps (for example, a deposition step) can be
performed on the generated 3D model. Similarly, a 2D slice can be generated from a 3D
model and can be saved in a 2D boundary file.

ACIS Geometry Kernel

The geometry operations in Sentaurus Structure Editor are based on the ACIS geometry
kernel. The ACIS 3D geometric modeler (ACIS) is an object-oriented 3D geometric
modeling engine from Spatial Corp.
ACIS is based on boundary representation. An ACIS boundary representation (B-rep) of a
model is a hierarchical decomposition of the topology of the model into lower-level
topological objects. A typical body contains lumps, shells, faces, loops, wires, coedges,
edges, and vertices.
The Topology Browser in Sentaurus Structure Editor can be used to explore the relationship
between these objects. When Sentaurus Structure Editor generates a new body or performs
a Boolean operation or any other action that affects the geometry, the ACIS data
representation always provides a valid model.
Since the geometry representation is always three dimensional, there is a seamless
transition from 2D models to 3D models (using extrusion, sweep operations, and so on).
When only 2D objects are present, the TDR output will be two dimensional. For 3D objects,
the TDR file is three dimensional.
An entity is the most basic ACIS object. The selection tool and (sde:selected-entities)
always return the ACIS entity IDs for the selected entities. These entity IDs are used to refer
to specific entities.
Apart from the Sentaurus Structure Editor documentation, a useful resource to learn the
basics of ACIS and Scheme is J. Corney and T. Lim, 3D Modeling with ACIS, Stirling, UK:
Saxe-Coburg Publications, 2001.

Starting Sentaurus Structure Editor

You can start Sentaurus Structure Editor by typing at the command prompt:
sde [<options>]

where [<options>] are the command-line options listed in Table 1.

Sentaurus™ Structure Editor User Guide 38

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Starting Sentaurus Structure Editor

Note:
The geometry engine of Sentaurus Structure Editor is three dimensional. Even if
the operating mode is 2D, the underlying geometry representation of the model
is three dimensional. The 2D operating mode can be switched to 3D at any time.
The Scheme interface is not affected by the 2D GUI mode or 3D GUI mode.

Table 1 Command-line options

Option Description

-2D Starts the graphical user interface (GUI) in a simplified 2D mode (see GUI
Modes on page 44). Choose View > GUI Mode > 3D Mode to switch to the
default 3D mode. In 2D mode, the menu bar is simplified and only 2D-related
operations and commands are available. In 3D mode, the menu bar is
extended and all features are available.

-action option Sets the default GUI action to the specified action from the following options:
• draw-polygon
• draw-rectangle
• orbit (default)
• pan
• select
• zoom

-defaultGUI Resets GUI parameters to their defaults. The settings include toolbar
positions, DATEX color scheme, and parameters for the command-line
window.
Does not restore the GUI settings from previous session.

-e Runs in batch mode (see Batch Mode on page 40), that is, without the GUI.
Use with -l to run a script in batch mode.

-h heapsize Heap size in kilobytes. By default, Sentaurus Structure Editor uses 1600 MB of
heap space. See Heap Size on page 40.

-help Prints the help message.

-l scriptname Loads and executes the script file called scriptname.

-noloadCmd When loading a boundary file, this option suppresses the loading of the
corresponding mesh command file (see Loading Boundary and Mesh
Command Files at Startup on page 42).

-noLogfile Do not create a .log file during the execution of a Scheme script.

-noopenGL Explicitly suppresses the use of OpenGL. Sentaurus Structure Editor

automatically switches to the noopenGL mode if OpenGL is not available.

Sentaurus™ Structure Editor User Guide 39

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Starting Sentaurus Structure Editor

Table 1 Command-line options (Continued)

Option Description

-noSyntaxCheck Do not run the Scheme syntax checker.

-nowait Do not wait for license to become available.

-r Loads and executes script commands from standard input. Use Ctrl+D to
revert to the default GUI mode, or Ctrl+\ to quit Sentaurus Structure Editor.

-S scriptname Tests the Scheme syntax only; it implies -e, that is, no GUI. See Scheme
Script Syntax-Checking on page 41.

-Sl scriptname Tests the Scheme syntax, and then executes as -l if it passes the syntax
check. See Scheme Script Syntax-Checking on page 41.

-v Prints information about the tool version.

-var var=value Defines and loads additional Scheme variables. These variables can be used
to parameterize a Scheme script.

Batch Mode
To run a Scheme script file, for example MyScript.scm, in batch mode, start Sentaurus
Structure Editor with the -e option (this switches off the graphical display), and use the -l
option to give the script to be run:
sde -e -l MyScript.scm

If the -e option is not used, the GUI is launched after the specified script -l MyScript.scm
is executed.

Heap Size
By default, Sentaurus Structure Editor uses 1600 MB of heap space. For most applications,
the allocated heap space should be sufficient. If Sentaurus Structure Editor does not have
enough heap space during script execution, then the Scheme error file will contain the error
message Out of heap space or Fatal error: GC while GC in progress.
In this case, Sentaurus Structure Editor exits, and the script must be executed again with
increased heap space. To increase the heap space, use the -h argument. For example:
(sde -h 2400000 -e -l myscript.scm)

Sentaurus™ Structure Editor User Guide 40

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Starting Sentaurus Structure Editor

Depending on the structure size and complexity, a heap space of size 2400 MB to 6000 MB
might be needed.

Scheme Script Syntax-Checking

The -S scriptname and -Sl scriptname options invoke the Scheme syntax-checking
feature.
The -S option runs the syntax-checker on the Scheme script scriptname and reports on the
results without executing the script.
In contrast, after first running the syntax-checker on the Scheme script scriptname, the -Sl
option will subsequently run the script if it passes the syntax check; otherwise, it will not run
the script.
Note:
Due to the complexity of the Scheme scripting language, it is possible, in some
cases, for the syntax-checker to report a false positive. This means a syntax error
might be flagged in complex code even though no syntax error exists. In the case
of the -Sl option, the script is not run if there is an inaccurate flagging of a
nonexistent syntax error. The option -l can be used instead to bypass the syntax
check and to run the script if it is indeed free of syntax errors. You are encouraged
to report such cases, so that the number of false positives will be reduced in future
releases (contact your local TCAD Support Team).

Literal Evaluation of Scheme Script

When a Scheme script is executed in batch mode, a log file is created that contains the
executed Scheme commands. The log file does not contain the literal evaluation and
substitution of the Scheme variables. Therefore, for example, the log file will contain
(position xp yp zp), not the actual numeric values of the xp, yp, and zp variables that
were used during the script evaluation.
In some cases, you might want to see the actual numeric values that were used during
command execution. To facilitate this, an .eval file also can be created during script
evaluation. The global Scheme variable evaluate-log-file can be used to trigger the
logging of the evaluated Scheme commands. By default, the log file evaluation is switched
off and the value of the evaluate-log-file global Scheme variable is set to #f. If you want
to create the evaluated Scheme file, then you must add the (set! evaluate-log-file
#t) command to the Scheme script.

If the input Scheme script is called test.scm, then the log file is saved as test.log and the
evaluated log file is saved as test.log.eval. If a script fails for some reason, then the

Sentaurus™ Structure Editor User Guide 41

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
Exiting Sentaurus Structure Editor

evaluated log file can be used to check the failing command, where all user-defined
variables contain the actual values that were used during command execution.
The evaluated log file shortens and simplifies debugging and bug reporting, since the
variables do not need to be evaluated separately.

Interactive Mode
Sentaurus Structure Editor can be used interactively by either using the GUI menu bar and
toolbars, or entering the Scheme commands in the command-line window.
To run Sentaurus Structure Editor in interactive mode, enter in a command prompt:
sde

Loading Boundary and Mesh Command Files at Startup

To load a boundary (*_bnd.tdr) file and a mesh command (*.cmd) file when starting
Sentaurus Structure Editor, supply the common file name stem as a command-line option.
For example:
sde MyDevice

This command starts Sentaurus Structure Editor and loads the MyDevice.cmd and
MyDevice_bnd.tdr files.

Loading an ACIS File at Startup

To load a file in the native ACIS format (*.sat) when starting Sentaurus Structure Editor,
enter the file name as a command-line option. For example:
sde MyDevice.sat

This command starts Sentaurus Structure Editor and loads the MyDevice.sat file.

Exiting Sentaurus Structure Editor

To exit Sentaurus Structure Editor, choose File > Exit or press Ctrl+Q.
The corresponding Scheme command is:
(exit)

Sentaurus™ Structure Editor User Guide 42

V-2024.03
Chapter 1: Introduction to Sentaurus Structure Editor
TCAD Sentaurus Tutorial: Simulation Projects

Note:
If the model has changed since the last save operation, then Sentaurus Structure
Editor displays a warning in the interactive mode.
Press Ctrl+\ to terminate Sentaurus Structure Editor from the command prompt
as Ctrl+C is not recognized.

TCAD Sentaurus Tutorial: Simulation Projects

The TCAD Sentaurus Tutorial provides projects demonstrating the capabilities of Sentaurus
Structure Editor.
To access the TCAD Sentaurus Tutorial:
1. Open Sentaurus Workbench by entering the following on the command line: swb
2. From the menu bar of Sentaurus Workbench, choose Help > Training or click on the
toolbar.
Alternatively, to access the TCAD Sentaurus Tutorial:
1. Go to the $STROOT/tcad/current/Sentaurus_Training directory.
The STROOT environment variable indicates where the Synopsys TCAD distribution has
been installed.
2. Open the index.html file in your browser.

Sentaurus™ Structure Editor User Guide 43

V-2024.03
2
Graphical User Interface
2

This chapter describes the graphical user interface of Sentaurus Structure Editor.

Introduction to Graphical User Interface

The graphical user interface (GUI) of Sentaurus Structure Editor has three main areas (see
Figure 1 on page 45).The menu bar, toolbars, and list boxes are located in the upper part of
the main window, the view window is in the center, and the command-line window is in the
lower part.

GUI Modes
Sentaurus Structure Editor offers different GUI modes: 3D (default mode) and 2D. To set the
GUI mode:
• Choose View > GUI Mode > 2D Mode.
• Choose View > GUI Mode > 3D Mode.
The only difference between the 3D GUI mode and the 2D GUI mode is that in the 2D GUI
mode, some toolbars and GUI operations are unavailable. In this way, a more streamlined
and simplified GUI is provided for 2D applications.
The dialog boxes related to doping, refinement, and external submeshes are the same in
both the 2D GUI mode and 3D GUI mode. However, when defining refinement/evaluation
(Ref/Eval) windows directly from these dialog boxes, in 2D GUI mode, rectangular Ref/Eval
windows are created and, in 3D GUI mode, cuboidal Ref/Eval windows are created.

Sentaurus™ Structure Editor User Guide 44

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Figure 1 Main window of Sentaurus Structure Editor

Menu Bar
Toolbars

Work Plane List Contact List

Selection Level List
Material List

Toolbars

View Window

Command-Line
Window

Menu Bar
Table 2 lists the menus that are available from the GUI.
Table 2 Menus

Menu Description

File Load, save, and print functions

Edit Change existing geometric objects

Sentaurus™ Structure Editor User Guide 45

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 2 Menus (Continued)

Menu Description

View Visualization preferences and auxiliary views

Draw Drawing and basic object creation, preferences

Mesh Define a meshing strategy, call the meshing engine, visualize the generated mesh and
data fields

Device Define doping profiles

Contacts Define and edit contacts and contact sets

Help Version information

Toolbars
Each toolbar contains a set of predefined shortcuts and icons, which are shown in the
following tables.
Table 3 File toolbar buttons

Button Shortcut keys Description Button Shortcut keys Description

Ctrl+N Create new file Ctrl+S Save model

Ctrl+O Open model Ctrl+P Print

Table 4 Edit toolbar buttons

Button Shortcut keys Description

Ctrl+Z Undo last operation

Ctrl+Y Redo last operation

Sentaurus™ Structure Editor User Guide 46

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 5 Rendering mode toolbar buttons (for 3D)

Button Description Button Description

Facets Gouraud Shaded

Wireframe Hidden Line

Flat Shaded

Table 6 Standard views toolbar buttons

Button Description Button Description

Isometric View YZ Plane

XY Plane X-Y Plane (y-axis pointing downward)

XZ Plane Zoom to Extents (reset zoom)

Isometric View (Sentaurus Process up

direction)

Table 7 GUI actions toolbar buttons (zoom and move)

Button Description Button Description

Select (selects a single object or Zoom (zooming controlled by mouse)

objects in a window drawn with mouse)

Zoom to Window (zooms to window Pan (move device with mouse)

drawn with mouse)

Orbit (3D rotation) Cut Plane (shows a cross section of

the structure)

Sentaurus™ Structure Editor User Guide 47

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 8 GUI actions toolbar buttons (2D edit tools)

Button Description Button Description

Polygonal Region Split Move Region

Add Vertex Vertex-Vertex Distance

Move Vertex or Move Vertices 2D Cut

Move Edge

Table 9 GUI actions toolbar buttons (2D create tools)

Button Description Button Description

Create Polyline Wire Create Spline Wire

Create Rectangle Create Regular Polygon (needs Exact

Coordinates mode to set parameters)

Create Polygon (end polygon with Create Ruled Region

middle mouse button)

Create Circular Region Create Elliptical Region

Table 10 Snapping actions toolbar buttons

Button Description Button Description

No Snapping Snap to Edge

Snap to Vertex Snap to Grid

Toggle gravity snapping

Sentaurus™ Structure Editor User Guide 48

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 11 GUI actions toolbar buttons (3D create tools)

Button Description Button Description

Create Cuboid Create Cylinder

Create Sphere Create Ellipsoid

Create Cross Section

Table 12 Default Boolean toolbar buttons

Button Description Button Description

Merge (new and existing objects are New object replaces old in
merged; new material and region overlapping regions, but the overlap
names are assigned) becomes a separate region

New object replaces old in overlapping Old object replaces new in

regions overlapping regions, but the overlap
becomes a separate region

Old object replaces new in overlapping

regions

Table 13 Shortcut toolbar buttons

Button Description Button Description

Switch between geometry editor and Switch on or off exact coordinates

grid and data viewer

Grid visualization switch Ruler visualization switch

Auto stretch scene

Sentaurus™ Structure Editor User Guide 49

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 14 DRS (doping, refinement, submesh) toolbar buttons

Button Description Button Description

Reference line (Ref/Eval window) Reference rectangle (Ref/Eval window)

Reference polygon (Ref/Eval Reference element extracted from a

window) geometric face (Ref/Eval window)

Refinement placement Multibox placement

Constant profile placement Analytic profile placement

External profile placement Particle profile placement

Restoring GUI Settings From Previous Session

Some GUI information is saved automatically in your local home directory. On Linux
operating systems, this information is stored in the file ~/.config/Synopsys/Sentaurus
Structure Editor.conf.

The stored parameters are toolbar positions, the setting of the DATEX color scheme, and
the parameters for the command-line window.
To reset these GUI parameters to their defaults, begin an interactive session by using the
-defaultGUI command-line option. This starts the session with the default GUI parameters
and replaces any personalized parameters with these defaults when exiting.

Manipulating the View

Additional shortcut key combinations are available to manipulate the view.
Table 15 Shortcut keys for manipulating the view

Shortcut keys Action

Up Arrow View window: Zoom out

Command-line window: Scroll up command history

Down Arrow View window: Zoom in

Command-line window: Scroll down command history

Left Arrow View window: Pan to the left

Command-line window: Position cursor for editing echoed Scheme command

Sentaurus™ Structure Editor User Guide 50

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

Table 15 Shortcut keys for manipulating the view (Continued)

Shortcut keys Action

Right Arrow View window: Pan to the right

Command-line window: Position cursor for editing echoed Scheme command

Ctrl+Left Arrow View window: Pan downward

Ctrl+Right Arrow View window: Pan upward

Ctrl+Z (roll)

Ctrl+Y (roll 1)

Shift+Orbit Rotate about x-axis (horizontal view) or

Pan (when (sde:use-camera-manipulator #t) is used)

Ctrl+Orbit Rotate about y-axis (vertical view) or

Zoom in and out (when (sde:use-camera-manipulator #t) is used)

Ctrl+Shift+Orbit Rotate about z-axis (perpendicular to view)

Ctrl+N Create new file

Ctrl+O Open model

Ctrl+S Save model

Ctrl+P Print

Ctrl+Q Exit

Lists
The main window of Sentaurus Structure Editor contains the following lists:
• Material list – Selects the material to be assigned to new objects.
• Work Plane list – Sets the work plane for 3D editing.
• Contact list – Selects the contact name to be used in the next set contact region, or face,
or edge operations.
• Selection Level list – Selects which type of object can be selected.

Sentaurus™ Structure Editor User Guide 51

V-2024.03
Chapter 2: Graphical User Interface
Introduction to Graphical User Interface

View Window
The current device is displayed in the view window. The result of all interactive operations is
reflected immediately in the view window.
Right-click in this area to open the following shortcut menus:
• Selection Level controls which type of object can be selected by clicking (Select mode).
Options are Auto Select, Body, Face, Edge, Vertex, and Ref/Eval Window.
• Toggle Visibility activates or deactivates a light source for shading 3D objects.
Placing the cross-hair cursor over an object and right-clicking selects the object
corresponding to the current selection level and opens these shortcut menus.
The following additional menus and options become available, where appropriate, in the
context of the selection made:
• Contacts: If the selection level is set to Edge or Face, contacts are assigned to the
selected objects. It also allows for the creation of new contact sets.
• Delete: In many contexts, the object can be deleted by selected this option.
• Properties: Displays a window with information about the selected object. In some
contexts, for example, Ref/Eval windows, properties of the object are editable.
For Ref/Eval windows, the bounding vertex coordinates are displayed for rectangular
and cuboidal Ref/Eval windows. For these types, the vertex coordinates are editable and
can be changed. In this case, all doping/refinement/submesh (DRS) objects that use the
given Ref/Eval window are redefined using the new vertex coordinates.
• Hide: If the selection level is set to Body or Ref/Eval Window, the selected entities are
hidden.

• Show All: All the previously hidden bodies and Ref/Eval windows are displayed again.

Command-Line Window
Most GUI operations have an associated Scheme command. After a GUI operation, the
corresponding Scheme command is echoed in the command-line window.
Use the Up Arrow and Down Arrow keys to scroll through echoed Scheme commands.
Echoed commands can be edited (use the Left Arrow and Right Arrow keys to position the
cursor, and the Delete key or Backspace key to delete parts of the command, type in new
parts of the command) and reexecuted by pressing the Enter key.
Use cut-and-paste operations to save echoed Scheme commands into a text editor to
interactively build a Scheme script. Individual Scheme commands or groups of Scheme

Sentaurus™ Structure Editor User Guide 52

V-2024.03
Chapter 2: Graphical User Interface
Opening and Saving Operations

commands can be pasted back into the command-line window as needed, for example, to
test a section of a Scheme script. Scheme commands can also be entered directly at the
command-line prompt.
Activate journaling to automatically save the echoed Scheme command to a journal file, for
later editing and replaying (see Recording Actions to a File on page 55).
The following basic rules apply to the Scheme scripting language (see Chapter 9 on
page 311):
• Comment lines start with a semicolon. In each line, a comment proceeds from the first
inserted semicolon.
New variables are defined using the keyword define. Defined variables can be
reassigned a value by using the set! keyword. For example:
(define width 5) ; defines variable width and sets its value to 5
(define height 10)
(set! width 3) ; now width is 3

• Scheme has all the conventional data types such as character, string, list, array,
Boolean, number, function, and symbol.
• All data types are equal. Any variable can hold any type of data. Data initialization,
memory allocation, and memory cleanup (garbage collection) are performed
automatically.
Note:
A few keywords (such as length) are reserved keywords used by Scheme and
they define a Scheme function or operator. These keywords must not be
redefined by a user-initiated define command.

Opening and Saving Operations

The next sections describe basic opening and saving operations.

Opening Models
A model consists of a structure saved in the native ACIS format (filename.sat) and an
auxiliary Scheme script file (filename.scm), which contain parameter settings, contact
definitions, refinement/evaluation (Ref/Eval) windows, surface refinement settings, as well
as work plane and view settings (some of these definitions are also part of the .sat file).
Refinement-related and doping-related information is stored in a third file (filename.cmd).
To open a model, choose File > Open Model or press Ctrl+O.

Sentaurus™ Structure Editor User Guide 53

V-2024.03
Chapter 2: Graphical User Interface
Opening and Saving Operations

The corresponding Scheme command is:

(sde:open-model "filename")

Saving Models
To save a model, you can do one of the following:
• Choose File > Save Model or press Ctrl+S.
• Choose File > Save Model As.
The corresponding Scheme command is:
(sde:save-model "filename")

This command saves the following:

• Model geometry and Ref/Eval windows in native ACIS format (filename.sat)
• Scheme file (filename.scm) with various parameter settings
• Mesh command file (filename_msh.cmd) with refinement-related and doping-related
information
• Boundary file in TDR format (filename_bnd.tdr)

Saving Boundaries
To save only the boundary (and not the entire model) in TDR format, you can do one of the
following:
• Choose File > Save Boundary.
• Choose File > Save Boundary As.

Importing Files
To import a file, choose File > Import.
Note:
When importing a .sat file, the Scheme command part:load is used. This
command works well when importing a structure into an empty database (no
geometric objects defined). In this case, the saved structure is restored correctly.
When importing a structure to a non-empty database (with preexisting geometric
objects), overlapping regions might be generated since part:load does not
respect the active Boolean settings for overlap handling.

Sentaurus™ Structure Editor User Guide 54

V-2024.03
Chapter 2: Graphical User Interface
Recording Actions to a File

You can use the sde:load-sat function (not accessible from the GUI) to load a
native .sat file with correct overlap handling. The function is the same as
part:load, except that it observes the active Boolean setting for overlap control
(that is, overlapping regions will not be present in the model and the overlaps will
be removed based on the active Boolean setting).

Table 16 Supported file formats for loading into Sentaurus Structure Editor and
corresponding Scheme commands

File format Scheme command Description

ACIS SAB file (part:load "filename.sab" #f) Native ACIS format (binary)
(*.sab) to store the complete model

ACIS SAT file (part:load "filename.sat" #t) Native ACIS format (ASCII)
(*.sat) to store the complete model

Mesh doping and (sdedr:read-cmd-file "filename.cmd") Command file for the

refinement file Synopsys mesh generator
(*.cmd)

Layout file (*.lyt) (sdeio:read-dfise-mask "filename.lyt") Layout file in deprecated

DF–ISE format

Scheme script file (load "filename.scm") Scheme command file that

(*.scm, *.cmd) is loaded and executed

TDR file (*.tdr) (sdeio:read-tdr-bnd "filename.tdr") Boundary file in TDR format

Recording Actions to a File

Operations performed using the GUI or command-line window can be recorded in a journal
file for replaying or editing later.
To activate, suspend, and deactivate the journal feature:
1. Choose File > Journal > On.
2. Enter the name of the journal file in which all further actions should be recorded.
3. Choose File > Journal > Pause to suspend the recording of actions.
4. Choose File > Journal > Resume to resume recording actions.
5. Choose File > Journal > Off to end recording actions.

Sentaurus™ Structure Editor User Guide 55

V-2024.03
Chapter 2: Graphical User Interface
Recording Actions to a File

To replay a journal file:

1. Choose File > Journal > Load.
2. Enter the name of the journal file.
To execute the journal file step-by-step, open the journal file in a text editor and enter the
Scheme command (journal:step #t) at the point in the script where the stepping mode
should start.
Note:
In stepping mode, the Enter key must be pressed twice for each single line of the
Scheme script, including blank lines and comments. To revert to continuous
execution, enter the command (journal:step #f).

To save the current journal to a file:

1. Choose File > Journal > Save.
2. In the dialog box, save the file as required.

Table 17 Corresponding Scheme commands for journal features

Scheme command Description

(journal:clean "filename.jrl") Cleans the specified journal file. (Removes all

nonexecutable content from the file to simplify debugging
and parameterization.)

(journal:load "filename.jrl") Loads a journal file and runs each command contained in
that file. Each line is journaled if journaling is switched on.

(journal:off) Closes the current journal file and switches off journaling.

(journal:on "filename.jrl") Switches on journal recording. All future commands are

journaled to the file.

(journal:pause) Pauses recording.

(journal:resume) Resumes recording.

(journal:save "filename.jrl") Saves the current journal to a file, but leaves the journal
session open.

Sentaurus™ Structure Editor User Guide 56

V-2024.03
Chapter 2: Graphical User Interface
Undoing and Redoing Actions

Undoing and Redoing Actions

To undo an action, choose Edit > Undo or press Ctrl+Z.
The corresponding Scheme command is:
(roll)

To redo an action, choose Edit > Redo or press Ctrl+Y.

The corresponding Scheme command is:
(roll+1)

Note:
Undo and redo operations work in multiple steps as well. For example,
(roll -n) rolls back the modeler by n steps, and (roll n) rolls forward the
history stream of the modeler by n steps. (roll) is a shortcut to (roll -1).

Undo and redo operations work with actions supported directly by the ACIS modeling
engine, including operations that create and change Ref/Eval windows. Operations that
involve creating or changing placements cannot be undone by using the (roll) feature.
However, placements can be edited, deleted, and recreated.

Customization
Some parts of the GUI can be customized.

Configuring the Command-Line Window

You can configure the command-line window by choosing View > Script Win Prefs, which
opens the Script Window Preferences dialog box, where you select the font family, font style,
font size, and height of the command-line window.
Note:
The height, font family, font size, and font style of the command-line window are
stored in your local home directory when exiting Sentaurus Structure Editor,
making these parameters persistent from session to session. For information
about how to restore default values, see Restoring GUI Settings From Previous
Session on page 50.

Sentaurus™ Structure Editor User Guide 57

V-2024.03
Chapter 2: Graphical User Interface
Customization

Figure 2 Script Window Preferences dialog box

Alternatively, you can use Scheme extensions (see Table 18).

Table 18 Scheme extensions for configuring the command-line window

Scheme extension Description

(sde:scmwin-get-font-families) Returns all available font families.

(sde:scmwin-get-font-family) Returns the currently selected font family.

(sde:scmwin-get-font-size) Returns the active font size.

(sde:scmwin-get-font-style) Returns the font style.

(sde:scmwin-get-window-height) Returns the height of the command-line window.

(sde:scmwin-select-font) Displays the Select Font dialog box.

(sde:scmwin-set-font-family font-type) Sets the font family.

(sde:scmwin-set-font-size font-size) Sets the font size.

(sde:scmwin-set-prefs) Can be used to configure the command-line

window, using one single function.

(sde:scmwin-set-window-height height) Sets the height of the command-line window in

terms of number of lines.

Sentaurus™ Structure Editor User Guide 58

V-2024.03
Chapter 2: Graphical User Interface
Customization

Changing GUI Attributes

The following GUI attributes are saved by the sde:save-model command and restored by
the sde:open-model command.

Background Color
To change the background color of the view window, choose View > Background Color.
The corresponding Scheme command is:
(sde:set-background-color r_top g_top b_top r_bot g_bot b_bot)

RGB colors for the top and bottom of the view window must be specified as integers in the
range 0–255. For example, to create a graded background with red on top and blue at the
bottom, specify:
(sde:set-background-color 255 0 0 0 0 255)

GUI Style
To change the GUI style, choose View > GUI Style.
The available GUI styles are Windows, Motif, Cleanlooks, Plastique, and CDE. See
sde:set-window-style on page 515.

Font Size of Menu Bar of Main Window

To change the font size of the menu bar of the main window, use:
(sde:set-menubar-font-size font-size)

For example:
(sde:set-menubar-font-size 10)

Size of Main Window

You can resize the main window at any time using the mouse or by using:
(sde:set-window-size x-size y-size)

For example:
(sde:set-window-size 640 480)

Sentaurus™ Structure Editor User Guide 59

V-2024.03
Chapter 2: Graphical User Interface
Selecting Entities

Position of Main Window

You can position the main window on the screen by moving it using the mouse or by using:
(sde:set-window-position x y)

For example, to place the main window in the upper-left corner of the screen, specify:
(sde:set-window-position 0 0)

Restoring GUI Settings

To capture figures for presentations or to compare models visually, the state of the GUI
graphical view (translation, zoom, rotation) can be recorded and restored using Scheme
functions. The sde:get-view-params function returns the actual view parameters. The
view parameters are restored using the sde:set-view-params function. For example:
(define myview (sde:get-view-params))
; The myview object stores the GUI settings, which can be restored
; later.
(sde:set-view-params myview)

Selecting Entities
To select an entity:
1. Click the Select button (see Table 7 on page 47).
2. Select the required entity type from the Selection Level list.
3. Select an entity and hold the Shift or Ctrl key to select additional entities, or drag a box
around a set of entities.
4. Click the (blank) background to clear the selected entity list.
Entity types are Body, Face, Edge, Vertex, or Ref/Eval Window.

Figure 3 Set entity selection type: (left) shortcut menu and (right) Selection Level list

Sentaurus™ Structure Editor User Guide 60

V-2024.03
Chapter 2: Graphical User Interface
Snapping Modes

Snapping Modes
The default drawing mode is freehand for creating 2D regions (rectangles, circles, ellipses,
and so on). Optional features such as snap-to-grid, exact coordinates, and snap-to-existing
vertices can also be used. These features can also be accessed interactively during model
generation.
For example, during a 2D polygonal region generation when the E key is pressed, the
pointer will snap to the closest existing edge. When the pointer is moved, it slides along the
closest edge. When the V key is pressed, the pointer snaps automatically to the closest
vertex. To move back to freehand drawing, press the N key.
Table 19 Keyboard keys for 2D drawing operations

Key Action

Esc Resets operator

V Snap-to-vertex

E Snap-to-edge (closest point on edge)

G Snap-to-grid

N Deactivates snapping

Printing
To print the current view of the structure:
1. Choose File > Print or press Ctrl+P.
2. Select the printer and set print options such as page orientation, and color or
black-and-white mode if available.
3. Select the Print to file option, and enter a file name to export the view to a portable
document format (PDF) file.
4. Click Print.

Sentaurus™ Structure Editor User Guide 61

V-2024.03
Chapter 2: Graphical User Interface
Defining Parameters

Defining Parameters
To define parameters:
1. Choose Edit > Parameters.
The Parameters dialog box opens.
2. Enter the parameter names and values.

3. Click Set.
The corresponding Scheme command is:
(sde:define-parameter parameter-name value [min-value max-value])

See sde:define-parameter on page 450. For example:

(sde:define-parameter "myvar1" "banana")
(sde:define-parameter "myvar2" 10)
(sde:define-parameter "myvar3" 10 0 20)

To delete parameters, click the Delete button of the Parameters dialog box or use the
sde:delete-parameter function (see sde:delete-parameter on page 453).
Note:
Parameter names must be enclosed in double quotation marks when using
sde:define-parameter or sde:delete-parameter.

Sentaurus™ Structure Editor User Guide 62

V-2024.03
Chapter 2: Graphical User Interface
Parameterizing Dialog Boxes

Scheme variables function as parameters for various operations, such as extrusion and
chamfering, and can be used for device parameterization. These variables can be assigned
not only a value by choosing Edit > Parameters, but also minimum and maximum values.
For example, when myvar1 is defined with Value 10, Min. Value 0, and Max. Value 20, you
can enter myvar1 in the command-line window that will evaluate myvar1 as 10. The
minimum value is stored in a variable called myvar1_min, and the maximum value is stored
in a variable called myvar1_max.
Note:
Defined parameters can be used in all subsequent Scheme commands as well
as in the fields of the dialog box that expect numeric values.

Parameters can also be defined by the basic Scheme command (define parameter-name
value).

Parameterizing Dialog Boxes

Several dialog boxes can be parameterized. The dialog boxes can accept not only numeric
inputs, but also Scheme variables and Scheme expressions. The Scheme variables must be
defined and initialized before they can be used in a Sentaurus Structure Editor dialog box.
For example, in Exact Coordinates mode, the Exact Coordinates dialog box opens after a
rectangle is drawn. As input data, in addition to numeric values, Scheme variables and
Scheme expressions can be used to define the vertex coordinates.

Figure 4 Exact Coordinates dialog box using Scheme variables and expressions

For example, after the two Scheme variables width and height are defined in the
command-line window, using:
(define width 10)
(define height 5)

Sentaurus™ Structure Editor User Guide 63

V-2024.03
Chapter 2: Graphical User Interface
Parameterizing Dialog Boxes

and the Exact Coordinates mode is switched on and a rectangle is drawn, the Exact
Coordinates dialog box opens, where you can use Scheme variables and expressions as
input data.
This operation generates the following Scheme command:
(sdegeo:create-rectangle (position 0 0 0.0)
(position width (* 0.25 height) 0.0) "Silicon" "region_1")

Sentaurus™ Structure Editor User Guide 64

V-2024.03
3
Controlling Views
3

This chapter describes the various options to control views available in Sentaurus Structure
Editor.

Zooming, Panning, and Orbiting With Mouse Operations

To access the different mouse operation modes, choose View > Interactive Mode, or click
the corresponding toolbar button (see Figure 5).

Figure 5 Toolbar buttons for zooming, panning, and orbiting with mouse operations

The options are:

Zoom to Extents
Resets the zoom factor so that the entire structure is displayed.
Zoom to Window
Drag to define a zoom window. The view is updated such that the defined zoom window
is displayed as large as possible. (If the aspect ratio of the selected zoom window differs
from the current view window aspect ratio, the zooming might appear to be less than
expected.)
Orbit
In this mode, dragging adjusts the camera position in a way that simulates orbiting
around the drawn structure. Both the position and path of the pointer during the dragging

Sentaurus™ Structure Editor User Guide 65

V-2024.03
Chapter 3: Controlling Views
Interactive Cutting Plane Viewer

operation provide an intuitive mechanism for rotation about different axes. Dragging left
or right along the middle of the view window rotates the structure about the vertical axis.
Similarly, dragging up or down along the center of the view window rotates the structure
about the horizontal axis. Dragging up, down, left, or right near any edge of the view
window rotates the structure about the axis perpendicular to the view window.
Combinations of the movements are designed to give you control over the viewing angle
of the drawn structure.
While the Orbit mode is active, different shortcut keys can be used to rotate the model
about the imaginary coordinate axes of the screen (in the view window). Hold the key or
keys when in Orbit mode:
Rotate about x-axis (horizontal view) Shift+Orbit
Rotate about y-axis (vertical view) Ctrl+Orbit
Rotate about z-axis (perpendicular to view) Ctrl+Shift+Orbit
The (sde:use-camera-manipulator #t) function can be used to change these key
functionalities to another type of behavior. (The (sde:use-camera-manipulator #f)
command can be used to change it back.)
After the (sde:use-camera-manipulator #t) command is executed when in Orbit
mode, the Ctrl key can be used to zoom and the Shift key can be used to pan (while
pressing the left mouse button).
Zoom
In this mode, dragging upward zooms in on the structure, and dragging downward
zooms out.
Pan
In this mode, dragging moves the structure around the view window.

Interactive Cutting Plane Viewer

To access the interactive cutting plane viewer:
1. Choose View > Interactive Mode > Cutting Plane, or click the corresponding toolbar
button.
2. Select either Rotate X, Drag Y, or Rotate Z to control the location of the cut plane. Enter
the rotation or drag amount in the respective field or operate the dials with the mouse.
Alternatively, the cut plane can be manipulated directly in the view window by clicking the
respective handles for rotating and dragging.
3. To suppress the display of the cut plane, either select Remove Cut Plane on Close and
click Close, or toggle the Cutting Plane toolbar button.

Sentaurus™ Structure Editor User Guide 66

V-2024.03
Chapter 3: Controlling Views
Perspective and Orthographic Views in Three Dimensions

Figure 6 Interactive cutting plane viewer: (left) structure with cut plane and (right) Cut Plane
Controller dialog box

Perspective and Orthographic Views in Three Dimensions

Three-dimensional objects are displayed using either orthographic projection (more distant
objects are drawn with their true height and width as closer objects) or perspective (the
height and width of more distant objects are reduced according to their distance from the
viewer).
To switch between the perspective and orthographic views when displaying 3D objects,
choose View > Perspective.
Note:
Some GUI-supported operations such as 3D object creation (cube, cylinder,
sphere) will change the view automatically to orthographic view.

Figure 7 (Left) Perspective view and (right) orthographic view

Sentaurus™ Structure Editor User Guide 67

V-2024.03
Chapter 3: Controlling Views
Selecting the DATEX Color Scheme

Selecting the DATEX Color Scheme

The datexcodes.txt file contains different color schemes for each DATEX material: Vivid
and Classic.
By default, Sentaurus Structure Editor uses the Vivid color scheme to assign the color for
each DATEX material for rendering. This means the View > Vivid Colors (DATEX)
command is selected by default, indicated by a check mark.
To change to the Classic color scheme, choose View > Vivid Colors (DATEX), so there is
no check mark.
The selected color scheme is saved in the Sentaurus Structure Editor .qt configuration file.
Therefore, when you exit and start a new session of Sentaurus Structure Editor, the color
setting is synchronized automatically with the configuration file setting.
You can use the -defaultGUI command-line option to restore the DATEX color setting to
the Vivid color scheme (see Table 1 on page 39).
In addition, you can use the sde:change-datex-color-scheme Scheme extension to
select the DATEX color scheme and the sde:get-datex-color-scheme Scheme extension
to retrieve the current setting of the color scheme.

Selecting the Rendering Mode

To access the different rendering modes:
1. Choose View > Render.
2. Select a rendering mode, or click the corresponding toolbar button (see Table 5 on
page 47).
The available rendering modes are illustrated here using the following example structure:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.0 1.0) (position 0.5 0.8 1.02)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position 0.0 0.0 1.02) (position 0.3 0.8 1.5)
"PolySilicon" "R.Poly")
(sdegeo:set-default-boolean "BAB")
(sdegeo:create-cuboid (position 0.0 0.0 1.02) (position 0.5 0.8 1.4)
"Nitride" "R.Spacer")
(sdegeo:fillet (find-edge-id (position 0.5 0.4 1.4)) 0.18)
(sde:setrefprops 0 30 0 0)

Sentaurus™ Structure Editor User Guide 68

V-2024.03
Chapter 3: Controlling Views
Selecting the Rendering Mode

Facets
The faceted model shows a triangulated view in two dimensions and a triangulated
surface tessellation in three dimensions. When exporting the boundary file, the 2D
faceting algorithm extracts the boundary edges from the tessellated view. In three
dimensions, the triangular elements become part of the polyhedral boundary
representation. When changing the surface refinement properties, the faceted view
always reflects the triangulation that will be used when exporting a boundary file.
Wireframe
This rendering mode shows the boundary wires only.
Flat Shaded
A simple shaded mode where the surface normals are taken from the tessellated
(triangulated) mode. Each surface element has a uniform color.

Figure 8 Rendering modes: (left) flat shaded and (right) Gouraud shaded

Gouraud Shaded
In this shading method, the surface normals are interpolated (using a simple linear
interpolation) between the neighboring surface triangles. In this way, a continuously
shaded view is generated.
Hidden Line
This mode generates a 3D view in which nonvisible edges are hidden. Additional
silhouette edges are added to the view for the correct visualization.
Wireframe or Hidden Line with Face Parameter Lines
To better visualize faces in Wireframe mode or Hidden Line mode, additional face
parameter lines can be displayed as well. In this mode, each face is ‘decorated’ with a
given number of parametric lines for each orthogonal direction. The default number is 3.

Sentaurus™ Structure Editor User Guide 69

V-2024.03
Chapter 3: Controlling Views
Showing and Hiding Coordinate Axes

The Scheme commands for displaying face parameter lines are:

(view:display-param-lines #t)
; Switches on or off parameter lines for visualization
(option:set "u_param" 5) ; Number of parameter lines in u direction
(option:set "v_param" 5) ; Number of parameter lines in v direction
(render:rebuild)

This option is not available from the GUI.

Note:
Apart from these rendering modes, other Scheme commands for changing the
rendering are available:
(view:set-point-size 0) ; Switches on and off the vertex markers
(render:rebuild) ; Rebuilds the graphics scene

Figure 9 Rendering modes: (a) facets, (b) wireframe, (c) hidden lines, and (d) hidden lines
with face parameter lines
(a) (b) (c) (d)

Showing and Hiding Coordinate Axes

To switch between the display of the coordinates axes in the lower-right corner of the main
window, choose View > Show Axes.

View Orientation
The camera position and orientation can be selected interactively. The resulting orientation
of the coordinate axes displayed are given as follows:

Iso 3D isometric view

XY X to the right, Y up

Sentaurus™ Structure Editor User Guide 70

V-2024.03
Chapter 3: Controlling Views
Displaying Grid Lines

XZ X to the right, Z up

YZ Z to the left, Y up

X(-Y) X to the right, Y down

To select the camera view, choose View > Camera Views, or click the corresponding
toolbar button.

Displaying Grid Lines

To display the grid lines:
1. Choose View > Grid, or click the corresponding toolbar button.
2. Enter the grid line spacing along the x axis (Grid Width) and along the y axis (Grid
Height). Optionally, the width of the grid line and the line pattern can be selected.
3. Click Apply to activate the changed settings.
4. Click Show to display the grid lines, or click Hide to suppress the display of the grid lines.
Note:
The grid lines are always shown in the current work plane. Grid lines along the
z-axis are not supported.

Displaying Rulers
To switch between the display of rulers in the xy coordinate directions:
► Choose View > Show Ruler, or click the corresponding toolbar button.
Note:
The rulers displayed in the GUI follow the dimensionality of the model. If only 2D
bodies are defined, rulers are drawn in the xy coordinate directions. For 3D
models, a ruler is also drawn in the z-axis coordinate direction. In addition to these
rulers, you can create rulers using the sde:draw-ruler Scheme extension (see
sde:draw-ruler on page 462). These user-defined rulers are displayed in the GUI
automatically. You can hide user-defined rulers using the sde:hide-ruler
Scheme extension (see sde:hide-ruler on page 478).

Sentaurus™ Structure Editor User Guide 71

V-2024.03
Chapter 3: Controlling Views
Scaling the View

In two dimensions, rulers in the xy coordinate directions are placed such that they
cross in the upper-left corner when using the xy view orientation. Using other view
orientations might make it difficult to read the tick labels of the rulers (see View
Orientation on page 70).

Scaling the View

You can scale the view (uniform or nonuniform). Scaling the view does not change the
model coordinates; it is applied only to the graphical scene.
To scale the view:
1. Choose View > View Scaling.
2. Enter a view scaling factor for each of the coordinate axis.
The corresponding Scheme command is:
(sde:scale-scene x-factor y-factor z-factor)

For example, to scale the view by 2 in the y-direction, use (sde:scale-scene 1 2 1). The
command (sde:scale-scene 1 1 1) restores the original uniform unscaled model view.

Visualizing Selected Geometric Objects

To view geometric entities associated with a selected material, or selected regions, masks,
contacts, choose View > Entity Viewer.
The Entity Viewer is used to switch on and off the display of all different entity types (body,
face, edge, vertex, and other), masks, contacts, regions, and materials. Each can be shown
or hidden, individually or in groups, using the Show and Hide buttons. To restrict the display
to only the selected entities, click Exclusive.
To see through the selected entities, click the Translucent button. To switch off translucency
for the selected entities, click Opaque.
Any additions, changes, and deletions to entities made through GUI actions in the view
window or through Scheme commands are reflected immediately in the Entity Viewer.
Two-dimensional or three-dimensional contacts can be visualized as separate objects. To
see only a given contact, highlight the contact name in the Entity Viewer and click
Exclusive.

Sentaurus™ Structure Editor User Guide 72

V-2024.03
Chapter 3: Controlling Views
Quick Access to Placements, Refinements, and Doping Profiles

Related Scheme commands to display, hide, or show exclusively a given contact,

respectively, are:
(sde:show-contact contactname)
(sde:hide-contact contactname)
(sde:xshow-contact contactname)

Figure 10 Entity Viewer

Quick Access to Placements, Refinements, and Doping Profiles

To list and access all currently defined Ref/Eval windows, refinements, and doping profiles:
1. Choose View > Placements Viewer.
2. Double-clicking any option opens the corresponding dialog box to view and edit its
properties. Additions, changes, and deletions to placements made through GUI actions
in the view window or through Scheme commands are reflected immediately in the
Placements Viewer.
3. To visualize Ref/Eval windows, select one or more Ref/Eval window and click Show.
Click Exclusive to display the item while suppressing the display of all other items.
Click Hide to suppress the display of the selected item. (These two buttons only apply to
Ref/Eval windows.)

Sentaurus™ Structure Editor User Guide 73

V-2024.03
Chapter 3: Controlling Views
Visualizing the Internal Entity Representation

Figure 11 Placements Viewer

Visualizing the Internal Entity Representation

To view the internal representation of entities, choose View > Topology Browser.
Sentaurus Structure Editor represents the topology of a structure as a hierarchy of entities.
On the top of the hierarchy are the bodies, which consist of lumps, shells, faces, loops,
coedges, edges, and finally vertices. When working with Sentaurus Structure Editor, mainly
bodies, faces, edges, and vertices are important.
The Topology Browser displays a tree of entities and their relationships, as used internally
by Sentaurus Structure Editor. Use this tool to determine entity numbers and relationships.
The graphical selection of entities in the main window of Sentaurus Structure Editor results
in the highlighting of the corresponding entity in the Topology Browser. Similarly, the
selection of an entity in the Topology Browser results in the highlighting of the entity in the
main window.
The Topology Browser also displays the doping/refinement/submesh (DRS)–related Ref/
Eval windows as geometric objects.

Sentaurus™ Structure Editor User Guide 74

V-2024.03
Chapter 3: Controlling Views
Visualizing the Internal Entity Representation

Figure 12 Topology Browser

Sentaurus™ Structure Editor User Guide 75

V-2024.03
4
Generating Geometric Structures
4

This chapter provides details about creating a variety of structures and presents examples
that illustrate various commands.

Modeling Unit and Modeling Range

The geometry operations in Sentaurus Structure Editor are based on the ACIS geometry
kernel. Most geometric calculations are performed using finite-precision arithmetic and
tolerances. You must be aware of two tolerance values because they determine the
suggested modeling unit:
• resabs (default: 1e-6) is the tolerance used when comparing two positions in the 3D
model space. If two positions are within resabs of each other, they can be considered in
the same position.
• resnor (default: 1e-10) is the tolerance used when comparing the directions of two
vectors. If the directions of two vectors are within resnor of each other, the vectors can
be considered to be parallel.
Basically, the modeling range is the ratio of these two values (resabs/resnor).
Geometry modeling in Sentaurus Structure Editor is unitless. This means that you can
choose any unit for model representation. However, the modeling range and the smallest
representable feature will depend on the selected modeling unit.
For example, if you want to use micrometer as the modeling unit and a modeling range that
is 100 µm, then the smallest representable feature will be resnor × 100 = 10–8 µm, which is
10–5 nm. If the modeling unit and the modeling range are selected to be 1 m, then the
smallest representable feature will be 10–10 m, which is 10 nm. From this example, it is clear
that it would not be practical to select meter as the modeling unit, since the TCAD devices
could not be represented in Sentaurus Structure Editor based on the tolerance values that
are used for the geometric calculations. Selecting micrometer as the modeling unit would be
a better choice for TCAD devices. This means that, in this case, the smallest representable
geometric feature is approximately 10–5 nm.

Sentaurus™ Structure Editor User Guide 76

V-2024.03
Chapter 4: Generating Geometric Structures
Creating a New Structure

Based on experience in nanodevice modeling, it is suggested that you use nanometer as the
modeling unit when such devices are being modeled. This will result in a smaller modeling
range but a larger precision, which might be preferable. It is the best to select the modeling
unit in such a way that it will provide the largest precision within the necessary modeling
range.
If there is a modeling unit mismatch between the different TCAD tools, then an additional
scaling can be applied to the tessellated boundary file created by Sentaurus Structure Editor
and to the mesh command file. This operation does not introduce any modeling error, since
scaling is performed directly on the files, and no additional geometric operations are applied
to the model.

Creating a New Structure

Before creating a new structure, it is good practice to reset Sentaurus Structure Editor.
To reset Sentaurus Structure Editor, choose File > New or press Ctrl+N.
The corresponding Scheme command is:
(sde:clear)

Note:
This command restores the default settings of the graphical user interface (GUI),
clears and reinitializes the geometry database, and clears all doping-related and
refinement-related data. It is recommended as good practice to start each
Scheme script with this command.

Setting Interactive Work Preferences

This section discusses the interactive work preferences that you can set.

Exact Coordinates
In Sentaurus Structure Editor, geometric objects can be drawn free hand. However, for most
applications, it is convenient (and sometimes necessary) to specify explicitly the coordinates
of the object, for example, to allow for precise alignment of different regions.
To activate exact coordinates, choose Draw > Exact Coordinates, or click the
corresponding toolbar button (see Table 7 on page 47).

Sentaurus™ Structure Editor User Guide 77

V-2024.03
Chapter 4: Generating Geometric Structures
Setting Interactive Work Preferences

In Exact Coordinates mode, after drawing any 2D shape, or after adding or moving vertices,
a dialog box opens that shows the vertex coordinates of the new shape. The dialog box
allows you to edit these values.

Snapping
Snapping can be used as an alternative or a convenient augmentation of the Exact
Coordinates mode for creating 2D regions (rectangles circles, ellipses, and so on). The
different snapping modes are activated interactively when drawing shapes by pressing the
following keys (or click the corresponding toolbar buttons):
• Grid Snapping: To activate grid snapping, press the G key or click the corresponding
toolbar button (see Table 10 on page 48). The pointer jumps from grid point to grid point.
(To visualize the grid, choose View > Grid.)
• Vertex Snapping: To snap the pointer to the nearest vertex of an existing shape, press
the V key or click the corresponding toolbar button (see Table 10). When the pointer is
moved, it jumps from vertex to vertex. A click will insert the new vertex to be exactly on
a vertex.
• Edge Snapping: To snap the pointer to the nearest edge of an existing shape (it will slide
along this edge), press the E key or click the corresponding toolbar button (see
Table 10). A click will insert the new vertex to be exactly on the edge.
• Free Drawing: To return to the default free-drawing mode, press the F key or click the
corresponding toolbar button (see Table 10).
Note:
You can use the Exact Coordinates mode concurrently with all snapping options.

Active Material
To select the active material to be used for subsequent actions, use the Material list.
Note:
The datexcodes.txt file controls the material list. The default location is
$STROOT/tcad/$STRELEASE/lib/datexcodes.txt. New materials can be
defined by creating a local version of this file in the current working directory.
The STROOT environment variable indicates where the Synopsys TCAD
distribution has been installed.

Sentaurus™ Structure Editor User Guide 78

V-2024.03
Chapter 4: Generating Geometric Structures
Setting Interactive Work Preferences

Figure 13 Material list: select active material for all subsequent actions

Naming Regions
When creating a new region, Sentaurus Structure Editor automatically assigns a default
region name. The default region names follow the sequence region_1, region_2,
region_3, and so on. To be prompted for a custom region name after creating a new region
interactively, deactivate the automatic region-naming feature.
To switch automatic region-naming on or off, choose Draw > Auto Region Naming.
Region names can be changed later (see Changing the Name of a Region on page 144).
Within Sentaurus Structure Editor, multiple geometric objects can share the same region
name. However, when saving the final boundary, disjoint regions must have different region
names. If the region-naming does not satisfy this criterion, Sentaurus Structure Editor
automatically modifies the region names by adding the suffix _lump%N to each disjoint region
(where N is a lump counter). Choose Edit > Separate Lumps to explicitly force this
region-renaming step.

Overlap Behavior
In most applications, a device consists of multiple regions. When creating a device with
multiple regions in Sentaurus Structure Editor, later-added regions might intersect existing
regions. If this occurs, a predefined scheme is used to resolve the overlapping of regions.
To select the overlap resolution behavior, choose Draw > Overlap Behavior, or click the
corresponding toolbar button (see Table 12 on page 49).

Sentaurus™ Structure Editor User Guide 79

V-2024.03
Chapter 4: Generating Geometric Structures
Setting Interactive Work Preferences

The types of overlap resolution behavior available are:

Merge
Old and new structures merge, and all boundary lines between them are dissolved. The
resulting merged structure takes on the region name and material of the last-drawn
structure. The corresponding Scheme command is:
(sdegeo:set-default-boolean "AB")

New Replaces Old

The new structure is created as drawn, and the old structure is adapted. The part of the
old structure that overlaps with the new one is deleted, and its boundary is replaced by
the boundary of the new structure. Two separate regions remain. The corresponding
Scheme command is:
(sdegeo:set-default-boolean "ABA")

Old Replaces New

The new structure is created, but it is adapted so that the old one remains unchanged.
The part of the new structure that overlaps with the old one is deleted, and its boundary
is replaced by the boundary of the old structure. Two separate regions remain. The
corresponding Scheme command is:
(sdegeo:set-default-boolean "BAB")

New Overlaps Old

The new structure is created as drawn, and the old structure is adapted. The part of the
old structure that overlaps with the new structure is deleted. However, the boundary
edges of the old structure do not dissolve. Three regions result: original, new, and
overlap, where the overlap region is named region_1region_2, that is, the
concatenation of the original and new region names. The corresponding Scheme
command is:
(sdegeo:set-default-boolean "ABiA")

Old Overlaps New

The new structure is created, but it is adapted so that the old one remains unchanged.
The part of the new structure that overlaps the old one is deleted. However, the boundary
edges of the new structure do not dissolve. Three regions result: original, new, and
overlap, where the overlap region is named region1region2, that is, the concatenation
of the original and new region names. The corresponding Scheme command is:
(sdegeo:set-default-boolean "ABiB")

Unresolved Overlaps
An additional option "XX" is available. The (sdegeo:set-default-boolean "XX")
command switches off the automatic overlap region handling, thereby allowing the

Sentaurus™ Structure Editor User Guide 80

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 2D Shapes

creation of overlapping regions. This option should be used only by experienced users.
The overlaps must be resolved manually later; otherwise, the exported final boundary
will contain an invalid topology. This option is not available from the GUI.
Current Overlap Behavior
The Scheme command (sdegeo:get-default-boolean) returns information about the
currently active overlap resolution behavior.
Removing Overlaps
If the model contains overlapping regions, the overlaps can be removed by using either
explicit Boolean operations (sdegeo:bool-intersect, sdegeo:bool-subtract,
sdegeo:bool-unite), or the remove-body-ABA or remove-body-BAB command.
Note:
Some geometric operations might create overlaps, which can be difficult to
detect, especially for larger 3D models. The overlaps must be removed from the
model before the tessellated boundary file is saved for meshing. The
sdegeo:check-overlap function can be used to find the possible overlaps
automatically.

Drawing Basic 2D Shapes

This section discusses how to draw basic 2D shapes.

Drawing Rectangles
To draw a rectangle:
1. Choose Draw > 2D Create Tools > Rectangular Region, or click the corresponding
toolbar button (see Table 9 on page 48).
2. Drag to draw the diagonal of the rectangle in the view window.
3. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
first vertex and second vertex of the diagonal.
The corresponding Scheme command is sdegeo:create-rectangle on page 632. For
example:
(sdegeo:create-rectangle (position 0 0 0) (position 2 1 0) "Silicon"
"R.Substrate")

Sentaurus™ Structure Editor User Guide 81

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 2D Shapes

Drawing Regular Polygons

To draw a regular polygon:
1. Choose Draw > 2D Create Tools > Regular Polygonal Region, or click the
corresponding toolbar button (see Table 9 on page 48).
2. Drag to draw the radius of the regular polygon in the view window. By default, a ten-sided
polygon is created.
3. In Exact Coordinates mode, a dialog box opens, where you enter the coordinates of the
center point, the radius, the number of sides, as well as the starting angle.
The corresponding Scheme command is sdegeo:create-reg-polygon on page 633. For
example:
(sdegeo:create-reg-polygon (position 0 0 0) 1.0 3 30 "Nitride"
"R.TriangleSpacer")

Drawing Polygons
To draw a general polygon:
1. Choose Draw > 2D Create Tools > Polygonal Region, or click the corresponding
toolbar button (see Table 9 on page 48).
2. Click at each vertex of the polygon in the view window. To finish drawing the polygon,
click the middle mouse button. (Press both buttons when using a two-button mouse.)
The polygon closes automatically.
3. In Exact Coordinates mode, a dialog box opens, where you enter the coordinates for
each vertex.
The corresponding Scheme command is sdegeo:create-polygon on page 627. For example:
(sdegeo:create-polygon (list (position 0 0 0) (position 0.5 -1 0)
(position 1 -1 0) (position 1.5 0 0) (position 0 0 0))
"PolySilicon" "R.TaperedPoly")

Drawing Circles
To draw a circle:
1. Choose Draw > 2D Create Tools > Circular Region, or click the corresponding toolbar
button (see Table 9 on page 48).
2. Drag to draw the radius of the circle in the view window.

Sentaurus™ Structure Editor User Guide 82

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 2D Shapes

3. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
center point and the radius.
The corresponding Scheme command is sdegeo:create-circle on page 615. For example:
(sdegeo:create-circle (position 0 0 0) 0.01 "Silicon" "R.Nanowire")

Drawing Ellipses
To draw an ellipse:
1. Choose Draw > 2D Create Tools > Elliptical Region, or click the corresponding toolbar
button (see Table 9 on page 48).
2. Drag to draw the major axis in the view window. Then, release the mouse button and
move the pointer to select the width of the ellipse.
3. In Exact Coordinates mode, a dialog box opens, where you enter the coordinates of the
center point, the endpoint of the major axis, as well as the ratio between the major and
the minor axes.
The corresponding Scheme command is sdegeo:create-ellipse on page 621. For example:
(sdegeo:create-ellipse (position 0 0 0) (position 1 0 0) 0.5
"Silicon" "R.Ellipse")

Note:
The ratio can be greater than 1, in which case, the minor axis will actually be
larger than the other axis (which was referred to previously as the major axis).

Drawing Ruled Regions

A ruled region is a shape that is defined by two edges. The region is created by connecting
the endpoints of the two edges.
To draw a ruled region:
1. From the Selection Level list, select Select Edge.
2. Choose Draw > 2D Create Tools > Ruled Region.
3. Select the edge and hold the Shift key to select the second edge.
The corresponding Scheme command is sdegeo:create-ruled-region on page 634. For
example:
(sdegeo:create-rectangle (position -1.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "R.Substrate")
(sdegeo:create-rectangle (position -0.5 0.0 0) (position 0.5 -0.05 0)

Sentaurus™ Structure Editor User Guide 83

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 2D Shapes

"Oxide" "R.Gox")
(sdegeo:create-rectangle (position -0.1 -0.5 0) (position 0.1 -0.7 0)
"Aluminum" "R.GateCont")
(sdegeo:insert-vertex (position -0.2 -0.05 0))
(sdegeo:insert-vertex (position 0.2 -0.05 0))
(sdegeo:create-ruled-region (list
(car (find-edge-id (position 0.0 -0.5 0)))
(car (find-edge-id (position 0.0 -0.05 0)))) "PolySilicon"
"R.PolyGate")
(sdegeo:create-ruled-region (list
(car (find-edge-id (position -0.15 -0.275 0)))
(car (find-edge-id (position -0.35 -0.05 0)))) "Nitride" "R.SpacerL")
(sdegeo:create-ruled-region (list
(car (find-edge-id (position 0.15 -0.275 0)))
(car (find-edge-id (position 0.35 -0.05 0)))) "Nitride" "R.SpacerR")

Figure 14 Generating ruled regions using linear edges: (left) original structure, (middle) after
adding the first ruled region, and (right) after adding the remaining two ruled regions

Ruled regions can be created only for 2D models. The edges that are used for creating the
ruled region do not have to be linear. Figure 15 shows such a case. The inserted ruled
region (ruled region I) was created between two circular edges, which were created by a
filleting operation.

Figure 15 Generating a ruled region using curved edges

Generated Ruled Region II Selected Edges II

Generated Ruled Region I

Selected Edges I

Sentaurus™ Structure Editor User Guide 84

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Drawing Other Basic 2D Shapes

Other basic 2D shapes are available using Scheme extensions such as
sdegeo:create-triangle.

See the Index of Scheme Extensions for details.

Editing 2D Shapes
This section describes various editing operations on 2D shapes.

Adding a Vertex
To draw a vertex:
1. Choose Edit > 2D Edit Tools > Add Vertex, or click the corresponding toolbar button
(see Table 8 on page 48).
2. Click a position on an edge where the vertex is to be placed.
The corresponding Scheme command is:
(sdegeo:insert-vertex position)

For example:
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "region_1")
(sdegeo:insert-vertex (position 0.5 1.0 0.0))

Vertices are added to existing 2D regions in such a way that model conformity is maintained.
For regions sharing a common edge or an edge segment, the vertex is inserted onto both
edges, splitting the edges. Added vertices always are inserted onto the closest edge, by
projecting the inserted vertex to the nearest edge.
Note:
This operation is available only for 2D regions. Use the Wireframe mode to
visualize the new vertex (see Table 5 on page 47). The Exact Coordinates mode
can be used to precisely control the new location; however, snapping is not
supported.

Sentaurus™ Structure Editor User Guide 85

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Moving a Vertex
To move a vertex:
1. Choose Edit > 2D Edit Tools > Move Vertex, or click the corresponding toolbar button
(see Table 8 on page 48).
2. Drag the vertex to the required position.
The corresponding Scheme command is:
(sdegeo:move-vertex vertex position)

For example:
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"region_1")
(sdegeo:move-vertex (car (find-vertex-id (position 0 0 0)))
(position 0.25 0.25 0))

To move several vertices:

1. Choose Edit > 2D Edit Tools > Move Vertices, or click the corresponding toolbar button
(see Table 8).
2. Select the vertices.
3. When finished, drag any of the selected vertices to move all of them to the required
position.
The corresponding Scheme command is:
(sdegeo:move-vertex vertex-list gvector)

For example:
(define BODY (sdegeo:create-reg-polygon (position 0 0 0) 1 10 0
"Silicon"
(sdegeo:move-vertex (sde:window-select-2d 0 -1.1 1.1 1.1 BODY
"vertex") (gvector 1 0 0))

Note:
This operation is available only for 2D regions. Only vertices that connect linear
line segments can be moved. Vertices on curved edges cannot be moved. The
Exact Coordinates mode can be used to precisely control the new location;
however, snapping is not supported.
The function can be used to move the vertices of some 2D DRS Ref/Eval
windows (line, rectangle, polygon).

Sentaurus™ Structure Editor User Guide 86

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Moving a vertex is allowed only to such an extent that the expected operation results in a
topologically correct 2D region, that is, crossing edges are not allowed. If a vertex belongs
to multiple regions, all regions are modified accordingly.

Moving Region Edges

To move a region edge:
1. Choose Edit > 2D Edit Tools > Move Edge, or click the corresponding toolbar button
(see Table 8 on page 48).
2. Select a linear edge, and drag the edge to the required position.
The corresponding Scheme command is:
(sdegeo:move-edge edgeid gvector)

For example:
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"region_1")
(sdegeo:move-edge (car (find-edge-id (position 1 0.5 0)))
(gvector 0.5 0.5 0))

Note:
This operation is available only for 2D regions. Only linear edges can be moved
and only when all connecting edges are linear as well. The edges are moved like
rigid bodies (that is, all connecting edges are moved as well). The Exact
Coordinates mode can be used to precisely control the new location.

If the new location of the moved region is such that it overlaps other regions, then the
overlaps are removed automatically following the active Boolean overlap control rule.

Moving Regions
To move one or more regions:
1. Choose Edit > 2D Edit Tools > Move Region, or click the corresponding toolbar button
(see Table 8).
2. Select one region (or more regions by holding the Ctrl key). Release the Ctrl key, and
drag the regions to the required position.
The corresponding Scheme command is:
(sdegeo:move-2d-regions body | body-list gvector)

Sentaurus™ Structure Editor User Guide 87

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

For example:
(define mb1 (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "region_1"))
(sdegeo:move-2d-regions mb1 (gvector 1 1 0)

Note:
This operation is available only for 2D regions. The Exact Coordinates mode can
be used to precisely control the new location.

If the new locations of the moved regions are such that they overlap other regions, then the
overlaps are removed automatically following the active Boolean overlap control rule.

Deleting Vertices
To delete one or more vertices:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Vertex.
3. Select the vertex and hold the Shift key to select additional vertices, or drag a box around
a set of vertices.
4. Choose Edit > 2D Edit Tools > Delete Vertex, or press the Delete key.
The corresponding Scheme command is:
(sdegeo:delete-vertices vertex-list)

Example 1 with an explicit vertex selection:

(sdegeo:create-reg-polygon (position 0 0 0) 1 6 0 "Silicon"
"region_1")
(sdegeo:delete-vertices (list
(car (find-vertex-id (position -1.0 0 0)))
(car (find-vertex-id (position 1.0 0 0)))))

Example 2 with a window vertex selection:

(sdegeo:create-polygon (list
(position 0.0 0.0 0) (position 1.0 0.0 0) (position 1.0 1.0 0)
(position 0.8 1.1 0) (position 0.6 0.9 0) (position 0.4 1.1 0)
(position 0.2 0.9 0) (position 0.0 1.0 0) (position 0.0 0.0 0))
"Silicon" "region_1")
(define VERTICES (sde:window-select-2d 0.1 0.8 0.9 1.2 "all" "vertex"))
(sdegeo:delete-vertices VERTICES)

Note:
This operation is available only for 2D regions.

Sentaurus™ Structure Editor User Guide 88

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Rounding
To round one or more corners of a 2D region:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Vertex.
3. Select the vertex and hold the Shift key to select additional vertices, or drag a box around
a set of vertices.
4. Choose Edit > 2D Edit Tools > Fillet.
5. Enter a fillet radius in the dialog box.
If the parameter fillet-radius was set before performing this operation (choosing
Edit > Parameters), then this dialog box is suppressed, and the given value of
fillet-radius is used instead.

The corresponding Scheme command is:

(sdegeo:fillet-2d vertex-list radius)

For example:
(sdegeo:create-rectangle (position 0 0 0.0) (position 1 1 0.0)
"Silicon" "region_1")
(sdegeo:fillet-2d (list
(car (find-vertex-id (position 1 0 0)))
(car (find-vertex-id (position 0 0 0)))) 0.4)

Note:
If fillet-radius is too large such that two adjacent fillets overlap, then the
operation will fail.

Figure 16 Two-dimensional vertex rounding: (left) rectangle (1×1) and (right) rounded
rectangle
fillet-radius=0.2 fillet-radius=0.4

fillet-radius=0.2

Sentaurus™ Structure Editor User Guide 89

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Chamfering
To chamfer one or more corners of a 2D region:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Vertex.
3. Select the vertex and hold the Shift key to select additional vertices, or drag a box around
a set of vertices.
4. Choose Edit > 2D Edit Tools > Chamfer.
5. Enter a chamfer distance in the dialog box.
If the parameter chamfer-dist was set before performing this operation (choosing Edit
> Parameters), then this dialog box is suppressed, and the given value of
chamfer-dist is used instead.
Note:
The chamfer-dist cannot be larger than the smallest edge length of the
adjacent edges of the selected vertices. For multiple vertices sharing the same
edge, the distance must be smaller than half the length of the smallest such edge.
Otherwise, the operation will fail.

The corresponding Scheme command is:

(sdegeo:chamfer-2d vertex-list chamfer-dist)

For example:
(sdegeo:create-rectangle (position 0 0 0.0) (position 1 1 0.0)
"Silicon" "region_1")
(sdegeo:chamfer-2d (list
(car (find-vertex-id (position 1 0 0)))
(car (find-vertex-id (position 0 0 0)))) 0.4)

Figure 17 Two-dimensional vertex chamfering: (left) rectangle (1×1) and (right) chamfered
rectangle
chamfer-distance = 0.2
chamfer-distance = 0.4

chamfer-distance = 0.2

Sentaurus™ Structure Editor User Guide 90

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Cutting
To cut out a rectangular part from a 2D structure:
1. Choose Edit > 2D Edit Tools > 2D Cut.
2. Drag to draw the diagonal of the rectangle in the view window.
3. In Exact Coordinates mode, a dialog box opens, where you enter the coordinates of the
first vertex and second vertex of the diagonal.
The corresponding Scheme command is:
(sdegeo:2d-cut position position)

The argument list contains the two corner positions of the rectangular area. All regions
outside of this rectangle are removed from the model. For example:
(sdegeo:create-circle (position 0 0 0) 1 "Silicon" "region_1")
(sdegeo:2D-cut (position 0 -1.1 0.0) (position 0.8 1.1 0.0))

Creating a Convex Hull

The Scheme extension sdegeo:chull2d can be used to compute the 2D convex hull of the
specified position list. The position list of the computed convex hull is returned.

Figure 18 Creating a 2D convex hull: (left) original point set and (right) created convex hull

Sentaurus™ Structure Editor User Guide 91

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Splitting Structures
To split one or more 2D regions by a polygonal line:
1. Choose Edit > 2D Edit Tools > Polygonal Region Split, or click the corresponding
toolbar button (see Table 8 on page 48).
2. Click at each vertex of the polygonal line. To finish drawing the polygonal line, click the
middle mouse button. (Press both buttons when using a two-button mouse.)
3. In Exact Coordinates mode, a dialog box opens where you enter the coordinates for
each vertex.
The first vertex and last vertex of the defined polygonal line snap to the closest edge or
vertex of the existing model. Unique region names are given to the split-off parts of the
original bodies.
The corresponding Scheme command is:
(sdegeo:polygonal-split position-list)

For example:
(sdegeo:create-rectangle (position -1.0 0.0 0.0)
(position 1.0 1.0 0.0) "Silicon" "region_1")
(sdegeo:create-rectangle (position -1.0 -0.1 0.0)
(position 1.0 0.0 0.0) "SiO2" "region_2")
(sdegeo:create-rectangle (position -1.0 -0.1 0.0)
(position 1.0 -0.7 0.0) "PolySi" "region_3")
(sdegeo:polygonal-split (list
(position -0.25 -1 0) (position -0.25 0.1 0) (position 0 0.2 0)
(position 0.25 0.1 0) (position 0.25 -1 0)))

Figure 19 Splitting a device using a polygonal line segment: (left) original structure and (right)
after the split operation

Sentaurus™ Structure Editor User Guide 92

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Simplifying 2D Structures
Sentaurus Structure Editor has a set of functions to simplify 2D structures. Such boundary
simplification is sometimes advantageous for structures generated by other tools such as
Sentaurus Process. Examples of such simplifications are aligning vertices, removing
collinear edges, and breaking nonaxis-aligned edges into axis-aligned staircases. In
general, the subsequent meshing tool will generate grids with fewer nodes if the boundary
has fewer points and if most edges are axis aligned.

Aligning Vertices
To align vertices to an axis horizontally (or vertically):
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Vertex.
3. Select the vertex and hold the Shift key to select additional vertices, or drag a box around
a set of vertices.
4. Choose Edit > 2D Edit Tools > Align Vertices to Horizontal (or Align Vertices to
Vertical).
5. Click to select the horizontal (or vertical) alignment level.
The corresponding Scheme commands are:
(sdegeo:align-horizontal vertex-list yalign)
(sdegeo:align-vertical vertex-list xalign)

For example:
(sdegeo:create-polygon (list
(position 0.0 1.0 0) (position 1.0 1.0 0) (position 1.0 0.0 0)
(position 0.8 0.1 0) (position 0.6 -0.1 0) (position 0.4 0.1 0)
(position 0.2 -0.1 0) (position 0.0 0.0 0) (position 0.0 1.0 0))
"Silicon" "region_1")
(define VERTICES (sde:window-select-2d -0.1 -0.2 1.1 0.2 "all"
"vertex"))
(sdegeo:align-horizontal VERTICES 0.0)

To automatically align the selected vertices to the average y-position (or x-position), choose
Edit > 2D Edit Tools > Aut. Align Vertices to Horizontal (or Aut. Align Vertices to
Vertical).
The corresponding Scheme commands are:
(sdegeo:align-horizontal-aut vertex-list)
(sdegeo:align-vertical-aut vertex-list)

Sentaurus™ Structure Editor User Guide 93

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Figure 20 Aligning vertices horizontally: (left) original structure and (right) after alignment. For
better viewing, the structure is shown as a wireframe.

To align the selected vertices to an arbitrary line, choose Edit > 2D Edit Tools > Align
Vertices to a Line.
To define the line, click at the starting point and drag to the endpoint.
The corresponding Scheme command is:
(sdegeo:align-to-line vertex-list starting-position end-position)

For example:
(sdegeo:create-polygon (list
(position 0.0 0.0 0) (position 1.0 0.0 0) (position 1.0 1.0 0)
(position 0.8 1.1 0) (position 0.6 0.9 0) (position 0.4 1.1 0)
(position 0.2 0.9 0) (position 0.0 1.0 0) (position 0.0 0.0 0))
"Silicon" "region_1")
(define VERTICES (sde:window-select-2d -0.1 0.8 1.1 1.2 "all"
"vertex"))
(sdegeo:align-to-line VERTICES (position 0.0 0.7 0)
(position 1.0 1.3 0))

Note:
The command moves the vertices along the normal to the specified line.
Therefore, both the x-coordinates and y-coordinates can be altered by this
operation.

When the vertices have been aligned, the now redundant vertices can be removed by using
either vertex deletion (see Deleting Vertices on page 88) or edge removal (see Merging
Collinear Edges on page 95).

Sentaurus™ Structure Editor User Guide 94

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Figure 21 Two-dimensional boundary simplification, vertical alignment of vertices, and

removal of short edges

Selected Vertices Vertically Aligned Vertices

Short Edges Removed

Figure 22 Two-dimensional boundary simplification, align to line, and vertex removal

Selected Vertices Vertices Aligned to a Line After Vertices Deleted

Merging Collinear Edges

To merge collinear edges:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Edge.
3. Select the edge and hold the Shift key to select additional edges, or drag a box around a
set of edges.
4. Choose Edit > 2D Edit Tools > Delete Collinear Edges.
The corresponding Scheme command is:
(sdegeo:delete-collinear-edges edge-list)

Sentaurus™ Structure Editor User Guide 95

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

For example:
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:insert-vertex (position 0.3 0.0 0))
(sdegeo:insert-vertex (position 0.0 0.3 0))
(sdegeo:insert-vertex (position 0.0 0.6 0))
(define EDGES (sde:window-select-2d -0.1 -0.1 1.1 0.8 "all" "edge"))
(sdegeo:delete-collinear-edges EDGES)

This command removes edges only if they are exactly collinear. For ‘noisy’ boundaries:
1. Choose Edit > 2D Edit Tools > Delete Nearly Collinear Edges.
2. In the dialog box, enter a threshold distance.
Two edges (Edge 1 and Edge 2) are considered to be collinear if the distance D, defined as
shown in Figure 23, is less than the specified distance.

Figure 23 Distance definition for nearly collinear edges

Edge 1 D
Edge 2

The corresponding Scheme command is:

(sdegeo:delete-nearly-collinear-edges edge-list distance)

For example:
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:insert-vertex (position 0.25 0.0 0))
(sdegeo:insert-vertex (position 0.50 0.0 0))
(sdegeo:insert-vertex (position 0.75 0.0 0))
(sdegeo:move-vertex (find-vertex-id (position 0.5 0.0 0))
(position 0.5 0.1 0))
(define EDGES (sde:window-select-2d -0.1 -0.1 1.1 0.2 "all" "edge"))
(sdegeo:delete-nearly-collinear-edges EDGES 0.2)

To remove all edges shorter than a given length by merging them with adjacent edges:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Edge.
3. Select the edge and hold the Shift key to select additional edges, or drag a box around a
set of edges.

Sentaurus™ Structure Editor User Guide 96

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

4. Choose Edit > 2D Edit Tools > Delete Short Linear Edges.
5. Enter the minimal-allowed edge length in the dialog box.
The corresponding Scheme command is:
(sdegeo:delete-short-edges edge-list minimal-edge-length)

For example:
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:insert-vertex (position 0.1 0.0 0))
(sdegeo:insert-vertex (position 0.0 0.1 0))
(sdegeo:insert-vertex (position 0.0 0.2 0))
(define EDGES (sde:window-select-2d -0.1 -0.1 1.1 0.3 "all" "edge"))
(sdegeo:delete-short-edges EDGES 0.2)

Note:
This command preserves vertices at which the angle between two edges is 90°
or more (ridges). At rounded corners. this command might result in the
unintended removal of the entire corner.

To remove edges based on an angular cut-off:

1. Choose Edit > 2D Edit Tools > Delete Linear Edges.
2. Enter the cut-off angle (angular tolerance) in the dialog box.
If the angle between two edges at a vertex is larger than the cut-off angle, the edges are
removed.
Note:
The angle between collinear edges is 180°. To protect corners, use an angle
greater than 90°.

The corresponding Scheme command is:

(sdegeo:delete-short-edges edge-list [edge-angular-cut-off])

The default value for edge-angular-cut-off is 90°.

For example:
(sdegeo:create-polygon (list
(position 0.0 0.0 0) (position 1.0 0.0 0) (position 1.0 1.0 0)
(position 0.8 1.02 0) (position 0.6 0.98 0) (position 0.4 1.02 0)
(position 0.2 0.98 0) (position 0.0 1.0 0) (position 0.0 0.0 0))
"Silicon" "region_1")
(define EDGES (sde:window-select-2d -0.1 0.9 1.1 1.1 "all" "edge"))
(sdegeo:delete-short-edges EDGES 150)

Sentaurus™ Structure Editor User Guide 97

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

The alternative command:

(merge-collinear-edges-2d body-list [normal-angular-cut-off])

works similarly to sdegeo:delete-short-edges, but it automatically selects all edges from

all bodies selected, and it uses a different definition for the cut-off angle. Here, the edge is
removed if the angle between the face normals is smaller than the given cut-off angle. For
example, an edge-angular-cut-off of 120° corresponds to a normal-angular-cut-off
of 30°.

Figure 24 Merging collinear edges: (upper left) original model and examples of different
merges of collinear edges

Original Model (merge-collinear-edges-2d "all")

(length (entity: vertices (get-body-list))) ; --> 244 vertices
; --> 355 vertices

(merge-collinear-edges-2d "all" 10) (merge-collinear-edges-2d "all" 20)

; --> 57 vertices ; --> 39 vertices

An additional variance:
(sdegeo:prune-vertices body-list normal-angular-cut-off)

works with vertices instead of edges, but it uses the same algorithm for the selected edges
to be removed. The following command automatically calls sdegeo:prune-vertices for all
bodies:
(sdegeo:dnce normal-angular-cut-off)

Sentaurus™ Structure Editor User Guide 98

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

A further variant of the edge removal command allows you to specify an edge length as well
as a cut-off angle. This command operates on a list of bodies, instead of an edge list, and is
not available from the GUI.
The Scheme command is:
(sdegeo:del-short-edges body-list edge-list minimal-edge-length
normal-angular-cut-off)

For example:
(define BODY (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 1.0 1.0 0) "Silicon" "R.Substrate"))
(sdegeo:insert-vertex (position 0.1 0.0 0))
(sdegeo:insert-vertex (position 0.0 0.1 0))
(sdegeo:insert-vertex (position 0.0 0.2 0))
(sdegeo:move-vertex (find-vertex-id (position 0 0 0))
(position 0.03 0.03 0))
(sdegeo:del-short-edges BODY 0.2 10)

Figure 25 Mask layout: (left) before deleting nearly collinear edges and (right) after by deleting
nearly collinear edges

Number of edges

3723 230

Breaking Nearly Axis-Aligned Edges

To break up nearly axis-aligned edges into a staircase of axis-aligned edges:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Edge.
3. Select the edge and hold the Shift key to select additional edges, or drag a box around a
set of edges.

Sentaurus™ Structure Editor User Guide 99

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

4. Choose Edit > 2D Edit Tools > Break Nearly Axis-Aligned Edges.
5. Enter a cut-off angle in the dialog box.
All edges that form an angle smaller than the cut-off angle with either the x-axis or y-axis are
converted to a staircase-like set of edges.
The corresponding Scheme command is:
(sdegeo:break-nearly-axis-aligned-edges edge-list angular-cut-off)

For example:
(sdegeo:create-polygon (list
(position 0 0 0) (position 0.7 0.1 -0) (position 0.8 0.6 -0)
(position 0.1 0.7 -0) (position -0.2 0.4 -0) (position 0 0 0))
"Silicon" "region_1")
(define EDGES (sde:window-select-2d -0.5 -0.5 1.5 1.5 "all" "edge"))
(sdegeo:break-nearly-axis-aligned-edges EDGES 15)

Note:
Previously, slightly off-axis edges resulted in very small and unwanted mesh
elements near interfaces. This is no longer the case for Sentaurus Mesh, which
has improved support for nonaxis-aligned boundaries. This reduces the need for
this kind of boundary simplification.

Figure 26 Breaking nearly axis-aligned edges into staircases: (left) original structure and
(right) after the edge-breaking operation

Sentaurus™ Structure Editor User Guide 100

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Figure 27 Breaking nearly axis-aligned edges to axis-aligned edges

Axis-aligned corner

45 degree threshold 20 degree threshold

Original boundary Axis-aligned boundary

Two-Dimensional Boundary Smoothing

The sdegeo:vsmooth Scheme extension performs 2D boundary smoothing. It uses a least
squares fit of a small set of consecutive data points (vertices) to a polynomial and takes the
calculated central point of the fitted polynomial curve as the new smoothed data point
(vertex). The fitted polynomial can be either quadratic or cubic. The polynomial order (2 or
3) is the first argument of the function. The second argument is the vertex list that will be
smoothed.
You can call the sdegeo:vsmooth Scheme extension multiple times to perform the
boundary-smoothing operation successively.
You can specify all the vertices of the model as input by using the command
(entity:vertices (get-body-list)). The global Scheme variable bsmooth-ac
specifies an angular criterion (in degrees) for shape preservation (preserving ridges). The
default value is 100. The following figures show different boundaries before and after vertex
smoothing.

Sentaurus™ Structure Editor User Guide 101

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

Figure 28 Vertex smoothing using sdegeo:vsmooth: (left) before and (right) after

Figure 29 Multiple vertex-smoothing steps using sdegeo:vsmooth, showing ridge preservation

Figure 30 Vertex smoothing, using sdegeo:vsmooth: (left) before and (right) after

Edge Length Queries

Edge length query functions help to determine which edges can be considered as too short
and, therefore, can be removed. The Scheme commands for edge length queries are:
(sdegeo:max-edge-length edge-list)
(sdegeo:min-edge-length edge-list)
(sdegeo:average-edge-length edge-list)

Sentaurus™ Structure Editor User Guide 102

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D Shapes

For example:
(sdegeo:create-polygon (list
(position 0.0 0.0 0) (position 1.0 0.0 0) (position 1.0 1.0 0)
(position 0.8 1.02 0) (position 0.6 0.98 0) (position 0.4 1.02 0)
(position 0.2 0.98 0) (position 0.0 1.0 0) (position 0.0 0.0 0))
"Silicon" "region_1")
(define EDGES (sde:window-select-2d -0.1 -0.1 1.1 1.1 "all" "edge"))
(sdegeo:max-edge-length EDGES)
--> 1
(sdegeo:min-edge-length EDGES)
--> 0.200997512422418
(sdegeo:average-edge-length EDGES)
--> 0.501734670809496

Table 20 lists the boundary-simplifying Scheme functions that are also available from the
GUI.
Table 20 Scheme functions for 2D boundary simplification

Scheme function Description

merge-collinear-edges-2d Merges the collinear edges of the specified

bodies.

sde:window-select-2d Selects different entity types in a 2D window.

sdegeo:align-horizontal Aligns points horizontally to a specified position.

sdegeo:align-horizontal-aut Aligns points horizontally to the average position.

sdegeo:align-to-line Snaps the specified points to a predefined

straight line.

sdegeo:align-vertical Aligns points vertically to a specified position.

sdegeo:align-vertical-aut Aligns points vertically to the average position.

sdegeo:average-edge-length Computes the average edge length (for an edge

list).

sdegeo:break-nearly-axis-aligned-edges Breaks nearly axis-aligned edges into horizontal

or vertical components.

sdegeo:delete-collinear-edges Deletes collinear edges.

sdegeo:delete-edges Deletes specified edges.

sdegeo:delete-nearly-collinear-edges Deletes nearly collinear edges.

Sentaurus™ Structure Editor User Guide 103

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 3D Shapes

Table 20 Scheme functions for 2D boundary simplification (Continued)

Scheme function Description

sdegeo:delete-short-edges Deletes all edges from an edge list that are

shorter than the specified value.

sdegeo:delete-vertices Deletes specified list of vertices.

sdegeo:del-short-edges Deletes short edges.

sdegeo:max-edge-length Computes the longest edge length (for an edge

list).

sdegeo:min-edge-length Computes the shortest edge length (for an edge

list).

sdegeo:prune-vertices, sdegeo:dnce Deletes nearly collinear points.

sdegeo:vsmooth Vertex smoothing in two dimensions.

Note:
Both sdegeo:del-short-edges and sdegeo:prune-vertices are very fast and
robust. Use them to clean up 2D boundaries.

Drawing Basic 3D Shapes

This section discusses how to draw basic three-dimensional shapes.

Drawing Cuboids
To draw a cuboid:
1. Choose Draw > 3D Create Tools > Create Cuboid, or click the corresponding toolbar
button (see Table 11 on page 49).
2. Drag to draw the diagonal of the xy rectangle in the view window.
3. Release the mouse button and move the pointer to the top z-coordinate of the cuboid
and click.
4. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
first vertex and second vertex of the space diagonal.

Sentaurus™ Structure Editor User Guide 104

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 3D Shapes

The corresponding Scheme command is:

(sdegeo:create-cuboid position position material-name region-name)

For example:
(sdegeo:create-cuboid (position 0 0 0) (position 1 2 3) "Silicon"
"R.Substrate")

Note:
In interactive mode, the base rectangle is always drawn in the z = 0 xy plane. To
start on a different plane, change the work plane as discussed in Work Planes on
page 152. Use the isometric view to visualize all GUI operations (see Table 6 on
page 47). Snapping is not supported in three dimensions.

Drawing Cylinders
To draw a cylinder:
1. Choose Draw > 3D Create Tools > Create Cylinder, or click the corresponding toolbar
button (see Table 11 on page 49).
2. Drag to draw the radius of the base xy circle in the view window.
3. Release the mouse button and move the pointer to the top z-coordinate of the cylinder
and click.
4. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
first vertex and second vertex of the center axis as well as the radius.
The corresponding Scheme command is sdegeo:create-cylinder on page 619. For example:
(sdegeo:create-cylinder (position 0 0 0) (position 0 0 1) 2 "Silicon"
"region_1")

Note:
In interactive mode, the base circle is always drawn in the z = 0 xy plane. To start
on a different plane, change the work plane as discussed in Work Planes on
page 152. Use the isometric view to visualize all GUI operations (see Table 6 on
page 47).

Sentaurus™ Structure Editor User Guide 105

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 3D Shapes

Drawing Spheres
To draw a sphere:
1. Choose Draw > 3D Create Tools > Create Sphere, or click the corresponding toolbar
button (see Table 11 on page 49).
2. Drag to draw the radius of the base xy circle in the view window.
3. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
center of the sphere as well as the radius.
The corresponding Scheme command is sdegeo:create-sphere on page 635. For example:
(sdegeo:create-sphere (position 0 0 2) 2 "Silicon" "region_1")

Note:
In interactive mode, the base circle is always drawn in the xy plane at Z = 0. To
start on a different plane, change the work plane as discussed in Work Planes on
page 152.

Drawing Ellipsoids
To draw an ellipsoid:
1. Choose Draw > 3D Create Tools > Create Ellipsoid, or click the corresponding toolbar
button (see Table 11).
2. Drag to draw the main axis of the ellipsoid in the xy plane in the view window.
3. Release the mouse button and move the pointer to define the secondary axis of the
ellipsoid and click.
4. In Exact Coordinates mode, a dialog box opens where you enter the coordinates of the
center of the ellipsoid, the endpoint of the major axis, as well as the ratio between the
major and the minor axes. (The two minor axes are degenerate.)
The corresponding Scheme command is sdegeo:create-ellipsoid on page 622. For
example:
(sdegeo:create-ellipsoid (position 1 2 3) (position 1 2 5) 2
"Silicon" "region_1")

Note:
In interactive mode, the major axis is always drawn in the Z = 0 XY plane. To start
on a different plane, change the work plane as discussed in Work Planes on
page 152. Use the isometric view to visualize all GUI operations (see Table 6 on
page 47).

Sentaurus™ Structure Editor User Guide 106

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 3D Shapes

Drawing Other Basic 3D Shapes

Other basic 3D shapes are available through the following Scheme extensions:
• sdegeo:create-cone (see sdegeo:create-cone on page 616)

• sdegeo:create-prism (see sdegeo:create-prism on page 629)

• sdegeo:create-pyramid (see sdegeo:create-pyramid on page 630)

• sdegeo:create-torus (see sdegeo:create-torus on page 637)

Import Capability of User-Defined Data

The build-csv-lens Scheme extension can be used to create a solid body from
user-defined data. The input data file is a comma-separated value (CSV) file, which defines
the user data over a tensor grid. The solid body is created from the parsed CSV data by
stitching the faces together into a water-tight solid body. Figure 31 shows a solid body
created using the extension build-csv-lens.

Figure 31 Solid body created using build-csv-lens, using the sin(x)*cos(y) analytic function
defining the CSV data points on a 20×20 tensor grid

Creating a Layered Lens Structure

The afm-smooth-layers Scheme extension can create a layered lens structure with a
texture map. The texture map is defined in a comma-separated value (CSV) file. Figure 32
shows an example, created using afm-smooth-layers and the Scheme code that follows.

Sentaurus™ Structure Editor User Guide 107

V-2024.03
Chapter 4: Generating Geometric Structures
Drawing Basic 3D Shapes

Figure 32 Example of a layered structure created using the afm-smooth-layers command

Scheme example for the usage of afm-smooth-layers:

(define n 10)
(define a (* 2 PI))
(define oport (open-output-file "xx.csv"))
(display ", " oport)
(do ((i 0 (+ i 1))) ((> i n))
(display (/ (* i a) n) oport)
(display ", " oport)
)
(display "\n" oport)
(do ((i 0 (+ i 1))) ((> i n))
(display (/ (* i a) n) oport)
(display ", " oport)
(do ((j 0 (+ j 1))) ((> j n))
(define yp (* (sin (* j (/ a n))) (cos (* i (/ a n)))))
(display yp oport)
(if (not (equal? j n))
(display ", " oport))
)
(display "\n" oport)
)
(close-output-port oport)
(sde:clear)
(define layermaterial (list "TCO" "Copper" "PolySi"))
(define layerregion (list "tco" "copper" "polysi"))
(define layerthickness (list 2 2 2))
(sdegeo:create-cuboid (position 0 0 0) (position (* 2 PI) (* 2 PI) 4)
"Silicon" "xx")
(afm-smooth-layers "xx.csv" 0 4 layerregion layermaterial
layerthickness)

Sentaurus™ Structure Editor User Guide 108

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

Creating a Solid Body From Faces

User-defined data (vertex points and a face list) also can be used to define 3D solid bodies.
The faces must enclose a watertight volume (no gaps or overlaps are allowed between the
faces). The entity:stitch Scheme extension can be used to build a solid body from the
sheet bodies, which must be created first for each face.
The following script creates a tetrahedron with vertices (0,0,0), (1,0,0). (0,1,0) and (0,0,1):
(sde:clear)

;; Define the vertex points

(define p0 (position 0 0 0))
(define p1 (position 1 0 0))
(define p2 (position 0 1 0))
(define p3 (position 0 0 1))

;; Create sheet (2d polygonal) bodies for each face

;; (face orientation does not matter)
(define f0 (sheet:2d (sheet:planar-wire (wire-body:points
(list p0 p1 p2 p0)))))
(define f1 (sheet:2d (sheet:planar-wire (wire-body:points
(list p0 p1 p3 p0)))))
(define f2 (sheet:2d (sheet:planar-wire (wire-body:points
(list p1 p2 p3 p1)))))
(define f3 (sheet:2d (sheet:planar-wire (wire-body:points
(list p0 p2 p3 p0)))))

;; Stitch the faces together to create a solid body

(define mb (car (entity:stitch (list f0 f1 f2 f3))))
(sde:add-material mb "Copper" "mytetrahedron")

;; If the sheet bodies define a watertight enclosure,

;; then the solid body will pass the entity:checker and
;; can be used for additional operations (Booleans and so on)

Editing 3D Shapes
This section discusses how to edit 3D shapes.

Chamfering Edges
To chamfer (flatten) the edges of a 3D structure:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Edge (or Select Vertex).

Sentaurus™ Structure Editor User Guide 109

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

3. Select the edge (or vertex) and hold the Shift key to select additional edges (or vertices),
or drag a box around a set of edges (or vertices).
4. Choose Edit > 3D Edit Tools > Chamfer.
5. Enter a chamfer distance in the dialog box.
If the parameter chamfer-dist was set before performing this operation (choosing Edit
> Parameters), this dialog box is suppressed, and the given value of chamfer-dist is
used instead.
The optional adaptive-chamfering Boolean argument can be used to perform adaptive
chamfering. If this option is used and the argument is set to #t, then if the chamfering
operation fails using the original chamfer-dist value, the operation is repeated with a
sequence of chamfering operations, using an adaptive approach, to set the chamfer
distance to smaller values until the operation succeeds.
The corresponding Scheme command is:
(sdegeo:chamfer edge | vertex-list chamfer-dist [adaptive-chamfering])

For example:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon"
"region_1")
(sdegeo:chamfer (list
(car (find-vertex-id (position 0 0 1)))
(car (find-vertex-id (position 0 1 1)))
(car (find-vertex-id (position 1 0 1)))
(car (find-vertex-id (position 1 1 1)))) 0.2)

Note:
If chamfer-dist is too large such that two adjacent chamfers would overlap, then
the operation will fail.

Figure 33 Three-dimensional chamfering operation: (left) original cuboid (1 × 1 × 1) and (right)

chamfer-dist=0.2

Sentaurus™ Structure Editor User Guide 110

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

Rounding Edges
To round the edges of a 3D structure:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Edge (or Select Vertex).
3. Select the edge (or vertex) and hold the Shift key to select additional edges (or vertices),
or drag a box around a set of edges (or vertices).
4. Choose Edit > 3D Edit Tools > Fillet.
5. Enter a fillet radius in the dialog box.
If the parameter fillet-radius was set before performing this operation (choosing
Edit > Parameters), then this dialog box is suppressed, and the given value of
fillet-radius is used instead.

The optional adaptive-filleting Boolean argument can be used to perform adaptive

filleting. If this option is used and the argument is set to #t, then if the filleting operation fails
using the original fillet-radius value, the operation is repeated with a sequence of
filleting operations, using an adaptive approach, to set the fillet radius to smaller values until
the operation succeeds.
The corresponding Scheme command is:
(sdegeo:fillet edge | vertex-list fillet-radius [adaptive-filleting])

For example:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon"
"region_1")
(sdegeo:fillet (list
(car (find-vertex-id (position 0 0 1)))
(car (find-vertex-id (position 0 1 1)))
(car (find-vertex-id (position 1 0 1)))
(car (find-vertex-id (position 1 1 1)))) 0.2)

and:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon"
"region_1")
(sdegeo:fillet (list (car (find-edge-id (position 0 0 0.5)))) 0.2)

Note:
If fillet-radius is too large such that two adjacent fillets overlap, then the
operation will fail.

Sentaurus™ Structure Editor User Guide 111

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

Figure 34 Three-dimensional edge filleting: (left) original cuboid (1 × 1 × 1), (middle) rounded
corner, and (right) rounded edge with fillet-radius=0.2

Tapering
To taper one or more faces of a 3D structure:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Taper.
The Taper Faces dialog box opens.

5. Enter the draft plane point, the draft plane normal, and the draft angle.
6. Click OK.

Sentaurus™ Structure Editor User Guide 112

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

The Taper Faces dialog box is initialized with the following default values: If only one face is
selected, then the draft plane point is initialized, using the barycentric coordinates of the
selected face.
If more than one face is selected, then:
• The draft plane point is initialized as 0,0,0.
• The draft plane normal is initialized as 0,0,1.
• The draft angle is initialized to 5°.
The corresponding Script command is:
(sdegeo:taper-faces face-list point normal angle)

The tapering algorithms are discussed using simple examples.

Figure 35 (a) shows a cuboid where the side face to be tapered is blue. For reference, the
normal vector of this face is also shown.
The tapering is performed with respect to an auxiliary plane, the so-called draft plane. This
plane is defined by the draft plane center point and the draft plane normal vector.
Figure 35 (b) shows the draft plane in green together with the draft plane normal vector
originating from the draft plane center point. In addition, the rotation axis, which is defined
as the intersection between the face plane (blue) and the draft plane (green), is shown.
With respect to these planes and axes, now two distinct rotations are performed.
Figure 35 (c) shows the new face location after the first rotation (equivalent to tapering with
an angle of 0°). The face is rotated around the axis such that the new face is orthogonal to
the draft plane.
Figure 35 (d) shows the face after the second rotation, with an angle of 45°. The rotation
direction is given by the right-hand rule: To determine the direction of the axis, align the
thumb of your right hand with the face plane normal and the index finger with the draft plane
normal. Then extend your middle finger orthogonally to both. This finger points now in the
direction of the axis vector. Now, point the thumb of your right hand into the axis direction
and form a fist with all other fingers. These fingers now curl like a rotation with a positive
angle.

Sentaurus™ Structure Editor User Guide 113

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

Figure 35 Tapering example

(a) (b)

(c) (d)

The following Scheme commands produced the graphics in Figure 35:

(sdegeo:create-cuboid (position 0.0 0.0 -0.5) (position 1.0 2.0 0.5)
"Silicon" "region_1")
(define FACE (find-face-id (position 0.0 0.5 0.0)))
(entity:set-color FACE BLUE)
(define FACE_CENTER (cdr (list-ref (face:prop (car FACE)) 2)))
(define FACE_NORMAL (face:plane-normal (car FACE)))
(wire-body:points
(list FACE_CENTER (position:offset FACE_CENTER FACE_NORMAL)))
; Figure (a)
(define DRAFT_CENTER (position -1.0 0.0 0.0))
(define DRAFT_NORMAL (gvector -1.0 2.0 0.0))
(wire-body:points
(list DRAFT_CENTER (position:offset DRAFT_CENTER DRAFT_NORMAL)))
(face:planar-disk DRAFT_CENTER DRAFT_NORMAL 2)
(wire-body:points (list (position 0.0 0.5 -2.0)
(position 0.0 0.5 2.0)))
; Figure (b)
(sdegeo:taper-faces FACE DRAFT_CENTER DRAFT_NORMAL 0)
; Figure (c)
(sdegeo:taper-faces FACE DRAFT_CENTER DRAFT_NORMAL 45)
; Figure (d)

Sentaurus™ Structure Editor User Guide 114

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

The tapering process, based on two independent rotations, allows you to perform two
distinct types of taper operation. The first type of tapering results in truncated pyramid–type
shapes, where, for example, all faces are bent inwards. For this kind of tapering, the draft
normal vector is orthogonal to the face normal vectors and the rotation angle is nonzero. For
example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:taper-faces (list
(car (find-face-id (position 0.5 0.0 0.5)))
(car (find-face-id (position 1.0 0.5 0.5)))
(car (find-face-id (position 0.5 1.0 0.5)))
(car (find-face-id (position 0.0 0.5 0.5))))
(position 0.5 0.5 0.5) (gvector 0 0 1) 30)

Figure 36 shows a unit cube after applying truncated pyramid–type tapering.

Figure 36 Truncated pyramid–type tapering: (left) original cuboid and (right) after truncation

Figure 37 illustrates the effect of the use of different draft plane centers. For the operations,
the same draft plane normal and draft angle were used.

Figure 37 Draft plane center

Draft Plane Normal

Draft Angle

Draft Plane Center

The second type of tapering is similar to applying a sheer force to the body. For this kind of
tapering, the draft normal vector is not orthogonal to the face normal vectors, but the rotation
angle is zero.

Sentaurus™ Structure Editor User Guide 115

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

For example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:taper-faces (list
(car (find-face-id (position 0.5 0.0 0.5)))
(car (find-face-id (position 1.0 0.5 0.5)))
(car (find-face-id (position 0.5 1.0 0.5)))
(car (find-face-id (position 0.0 0.5 0.5))))
(position 0.5 0.5 0.5) (gvector 0.5 0.5 1) 0)

Figure 38 shows a unit cube after applying sheer-type tapering.

Figure 38 Sheer-type tapering: (left) original cuboid and (right) after tapering

Even more general tapering can be obtained by mixing both fundamental types.
Note:
The taper operation can result in a geometric shape that is no longer closed. In
this case, vent faces are added automatically such that the resulting shape is
closed.

Vent faces can only be added if there is a face on the original model that shares a vertex with
the ‘mergeable’ edge, that does not have the mergeable edge in its boundary, and that will
be adjacent to the vent faces after the taper. Vent faces can also be added at tangent edges
when one of the two faces that share the edge is being tapered. However, a vent face will
only be added if there is no intersection between the surface of the face that is being tapered
and the surface of the face that is not being tapered.

Sentaurus™ Structure Editor User Guide 116

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 3D Shapes

Figure 39 Topology change during face tapering

Figure 40 shows a structure generated by the following script:

(sdegeo:set-default-boolean "ABA")
(define r1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "region_1"))
(define r2 (sdegeo:create-cuboid (position 2 2 8) (position 8 8 12)
"PolySilicon" "region_2"))
(sdegeo:delete-region (find-body-id (position 5 5 11)))
(define facelist (list
(car (find-face-id (position 2 5 9)))
(car (find-face-id (position 8 5 9)))
(car (find-face-id (position 5 2 9)))
(car (find-face-id (position 5 8 9)))))
(sdegeo:taper-faces facelist (position 5 5 9) (gvector 0 0 1) 30)

Figure 40 Face tapering

Before Face Tapering After Face Tapering

Figure 41 shows the structure generated by the following script:

; Initial model
(sdegeo:set-default-boolean "ABA")
(define r1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "region_1"))
(define r2 (sdegeo:create-cuboid (position 0 0 10) (position 10 10 20)
"PolySilicon" "region_2"))
; Step 1
(define facelist (list (car (find-face-id (position 0 5 5)))

Sentaurus™ Structure Editor User Guide 117

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

(car (find-face-id (position 10 5 5)))))

(sdegeo:taper-faces facelist (position 5 5 5) (gvector 0 0 1) 30)
; Step 2
(define facelist (list (car (find-face-id (position 5 0 5)))
(car (find-face-id (position 5 10 5)))))
(sdegeo:taper-faces facelist (position 5 5 5) (gvector 0 0 1) 30)
; Step 3
(define facelist (list (car (find-face-id (position 0 5 15)))
(car (find-face-id (position 10 5 15)))))
(sdegeo:taper-faces facelist (position 5 5 15) (gvector 0 0 1) -30)
; Step 4
(define facelist (list (car (find-face-id (position 5 0 15)))
(car (find-face-id (position 5 10 15)))))
(sdegeo:taper-faces facelist (position 5 5 15) (gvector 0 0 1) -30)

Figure 41 Face tapering

Initial Model Step 1 Step 2 Step 3 Step 4

Creating 3D Objects From 1D and 2D Objects

This section describes how to create 3D objects from 1D and 2D objects.

Wires
A wire is a 1D object that is used to define a sweep path or a wire body for skinning.
To draw a piecewise linear wire (polyline):
1. Choose Draw > 2D Create Tools > Polyline, or click the corresponding toolbar button
(see Table 8 on page 48).
2. Click at each vertex of the polyline. To finish drawing the polyline, click the middle mouse
button. (Press both buttons when using a two-button mouse.)
3. In Exact Coordinates mode, a dialog box opens where you enter the coordinates for
each vertex.

Sentaurus™ Structure Editor User Guide 118

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

The corresponding Scheme command is:

(sdegeo:create-polyline-wire vertex-list)

For example:
(sdegeo:create-polyline-wire (list
(position 0.0 0.0 0.0) (position 1.0 0.0 0.0)
(position 1.0 1.0 0.0) (position 1.0 1.0 1.0)
(position 0.0 1.0 1.0) (position 0.0 1.0 0.0)))

To draw a spline interpolated wire, choose Draw > 2D Create Tools > Spline, or click the
corresponding toolbar button (see Table 9 on page 48).
The corresponding Scheme command is:
(sdegeo:create-spline-wire vertex-list)

For example:
(sdegeo:create-spline-wire (list
(position 0.0 0.0 0.0) (position 1.0 0.0 0.0)
(position 1.0 1.0 0.0) (position 1.0 1.0 1.0)
(position 0.0 1.0 1.0) (position 0.0 1.0 0.0)))

Extruding
To extrude a 2D object or a face of a 3D object:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Extrude.
5. Enter an extrusion distance in the dialog box.
If the parameter hext was set before performing this operation (choosing Edit >
Parameters), then this dialog box is suppressed, and the given value of hext is used
instead.

Sentaurus™ Structure Editor User Guide 119

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 42 (Left) Menu for extrusion and (right) Extrusion dialog box

The corresponding Scheme command is:

(sdegeo:extrude entity-list hext)

For example:
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.2 1.0 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 0.4 1.0 0) (position 0.8 1.1 0)
"Oxide" "region_2")
(sdegeo:create-rectangle (position 0.4 1.1 0) (position 0.8 1.5 0)
"PolySilicon" "region_3")
(sdegeo:extrude (list (car (find-face-id (position 0.6 0.5 0)))) 0.8)
(sdegeo:extrude (list
(car (find-face-id (position 0.6 1.05 0)))
(car (find-face-id (position 0.6 1.2 0)))) 0.4)

Different extrusion distances can be used for different regions.

In general, the extrusion direction is given by the face normal. For 2D objects, which are
created in the xy plane by default, the face normal is defined to point along the z-axis.
Note:
Negative extrusion values, applied to 3D faces, generate an invalid geometry.

Figure 43 illustrates the extrusion operation for 2D devices.

Sentaurus™ Structure Editor User Guide 120

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 43 Creating an extruded 3D model from a 2D device; the extrusion length can different

Figure 44 Example of face extrusion in a 3D object

Extruded Faces

Sweeping a 2D Object
A 3D object can be created by sweeping a 2D object along a path. A 3D object can also be
modified by sweeping a set of faces of the 3D object. The sweep path can be defined in
several different ways. In the simplest case, only the sweep distance is given and the sweep
direction will be normal to the face. The sweep distance and sweep direction can also be
defined using a sweep vector. In addition, the sweep path can be defined by a rotation
around an axis or explicitly by a wire body.
Sweeping and extruding can also be applied to Ref/Eval windows. If a swept Ref/Eval
window is used to place a submesh doping profile, information about the sweep creation is
stored in the .cmd file, so that the mesh generator can evaluate the swept 2D doping profile
in three dimensions.
In the case of other doping profile types, the resulting swept Ref/Eval window (without
sweep information) is stored in the .cmd file, requiring that these elements must be valid
reference elements (doping baseline elements) or evaluation windows. The sweep
operation transforms the 2D edge contacts to 3D face contacts.

Sentaurus™ Structure Editor User Guide 121

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

The sweep options allow additional control over the sweeping behavior and allow drafting,
twisting, and other advanced behaviors.
Sweeping is a complex operation involving several different types. In the following sections,
the supported sweep types are introduced.

Sweep Distance
The sweep distance operation is similar to extrusion. Faces of 2D bodies or 3D bodies can
be swept by a distance. The sweep distance option can be used with various sweep options.
To sweep a 2D object or a face of a 3D object using distance sweeping:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Sweep.
The Sweep Operations dialog box opens.
5. Click Select Profiles. The entity IDs of the selected profiles are displayed in the Sweep
Profiles field.
6. Click the Sweep Distance tab.
7. Select the Selected Sweep Method option.
8. Enter a sweep distance.
9. Select sweep options as needed (see Sweep Options on page 131).
10.Click OK.
Figure 45 shows the Sweep Operations dialog box with the Selected Sweep Method option
selected. Figure 46 shows the effect of a sweep distance operation, together with the use of
the draft angle option. When a draft angle is used during a sweep operation, additional faces
must be added to the model if the gap_type sweep option is ‘extended’ or ‘rounded.’

Sentaurus™ Structure Editor User Guide 122

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 45 Sweep Operations dialog box showing Sweep Distance tab

The corresponding Scheme command is:

(sdegeo:sweep face|face-list distance [sweep-options])

The examples in Figure 46 are generated using the following Scheme commands:
(define FACE (sdegeo:create-reg-polygon (position 0 0 0) 1 6 0
"Oxide" "region_1"))
(sdegeo:translate-selected FACE (transform:translation
(gvector 3 2 0)) #t 3)
(sdegeo:sweep (sde:find-reg-region "region_1_t1_r1") 0.6
(sweep:options "solid" #t "rigid" #f "miter_type" "default"
"draft_angle" 40.0 "gap_type" "extended"))
(sdegeo:sweep (sde:find-reg-region "region_1_t1_r2") 0.6
(sweep:options "solid" #t "rigid" #f "miter_type" "default"
"draft_angle" 40.0 "gap_type" "rounded"))

(sdegeo:sweep (sde:find-reg-region "region_1_t1_r3") 0.6

(sweep:options "solid" #t "rigid" #f "miter_type" "default"
"draft_angle" 40.0 "gap_type" "natural"))

Sentaurus™ Structure Editor User Guide 123

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 46 Sweep distance with a draft angle (40°) using different gap-type options
Draft Angle

Initial 2D Body Extended Faces Rounded Faces ‘Natural’ Condition

Sweep Along a Vector

The sweep along a vector option is similar to the sweep distance option, except that a vector
is specified to define the sweep path.
To sweep a 2D object or a face of a 3D object using vector sweeping:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Sweep.
The Sweep Operations dialog box opens.
5. Click Select Profiles.
The entity IDs of the selected profiles are displayed in the Sweep Profiles field.
6. Click the Sweep Along Vector tab.
7. Select Selected Sweep Method.
8. Enter the x-, y-, and z-coordinates of the sweep vector.
9. Select sweep options as needed (see Sweep Options on page 131).
10.Click OK.

Sentaurus™ Structure Editor User Guide 124

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 47 Sweep Operations dialog box showing Sweep Along Vector tab

The corresponding Scheme command is:

(sdegeo:sweep face|face-list gvector [sweep-options])

The examples in Figure 48 are generated using the following Scheme commands:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Oxide"
"region_1")
(sdegeo:sweep (find-face-id (position 0.5 1 0.5)) (gvector 0.5 0.5 0)
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))
(sdegeo:sweep (find-face-id (position 1.0 1.5 0.5))
(gvector -0.5 0.5 0)
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))

Sentaurus™ Structure Editor User Guide 125

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 48 Sweep along a vector

Sweep Vector

Selected Face
Selected Face

Sweep Around an Axis (Regular and Corner Sweeps)

The sweep around an axis option can be used to sweep a face (2D or 3D) around an axis.
The sweep can be regular or such that only the inside edge is swept, while the outside edge
forms an axis-aligned corner.

Regular Sweep
To sweep a 2D object or a face of a 3D object using regular sweeping around an axis:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Sweep.
The Sweep Operations dialog box opens.
5. Click Select Profiles.
The entity IDs of the selected profiles are displayed in the Sweep Profiles field.
6. Click the Sweep Around Axis tab.
7. Select Selected Sweep Method.
8. Define the axis of rotation by entering a point on the axis and a direction vector, or click
Pick Position and click a point in the view window. In this case, the rotation axis will
point into the current view plane.
9. Enter the sweep angle. (Do not select the Sweep Corner option.)

Sentaurus™ Structure Editor User Guide 126

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

10.Select sweep options as needed (see Sweep Options on page 131).

11. Click OK.

Figure 49 Sweep Operations dialog box showing Sweep Around Axis tab

The corresponding Scheme command is:

(sdegeo:sweep face|face-list position gvector
(sweep:options "sweep_angle" angle [other-sweep-options]))

The examples in Figure 50 are generated using the following Scheme commands:
(sdegeo:create-rectangle (position 0 0 0.0) (position 1 2 0.0)
"Silver" "region_1")
(define NEWVERT (sdegeo:insert-vertex (position 0.5 2 0)))
(sdegeo:move-vertex NEWVERT (position 0.5 2.3 0))
(sdegeo:fillet-2d (sde:window-select-2d -0.1 1.9 1.1 2.4 "all"
"vertex") 0.2)
(sdegeo:translate-selected (find-body-id (position 0.5 0.5 0))
(transform:translation (gvector 2 0 0)) #t 2)
(sdegeo:sweep (find-face-id (position 2.5 0.5 0)) (position 2 0 0)
(gvector 0 1 0)
(sweep:options "solid" #t "sweep_angle" 60 "rigid" #f

Sentaurus™ Structure Editor User Guide 127

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

"miter_type" "default"))
(sdegeo:sweep (find-face-id (position 4.5 0.5 0)) (position 3 0 0)
(gvector 0 1 0)
(sweep:options "solid" #t "sweep_angle" 40 "rigid" #f "miter_type"
"default"))

Figure 50 Sweeping around an axis using different options

Initial Face Sweep Around Existing Vertex Sweep Around a Position

Corner Sweep
Use this option to design crown moldings, corbels, and so on.
To perform a corner sweep:
1. Follow the procedure in Regular Sweep on page 126.
2. In Step 9, select Sweep Corner.
3. Enter or pick a point on the sweep axis.
The axis direction is determined automatically, and the sweep angle for corner sweeps is
always 90°.
The sweep is performed in such a way that the resulting shape contains a solid angle.
Note:
If the selection of the sweep axis does not allow for the creation of a solid angle,
the sweep operation is suppressed.

The corresponding Scheme command is:

(sdegeo:sweep-corner face|face-list position gvector)

The example in Figure 51 is generated using the following Scheme commands:

(sdegeo:create-rectangle (position 0 0 0.0) (position 1 2 0.0)
"Silver" "region_1")
(define NEWVERT (sdegeo:insert-vertex (position 0.5 2 0)))
(sdegeo:move-vertex NEWVERT (position 0.5 2.3 0))

Sentaurus™ Structure Editor User Guide 128

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

(sdegeo:fillet-2d (sde:window-select-2d -0.1 1.9 1.1 2.4 "all"

"vertex") 0.2)
(sdegeo:sweep-corner (find-face-id (position 0.5 0.5 0))
(position -0 4 0) (gvector 1 0 0))

Figure 51 Corner sweeping around an axis; the initial profile is the same as in Figure 50

Sweep Along a Wire

To sweep a profile along a wire, first, the wire body must be generated either manually by
using Scheme functions or by using the GUI. To create a wire, see Wires on page 118.
To sweep a 2D object button (see Table 6 on page 47):
1. Click the Select button (see Table 6).
2. From the Selection Level list, select Select Face.
3. Select the face and hold the Shift key to select additional faces, or drag a box around a
set of faces.
4. Choose Edit > 3D Edit Tools > Sweep.
The Sweep Operations dialog box opens.
5. Click Select Profiles.
The entity IDs of the selected profiles are displayed in the Sweep Profiles field.
6. Click the Sweep Along Wire tab.

Sentaurus™ Structure Editor User Guide 129

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

7. Select Selected Sweep Method.

8. From the Selection Level list, select Select Edge, and select the wire in the view window.
9. Click Select Path. The entity IDs of the selected wires are displayed in the Sweep Path
field.
10.Select sweep options as needed (see Sweep Options on page 131).
11. Click OK.

Figure 52 Sweep Operations dialog box showing Sweep Along Wire tab

The corresponding Scheme command is:

(sdegeo:sweep face|face-list position gvector
(sweep:options "sweep_angle" angle [other-sweep-options]))

The example in Figure 53 is generated using the following Scheme commands:

(define FACE (sdegeo:create-circle (position 0.0 0.0 0.0) 1.0
"Silicon" "region_1"))
(define WIRE (sdegeo:create-spline-wire (list (position 0.0 0.0 0.0)
(position 0.0 0.0 5.0) (position 0.0 5.0 5.0)
(position 5.0 5.0 5.0))))

Sentaurus™ Structure Editor User Guide 130

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

(sdegeo:sweep FACE WIRE (sweep:options "solid" #t "rigid" #f

"miter_type" "default"))
(entity:delete WIRE)

Figure 53 Wire sweep: (left) initial profile with sweep wire and (right) final swept body

Sweep Options
The sweep operation can be performed with different options that affect the outcome of the
operation. These options are controlled by the sweep:options command. For example,
when a profile is swept along a path, the profile can remain parallel to the original profile
(rigid sweep) or can follow the path in a more natural way, following the curvature of the path,
remaining perpendicular to the path during sweeping. The following sections give an
overview of the available sweep options.

Rigid Sweep
A rigid sweep is one in which the profile that is swept is translated, but not rotated, along the
sweep path. It accomplishes a rigid extrusion of a profile along a path. The rigid option
specifies whether to make the cross sections of a sweep parallel to each other. The default
is FALSE, which means the cross sections are perpendicular to the sweep path. No checks
are made when a rigid sweep is performed; consequently, the resulting surface is
self-intersecting if the given path is closed or if the direction of the path changes by more
than 180°.

Sentaurus™ Structure Editor User Guide 131

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Mitering
The miter option determines how a corner miter is created during a sweep operation. The
mitering options are:

new Reflects the profile to the other side of the corner up to the discontinuous point. The two
sides are then extended and intersected, and new edges are formed as necessary. The
‘ending’ profile is the same as the starting profile. The new option is the default mitering.
The new option makes the sweep operation create miters by sweeping each G1 part of
the path with a copy of the profile and then filling in the gaps with linear-extended parts
that are sliced at the miter planes.

bend Bend mitering requires the specification of a minimum radius to fillet the path. The result
is a smooth, curved junction. The minimum radius must be positive.

crimp Reflects the profile to the other side of the corner up to the discontinuous point. The
portions of the two sides that do not intersect are connected using a smooth rotation
about the discontinuous point.
The crimp option creates miters between profiles swept along G1-continuous path
segments, filling in gaps by revolving the profile.

old Intersects the plane that is perpendicular to the path at the half angle of the corner. The
resulting profile on the plane is then swept continuously along the path.

G1 continuity refers to geometric continuity of the first degree (that is, the direction of the
tangent vector is continuous). Two curves are G1-continuous at a given point if the
directions of the tangent vectors at their joining point are the same, even though the vector
magnitudes might differ (in the case of C1 continuity, the magnitudes are also the same). G1
continuity means that the tangent lines are smoothly connected.

Figure 54 Mitering a corner with different options: (left) new and old give the same results for
the given example, (middle) crimp, and (right) bend

Sentaurus™ Structure Editor User Guide 132

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

The examples in Figure 54 are created by the following Scheme commands:

(define REC (sdegeo:create-rectangle (position -1.0 0.0 0.0)
(position 1.0 1.0 0.0) "Silicon" "region_1"))
(define WIRE (sdegeo:create-polyline-wire (list (position 0.0 0.5 0.0)
(position 0.0 0.5 3.0) (position 2.0 2.5 5.0))))

; (a): "new"
(sdegeo:sweep REC WIRE
( sweep:options "solid" #t "rigid" #f "miter_type" "new"))
; (a): "old"
(roll)
(sdegeo:sweep REC WIRE
(sweep:options "solid" #t "rigid" #f "miter_type" "old"))
; (b): "crimp"
(roll)
(sdegeo:sweep REC WIRE
(sweep:options "solid" #t "rigid" #f "miter_type" "crimp"))
; (c) "bend"
(roll)
(sdegeo:sweep REC WIRE
(sweep:options "solid" #t "rigid" #f "miter_type" "bend" 3.5))

Sweeping Examples
The following example illustrates the creation of a simple MOSFET with a nonaxis-aligned
gate stack using different sweep methods.

Sweep Distance
The substrate with two shallow trench isolations is created by sweeping the 2D cross section
a given distance:
(define SUB (sdegeo:create-rectangle
(position -2.0 0.0 0.0) (position 2.0 0.0 -1.0) "Silicon" "R.Sub"))
(sdegeo:set-default-boolean "ABA")
(define STI_L (sdegeo:create-rectangle
(position -2.0 0.0 0.0) (position -1.6 0.0 -0.5) "Oxide" "R.STI_L"))
(define STI_R (sdegeo:create-rectangle
(position 1.6 0.0 0.0) (position 2.0 0.0 -0.5) "Oxide" "R.STI_R"))
(sdegeo:sweep (list SUB STI_L STI_R) -4.0
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))

Sentaurus™ Structure Editor User Guide 133

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 55 Distance sweeping creates 3D substrate with shallow trench isolations

Sweep Along a Vector

In a first version, the 2D gate-stack cross section is swept along a vector:
(define GOX (sdegeo:create-rectangle
(position -2.0 0.4 0.0) (position -2.0 1.2 0.1) "Oxide" "R.Gox"))
(define POL (sdegeo:create-rectangle
(position -2.0 0.6 0.1) (position -2.0 1.0 0.5) "PolySilicon"
"R.Pol"))
(sdegeo:sweep (list GOX POL) (gvector 4.0 2.4 0.0)
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))

Figure 56 Vector sweeping creates a nonaxis-aligned gate stack: gate stack profiles (left)
before vector sweeping and (right) after vector sweeping

Sweep Along a Wire

In a second version, the 2D gate-stack cross section is swept along a wire:
(roll)
(define WIRE (sdegeo:create-polyline-wire (list
(position -2.0 0.8 0.5) (position -0.8 0.8 0.5)
(position 0.8 3.2 0.5) (position 2.0 3.2 0.5))))
(sdegeo:sweep (list GOX POL) WIRE
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))

Sentaurus™ Structure Editor User Guide 134

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

In a third version, the 2D gate-stack cross section is swept along a wire rigidly:
(roll)
(sdegeo:sweep (list GOX POL) WIRE
(sweep:options "solid" #t "rigid" #t "miter_type" "default"))

In a final version, crimping is used to round the edges that are created along the sweep path:
(roll)
(sdegeo:sweep (list GOX POL) WIRE
(sweep:options "solid" #t "rigid" #f "miter_type" "crimp"))
(entity:delete WIRE)

Figure 57 Wire sweeping creates a meandering gate stack: (left) default, (middle) rigid sweep,
and (right) crimping

Sweep Around an Axis

The next example discusses the creation of a simple racetrack LDMOS structure using
sweeping along a wire for the curved part and distance sweeping to add the straight parts:
(define LOCOS (sdegeo:create-polygon (list
(position -0.6 0 0.0) (position -0.4 0 -0.2) (position 0.1 0 -0.2)
(position 0.3 0 0.0) (position 0.6 0 0.0) (position 0.6 0 0.1)
(position 0.3 0 0.1) (position 0.1 0 0.3) (position -0.4 0 0.3)
(position -0.6 0 0.0)) "Oxide" "R.LOCOS"))
(define POLY (sdegeo:create-polygon (list
(position -0.2 0 0.3) (position 0.1 0 0.3) (position 0.3 0 0.1)
(position 0.6 0 0.1) (position 0.6 0 0.3) (position 0.4 0 0.3)
(position 0.2 0 0.5) (position -0.2 0 0.5) (position -0.2 0 0.3))
"PolySilicon" "R.Poly"))
(sdegeo:sweep (list LOCOS POLY) (position -1 0 0) (gvector 0 0 1)
(sweep:options "solid" #t "sweep_angle" 90 "rigid" #f "miter_type"
"default"))

(sdegeo:set-default-boolean "BAB")
(define SUB (sdegeo:create-cuboid
(position -1.0 0.0 0.0) (position 1.0 2.0 -1.0) "Silicon" "R.SUB"))
(sdegeo:sweep (list
(car (find-face-id (position 0.0 0 -0.9)))
(car (find-face-id (position 0.0 0 0.0)))
(car (find-face-id (position 0.0 0 0.4)))) 2.0
(sweep:options "solid" #t "rigid" #f "miter_type" "default"))

Sentaurus™ Structure Editor User Guide 135

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 58 Creating a racetrack LDMOS using sweep around an axis

Skinning
A skinning operation can be used to create a 3D body that interpolates a series of wires or
faces. The given wires or faces define the cross sections to be interpolated by the resulting
3D body. There must be at least two wire bodies or faces to be selected. The wires can be
open or closed. The wires are copies, that is, the originals remain. The wires can share
endpoints and do not have to be C1 continuous.

Default Skinning
To skin a set of wire bodies or 2D faces using the default options:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Face.
3. Choose Edit > 3D Edit Tools > Skin.
The Skinning Operations dialog box opens.
4. Select the first face or wire in the view window, and click Get Wires/Faces.
The selected profile appears in the Wires list.
5. Repeat for all other wires and faces.
6. Enter additional skinning options as needed (go to https://doc.spatial.com for a list of
options).
7. Select the Delete Inputs option if the initial profiles are to be deleted.
8. Click OK.

Sentaurus™ Structure Editor User Guide 136

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 59 Skinning Operations dialog box

The corresponding Scheme command is:

(sdegeo:skin-wire face-list [skin-options])

The example in Figure 60 (b) is generated using the following Scheme commands:
(define FACE_1 (sdegeo:create-ellipse (position 0 2 0)
(position 1 2 0) 0.5 "Silicon" "region_1"))
(sdegeo:set-active-work-plane "wp_yz")
(define FACE_2 (sdegeo:create-circle (position 2 1 2) 0.5
"Silicon" "region_2"))
(sdegeo:set-active-work-plane "base")
(define FACES (list (car (entity:faces FACE_1)) (car (entity:faces
FACE_2))))
(sdegeo:skin-wires FACES)

Sentaurus™ Structure Editor User Guide 137

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Figure 60 Skinning option overview: (a) initial faces, with guide used in (e); (b) default
skinning; (c) skinning with first normal; (d) skinning with vectors, low magnitude; (e)
skinning with vectors, high magnitude; and (f) skinning with guide

(a) (b) (c)

(d) (e) (f)

Skinning With Normals

The default options automatically select the sweep tangent vectors at each of the profiles.
To select the face normal as the sweep tangent vectors:
1. Select Skin with Normals in the Skinning Operations dialog box.
2. Select the face normals to be used as constraints from the list. The options are
First_Normal, Last_Normal, Ends_Normal, or All_Normal.
The corresponding Scheme command is:
(sdegeo:skin-wires-normal face-list normal-selector [skin-options])

The example in Figure 60 (c) is generated using the following Scheme commands:
(define FACE_1 (sdegeo:create-ellipse (position 0 2 0)
(position 1 2 0) 0.5 "Silicon" "region_1"))
(sdegeo:set-active-work-plane "wp_yz")
(define FACE_2 (sdegeo:create-circle (position 2 1 2) 0.5
"Silicon" "region_2"))
(sdegeo:set-active-work-plane "base")
(define FACES (list (car (entity:faces FACE_1)) (car (entity:faces
FACE_2))))
(sdegeo:skin-wires-normal FACES "first_normal")

Sentaurus™ Structure Editor User Guide 138

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

Skinning With Vectors

Use the Skin with Vectors option to explicitly control sweep tangent vectors. For each
vector, a magnitude is given, which controls how quickly the sweep direction can deviate
from the given tangent vector away from the profile. For larger values, the sweep direction
follows the tangent vector longer than for small values (see Figure 60 (d) and (e)).
The corresponding Scheme command is:
(sdegeo:skin-wires-vectors faces-list gvector-list magnitude-list
[skin-options])

The example in Figure 60 (d) is generated using the following Scheme commands:
(define FACE_1 (sdegeo:create-ellipse (position 0 2 0)
(position 1 2 0) 0.5 "Silicon" "region_1"))
(sdegeo:set-active-work-plane "wp_yz")
(define FACE_2 (sdegeo:create-circle (position 2 1 2) 0.5
"Silicon" "region_2"))
(sdegeo:set-active-work-plane "base")
(define FACES (list (car (entity:faces FACE_1))
(car (entity:faces FACE_2))))
(sdegeo:skin-wires-vectors FACES
(list (gvector -0.5 0 1) (gvector 1 0 -0.5))
(list 2.0000 2.0000))

The example in Figure 60 (e) is generated with the same Scheme commands, but uses
magnitudes of 10.0 instead of 2.0.

Skinning With Guides

Similar to sweeping along a wire, a set of profiles can be skinned using a wire as a guide. To
use this option:
1. Select Skin with Guides in the Skinning Operations dialog box.
2. Select the wire in the view window.
3. Click Get Guide.
The corresponding Scheme command is:
(sdegeo:skin-wire-guide face-list wire [skin-options])

The example in Figure 60 (f) is generated using the following Scheme commands:
(define FACE_1 (sdegeo:create-ellipse (position 0 2 0)
(position 1 2 0) 0.5 "Silicon" "region_1"))
(sdegeo:set-active-work-plane "wp_yz")
(define FACE_2 (sdegeo:create-circle (position 2 1 2) 0.5 "Silicon"
"region_2"))
(sdegeo:set-active-work-plane "base")
(define FACES (list (car (entity:faces FACE_1)) (car (entity:faces

Sentaurus™ Structure Editor User Guide 139

V-2024.03
Chapter 4: Generating Geometric Structures
Creating 3D Objects From 1D and 2D Objects

FACE_2))))
(define WIRE (sdegeo:create-spline-wire (list
(position -1.0 2.0 0.0) (position -1.0 2.0 1.0)
(position 0.0 1.0 2.0)
(position 1.0 1.0 2.0) (position 2.0 1.5 1.0))))
(position 0.8 3.2 0.5) (position 2.0 3.2 0.5))))
(sdegeo:skin-wires-guides FACES WIRE)

Skinning Example
The following example illustrates how to use skinning to emulate line-edge roughness
effects in a MOSFET gate stack. First, a set of perturbed wires for the polygate and the
gate-oxide cross sections are created (see Figure 61). Second, these wires are skinned and
the substrate is added.
The example is generated using the following Scheme commands:
(define index 0) (define PolWires (list)) (define OxiWires (list))
(define MakeWires (lambda (Xl Xr Yo)
(define PWname (string-append "PolWire_" (number->string index)))
(define OWname (string-append "OxiWire_" (number->string index)))
(define PWname (sdegeo:create-polyline-wire (list
(position Xl Yo 0.1) (position Xr Yo 0.1)
(position (- Xr 0.1) Yo 0.5) (position (+ Xl 0.1) Yo 0.5)
(position Xl Yo 0.1))))
(define OWname (sdegeo:create-polyline-wire (list
(position Xl Yo 0.0) (position Xr Yo 0.0)
(position Xr Yo 0.1)
(position Xl Yo 0.1) (position Xl Yo 0.0))))
(set! index (+ index 1))
(set! PolWires (append PolWires (list PWname)))
(set! OxiWires (append OxiWires (list OWname)))
))

(MakeWires -0.20 0.20 0.0)

(MakeWires -0.23 0.18 0.2)
(MakeWires -0.19 0.22 0.4)
(MakeWires -0.16 0.16 0.6)
(MakeWires -0.20 0.20 0.8)

(define POL (sdegeo:skin-wires PolWires))

(sde:add-material POL "PolySilicon" "R.Pol")
(define OXI (sdegeo:skin-wires OxiWires))
(sde:add-material OXI "Oxide" "R.oxi")
(entity:delete PolWires)
(entity:delete OxiWires)
(sdegeo:create-cuboid (position -0.8 0.0 0.0) (position 0.8 0.8 -1.0)
"Silicon" "R.SUB")

Sentaurus™ Structure Editor User Guide 140

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

Figure 61 Skinning example of MOSFET with line-edge roughness: (left) wire bodies and
(right) final structure

Editing 2D and 3D Structures

This section discusses how to edit 2D and 3D structures.

Explicit Boolean Operations

To perform Boolean operations on 3D (or 2D) regions:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Body.
3. Select the body and hold the Shift key to select additional bodies, or drag a box around
a set of bodies.
4. Choose Edit > 3D Edit Tools (or 2D Edit Tools).
5. Select Unite, Intersect, or Subtract.
The following multiregion operations can be performed.
Unite
Dissolves any internal boundaries that exist in touching or overlapping regions and results
in one single region with the name of the first region selected before the unite operation was
applied.
The corresponding Scheme command is:
(sdegeo:bool-unite body-list)

Sentaurus™ Structure Editor User Guide 141

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

For example:
(define A (sdegeo:create-cuboid (position 0.0 0.0 0.0)
(position 2.0 1.0 1.0) "Silicon" "region_1"))
(define B (sdegeo:create-cuboid (position 2.0 0.0 0.0)
(position 3.0 3.0 1.0) "Silicon" "region_2"))
(sdegeo:bool-unite (list A B))

Intersect
This operation is used if the direct ACIS Scheme functions are used to generate parts of the
structure or if the automatic overlap resolution is deactivated. The corresponding Scheme
command is:
(sdegeo:bool-intersect body-list)

For example:
(sdegeo:set-default-boolean "XX")
(define A (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 3.0 2.0 0) "Silicon" "region_1"))
(define B (sdegeo:create-circle (position 2.5 1.5 0) 1 "Silicon"
"region_2"))
(sdegeo:bool-intersect (list A B))

Figure 62 Explicit Boolean intersection: (left) original structure and (right) after intersection

Subtract
The first region in the body list is selected as the main region, then subsequent regions are
subtracted from the main region. The corresponding Scheme command is:
(sdegeo:bool-subtract body-list)

For example:
(sdegeo:set-default-boolean "XX")
(define A (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 2.0 1.0 0) "Silicon" "region_1"))
(define B (sdegeo:create-circle (position 0.5 0.8 0) 0.4
"Silicon" "region_2"))
(define C (sdegeo:create-circle (position 1.5 0.2 0) 0.4

Sentaurus™ Structure Editor User Guide 142

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

"Silicon" "region_2"))
(sdegeo:bool-subtract (list A B C))

Figure 63 Explicit Boolean subtraction: (left) original structure and (right) after subtraction

Changing the Material of a Region

To change the material associated with a region or regions:
1. Click the Select button (see Table 6 on page 47).
2. From the Selection Level list, select Select Body.
3. Select the body and hold the Shift key to select additional bodies, or drag a box around
a set of bodies.
4. Select the required material from the Material list.
5. Choose Edit > Change Material.
The corresponding Scheme command is:
(sde:add-material [body | body-list] new-material-name region-name)

Note:
If a list with more than one body is used, all bodies will be assigned the same
region name. Upon saving the boundary, the region will be made unique.

For example, to change the material but preserve the region name:
(define A (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 3.0 2.0 0) "Silicon" "region_1"))
(sde:add-material A "PolySilicon" (generic:get A "region"))

Sentaurus™ Structure Editor User Guide 143

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

Changing the Name of a Region

To change the name of a region or regions:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Body.
3. Select a single body.
4. Choose Edit > Change Region Name.
5. Enter the new name in the dialog box.
The corresponding Scheme command is:
(sde:add-material body material-name new-region_name)

For example, to change the region name but to preserve the material:
(define A (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 3.0 2.0 0) "Silicon" "region_1"))
(sde:add-material A (generic:get A "material") "region_new")

Note:
If multiple bodies are selected, only the region name of the first selected body is
changed.
No check is performed to ensure that a newly chosen region name is not already
in use. If a body is assigned a region name through this method and the region
name is also used for another body, the results of region-oriented operations are
undefined.

Deleting Regions
To delete one or more regions:
1. Click the Select button (see Table 7).
2. From the Selection Level list, select Select Body.
3. Select the body and hold the Shift key to select additional bodies, or drag a box around
a set of bodies.
4. Choose Edit > 2D Edit Tools > Delete Region, or press the Delete key or Backspace
key, or right-click and choose Delete.
The corresponding Scheme command is:
(sdegeo:delete-region body-list)

Sentaurus™ Structure Editor User Guide 144

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

For example:
(define BODY (sdegeo:create-cuboid (position 0.0 0.0 0.0)
(position 1.0 1.0 1.0) "Silicon" "region_1"))
(sdegeo:delete-region BODY)

Note:
Ref/Eval windows can be deleted in a similar way. The selection filter must be set
to Ref/Eval windows to select the Ref/Eval window entities.

Separating Lumps
During model generation, Sentaurus Structure Editor never allows the generation of
overlapping regions (unless (sdegeo:set-default-boolean "XX") is used). When the
automatic region-naming feature is switched on, a region name is attached automatically to
each generated body. As a result of this, bodies with multiple lumps (disjoint 2D or 3D parts)
can be created. These disjoint lumps have the same region-name attribute.
Since this could cause a problem during meshing, these lumps must be separated and a
unique region name must be assigned to each lump. This is performed automatically when
a boundary file is exported.
To call the lump separation explicitly, for example, to refer to individual lumps of a
multiple-lump regions in a Scheme script, choose Edit > Separate Lumps. The same action
can be performed by using the Scheme function (sde:separate-lumps).
The following script illustrates how to generate multiple lumps:
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0 0 0) (position 10 5 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 4 -2 0) (position 6 7 0)
"PolySilicon" "region_2")

As a result, two regions are created (region_1 and region_2). However, region_1 is
composed of two disjoint lumps. After (sde:separate-lumps), the region_1 region-name
attribute is removed from the silicon region, and region_1_lump_1 is assigned as the
region name to the left lump of the silicon body, and region_1_lump_2 is assigned to the
right lump. The exported boundary file will have three regions with unique region names.

Sentaurus™ Structure Editor User Guide 145

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

Two-Dimensional Cuts From a 3D Structure

To generate a 2D cross section from a 3D structure:
1. Choose Edit > 3D Edit Tools > Slice.
The Cut Plane Controller opens.
2. Select the required option, and either change the value in the box or rotate the
corresponding dial.
3. When you are finished, click Close.
The corresponding Scheme extension is:
(sdegeo:3d-cut base-position normal-vector [tr-xy] [tr-record]
[tr-axisaligned])

The Scheme extension needs two arguments: a position argument to place the cut plane
and a gvector argument to specify the cut plane normal. For example, the following
command generates a 2D cut in such a way that the cut plane goes through 0.0 0.0 0.0, and
the cut plane is perpendicular to the 1.0 1.0 0.0 vector:
(sdegeo:3d-cut (position 0.0 0.0 0.0) (gvector 1.0 1.0 0.0))

Figure 64 (Left) Three-dimensional structure and (right) 2D structure generated after slicing

Up to three additional (optional) arguments can be used in sdegeo:3d-cut:

• The first optional Boolean argument determines the placement of the newly created 2D
structure. If you specify #f (default), then the slice remains at its original location. If you
specify #t, then the slice will move to the xy plane at z=0. In this way, a 2D slice can be
saved to a 2D boundary file.

Sentaurus™ Structure Editor User Guide 146

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

• The second optional Boolean argument can be used to record the transformation that
transforms the 2D cut on the xy plane.
• The third optional Boolean argument can be used to trigger special transformation rules
for axis-aligned cuts. If the new transformation rule is applied, then the position of the 2D
cut is calculated explicitly following the simple rules described in sdegeo:3d-cut on
page 596.
For example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.2 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.5 0.5) (position 1.2 0.8 1.0)
"Oxide" "R.STI")
(sdegeo:create-cuboid (position 0.4 0.0 1.0) (position 0.8 0.6 1.1)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position 0.4 0.0 1.1) (position 0.8 0.6 1.5)
"PolySilicon" "R.Poly")
(sdegeo:3d-cut (position 0.6 0.0 1.0) (gvector 1.0 0.0 0.0) #t)

Split–Insert Stretching of a Device

For certain applications, such as the computation of the threshold voltage roll-off behavior of
a CMOS technology node, it is necessary to create a family of device structures, which are
identical in certain regions (here, the source and drain areas) while other regions are
stretched (here, the gate area). The split–insert stretching feature conveniently supports this
application.
It allows you to split a device at a specified spatial location and to insert a linear segment
(with a specified extension length) between the split parts of the original device. The split–
insert direction can be specified as well. An optional merge argument can be used to merge
the split bodies and inserted bodies.
To use the split–insert stretching feature:
1. Choose Edit > Device Operations > Split-Insert Device.
The Split-Insert Device dialog box opens.
2. Enter the split position, insert direction, and insert length.
3. Select Merge Planes if the inserted regions should be merged with the existing ones.

Sentaurus™ Structure Editor User Guide 147

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

4. Click OK.
The corresponding Scheme command is:
(sdegeo:split-insert-device position gvector insert-length [merge-flag])

For example:
(sdegeo:create-cuboid (position -1.0 0.0 0.0) (position 1.0 1.0 -1.0)
"Silicon" "region_1")
(sdegeo:create-cuboid (position -0.4 0.0 0.0) (position 0.4 1.0 0.1)
"SiO2" "region_2")
(sdegeo:create-cuboid (position -0.4 0.0 0.1) (position 0.4 1.0 0.5)
"PolySi" "region_3")
(sdegeo:split-insert-device (position 0 0 0) (gvector 1 0 0) 1 #t)

These split–insert operations can be used for both 2D and 3D models.

Sentaurus™ Structure Editor User Guide 148

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

Figure 65 Split–insert operations in (left) two dimensions and (right) three dimensions

(sdegeo:split-insert-device (position 2 0 0) (gvector 1 0 0) 4 #t)

Extending a 2D Device
For certain applications, it is necessary to extend the device at one or more boundaries. For
example, the default reflecting boundary conditions might be inappropriate for a given
application. In such cases, it can be advantageous to simply push out one or more
boundaries. This can be achieved conveniently with the extend device feature.
To use the extend device feature:
1. Choose Edit > Device Operations > Extend Device.
The Extend Device dialog box opens.
2. Select the boundary to be extended, and enter the extension length.

3. Click OK.

Sentaurus™ Structure Editor User Guide 149

V-2024.03
Chapter 4: Generating Geometric Structures
Editing 2D and 3D Structures

The corresponding Scheme extension is:

(sdegeo:extend-device side amount [side amount [side amount
[side amount]]])

For example:
(sdegeo:create-rectangle (position 0.0 0.0 0.0)
(position 1.0 1.0 0.0) "Silicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0.0 0.0 0.0)
(position 0.5 0.5 0.0) "SiO2" "region_2")
(sdegeo:create-rectangle (position 0.0 -0.2 0.0)
(position 0.7 0.0 0.0) "Aluminum" "region_3")
(sdegeo:extend-device "left" 0.5 "bottom" 0.5)

The left, right, top, and bottom parts of the device can be extended sequentially or in
combination. If the combination contains a corner, the corner area will be filled as well.
Individual region names will be assigned to the extended parts, and the material property is
inherited from the original regions.
Note:
This operation is available for 2D only. Only the axis-aligned (horizontal or
vertical) parts of the model will be extended.

Figure 66 (Left) Original 2D device and (right) extended device using the
(sdegeo:extend-device "right" 4 "bottom" 2) command

Trimming a 3D Structure
A 3D structure can be trimmed such that all parts lying outside of a polygonal base plane are
removed. The base plane is restricted to the xy plane. The command is not available from
the GUI.

Sentaurus™ Structure Editor User Guide 150

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

The Scheme command is:

(sdegeo:chop-domain coordinate-list)

The coordinate-list argument is a list of x,y point pairs.

For example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.2 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.5 0.5) (position 1.2 0.8 1.0)
"Oxide" "R.STI")
(sdegeo:create-cuboid (position 0.4 0.0 1.0) (position 0.8 0.6 1.1)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position 0.4 0.0 1.1) (position 0.8 0.6 1.5)
"PolySilicon" "R.Poly")
(sdegeo:chop-domain (list 0.0 0.0 1.2 0.4 1.2 0.6 0.6 0.6 0.6 0.4 0.0
0.4))

Figure 67 Trimming a 3D structure: (left) initial structure and (right) trimmed structure

Coordinate Systems and Transformations

Sentaurus Structure Editor uses the concept of work planes to define a coordinate system.
The name of the work plane refers to the fact that any 2D geometric object is created in the
xy plane of the currently used coordinate system. In addition, certain 3D GUI-based
geometric operations use the work plane as the plane of reference.
Changing the work plane only affects newly created objects (existing objects can be moved,
rotated, and reflected using transformations).
Sentaurus Structure Editor itself makes no assumptions about the unit of length used to
define a geometric object. Other TCAD Sentaurus tools, such as Sentaurus Device,
however, assume that the unit of length is 1 µm. In this indirect sense, the effective default
unit of length in Sentaurus Structure Editor is 1 µm.

Sentaurus™ Structure Editor User Guide 151

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

Sentaurus Structure Editor internally performs geometric operations with finite precision.
Therefore, it is recommended to use a length scale in which the typical device dimensions
are of the order of 1. For example, it is recommended to use nanometer rather than
micrometer for a hypothetical device that measures only a few nanometers in length. In this
case, it becomes necessary to scale the device structure upon saving the final boundary and
the mesh input file. Sentaurus Structure Editor provides functions for scaling a device
structure as well as meshing information before exporting the final boundary and mesh
command file.

Work Planes
To define and activate a new work plane:
1. Choose Draw > Work Planes.
The Work Planes dialog box opens.
2. Enter a name for the new work plane, the coordinates of the new origin, as well as the
direction vectors for the x- and y-axis.
3. Click Set to define the new work plane.
4. Select the newly created entry from the Defined Work Planes list, and click Activate to
activate the new work plane.

Figure 68 Work Planes dialog box

The corresponding Scheme commands are:

(sdegeo:define-work-plane wp-name origin-position x-position
y-position)
(sdegeo:set-active-work-plane wp-name)

Sentaurus™ Structure Editor User Guide 152

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

By default, Sentaurus Structure Editor uses the ‘base’ work plane, which is associated with
a global coordinate system. The base work plane is defined as the xy plane at z = 0.
There are also two other predefined work planes. The ‘wp_xz’ work plane is defined as the
xz plane at y = 0, and the ‘wp_yz’ work plane is defined as the yz plane at x = 0, both with
respect to the global coordinate system. When you define and activate a different ‘work
plane,’ then for all subsequent geometric operations, all coordinates are interpreted with
respect to this new coordinate system.
To activate any work plane that has already been defined, select the required work plane
from the Defined Work Planes list (see Figure 68).
The Work Planes dialog box and the Scheme command use different ways to define the new
coordinate system. The dialog box asks for the direction vectors for the x- and y-axis. While
the Scheme command uses three positions to define the work plane.
px = po + ex
The two definitions are related using the expression:
py = po + ey
where p o , p x , and p y are the positions origin-position, x-position, and y-position
used by the Scheme command, respectively, and e x and e y are the direction vectors for the
x-axis and y-axis used by the dialog box.
If direction vectors do not have unit length, they are normalized. If the y-axis is not
orthogonal to the x-axis, only the orthogonal component is considered. The z-axis is defined
by the right-hand rule.
The following example shows how to create the six faces of a unit cube by drawing the same
unit rectangles in different work planes:
(sdegeo:set-active-work-plane "base")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"WP.BASE")

(sdegeo:set-active-work-plane "wp_xz")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Oxide"
"WP.XZ")

(sdegeo:set-active-work-plane "wp_yz")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "PolySi"
"WP.YZ")

(sdegeo:define-work-plane "base_1" (position 0 0 1) (position 1 0 1)

(position 0 1 1))
(sdegeo:set-active-work-plane "base_1")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"WP.BASE_1")

(sdegeo:define-work-plane "wp_xz_1" (position 0 1 0) (position 1 1 0)

(position 0 1 1))
(sdegeo:set-active-work-plane "wp_xz_1")

Sentaurus™ Structure Editor User Guide 153

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Oxide"

"WP.XZ_1")

(sdegeo:define-work-plane "wp_yz_1" (position 1 0 0) (position 1 1 0)

(position 1 0 1))
(sdegeo:set-active-work-plane "wp_yz_1")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "PolySi"
"WP.YZ_1")

Work planes do not have to be axis aligned. The following script creates a shifted and tilted
work plane:
(sdegeo:set-active-work-plane "base")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"WP.BASE")

(sdegeo:define-work-plane "wp_shiftandtilt" (position 0.5 0.5 0)

(position 0.5 1.5 0) (position 1.5 0.5 1))
(sdegeo:set-active-work-plane "wp_shiftandtilt")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Nitride"
"WP.shiftandtilt")

Existing work planes can be deleted using the Work Planes dialog box or the Scheme
command:
(sdegeo:delete-work-plane wp-name)

When interactive drawing tools are used, the operations are always performed in the active
work plane. Even when the view is rotated, the pointer always moves in the xy plane of the
active work plane.
If a planar face of an existing 3D body is selected, before choosing Draw > Work Planes,
the data that is needed for the work plane definition will be extracted automatically from the
selected face, and most fields in the Work Plane dialog box will be already filled. The origin
is set to the center of the selected face. The x-axis and y-axis are selected as the principal
axes of the selected face. A work plane defined in this way will be the plane in which the
selected face lies.

Local Coordinate Systems

In Sentaurus Structure Editor, the coordinate systems feature offers an alternative way to
define work planes. The differences are that:
• The coordinate systems method defines the new work plane with respect to the currently
active work plane, instead of the global coordinate system.
• This method uses the rotation angle around the current z-axis to define the coordinate
system, instead of defining the coordinate axis directly.

Sentaurus™ Structure Editor User Guide 154

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

To define the local coordinate system:

1. Choose Draw > Coordinate Systems.
The Coordinate Systems dialog box opens.
2. Enter a name for the local coordinate system, the origin in the current xy plane, and a
rotation angle.
3. Click Set to define the new work plane.

4. Select the newly created entry from the Defined Coordinate Systems list, and click
Activate to activate the new work plane.
5. To delete a local coordinate system, select it from the Defined Coordinate Systems list,
and click Delete.
The corresponding Scheme commands are:
(sdegeo:define-coord-sys "name" origin_x origin_y angle)
(sdegeo:set-active-coord-sys "name")
(sdegeo:delete-coord-sys "name")

Device Scaling
The Scheme command sdegeo:scale is used to scale all of the geometric bodies and Ref/
Eval windows. The Scheme command sdedr:write-scaled-cmd-file is used to scale all
refinement settings while writing the mesh command file.
The corresponding Scheme commands are:
(sdegeo:scale entity-list scale-factor-x scale-factor-y
[scale-factor-z])
(sdedr:write-scaled-cmd-file file-name scale-factor)

Sentaurus™ Structure Editor User Guide 155

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

For example, if the device structure and meshing strategy were defined using nanometer as
the unit of length, use Scheme commands such as the ones given here to export the device
boundary and the mesh command file in micrometers:
(define scale-factor 1000)
(sdegeo:scale (part:entities) scale-factor scale-factor)
(sdeio:save-tdr-bnd (get-body-list) "Scaled-to-um_bnd.tdr")
(sdedr:write-scaled-cmd-file "Scaled-to-um_msh.cmd" scale-factor)
(system:command "snmesh Scale-to-um_msh")

These commands are not available from the GUI.

Note:
Previously, the command sdedr:write-scaled-cmd-file scaled Ref/Eval
windows. Instead, Ref/Eval windows can be scaled together with geometric
regions, using the sdegeo:scale command. Therefore, sdegeo:scale must be
called first, before the command sdedr:write-scaled-cmd-file is called.

After setting the Scheme variable global-scaling to a value other than 1.0 in the
command-line window with:
(set! global-scaling 2.0)

scaled device structures and mesh command files can be saved by choosing Mesh > Build
Mesh, with Scheme commands such as:
(set! global-scaling 1000.0)
(sde:build-mesh "Scaled-to-um_msh")

Entity Transformations: Scaling, Translation, Rotation, and

Reflection
Several different Scheme functions and GUI operations can be used to perform basic
geometry transformation operations on some or all top-level entities of the device as well as
on Ref/Eval windows.
A top-level entity is at the highest level in the entity hierarchy list (that is, no other entity
refers to that entity). For example, a face of a solid body (s_b) is not a top-level entity, since
the solid body contains the face. (The (entity:faces s_b) command returns the particular
face.) Similarly, a linear edge of a sheet body is not a top-level entity. However, if the edge
was generated separately using the edge:linear command, for example, then it is a
top-level entity.
The Transform Operations dialog box is used to perform basic transformations. It is
displayed by choosing Edit > Transform. It has different tabs for scaling, translation,
rotation, and reflection operations.

Sentaurus™ Structure Editor User Guide 156

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

Each transform mode has a Target Entities list, which lists all objects (2D and 3D bodies) to
which the transformation can be applied. The target entities can be selected from this list.
The selected entities are highlighted. Selection from the GUI is also possible. In that case,
the target entities must be selected from the GUI, and the corresponding entity IDs will be
highlighted in the Target Entities list.
The translation, rotation, and reflection operations create new bodies if the Transform Copy
option is selected. The newly created bodies will inherit the material property from the parent
body. Region names are also inherited, but an additional string will be attached to the region
names to provide unique region names.
A counter is associated with each type of transformation. In each transformation, the repeat
number is also counted. For example, if the name of the parent entity is region_1 and the
fifth transformation is being performed, the newly created entity will be called region_1_t5.
If a number is entered in the Repeat Operation field and, for example, it is set to 3, the new
regions will be called region_1_t5_r1, region_1_t5_r2, and region_1_t5_r3.

Local Scaling of Entities

To scale one or more entities:
1. Choose Edit > Transform.
The Transform Operations dialog box opens.

2. Select one or more entities in the Target Entities list.

Sentaurus™ Structure Editor User Guide 157

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

3. Click the Scale tab.

4. Select Selected Method.
5. Enter a scaling factor for the x-, y-, and z-axis.
6. Click OK.
The scaling operation can be applied to top-level entities (bodies) only (these are either
geometric bodies, which are part of the model geometry, or Ref/Eval windows). Nonuniform
scaling is also supported. The scaling factors cannot be zero. To suppress scaling in a given
direction, enter a scaling factor of 1.
The corresponding Scheme command is:
(sdegeo:scale-selected entity|entity-list
(transform:scaling x-scale y-scale z-scale))

For example, the following Scheme commands scale a sphere to become a flat ellipsoid:
(define SPHERE (sdegeo:create-sphere (position 0 0 0) 1 "Silicon"
"region_1"))
(sdegeo:scale-selected SPHERE (transform:scaling 0.5 2 4))

Note:
Scaling is performed about the geometry center of each entity. This means
entities that were touching before the scaling will either overlap or be disjoint after
the scaling. Therefore, this operation is not intended to scale entire device
structures. Use the operations discussed in Device Scaling on page 155 for this
purpose.

Difference Between sdegeo:scale and sdegeo:scale-selected

Different scaling operations are available:
• The sdegeo:scale-selected Scheme extension scales each body about its own
geometric center (independently from other bodies). In this case, overlaps might be
created, which are removed automatically, based on the selected Boolean overlap
refinement rule.
• The sdegeo:scale Scheme extension multiplies all vertex coordinates with the specified
scaling factors. The scaled model will be similar to the original model (therefore, no
overlap removal is necessary).
For example:
(sde:clear)
(define mb1 (sdegeo:create-rectangle (position 0 0 0)
(position 10 5 0) "Silicon" "mb1"))
(define mb2 (sdegeo:create-rectangle (position 8 5 0)
(position 12 9 0) "PolySilicon" "mb2"))

Sentaurus™ Structure Editor User Guide 158

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

(bbox mb1)
;; (#[ position 0 0 0 ] . #[ position 10 5 0 ])
(bbox mb2)
;; (#[ position 8 5 0 ] . #[ position 12 9 0 ])
(sdegeo:scale (list mb1 mb2) 2 2 1)
(bbox mb1)
;; (#[ position 0 0 0 ] . #[ position 20 10 0 ])
(bbox mb2)
;; (#[ position 16 10 0 ] . #[ position 24 18 0 ])

(roll)
(sdegeo:set-default-boolean "ABA")
(sdegeo:scale-selected (list mb1 mb2) (transform:scaling 2 2 1))

(roll)
(sdegeo:set-default-boolean "BAB")
(sdegeo:scale-selected (list mb1 mb2) (transform:scaling 2 2 1))
;; the sdegeo:scale-selected function scales each body (independently
;; from each other) about the geometric center of the given body.

Figure 69 Difference between sdegeo:scale and sdegeo:scale-selected: (top) scaling using

sdegeo:scale and (bottom) scaled models using sdegeo:scaled-selected

Original model Scaled model, using sdegeo:scale

Before automatic overlap removal With the “New Replaces Old” With the “Old Replaces New”
is applied to the scaled bodies overlap removal rule overlap removal rule

Sentaurus™ Structure Editor User Guide 159

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

Translation
The translation operation is always performed with respect to the currently active coordinate
system.
To translate one or more entities:
1. Choose Edit > Transform.
The Transform Operations dialog box opens.
2. Select one or more entities from the Target Entities list.
3. Click the Translate tab.
4. Select Selected Method.
5. Enter the coordinates of the translation vector, or click Pick Vector and click the starting
point and endpoint of the translation vector in the view window.

6. Select Transform Copy if a copy of the original entities should remain at the initial
location.
7. If a nonzero Repeat Operation value is entered, the translation operation is performed
multiple times for the selected entities.
8. Click OK.

Sentaurus™ Structure Editor User Guide 160

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

The corresponding Scheme command is:

(sdegeo:scale-selected entity|entity-list
(transform:translation gvector) copy-flag repeat-counter)

For example, the following Scheme commands creates a string of four simple 3D MOSFET
structures:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.2 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.5 0.5) (position 1.2 0.8 1.0)
"Oxide" "R.STI")
(sdegeo:create-cuboid (position 0.4 0.0 1.0) (position 0.8 0.6 1.1)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position 0.4 0.0 1.1) (position 0.8 0.6 1.5)
"PolySilicon" "R.Poly")
(sdegeo:translate-selected (get-body-list)
(transform:translation (gvector 1.2 0 0)) #t 3)

Figure 70 A string of 3D MOSFETs is created using the Transform Copy option and by
entering a repeat number value

Rotation
Rotation operations are always performed with respect to the currently active coordinate
system.
To rotate one or more entities:
1. Choose Edit > Transform.
The Transform Operations dialog box opens.
2. Select one or more entities from the Target Entities list.
3. Click the Rotate tab.
4. Select Selected Method.

Sentaurus™ Structure Editor User Guide 161

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

5. Define the axis of rotation by entering a point on the axis and a direction vector, or click
Pick Point/Axis and click a point in the view window.
In this case, the rotation axis will point into the current view plane. Enter also the rotation
angle.

6. Select Transform Copy if a copy of the original entities should remain at the initial
location.
7. If a nonzero Repeat Operation value is entered, the rotation operation is performed
multiple times for the selected entities.
8. Click OK.
The corresponding Scheme command is:
(sdegeo:rotate-selected entity|entity-list
(transform:rotation position gvector angle) copy-flag repeat-counter)

For example, the following Scheme commands create a moon sickle:

(define CIRCLE (sdegeo:create-circle (position 0 0 0) 1
"Silicon" "region_1"))
(sdegeo:set-default-boolean "BAB")
(sdegeo:rotate-selected CIRCLE (transform:rotation (position 1 0 0)
(gvector 0 0 1) -30) #t 0)
(sdegeo:delete-region CIRCLE)

Sentaurus™ Structure Editor User Guide 162

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

Reflection
To reflect one or more entities:
1. Choose Edit > Transform.
The Transform Operations dialog box opens.

2. Select one or more entities from the Target Entities list.

3. Click the Reflect tab.
4. Define the reflection plane by entering a point on the plane and a normal vector, or click
Pick Point/Norm and click a point in the view window.
In this case, the normal vector will point to the right of the current view plane.
5. Define the axis of rotation by entering a point on the axis and a direction vector, or click
Pick Point/Axis and click a point in the view window.
In this case, the rotation axis will point into the current view plane. Enter also the rotation
angle.
6. Click OK.
The corresponding Scheme command is:
(sdegeo:mirror-selected entity|entity-list
(transform:reflection position gvector) copy-flag)

Sentaurus™ Structure Editor User Guide 163

V-2024.03
Chapter 4: Generating Geometric Structures
Coordinate Systems and Transformations

For example, the following Scheme commands reflect the half-MOSFET structure to form a
full device:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.2 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.5 0.5) (position 1.2 0.8 1.0)
"Oxide" "R.STI")
(sdegeo:create-cuboid (position 0.4 0.0 1.0) (position 0.8 0.6 1.1)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position 0.4 0.0 1.1) (position 0.8 0.6 1.5)
"PolySilicon" "R.Poly")

(sdegeo:mirror-selected (get-body-list)
(transform:reflection (position 0 0 0) (gvector 0 -1 0)) #t)

Scheme Functions for Transformations

Scheme functions are available to perform transformation operations.
Table 21 Scheme functions for transformations

Scheme function Description

sdegeo:mirror-selected Reflects the specified entities.

sdegeo:rotate-selected Rotates the specified entities.

sdegeo:scale-selected Scales the specified entities.

sdegeo:translate-selected Translates the specified entities.

transform:reflection Creates a transform to mirror an object through an axis.

transform:rotation Creates a transform to rotate an object about an axis.

transform:scaling Creates a scaling transform.

transform:translation Creates a translation transform.

Sentaurus™ Structure Editor User Guide 164

V-2024.03
5
Structure Generation Using Etching and
5

Deposition

This chapter describes how to generate process-oriented structures in Sentaurus Structure

Editor using the process emulation mode.

Overview of Process Emulation

The three-dimensional process emulation (Procem) module of Sentaurus Structure Editor
offers a set of Scheme functions to emulate TCAD process steps such as deposition,
etching, and implantation. The Procem Scheme extensions can be accessed either from the
command-line window or by running Sentaurus Structure Editor in batch mode.
Note:
The Procem functions are not available from the graphical user interface.

A basic knowledge of the Scheme language is required to use Procem. A thorough

knowledge of the Scheme programming language is not required in order to work only with
single process steps, without using variables, flow controls, or conditionals. The examples
in this chapter provide sufficient background for users to write simple process emulation
scripts in Scheme.
In Procem, the process steps are emulated with pure geometric operations. Each process
step is translated to a sequence of geometric operations including:
• Boolean operations
• Local operations on the boundary (for example, face offsettings)
• Boundary repair and healing (to perform delooping and to resolve topology changes
during process emulation)
Different process emulation commands are available, and these commands usually start
with the sdepe string.

Sentaurus™ Structure Editor User Guide 165

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Base Coordinate System Orientation

Procem provides functions to:

• Generate mask layouts
• Import mask layouts
• Generate substrate layers
• Perform different patterning operations
• Perform anisotropic and isotropic deposition
• Perform etching operations with or without a protect region (patterned masks)
• Perform a fill operation
• Polish a device
• Generate boundary output for meshing
• Implant doping species
• Create complex interconnect devices
Procem has a well-defined scripting language, which provides high-level functions for TDR
input and output, mask layout definition and input, and geometry generation.
Procem has several high-level procedures to perform process emulation steps. These
functions can be embedded in a Scheme script to generate models. The Procem functions
can be freely mixed with other sdegeo functions to generate 3D devices.
The generated models and the flow steps are visible in the GUI. Other GUI operations and
Scheme functions can be applied to the generated model between process steps. The
model will always remain conformal and ready for a tessellated boundary file generation.
Typically, a process emulation flow contains several commands to generate or load masks,
to create the substrate layer, and to perform patterning operations, deposition, etching, and
implantation steps.

Base Coordinate System Orientation

Two different coordinate system orientations can be used during process emulation.

Unified Coordinate System Orientation

In the unified coordinate system (UCS) orientation, the base of the 3D model is placed in the
yz plane (at x = 0 by default), and the open top surface of the model is in the –x-direction (so
a ray from -1,0,0 would hit the top exposed surface). When this coordinate system

Sentaurus™ Structure Editor User Guide 166

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Mask Layout Input and Mask Generation

orientation is followed, process emulation operations (such as deposition and etching) are
performed in the –x-direction.

Traditional (DF–ISE) Coordinate System Orientation

Note:
Using the traditional coordinate system orientation is not recommended. Use the
UCS orientation instead.

The external boundary of the simulation domain is defined with respect to the global
coordinate system. The external domain boundary is placed in the xy plane. All process
steps are performed over the domain boundary in the positive z-direction (up direction). The
default base is at z = 0.
If process steps are to be performed on an existing model, the model might need to be
transformed in such a way that the top of the device faces the positive z-direction. This can
be accomplished by a simple entity transformation using sdegeo:rotate-selected.

Selecting the Coordinate System Orientation

The default coordinate system orientation for process emulation is selected in such a way
that the base plane is the yz plane and the process steps are performed in the –x-direction.
The Scheme command sde:set-process-up-direction specifies which coordinate
system orientation is used during process emulation.
If you use the Sentaurus Process–Sentaurus Structure Editor interface to perform process
emulation, the Scheme script generated by Sentaurus Process will contain instructions to
select the correct coordinate system orientation (UCS) automatically.
Note:
The cross section of the model at the base location in the selected base plane
(the external boundary of the simulation domain) must be rectangular.

Mask Layout Input and Mask Generation

Procem supports mask layout file input. There are several ways to define and initialize mask
layouts:
• Use the sdeicwb:generate-mask-by-layer-name command to generate the mask
from an imported .mac (ICWB) mask.
• Read in a GDSII file using the sdeicwb:gds2mac command.

Sentaurus™ Structure Editor User Guide 167

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Mask Layout Input and Mask Generation

• Use DF–ISE layout (.lyt) files directly.

• Define mask layouts directly in Procem using the sdepe:generate-mask command.
Table 22 lists the Procem functions that support mask layout input and output, and
generation operations.
Table 22 Procem mask layout–related operations

Scheme function name Description

exists-empty-mask-name Checks whether the empty mask exists.

exists-mask-name Checks whether the mask exists.

find-mask Returns the entity ID of a mask.

get-empty-mask-list Returns the defined empty masks in a list.

get-mask-list Returns the defined masks in a list.

mask-refevalwin-extract-2d Converts a mask to a 2D Ref/Eval window.

mask-refevalwin-extract-3d Converts a mask to a 3D Ref/Eval window.

sde:hide-mask Removes the mask from the view window.

sde:offset-mask Offsets (biases) the specified mask.

sde:show-mask Shows the mask in the view window.

sde:xshow-mask Exclusively shows the mask in the view window.

sdeicwb:contact Creates contacts in a mask-driven manner.

sdeicwb:gds2mac Converts an existing general mask layout file (GDSII)

to an ICWB .mac layout. The converted .mac layout
file is loaded automatically.

sdeicwb:generate-mask-by-layer-name Generates the mask from an imported .mac (ICWB)

mask.

sdeio:read-dfise-mask Loads a layout (.lyt) file to the modeler.

sdepe:extend-masks Extends all masks about the given minimum and

maximum values.

sdepe:generate-empty-mask Creates an empty mask.

Sentaurus™ Structure Editor User Guide 168

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Mask Layout Input and Mask Generation

Table 22 Procem mask layout–related operations (Continued)

Scheme function name Description

sdepe:generate-mask Creates a mask.

sdepe:trim-masks Trims all masks with the defined domain boundary.

Mask Generation
Examples of mask layout generation are:
(sde:clear)
(sdepe:generate-mask "DEMO-MASK-1" (list (list 2 2 5 2 5 3 2 3)
(list 5 6 9 6 7 9)))
(sdepe:generate-mask "DEMO-MASK-2" (list (list 14 7 13.73 8 13 8.73
12 9 11 8.73 10.27 8 10 7 10.27 6 11 5.27 12 5 13 5.23 13.73 6)))
(sdepe:generate-mask "DEMO-MASK-3" (list (list 11 3 10.73 4 10 4.73 9
5 8 4.73 7.27 4 7 3 7.27 2 8 1.27 9 1 10 1.23 10.73 2)))

(sde:clear)
(sdepe:generate-mask "MASK1" (list (list 1 1 3 3) (list 7 7 9 9)))
(sdepe:generate-mask "MASK2" (list (list 7 1 9 3 3 9 1 7)))
(sdepe:generate-mask "MASK3" (list (list 2 1 3 2 2 3 1 2)
(list 8 1 9 2 8 3 7 2) (list 8 7 9 8 8 9 7 8)
(list 2 7 3 8 2 9 1 8)))
(sdepe:generate-mask "MASK4" (list (list 3 3 7 7)))
(sdepe:generate-mask "MASK5" (list (list 3 0 8 2) (list 8 3 10 7)
(list 3 8 7 10) (list 0 3 2 7)))

Figure 71 Example of a mask layout

Sentaurus™ Structure Editor User Guide 169

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

Offsetting (Biasing) Mask

The Scheme extension sde:offset-mask can be used to offset (bias) a mask.

Figure 72 Mask offsetting: (left) original mask, (middle) mask after one offset step, and (right)
mask after an additional offset step (using the same offset value)

TCAD Layout Reader of Sentaurus Structure Editor

The TCAD layout reader of Sentaurus Structure Editor provides a file-based interface
between Silicon WorkBench and Sentaurus Structure Editor.
The interface can be used to perform layout-driven structure and mesh generation. This
interface supports 3D structures exclusively and its key features are:
• Loading the TCAD layout (optional rescaling)
• Layout query functions
• Selecting a simulation domain
• Applying stretches
• Creating masks
• Mask-driven meshing
• Mask-driven contact assignment
For more information about the Silicon WorkBench–TCAD Sentaurus interface, see
Sentaurus™ Process User Guide, Chapter 12.
Figure 73 shows an SRAM cell layout as well as the 3D structure generated using this
layout.

Sentaurus™ Structure Editor User Guide 170

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

Figure 73 (Left) Layout of SRAM cell and (right) corresponding 3D structure generated using
process emulation mode of Sentaurus Structure Editor

Loading TCAD Layouts

Before the TCAD layout can be used in Sentaurus Structure Editor, it must be loaded.
To load a TCAD layout, use:
(sdeicwb:load-file layout-filename scaling-factor)

The scaling factor allows you to change the layout units to those used in Sentaurus Structure
Editor. Use a scaling factor of 1 if no scaling is needed.
For example, to load the TCAD layout file SRAM_lyt.mac (which is written in nanometer) into
Sentaurus Structure Editor, which here uses micrometer as the unit of length, use the
command:
(sdeicwb:load-file "SRAM_lyt.mac" 0.001)

Finding Layer Names and Layer IDs

Each layer in the TCAD layout file has a unique ID of the form <int>:<int>, for example,
3:0. A layer can also have an optional explicit layer name such as NWELL. If no explicit layer
name has been set in Silicon WorkBench, the TCAD layout reader uses the layer ID as the
default layer name. The TCAD layout reader refers to layers always by the layer name.
To list the layer names defined in the TCAD layout file:
(sdeicwb:get-layer-names)

For example:
(define LNames (sdeicwb:get-layer-names))
; -> icwb: LNames: (Active NWELL SRAM_mesh Acc_mesh 51:0)

Sentaurus™ Structure Editor User Guide 171

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

To list the layer IDs defined in the TCAD layout file:

(sdeicwb:get-layer-ids)

For example:
(define LIDs (sdeicwb:get-layer-ids))
; -> icwb: LIDs: (1:0 2:0 43:0 44:0 51:0)

Applying a Stretch
The stretch utility provides a convenient way to parameterize a layout by inserting a
uniformly stretched segment into the layout. This feature can be used, for example, to
generate a set of transistors that have different gate lengths but are otherwise identical.

Figure 74 (Left) Snapshot of a simple Silicon WorkBench layout with a stretch utility line and
(right) effective layout seen by Sentaurus Structure Editor when the layout is loaded
with a positive stretch amount

A stretch line must be first defined in Silicon WorkBench. The stretch amount is set after
loading the TCAD layout with the Scheme command:
(sdeicwb:stretch stretch-name stretch-amount)

For example:
(sdeicwb:stretch "Lgate" 0.2)

Selecting the Simulation Domain

The active simulation domain is selected with the Scheme command:
(sdeicwb:set-domain domain-name | list-of-domain-names)

Sentaurus™ Structure Editor User Guide 172

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

Finding Coordinates of Bounding Box

To find the coordinates of the bounding box that is defined with regard to the global layout
coordinates, use the commands:
process-up-direction "+z" "-x"
(sdeicwb:get-xmin) (sdeicwb:get-ymin)
(sdeicwb:get-xmax) (sdeicwb:get-ymax)
(sdeicwb:get-ymin) (sdeicwb:get-zmin)
(sdeicwb:get-ymax) (sdeicwb:get-zmax)

To find the coordinates of the bounding box that automatically re-centers the simulation
domain to start at the origin, use the commands:
(sdeicwb:get-left)
(sdeicwb:get-right)
(sdeicwb:get-front)
(sdeicwb:get-back)

Use these commands, for example, to define the process emulation domain:
(define L (sdeicwb:get-left)) (define B (sdeicwb:get-back))

(define R (sdeicwb:get-right)) (define F (sdeicwb:get-front))

(sdepe:define-pe-domain (list L B R F))

Creating and Using Masks

To create a mask, use:
(sdeicwb:generate-mask-by-layer-name maskname layername)

For example:
(sdeicwb:generate-mask-by-layer-name "Active" "2:0")

The created mask can be used, for example, in the sdepe:pattern command:
(sdepe:pattern "mask" "Active" "polarity" "light" "material" "Resist"
"thickness" 1 "type" "iso")

Support for Coordinate System Orientation

Sentaurus Structure Editor supports both the UCS orientation and the traditional coordinate
system orientation (see Base Coordinate System Orientation on page 166).
To allow for the creation of Sentaurus Structure Editor input files that support the UCS as
well as the traditional simulation domains, a set of utilities has been implemented.

Sentaurus™ Structure Editor User Guide 173

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

Figure 75 shows the conventions for both coordinate system orientations.

Figure 75 Orientation of axes for (left) UCS orientation where the x-axis points downward and
(right) traditional coordinate system orientation where the z-axis points upward

The concepts of top and bottom are introduced, which apply to the UCS orientation and the
traditional coordinate system orientation:
• Global or region top coordinate:
(sdeicwb:get-global-top)

(sdeicwb:get-region-top RegionID)

Returns xmin (UCS) or zmax (traditional).

• Global or region bottom coordinate:
(sdeicwb:get-global-bot)

(sdeicwb:get-region-bot RegionID)

Returns xmax (UCS) or zmin (traditional).

Sentaurus™ Structure Editor User Guide 174

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

• Translate a coordinate up:

(sdeicwb:up A B)

Returns A – B (UCS) or A + B (traditional).

• Translate a coordinate down:
(sdeicwb:down A B)

Returns A – B (UCS) or A + B (traditional).

Layout-Driven Contact Assignment

The sdeicwb:contact command creates contacts, for subsequent device simulations, that
are tied to a mask or a text label in the TCAD layout file.
The sdeicwb:contact command supports both box-type and point-type contacts. See
sdeicwb:contact on page 715 for details and examples.

Layout-Driven Meshing
Layers can also be used for layout-driven meshing. The command
sdeicwb:define-refinement-from-layer serves as an interface between the Silicon
WorkBench TCAD layout and the Sentaurus Structure Editor commands
sdedr:define-refeval-window, sdedr:define-refinement-size, and
sdedr:define-refinement-placement by automatically obtaining the lateral dimension of
the refinement box from the specified Silicon WorkBench layers, taking the vertical
refinement box dimensions from the argument list. It also generates 2D and 3D refinement
size settings with dimension-independent syntax.
The syntax for this command is:
(sdeicwb:define-refinement-from-layer "lname" lname ["rname" rname]
["oversize" oversize] "top" top "bot" bot "dlrmin" dlrmin
"dlrmax" dlrmax "dbtmin" dbtmin "dbtmax" dbtmax
["dbfmin" dbfmin] ["dbfmax" dbfmax]
["material" material] ["region" region] ["use-bbox" use-bbox])

If no explicit refinement name (rname) is given, the layer name (lname) is used to create a
unique refinement name.
For a 3D IC WorkBench simulation domain, a refinement window is created for each
polygon found in the specified layers. The lateral extent of respective refinement windows is
given by the bounding box of the polygon. The extent of the refinement window along the
height direction (UCS: negative x-axis, traditional: z-axis) is given by the values of the top
and bot parameters.

Sentaurus™ Structure Editor User Guide 175

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

The arguments dlrmin and dlrmax define the minimum and maximum refinement in the
left–right dimension, respectively.
The parameters dbtmin and dbtmax define the refinement in the bottom–top dimension,
and dbfmin and dbfmax define the refinement in the back–front dimension.
The name of the refinement window has the form RPlace.<rname>_<counter>. The name
of the refinement size setting is RSize.<rname>.
You can use the "material" and "region" arguments to restrict the refinement to the
specified bodies within the refinement box. The "material" argument is followed by either
a DATEX material name or a list of materials. For example:
"material" "Silicon"
"material" (list "Silicon" "PolySilicon" ...)

The "region" argument is followed by either a region name or a list of region names. For
example:
"region" "region_1"
"region" (list "region_1" "region_2" ...)

The argument oversize allows you to increase the area of refinement beyond the extent of
the actual segments or polygon bounding boxes. A nonzero oversize value is subtracted
from or added to the minimum and maximum segment or the polygon bounding box
coordinates, respectively.
Note:
To use oversize for a non-rectangular mask while continuing to avoid
unnecessary refinement, use Silicon WorkBench to break, for example, an
L-shaped polygon into two rectangular polygons such that the union of the
polygon bounding boxes coincides with the shape itself.

The argument use-bbox (default value #t or true) specifies that when creating 3D
refinement volumes from 2D polygons, the bounding box of the polygon must be used as the
basis for a cuboid volume. If set to #f or false, the polygon shape itself is used to create a
3D prism using the polygon as the top and bottom faces, with rectangular sides. This
argument is used only for 2D polygons in 3D structures. When use-bbox is set to #f or
false, oversize is ignored.

You can make explicit calls to sdedr:define-refinement-function to activate other

meshing-specific options such as refinement on doping gradients or interface refinements.
Note:
Layout-driven refinement is available only for the area under the given layer itself,
not for the inverse of the layer. If refinement is needed in an area not covered by
the layer, it is necessary to create the inverse of the layer as an auxiliary layer
explicitly in Silicon WorkBench.

Sentaurus™ Structure Editor User Guide 176

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
TCAD Layout Reader of Sentaurus Structure Editor

The following example shows how to use an auxiliary layer SRAM_mesh for refinement (this
layer is highlighted in red in Figure 76):
(sdeicwb:define-refinement-from-layer
"lname" "SRAM_mesh" "rname" "sram_ch"
"oversize" 0.0 "top" SiTop "bot" (sdeicwb:down SiTop 0.05)
"dlrmax" 0.03 "dlrmin" 0.0035
"dbtmax" 0.015 "dbtmin" 0.0035
"dbfmax" 0.03 "dbfmin" 0.0035)
(sdedr:define-refinement-function "RSize.sram_ch" "MaxLenInt "Silicon"
"Oxide" 0.005 2.0)
(define BBoxes (sdeicwb:get-polygon-bounding-boxes-by-layer-name LNAME))

Figure 76 SRAM cell layout with SRAM_mesh auxiliary layer in red

Figure 77 shows a 3D mesh of an SRAM cell (only silicon regions are shown). The areas in
which the layout-driven mesh refinement is applied are indicated by red circles.

Figure 77 Three-dimensional structure of SRAM cell showing position of SRAM_mesh layer

Sentaurus™ Structure Editor User Guide 177

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Process Emulation Commands

Scheme functions (with the prefix sdepe) perform process emulation operations.
Table 23 Scheme functions for process emulation operations

Scheme function Description

sdepe:add-substrate Generates the first device layer (substrate).

sdepe:define-pe-domain Defines the simulation domain.

sdepe:depo Performs a deposition step.

sdepe:etch-material Performs an etching step.

sdepe:fill-device Performs a fill operation. (Fills the device with material up

to the specified height.)

sdepe:icon_layer Generates a deposited, patterned, filled planar layer. (The

initial structure must be planar.)

sdepe:pattern Performs a pattern step. The used mask must be defined

beforehand.

sdepe:photo Performs a pattern step with a flat patterned top. The

used mask must be defined beforehand.

sdepe:polish-device Performs a polish step. (Removes the top part of a

device.)

sdepe:remove Removes the specified region or material.

Implantation

sdepe:doping-constant-placement Defines and implants a constant doping profile.

sdepe:implant Implants an already defined analytic doping profile.

See Appendix A on page 341 for detailed descriptions of these Scheme functions.

Syntax and Keywords

All process emulation commands (sdepe) use the same conventions for argument
specification. In the Procem commands, each variable is preceded by a keyword such as

Sentaurus™ Structure Editor User Guide 178

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

"material", "region", "thickness", and "step". The keywords are followed by the
actual value, forming a keyword–value argument pair.
The argument pairs can be specified in an arbitrary order in the argument list. For example:
"material" "Silicon" "thickness" H

is equal to:
"thickness" H "material" "Silicon"

Several argument pairs have default values. When the default value is to be used, the
argument pair can be omitted. For example, the default step size is 1. The keyword "step"
can be used to specify a step size; however, if it is 1, it can be omitted. A "step" 10 will
perform the particular operation (deposition, etch, and so on) in 10 steps.
Some argument list items must be specified together. For example, when a rounding is
required, the rounding radius must always be specified using the keyword "radius" and a
numeric value.
Note:
When a keyword is used in the argument list, the corresponding value pair must
be given. Otherwise, the argument list parser fails. For example, if the keyword
"material" is used, a DATEX material string must follow.

Table 24 Process emulation keywords

Keyword Description

"adaptive" This keyword performs the offset in more than one step (if the geometry
requires this for robustness). The offset size in each step is calculated
automatically, based on some geometric considerations. The offsetting
continues in steps until the total deposit thickness is reached. If
"adaptive" is used, in some cases, the number of steps might be
large and the operation can take considerably longer than without this
keyword.
Note:
Use "adaptive" only if the process step fails otherwise.

Type: BOOLEAN
Default: #f if "rounding" option is not set to #t.
#t if "rounding" option is set to #t.
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

Sentaurus™ Structure Editor User Guide 179

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"advanced-rounding" If the "rounding" option is used during deposition before the rounding
operation is performed on the deposited layer, the minimal edge length
is checked and the rounding radius is adjusted not to be greater than
the minimal edge length. This automatic adjustment of the rounding
radius provides more robustness for the rounding algorithm. In some
special cases, this restriction is not needed and rounding with a larger
radius than the minimal edge length is possible. This keyword allows
you to bypass the automatic radius control.
Type: BOOLEAN
Default: #f
Function: sdepe:depo

"algorithm" Different face-offsetting algorithms are available, which can be

activated by the keyword "algorithm". They are "lopx", "lop-move",
"sweep", and "PT".
Type: STRING
Default: If "type" "iso", then "lopx".
If "type" "aniso", then "sweep".
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

"base" For process-up-direction "+z", it is the base (bottom) z-position of

the substrate layer.
For process-up-direction "-x", it is the base (top) x-position of the
substrate layer.
Type: REAL
Default: 0
Function: sdepe:add-substrate

"BC" During directional operations, "BC" can be used to avoid some side
effects around the domain boundary.
Type: STRING ("none", "Extend", "Periodic", "Reflect")
Default: "Extend" for "type" "aniso" ("algorithm" "sweep") and
"none" for "type" "iso" ("algorithm" "lopx")
Function:
sdepe:depo
sdepe:etch-material

Sentaurus™ Structure Editor User Guide 180

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"chamfer" Chamfer distance for chamfered deposition and etching.

Note:
The "chamfer" keyword is completely analogous to "radius", and
the chamfer cutback is interpreted similarly to the rounding radius.
The "vexity" keyword is used in the same way as for rounding.

The keywords "chamfer" and "radius" cannot be used in the same

command. The edges are either chamfered or rounded.
Type: REAL
Default: 0
Function:
sdepe:depo
sdepe:etch-material

"depth" Etch depth.

Type: REAL
Default: 0
Function: sdepe:etch-material

"ebl" If the value is "top", then only the top initially exposed bodies, which
are made of the etch material, are etched even if the complete "depth"
value is not etched away.
If the value is "all", then the thickness of the top layer is estimated
and the etch process continues until the complete "depth" value is
etched.
Type: STRING {"all", "top"}
Default: "all"
Function: sdepe:etch-material

"ext-dist" The applied extension distance when "BC" "Extend" is used during a
directional operation.
Type: REAL
Default: 0 if "BC" is "none". For "BC" "Extend", it is calculated
automatically from the ray direction and from the thickness.
Function:
sdepe:depo
sdepe:etch-material

Sentaurus™ Structure Editor User Guide 181

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"height" If it is not specified in sdepe:fill-device, then the device is filled up

to the maximum z-coordinate (for process-up-direction "+z") or to
the minimum x-coordinate (for process-up-direction "-x").
In sdepe:polish-device, if "height" is given, then the device is
polished up to the specified z-coordinate value (for
process-up-direction "+z") or the specified x-coordinate value (for
process-up-direction "-x").
Alternatively, you can specify "thickness" in sdepe:polish-device,
in which case, the specified value is removed from the top z-position
(for process-up-direction "+z") or from the bottom x-position (for
process-up-direction "-x").
Type:
For process-up-direction "+z", it is the maximum z-coordinate
For process-up-direction "-x", it is the minimum x-coordinate
Default: Maximum z-coordinate
Function:
sdepe:fill-device
sdepe:polish-device

"initial-thickness" When selective deposition is performed, the deposition can be

performed automatically in two steps using this keyword. In the first
step, initial thickness * thickness is offset; in the second step, (1-initial
thickness) * thickness. The initial thickness is a real value between 0
and 1.
Type: REAL
Default: By default, this parameter is not used.
Function: sdepe:depo

"mask" Name of the mask that is used for pattern.

Type: STRING
Default: None
Function: sdepe:pattern

Sentaurus™ Structure Editor User Guide 182

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"material" Specifies the material type that will be used for the operation.
Type: STRING (DATEX material)
Default:
"Silicon" for sdepe:depo and sdepe:add- substrate
"" for sdepe:etch- material
"Resist" for sdepe:pattern
"Gas" for sdepe:fill- device
Function:
sdepe:add-substrate
sdepe:depo
sdepe:etch-material
sdepe:fill-device
sdepe:pattern
sdepe:remove

"overetch" An optional overetch distance for etching.

Type: REAL
Default: 0
Function: sdepe:etch-material

"polarity" Mask polarity for pattern.

Type: STRING {"light", "dark"}
Default: "light"
Function: sdepe:pattern

"radius" Rounding radius for rounded deposition and etch.

Type: REAL
Default: 0
Function:
sdepe:depo
sdepe:etch-material

"ray-vector" The direction vector of the ray for directional deposition and etching.
Type: GVECTOR
Default:
(gvector 0 0 –1) for process-up- direction "+z"
(gvector 1 0 0) for process-up- direction "-x"
Function:
sdepe:depo
sdepe:etch-material

Sentaurus™ Structure Editor User Guide 183

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"region" This keyword specifies a region name for the Procem-generated new
region. If it is not used, the region name is generated automatically in
sequential order. The region name is generated as region_N, where N
is a region counter that starts at 1 and increases sequentially.
Type: STRING
Default: Automatically generated as region_N
Function:
sdepe:add-substrate
sdepe:depo
sdepe:fill-device
sdepe:pattern
sdepe:remove

"rounding" If used, the single "rounding" keyword replaces all other

rounding-related keywords. The rounding radius ("radius") is
computed automatically, and "vexity" is set to "convex".
Type: BOOLEAN
Default: #f
Function:
sdepe:depo
sdepe:etch-material

"selective-material" During regular deposition (when this keyword is not used), all the
exposed surface is covered with the deposited layer. When this
keyword is used, deposition is performed only on that part of the
exposed top surface where the selective material is the exposed
material.
Type: STRING (DATEX material)
Default: None
Function:
sdepe:depo
sdepe:etch-material

Sentaurus™ Structure Editor User Guide 184

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"selective-taper" This keyword can be used with "selective-material" when

"taper-angle" is also used. In this case, the vertical faces of the
newly deposited layer are tapered. (Otherwise, the newly deposited
layers are first united with the complete model, and the vertical side
faces of that body are tapered, and then the original bodies are
subtracted from this body.)
Type: BOOLEAN
Default: #f
Function:
sdepe:depo
sdepe:etch-material

"shadowing" If it is set to #t, then the shadowing effect is taken into consideration.
Type: BOOLEAN
Default: #f
Function:
sdepe:depo
sdepe:etch-material

"steps" Number of steps for the given operation.

Type: INTEGER
Default: 1
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

"taper-angle" Vertical deposited and etched faces are tapered automatically if the
keyword is used with an angle value (in degrees).
Type: REAL
Default: 0
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

Sentaurus™ Structure Editor User Guide 185

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Commands

Table 24 Process emulation keywords (Continued)

Keyword Description

"taper-direction" Specifies the face normals for those axis-aligned planar faces that will
be tapered. The "taper-angle" keyword must be used with this
keyword.
Type:
LIST (STRING) ("x" | "-x" | "y" | "-y" or any combination of
these) for process-up-direction "+z"
LIST (STRING) ("y" | "-y" | "z" | "-z" or any combination of
these) for process-up-direction "-x"
Default: None
Function:
sdepe:depo
sdepe:etch-material

"taper-position" Specifies the base point location for tapered faces.

Type: "top" | "bottom"
Default: "bottom"

"thickness" Thickness value (for deposition and pattern).

Type: REAL
Default: None
Function:
sdepe:add-substrate
sdepe:depo
sdepe:pattern
sdepe:polish-device

"time" During etching, "time" is used instead of a "depth" value. In this

case, the global list called etchrates must be set as well before the
etch command is used.
Type: REAL
Default: None
Function: sdepe:etch-material

"type" Deposition and etching can be "iso" (isotropic) or "aniso"

(anisotropic).
Type: STRING
Default: "iso" (deposition); "aniso" (etching)
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

Sentaurus™ Structure Editor User Guide 186

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Algorithms

Table 24 Process emulation keywords (Continued)

Keyword Description

"vexity" Rounding type for rounded deposition. Possible values are "convex",
"concave", or "all".
Type: STRING
Default: "convex" (deposition); "concave" (etching)
Function:
sdepe:depo
sdepe:etch-material

Process Emulation Algorithms

Different algorithms can be used during process emulation. In each sdepe function, the
algorithm can be specified using the keyword algorithm and the name of the actual
algorithm that will be used during the operation.
The choice of the face-offsetting algorithm depends on the process emulation type. The
isotropic algorithms include "lop-move", "lopx", and "PT". The anisotropic algorithm
includes "sweep" only. If the process emulation algorithm is not supported by the process
emulation type, then the algorithm changes to its default. The default isotropic algorithm is
"lopx" and the default anisotropic algorithm is "sweep".

Table 25 provides some information about how to select the algorithm, depending on the
model and the type of the operation. General models are the ‘native’ CAD-type models that
are generated in Sentaurus Structure Editor. The polyhedral models are typically generated
in a process simulator and are loaded into Sentaurus Structure Editor for further processing.
Table 25 Process emulation algorithms and their application areas

Algorithm Model Process emulation type

"lop-move" General Isotropic

"lopx" General Isotropic

"PT" Polyhedral Isotropic

"sweep" General, polyhedral Anisotropic

Sentaurus™ Structure Editor User Guide 187

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Algorithms

The lop-move Algorithm

The "lop-move" algorithm is a simple algorithm where the exposed body is translated
simply by an offset vector, and Boolean operations are used to find the offset body. This
algorithm is very robust and, in some cases (for example, trench formation), it generates an
acceptable result.

The lopx Algorithm

The "lopx" algorithm is a string algorithm that moves the individual faces of the exposed
top surface, calculates the necessary face–face intersections, and reconstructs the
topologically correct offset surface.
The "lopx" algorithm is used for isotropic operations where the topology can change during
offsetting. It is a complex algorithm that works best when the face connectivity (the number
of faces at a given vertex) is relatively low. The "lopx" algorithm is the default algorithm for
isotropic operations.

The PT Algorithm
The "PT" algorithm is a special algorithm that has been designed to be a fast and robust
algorithm to handle large polyhedral models. Typically, polyhedral models have many planar
faces, with possibly high face connectivity.
The "PT" algorithm is called using "algorithm" "PT". It cannot be applied to models that
contain nonplanar faces. When the "PT" algorithm is used, normal rounding and edge
blending cannot be used. A similar effect to rounding can be achieved with the algorithm by
using the max-chamfer-angle argument.
The "PT" algorithm cannot be combined with any other keywords that would result in a
nonpolyhedral (curved) model. There is some user control that can be applied to the "PT"
algorithm. Table 26 lists these control parameters.
The following parameters must be used with "PT":
• material specifies the DATEX material that will be assigned to the deposited layer.

• thickness specifies the isotropic offset value that will determine the thickness of the
deposited layer.

Sentaurus™ Structure Editor User Guide 188

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Algorithms

Table 26 Procem keywords for PT algorithm

Keyword Description

"max-chamfer-angle" If the angle between two adjacent face-normals is greater than the
specified angle, then chamfer faces are inserted. A nonpositive value
indicates that no chamfer faces are to be inserted between the offset
faces; a value in the range [30., 90.] is usually reasonable for the
chamfer face insertion criteria.
Type: REAL
Default: 30
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

"min-feature-angle" The PT algorithm sorts the exposed faces into face groups. Each face
group is offset separately, creating offset bodies with a uniform offset.
The offset bodies are then connected with chamfer bodies. The
"max-chamfer-angle" parameter determines how many chamfer faces
are inserted. The default value of 45 for "min-feature-angle"
generates good results in most cases.
If the angle between two adjacent face-normals is greater than the
specified angle, the edge between the two faces will be considered a
feature edge.
Type: REAL
Default: 45
Function:
sdepe:depo
sdepe:etch-material
sdepe:pattern

The sweep Algorithm

The "sweep" algorithm is a very robust offsetting algorithm, which can be used for
anisotropic and directional operations where the topology does not change. When the
"sweep" algorithm is used, exposed faces are swept individually and the generated swept
bodies are united using Boolean operations.
When it is applied for directional operations with shadowing, first the silhouette edges are
computed and the faces are grouped by visibility. Only the visible faces are swept so no
topology change occurs. Since there is no topology change, the "sweep" algorithm works
very robustly. It is the default algorithm for anisotropic operations; therefore, anisotropic
operations can be performed robustly using Procem.

Sentaurus™ Structure Editor User Guide 189

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Restrictions on Handling Mixed Models

Restrictions on Handling Mixed Models

If a 3D model is already present, there are some restrictions regarding the model geometry,
when additional Procem steps are to be performed on the model:
• The existing device must be placed in such a way that the base of the device lies in the
xy plane for process-up-direction "+z" or that the base of the device lies in the yz
plane for process-up-direction "-x". All process emulation functions should be
performed on the top of the device (in the +z-direction for process-up-direction "+z"
or in the –x-direction for process-up-direction "-x"). If some rear-side processing is
required, then the model can be transformed before any Procem functions are called.
After the process emulation steps, the model can be transformed back to the original
coordinate system orientation.
• The domain boundary in the base plane must be a convex, simply connected boundary
(a rectangular domain boundary is preferred).
• If the domain boundary is not yet defined, the domain boundary is calculated
automatically based on the existing 3D regions on the device. The global variable
domainboundary stores the domain boundary (wire body).

• All subsequent Procem steps are performed over the domain boundary.
• The Procem operations check the domain boundary against the bounding box of the
model in each process step and, if there is a mismatch, the domain boundary will be
recomputed. If the model undergoes a rigid body transformation (for example, reflection
or translation) between any Procem steps, the domain boundary will be updated
automatically. The domainboundary global Scheme variable (which holds the wire body
that represents the domain boundary) also is changed to define the new domain
boundary.
• The domain boundary also can be created manually using the Scheme function
(entity:delete domainboundary).

Process Emulation Steps

This section discusses the process emulation steps.

Defining Domain
If a device is created from the beginning, the domain boundary must be specified first, using
the sdepe:define-pe-domain Scheme extension. All subsequent Procem steps are
performed over this domain boundary. If Procem steps are to be performed on an existing
3D structure, the domain boundary need not be defined. The domain boundary is extracted

Sentaurus™ Structure Editor User Guide 190

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

automatically from the device geometry. The global variable domainboundary stores the
domain boundary. If the simulation domain changes between process steps (for example,
the device is reflected or mirrored), the original domain boundary must be deleted using
(entity:delete domainboundary). A subsequent process step recalculates the correct
domain boundary.
Note:
Process emulation commands operate on the entire device and cannot be
restricted to operate only on a certain part (defined by a rectangular domain).
However, if you want to modify the process emulation domain, use the
sdegeo:chop-domain command to remove the unwanted part of the model. After
the unwanted part is removed, the previously computed domain boundary must
be deleted using the (entity:delete domainboundary) command.

Generating Substrate
The sdepe:add-substrate Scheme extension generates an initial substrate layer.

Patterning
The sdepe:pattern Scheme extension performs a pattern process-emulation step.

Patterning Keywords and Keyword Combinations

Table 27 lists all the keywords that the sdepe:pattern command accepts in addition to the
keywords that are defined in Table 28 for deposition.
All the keywords that can be used for deposition can also be used during a patterning step,
so those keywords are not explained here; they are explained in Deposition on page 194.
Table 27 Patterning keywords and keyword combinations

Type Keyword Functionality

All keywords listed in Table 28 on page 195 plus:

Basic "mask" The keyword "mask" identifies the mask that is used for patterning.
parameter The first step during a pattern operation is a deposition step (without
using the specified mask). In the second step, the mask (or the
complementary mask, depending on the specified polarity) is
extruded and is combined with the deposited layer (using some
Boolean operations) to form the patterned layer.

Sentaurus™ Structure Editor User Guide 191

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 27 Patterning keywords and keyword combinations (Continued)

Type Keyword Functionality

Basic control "polarity" This keyword can be "light" (default value) or "dark". It is used to
specify whether the used mask or the complementary mask (with
respect to the domain boundary) should be used during the pattern
operation.

Anisotropic Patterning
Figure 78 was generated using Procem and the following script:
(sde:clear)
(sde:set-process-up-direction "+z")
;# Mask definition #
(sdepe:generate-mask "MASK1" (list (list 0 0 5 4)))
(sdepe:generate-mask "MASK2" (list (list 4 1 7 3)))
;# Process Flow #
(sdepe:define-pe-domain 0 0 10 4)
(sdepe:add-substrate "material" "Silicon" "thickness" 2)
(sdepe:pattern "mask" "MASK1" "polarity" "light" "material" "Nitride"
"thickness" 1 "type" "aniso")
(sdepe:pattern "mask" "MASK2" "polarity" "light" "material"
"PolySilicon" "thickness" 1 "type" "aniso")
(sdepe:pattern "mask" "MASK2" "polarity" "light" "material" "Oxide"
"thickness" 0.2 "type" "aniso")

Figure 78 Examples of anisotropic patterning

Z X

Isotropic Patterning
Figure 79 was generated with Procem using the script for the anisotropic patterning
operation, except that, in this case, instead of "type" "aniso", the argument "type"
"iso" was used.

Sentaurus™ Structure Editor User Guide 192

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 79 Examples of isotropic pattern operations

Photo Operation
The sdepe:photo Scheme extension is used to perform a flat pattern process-emulation
step. The operation uses an existing mask to perform a pattern operation. The difference
between a pattern step (sdepe:pattern) and a photo step (sdepe:photo) is that, in the
case of a photo step, the top of the device will be flat. This provides more robust behavior if
the sdepe:photo command is used.

Photo Keywords and Keyword Combinations

See the description of sdepe:photo on page 774 for all available keywords and arguments.

Example
Figure 80 was generated with Procem using the following script:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4) "Silicon"
"x1")
(sdegeo:create-cuboid (position 0 3 4) (position 4 7 6)
"PolySilicon" "x2")
(define f1 (car (find-face-id (position 1 1 4))))
(define f2 (car (find-face-id (position 2 5 6))))
(sdegeo:taper-faces (list f1) (position 5 5 4) (gvector 1 0 0) 10)
(sdegeo:taper-faces (list f2) (position 2 5 6) (gvector 1 0 0) -10)
(sdepe:generate-mask "M1" (list (list 0 0 10 5)))

(sdepe:photo "mask" "M1" "material" "Copper" "polarity" "light"

"height" 7)

Figure 80 (right) was created using:

(sdepe:pattern "mask" "M1" "material" "Copper" "polarity" "light"
"thickness" 1)

Sentaurus™ Structure Editor User Guide 193

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

instead of:
(sdepe:photo "mask" "M1" "material" "Copper" "polarity" "light"
"height" 7)

If "height" is used, then the flat top of the created body is placed at the "height" position.
Instead of "height", you can use the "thickness" parameter. In this case, the top
z-coordinate of the created body is placed at zmax + thickness, where zmax is the top
z-coordinate of the initial device.

Figure 80 Example of a photo (flat pattern) operation: (left) initial structure with slanted top
faces, (middle) sdepe:photo-created layer with flat top surface, and (right)
sdepe:pattern-created layer, which follows the underlying geometry

Deposition
The sdepe:depo Scheme extension is used to perform a deposition process-emulation
step.

Deposition Keywords and Keyword Combinations

Table 28 lists all of the keywords that the sdepe:depo command accepts. It is organized into
functional groups:
• The basic parameter group contains the minimal set of keywords that can be used to
create a deposited layer (only the deposit material and thickness belong here).
• The basic control group contains all the keywords that can be used in addition to the
basic parameters to control the deposition type.
• The advanced control groups list all the keywords that can be used to achieve a certain
goal (such as rounding and tapering). These groups can be used alone or in combination
with each other.
• The last group (technical parameters) can be used to improve the robustness of the
sdepe:depo operation. In some cases (especially when global topology changes occur)
with some step control, the operation can behave more robustly.

Sentaurus™ Structure Editor User Guide 194

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 28 Deposition keywords and keyword combinations

Type Keyword Functionality

Basic parameters "thickness" "material" Default Manhattan-type deposition with isotropic

offsetting.
The "thickness" keyword controls the offset
distance and "material" controls the assigned
material for the deposited layer.

Basic control "region" Region name control. The specified region name
is assigned to the created deposited layer. If
"region" is not used, the region name is
assigned automatically to the deposited layer.

"type" Controls the isotropic or anisotropic offset type.

The keyword–value pair "type" "iso" creates a
uniformly offset deposit layer and "type"
"aniso" creates an anisotropic offset layer. (The
actual thickness at each point (in the vertical
direction) depends on the face normal. Vertical
faces are not offset.)

Advanced controls (these groups can be combined)

Rounding "rounding" Rounding and control parameters for rounding.

"radius" Either "rounding" or "radius" is used. If
"vexity" "rounding" is used, the rounding radius is
"advanced-rounding" determined automatically. If "radius" is used, the
specified radius is used during the rounding
phase.
If "radius" is greater than the minimum edge
length of the exposed surface, the radius is
readjusted. (This automatic feature is switched off
using the "advanced-rounding" keyword. In this
case, the rounding might not be as robust as with
the readjusted rounding radius but, for simpler
geometries (for example, extruded models), this
option can be used.)
The "vexity" keyword controls which edges are
rounded. The possibilities are "convex",
"concave", or "all".

Sentaurus™ Structure Editor User Guide 195

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 28 Deposition keywords and keyword combinations (Continued)

Type Keyword Functionality

Tapering "taper-angle" Tapering and taper face selection control.

"taper-direction" The "taper-angle" keyword controls the angle
that is used to taper the vertical planar side faces
of the deposited layer.
In addition, "taper-direction" can be specified
for additional filtering of the vertical planar side
faces, by selecting only the x- or y-axis-aligned
faces or both.

Selective "initial-thickness" Selective deposition and control parameters for

deposition "selective-material" selective deposition. If "selective-material" is
"selective-taper" used, the deposited layer is created only on those
parts of the exposed top surface that were
originally assigned the defined selective material.
Further control can be applied using
"selective-material" and
"selective-taper".
See Selective Deposition on page 201 for a
detailed explanation of these keywords.

Sentaurus™ Structure Editor User Guide 196

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 28 Deposition keywords and keyword combinations (Continued)

Type Keyword Functionality

Directional "ray-vector" Directional deposition with control parameters for

deposition with or "BC" boundary conditions and shadowing.
without "ext-dist" By default, deposition is performed on the top
shadowing "shadowing" (+z-direction for process-up-direction "+z" or
–x-direction for process-up-direction "-x")
exposed faces assuming a vertical direction. This
can be changed by using a ray vector that differs
from the default one, which is gvector 0 0 -1 for
process-up-direction "+z" and gvector 1 0
0 for process-up-direction "-x".
The "ray-vector" keyword specifies the ray
direction. If directional deposition is used, the
domain boundary can be extended automatically
using "BC", which can be set to "none",
"Extend", "Reflect", or "Periodic".
If the "Reflect" option is used, the model is
reflected automatically to those sides of the
domain boundary that are in the ray direction.
When the "Periodic" option is used, a copy of
the model is added along those sides of the
domain boundary that are in the ray direction.
The "Extend" option (default) is used to extend
the model. If the extension distance is not
specified, the size of the extension (based on the
ray direction and the offset distance) is calculated
automatically. The extension distance can be
specified using "ext-dist".
The "shadowing" keyword activates shadowing.
In this case, deposition will not occur on those
parts of the device that are shadowed in the ray
direction. After deposition, the domain boundary
is trimmed back to the original domain boundary.

Sentaurus™ Structure Editor User Guide 197

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 28 Deposition keywords and keyword combinations (Continued)

Type Keyword Functionality

Technical "adaptive" These parameters control some of the technical

parameters aspects of the operation.
The "adaptive" option is used to perform the
offset in more than one step (if the geometry
requires that for robustness). The offset size in
each step is calculated automatically, based on
some geometric considerations. The offsetting
continues in steps until the total deposit thickness
is reached. If "adaptive" is used, in some cases,
the number of steps might be too large and the
operation takes considerably longer than without
this option.
Note:
Use this option only if the deposition step fails
without this option.

"algorithm" Controls the selection of the offset algorithm.

If "type" "iso" is used, the default algorithm is
set to "lopx". In some cases, this algorithm might
fail, but the simpler "lop-move" algorithm can
work and result in an acceptable deposited layer.
If "type" "aniso" is used, the default algorithm
is set to "sweep". This is the only available
algorithm for anisotropic deposition and should be
sufficiently robust to handle even large
(tessellated) models. For large tessellated
(polyhedral) models, in the case of isotropic
deposition, the "PT" algorithm is recommended.
Note:
None of the other advanced option arguments
can be used if the "PT" algorithm is used.

"steps" This optional parameter controls the number of

steps used during deposition. The default is 1.
If a different step number is used, then the total
deposit thickness is divided by the number of
steps, and the operation is performed in steps.

Anisotropic Deposition
(sde:clear)
(sde:set-process-up-direction "+z")
(sdepe:generate-mask "MASK1" (list (list 2 2 5 3)))
(sdepe:generate-mask "MASK2" (list (list 14 7 13.73 8 13 8.73 12 9
11 8.73 10.27 8 10 7 10.27 6 11 5.27 12 5 13 5.23 13.73 6)))

Sentaurus™ Structure Editor User Guide 198

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

(sdepe:define-pe-domain (list 0 0 15 10))

(sdepe:add-substrate "material" "Silicon" "thickness" 2)
(sdepe:pattern "mask” "MASK1" "polarity" "light" "material" "Resist"
"thickness" 1)
(sdepe:pattern "mask" "MASK2" "polarity” "light" "material" "Resist"
"thickness" 2)
(sdepe:depo "material" "Oxide" "thickness" 0.25 "type" "aniso")

Figure 81 Anisotropic deposition, mask layout, and deposited layers

Isotropic Deposition
This section presents various examples of isotropic deposition.

Example: Isotropic Deposition With blend-vexity = "none"

In this example, this is the same code as used to illustrate anisotropic deposition. The only
difference is that the anisotropic step is replaced with:
(sdepe:depo "material" "Oxide" "thickness" 0.25 "type" "iso")

Figure 82 Manhattan-type isotropic deposition

The default "type" is "iso" for deposition. Therefore, if the "type" is not specified in the
argument list, an isotropic operation is performed. The isotropic deposition step can also be
performed by using the optional arguments and applying different types of rounding.

Example: Isotropic Deposition With blend-vexity = "convex"

(sdepe:depo "material" "Oxide" "thickness" 0.25 "vexity" "convex"
"radius" 0.25)

Sentaurus™ Structure Editor User Guide 199

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 83 Isotropic deposition with “vexity” “convex”

Example: Isotropic Deposition With blend-vexity = "concave"

(sdepe:depo "material" "Oxide" "thickness" 0.25 "vexity" "concave"
"radius"0.25)

Figure 84 Isotropic deposition with “vexity” “concave”

Example: Isotropic Deposition With blend-vexity = "all"

(sdepe:depo "material" "Oxide" "thickness" 0.25 "vexity" "all"
"radius" 0.25)

Figure 85 Isotropic deposition with “vexity” “all”

Sentaurus™ Structure Editor User Guide 200

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Selective Deposition
By default, deposition is performed on the entire exposed top surface, unless the argument
"selective-material" is used, in which case, the deposition is performed only on those
selected faces that originally belonged to the specified material.
Figure 86 was generated with Procem using the following script:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4) "Silicon"
"x1")
(sdegeo:create-cuboid (position 0 3 4) (position 4 7 6)
"PolySilicon" "x2")
(sdegeo:create-cuboid (position 0 0 3) (position 10 3 4) "Silicide"
"x3")
(sdegeo:create-cuboid (position 0 7 3) (position 10 10 4) "Silicide"
"x4")

(sdepe:depo "material" "Copper" "light" "thickness" 1

"selective-material" "Silicide")

Figure 86 Selective deposition using the "selective-material" argument: (left) before

deposition and (right) after deposition

An additional parameter "initial-thickness" can be used to control how much

anisotropy or isotropy is applied during selective deposition. The "initial-thickness"
parameter is a real number between 0 and 1.
If "initial-thickness" is used, during the first phase, initial-thickness * thickness
is deposited on the selective material by inserting vent faces between the selective material
and the other materials. In the second phase, the selective material is offset by (1 –
initial-thickness) * thickness.

When the deposition type is isotropic, the vent faces that were inserted during the first phase
of the selective deposition are also offset. (Therefore, the deposited body will overstretch the
selective material.) Figure 87 shows the effect of different values of "initial-thickness".

Sentaurus™ Structure Editor User Guide 201

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 87 Selective deposition with "initial-thickness" values of (left) 0.2 and (right) 0.8

In addition, tapering can be combined with selective deposition. If the "selective-taper"

argument is used with the #t value, the selectively deposited body is separated, and the
vertical walls of the offset body are tapered. If this parameter is not used, tapering is
performed globally on the united body, where the selectively deposited body is combined
first with all other bodies, and the vertical walls of the united body are tapered.
Figure 88 shows the deposited layer with tapered vertical walls in the case where the
"selective-taper" #t argument pair is used.

Figure 88 Selective deposition using the "selective-taper" #t argument pair

Directional Deposition
By default, Procem operations are performed in the global z-direction for
process-up-direction "+z" or in the global –x-direction for process-up-direction
"-x", assuming a vertical ray direction. The device is placed in the global xy plane for
process-up-direction "+z" or in the global yz plane for process-up-direction "-x",
and the exposed top surface of the device points in the +z-direction for
process-up-direction "+z" or in the –x-direction for process-up-direction "-x".

If you take directional effects into consideration, then you can define a ray vector other than
(0 0 –1) for process-up-direction "+z" or (1 0 0) for process-up-direction "-x". The

Sentaurus™ Structure Editor User Guide 202

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

ray vector can be specified using the "ray-vector" argument and the ray direction
(GVECTOR). For example: "ray-vector" (gvector 1 0 -1)
Note:
You must define the "ray-vector" in such a way that the ray hits the top surface.
Therefore, for example, (gvector 1 0 0) is not permitted for
process-up-direction "+z".

Directional effects are associated with anisotropy; therefore, use "type" "aniso" for
directional operations.
For anisotropic operations, the suggested algorithm is the "sweep" algorithm, which can be
called, by using the keywords "algorithm" "sweep".
As a result of the directional operation, an unwanted side-rim artifact is usually generated
around the domain boundary. This side effect can be eliminated by applying an additional
boundary condition during the Procem operation. The keyword "BC" is used to specify an
additional boundary condition. The keyword "BC" has the following options:
• "none", in which case, no boundary condition is applied.

• "Extend" extends the device around the domain boundary before the directional
operation and trims the device to the original domain afterwards.
The extension length is calculated automatically based on the ray direction, or it can be
specified explicitly by using the "ext-dist" keyword and an extension length.
• "Periodic" applies a periodic boundary condition about the device (the actual ray
direction is taken into consideration), so the periodicity is usually not applied to all sides.
After the operation, the device is trimmed to the original domain.
• "Reflect" applies a reflective boundary condition about the device (the actual ray
direction is taken into consideration), so the periodicity is usually not applied to all sides.
After the operation, the device is trimmed to the original domain.
The following example illustrates directional deposition:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:set-default-boolean "AB")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4) "Silicon"
"x1")
(sdegeo:create-cuboid (position 3 3 4) (position 7 7 8) "Silicon"
"x1")

Figure 89 (left) was created using:

(sdepe:depo "thickness" 1 "material" "Copper" "ray-vector"
(gvector 1 1 -1) "algorithm" "sweep")

Sentaurus™ Structure Editor User Guide 203

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 89 (right) was created using:

(sdepe:depo "thickness" 1 "material" "Copper" "shadowing" #t
"ray-vector" (gvector 1 1 -1) "algorithm" "sweep")

Figure 89 Directional deposition with different options: (left) using the "ray-vector" parameter
only without the "shadowing" option and (right) the same operation with
"shadowing" #t

Shadowing
In addition, the shadowing effect can be taken into consideration by adding
"shadowing" #t to the Procem argument list. When the shadowing option is used, the
following additional steps are performed during process emulation:
• Based on the ray direction, the silhouette edges of the device are imprinted to the top
exposed surface of the device.
• Raytracing is applied to determine face visibility. (After the silhouette edges are
imprinted, exposed faces can be classified as visible or nonvisible.)
• Based on the visibility result, the face displacement map, which was calculated based on
the "type" keyword, is modified. A zero displacement is assigned to all nonvisible faces.
The "shadowing" option can be used to compute face visibility and to omit the nonvisible
faces from being offset. If it is needed, faces will be split along the contour lines, which will
be imprinted to the faces during the visibility calculation. The following example illustrates
the effect of the "shadowing" option:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:set-default-boolean "AB")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4) "Silicon"
"x1")
(sdegeo:create-cuboid (position 0 0 4) (position 10 5 8) "Silicon"
"x1"))
(sdegeo:set-default-boolean "ABA")

Sentaurus™ Structure Editor User Guide 204

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

(define mb (sdegeo:create-cylinder (position 0 5 4) (position 10 5 4)

2 "Silicon" "x1"))
(entity:delete mb)

Figure 90 (left) was created using:

(sdepe:depo "material" "Copper" "thickness" 0.5)

Figure 90 (right) was created using:

(sdepe:depo "material" "Copper" "thickness" 0.5 "shadowing" #t)

Figure 90 Effect of "shadowing" option during deposition: (left) without shadowing and (right)
with shadowing

Rounding and Advanced Rounding

If rounding is used, the rounding radius must be specified. To add more robustness to the
rounding operation, the rounding radius is corrected automatically when a small edge is
detected on the top exposed surface. If "vexity" is "convex" (default) or "concave", the
rounding radius is set to 0.9 * minimal edge length if this value is smaller than the actual
rounding radius. If "vexity" is "all", then the multiplication factor is 0.45 not 0.9.
For some cases (for example, extruded models), the rounding can be performed with a
larger radius. In these cases, the automatic reassignment of the rounding radius can be
overruled by using the "advanced-rounding" parameter. The following example shows the
effect of the parameter:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:set-default-boolean "AB")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4) "Silicon"
"xx")
(sdegeo:create-cuboid (position 0 3 4) (position 10 7 6) "Silicon"
"xx")

Sentaurus™ Structure Editor User Guide 205

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 91 (left) was created using:

(sdepe:depo "thickness" 1 "material" "Copper" "radius" 2)

(In this case, the rounding radius is corrected automatically due to the small edge on the top
exposed surface. Sentaurus Structure Editor displays the warning message "APPLIED DEPO
BLEND RADIUS 1".)

Figure 91 (right) was created using:

(sdepe:depo "thickness" 1 "material" "Copper" "radius" 2
"advanced-rounding" #t)

Figure 91 Deposition (left) without "advanced-rounding" and (right) with "advanced-rounding"

Etching
The sdepe:etch-material Scheme extension is used to perform an etching process
emulation step.

Etching Keywords and Keyword Combinations

Table 29 lists all the keywords that the sdepe:etch-material command accepts in addition
to the keywords that are defined in Table 28 for deposition. It is organized around functional
groups.
The basic parameter group contains the minimal set of keywords that can be used to
perform an etching step in Procem (only the depth parameter belongs here).

Sentaurus™ Structure Editor User Guide 206

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 29 Etching keywords and keyword combinations

Type Keyword Functionality

Basic "depth" Etch offset distance. (Instead of "thickness", "depth" must be

parameter used in etching.)

Advanced controls (these groups can be combined)

The keywords and keyword combinations that can be used for deposition can also be used for
etching. See the rounding, tapering, directional deposition, and technical parameters, keywords,
and keyword combinations in Table 28. In addition to these functional groups, the following controls
can be used:

Overetch "overetch" Controls the amount of overetch that is applied during etching.

Selective "time" If the global etchrates list is defined, when you use "time",
etching selective etching can be achieved.

Example: Etching Operation Using Different Etch Options

(sde:clear)
(sde:set-process-up-direction "+z")
(sdepe:generate-mask "MASK1" (list (list 2 2 8 8) (list 12 2 18 8)))
(sdepe:define-pe-domain (list 0 0 20 10))
(sdepe:add-substrate "material" "Silicon" "thickness" 2)
(sdepe:pattern "mask" "MASK1" "polarity" "light" "material" "Resist"
"thickness" 0.5)
; Use one of the following operations to perform the etch step
(sdepe:etch-material "material" "Silicon" "depth" 1 "type" "iso"
"algorithm" "lopx")
(sdepe:etch-material "material" "Silicon" "depth" 1 "type" "iso"
"algorithm" "lopx" "overetch" 1)
(sdepe:etch-material "material" "Silicon" "depth" 1 "type" "iso"
"algorithm" "lopx" "overetch" 1 "vexity" "all" "radius" 0.6)

Sentaurus™ Structure Editor User Guide 207

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 92 Etch operation: (upper left) original model, (upper right) etching without overetch,
(lower left) etching with overetch, and (lower right) etching with overetch and
rounding

Example: Multimaterial Etching

If the "time" parameter is used instead of "depth" and the global variable etchrates is
set, then multimaterial etching can be performed. The following example illustrates
multimaterial etching:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.2 0.8 1.0)
"Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 0.5 0.5) (position 1.2 0.8 1.0)
"Oxide" "R.STI")
(sdegeo:create-cuboid (position 0.0 0.2 0.8) (position 0.4 0.5 1.0)
"Silicide" "R.Source")
(sdegeo:create-cuboid (position 0.8 0.2 0.8) (position 1.2 0.5 1.0)
"Silicide" "R.Drain")
(sdegeo:create-cuboid (position 0.4 0.0 1.0) (position 0.8 0.6 1.3)
"PolySilicon" "R.Poly")
(sdegeo:create-cuboid (position 0.5 0.0 1.3) (position 0.7 0.5 1.4)
"Silicide" "R.Gate")
; Multimaterial etch, using an etch rate table
(define etchrates (list (list "Oxide" 0.15) (list "PolySilicon" 0.05)
(list "Silicon" 0.20) (list "Silicide" 0.00)))
(sdepe:etch-material "time" 1.0)

Figure 93 shows the initial model and multimaterial etching using the command
(sdepe:etch-material "time" 1.0).

Sentaurus™ Structure Editor User Guide 208

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 93 Multimaterial etching: (left) initial model and (right) multimaterial etching

Some Notes About Multimaterial Etching

The multimaterial etching code removes material (according to the etch table rates) only
from the initially exposed bodies. If a given material layer is not exposed initially, it will not be
etched if the etching is performed in one step. When etching is performed in multiple steps,
the buried layers are exposed gradually, and the multimaterial etching can remove initially
nonexposed layers as well.
In the following example, the multimaterial etching works well in one step, since all
materials, with specified nonzero etch rates, are exposed initially (Figure 94 shows the initial
structure and the etched model):
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 5 5 4) "Silicon" "x1")
(sdegeo:create-cuboid (position 5 0 0) (position 10 5 4) "Copper" "x2")
(sdegeo:create-cuboid (position 0 5 0) (position 5 10 4) "Nitride" "x3")
(sdegeo:create-cuboid (position 5 5 0) (position 10 10 4) "Oxide" "x4")
(define etchrates (list (list "Silicon" 1) (list "Copper" 0.5)
(list "Nitride" 0.25) (list "Oxide" 0.125)))
(sdepe:etch-material "time" 1 "type" "aniso" "algorithm" "sweep")

Sentaurus™ Structure Editor User Guide 209

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 94 Multimaterial etch example (all bodies are exposed initially): (left) initial structure
and (right) etched model

In the following example, only the silicon layer is exposed initially. The thickness of the
silicon layer is 5, and the etch rate for the silicon is 1. This means that, if the time parameter
is ≥5, the complete silicon layer will be removed by the etch operation. If the etch operation
would be performed in two steps, the first step would remove the silicon layer completely
and the copper layer would be exposed and, in the second step, 5 × 0.5 = 2.5 thickness
would be removed from the copper layer as well:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 5 5 5) "Oxide" "x1")
(sdegeo:create-cuboid (position 0 0 5) (position 5 5 10) "Nitride" "x2")
(sdegeo:create-cuboid (position 0 0 10) (position 5 5 15) "Copper" "x3")
(sdegeo:create-cuboid (position 0 0 15) (position 5 5 20) "Silicon"
"x4")
(define etchrates (list (list "Silicon" 1) (list "Copper" 0.5)
(list "Nitride" 0.25) (list "Oxide" 0.125)))
(sdepe:etch-material "time" 10 "type" "aniso" "algorithm" "sweep"
"steps" 10)

Figure 95 shows the initial structure and the etched model.

Figure 95 Multimaterial etch example (only one layer is exposed initially): (left) initial structure
and (right) etched model

Sentaurus™ Structure Editor User Guide 210

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

If the thickness of each layer is known, then an optimal step size can be selected. If the layer
thicknesses are not known, then a reasonably large step size is needed to etch all of the
initially nonexposed material, with a nonzero etch rate.

Some Notes About Shadowing

In the case of anisotropic etching, the internal buried materials (other than the etch material)
will protect the underlying shadowed part. In the case of isotropic etching, the previously
described shadow protection is switched off, so the etch operation will remove etch material
under the protected layers if these areas are connected to the exposed surface (that is, the
initial exposed etch material touches these etch material layers). If there are buried (initially
nonexposed) etch material layers, which are completely isolated by some other materials,
then these materials will be protected as well.

Fill
The command sdepe:fill-device can be used to perform a fill process-emulation step.
The command (sdepe:fill-device "material" "Gas" "height" 6) was used to
demonstrate the fill operation in Figure 96. The optional "region" parameter can be used
to specify the region name of the filled region.

Figure 96 Fill operation

Polishing
The sdepe:polish-device Scheme extension can be used to perform a polishing
process-emulation step. To perform selective polishing, the optional "material" parameter
can be used to specify the bodies to be polished.

Sentaurus™ Structure Editor User Guide 211

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 97 Polishing steps starting from the upper-left corner and performing polish steps (left
to right)

Z Z
Y Y
X X

Z Z
Y Y
X X

Z
Z Y
Y X
X

Interconnect Layer Generation

Complex interconnect structures can be created easily with the sdepe:icon_layer
command. The basic assumption is that the initial structure is flat.
The sdepe:icon_layer command always creates a flat layer on top of the existing
structure. The z-coordinates of the bottom and top of each layer are constant. Each layer
consists of two materials: the interconnect material and the surrounding material. The
interconnect body is created using the specified mask and mask polarity. The mask is swept
from the top of the previous layer, and the sidewalls of the swept body can be tapered by
specifying a taper angle in the arguments list.

Sentaurus™ Structure Editor User Guide 212

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Table 30 lists the keywords for interconnect layer generation and keyword combinations.
Table 30 Keywords for interconnect layer generation and keyword combinations

Type Keyword Functionality

Basic parameters "mask" Name of the mask

"thickness" Layer thickness

"polarity" Mask polarity (default is "light")

"ic-material" Interconnect material (default is "Metal")

"env-material" Fill material (default is "Gas")

Basic control "taper-angle" Taper angle (default is 0)

Example: Generating an Interconnect Structure

The following script demonstrates the use of sdepe:icon_layer and Figure 98 shows the
generated structure:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdepe:define-pe-domain (list 1 1 9 9))
(sdepe:add-substrate "Silicon" 1.0)

;# Mask definition #
(sdepe:generate-mask "Via1" (list (list 2 6 3 7) (list 7 6 8 7)))
(sdepe:generate-mask "Metal1" (list (list 2 0 3 10) (list 7 0 8 10)))
(sdepe:generate-mask "Via2" (list (list 2 3 3 4) (list 7 3 8 4)))
(sdepe:generate-mask "Metal2" (list (list 0 2.5 10 4.5)))
(sdepe:icon_layer "mask" "Via1" "polarity" "light" "thickness" 0.4
"ic-material" "Aluminum" "env-material" "Oxide" "taper-angle" 20)
(sdepe:icon_layer "mask" "Metal1" "polarity" "light" "thickness" 0.6
"ic-material" "Aluminum" "env-material" "Oxide" "taper-angle" 10)
(sdepe:icon_layer "mask" "Via2" "polarity" "light" "thickness" 0.8
"ic-material" "Aluminum" "env-material" "Oxide" "taper-angle" 20)
(sdepe:icon_layer "mask" "Metal2" "polarity" "light" "thickness" 1.2
"ic-material" "Aluminum" "env-material" "Oxide" "taper-angle" 10)

Sentaurus™ Structure Editor User Guide 213

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 98 Interconnect structure: (left) mask layout, (middle) final interconnect structure with
oxide hidden, and (right) with oxide shown

Figure 99 (Left) Example of an interconnect structure created using an external layout file and
(right) 2D cut of interconnect structure showing tapered sidewalls

Shape Library
Sentaurus Structure Editor provides a set of commands to create special shapes (2D and
3D solid regions) that can be inserted into a 3D model:
• PolygonSTI creates a shallow trench isolation (STI) shape (2D).

• PolygonWaferMask creates a wafer shape (2D).

• PolyHedronCylinder creates a (tessellated) cylinder shape (3D).

• PolyHedronEllipticCylinder creates a (tessellated) elliptic cylinder shape (3D).

• PolyHedronEpiDiamond creates an epi diamond shape (3D).

• PolyHedronSTI creates an STI shape (3D).

• PolyHedronSTIaccc creates an STI shape for a concave corner (3D).

• PolyHedronSTIaccv creates an STI shape for a convex corner (3D).

Sentaurus™ Structure Editor User Guide 214

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

You can define additional commands that create parameterized custom shapes using the
scripting capabilities of Sentaurus Structure Editor.

PolygonSTI
This command creates a 2D STI-shaped polygon. The syntax is the same as for the
PolyHedronSTI command, except it does not have the Zmin, Zmax, and material
parameters (see PolyHedronSTI on page 218).
Syntax
(PolygonSTI name direction X0 Y0 Depth Tsti Asti Hsti Rd Rb Ru)
where:
• name is the name of the polygon.

• direction can be left or right only. This sets the facing direction of the STI polygon.

• Figure 104 on page 219 describes the other parameters.

PolygonWaferMask
This command creates a 2D wafer mask polygon.
Syntax
(PolygonWaferMask name Y0 Z0 Rw Lf)
where:
• name is the name of the polygon.

• Other parameters give the location and the size of the mask (see Figure 100).

Figure 100 Wafer mask-shaped polygon

(Y0,Z0)
Rw

Lf

Sentaurus™ Structure Editor User Guide 215

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

PolyHedronCylinder
This command creates a 3D cylinder-shaped polyhedron.
Syntax
(PolyHedronCylinder name X0 Y0 Z0 Rc Hc
[material] [Rotate.Y | Rotate.Z] [angle])
where:
• name is the name of the polyhedron.

• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• If Rotate.Y is specified, the cylinder is rotated at position (X0,Y0,Z0) along the y-axis for
angle degrees. If Rotate.Z is specified, the cylinder is rotated along the z-axis. The
right-hand rule determines the direction of the rotation.
• angle is the rotation angle in degree.

• Other parameters give the center coordination, the radius, and the height for the cylinder
(see Figure 101).

Figure 101 Cylinder-shaped polyhedron

(Y0,Z0) Rc

Hc

X0

PolyHedronEllipticCylinder
This command creates a 3D elliptic cylinder-shaped polyhedron.
Syntax
(PolyHedronEllipticCylinder name X0 Y0 Z0 Y1 Z1 Ratio Hc
[material] [Rotate.X | Rotate.Y | Rotate.Z] [angle])

Sentaurus™ Structure Editor User Guide 216

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

where:
• name is the name of the polyhedron.

• X0,Y0,Z0 are the center coordinates of the base ellipse.

• Y1 and Z1 are the y- and z-coordinates of the major axis of the base ellipse. The base
ellipse is on the yz plane.
• Ratio is the ratio of the minor axis to the major axis.

• Hc is the height for the cylinder. The cylinder is extruded in the –x-direction.

• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• If Rotate.X is specified, the cylinder is rotated at position (X0,Y0,Z0) along the x-axis for
angle degrees.

If Rotate.Y is specified, the cylinder is rotated at position (X0,Y0,Z0) along the y-axis for
angle degrees.

If Rotate.Z is specified, the cylinder is rotated along the z-axis. The right-hand rule
determines the direction of the rotation.
• angle is the rotation angle in degrees (see Figure 102).

Figure 102 Elliptic cylinder-shaped polyhedron

Ratio=b/a
b
X
a
(X1,Y1,Z1)
(X0,Y0,Z0)

Hc

Sentaurus™ Structure Editor User Guide 217

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

PolyHedronEpiDiamond
This command creates a 3D epitaxial diamond-shaped polyhedron.
Syntax
(PolyHedronEpiDiamond name X0 Y0 Z0 Wepi Lepi Hup Hdown Drecess
[material])
where:
• name is the name of the polyhedron.

• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• Figure 103 describes the other parameters.

Figure 103 Parameters for generating epitaxial diamond-shaped polyhedron

Lepi

Hup
Wepi
(Y0,Z0) Drecess

X0
Hdown

PolyHedronSTI
This command creates a 3D STI-shaped polyhedron.
Syntax
(PolyHedronSTI name direction X0 Y0 Depth Zmin Zmax Tsti Asti Hsti
Rd Rb Ru [material])
where:
• name is the name of the polyhedron.

• direction can be left, right, front, or back, which sets the facing direction of the
STI polyhedron.
• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• Figure 104 describes the other parameters.

Sentaurus™ Structure Editor User Guide 218

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 104 Parameters for generating STI-shaped polyhedron

Depth

Ru
(X0 ,Y0 ) H sti
Rd A sti

Tsti
Y

X Rb

Figure 105 shows some generated STI shapes in different directions.

Figure 105 STI-shaped polyhedra in different directions

Left Right

Zmin

Zmax

Front Back

Sentaurus™ Structure Editor User Guide 219

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 106 shows STI shapes with different Tsti and Rb values.

Figure 106 STI-shaped polyhedra with different Tsti and Rb

PolyHedronSTIaccc
This command creates a 3D STI concave corner-shaped polyhedron.
Syntax
(PolyHedronSTIaccc name direction X0 Y0 Z0 Tsti Asti Hsti Rd Rb Ru
Rac [material])

where:
• name is the name of the polyhedron.

• direction can be rb (right back), lb (left back), lf (left front), or rf (right front).

• Rac is the radius of the STI concave corner.

• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• Figure 104 on page 219 describes the other parameters.

Figure 107 shows STI concave corner-shaped polyhedra in different directions.

Sentaurus™ Structure Editor User Guide 220

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 107 STI concave corner-shaped polyhedra in different directions: (from left to right) left
back, right back, left front, and right front

PolyHedronSTIaccv
This command creates a 3D STI convex corner-shaped polyhedron.
Syntax
(PolyHedronSTIaccv name direction X0 Y0 Z0 Depth Tsti Asti Hsti
Rd Rb Ru Rac [material])
where:
• name is the name of the polyhedron.

• direction can be rb, lb, lf, or rf (as for the PolyHedronSTIaccc command).

• Rac is the radius of the convex corner.

• material is optional and specifies the material of the inserted shape. The default is
Oxide.

• Figure 104 on page 219 describes the other parameters.

Figure 108 shows a generated STI convex corner-shaped polyhedron.

Figure 108 STI convex corner-shaped polyhedron

Sentaurus™ Structure Editor User Guide 221

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

Figure 109 (left) shows a structure generated by combining the above three STI commands.
Figure 109 (right) illustrates the directions of the STI shapes.

Figure 109 (Left) STI structures and (right) polyhedron directions

Back
lb rb

Left Right

lf rf
Front

Removing Material
The command sdepe:remove can be used to remove a top layer (with a given "material"
or "region" attribute). If there are multiple exposed bodies with the given material or region
name, all these bodies are removed.

Doping and Implantation

For constant doping, see sdepe:doping-constant-placement on page 761.
For a Gaussian doping profile, see sdedr:define-gaussian-profile on page 555.
The following example uses doping and implantation commands:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:create-cuboid (position -0.2 0.0 0.0) (position 0.0 0.3 0.3)
"PolySilicon" "region_2")
(sdegeo:create-cuboid (position -0.2 0.4 0.7) (position 0.0 1.0 1.0)
"Resist" "region_3")
(sdepe:doping-constant-placement "BackGround"
"BoronActiveConcentration" 1e16 "region_1")
(sdedr:define-gaussian-profile "Implant_As"
"ArsenicActiveConcentration" "PeakPos" 0.0 "PeakVal" 1.3e+18
"ValueAtDepth" 1.0e16 "Depth" 0.5 "Erf" "Factor" 0.7)
(sdepe:implant "Implant_As")
(sdedr:define-refinement-size "RefDef.BG" 0.1 0.1 0.1 0.0125 0.0125
0.0125)

Sentaurus™ Structure Editor User Guide 222

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Steps

(sdedr:define-refinement-function "RefDef.BG" "DopingConcentration"

"MaxTransDiff" 1)
(sdedr:define-refinement-region "RefPlace.Si" "RefDef.BG" "region_1")
(sdedr:define-refinement-region "RefPlace.Po" "RefDef.BG" "region_2")
(sde:build-mesh "" "Implant_example")

Note:
By default, the sdepe:implant command places the doping profile at all surfaces
exposed to gas, including the vertical sidewalls. If implantation should be
performed only on the inclined (nonvertical) faces, you must add the "flat"
option to the sdepe:implant argument list.
A refinement window defined by using the sdepe:implant command, which is
used for the doping, extends to the domain boundary by default. You can change
this behavior by setting the global Scheme variable extend-implant-window to
#t. Its default value is #f, but you can use the
(set! extend-implant-window #t) Scheme command to change it. If you set
extend-implant-window #t, then the refinement window extends from the
domain boundary by 3 × Length, where the Length value is taken from the doping
profile definition. If the Factor parameter was used in the doping definition, then
the extension distance will be 3 × Factor.

Figure 110 Gaussian implantation on a silicon example with a rectangle of resist on the surface;
the lateral penetration of the higher doping is red underneath the resist

Z Y
X

DopingConcentration [cm-3]
1.300e+18
2.128e+16
3.483e+14
5.657e+12
-2.586e+12
-1.637e+14
-1.000e+16

Sentaurus™ Structure Editor User Guide 223

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Example

Process Emulation Example

This example illustrates some process emulation commands introduced in this chapter. The
example is a complete Scheme script with variable definitions and process emulation
commands. It contains commands for mask generation, domain definition, and substrate
generation. Isotropic depositions, patterning steps, and etching operations are used to
illustrate process emulation steps with Procem.
The example shows a backend (interconnect) structure generation using a dual-damascene
process emulation. First, two oxide layers (separated by a nitride layer) are deposited on the
silicon substrate. Second, vias are etched in the bottom oxide layer followed by etching of
lines in the top oxide layer. A thin barrier layer is deposited in the etched vias and lines.
Subsequently, they are filled with copper, which is finally polished to form the metal lines.
The Scheme code for generating an interconnect structure is:
; Clear the database
(sde:clear)
(sde:set-process-up-direction "+z")
(define W 2.2) ; Total width of the simulation domain.
(define H 2.8) ; Total length of the simulation domain.
(define HD 3.0 ; Total domain length.

; Metal line mask creation

(sdepe:generate-mask "MASK0" (list
(list 0.2 2.8 0.2 -0.6 2 -0.6 2 -0.3 0.5 -0.3 0.5 2.8)
(list 0.7 0 1 2.8)
(list 1.2 0 1.5 2.8)
(list 1.7 0 2 2.8)))

; Via mask creation

(sdepe:generate-mask "MASK1" (list
(list 0.25 1.2 0.45 1.4)
(list 0.75 0.8 0.95 1)
(list 1.25 0.4 1.45 0.6)))

; Process Emulation Steps:

; Define domain
(sdepe:define-pe-domain (list 0.0 -1.0 W HD))

; Create substrate
(sdepe:add-substrate "material" "Silicon" "thickness" 0.5)

; First layer of dielectric deposition for vias/contacts

(sdepe:depo "material" "Oxide" "thickness" 0.3)

; Nitride deposition
(sdepe:depo "material" "Nitride" "thickness" 0.05)

; Second layer of dielectric deposition for metal lines

(sdepe:depo "material" "Oxide" "thickness" 0.3)

Sentaurus™ Structure Editor User Guide 224

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Example

; Vias pattern and etching

(sdepe:pattern "mask" "MASK1" "polarity" "dark" "material" "Resist"
"thickness" 0.1 "type" "iso")
(sdepe:etch-material "material" "Oxide" "depth" 0.65 "type" "aniso")
(sdepe:etch-material "material" "Nitride" "depth" 0.05 "type" "aniso")
(sdepe:remove "material" "Resist")

; Metal lines pattern and etching

(sdepe:pattern "mask" "MASK0" "polarity" "dark" "material" "Resist"
"thickness" 0.1)
(sdepe:etch-material "material" "Oxide" "depth" 1.0 "type" "aniso")
(sdepe:remove "material" "Resist")

; Barrier layer deposition

(sdepe:depo "material" "Gold" "thickness" 0.02)

; Metal (copper) deposition

(sdepe:depo "Copper" 0.2)

; Metal CMP
(sdepe:polish-device "thickness" 0.2)

; Fill with copper

(sdepe:fill-device "material" "Copper")

The following figures illustrate the process steps that were performed by the script.

Figure 111 Generated masks and domain boundary; the external rectangle wire shows the
simulation domain

Sentaurus™ Structure Editor User Guide 225

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Example

Figure 112 State of process emulation after the first pattern step (MASK1 as a ‘dark’ mask was
used); the patterned resist layer is translucent

Figure 113 A 2D cross section of the device after the first two etching steps (the vias mask is
removed)

Figure 114 State of process emulation after metal lines are patterned (MASK1 with ‘dark’
polarity)

Sentaurus™ Structure Editor User Guide 226

V-2024.03
Chapter 5: Structure Generation Using Etching and Deposition
Process Emulation Example

Figure 115 Deposited barrier layer is shown separately from two different angles

Figure 116 Final structure after final metal layer (copper) deposition and after last polish step is
performed

Sentaurus™ Structure Editor User Guide 227

V-2024.03
6
Contacts
6

This chapter describes how to define contacts in Sentaurus Structure Editor.

Contacts are interfacial regions where subsequent TCAD tools, such as Sentaurus Device,
apply electrical, thermal, or other boundary conditions. They correspond to physical
contacts in the real device. Contacts are edges in two dimensions and faces in three
dimensions. The contact edges and faces are part of the geometry.
Before an edge or a face can be assigned to a contact, the contact itself must be declared
and activated first.
There are distinct methods to assign edges or faces to contacts. You can either use an
explicit edge or face list, or select a region. In the latter case, all boundary edges or
boundary faces will be assigned to the contact.
Contacts are respected by all geometry-modifying operations. For example:
• Contacts are maintained or updated as needed in transformations (scaling, translation,
rotation, and reflection).
• Two-dimensional contact edges are transformed to 3D contact faces in operations such
as extrusion and sweeping.
• Three-dimensional contact faces are reduced to 2D contact edges in operations such as
slicing.
A contact can consist of several disjoint edges or faces.

Sentaurus™ Structure Editor User Guide 228

V-2024.03
Chapter 6: Contacts
Defining and Activating a Contact

Defining and Activating a Contact

To define and activate a contact:
1. Choose Contacts > Contact Sets.
The Contact Sets dialog box opens.

2. Enter a contact name.

3. Edit the color and line thickness for drawing the 2D contact edges if required.
4. Select the pattern to mark 3D contact faces if required.
5. Click Set to complete the contact declaration.
The new contact name is displayed in the Defined Contact Sets list.
6. Select the newly defined contact from the Defined Contact Sets list, and click Activate.
The active contact is now displayed in the Contact list in the main window of Sentaurus
Structure Editor.
An already defined contact can be activated directly by selecting it from the Contact list of
the main window.
The corresponding Scheme command is:
(sdegeo:define-contact-set contact-name edge-thickness
(color:rgb red green blue) pattern)

For example:
(sdegeo:define-contact-set "substrate" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "substrate")

Sentaurus™ Structure Editor User Guide 229

V-2024.03
Chapter 6: Contacts
Deleting a Contact

The contact edge color is defined using three values, each ranging from 0 to 1. These values
give the relative intensity of the three basic colors: red, green, and blue. For example:
• red=(color:rgb 1 0 0)
• green=(color:rgb 0 1 0)
• blue=(color:rgb 0 0 1)
• yellow=(color:rgb 1 1 0)
• cyan=(color:rgb 0 1 1)
• purple=(color:rgb 1 0 1)
• gray=(color:rgb 0.5 0.5 0.5)

Deleting a Contact
To delete a contact definition:
1. Choose Contacts > Contact Sets.
2. Click the respective contact in the Defined Contact Sets list.
3. Click Delete.
The corresponding Scheme command is:
(sdegeo:delete-contact-set contact-name)

Assigning Edges or Faces to a Contact

To assign edges (2D) or faces (3D) to the currently active contact:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Edge (for 2D) or Select Face (for 3D).
3. Select an edge (or a face) and hold the Shift key to select additional edges (or faces), or
drag a box around a set of edges (or faces).
4. Choose Contacts > Set Contact.
This command checks the type of the selected entities. If only edges are selected, it
assigns a 2D contact to the selected entities (same as choosing Contacts > Set Edges).
If only faces are selected (and the faces belong to 3D bodies), it assigns a 3D contact to
the selected entities (same as choosing Contacts > Set Faces).

Sentaurus™ Structure Editor User Guide 230

V-2024.03
Chapter 6: Contacts
Assigning a Region Boundary to a Contact

Alternatively, right-click anywhere and choose Contacts. From the submenu, select an
already defined contact to assign all selected edges or faces to this contact, or select
Contact Sets to assign the edges or faces to a new contact. Define and activate this
contact as described in Defining and Activating a Contact on page 229.
5. Choose Contacts > Set Edges (for 2D) or Contacts > Set Faces (for 3D).
After closing the Contact Sets dialog box, all selected edges or faces are assigned to the
newly defined contact.
For example, for 2D structures, the corresponding Scheme commands are:
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:set-contact (find-edge-id (position 0.5 0.0 0)) "cont")

For example, for 3D structures, the corresponding Scheme commands are:

(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:set-contact (find-face-id (position 0.5 0.5 1.0)) "cont")

Assigning a Region Boundary to a Contact

To assign all region boundary edges (2D) or all region boundary faces (3D) to the currently
active contact:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Body.
3. Select a body and hold the Shift key to select additional bodies, or drag a box around a
set of bodies.
4. Choose Contacts > Set Region Boundary Edges.
Choose Contacts > Set Region Boundary Faces.
The corresponding Scheme command is:
(sdegeo:set-contact entity | entity-list
[contact-name ["remove"] ["imprint" BOOLEAN]])

Specifying the "remove" option deletes the region and converts its boundaries into a
contact. If you specify "imprint" #f, the 3D contact is not assigned to the touching faces.
The default behavior is "imprint" #t, in which case, the 3D contact is imprinted to the
touching neighbor faces.

Sentaurus™ Structure Editor User Guide 231

V-2024.03
Chapter 6: Contacts
Removing Edges or Faces From a Contact

For example, for 2D structures, the corresponding Scheme commands are:

(sde:clear)
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(define VIA (sdegeo:create-rectangle
(position 0.25 0.75 0) (position 0.75 1.5 0) "Metal" "region_2"))
(sdegeo:set-contact VIA "cont" "remove")

For example, for 3D structures, the corresponding Scheme commands are:

(sde:clear)
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(define VIA (sdegeo:create-cuboid (position 0.25 0.25 0.75)
(position 0.75 0.75 1.5) "Metal" "region_2"))
(sdegeo:set-contact VIA "cont" "remove")

You can use the sdegeo:set-contact function to assign contacts to geometric edges or
faces depending on model dimensionality. In three dimensions, this function attaches the
"3d-contact" attributes and the no merge attributes to the specified faces.

Removing Edges or Faces From a Contact

The procedures to remove edges or faces from a contact are similar to the procedures to
assign edges or faces to a contact (see Assigning Edges or Faces to a Contact on page 230
and Assigning a Region Boundary to a Contact on page 231). After selecting the edges,
faces, or bodies, select the respective option by choosing Contacts > Unset.
The corresponding Scheme commands are:
(sdegeo:delete-contact-boundary-edges [body | body-list])

(sdegeo:delete-contact-boundary-faces [body | body-list])

(sdegeo:delete-contact-edges [edge | edge-list])

(sdegeo:delete-contact-faces [face | face-list])

As an alternative to the above procedures:

1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Edge (2D) or Select Face (3D).
3. Select an edge (or a face) and hold the Shift key to select additional edges (or faces), or
drag a box around a set of edges (or faces).

Sentaurus™ Structure Editor User Guide 232

V-2024.03
Chapter 6: Contacts
Creating Edges or Faces for Use in Contacts

4. Right-click anywhere and choose Contacts. From the submenu, view the list of contact
sets. A check mark shows which contact sets have already been placed at the selected
entity or entities.
5. Deselect the required contact to unset the selected edges or faces as that contact set.

Creating Edges or Faces for Use in Contacts

Only an entire edge or face can be assigned to a contact. If the contact should cover only
part of an edge or a face, the edge or face must be split explicitly.
In two dimensions, a convenient way to accomplish this task is to add vertices (see Adding
a Vertex on page 85).
For example, the following Scheme commands create a rectangle, split one of its edges into
three segments by inserting two new vertices, and assign the contact "cont1" to the side
edge segments (see Figure 117):
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"region_1")
(sdegeo:insert-vertex (position 0.3 0.0 0.0))
(sdegeo:insert-vertex (position 0.7 0.0 0.0))
(sdegeo:set-contact (find-edge-id (position 0.15 0 0)) "cont1")
(sdegeo:set-contact (find-edge-id (position 0.85 0 0)) "cont2"

Figure 117 Adding contacts to 2D edge segments

Original Edge
Added Vertices

Edge is split into three edge segments

In three dimensions, Sentaurus Structure Editor provides dedicated functions to imprint a

shape on a surface to split existing faces.

Sentaurus™ Structure Editor User Guide 233

V-2024.03
Chapter 6: Contacts
Protecting Contacts

To split faces in three dimensions by imprinting a rectangle:

1. Choose Contacts > Imprint Rectangle.
2. Drag to draw the diagonal of the rectangle in the view window.
To split faces in three dimensions by imprinting a polygon:
1. Choose Contacts > Imprint Polygon.
2. Click at each vertex of the polygon in the view window. To finish drawing the polygon,
click the middle mouse button. (Press both buttons when using a two-button mouse.)
The polygon is closed automatically.
To split faces in three dimensions by imprinting a circle:
1. Choose Contacts > Imprint Circle.
2. Drag to draw the radius of the circle in the view window.
The corresponding Scheme commands are:
(sdegeo:imprint-rectangular-wire position position)
(sdegeo:imprint-polygonal-wire position-list)
(sdegeo:imprint-circular-wire position radius)

For example:
(sdegeo:create-cuboid (position 0.0 0.0 -1.0) (position 3.0 1.0 0.0)
"Silicon" "region_1"))
(define RECT (sdegeo:imprint-rectangular-wire
(position 0.2 0.2 0) (position 0.8 0.8 0)))
(define POLY (sdegeo:imprint-polygonal-wire (list (position 1.2 0.2 0)
(position 1.8 0.2 0) (position 1.8 0.8 0) (position 1.5 0.8 0)
(position 1.5 0.5 0) (position 1.2 0.5 0) (position 1.2 0.2 0))))
(define CIRC (sdegeo:imprint-circular-wire (position 2.5 0.5 0) 0.3))

The imprint commands return a list containing the newly generated faces. This list can be
used in sdegeo:set-contact. After the new faces are created, the contact generation
procedure is the same as that discussed in Assigning Edges or Faces to a Contact on
page 230.
When used from the GUI, the imprint commands place the rectangle, polygon, or circle, in
the current work plane. Change the work plane as discussed in Work Planes on page 152
to place imprint shapes on a general face.

Protecting Contacts
If contacts are assigned to edges and faces using any of the sdegeo contact assignment
commands, these contacts are protected.

Sentaurus™ Structure Editor User Guide 234

V-2024.03
Chapter 6: Contacts
Examples of Contact Assignments

The 2D boundary simplification commands do not remove or merge contact edges, and also
the 3D boundary regularization command sde:bool-regularise does not merge coplanar
contact faces with adjoining faces.
If an application defines the edge or face contacts directly, by attaching the "2d-contact"
or "3d-contact" attributes to the contact edges or faces, these contacts are not protected.
In this case, the (protect-all-contacts) command can be used to add the necessary no
merge attribute to the contact edges or faces.

Examples of Contact Assignments

These examples illustrate how to create different 2D and 3D contacts.

Creating Different 2D Contacts

Create the device geometry:
(sdegeo:create-rectangle (position -1.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "R.Substrate")
(sdegeo:create-rectangle (position -0.4 0.0 0) (position 0.4 -0.05 0)
"Oxide" "R.Gox")
(sdegeo:create-rectangle (position -0.4 -0.05 0) (position 0.4 -0.5 0)
"Nitride" "R.Spacer")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position -0.2 -0.05 0) (position 0.2 -0.5 0)
"PolySi" "R.Poly")
(define TMP (sdegeo:create-ellipse (position -1.0 0.0 0)
(position -0.5 0.00 0) 0.2 "Silicide" "R.Silicide"))
(sdegeo:delete-region TMP)

Assign an existing edge to the "substrate" contact:

(sdegeo:set-contact (find-edge-id (position 0.0 1.0 0)) "substrate")

Split an edge and assign part of the original edge to the "drain" contact:
(sdegeo:insert-vertex (position 0.5 0.0 0))
(sdegeo:set-contact (find-edge-id (position 0.75 0.0 0)) "drain")

Assign all region boundary edges to the "gate" contact and remove the region:
(sdegeo:set-contact (find-body-id (position 0 -0.275 0)) "gate"
"remove")

Assign edges along a complex topology to the "source" contact as follows.

In the Old Replaces New (BAB) overlap resolution mode (see Overlap Behavior on page 79),
a temporary body is created that includes all boundary edges, which should be assigned to

Sentaurus™ Structure Editor User Guide 235

V-2024.03
Chapter 6: Contacts
Examples of Contact Assignments

the "source" contact. Then, the region boundary edges of this temporary body are
assigned to the "source" contact, and the temporary body itself is removed:
(sdegeo:set-default-boolean "BAB")
(define TEMPORARY (sdegeo:create-rectangle (position -1.0 -0.3 0)
(position -0.45 0.2 0) "Aluminum" "R.Temporary"))
(sdegeo:set-contact TEMPORARY "source" "remove")

Figure 118 Two-dimensional contact creation example: (left) initial device geometry structure
with “substrate” (red), “drain” (green), “gate” (blue), and “source” (purple) contacts;
and (right) immediately before deleting the temporary body used to create the
“source” contact

Creating Different 3D Contacts

Create the device geometry:
(sdegeo:create-cuboid (position -1.0 0.0 0.0) (position 1.0 1.0 -1.0)
"Silicon" "R.Substrate")
(sdegeo:create-cuboid (position -0.4 0.0 0.0) (position 0.4 1.0 0.05)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position -0.4 0.0 0.05) (position 0.4 1.0 0.5)
"Nitride" "R.Spacer")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position -0.2 0.0 0.05) (position 0.2 1.0 0.5)
"PolySi" "R.Poly")
(sdegeo:create-cuboid (position -1.0 0.5 0.0) (position 1.0 1.0 -0.5)
"Oxide" "R.STI")
(sdegeo:set-default-boolean "ABA")
(define TMP (sdegeo:create-sphere (position -0.75 0.25 0.0) 0.2
"Silicide" "R.Silicide"))
(sdegeo:delete-region TMP)

Assign an existing face to the "substrate" contact:

(sdegeo:set-contact (find-face-id (position 0.0 0.5 -1.0))
"substrate")

Sentaurus™ Structure Editor User Guide 236

V-2024.03
Chapter 6: Contacts
Examples of Contact Assignments

Imprint a rectangle on a face in the base work plane, and assign the new face to the
"drain" contact:
(define DRAINFACE (sdegeo:imprint-rectangular-wire
(position 0.5 0.45 0) (position 0.95 0.05 0)))
(sdegeo:set-contact DRAINFACE "drain")

Imprint a rectangle on a face in a custom work plane ("Sidewall"), and assign the new face
to the "thermode" contact:
(sdegeo:define-work-plane "Sidewall" (position -1 1 -1)
(position -1 0 -1) (position -1 1 0))
(sdegeo:set-active-work-plane "Sidewall")
(define THERMFACE (sdegeo:imprint-rectangular-wire
(position 0.05 0.05 0) (position 0.95 0.45 0)))
(sdegeo:set-active-work-plane "base")
(sdegeo:set-contact THERMFACE "thermode")

Imprint a polygon on a general face using exploited 3D coordinates, and add the new face
to the "thermode" contact:
(define THERMFACE_2 (sdegeo:imprint-polygonal-wire (list
(position 1.0 0.05 -0.95) (position 1.0 0.95 -0.95)
(position 1.0 0.95 -0.55) (position 1.0 0.45 -0.55)
(position 1.0 0.45 -0.05) (position 1.0 0.05 -0.05)
(position 1.0 0.05 -0.95))))
(sdegeo:set-contact THERMFACE_2 "thermode")

Assign all region boundary faces to the "gate" contact and remove the region:
(sdegeo:set-contact (find-body-id (position 0.0 0.5 0.3)) "gate"
"remove")

Assign faces along a complex topology to the "source" contact as follows.

In the Old Replaces New (BAB) overlap resolution mode (see Overlap Behavior on page 79),
a temporary body is created that includes all boundary faces, which should be assigned to
the "source" contact.
Then, the region boundary faces of this temporary body are assigned to the "source"
contact, and the temporary body itself is removed:
(sdegeo:set-default-boolean "BAB")
(define TEMPORARY (sdegeo:create-cuboid (position -1.0 0.05 -0.3)
(position -0.45 0.45 0.1) "Aluminum" "R.Temporary"))
(sdegeo:set-contact TEMPORARY "source" "remove")

Sentaurus™ Structure Editor User Guide 237

V-2024.03
Chapter 6: Contacts
Examples of Contact Assignments

Figure 119 Three-dimensional contact creation example: (left) initial device geometry, (middle)
structure top view with “drain”, “gate”, and “source” contacts, and (right) structure
bottom view with “thermode” and “substrate” contacts

Sentaurus™ Structure Editor User Guide 238

V-2024.03
7
Generating Mesh and Doping Profiles
7

This chapter presents the available meshing operations.

Overview of Meshing Operations

In addition to defining the geometry of a structure, doping profiles and refinement
parameters can be defined for different parts of the structure. The placement of these
profiles and refinements as well as the areas to which the use of these profiles and
refinements are restricted can be specified by user-defined refinement/evaluation (Ref/Eval)
windows.
Ref/Eval windows are implemented as geometric objects and can be manipulated in a
similar manner as other geometric objects. The difference between a regular geometric
body and a Ref/Eval window is that material and region properties are attached to a regular
geometric body, while a Ref/Eval window name is attached to a Ref/Eval window. Certain
operations affect only regular geometric bodies. For example, only regular geometric bodies
can be written to a tessellated boundary file. Some query functions, such as
(get-body-list), handle only regular geometric bodies. On the other hand, only Ref/Eval
windows can be used in refinement and doping specifications as evaluation windows, for
example. Ref/Eval windows have their own query functions, such as (get-drs-list),
which returns the entity IDs of all defined Ref/Eval windows.
In some cases, doping profiles and refinements can also be restricted to a specific region or
material (materialwise and regionwise refinements and dopings).
Unlike regular geometric objects, Ref/Eval windows can overlap. For example, the
refinement in a given area of the device can be determined by the tightest requirements
among several refinement placements active in that area. For overlapping doping
placements, the resulting profile is the sum of all profiles.
Sentaurus Structure Editor allows the full flexibility of definitions and placements available in
the input syntax of Sentaurus Mesh. Profiles and refinements are first defined by specifying
all the necessary parameters, but their use is not restricted to a specific location or an area.
In a second step, profiles and refinements are placed. The placement step links a given
profile or refinement definition with an area of validity, which can be a Ref/Eval window, a
region name, or a material.

Sentaurus™ Structure Editor User Guide 239

V-2024.03
 Both profile and refinement definitions as well as Ref/Eval windows can be reused in various
placements for maximum flexibility.

Defining Areas for Mesh Refinement or Doping

Ref/Eval windows are areas in which a certain mesh refinement or doping profile is applied.
These reference areas can take the form of a line segment, a rectangle, a polygon, a cuboid,
or a polygon automatically extracted from a face.

Line-Segment Ref/Eval Windows

Line-segment Ref/Eval windows are used as reference edges for placing implant-like doping
profiles in two dimensions.
To define a line-segment Ref/Eval window:
1. Choose Mesh > Define Ref/Eval Window > Line, or click the corresponding toolbar
button (see Table 14 on page 50).
2. Click the starting point and the endpoint of the line segment in the view window.
The corresponding Scheme command is:
(sdedr:define-refeval-window RefEval-name "Line" position position)

For example:
(sdedr:define-refeval-window "RefEvalWin_1" "Line"
(position 0.0 0.0 0) (position 1.0 0.0 0))

Rectangular and Polygonal Ref/Eval Windows

Rectangular and polygonal Ref/Eval windows are used to place mesh refinement or
constant profiles in two dimensions, and are used as reference faces to place
implantation-like doping profiles in three dimensions.
To define a rectangular or polygonal Ref/Eval window:
1. Choose Mesh > Define Ref/Eval Window > Rectangle (or Polygon), or click the
corresponding toolbar button (see Table 14).
2. For a rectangle, drag to draw the diagonal of the rectangle in the view window.
For a polygon, click at each vertex of the polygon in the view window. To finish drawing
the polygon, click the middle mouse button. (Press both buttons when using a two-button
mouse.) The polygon is closed automatically.

Sentaurus™ Structure Editor User Guide 240

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

Note:
Ref/Eval windows are oriented. The face normals of rectangular Ref/Eval
windows point in the positive third-axis direction (right-hand rule). For polygonal
Ref/Eval windows, if the vertex position list is counterclockwise, then the normals
point in the positive third-axis direction. The orientation is important when Ref/
Eval windows are used in sdedr:define-analytical-profile-placement for
reference. The "Positive" and "Negative" arguments of this Scheme
extension must be adjusted to the Ref/Eval window normal direction.

The corresponding Scheme commands are:

(sdedr:define-refeval-window RefEval-name "Rectangle"
position position)

(sdedr:define-refeval-window RefEval-name "Polygon" position-list)

For example:
(sdedr:define-refeval-window "RefEvalWin_2" "Rectangle"
(position 0.0 0.5 0) (position 1.0 1.5 0))

(sdedr:define-refeval-window "RefEvalWin_3" "Polygon"

(list (position 0 0 0) (position 0.5 -1 0)
(position 1 -1 0) (position 1.5 0 0) (position 0 0 0)))

Rectangles and polygons defined by using the graphical user interface (GUI) are placed in
the current work plane.
To create Ref/Eval windows in areas outside the current work plane, change the work plane
first as discussed in Work Planes on page 152.
In the 2D GUI mode, a rectangular Ref/Eval window can also be defined from certain dialog
boxes by choosing, for example:
• Mesh > Refinement Placement
• Mesh > Multibox Placement
• Device > Constant Profile Placement
• Device > Analytical Profile Placement
• Device > External Profile Placement
Note:
When you use the GUI to define Ref/Eval windows, the name of the Ref/Eval
window is assigned automatically and cannot be changed later.

Sentaurus™ Structure Editor User Guide 241

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

Cuboidal Ref/Eval Windows

Cuboidal Ref/Eval windows are used to place mesh refinement or constant profiles in three
dimensions.
To define a cuboidal Ref/Eval window:
1. Choose Mesh > Define Ref/Eval Window > Cuboid.
The Cuboid Coordinates dialog box opens.
2. Enter the coordinates of the start corner and the end corner.
Note:
The face normals of cuboidal Ref/Eval windows point outwards.

3. Click OK.
The corresponding Scheme command is:
(sdedr:define-refeval-window RefEval-name "Cuboid" position position)

For example:
(sdedr:define-refeval-window "RefEvalWin_4" "Cuboid"
(position 0 0 0) (position 1 1 1))

In the 3D GUI mode, a cuboidal Ref/Eval window can also be defined from certain dialog
boxes by choosing, for example:
• Mesh > Refinement Placement
• Mesh > Multibox Placement
• Device > Constant Profile Placement
• Device > Analytical Profile Placement
• Device > External Profile Placement
Note:
When you use the GUI to define Ref/Eval windows, the name of the Ref/Eval
window is assigned automatically and cannot be changed later.

Extracting Ref/Eval Window From Face

You can create a Ref/Eval window that coincides with one or more faces of a 2D body for
placing mesh refinement or constant profiles, or faces of a 3D body for placing implant-like
doping profiles in three dimensions.

Sentaurus™ Structure Editor User Guide 242

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

To extract a Ref/Eval window from faces:

1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Select Face.
3. Select a face and hold the Shift key to select additional faces, or drag a box around a set
of faces.
4. Choose Mesh > Define Ref/Eval Window > From Face, or click the corresponding
toolbar button (see Table 14 on page 50).
The corresponding Scheme command is:
(extract-refwindow face | face-list RefEval-name)

For example:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon"
"region_1")
(extract-refwindow (find-face-id (position 0.5 0.5 1.0))
"RefEval_TopFace")

Extracting Ref/Eval Window From Body Interface

You can use the Scheme extension sdedr:define-body-interface-refwin to define a
refinement window between the interfaces of the specified geometric bodies (see
sdedr:define-body-interface-refwin on page 549):
(sdedr:define-body-interface-refwin body-list ref-eval-window)

For example:
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cuboid (position 2 2 3) (position 8 8 5)
"PolySilicon" "x2"))
(sdedr:define-body-interface-refwin (list mb1 mb2) "RW")
(sdedr:define-refinement-size "RDef_1" 1 1 1 0.1 0.1 0.1)
(sdedr:define-refinement-placement "RPl_1" "RDef_1" "RW")
(sdedr:write-cmd-file "rwext.cmd")

Extracting Ref/Eval Window From 3D Solid Body

You can use the Scheme extension extract-refpolyhedron or
extract-refpolyhedron-facets to convert a 3D geometric body to a polyhedral
refinement window. extract-refpolyhedron uses the ACIS surface mesher of Sentaurus
Structure Editor, which saves the tessellated polyhedral boundary for meshing, and works

Sentaurus™ Structure Editor User Guide 243

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

better on planar surfaces when converting the 3D geometric body to a polyhedral Ref/Eval
window. extract-refpolyhedron works better when handling nonplanar faces or any solid
with voids because it converts all triangular facets of a polyhedron to the polyhedral
refinement window boundary.
For example:
(sde:clear)
(define mb (sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"Silicon" "x1"))
(extract-refpolyhedron mb "ref1")

or:
(sde:clear)
(define mb (sdegeo:create-cylinder (position 0 0 0) (position 0 0 1)
0.1 "Silicon" "x1"))
(extract-refpolyhedron mb "ref1")
(sdedr:define-refinement-size "RD_1" .2 .2 .1 .1)
(sdedr:define-refinement-placement "RP_1" "RD_1" "ref1")
(sdedr:write-cmd-file "xx.cmd")

Extracting Ref/Eval Windows From 3D Solid Body Interfaces

You can use the Scheme extensions extract-interface-offset-refwindow and
extract-interface-normal-offset-refwindow to extract the non-regularized
intersection between two solid bodies, and to create a 3D offset body from the
non-regularized intersection and to assign it as a doping/refinement/submesh (DRS) body.
The extract-interface-normal-offset-refwindow extension offsets the faces of the
interface body in the normal direction.
The following example creates the extracted DRS body shown in Figure 120:
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cylinder (position 5 5 4) (position 5 5 8)
2 "PolySilicon" "x2"))
(extract-interface-offset-refwindow mb1 mb2 1 "rw1")

Sentaurus™ Structure Editor User Guide 244

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

Figure 120 Extraction of interface offset body using extract-interface-offset-refwindow: (left)

initial model and (right) extracted DRS body

Sentaurus™ Structure Editor User Guide 245

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Areas for Mesh Refinement or Doping

The following example creates the extracted DRS body shown in Figure 121:
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cylinder (position 5 5 4) (position 5 5 8)
2 "PolySilicon" "x2"))
(extract-interface-normal-offset-refwindow mb1 mb2 1 "rw1")

Figure 121 Extraction of interface offset body using extract-interface-normal-offset-refwindow:

(left) initial model and (right) extracted DRS body

Deleting Ref/Eval Windows

To delete a Ref/Eval window:
1. Click the Select button (see Table 7 on page 47).
2. From the Selection Level list, select Ref/Eval Window.
Alternatively, right-click in the view window and choose Ref/Eval Window.
3. Click inside the Ref/Eval window to be deleted or drag a box around it.
4. Choose Mesh > Delete Ref/Eval Window.
The corresponding Scheme command is:
(sdedr:delete-refeval-window RefEval-name)

For example:
(sdedr:define-refeval-window "RefEvalWin_1" "Line"
(position 0.0 0.0 0) (position 1.0 0.0 0))
(sdedr:delete-refeval-window "RefEvalWin_1")

Sentaurus™ Structure Editor User Guide 246

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

Defining Mesh Refinements

This section describes how to define mesh refinements.

Regular Mesh Refinement Boxes

A mesh refinement box allows you to request from the mesher that, in the specified area, the
mesh spacing should not exceed a given value and that mesh refinement should stop if the
mesh size becomes smaller than a given value. Further, you can instruct the mesher to
refine the mesh in areas of steep doping gradients or near interfaces. The mesher can
create mesh spacings that are smaller than the requested minimum if needed to satisfy
other constraints such as the resolution at an interface or to fulfill the Delaunay mesh quality
criterion.
Sentaurus Mesh uses regular mesh refinement boxes.
To create a regular mesh refinement box:
1. Choose Mesh > Refinement Placement, or click the corresponding toolbar button (see
Table 14 on page 50).
The Refinement Specification dialog box opens.
2. Edit the Placement Name field as needed (RefinementPlacement_<index> is the
default name), or select the name of a previously defined refinement specification for
editing.
3. Under Placement Type, select from the following:
a. To place the mesh refinement into a previously defined Ref/Eval window, select the
required Ref/Eval window from the Ref/Eval Window list.
b. To place the mesh refinement into all regions with a given material, select a material
name from the Materials list.
c. To place the mesh refinement into a specific region, select a region name from the
Regions list.
d. Select Define Ref/Eval Window if a required Ref/Eval window has not yet been
defined. Enter the coordinates of the start corner and end corner of the Ref/Eval
window, and click Create.
The name of the new Ref/Eval window is assigned automatically, and the new Ref/
Eval window is selected automatically in the Ref/Eval Window field.
A cuboidal Ref/Eval window is created if the 3D GUI mode is set (choose View > GUI
Mode > 3D Mode). In 2D GUI mode, a rectangular Ref/Eval window is created. See
GUI Modes on page 44.

Sentaurus™ Structure Editor User Guide 247

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

e. To edit a previously defined Ref/Eval window, select the Ref/Eval window from the
Ref/Eval Window field.
Select Define Ref/Eval Window and edit the window coordinates as needed. Click
Modify. (Only Ref/Eval windows consistent with the current GUI mode can be edited
from this dialog box.)
4. Under Refinement Definition, edit the Name field as needed (the default name is
RefinementDefinition_<index>).

You can link an existing mesh refinement definition to the current refinement placement
by selecting it from the corresponding list.
5. Enter values for the required maximum and minimum element sizes in each axis
direction. (Omit this step when reusing an existing refinement definition.)
6. Optionally, add refinement functions to the refinement definition by clicking More. In the
expanded dialog box, under Refinement Functions, do any of the following:
◦ To add automatic doping refinement based on the value difference or gradient of a
doping profile, select Value Difference or Gradient, and select the required doping
profile from the corresponding list.
Change the Value field to control the sensitivity of the automatic refinement if needed.
Click Add to append the new function to the current list of refinement functions
associated with the current refinement definition.
◦ To add automatic refinement at selected interfaces, select Interface Length and
select the material in which the refinement should be applied from the first material
list. Enter the material on the other side of the interface in the second material list.
Enter the first requested mesh spacing at the interface in the Value field and the ratio
between the second and the first requested mesh spacing in the Factor field. Select
DoubleSide to apply the interface refinement to both sides of the interface.
Select UseRegionNames to interpret the interface as a regionwise specification.
Click Add to append the new function to the current list of refinement functions
associated with the current refinement definition.

Sentaurus™ Structure Editor User Guide 248

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

When you click More, the button changes to Less.

◦ To add automatic refinement based on profile values with a certain interval, select
Interval and select the profile from the list.
Enter values for Scaling, Cmin, Cmax, and TargetLength. Optionally, select Rolloff
for the interval refinement of Sentaurus Mesh.
Note:
You can add vector and tensor values for Cmin and Cmax by entering a
space-separated list of the component values.

Sentaurus™ Structure Editor User Guide 249

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

◦ To remove a refinement function, select it and click Delete.

7. When you have completed the refinement specification, click Create Refinement.
After a refinement is created, the Create Refinement button changes to Change
Refinement, and the Delete Refinement button becomes available.
For details about refinement functions, see Sentaurus™ Mesh User Guide, Defining
Refinement Region, and Sentaurus™ Mesh User Guide, Placing Refinement Regions.
The related Scheme commands for creating Ref/Eval windows are:
(sdedr:define-refeval-window RefEval-name "Line"|"Rectangle"|"Cuboid"
position position)
(sdedr:define-refeval-window RefEval-name "Polygon" position-list)

The corresponding Scheme command for creating a refinement definition is:

(sdedr:define-refinement-size RefDef-name dxmax dymax [dzmax]
dxmin dymin [dzmin])

where dxmax, dymax, and dzmax are the maximum required mesh spacings, and dxmin,
dymin, and dzmin are the minimum required mesh spacings.

The corresponding Scheme commands for adding adaptive refinement functions are:
(sdedr:define-refinement-function RefDef-name dopant-name
"MaxTransDiff"|"MaxGradient" value)

(sdedr:define-refinement-function "RefDef-name"
"MaxLenInt" material-1 material-2 first-step ratio)

(sdedr:define-refinement-function "RefDef-name"
"MaxInterval" "Variable" dopant-name "Cmin" cmin "Cmax" cmax
"Scaling" scaling "TargetLength" targetLength "Rolloff")

The corresponding Scheme commands for linking a refinement definition to a Ref/Eval

window, a region, or a material are:
(sdedr:define-refinement-placement RefPlace-name RefDef-name
RefEval-name)
(sdedr:define-refinement-region RefPlace-name RefDef-name
region-name)
(sdedr:define-refinement-material RefPlace-name RefDef-name
material-name)

For example:
(sdegeo:create-rectangle (position -0.5 0.0 0) (position 0.5 0.5 0)
"Silicon" "region_1")
(sdedr:define-refeval-window "RefEvalWin.Channel" "Rectangle"
(position -0.025 0.00 0) (position 0.025 0.01 0))
(sdedr:define-refinement-size "RefDef.Channel" 5e-3 2e-3 2e-3 1e-3)
(sdedr:define-refinement-function "RefDef.Channel" "MaxLenInt"

Sentaurus™ Structure Editor User Guide 250

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

"Silicon" "Oxide" 1e-4 1.2)

(sdedr:define-refinement-function "RefDef.Channel" "MaxInterval"
"Variable" "DopingConcentration" "Cmin" 1e-4 "Cmax" 1.2 "Scaling" 2
"TargetLength" 1e-3 "Rolloff")
(sdedr:define-refinement-function "RefDef.Channel"
"DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-refinement-placement "RefPlace.Channel" "RefDef.Channel"
"RefEvalWin.Channel")

Note:
When using interface refinement from a Scheme command, you can set the
materials to "All", or to an empty string to refer to all materials, or to the ambient.
This option is not available from the GUI.

Interface refinement is specified in a similar way to the refinement on analytic functions. To

perform interface refinement, define a RefineFunction of type MaxLengthInterface and
specify the pair of materials defining the interface, the initial thickness, and a factor used to
define how this thickness should grow into the material.
The following examples illustrate the use of this function:
• Refine silicon at the oxide interface, starting with a layer of 0.02 µm and gradually
increasing the thickness by 1.4 times:
(sdedr:define-refinement-function "RefinementDefinition_1"
"MaxLenInt" "Silicon" "Oxide" 0.02 1.4)

• Refine all interfaces, creating a single layer of 0.01 µm:

(sdedr:define-refinement-function "RefinementDefinition_1"
"MaxLenInt" "All" "All" 0.01)

• Refine all contacts in the mesh:

(sdedr:define-refinement-function "RefinementDefinition_1"
"MaxLenInt" "All" "Contact" 0.01)

• Refine around a single contact:

(sdedr:define-refinement-function "RefinementDefinition_1"
"MaxLenInt" "All" "Gate" 0.01 "UseRegionNames")

By default, interface refinement is performed only on the first material of the specified pair of
materials describing the interface. To refine on both sides of the interface, specify the
"DoubleSide" keyword:
(sdedr:define-refinement-function "RefinementDefinition_1" "MaxLenInt"
"Silicon" "Oxide" 0.02 1.4 "DoubleSide")

Sentaurus™ Structure Editor User Guide 251

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

Multibox Refinements
Multibox refinements are similar to regular mesh refinement boxes, but the requested
minimum mesh spacing can be graded. It starts with the minimum value given at a specified
side of the refinement window and is expanded by a given factor from one mesh line to the
next until the given maximum is reached. Sentaurus Mesh uses multibox refinement boxes.
Note:
Consider using interface refinement in Sentaurus Mesh as a more flexible
alternative to multibox refinement.
Multibox refinement applies only to rectangular (2D) and cuboidal (3D) Ref/Eval
windows. Polygonal Ref/Eval windows and regionwise or materialwise
placements are not supported. Moreover, refinement functions cannot be added
to multibox refinements. Use additional regular mesh refinement boxes to obtain,
for example, refinement at doping gradients in addition to multibox refinement.

To define a multibox refinement:

1. Choose Mesh > Multibox Placement, or click the corresponding toolbar button (see
Table 14 on page 50).
The Multibox Specification dialog box opens.
2. Edit the Placement Name field as needed (MultiboxPlacement_<index> is the default
name), or select the name of an existing multibox refinement specification for editing.
3. Under Placement Type, select a Ref/Eval window.
To define a new Ref/Eval window or to edit an existing Ref/Eval window, proceed as
discussed in Regular Mesh Refinement Boxes on page 247 in Steps 3d and 3e.
4. Under Multibox Definition, edit the Name field as needed (the default name is
MultiboxDefinition_<index>).

You can link an existing refinement definition to the current multibox placement by
selecting it from the corresponding list.
5. Under Multibox Definition, enter values for the required maximum and minimum element
sizes in each axis direction as well as for the expansion ratio:
◦ Use a positive expansion ratio to apply the minimum element size at the respective
boundary with the lower coordinate value, that is, the left, front, or bottom side.
◦ Use a negative expansion ratio to apply the minimum element size at the respective
boundary with the higher coordinate value, that is, the right, back, or top side.
◦ A ratio of 1 means the minimum element size is used throughout the multibox.
◦ A ratio of 0 deactivates refinement along the corresponding axis.

Sentaurus™ Structure Editor User Guide 252

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

Omit this step when reusing an existing refinement definition.

6. When you have completed the specification, click Add Placement.

After the new specification is added, the Add Placement button changes to Change
Placement, and the Delete Placement button becomes available.
See Sentaurus™ Mesh User Guide, Defining Multibox Region, and Sentaurus™ Mesh User
Guide, Placing Multibox Regions.
The Scheme extensions for creating a multibox refinement are:
(sdedr:define-refeval-window rfwin-name "Rectangle" | "Cuboid"
position position)
(sdedr:define-multibox-size mbox-name max-x max-y max-z min-x min-y
min-z ratio-x ratio-y ratio-z)

For example:
(sdegeo:create-cuboid (position 1 3 5) (position 2 4 6) "Silicon"
"region_1")

Sentaurus™ Structure Editor User Guide 253

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

(sdedr:define-refeval-window "RefEvalWin_1" "Cuboid"

(position 1 3 5) (position 2 4 6))
(sdedr:define-multibox-size "MultiboxDefinition_1"
0.25 0.25 0.25
0.05 0.05 0.05
-2 0 1)
(sdedr:define-multibox-placement "MultiboxPlacement_1"
"MultiboxDefinition_1" "RefEvalWin_1")

Offsetting Refinements
The main algorithm in Sentaurus Mesh produces meshes that are mostly axis aligned. Even
when refining curved interfaces, an adapted axis-aligned mesh is used by default.
Sentaurus Mesh also provides an offsetting algorithm that resolves interfaces by introducing
mesh layers truly parallel to the curved surfaces.
For devices where the main surfaces are nonaxis-aligned or curved (for example, a
MOS-type structure where the channel is nonplanar), the offsetting algorithm is an attractive
alternative to purely axis-aligned meshing.
To define offsetting refinements globally or for a region, a material, or an interface:
1. Choose Mesh > Offsetting Parameters.
The Offsetting Parameters dialog box opens.

2. Click New to add a new offsetting refinement parameter, or select a defined parameter
from the list and click Edit.

Sentaurus™ Structure Editor User Guide 254

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Mesh Refinements

The Offsetting Parameter dialog box opens.

3. Specify the fields on the required tabs, and then click Save.
4. (Optional) Select includeExterior to include the exterior material or region.
5. (Optional) Select normalSmoothing to reorient the surface normals around high
curvature areas to avoid tangled surfaces during the construction of analytic layers.
6. Click Close.
The corresponding Scheme extensions are:
(sdedr:offset-block {"region" region | "material" material}
"maxlevel" maxlevel)

(sdedr:offset-interface
{"region" region1 region2 | "material" material1 material2}
"hlocal" hlocal "factor" factor "window" x1 y1 z1 x2 y2 z2)

(sdesnmesh:offsetting ["includeExterior" includeExterior]

["normalSmoothing" normalSmoothing])

For example:
(sdedr:offset-block "region" "R.SiEpi" "maxlevel" 10)

(sdedr:offset-interface "region" "R.SiEpi" "R.Oxide"

"hlocal" 2e-4 "factor" 1.5 "window" 0.0 0.0 0.0 0.1 0.2 0.5)

(sdesnmesh:offsetting "includeExterior" #t "normalSmoothing" #t)

Sentaurus™ Structure Editor User Guide 255

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Defining Doping Profiles

This section describes how to define doping profiles.

Defining Constant Doping Profiles

To define a constant doping profile:
1. Choose Device > Constant Profile Placement, or click the corresponding toolbar
button (see Table 14 on page 50).
The Constant Profile Placement dialog box opens.

2. Edit the Placement Name field as needed (ConstantProfilePlacement_<index> is

the default name), or select the name of a previously defined constant profile for editing.

Sentaurus™ Structure Editor User Guide 256

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

3. Under Placement Type, select a Ref/Eval window as discussed in Step 3 of Regular

Mesh Refinement Boxes on page 247.
4. Under Constant Profile Definition, edit the Name field as needed (the default name is
ConstantProfileDefinition_<index>).

You can link an existing constant profile definition to the current constant profile
placement by selecting it from the corresponding list.
5. Select a species from the list, which contains the most common dopant species. Select
Other to access the complete list of DATEX variables. Enter a value for the concentration
of the dopant.
6. To activate smoothing of the otherwise abrupt doping profile at Ref/Eval boundaries,
enter a nonzero decay length in the Decay Length field and select On.
In this case, doping profiles are smoothed using an error function with an inflection length
given by the specified decay length. Note that, in this case, the doping value at Ref/Eval
boundaries is half of the specified concentration
For details, see Sentaurus™ Mesh User Guide, Placing Constant Profiles, and
Sentaurus™ Mesh User Guide, Lateral Error Function.
7. Select the replacement option:
◦ Select Replace to replace all other previously defined profiles with this doping profile.
◦ Select LocalReplace to replace only the doping species being defined.
◦ Select NoReplace to add the new profile to all previously defined profiles.
Omit this step when reusing an existing refinement definition.
8. When you have completed the constant profile specification, click Add Placement.
After the specification is added, the Add Placement button changes to Change
Placement, and the Delete Placement button becomes available.
The Scheme extensions for creating constant doping profiles are:
(sdedr:define-refeval-window rfwin-name "Rectangle" | "Cuboid"
position position)

(sdedr:define-constant-profile definition-name species concentration)

(sdedr:define-constant-profile-placement placement-name
definition-name rfwin-name [decay-length]
["Replace" | "LocalReplace"])

(sdedr:define-constant-profile-material placement-name definition-name

material-name [decay-length] ["Replace" | "LocalReplace"])

Sentaurus™ Structure Editor User Guide 257

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

(sdedr:define-constant-profile-region placement-name definition-name

region-name [decay-length] ["Replace" | "LocalReplace"])

For example:
(sdedr:define-constant-profile "Const.BG" "BoronActiveConcentration"
1e7)
(sdedr:define-constant-profile-material "PlaceCD.BG" "Const.BG" "GaAs")
(sdedr:define-constant-profile "Const.GaAsCap"
"ArsenicActiveConcentration" 3e18)
(sdedr:define-constant-profile-region "PlaceCD.GaAsCap" "Const.GaAsCap"
"R.GaAsCap" 2 "Replace")

Defining Analytic Doping Profiles

To define an analytic doping profile:
1. Choose Device > Analytic Profile Placement, or click the corresponding toolbar button
(see Table 14 on page 50).
The Analytical Profiles dialog box opens.
2. Edit the Placement Name field as needed (AnalyticalProfilePlacement_<index> is
the default name), or select the name of a previously defined analytic profile for editing.
3. Select a previously defined Ref/Eval window from the Ref/Eval Window list.
4. Under Profile Definition, edit the Name field as needed (the default name is
AnalyticalProfileDefinition_<index>).

You can link an existing analytic profile definition to the current analytic profile placement
by selecting it from the corresponding list.
5. Under Profile Definition, select a species from the list, which contains the most common
dopant species. Select Other to access the complete list of DATEX variables.
6. Under Profile Definition, from the Profile Type list, select the profile type along the
primary direction (orthogonal to the baseline, that is, a Ref/Eval window) from the
following options:
◦ Gaussian: Under Primary Direction Profile (Gauss), select Peak Concentration or
Dose, and enter the value of the peak concentration in units of cm–3 or the dose in
units of cm–2.
Enter the distance of the peak position to the baseline (Ref/Eval window) in µm.
Define the broadening of the profile by selecting Standard Deviation or Diffusion
Length from the list, and entering the corresponding distance in µm.

Sentaurus™ Structure Editor User Guide 258

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Alternatively, define the broadening by selecting Junction and entering the

concentration at junctions in units of cm–3 and the requested distance from the peak
position to the junction in µm. In this case, the standard deviation of the Gaussian
profile is computed automatically.
◦ Error Function: Under Primary Direction Profile (Gauss), select Max Concentration
or Dose, and enter the value of the maximum concentration in units of cm–3 or the
dose in units of cm–2.
Enter the distance of the inflection point to the baseline (Ref/Eval window) in µm.
Define the broadening of the profile by selecting Standard Deviation or Diffusion
Length from the list, and entering the corresponding distance in µm.
Alternatively, define the broadening by selecting Junction and entering the
concentration at junctions in units of cm-3 and the requested distance from the peak
position to the junction in units of µm. In this case, the broadening parameter of the
error function profile is computed automatically.
◦ 1D Profile: Enter the relative path and the file name of an external 1D profile in .plx
format. Click Browser to open a file browser.
You can restrict the external 1D profile to a certain range. Enter the starting 1D
coordinate of the external 1D profile in the From field and the ending 1D coordinate
in the To field. In the Units field, declare the unit of length in which the external 1D
profile coordinates are given. (For example, if the coordinate range in the external 1D
profile is –300 nm to 10000 nm, and the baseline should be aligned with a coordinate
of 500 nm, and noisy tails beyond 3000 nm should be ignored, enter 500 in the From
field and 3000 in the To field, and select Nanometer in the Units field.) In the Data
Scale field, enter the data scaling factor.
For a 1D profile, the species is read from the .plx data file and the selection in the
Species field is ignored.
◦ Analytic Function: Enter a formula in the Function field. For example:
a*sin(x)*cos(y)

Enter the initialization definition of any constants used in the formula in the
Initialization field. For example: a=2*10^18
Select the coordinate system to use for evaluating the analytic formula. Select
General if the x-, y-, and z-coordinates of the formula are to be interpreted in the
coordinate system of the device. Select Eval if x refers to the primary direction, and y
and z refer to the lateral directions.
7. Under Lateral Direction Diffusion, select the profile type along the lateral direction
(parallel to the baseline, that is, the Ref/Eval window) as Gaussian or Error Function.

Sentaurus™ Structure Editor User Guide 259

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Select from the list how the lateral-broadening parameter is defined:

◦ Factor computes the lateral-broadening parameter by multiplying the
primary-broadening parameter with a given factor.
◦ Standard Deviation or Diffusion Length defines the broadening parameter
explicitly. Enter the respective value in the corresponding field.
8. To restrict the evaluation of the analytic profile to only one side of the baseline, under
Eval Direction, select Positive or Negative.

In two dimensions, for a positive evaluation direction, the profile is evaluated only to the
right side of the baseline vector. In three dimensions, the profile is evaluated only along

Sentaurus™ Structure Editor User Guide 260

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

the positive direction of the baseline face normal. Select Both to evaluate the profile on
both sides.
9. If needed, select the EvalWindow option to restrict the evaluation of the analytic profile
further to a certain area. Profiles can be restricted to another Ref/Eval window by
selecting Ref/Win and then the name of the Ref/Eval window, or to a region or a material,
by selecting Region or Material, and selecting the region or material.
10.To activate smoothing at Ref/Eval window boundaries, enter a nonzero decay length in
the Decay Length field. In this case, the doping profiles are smoothed using an error
function with an inflection length given by the specified decay length.
In this case, the doping value at Ref/Eval window boundaries is half of the specified
concentration.
For details, see Sentaurus™ Mesh User Guide, Placing Constant Profiles, and
Sentaurus™ Mesh User Guide, Lateral Error Function.
11. Select the replacement option:
◦ Select Replace to replace all other previously defined profiles with this doping profile.
◦ Select LocalReplace to replace only the doping species being defined.
◦ Select NoReplace to add the new profile to all previously defined profiles.
12.Select Not Eval to suppress the evaluation of the analytic profile at the baseline itself.
Use this option, for example, to avoid double-counting at region interfaces, where two
different analytic profiles of the same species meet.
13.When you have completed the specification, click Add Placement.
After the specification is added, the Add Placement button changes to Change
Placement, and the Delete Placement button becomes available.
The Scheme extensions for creating analytic doping profiles are as follows.
Gaussian profile definition:
(sdedr:define-gaussian-profile definition-name species
"PeakPos" peak-position
{"PeakVal" peak-concentration | "Dose" dose}
{"ValueAtDepth" concentration-at-depth "Depth" depth |
"Length" diffusion-length | "StdDev" standard-deviation}
["Gauss"|"Erf" "Factor" factor] | ["Eval" "init-string"
"function-string"])

Error function profile definition:

(sdedr:define-erf-profile definition-name species
"SymPos" inflection-point
{"MaxVal" max-concentration | "Dose" dose}

Sentaurus™ Structure Editor User Guide 261

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

{"ValueAtDepth" concentration-at-depth "Depth" depth |

"Length" diffusion-length | "StdDev" standard-deviation}
["Gauss"|"Erf" "Factor" factor] | ["Eval" "init-string"
"function-string"])

External 1D profile definition:

(sdedr:define-1d-external-profile definition-name plx-file-name
"Scale" coordinate-scaling-factor-to-um
"DataScale" data-file-scaling-factor "Range" range-start range-end
["Gauss"|"Erf" "Factor" factor] | ["Eval" "init-string"
"function-string"])

Analytic formula definition:

(sdedr:define-analytical-profile definition-name species init formula
default-value ["general"])

Placement of the analytic profile:

(sdedr:define-analytical-profile-placement placement-name
definition-name RefEval-name {"Both" | "Positive" | "Negative"}
{"Replace" | "NoReplace" | "LocalReplace"}
{"Eval" | "NoEval"}
[RefEval-name decay-length "evalwin" |
region-name decay-length "region" |
material-name decay-length "material"])

For example, to place a Gaussian profile:

; - Halo implantation
; -- baseline definitions
(sdedr:define-refeval-window "BaseLine.Halo" "Line"
(position 0.02 0.0 0) (position 0.40 0.0 0))
; -- implant definition
(sdedr:define-gaussian-profile "Impl.Haloprof"
"BoronActiveConcentration"
"PeakPos" 0 "PeakVal" 1.5e18
"ValueAtDepth" 1.5e17 "Depth" 0.07
"Gauss" "Factor" 1.0)
; -- implant placement
(sdedr:define-analytical-profile-placement "Impl.Halo" "Impl.Haloprof"
"BaseLine.Halo" "Positive" "NoReplace" "Eval")

For example, to place a profile given by an analytic formula:

; Linear mole fraction profile 0.16 at base-col to 0 at base-emitter
(sdedr:define-refeval-window "BaseLine.Mole" "Line"
(position -0.45 0.5 0.0) (position 1.25 0.5 0.0))
(sdedr:define-analytical-profile "Prof.Mole" "xMoleFraction"
"a=0.16/0.075" "0.1*a*x" 0.1)
(sdedr:define-analytical-profile-placement "Place.Mole" "Prof.Mole"
"BaseLine.Mole" "Positive" "NoReplace" "Eval" "RWindow.BC" 0
"evalwin")

Sentaurus™ Structure Editor User Guide 262

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Including External 2D and 3D Doping Profiles

You can include external 2D or 3D doping profiles in a device structure. Such profiles are
generated typically by process simulators, such as Sentaurus Process. Often the extent of
the external doping profile matches the device geometry, which is the case when Sentaurus
Structure Editor is used to simplify and mesh a structure generated by Sentaurus Process
before it is passed to Sentaurus Device.
However, external doping profiles do not have to match the device geometry. Sentaurus
Mesh extends automatically the doping profile to fill the evaluation window or cuts out the
part that lies outside of the evaluation window. The alignment of the external doping profile
with the evaluation window can also be specified. Furthermore, profiles can be reflected or
rotated.
In addition, if a 2D profile is included in a 3D device structure, then the profile is extended
automatically. If the global coordinates of the 2D profile itself lie already in the correct cross
section of the 3D device structure, then no user intervention is needed for the profile
extension. Otherwise, an appropriate transformation must be applied.
To include an external 2D or 3D doping profile in a device structure:
1. Choose Device > External Profile Placement, or click the corresponding toolbar button
(see Table 14 on page 50).
The External Profile Placement dialog box opens.
2. Edit the Placement Name field as needed (ExternalProfilePlacement_<index> is
the default name), or select the name of an existing external profile specification for
editing.
3. Under External Profile Definition, edit the Name field as needed (the default name is
ExternalProfileDefinition_<index>).

You can link an existing external profile definition to the current external profile
placement by selecting it from the corresponding list.
4. In the Geometry File field, enter the name of the TDR file that contains the required
external profile. Click Browser to open a file browser.
5. Under Data Files, select the data files to be defined, and select a mode for the files.
When you are finished defining a file, click Add.
6. Under Species, select the doping you want to add. Then, enter the Species Factor, and
click Add.
Continue to add species and species factors as required.
7. Under Evaluation Window Type, select Ref/Eval Win, Region, or Material as discussed
in Step 3 of Regular Mesh Refinement Boxes on page 247.

Sentaurus™ Structure Editor User Guide 263

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

To place the external profile in the entire device, select Ref/Eval Win and leave the field
empty.
8. To define an evaluation window, select Define Evaluation Window. Enter the
coordinates for the opposite vertices of the evaluation window, and click Define.
9. Under Lateral Decay, to activate smoothing at Ref/Eval window boundaries, define a
nonzero decay length in the field provided. Select Decay Length to use an error function
or Gauss Decay Length to use a Gaussian function.

10.Select the replacement option:

◦ Select Replace to replace all other previously defined profiles with this doping profile.
◦ Select LocalReplace to replace only the doping species being defined.
◦ Select NoReplace to add the new profile to all previously defined profiles.

Sentaurus™ Structure Editor User Guide 264

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

11. Under Shift/Reflect/Rotate, define the geometric transformations of translation,

reflection, and rotation:
a. Click New to create a transformation operation.
The dialog box opens.
b. Select Shift, Reflect, or Rotation and enter the required values to characterize the
operation, and then click Create.
The new operation appears in the list.
c. To add more operations after, at least, one has been defined, click Prepend or
Append. To place the new operation within the list instead of at the beginning or end
of the list, select one of the operations in the list, and click Prepend or Append.
d. To modify an operation, select an operation in the list and click Edit.
e. To delete an operation, select an operation in the list and click Delete.
f. To reorder the operations in the list, select one operation and drag it to a new location
in the list.
Note:
Sentaurus Structure Editor respects the order of transformation operations.
Operations are passed to Sentaurus Mesh in the order they appear in the list.

12.When you are finished, click Add Placement.

After the external profile is added, the Add Placement button changes to Change
Placement, and the Delete Placement button becomes available.
The Scheme extensions for defining and placing external profiles are:
(sdedr:define-submesh definition-name TDR-file-name)

(sdedr:define-submesh-placement placement-name definition-name

rfwin-name ["PlacementType" {"region" | "material" | "evalwin"}]
{["DecayLength" decay-length] |
["GaussDecayLength" gauss-decay-length]}
["Replace" | "NoReplace" | "LocalReplace"] ["IgnoreMat"]
["MatchMaterialType"])

For details, see Sentaurus™ Mesh User Guide, Defining Submeshes.

In addition, for transformation operations, the following Scheme extension appends
transformations to the named submesh placement. Any number of transformations can be
appended in one call of this Scheme extension, which can be called as many times as
necessary. Transformations are appended and applied in the specified order:
(sdedr:transform-submesh-placement placement-name
[<transform1> <transform2> ... <transformN>])

Sentaurus™ Structure Editor User Guide 265

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Here, <transformX> is any one of these transformations:

• "Reflect" axis

• "Rotation" angle axis

• "ShiftVector" (gvector <coord> <coord> <coord>)

where:
• axis can be "X", "Y", or "Z".

• angle, coord are floating-point numbers for the angle and for the x-, y-, and
z-coordinates.

Examples
Clear all transformations defined for the named submesh placement:
(sdedr:clear-submesh-placement-transform "SubmeshPlacementName")

The following 2D examples use a common set of Scheme extensions to create a simplified
device structure and to define a meshing strategy:
(sde:clear)
(sdegeo:create-rectangle (position -0.445 0.0 0) (position 0.0 0.5 0)
"Silicon" "region_L")
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 0.445 0.5 0)
"Silicon" "region_R")
(sdedr:define-refinement-size "RefinementDefinition_1" 0.25 0.5 0.001
0.001)
(sdedr:define-refinement-material "RefinementPlacement_1"
"RefinementDefinition_1" "Silicon")
(sdedr:define-refinement-function "RefinementDefinition_1"
"DopingConcentration" "MaxTransDiff" 1)

Starting with the previous Scheme script, the following examples present different variations
of including an external doping profile.
Include an external doping profile called n34_fps.tdr in the entire device structure:
(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "" "NoReplace")

Note:
The empty string before "NoReplace" indicates that the profile will be included in
the entire device structure. The profile is extended to regions of the device
structure that are not covered by the external profile.

Sentaurus™ Structure Editor User Guide 266

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Restrict the inclusion of the external doping profile to a Ref/Eval window and reflect the
external profile using a mirror plane that goes through the bounding box center of the
external profile and is orthogonal to the x-axis:
(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-refeval-window "RefEvalWin_1" "Rectangle"
(position 0.0 0.0 0) (position 0.445 0.4 0))
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "RefEvalWin_1" "NoReplace")
(sdedr:transform-submesh-placement "ExternalProfilePlacement_1"
"Reflect" "X")

Shift the external profile by 0.445 µm to the left, and include it in all silicon regions:
(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "Silicon" "PlacementType" "Material"
"NoReplace")
(sdedr:transform-submesh-placement "ExternalProfileDefinition_1"
"ShiftVector" (gvector -0.445 0.0 0.0))

Reflect and shift the external profile by 0.445 µm to the left, and include it only in a given
region:
(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "region_L" "PlacementType" "Region"
"NoReplace")
(sdedr:transform-submesh-placement "ExternalProfileDefinition_1"
"ShiftVector" (gvector 0.445 0 0) "Reflect" "X")

Include the same profile twice, once at its original location, and once reflected and shifted:
(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "region_R" "PlacementType" "Region")
(sdedr:define-submesh-placement "ExternalProfilePlacement_2"
"ExernalProfileDefinition_1" "region_L" "PlacementType" "Region"
"NoReplace")
(sdedr:transform-submesh-placement "ExternalProfilePlacement_2"
"ShiftVector" (gvector 0.445 0 0) "Reflect" "X")

Sentaurus™ Structure Editor User Guide 267

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Figure 122 Including external doping profiles using different options: (a) simple inclusion;
(b) reflections and Ref/Eval window; (c) shift; (d) reflect, shift, and region restriction;
and (e) using the same profile twice
(a) 0 (b) 0

0.1 0.1

0.2 0.2
Y [µm]

Y [µm]
0.3 0.3

0.4 0.4

0.5 0.5
-0.4 -0.2 0 0.2 0.4 -0.4 -0.2 0 0.2 0.4
X [µm] X [µm]

(c) 0 (d) 0

0.1 0.1

0.2 0.2
Y [µm]

Y [µm]

0.3 0.3

0.4 0.4

0.5 0.5
-0.4 -0.2 0 0.2 0.4 -0.4 -0.2 0 0.2 0.4
X [µm] X [µm]
(e) 0

0.1

0.2
Y [µm]

0.3

0.4

0.5
-0.4 -0.2 0 0.2 0.4
X [µm]

The following example illustrates how to include a 2D external doping profile in a simple 3D
structure. Both examples use a common set of Scheme extensions to create a simplified
device structure and to define a meshing strategy:
(sde:clear)
(sdegeo:create-cuboid (position 0.0 0.0 0.0)
(position 0.445 0.445 0.445) "Silicon" "region_p1")
(sdedr:define-refinement-size "RefinementDefinition_1"
0.2 0.2 0.2
0.004 0.004 0.004)
(sdedr:define-refinement-material "RefinementPlacement_1"

Sentaurus™ Structure Editor User Guide 268

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

"RefinementDefinition_1" "Silicon")
(sdedr:define-refinement-function "RefinementDefinition_1"
"DopingConcentration" "MaxTransDiff" 1)

Include the profile without any alignment:

(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "Silicon" "PlacementType" "Material"
"NoReplace")

Note:
The 2D profile lies in the xy plane. The simple inclusion results in an extrusion of
the profile along the z-axis.

Rotate the profile into the xz plane before inclusion:

(sdedr:define-submesh "ExternalProfileDefinition_1" "n34_fps.tdr")
(sdedr:define-submesh-placement "ExternalProfilePlacement_1"
"ExternalProfileDefinition_1" "Silicon" "PlacementType" "Material"
"NoReplace")
(sdedr:transform-submesh-placement "ExternalProfilePlacement_1"
"Rotation" -90 "X" "ShiftVector" (gvector 0 0 0.445))

Figure 123 Including a 2D external doping profile in a 3D structure: (left) by default the profile
lies in the xy plane and (right) using shifts and rotations to place the profile in the xz
plane

Z
Y
X

Sentaurus™ Structure Editor User Guide 269

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

Defining Particle Doping Profiles

To define a particle doping profile:
1. Choose Device > Particle Profile Placement, or click the corresponding toolbar button
(see Table 14 on page 50).
The Particle Profiles dialog box opens.

2. Edit the Placement Name field as needed (ParticleProfilePlacement_<index> is

the default name), or select the name of an existing particle profile specification for
editing.
3. Under Evaluate Window, select Ref/ Win and a Ref/Eval window as discussed in Step 3
of Regular Mesh Refinement Boxes on page 247.
4. Under Particle Profile Definition, edit the Name field as needed (the default name is
ParticleProfileDefinition_<index>).

Sentaurus™ Structure Editor User Guide 270

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Doping Profiles

You can link an existing particle profile definition to the current particle profile placement
by selecting it from the corresponding list.
5. Edit the ParticleFile field, or click Browse to select the file.
6. Optionally, from the Species list, select a species that contains the most common dopant
species:
◦ Select Other to access the complete list of DATEX variables.
◦ Select blank at the end of the list so as not to use Species. The blank species is the
default.
7. Optionally, enter values for ScreeningFactor, ScreeningScalingFactor,
BoundaryExtension, and Divisions. If required, select Normalization and
AutoScreeningFactor.
For details, see Sentaurus™ Mesh User Guide, Placing Constant Profiles, and
Sentaurus™ Mesh User Guide, Defining Particle Profiles.
8. Select the replacement option:
◦ Select Replace to replace all other previously defined profiles with this doping profile.
◦ Select LocalReplace to replace only the doping species being defined.
◦ Select NoReplace to add the new profile to all previously defined profiles.
Omit this step when reusing an existing refinement definition.
9. When you have finished, click Add Placement.
After the specification is added, the Add Placement button changes to Change
Placement, and the Delete Placement button becomes available.
The Scheme extensions for creating particle doping profiles are sdedr:define-particle-profile
on page 559, sdedr:define-particle-profile-placement on page 560, and
sdedr:define-refeval-window on page 561.
For example:
(sdedr:define-refeval-window "RefEvalWin_1" "Rectangle"
(position -1 -0.5 0) (position -0.5 0 0))
(sdedr:define-particle-profile "ParticleProfileDefinition_1"
"particlefile"
"Species" "BoronActiveConcentration" "ScreeningFactor" 1
"BoundaryExtension" 5 "Divisions" 10 "AutoScreeningFactor" #t
"Normalization" #t "NumberOfThreads" 4 "DopingAssignment" "CIC")
(sdedr:define-particle-profile-placement "ParticleProfilePlacement_1"
"ParticleProfileDefinition_1""EvalWindow" "RefEvalWin_1" "evalwin"
"Replace" #t)

Sentaurus™ Structure Editor User Guide 271

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

Controlling the Boundary Tessellation

This section discusses boundary tessellation.

Global Tessellation Settings

Internally, Sentaurus Structure Editor uses a representation of geometric bodies that can
include curved boundaries, for example, regions with circular or spline boundary edges in
two dimensions, and regions with cylindrical or spherical boundary faces. In addition, certain
sweep and revolve operations lead to curved boundaries.
Other TCAD Sentaurus tools, however, work exclusively with polyhedral boundaries. When
exporting a device boundary, Sentaurus Structure Editor approximates all boundaries by a
sequence of straight line segments (in two dimensions) or by patches of flat triangles (in
three dimensions). This process is called tessellation. To save the tessellated boundary, use
the sdeio:save-tdr-bnd Scheme extension (see sdeio:save-tdr-bnd on page 752) or
choose File > Save Boundary As (or Save Boundary).
Converting the curved boundary to a polyhedral patch is not unique, and you can control the
tessellation process.

Available Faceters
Two faceters are available to tessellate the internal (2D or 3D, possibly curved) model
geometry. If a TDR boundary is saved using the sdeio:save-tdr-bnd Scheme extension,
then you can use the "faceter" argument to select the faceter from either "v1" (default) or
"v2".

In some cases, the "v2" faceter provides better quality tessellation, especially in three
dimensions, when curved spline faces are present in the native model geometry.
The control parameters of both faceters can be set by using the sdeio:save-tdr-bnd
Scheme extension. The faceters are controlled by the following:
• Surface tolerance refers to the allowable maximum deviation (distance, in global
coordinates) between the internal curved representation and the tessellated output.
• Normal tolerance is the maximum difference (in degrees) that is allowed between the
surface normals of the internal curved representation and the face normals of the
tessellated output.
• Aspect ratio is the preferred aspect ratio of the boundary tessellation triangles.
• Maximum edge length is the maximum-allowed edge length in the tessellated output.

Sentaurus™ Structure Editor User Guide 272

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

If the exported boundary contains an excessive number of elements and meshing takes a
long time, then the values of the surface and normal tolerances might need to be relaxed.
However, if important geometric features of the structure are not resolved in the exported
boundary, then the surface tolerance and normal tolerance values might need to be
decreased.
In addition to controlling the "v1" faceter by using sdeio:save-tdr-bnd, you can control
the "v1" faceter by a global refinement setting.
To set the parameters for the "v1" faceter:
1. Choose Mesh > Global Refinement.
The Refinement Control dialog box opens.

2. Enter the values for the surface tolerance, the normal tolerance, the aspect ratio, and the
maximum edge length.
3. Click OK.
The corresponding Scheme extension is:
(sde:setrefprops surface-tolerance normal-tolerance
[aspect-ratio max-edge-length])

Examples
To follow the examples here, activate the facets rendering mode by choosing View >
Render > Facets or clicking the corresponding toolbar button (see Table 5 on page 47).

Effect of Surface Tolerance

The following example illustrates the effect of surface tolerance:
(sde:clear)
(sdegeo:create-sphere (position 0.0 0.0 0.0) 1.0 "Silicon" "region_1")
; (a) Default settings:
(sde:setrefprops -1 15 0 0)
; (b) Relax all settings:
(sde:setrefprops 0 90 0 0)
; (c) Tight surface tolerance
(sde:setrefprops 0.001 90 0 0)

Sentaurus™ Structure Editor User Guide 273

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

Figure 124 Controlling surface tessellation: (left) default settings, (middle) relaxed settings, and
(right) tight surface tolerance only

Effect of Normal Tolerance

This example illustrates the effect of normal tolerance:
(sde:clear)
(sdegeo:create-cylinder (position 0.0 0.0 -1.0) (position 0.0 0.0 1.0)
1.0 "Silicon" "region_2")
; (a) Default settings:
(sde:setrefprops -1 15 0 0)
; (b) Relax all settings:
(sde:setrefprops 0 90 0 0)
; (c) Tight normal tolerance
(sde:setrefprops 0 5 0 0)

Figure 125 Controlling surface tessellation: (left) default settings, (middle) relaxed settings, and
(right) tight normal tolerance only

Tighter surface and normal tolerances create more facets. Both parameters work effectively
in a similar way, but use a slightly different criterion.

Sentaurus™ Structure Editor User Guide 274

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

Effect of the Aspect Ratio

The following example illustrates the effect of the aspect ratio:
(sde:clear)
(sdegeo:create-ellipse (position 0.0 0.0 0.0) (position 1.0 0.0 0.0)
0.05 "Silicon" "region_1")
; (a) Default settings:
(sde:setrefprops -1 15 0 0)
; (b) Relax all settings:
(sde:setrefprops 0 90 0 0)
; (c) Aspect ratio
(sde:setrefprops 0 90 1.0 0)

Figure 126 Controlling surface tessellation: (top) default settings, (middle) relaxed settings, and
(bottom) tight aspect ratio only

The aspect ratio setting does not create new nodes (2D) or faces (3D). Instead, an aspect
ratio setting of 1 favors a tessellation for which the surface triangles are closer to equilateral
by flipping internal edges.

Effect of Maximum Edge Length

This example illustrates the effect of the maximum edge length:
(sde:clear)
(sdegeo:create-cuboid (position -1.0 -1.0 -1.0) (position 1.0 1.0 1.0)
"Silicon" "region_3")
; (a) Default settings:
(sde:setrefprops -1 15 0 0)
; (b) Tight normal tolerance
(sde:setrefprops 0 90 0 0.5)

For the specification of the surface tolerance, certain values have a predefined meaning. For
example, a value of zero deactivates this refinement criterion. While positive values such as
0.01 refer to an absolute distance in the current units (for example, 0.01 µm), certain
negative values define the tolerance distance as a fraction of the bounding box.
A negative surface tolerance means that the tolerance depends on the size of the diagonal
of the bounding box; the absolute value of the negative number is multiplied by a fraction
(1/500) of the diagonal of the bounding box.

Sentaurus™ Structure Editor User Guide 275

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

Figure 127 Controlling surface tessellation: (left) default settings and (right) maximum edge
length only

Table 31 Predefined values to specify the required surface tolerance

Surface tolerance value Definition

0 Switches off or ignores the surface tolerance refinement criteria

–0.1 1/5000th of the box

–1 1/500th

–10 1/50th

… …

Tessellating Spherical Faces

The default "v1" faceter triangulates spherical faces in such a way that a pole is not visible
in the tessellated surface. This minimizes the vertex connectivity at each vertex.
By default, in the sdeio:save-tdr-bnd Scheme extension, the argument "grid mode" is
set to "AF_GRID_ONE_DIR" (see sdeio:read-tdr-bnd on page 749). For example:
(sde:clear)
(sdegeo:create-cuboid (position -1.0 -1.0 -1.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:fillet (list
(car (find-edge-id (position 0 1 1)))
(car (find-edge-id (position 1 1 0)))

Sentaurus™ Structure Editor User Guide 276

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Controlling the Boundary Tessellation

(car (find-edge-id (position 1 0 1)))) 0.4)

(sdeio:save-tdr-bnd (get-body-list) "spherical-face-tessellation.tdr")

Figure 128 illustrates the effect of the tessellation algorithm.

Figure 128 Tessellating spherical faces: visible pole with (left) "grid mode"
"AF_GRID_TO_EDGES" and (right) "grid mode" "AF_GRID_ONE_DIR"

Pole Improved faceting

around the pole area

Boundary Tessellation in Three Dimensions

Sentaurus Structure Editor creates the TDR boundary output by using the faceter
component. During model generation, Sentaurus Structure Editor creates a native model
with solid bodies that can have nonplanar faces (for example, procedural faces such as
spherical, cylindrical, toroidal, or spline faces). The default faceter component can tessellate
these faces (generating a polyhedral approximation of the native model) that is written to the
TDR boundary output.
The quality of the tessellation is very important, since the meshing engines use the
tessellated boundary to create a volume mesh. If the tessellation quality is not good (sliver
faces for example), then the meshing engines might be unable to create a volume mesh.
The tessellated TDR boundary can be saved using the sdeio:save-tdr-bnd Scheme
extension.
Note:
If the (option:set "hoops_direct_render" #t) command is used, then the
GUI shows the faceted model that will be written to the TDR boundary output. You
can use the command (render:rebuild), or right-click and choose Show All,
to refresh the screen and to show the current faceting.

Sentaurus™ Structure Editor User Guide 277

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

Defining Command File Sections Specific to Sentaurus Mesh

This section discusses command file sections specific to Sentaurus Mesh.

IOControls Section and Interpolate Section

You can define the parameters of the IOControls section and the Interpolate section by
using the GUI or Scheme extensions (see sdesnmesh:iocontrols on page 787 and
sdesnmesh:interpolate on page 786).
To define the parameters of the IOControls section:
1. Choose Mesh > IOControls and Interpolate Parameters.
The IOControls Parameters dialog box opens.

2. Under IOControls Section, enter values for inputFile, or outputFile, or both in the
corresponding boxes.
Note:
If you specify inputFile, then it overrides the base name of the saved
boundary file when you create the mesh by either choosing Mesh > Build
Mesh (see Building the Mesh on page 288) or using the sde:build-mesh
Scheme extension (see sde:build-mesh on page 444).

Sentaurus™ Structure Editor User Guide 278

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

See Sentaurus™ Mesh User Guide, IOControls Section, for descriptions of parameters.
3. Select other options as required.
Note:
By default, EnableSections is selected, which means the option
EnableSections is added to the IOControls section of the mesh command
file by default.

4. Under Interpolate Section, select options as required.

See Sentaurus™ Mesh User Guide, Interpolate Section, for descriptions of parameters.
5. Click Save.

AxisAligned Section
By default, the bisectional refinement algorithm of Sentaurus Mesh starts from the bounding
box of the entire device structure. After all volume refinement criteria have been satisfied,
interfaces are introduced. This can result in mesh spacing near the interface that is less than
the requested mesh spacing.
The axis-aligned algorithm used in Sentaurus Mesh can partition the global bounding box
into an array of subboxes. The bisectional refinement algorithm then operates
independently in each partitioned boxes.
This feature can reduce mesh-induced numeric noise in parametric structures. For example,
for the simulation of the threshold voltage roll-off characteristics of a given technology, you
need to simulate the electrical characteristics of a set of transistors with different gate
lengths, but identical source and drain areas.
Changing the gate length changes the mesh in the channel area. However, by placing
partitioning lines between the gate and the source as well as drain areas, you ensure the
mesh in the source and drain areas remains the same for all devices.
These partitioning lines (2D) or planes (3D) are defined using the xCuts, yCuts, and zCuts
parameters of the AxisAligned section.
To define the parameters of the AxisAligned section:
1. Choose Mesh > Axis-Aligned Parameters.
The Axis-Aligned Parameters dialog box opens.
2. Enter values for parameters, and select options as required.
See Sentaurus™ Mesh User Guide, AxisAligned Section, for descriptions of parameters.

Sentaurus™ Structure Editor User Guide 279

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

3. Click Save.

Sentaurus™ Structure Editor User Guide 280

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

The corresponding Scheme extension is sdesnmesh:axisaligned on page 778. For

example:
(sdesnmesh:axisaligned "yCuts" (list 0.1 0.5 2.0))

Delaunizer Section
The Delaunizer section controls the behavior of the delaunization algorithms used in
Sentaurus Mesh.
To define the parameters of the Delaunizer section:
1. Choose Mesh > Delaunizer Parameters.
The Delaunizer Parameters dialog box opens.

Sentaurus™ Structure Editor User Guide 281

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

2. Enter values for parameters as required.

See Sentaurus™ Mesh User Guide, Delaunizer Section, for descriptions of parameters.
3. Click New.
The Delaunay Tolerance dialog box opens.

4. Enter values for parameters, and select options as required.

5. Click Save to close the Delaunay Tolerance dialog box.
6. Click Save.
The corresponding Scheme extensions are sdesnmesh:delaunizer on page 783 and
sdesnmesh:delaunizer-tolerance on page 785. For example:
(sdesnmesh:delaunizer-tolerance 1 "boundary" "global")
(sdesnmesh:delaunizer-tolerance 0.0001 "boundary" "material" "Oxide"
"Silicon")
(sdesnmesh:delaunizer "type" "boxmethod" "maxPoints" 100000
"coplanarityDistance" 1e-05 "edgeProximity" 0.05
"faceProximity" 0.05 "sliverAngle" 175 "sliverDistance" 0.01
"maxSolidAngle" 360 "maxNeighborRatio" 1e+30
"coplanarityAngle" 175 "minEdgeLength" 1e-09
"delaunayTolerance" 0.0001 "storeDelaunayWeight" #t)

Sentaurus™ Structure Editor User Guide 282

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

Tensor Section
To tensor mesh refinements:
1. Choose Mesh > Tensor Parameters.
The Tensor Block Editor opens.
2. Edit the Tensor section of the mesh command file as required.
For details, see Sentaurus™ Mesh User Guide, Tensor Section.
3. Click Save.
The corresponding Scheme extension is:
(sdesnmesh:tensor "tensor-block-contents")

where "tensor-block-contents" is a string surrounded by double quotation marks that

represents the required contents of the Tensor section of the mesh command file.
You must escape double quotation marks with a backslash within
"tensor-block-contents". For example:
(sdesnmesh:tensor "Box {
name = \"TensorBox1\"
material = \"Silicon\"
startPoint = (0 0 0)
endPoint = (1.0 1.5 1.5)
tolerance = 0.25
}")

Note:
The previous Tensor section Scheme extensions are deprecated and cannot be
used with sdesnmesh:tensor at the same time.

Boundary Section
The Boundary section allows you to control the boundary-processing algorithms available in
Sentaurus Mesh.
To define the Boundary section of the mesh command file:
1. Choose Mesh > Boundary Operators.
The Mesh Boundary Operations opens.
2. Select the required operations, and specify the parameters for those operations.
See Sentaurus™ Mesh User Guide, Boundary Section, for descriptions of parameters.

Sentaurus™ Structure Editor User Guide 283

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

3. (Optional) Under RegionMismatch, select Allow Region Mismatch and enter the value
for minVolume for the mismatch if you want Sentaurus Mesh to continue when a small
region is lost during the meshing process.

4. (Optional) Under Save, enter a file name if you want to save the modified boundary after
the operations are performed.
5. Click Save.
The corresponding Scheme extension is sdesnmesh:boundary on page 781. For example:
(sdesnmesh:boundary "DelPSC" "accuracy" 0.001)

Boundary Section
The Boundary section allows you to control the boundary-processing algorithms available in
Sentaurus Mesh.

Sentaurus™ Structure Editor User Guide 284

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

To define the Boundary section of the mesh command file:

1. Choose Mesh > Boundary Operators.
The Mesh Boundary Operations dialog box opens.
2. Select the required operations, and specify the parameters for those operations.
See Sentaurus™ Mesh User Guide, Boundary Section, for descriptions of parameters.

3. (Optional) Under RegionMismatch, select Allow Region Mismatch and enter the value
for minVolume for the mismatch if you want Sentaurus Mesh to continue when a small
region is lost during the meshing process.
4. (Optional) Under Save, enter a file name if you want to save the modified boundary after
the operations are performed.
5. Click Save.
The corresponding Scheme extension is sdesnmesh:boundary on page 781. For example:
(sdesnmesh:boundary "DelPSC" "accuracy" 0.001)

Sentaurus™ Structure Editor User Guide 285

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

Tools Section
To define the Tools section of the mesh command file:
1. Choose Mesh > Tools Parameters.
The Tools Block Editor opens.
2. Edit the contents of the Tools section of the mesh command file as required.
For details, see Sentaurus™ Mesh User Guide, Tools Section.
3. Click Save.
The corresponding Scheme extension is:
(sdesnmesh:tools "tools-block-contents")

where "tools-block-contents" is a string surrounded by double quotation marks that

represents the required contents of the Tools section of the mesh command file.
You must escape double quotation marks with a backslash within
"tools-block-contents". For example:
(sdesnmesh:tools "RandomizeDoping { \
DopingAssignment = \"Sano\" \
NumberOfRandomizedProfiles = 1 \
FileIndex = 1 \
Material \"Silicon\" { \
Species \"BoronActiveConcentration\" { \
ScreeningFactor = 2.5e6 \
AutoScreeningFactor \
} \
Species \"ArsenicActiveConcentration\" { \
ScreeningFactor = 1.3e7 \
AutoScreeningFactor \
} \
} \
}")

QualityReport Section
You can define the QualityReport section of the mesh command file. This section can
have one global block and multiple material and region blocks.

Sentaurus™ Structure Editor User Guide 286

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Defining Command File Sections Specific to Sentaurus Mesh

To define the QualityReport section:

1. Choose Mesh > Quality Report.
The Mesh Quality Report opens.

2. Under Domain, select Global, Material, or Region.

3. Select the required items from the Materials/Regions list:
◦ For a Material domain, this list contains the DATEX materials of the model.
◦ For a Region domain, the list contains all region names of the model.
4. When the parameters are specified, click Add.
The defined block is listed in the lower pane.
5. (Optional) Select a list item and click Edit to edit the parameters and redefine the block.
6. (Optional) Select a list item and click Delete to remove it.
7. (Optional) Click Clear to delete all defined blocks of the QualityReport section.
8. Click Close to exit the dialog box.

Sentaurus™ Structure Editor User Guide 287

V-2024.03
Chapter 7: Generating Mesh and Doping Profiles
Building the Mesh

The corresponding Scheme extension is sdesnmesh:qualityreport on page 789.

Building the Mesh

After all refinement and doping specifications have been created, you can mesh the
structure by using Sentaurus Mesh.
To build the mesh:
1. Choose Mesh > Build Mesh.
The Build Mesh dialog box opens.

2. In the Save Grid to File field, enter the name of the file where the mesh will be saved, or
click Browser to navigate to the required file.
Extensions such as .cmd, .Z, and .gz are removed from the file name to form the base
name of the mesh command file.
Note:
If you specified inputFile in the IOControls section, then it overrides the
base name of the saved boundary file.

Under Mesh Viewer, SVisual is selected by default to use Sentaurus Visual to view the
created mesh.
3. In the Other options field, enter command-line options as required.
See Sentaurus™ Mesh User Guide, Command-Line Options.
4. Click Save Values to save the global parameters without executing Sentaurus Mesh.
5. Click Build Mesh to create the mesh.

Sentaurus™ Structure Editor User Guide 288

V-2024.03
8
Creating Planar Layer Stacks
8

This chapter discusses how to create planar layer stacks efficiently including doping profiles,
mole fraction profiles, and refinements.

Using the sdeepi:create-layerstack Scheme Extension

The sdeepi:create-layerstack Scheme extension is useful for simulating compound
semiconductor devices based on epitaxial layer stacks. Such structures are typically grown
using epitaxial growth techniques such as metal-organic chemical vapor deposition or
molecular beam epitaxy. This Scheme extension facilitates structure generation for epitaxial
layer stacks.
A typical epitaxial structure consists of a stack of planar layers. The straightforward
approach to generate such a structure in Sentaurus Structure Editor requires approximately
10 to 15 commands to set up the geometry, doping, mole-fraction profiles, and refinements
for each layer. This makes structure generation unnecessarily complex. Using
sdeepi:create-layerstack, the layer stack description can be greatly simplified by using
a single line to define all layer properties for each layer.
To facilitate working with and organizing material parameters, the MatPar utility is available
(for details, see [1]).
The sdeepi:create-layerstack Scheme extension has the following features:
• All settings and layer properties of the layer stack are specified in a comma-separated
value (CSV) file that can be edited easily in a text editor or a spreadsheet application.
• All layer properties are defined efficiently with a single line in the CSV file.
• Based on the CSV file, sdeepi:create-layerstack generates the geometric
representation of the layer stack itself as well as doping, mole profile definitions, and
refinements.
• Automatic creation of top and bottom contacts.
• Both two-dimensional and three-dimensional layer stacks can be created.

Sentaurus™ Structure Editor User Guide 289

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

• Both the unified coordinate system (UCS) orientation and the traditional (DF–ISE)
coordinate system orientation are supported.
• The epitaxial layers can have constant or graded doping and mole-fraction profiles.
• The layerwise mesh refinement strategy can be specified in the CSV file.
The sdeepi:create-layerstack Scheme extension creates a planar layer stack from the
user-defined description specified in the command file sde_epi.csv, which consists of the
following major sections:
• The global section where any global settings such as the lateral stack dimensions, global
refinement, and the top and bottom contact names can be defined.
• The layers section that defines for each layer its properties such as region name,
material, thickness, mole fraction, and refinement in a single row.
• An additional parameter file section where the generation of parameter files performed
with MatPar can be controlled in more detail [1].
The command file sde_epi.csv can be edited easily by right-clicking the Sentaurus
Structure Editor icon in the tool row and choosing Edit Input > CSV Data File.

Command File
The command file sde_epi.csv contains all the information needed to create the layer
stack. The file is preprocessed before execution as usual; therefore, it can include any
common preprocessing and Tcl preprocessing statements.
The entire file is structured as a comma-separated value (CSV) file. Therefore, it consists of
fields (columns) separated by commas. Each column is handled as a separate entity, for
example, the name of the layer or the thickness of the layer. Any trailing commas are
ignored.
Any line starting with a hash (#) as the first nonspace character is interpreted as a comment
and is ignored.
The following example is a CSV file generating a simple 2D p-n GaAs diode:
$global coodinateSystem=UCS
$global Ymin=0.0, Ymax=2.0
$global dXmax=0.2
$global topContact=anode, bottomContact=cathode
#Region, Material, ParFile, Thickness, Doping, MoleFrac, Refinement
cap,GaAs,,0.2,-1E+019,,(xref 0.02)
fsf,AlGaAs,AlGaAs.par,0.04,-2E+018,0.8,(xref 0.01)
emitter,GaAs,,0.8,-9E+017,,(mbox 0.05 1.1 both)
base,GaAs,,3.2,1E+017,,(mbox 0.01 1.1 both)

Sentaurus™ Structure Editor User Guide 290

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

bsf,AlGaAs,AlGaAs.par,0.2,5E+018,0.2,(mbox 0.01 1.2 both)

buffer,GaAs,,0.35,2E+018,,(mbox 0.01 1.2 up)

Global Section
The global section of the command file defines variables called global variables, which
define the properties of the complete layer stack such as stack width, global refinement, and
top and bottom contact names. The value of a particular global variable is the same for all
layers in the stack.
A line starting with $global is used to modify a global variable in the following way:
$global variable1=<value>, variable2=<value>, ...

Note:
The variable names are case sensitive.

An example of a typical global section is:

# Simple solar cell structure
$global coordinateSystem=DFISE
$global Xmax=@wtot@
$global dXmin=5, dXmax=5, dYmin=0.5, dYmax=0.5
$global topContact=anode, bottomContact=cathode

where:
• coordinateSystem sets the coordinate system orientation used when saving the TDR
file. More precisely, it defines the up direction of the structure:

Coordinate system Dimension Up direction

orientation

UCS 2D -x

UCS 3D -x

Traditional 2D -y

Traditional 3D +z

• Xmax sets the width of the layer stack to the Sentaurus Workbench parameter @wtot@.

• dXmin, dXmax, dYmin, and dYmax define some global refinement.

• topContact and bottomContact define the electrode names at the top and bottom of
the structure, respectively.

Sentaurus™ Structure Editor User Guide 291

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

For a complete list of global variables, see Table 32. Details about the variables are
described in the following sections.
All global variables can be written to the layer information file nX_epi.tcl using the
command:
(sdeepi:tcl "nX_epi.csv" "nX_epi.tcl")

Therefore, all global variables are available as Tcl variables in Tcl preprocessing blocks of
any subsequent tools by sourcing this file. For example, to print the minimum y-coordinate
of the stack inside a subsequent command file, insert the following:
!(
source "nX_epi.tcl"
puts min
)!

Note:
In Sentaurus Workbench, the preprocessed CSV file nX_epi.csv can be access
by @epicsv@. Similarly, the layer information file nX_epi.tcl can be accessed
through @epitcl@.

Table 32 Structure information in global section of CSV file, listing predefined global
variables

Predefined global Description Settable? Default Unit

variables

Geometric properties of complete layer stack in all three directions

Xmin Minimum extent of the layer Yes 0 µm

stack in the x-direction.

Xmax Maximum extent of the layer (Yes) 1 µm

stack in the x-direction. Ignored if
set for the UCS.

Ymin Minimum extent of the layer Yes 0 µm

stack in the y-direction.

Ymax Maximum extent of the layer (Yes) 1 µm

stack in the y-direction. Ignored if
set for the traditional coordinate
system orientation (two
dimensions).

Sentaurus™ Structure Editor User Guide 292

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 32 Structure information in global section of CSV file, listing predefined global
variables (Continued)

Predefined global Description Settable? Default Unit

variables

Zmin Minimum extent of the layer (Yes) 0 µm

stack in the z-direction. It can be
set only for UCS orientation
(three dimensions); otherwise, it
is ignored.

Zmax Maximum extent of the layer (Yes) 1 µm

stack in the z-direction.
Ignored if set in two dimensions.

coordinateSystem Either UCS (unified coordinate Yes UCS –

system orientation) or DFISE
(traditional coordinate system
orientation).

dimension For 2D structures, dimension=2. Yes 2 –

For 3D structures, dimension=3.

Global mesh refinement strategy for entire structure

dXmin, dYmin, dZmin Minimum element size in the xyz Yes 9999.0 µm
directions.

dXmax, dYmax, dZmax Maximum element size in the xyz Yes 9999.0 µm
directions.

Electrode information

topContact If defined, contains the name of Yes – –

the contact to be created on the
top of the layer stack.

bottomContact If defined, contains the name of Yes – –

the contact to be created at the
bottom of the layer stack.

Doping information

NDopant Doping species used for Yes ArsenicActive –

n-doping. For a more generic Concentration
species, you can use
NDopantActiveConcentration.

Sentaurus™ Structure Editor User Guide 293

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 32 Structure information in global section of CSV file, listing predefined global
variables (Continued)

Predefined global Description Settable? Default Unit

variables

PDopant Doping species used for Yes BoronActive –

p-doping. For a more generic Concentration
species, you can use
PDopantActiveConcentration.

Miscellaneous information

columnNames Contains a list of column names. Yes – –

To add user-defined columns,
use the following syntax:
$global append columnNames
<column1> <column2> ...

bottomRegionName Region name of the bottommost No – –

layer.

topRegionName Region name of the topmost No – –

layer.

nDopant Dataset name used for n-type Yes ArsenicActive –

doping. Concentration

pDopant Dataset name used for p-type Yes BoronActive –

doping. Concentration

Size and Position of Structure

The variables Xmin, Xmax, Ymin, Ymax, Zmin, and Zmax describe the extent of the layer stack
in all three directions.
Figure 129 shows a 2D layer stack created by sdeepi:create-layerstack and illustrates
both the UCS orientation and the traditional coordinate system orientation. The coordinate
system orientation is chosen with the global variable coordinateSystem, for example, the
default is coordinateSystem=UCS. In this case, the top of the layer stack is in the
x-direction. The topmost layer in the command file will be created with its top edge at Xmin.
Set coordinateSystem=DFISE to activate the traditional coordinate system orientation. In
this case, for a 2D structure, the top of the layer stack is in the –y-direction and the topmost
layer is at Ymin.

Sentaurus™ Structure Editor User Guide 294

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Each subsequent layer line will be created in the order it appears in the command file, until
the last layer is created. The bottom edge of the last layer defines Xmax for the UCS (or Ymax
for the traditional coordinate system orientation for a 2D structure).
By default, Xmin = Ymin = 0. In addition, as shown in Figure 129, it is required that
Xmin < Xmax. All layers have the same width, which can be defined using Ymin and Ymax for
the UCS, or Xmin and Xmax for the traditional coordinate system orientation (see Table 32 on
page 292).

Figure 129 Generated layer stack with: (left) UCS orientation and (right) traditional coordinate
system orientation
(Xmin, Ymin) (Xmin, Ymin)
00 00

0.5 0.5

11 11
–3
DopingConcentration [cm ] DopingConcentration [cm−3]
1.5 5.000e+18 1.5 5.000e+18

2.068e+16 2.068e+16
22 8.550e+13
22
8.550e+13

-3.536e+11 -3.536e+11
X

X 2.5 Y 2.5
-1.710e+14 -1.710e+14

-4.135e+16 -4.135e+16
33 33
-1.000e+19 -1.000e+19

3.5 3.5

44 44

4.5 4.5
(Xmax, Ymax) (Xmax, Ymax)
-1
-1 -0.5
-0.5 0 0.5
0.5 1 1.5 2 2.5
2.5 3 -1
-1 -0.5
-0.5 0 0.5
0.5 1 1.5
1.5 2 2.5
2.5 3
Y
Y X
X

If the global variable dimension=3 is specified, a corresponding 3D structure is created as

illustrated in Figure 130. The top of the layer stack is in the –x-direction for the UCS
orientation and in the +z-direction for the traditional coordinate system orientation. The
extent of the layer stack in the third dimension is controlled with the Zmin and Zmax variables
for the UCS orientation, and the Ymin and Ymax variables for the traditional coordinate
system orientation.

Sentaurus™ Structure Editor User Guide 295

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Figure 130 Three-dimensional layer stack with (left) UCS orientation and updirection=-x,
Ymax=15, and Zmax=10, and (right) traditional coordinate system orientation and
updirection=+z, Xmax=10, and Ymax=15
(Xmin, Ymin, Zmin) (Xmin, Ymin, Zmax)

Z
Z Y
X X Y

(Xmax, Ymax, Zmax) (Xmax, Ymax, Zmin)

The next sections describe the usage of sdeepi in the UCS orientation.

Global Refinement Strategy

In addition to layerwise refinements (see Refinement Column on page 306),
sdeepi:create-layerstack allows you to define a global refinement that is defined as a
refinement window covering the entire layer stack.
dXmin and dXmax are minimum and maximum element sizes, respectively, for global mesh
refinement in the x-direction for the entire structure. dYmin, dYmax, dZmin, and dZmax have
similar meaning.
If you define dXmin=0, or dYmin=0, or dZmin=0, sdeepi:create-layerstack resets this
minimum element size to be equal to the corresponding maximum element size. The global
refinement window is positioned to cover the entire layer stack.
Note:
The sdeepi:create-layerstack Scheme extension generates global
refinement commands only if you modify the value of at least one of these
variables.

User-Defined Extension Columns

In addition to the predefined layer properties, sdeepi:create-layerstack allows you to
add user-defined layer properties. This can be useful in cases where some tools need
additional layer-specific data.

Sentaurus™ Structure Editor User Guide 296

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

For example, to switch on radiative recombination in Sentaurus Device for particular layers,
an additional layer column Rrad could be defined with:
$global append columnNames Rrad

This user-defined column can be filled with values as described in Extension Columns on
page 308. The column values are saved with all other properties in the Tcl file nX_epi.tcl
and can be incorporated in any subsequent Tcl preprocessing block.
Note:
To create multiple extension columns, use the following syntax:
$global append columnNames <extensionColumnName1>
<extensionColumnName2> ...

Layers Section
All layers of the layer stack are defined in the layers section, which consists of one line for
each layer to be created. Basically, any line not starting with a hash (#) or a dollar sign ($) is
a layer line. Stack generation starts with the first layer line as the topmost layer of the stack
and continues from top to bottom until the last layer line is reached.
Each layer line consists of several comma-separated columns, which
sdeepi:create-layerstack uses to create the layer stack:
<Region>, <Material>, <SourceParFile>, <Thickness>, <Doping>,
<MoleFraction>, <Refinement>, [<Extension1>, <Extension2>, ...]

Lines starting with an empty region name are used to create materialwise parameter file
definitions for MatPar [1].
Table 33 summarizes the columns used to describe each layer.
Table 33 Columns in layers section of CSV file

Column Description

Region Region name.

Material Material name.

SourceParFile Name of the source parameter file. Only used if MatPar is used to generate
parameter files.

Thickness Layer thickness. Default unit: µm

Doping Doping of each layer. A negative sign indicates p-type doping; a positive sign
indicates n-type doping. Default unit: cm–3

Sentaurus™ Structure Editor User Guide 297

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 33 Columns in layers section of CSV file (Continued)

Column Description

MoleFraction Mole fraction for ternary or quaternary materials. Default unit: [1]

Refinement Regionwise mesh refinement strategy for each layer. Default unit: µm

Additional user-defined extension columns can be added for various purposes.

The following is an example of the layers section of the command file of a GaAs
single-junction solar cell:
# Layers section
# Region, Material, SourceParFile, Thickness, Doping, MoleFraction,
# Refinement
cap,GaAs,,0.5,-5e19,,(xref 0.1)
fsf,AlGaAs,AlGaAs.par,0.03,-4e18,0.8,(xref 0.01)
emitter,GaAs,,0.5,-5e17,,(mbox 0.05 1.1 both)
base,GaAs,,2.5,1e17,,(mbox 0.05 1.1 both)
substrate,Germanium,Ge.par,5.0,1e18,,(mbox 0.05 1.1 both)

Table 34 shows how the same listing in a spreadsheet format, underlining the well-arranged
representation, compares to the source file listing.
Table 34 Example of layers section and material and interface section of epi_epi.csv

Line # Region Material SourceParFile Thickness Doping Mole Refinement

Fraction

# Layers section:

1 cap GaAs 0.5 -5.00e19 (xref 0.1)

2 fsf AlGaAs AlGaAs.par 0.03 -4.00e18 0.8 (xref 0.01)

3 emitter GaAs 0.5 -5.00e17 (mbox 0.05

1.1 both)

4 base GaAs 2.5 1.00e17 (mbox 0.05

1.1 both)

5 substrate Germanium Ge.par 5.0 1.00e18 (mbox 0.05

1.1 both)

Sentaurus™ Structure Editor User Guide 298

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Note:
If all columns following a particular column are empty in a layer definition, any
trailing commas are ignored. Therefore, the following two layer definitions are
identical:
cap,GaAs,GaAs.par,0.5,-5e19,,,
cap,GaAs,GaAs.par,0.5,-5e19

Leading and intermediate commas are important.

Region Column
The sdeepi:create-layerstack Scheme extension creates a region for each layer. The
name of the region is specified in the Region column.

Material Column
For each layer, the names of materials that Sentaurus Device recognizes are specified in the
Material column. For example, for a germanium layer, Germanium is specified in the Material
column.
To generate a list of all materials that Sentaurus Device recognizes, use:
sdevice -L:materials

If a particular material is not in the list, then it can be made available to all TCAD Sentaurus
tools by creating a local datexcodes.txt file. For details on how to create new materials,
see the Sentaurus™ Device User Guide.

SourceParFile Column
If MatPar is not used for parameter file generation, the SourceParFile column is ignored and
can remain empty.
Otherwise, this column contains the source parameter file to be used for this layer [1].

Thickness Column
The thickness of each layer in micrometers is specified in the Thickness column. If the
Thickness column is empty, or is less than or equal to zero, sdeepi:create-layerstack
does not create the layer.

Doping Column
The doping information for each layer is specified in the Doping column. Doping values
greater than zero create n-type doping using the dataset ArsenicActiveConcentration.

Sentaurus™ Structure Editor User Guide 299

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Doping values less than zero create p-type doping using the dataset
BoronActiveConcentration.

You can overwrite the default doping species by using the global variables NDopant and
PDopant (see Table 32 on page 292).

One or several constant or analytic doping profiles can be specified using the commands in
Table 35. These commands create region-based doping profiles for the layer in the
y-direction. The following types of doping profile can be defined in the y-direction:
• Constant
• Linear
• Error function
• Gaussian function
• General analytic function f  x y z 
If multiple doping profiles must be created, the bracket form must be used for profile
definition. For example, to specify a constant doping of n=1e15 and p=2e15 in the same
layer, use (1e15)(-2e15).
Table 35 Commands for Doping column

Command Description

Constant doping profile

<doping> Constant doping concentration. Default unit: cm–3

or:
(<doping> [<options:rnp>])

Linear doping profile

(lin <Ntop> <Nbot> Linear doping profile using analytic profile.

[<options:rsnp>])

<Ntop> Value of doping concentration at the top edge of the layer.

Default unit: cm–3

<Nbot> Value of doping concentration at the bottom edge of the layer.

Default unit: cm–3

Error function or Gaussian function doping profile

(erf|gauss <Nmax> <ymax> Error function or Gaussian function doping profile.

<length>
[<options:udrsnp>])

Sentaurus™ Structure Editor User Guide 300

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 35 Commands for Doping column (Continued)

Command Description

<Nmax> Maximum concentration/peak concentration.

Default unit: cm–3

<ymax> For erf, this is the symmetry position. For gauss, this is the
peak position. Default unit: µm

<length> For gauss, <length> represents the distance between the

peak position and a place where the profile value decays by a
factor of exp(–1).
For erf, <length> represents the distance between the
symmetry position and a place where the profile value decays
by a factor of 1/2*(1+erf(1)).
Default unit: µm

General analytic function doping profile

(func <func> Contains the general function expression, where the

[<options:rsgnp>]) coordinates x,y,z are local to the layer assuming
(xmin,ymin,zmin) of the layer as origin. The layer coordinates
xmin, ymin, zmin, xmax, ymax, zmax and the layer extents dx,
dy, dz also can be used in <func>.

<func> Contains the general function expression, where the xyz

coordinates are local to the layer assuming (xmin,ymin,zmin) of
the layer as origin. Default unit: cm–3

Options

u|d Controls the edge or face of the layer at which the baseline of
the profile is placed:
• u = Baseline is placed at the top edge or face (default).
• d = Baseline is placed at the bottom edge or face.

r If specified, the option Replace is used in the

AnalyticalProfile section of the Placement section of the
mesh command file. Otherwise, NoReplace is used.

s If specified, EvaluateWindow is not defined in the

AnalyticalProfile section of the Placement section of the
mesh command file.

g Uses the global instead of the local layer-specific coordinate

system orientation for x,y,z of the general function.

Sentaurus™ Structure Editor User Guide 301

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 35 Commands for Doping column (Continued)

Command Description

n | p Ignores the sign of the doping concentration and uses the

specified doping type.

Default constant value for profiles

(default <doping>) Only used if MatPar is used for parameter file generation. Used
in cases where material parameter calculation requires a
constant doping value. <doping> defines the constant doping
value to be used if required in the material parameter
calculation. Default unit: cm–3

For each layer, the doping profiles are created with the following parameters:
• The AnalyticalProfile section of the Definition section:
◦ Species=ArsenicActiveConcentration | BoronActiveConcentration (for
n-type or p-type doping, respectively)
You can overwrite the default doping species by using the global variables NDopant
and PDopant (see Table 32 on page 292).
◦ Function=General | Error | Gauss (for linear or general functions, error, or
Gaussian function doping profile, respectively)
◦ LateralFunction=Erf(Factor=0) (for error and Gaussian profiles)

• The AnalyticalProfile section of the Placements section:

◦ The baseline for each layer is the bottom or top edge (2D) or face (3D), depending on
the specification of the option u|d in the Doping column (see Table 35).
◦ By default, the option NoReplace is used. However, if the option r is specified in the
Doping column (see Table 35), Replace is used instead.
◦ The variable Direction is not specified in the ReferenceElement section since the
function values are computed on both sides of the baseline.
◦ By default, all analytic doping profiles are placed using the EvaluateWindow section.
For each layer, the domain for the evaluation of the profile is the layer region and
DecayLength=0. The EvaluateWindow is not defined if the option s is specified in the
Doping column (see Table 35).
For more details, write out the mesh command file with sdedr:write-cmd-file, and see
Sentaurus™ Mesh User Guide.

Sentaurus™ Structure Editor User Guide 302

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Examples of specifying constant doping profiles are given in Table 34 on page 298. Lines 1–
3 are defined as p-type doped layers, and lines 4 and 5 are defined as n-type doped layers.
An example of an n-type doped layer with a Gaussian doping profile, with a peak
concentration of 1e15 cm–3, a relative peak position from the top of the layer of 0.2 µm, and
a decay length of 0.3 µm is defined with the following line:
4dopgauss,GaAs,,1,(gauss 1e15 0.2 0.3)

A constant p-type background doping of 2e16 cm–3 plus an n-type sine-modulated doping
using a default value of 1e16 cm–3 for the material parameter calculation can be defined as
follows:
6dopfunc,GaAs,,1,(2e16 p)(func 1e15*sin(2*3.1415*x/dx) n)(default -1e16)

If MatPar is used, then a default value for the reference doping concentration can be defined
for layers with doping profiles with the command default. A constant doping value could be
necessary in some cases, if during material parameter calculation, the specified model
cannot handle the doping profile and requires a constant value instead.

MoleFraction Column
The mole-fraction information of layers consisting of ternary or quaternary compound
semiconductor materials is described in the MoleFraction column. The column is empty for
elemental or binary semiconductors. A constant mole fraction or a mole-fraction profile very
similar to doping profiles can be specified using the commands in Table 36. These
commands create region-based mole-fraction profiles for the layer in the y-direction.
A default reference mole-fraction value can be defined for layers with mole-fraction profiles
with the command default.
A constant mole-fraction value might be necessary in some cases, if during material
parameter calculation, the specified model cannot handle the mole-fraction profile and
requires a constant mole-fraction value instead.
Table 36 Commands for MoleFraction column

Command Description

Constant mole fraction

<xMole> Defines a constant x–mole fraction for ternary compound

or: semiconductors.
(<xMole> [<options:rxy>])

Sentaurus™ Structure Editor User Guide 303

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 36 Commands for MoleFraction column (Continued)

Command Description

Linear mole-fraction profile

(lin <xMoleTop> <xMoleBot> Linear x–mole fraction profile using analytic profile.
[<options:rsxy>])

<xMoleTop> Mole-fraction value at the top edge of the layer.

<xMoleBot> Mole-fraction value at the bottom edge of the layer.

Error function or Gaussian function mole-fraction profile

(erf|gauss <xMoleMax> Error function or Gaussian function mole-fraction profile.

<ymax> <length>
[<options:udrsxy>])

<xMoleMax> Maximum value/peak value.

<ymax> Symmetry position/peak position. Default unit: µm

<length> For gauss, <length> represents the distance between the peak
position and a place where the profile value decays by a factor
of exp(–1).
For erf, <length> represents the distance between the
symmetry position and a place where the profile value decays
by a factor of 1/2*(1+erf(1)).
Default unit: µm

General analytic function doping profile

(func <func> Generates an arbitrary analytic mole-fraction profile using the

[<options:rsgxy>]) general function evaluator of Sentaurus Mesh.

<func> Contains the general function expression, where the

coordinates x,y,z are local to the layer assuming
(xmin,ymin,zmin) of the layer as origin. The layer coordinates
xmin, ymin, zmin, xmax, ymax, zmax and the layer extents dx, dy,
dz also can be used in <func>.

Options

u|d Controls the edge or face of the layer at which the baseline of
the profile is placed:
• u = Baseline is placed at the top edge or face (default).
• d = Baseline is placed at the bottom edge or face.

Sentaurus™ Structure Editor User Guide 304

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 36 Commands for MoleFraction column (Continued)

Command Description

r If specified, the option Replace is used in the

AnalyticalProfile section of the Placement section of the
mesh command file. Otherwise, NoReplace is used.

s If specified, EvaluateWindow is not defined in the

AnalyticalProfile section of the Placement section of the
mesh command file.

g Uses the global instead of the local layer-specific coordinate

system orientation for x,y,z of the general function.

x | y Sets the mole-fraction type explicitly. Default is x.

Default constant value for profiles

(default <xMole> Only used if MatPar is used for parameter file generation. Used
[<yMole>]) in cases where material parameter calculation requires a
constant x– or y–mole fraction value.

<xMole>, <yMole> Defines the constant x– and y–mole fraction value to be used if
required in the material parameter calculation.

Mole-fraction profiles for quaternary materials

(y <yMole> | lin | erf | Creates a y–mole fraction profile very similar to the above
func | gauss ...) definitions for x–mole fraction profiles.

(<xMole> <yMole>) Defines a constant x– and y–mole fraction for quaternary

compound semiconductors.

(... x)(... y) In general, x– and y–mole fraction profiles can be defined

separately using the x and y options.
For example: (lin 0.1 0.2 x)(lin 0.9 0.8 y)

For example, to create a layer with a constant x–mole fraction profile with a value of 0.1, the
following lines are identical:
1molconst,AlGaAs,,1,1e15,0.1

2molconst,AlGaAs,,1,1e15,(0.1)

3molconst,AlGaAs,,1,1e15,(0.1 x)

Sentaurus™ Structure Editor User Guide 305

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

The following line creates a linear x–mole fraction profile with a value of 0.3 at the top and
0.4 at the bottom:
3mollin,AlGaAs,,1,1e15,(lin 0.3 0.4)

To create a constant mole-fraction profile of x=0.2 y=0.3, all of the following expressions are
identical:
(0.2 0.3), (0.2)(y 0.3), (0.2)(0.3 y), (0.3 y)(0.2 x)

Refinement Column
The Refinement column in the command file offers two different meshing strategies:
• Constant refinement in the xyz directions with the commands xref, yref, and zref.
• Graded refinement, dense at an interface, relaxing toward the bulk, using the command
mbox (which stands for multibox).

Mesh refinement for a particular layer is performed using the commands xref and mbox
(see Table 37). The terminology related to mesh refinement is discussed in the Sentaurus™
Mesh User Guide.
Table 37 Commands for Refinement column

Command Description

Uniform regionwise refinement

(xref | yref | zref Uniform regionwise refinement in the xyz directions.

<minelsize>
[<maxelsize>])

<minelsize> Specifies the minimum element size (mesh spacing) in the

corresponding direction. Default is the layer extent in the
corresponding direction.

<maxelsize> Specifies the maximum element size (mesh spacing) in the

corresponding direction. By default, it is set equal to the minimum
element size.

Multibox regionwise refinement

(mbox <minelsize> Defines a multibox refinement for a layer for the specified sides.
<ratio> <side:udlrfb>)

<minelsize> Specifies the minimum element size at the interface.

Sentaurus™ Structure Editor User Guide 306

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

Table 37 Commands for Refinement column (Continued)

Command Description

<ratio> Controls how fast the mesh spacing increases from the minimum
value to the maximum value, which is the layer thickness. ratio=1 is
equal to a constant meshing with <minelsize>. With ratio=2, the
element size is doubled at each step.

<side:udlrfb> Controls the edge (2D) or the face (3D) of the multibox from which the
graded mesh will start. Default is ud. Options (described for the UCS
case; see Figure 130 on page 296) are:
• u (up): Grading starts from the top (xmin) of the layer.
• d (down): Grading starts from the bottom (xmax) of the layer.
• l (left): Grading starts from the left (ymin) of the layer.
• r (right): Grading starts from the right (ymax) of the layer.
• f (front): For 3D structures, grading starts from the front (zmax)
of the layer.
• b (back): For 3D structures, grading starts from the back (zmin) of
the layer.
The keywords written in parentheses after each option can be used
as synonyms. In addition, the keyword both can be used as a
synonym for ud.

MaxLenInt interface refinement

(int <Value> <Factor> Specifies a MaxLenInt-type interface refinement.

<side:udlrfb>)

<Value> Specifies the initial thickness.

<Factor> Specifies the factor by which the initial thickness should grow into the
material.

<side:udlrfb> Controls the edge (2D) or the face (3D) of the multibox from which the
graded mesh will start. Default is ud. Options (described for the UCS
case; see Figure 130 on page 296) are:
• u (up): Grading starts from the top (xmin) of the layer.
• d (down): Grading starts from the bottom (xmax) of the layer.
• l (left): Grading starts from the left (ymin) of the layer.
• r (right): Grading starts from the right (ymax) of the layer.
• f (front): For 3D structures, grading starts from the front (zmax)
of the layer.
• b (back): For 3D structures, grading starts from the back (zmin) of
the layer.
The keywords written in parentheses after each option can be used
as synonyms. In addition, the keyword both can be used as a
synonym for ud.

Sentaurus™ Structure Editor User Guide 307

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Command File

In addition to the layerwise refinements described here, refinements can be specified either
using the global variables dXmin, dXmax, and so on, or using the standard Sentaurus
Structure Editor refinement commands.
Looking at Table 34 on page 298, the refinement statement for the region cap in line 1 (xref
0.1) generates an equidistant refinement in the x-direction with a spacing of 0.1 µm. Very
similar refinement is generated with the expression (xref 0.01) for the region fsf in line 2
but using a spacing of 0.01 µm. For lines 3–5, each layer is refined in the x-direction with a
multibox refinement statement (mbox 0.05 1.1 both), starting with a spacing of 0.05 at
both interfaces and gradually increasing the element size by a factor of 1.1 toward the bulk.

Extension Columns
In addition to the predefined layer properties, sdeepi:create-layerstack allows you to
add multiple user-defined layer properties that are appended to the layer line as additional
columns.
The Extension column can have arbitrary content and can be used by any subsequent Tcl
preprocessing blocks. For example, you could introduce an additional layer property or
column Rrad to switch on the radiative recombination model in the Sentaurus Device
command file for certain layers.
The following lines in the CSV file would define such an additional column, with the value no
for the fsf region, and the value yes for the emitter region:
$global append columnNames Rrad
fsf,AlGaAs,AlGaAs.par,0.03,-4.00e18,0.8,(xref 0.01),no
emitter,GaAs,,0.5,-5.00e17,,(mbox 0.05 1.1 both),yes

With the Scheme command sdeepi:tcl, all the layer information including the Extension
columns can be written to a Tcl file @epitcl@ (for example, n1_epi.tcl):
(sdeepi:tcl "@epicsv@" "@epitcl@")

The following is an excerpt from the Tcl file:

set epi(region,fsf,region) "fsf"
set epi(region,fsf,Rrad) "no"
set epi(region,emitter,region) "emitter"
set epi(region,emitter,Rrad) "yes"

The values of the Rrad column then can be accessed and used in the Sentaurus Device
command file to decide whether radiative recombination should be switched on or off for a
certain layer:
!(
source @epitcl@
foreach {key region} [array get epi "region,*,region"] {
if {"$epi(region,$region,Rrad)"=="yes"} {
puts "Physics (region=\"$region\")

Sentaurus™ Structure Editor User Guide 308

V-2024.03
Chapter 8: Creating Planar Layer Stacks
Processing the Layer Stack

{Recombination(Radiative)}"
}
}
)!

The first line sources all Tcl variables of the layer information file into the Tcl interpreter of the
preprocessor. The foreach statement loops through all Tcl variables that have the form
epi(region,*,region), that is, all layers of the layer stack. The variable $region contains
the region name of the current layer. Any other column value can be accessed by
$epi(region,$region,<column>) where <column> is replaced by the column name of
interest. In this case, you want to access the Extension column Rrad, therefore, you use
$epi(region,$region,Rrad) and, if its content is "yes", a regionwise Physics entry is
printed to the command file.
The result of the preprocessed block for this example is:
Physics (region="emitter") {Recombination(Radiative)}

Note:
By default, there is no Extension column.

Processing the Layer Stack

The sdeepi:create-layerstack Scheme extension creates a layer stack as it is produced
during any nonstructuring deposition process, for example, molecular beam epitaxy (MBE)
or metal organic vapor phase epitaxy (MOVPE). Subsequent commands can be used to
reflect any further processing steps of the wafer such as lateral patterning steps.
Figure 131 illustrates this by a layered GaAs solar cell structure. On the left, the structure
created using sdeepi:create-layerstack is shown; on the right, the processed solar cell
structure is illustrated with a partially removed cap layer on the top, a partially deposited
ARC, and contacts.
For convenience, all global variables as well as geometric variables can be made available
to Sentaurus Structure Editor as Scheme variables using:
(sdeepi:publish-global-vars #t)

By default, to avoid overwriting existing Scheme variables, none of the layer stack variables
is retained after the stack creation.

Sentaurus™ Structure Editor User Guide 309

V-2024.03
Chapter 8: Creating Planar Layer Stacks
References

Figure 131 (Left) Layer stack as created by sdeepi:create-layerstack and (right) device
structure with additional processing steps
-0.5
-0.5 -0.5
Anode ARC
00 00

0.5 0.5

11 11
DopingConcentration [cm−3] DopingConcentration [cm−3]
1.5 5.000e+18 1.5 5.000e+18
2.068e+16 2.068e+16
22 8.550e+13
22 8.550e+13

X
X

-3.536e+11 -3.536e+11
2.5 2.5
-1.710e+14 -1.710e+14
33 -4.135e+16 33 -4.135e+16
-1.000e+19 -1.000e+19
3.5 3.5

44 44

4.5 4.5

3.5 44 4.5 55 5.5 66 6.5 77 7.5 3.5 44 4.5 55 5.5 66 6.5 77 7.5
Y
Y Y

Various device-processing steps such as etching and additional layer deposition require the
top and bottom coordinates of a layer. These are available as the Scheme variables
X0_<region> and X1_<region>:

• X0_<region> is the x-coordinate of the top edge of the region.

• X1_<region> is the x-coordinate of the bottom edge of the region.

To investigate the layer stack creation in more detail and to evaluate the Scheme file step by
step in Sentaurus Structure Editor, you can save the used Scheme commands to a file. For
example:
(sdeepi:scm "@epicsv@" "@episcm@")

References
[1] Simulation of 2D Single-Junction GaAs Solar Cell, available from TCAD Sentaurus
Version V-2024.03 installation, go to Applications_Library/
Solar/SolarCell_SingleJunct_GaAs.

Sentaurus™ Structure Editor User Guide 310

V-2024.03
9
Working With Scheme and Scheme Extensions
9

This chapter discusses working with Scheme and Scheme extensions in Sentaurus
Structure Editor.

Scheme Data Types

The Scheme scripting language is used in Sentaurus Structure Editor and the process
emulation module of Sentaurus Structure Editor (Procem).
Table 38 lists the data types that can be used as arguments when calling the Scheme
functions in Sentaurus Structure Editor.
Table 38 Data types for Scheme functions related to Sentaurus Structure Editor

Data type Description

BOOLEAN A native Scheme data type having either the value #t (true) or #f (false). It represents
a logical or Boolean value.

DATEXMAT A STRING type variable, containing a valid material name, as defined in the
datexcodes.txt file. "Silicon" and "Oxide" are valid DATEXMAT variables.

ELIST An ACIS entity list.

ENTITY An ACIS entity.

GVECTOR A GVECTOR entity is an ACIS entity. It contains the keyword gvector and it is a
composition of three real numbers representing the x-, y-, and z-components of a 3D
vector. For example, (define g1 (gvector 1 0 0)) defines a GVECTOR called g1.
gvector is an ACIS-defined Scheme data type, used to represent a vector with
magnitude and direction. It is called gvector only to differentiate it from the inherent
Scheme data type vector, which represents an array.

INTEGER A Scheme data type containing a single integer value.

PLIST A polygon list: (list POLYGON POLYGON ... POLYGON).

Sentaurus™ Structure Editor User Guide 311

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

Table 38 Data types for Scheme functions related to Sentaurus Structure Editor (Continued)

Data type Description

POLARITY Either "light" or "dark".

POLYGON A position list: (list POSITION POSITION ... POSITION).

POSITION A POSITION entity is an ACIS entity. It contains the keyword position and three real
numbers. For example, (position 0 0 0) or (position -3 -3.1 -3.14) are valid
POSITION entities.(define p1 (position a b c)) defines a Scheme object p1 that
holds a POSITION entity. The x-coordinate of p1 is equal to a, the y-coordinate is equal
to b, and the z-coordinate is equal to c.

REAL A Scheme data type containing a single real or double value.

STRING A Scheme object containing a text string. A string is enclosed in braces or starts with
the character '. Two examples of a string are "this_is_a_valid_string" and
'this_is_also_fine.

VARIABLE A Scheme variable.

Basic Scheme Programming

Sentaurus Structure Editor uses Scheme, or more precisely, the Elk extension of Scheme.
Scheme is a LISP-like programming language that differs significantly from most of the
commonly used programming languages. The effective use of Sentaurus Structure Editor
(except the GUI layer) requires a working knowledge of Scheme. In addition to the
information given in this manuals, there are many resources for learning Scheme, including:
• R. K. Dybvig, The Scheme Programming Language, Cambridge, Massachusetts: MIT
Press, 3rd ed., 2003.
• D. P. Friedman and M. Felleisen, The Little Schemer, Cambridge, Massachusetts: MIT
Press, 4th ed., 1996.
• D. P. Friedman and M. Felleisen, The Seasoned Schemer, Cambridge, Massachusetts:
MIT Press, 1996.
• https://www.scheme.com (website of a Scheme dialect, Chez Scheme)
• https://www.scheme.org/schemers (website of Scheme-related topics)
In the following sections, the Scheme commands that are most commonly used in a
Sentaurus Structure Editor script are introduced.

Sentaurus™ Structure Editor User Guide 312

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

Basic Scheme Syntax

A Scheme command is enclosed in parentheses (spaces are allowed):
(Scheme command)

All text in a line after a semicolon is treated as a comment:

; This is a comment
(Scheme command) ; This is also a comment

A Scheme command can extend over several lines, or several Scheme commands can be
placed on a single line. A given Scheme command is identified by the outermost matching
parentheses pair:
(beginning of Scheme command
continuation of the same Scheme command
end of the Scheme command)

(first Scheme command) (second Scheme command) (...)

Defining Simple Variables and Data Types

Integers and floating-point numbers are treated as numbers. To declare and define a
numeric variable:
(define i 3)
(define pi 3.141593)

Strings are enclosed in double quotation marks. To declare and define a string:
(define W "Hello World")

Characters are preceded by #\. To declare and define a character:

(define CHAR #\a)

Use the variable name to reference a variable:

i ;-> 3
pi ;-> 3.141593
W ;-> "Hello World"
CHAR ;-> #\a

Update an existing variable with set!:

(define j 1)
(set! j (+ j 1))
j ;-> 2

Sentaurus™ Structure Editor User Guide 313

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

Note:
Use define when a variable is introduced for the first time. Use set! to assign a
new value to an existing variable.
The define command creates a local variable (lexical scoping). For example, a
variable defined in a specific function is not visible in another function or in the
main program. Different procedures can have their own private variables defined
using the same variable name. The set! command does not alter the scope of
already defined variables, while redefining a preexisting variable might alter its
scope. Scheme variables need not be deleted explicitly. An automatic garbage
collector will remove all Scheme variables when they go out of scope. Memory
allocation or deallocation is performed automatically by Scheme.
Do not use the Scheme keyword length as a user-defined variable.
Scheme is case sensitive.

Printing Text to Standard Output

Use the display command to write to standard output. Use newline to create a line break:
(display "The value of i is ") (display i) (newline)
(display "The value of pi is ") (display pi) (newline)
(display "The string W contains >") (display W) (display "<") (newline)

;-> The value of i is 3

;-> The value of pi is 3.141593
;-> The string W contains >Hello World<

String Operations
To automatically generate identifiers, for example, region names, certain string operations
are useful.
To define a string:
(define TEXTSTRING "This is a string")

To determine the length of a string:

(define STRINGLENGTH (string-length TEXTSTRING))
STRINGLENGTH ;-> 16

To retrieve the k-th character of a string:

(define k 5)
(define kthCHARACTER (string-ref TEXTSTRING k))
kthCHARACTER ;-> #\i

Sentaurus™ Structure Editor User Guide 314

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

Note:
The index counter starts from 0.

To retrieve substrings:
(define iStart 10)
(define iEnd 16)
(define SUBSTRING (substring TEXTSTRING iStart iEnd))
SUBSTRING ;-> "string"

To concatenate two strings:

(define RNAME "Region.")
(define QUALIFIER "Substrate")
(define REGIONNAME (string-append RNAME QUALIFIER))
REGIONNAME ;-> "Region.Substrate"

To convert a number (index) to a string:

(define RNAME "Region.")
(define INDEX 3)
(define REGIONNAME (string-append RNAME (number->string INDEX)))
REGIONNAME ;-> "Region.3"

Lists
Some Sentaurus Structure Editor commands accept lists as arguments. Lists can also be
useful in device parameterization. To define a list:
(define ABCList (list #\a #\b #\c #\d #\e)) ; List of characters
(define NUMList (list 1 2 3 4 5 6)) ; List of numbers
(define MIXList (list #\a 2 3.1415 "TCL")) ; Mixed list
(define EMPTYList (list)) ; Empty list

Note:
Declare an empty list first if you want to append to it, for example, in a do loop.

To reference a list as a whole, use the list name:

ABCList ;-> (#\a #\b #\c #\d #\e)
NUMList ;-> (1 2 3 4 5)
MIXList ;-> (#\a 2 3.1415 "TCL")
EMPTYList ;-> ()

To determine the number of elements in a list:

(define NumberOfElements (length ABCList))
NumberOfElements ;-> 5

Sentaurus™ Structure Editor User Guide 315

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

To append an element to a list:

(define NewElement #\f)
(define ABCPlusList (append ABCList (list NewElement)))
ABCPlusList ;-> (#\a #\b #\c #\d #\e #\f)

To concatenate two lists:

(define CombinedList (append ABCList NUMList))
CombinedList ;-> (#\a #\b #\c #\d #\e 1 2 3 4 5 6)

To reverse a list:
(define ReverseList (reverse NUMList))
ReverseList ;-> (6 5 4 3 2 1)

To reference the first element of a list:

(define FirstElement (car ABCList))
FirstElement ;-> #\a

or:
(define FirstElement (list-ref ABCList 0))

To reference all but the first element of a list:

(define RestOfList (cdr ABCList))
RestOfList ;-> (#\b #\c #\d #\e)

To reference the k-th element in a list:

(define k 3)
(define kthElement (list-ref ABCList k))
kthElement ;-> #\d

Note:
The numbering of list elements starts at 0.

To reference a sublist containing all but the first k elements, use:

(define k 3)
(define kRestOfList (list-tail ABCList k))
kRestOfList ;-> (#\d #\e)

Arithmetic Expressions
Some of the most useful arithmetic operators are:
• Addition, subtraction, multiplication, and division: +, -, *, /
• Trigonometric and related functions: sin, cos, tan, asin, acos, atan

Sentaurus™ Structure Editor User Guide 316

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

• Exponential and related functions: exp, log, sqrt

• Raising a to the power of b: expt a b
• Rounding functions: floor, ceiling, truncate, round
• Maximum and minimum: max, min:(max x1 x2 ...), (min x1 x2 ...)
• Other math functions defined in Sentaurus Structure Editor: erf, erfc
(These functions are not part of the standard Scheme language; they are defined locally
in Sentaurus Structure Editor.)
Scheme uses the reverse Polish notation for arithmetic expressions:
To define the variable j and assign it to i+5:
(define j (+ i 5))
j ;-> 8

To set the variable myangle to sin(PI/2):

(define myangle (sin (/ PI 2)))
myangle ;-> 1.0

To set the variable x to xo + R*cos(2*PI*fi/360):

(define xo 1)
(define R 0.2)
(define fi 30)
(define x (+ xo (* R (cos (/ (* 2 PI fi) 360)))))
x ;-> 1.17320508075689

Boolean Operations
True and false constants are denoted by #t and #f, respectively. Use not to invert a
Boolean:
(not #t) ;-> #f

Numeric comparators are =, >, >=, <, <=, for example:

(= 1 2) ;-> #f
(> 1 2) ;-> #f
(>= 1 2) ;-> #f
(< 1 2) ;-> #t
(<= 1 2) ;-> #t

Use the equal? operator to test if two variables are equal:

(define a 1)
(define b "hello")
(equal? a b) ;-> #f

Sentaurus™ Structure Editor User Guide 317

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

(set! b 1)
(equal? a b) ;->#t

To test two strings, you can also use string=?:

(define a "HELLO")
(define b "hello")
(string=? a b) ;-> #f

The equal? operator can also be used to test ACIS entities:

(define a (position 0 0 0))
(define b (position 0 0 0))
(equal? a b) ;-> #t
(set! b (position 1 0 0))
(equal? a b) ;-> #f

If Blocks
To create a simple If block:
(define val 0)
(if (= val 0)
(begin
(display "val is zero")(newline)
)
) ;-> "val is zero"

To create an If-Else block:

(define val -1)
(if (< val 0) ; Test
(begin ; Execute if condition is true
(display "val is negative") (newline)
)
(begin ; Execute if condition is false
(display "val is positive") (newline)
)
) ;-> "val is negative"

To create an If-Elseif block:

(define val -1)
(cond
((= val 0) ; First test
(begin ; Execute if first condition is true
(display "val is zero") (newline)
)
)
((> val 0) ; Elseif test
(begin ; Execute second condition is true
(display "val is positive") (newline)

Sentaurus™ Structure Editor User Guide 318

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

)
)(else
(begin ; Execute if none of the conditions are true
(display "val is negative") (newline)
)
)) ;-> "val is negative"

Note:
To comment out a large block of comments in a script, enclose the block in a trivial
If block:
(if #f (begin
<commands to be "commented out">
))

Simple Do Loops
In this example, a simple Do loop is used to create a stack of five silicon squares:
(sde:clear)
(define L 1) ; Side length of first square
(define Y 0) ; Bottom y-coordinate of current square
(do ( (i 0 (+ i 1)) ) ; i: Counter name; 0: initial value;
; (+ i 1): incrementer
( (= i 5) ) ; End Tester
(begin ; Body of loop
(define REGION (string-append "region." (number->string i)))
(sdegeo:create-rectangle
(position (* -0.5 L) Y 0.0)
(position (* 0.5 L) (+ Y L) 0.0) "Silicon" REGION)
(set! Y (+ Y L))
(set! L (* 0.75 L))
)
)

Note:
Scheme Do loops are more flexible than Do loops in most other languages. This
example illustrates a basic setup.

For Each Loops

In a For Each loop, an action is taken for each element in a list. In the following example, the
For Each loop steps through the lists MATERIALS, WIDTHS, and HEIGHTS, and creates a
rectangle for each list element:
(sde:clear)
(define MATERIALS (list "GaAs" "AlGaAs" "AlAs" "InAlAs" "InAs"
"InAsP" "InP"))

Sentaurus™ Structure Editor User Guide 319

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

(define WIDTHS (list 2.0 1.7 1.5 1.3 1.1 1.0 0.5))
(define HEIGHTS (list 1.0 0.25 0.1 0.25 0.3 0.45 1.0))
(define Y 0)

(for-each
(lambda (MATERIAL WIDTH HEIGHT) ; Names of local variables
(begin ; Body of the loop
(define REGION (string-append "region." MATERIAL))
(sdegeo:create-rectangle
(position 0 Y 0.0)
(position WIDTH (+ Y HEIGHT) 0.0) MATERIAL REGION)
(set! Y (+ Y HEIGHT))
)
) MATERIALS WIDTHS HEIGHTS ; Lists
)

Procedures
Procedures can be implemented to reuse common code sections or to structure your
scripts. The following example creates a ‘Unit Cell’ structure consisting of a slab of silicon
with a shallow trench isolation (STI)– like oxide trench at the side. The procedure takes the
coordinate of the lower-left corner as an argument:
(sde:clear)
(define CreateUnitCell ; Name of procedure
(lambda (Xo Yo) ; Argument list
(begin ; Body of procedure
(sdegeo:set-default-boolean "ABA")
(define SiREGION (string-append "R.Silicon."
(number->string Xo) "." (number->string Yo)))
(define OxREGION (string-append "R.Oxide."
(number->string Xo) "." (number->string Yo)))
(sdegeo:create-rectangle
(position Xo Yo 0.0)
(position (+ Xo 1.0) (+ Yo 1.0) 0.0) "Silicon" SiREGION)
(sdegeo:create-rectangle
(position Xo Yo 0.0)
(position (+ Xo 0.25) (+ Yo 0.75) 0.0) "Oxide" OxREGION)
)
)
)

Now, a row of these unit cells can be created by calling the procedure for different
arguments:
(CreateUnitCell 1 1) ; Procedure calls
(CreateUnitCell 2 1)
(CreateUnitCell 3 1)

Sentaurus™ Structure Editor User Guide 320

V-2024.03
Chapter 9: Working With Scheme and Scheme Extensions
Basic Scheme Programming

The next example shows a procedure, which returns a value. The variable containing the
value of interest is simply referenced in the last statement of the procedure:
(define convert-degree-to-radians
(lambda (DEG)
(define pi (acos -1.0))
(define RAD (* DEG (/ PI 180.0)))
RAD
)
)

(define DEG 90)

(define RAD (convert-degree-to-radians 90))
RAD ;-> 1.5707963267949

Scheme procedures, or any other code segments, can be saved in a library file, for example,
util.scm and loaded into a Scheme script with:
(load "util.scm")

System Calls
To call an external UNIX or TCAD Sentaurus utility:
(system:command "<Unix command string>")

For example, to remove the temporary file test_bnd.tdr, use:

(system:command "rm -f test_bnd.tdr")

Error Signaling to Sentaurus Workbench

If the command system:command is used in a Sentaurus Structure Editor script and you
want to signal the status of the executed command back to Sentaurus Workbench, then use
the following solution:
(define res (system:command "Mycommand ..."))
(if (not (equal? res 0))
(begin
(sde:error "Mycommand failed ...")
)
)

If system:command returns an error (anything else than 0), then Sentaurus Workbench will
pick up the error signal, and the executed node will be shown as red.

Sentaurus™ Structure Editor User Guide 321

V-2024.03
10
10 Geometric Query Functions

This chapter describes the boundary representation method on which Sentaurus Structure
Editor is based and introduces several support functions to query and debug the model.

Entity IDs and Attributes

Geometry-related operations in Sentaurus Structure Editor are based on ACIS, which is a
boundary representation geometry kernel. Boundary representation uses a complex data
structure describing the geometry. The data structure of a geometric model can be accessed
through a topology graph, which contains the building entities (such as edges, faces, and
shells) of the device, and shows the relationships and connections between these entities.
A typical 3D body is described with respect to a lump list (disjoint parts of the body). Each
lump contains a shell list and each shell is described with respect to a face list. Each 3D
body is composed of faces. A shell is a connected face list. For example, a cube is defined
with respect to six planar faces, and the six faces define one shell. Similarly, a cube with an
internal void is composed of two shells and each shell is defined by a face list.
Faces are described with respect to a loop and an edge list. A face is described with respect
to its boundary edges. For example, a rectangle is defined by four linear edges. A circular
sheet body is defined by a circular edge. A connected edge list is called a loop. Simply
connected faces have one loop. Faces with internal holes have multiple loops. For example,
a circular sheet with an internal rectangular hole is composed of two loops. The outer loop
contains one circular edge, while the internal loop contains four linear edges. A linear edge
is defined by two vertices.
It is usually not necessary to consider the topological representation of defined bodies when
using typical GUI operations or the Scheme interface. For certain geometric operations,
however, for example, rounding a set of edges of a 3D body, it is necessary to refer to
entities from the underlying topology representation. These edges must be identified by
using either the GUI or Scheme interface.
Each generated device is a collection of several different bodies. In two dimensions, these
bodies are solid bodies with zero volume (non-manifold solid bodies). In three dimensions,
these bodies have a finite, positive volume (manifold solid bodies). When the geometric
model is generated using either the GUI actions or sdegeo Scheme functions, Sentaurus

Sentaurus™ Structure Editor User Guide 322

V-2024.03
Chapter 10: Geometric Query Functions
Topological Entity Types

Structure Editor assigns several different attributes to these bodies. Two important attributes
are the ‘material’ attribute and the ‘region’ attribute.
An attribute is a general-purpose data entity that attaches to other entities to record
user-defined or some other (internal) information. Attribute objects are saved and restored
as part of the model when the model is saved in the native ACIS .sat or .sab format. If the
geometric model is exported to the TDR boundary format, only the TCAD-specific attributes
(contacts, and material and region names) are saved to the boundary file.
The material attribute is a DATEX material (one of the materials defined in the
datexcodes.txt file). The region attribute is a string that identifies a region to which a
particular body belongs. Each body within a region must have the same ‘material’ attribute.
The boundary file description contains some other restrictions to the use of the region
attribute (that is, disjoint bodies cannot have the same region name). Since Sentaurus
Structure Editor can generate bodies with multiple lumps, these lumps are separated
automatically when exporting the structure to the boundary file in TDR format. In addition,
Edit > Separate Lumps or the Scheme extension sde:separate-lumps can be used to
separate lumps explicitly.
Under typical circumstances, when the automatic region-naming feature is switched on, the
geometry generation and editing actions accessible from the GUI ensure that region-naming
is consistent with the requirements of the boundary format. When using direct Scheme
extensions to generate the geometry, you can generate structures in which the region and
material properties of bodies are inconsistent with these additional restrictions imposed by
the TDR boundary format. In this case, you must set region names and material properties
explicitly to resolve any inconsistencies.
During model generation, the geometry engine assigns a unique entity number to each
generated body. When a Scheme function needs an entity ID or a list of entity IDs, refer to
these automatically assigned entity IDs.

Topological Entity Types

The valid entity types are:

body A body is a topological entity of the highest level. It can be a wire body, solid body, or
mixed body. Wire bodies contain wires, coedges, edges, and vertices. Solid bodies
contain lumps, shells, subshells, faces, loops, coedges, edges, and vertices. Mixed
(solid and wire) bodies contain lumps, shells, subshells, faces, loops, coedges,
edges, vertices, and wires. All body objects are saved and restored as a part of the
model.

Sentaurus™ Structure Editor User Guide 323

V-2024.03
Chapter 10: Geometric Query Functions
Topological Entity Types

edge An edge is a topological entity associated with a curve. It is bound by one or more
vertices, and has one vertex at each end. If the reference at one or both ends is NULL,
the edge is unbound in that direction. Each edge contains a record of its sense
(FORWARD or REVERSED) relative to its underlying curve. All edge objects are saved and
restored as part of the model.

face A face is a topological entity that represents a portion of a geometric surface. One or
more loops of edges bound a face, which can be open or closed. A face with no loops
occupies the entire surface, finite or infinite, on which the face lies. Therefore, a face
can represent an infinite plane or a complete sphere. Each face records its sense
relative to its underlying surface (same sense or opposite sense). All face objects are
saved and restored as part of the model.

loop A loop is a topological entity that represents a connected portion of the boundary of a
face. Loops can be open or closed. A loop can comprise a group of coedges
connected in a branched arrangement or in a simple, open chain. A loop can be a
coedge shrunk to a single vertex. All loop objects are saved and restored as a part of
the model.

lump A lump is a topological entity that represents a connected 3D (solid) or 2D (sheet)

region. A body can contain zero or more lumps. Each lump represents a disjoint set
of points. One lump is completely enclosed inside the void of another solid lump.
Each lump must have at least one shell. All lump objects are saved and restored as a
part of the model.

shell A shell is a topological entity consisting of a set of connected faces. All faces are
connected along edges or vertices. A shell represents a sheet region or bounds a
solid region or both. A shell that bounds a solid region is entirely peripheral or void or
neither. All shell objects are saved and restored as a part of the model.

vertex A vertex is a topological entity representing the end of one or more edges. Vertex
refers to a point object in space and to the edges that it bounds. Other edges are
found by following pointers through coedges. All vertex objects are saved and
restored as a part of the model.

wire A wire is a topological entity that is a collection of edges and vertices. Wires typically
represent profiles, construction lines, and center lines of swept shapes. Wires can
also represent wireframes that form shells when surfaced. All wire objects are saved
and restored as a part of the model.

wire body A wire body is a topological entity that is a body consisting of wires (as opposed to
lumps). Wire bodies contain wires, loops, coedges, edges, and vertices. All wire-body
objects are saved and restored as a part of the model.

Sentaurus™ Structure Editor User Guide 324

V-2024.03
Chapter 10: Geometric Query Functions
Selecting Geometric Objects

Selecting Geometric Objects

This section describes how to select geometric objects.

Graphic-Supported Object Selection

Several different operations require the identification of geometric objects (entities). Either
the GUI or direct Scheme functions can be used to identify entities. The GUI toolbar buttons
(the Select button) can be used for interactive entity selection (see Selecting Entities on
page 60). The default entity that can be selected is body. The selection criteria can be set
to a different entity type by right-clicking in the view window and setting the selection to the
required type, or by selecting the corresponding level in the Selection Level list.
The corresponding Scheme command is
(sde:set-selection-level "body"|"face"|"edge"|"vertex"|"other")

The function (sde:selected-entities) returns a list of the selected (highlighted) entity

IDs. Note that this Scheme function always returns a list, even if only a single entity is
selected. For example, this Scheme function can return:
(sde:selected-entities) ; -> (#[vertex 8 1])

Note:
This list contains only a single entry.

Use (car (sde:selected-entities)) to return only the first (and, here, the only) item on
this list:
(car (sde:selected-entities)) ; -> #[vertex 8 1]

You also can use the Topology Browser to find entity IDs (see Visualizing the Internal Entity
Representation on page 74).

Script-Based Object Selection

To select all geometric bodies in the structures, use the Scheme command:
(part:entities (filter:type "solid?"))

This function returns refinement/evaluation (Ref/Eval) windows as well. To distinguish

between the true geometric bodies and the Ref/Eval windows, use the following Scheme
functions.

Sentaurus™ Structure Editor User Guide 325

V-2024.03
Chapter 10: Geometric Query Functions
Selecting Geometric Objects

For all true geometric bodies, use:

(get-body-list)

For all Ref/Eval windows, use:

(get-drs-list)

For example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1)
"Silicon" "region_1")
; -> #[body 5 1]
(sdegeo:create-cuboid (position 0.3 -0.2 0.0) (position 0.7 0.0 1)
"SiO2" "region_2")
; -> #[body 6 1]
(sdedr:define-refeval-window "RefEvalWin_1" "Cuboid"
(position 0.3 0.0 0) (position 0.7 0.2 1))
; -> #[body 7 1]
(sdedr:define-refeval-window "RefEvalWin_2" "Rectangle"
(position -0.2 0.0 0) (position 0.3 0.0 1))
; -> #[body 8 1]

(part:entities (filter:type "solid?"))

; -> (#[body 5 1] #[body 6 1] #[body 7 1] #[body 8 1]))
(get-body-list)
; -> (#[body 5 1] #[body 6 1])
(get-drs-list)
; -> (#[body 7 1] #[body 8 1])

Note:
To export the boundary in TDR format use the Scheme command:
(sdeio:save-tdr-bnd (get-body-list) "filename.tdr")

To find the ID of an entity of a given type at a given location, use the Scheme commands:
(find-body-id position)
(find-face-id position)
(find-edge-id position)
(find-vertex-id position)
(find-material-id material)
(find-region-id region-name)

Each of these commands returns an entity list containing the entity IDs of all entities that
satisfy the search criteria. If no entity is found, an empty list is returned. The find functions
require a specification of the exact position for the required entity. For example:
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"Silicon" "region_1")
(find-body-id (position 0.5 0.5 0.5)) ; -> (#[body 5 1])
(find-face-id (position 0 0 0.5))) ; -> (#[face 29 1] #[face 28 1])
(find-edge-id (position 0 0 0)))
; -> (#[edge 14 1] #[edge 12 1] #[edge 11 1])

Sentaurus™ Structure Editor User Guide 326

V-2024.03
Chapter 10: Geometric Query Functions
Finding Region Names and Material Properties

(find-vertex-id (position 1 1 1))) ; -> (#[vertex 19 1])

(find-material-id "Silicon") ; -> (#[body 5 1])
(find-region-id "region_1") ; -> (#[body 5 1])

These Scheme commands always return a list, even if the list contains only a single entry.
Some Scheme commands, however, expect a single entity as an argument, not a list. Use
the Scheme function car to return only the first element of the list. For example:
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "region_1")
(sdegeo:move-vertex (car (find-vertex-id (position 0 0 0)))
(position -1 -1 0))

The function find-material-id can be used to find the entity numbers of all bodies having
the specified DATEX material as the material attribute.
The function find-region-id can be used to find the entity numbers of all bodies having
the specified region as the region attribute.
If the exact location is not known use the sdegeo:find-closest Scheme commands:
(sdegeo:find-closest-face position)
(sdegeo:find-closest-edge position)
(sdegeo:find-closest-vertex position)

For example:
(sdegeo:create-cuboid (position 0.1 -0.1 0.1) (position 1.1 0.9 0.9)
"Silicon" "region_1")
(sdegeo:find-closest-face (position 0 0 0))) ; -> (#[face 6 1] . 0.1414)
(sdegeo:find-closest-edge (position 0 0 0.5)))
; -> (#[edge 7 1] . 0.1414)
(sdegeo:find-closest-vertex (position 1 1 1)))
; -> (#[vertex 8 1] . 0.1732)

Finding Region Names and Material Properties

When the ID of a certain topological entity is identified, the entity can be further investigated.
As previously mentioned, each body has several different attributes attached. The function
generic:get can be used to query the attributes. For example, the function (generic:get
entity_id "material") returns the DATEX material of the selected body. The function
(generic:get entity_id "region") returns the attached region name:
(define BODY (sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"Silicon" "region_1"))
(generic:get BODY "material") ; -> "Silicon"
(generic:get BODY "region") ; -> "region_1"

The function generic:list-attributes lists all the attribute names of an entity. The
function generic:set attaches the value of a named generic attribute to an entity. For

Sentaurus™ Structure Editor User Guide 327

V-2024.03
Chapter 10: Geometric Query Functions
Finding Region Names and Material Properties

details about these functions, see generic:list-attributes on page 394 and generic:set on
page 395.
Several functions of Sentaurus Structure Editor support entity debugging. The function
sde:info lists the entity IDs, and material and region names. The argument list of sde:info
is an entity, a list of entities, or ‘all.’ For example:
(sde:info "all")

Entity Id; Material name; Region name;

#[body 5 1] Silicon region_1

Automatic Region-Naming
Each body that is to be written to a TDR boundary file must have two attached attributes: the
material attribute and region attribute. If the automatic region-naming option (choose Draw
> Auto Region Naming) is switched on, each newly created region is automatically
assigned a unique region name. If the sdegeo Scheme extensions are used, the region
names must be specified in the argument list.
The automatic region-naming option can also be set from Scheme. The function
(sdegeo:get-auto-region-naming) can be used to obtain the status of the option. This
function returns either #t or #f.
The function (sdegeo:set-auto-region-naming #t|#f) can be used to switch on or off
the feature. When an explicit sdegeo call is made to generate a new body, the region
counter must be set automatically to the next available region number for a further GUI body
generation.
The automatic region-naming option assigns the following region name to created bodies:
"region_" + the region counter

The region counter starts from 1 and increases automatically. The

sde:set-region-counter Scheme extension can be used to set the region counter
explicitly. For example, to set the counter to 12:
(sdegeo:get-region-counter) ; -> 1
(sdegeo:set-region-counter 12)

When a TDR boundary file is loaded and regions follow the abovementioned naming
convention, the counter is set automatically to the next available integer.
Regions with multiple lumps are separated and renamed automatically by default before the
TDR boundary output is created. For example, if the original body has a region attribute
"region_1" and the region has three lumps, the original region will be separated into three
bodies with the region names "region_1_lump_1", "region_1_lump_2", and
"region_1_lump_3".

Sentaurus™ Structure Editor User Guide 328

V-2024.03
Chapter 10: Geometric Query Functions
Finding Vertex Positions

To switch off automatic region-renaming, set the use-unique-region-names global

Scheme variable to #f.
Choose Edit > Separate Lumps to invoke the lump separation explicitly.
The corresponding Scheme command is:
(sde:separate-lumps)

List of Supported Materials

Sentaurus Structure Editor uses the default datexcodes.txt file to load a list containing the
allowable materials. This DATEX material list shows all of the defined DATEX materials and
always shows the active DATEX material. If a GUI action needs a DATEX material as input
and the action does not contain a method to select it, it will always use the active DATEX
material shown in the DATEX material list.
The Scheme extension (sde:get-default-material) returns the active DATEX material
and the Scheme extension sde:set-default-material can be used to change the active
DATEX material.
For example, to change the active material to PolySilicon:
(sde:set-default-material "PolySilicon")

Note:
To introduce custom materials to Sentaurus Structure Editor, create a modified
copy of the datexcodes.txt file in the current working directory (see Utilities
User Guide, Chapter 1).

Finding Vertex Positions

When the entity ID of a vertex (vertex_id) is found (vertex:position vertex_id), it can
be used to return the position of a vertex.
For example:
(define BODY (sdegeo:create-rectangle (position 0.0 0.0 0)
(position 1.0 1.0 0) "Silicon" "region_1"))
(define i 1)
(for-each
(lambda (VERTEX)
(begin
(display " [") (display i) (display "]: ")
(display " X=") (display (position:x
(vertex:position VERTEX)))
(display ",Y=") (display (position:y
(vertex:position VERTEX)))

Sentaurus™ Structure Editor User Guide 329

V-2024.03
Chapter 10: Geometric Query Functions
Vertex–Vertex Distance

(set! i (+ i 1))
)
) (entity:vertices BODY)
)
(newline)
; -> [1]: X=0,Y=0 [2]: X=1,Y=0 [3]: X=1,Y=1 [4]: X=0,Y=1

Vertex–Vertex Distance
To determine the distance between two vertices:
1. Choose Edit > 2D Edit Tools > Vertex-to-Vertex Distance, or click the corresponding
toolbar button.
2. Select the first vertex and then the second vertex in the view window.
The corresponding distance is displayed in the command-line window.
The corresponding Scheme command is:
(sdegeo:distance (list vertex vertex))

For example:
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")))
(sdegeo:distance (list
(car (find-vertex-id (position 0.0 0.0 0.0)))
(car (find-vertex-id (position 1.0 1.0 1.0)))))
; -> 1.73205

Debugging Topological Entities

When a geometric entity (for example, a body) is generated, a unique entity ID (an integer)
is assigned to the body. This unique entity ID can be used to refer to that particular entity in
further operations. The command (part:entities) lists all defined entities.
Several Scheme functions can be used to debug an entity. The Scheme function
(entity:debug entity [0|1|2|3|4]) can be used for basic debugging. The argument
entity specifies the entity to be queried where level is an optional argument that controls
the amount of the debugging information:

level 0 Writes no output and only returns the entity type.

level 1 Writes only data specific to the given entity.

Sentaurus™ Structure Editor User Guide 330

V-2024.03
Chapter 10: Geometric Query Functions
Finding Edges, Faces, and Other Elements of a Body

level 2 Writes additional information for some entity types. For example, if the entity is an
EDGE, the coordinates of the endpoints and the curve data are also written. This
extension writes only data specific to the given entity.

level 3 Writes the size of the entity and all associated entities.

level 4 Writes full information for the entity and all associated entities.

For example:
(define BODY (sdegeo:create-rectangle
(position 0.0 0.0 0.0) (position 1.0 1.0 0.0) "Silicon" "region_1"))
(entity:debug BODY 0)
; -> "solid body"

Finding Edges, Faces, and Other Elements of a Body

Several Scheme functions can be used to find edges, faces, and other elements of a body:

entity:edges Returns the edge list of the specified entity or entities.

entity:faces Returns the face list of the specified entity or entities.

entity:loops Returns the loop list of the specified entity or entities.

entity:lumps Returns the lump list of the specified entity or entities.

entity:shells Returns the shell list of the specified entity or entities.

entity:vertices Returns the vertex list of the specified entity or entities.

For example:
(define BODY (sdegeo:create-cuboid
(position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1"))))

; All faces of the body:

(define FACES (entity:faces BODY))
; FACES: (#[face 6 1] #[face 7 1] #[face 8 1] #[face 9 1] ...)

; All edges of the first face:

(define EDGES (entity:edges (car FACES)))
; EDGES: (#[edge 12 1] #[edge 13 1] #[edge 14 1] #[edge 15 1])

; All vertices of the first edge of the first face:

(define VERTICES (entity:vertices (car EDGES)))

Sentaurus™ Structure Editor User Guide 331

V-2024.03
Chapter 10: Geometric Query Functions
Bounding Box Query

; VERTICES: (#[vertex 16 1] #[vertex 17 1])

; All vertices of the body:

(define ALL_VERTICES (entity:vertices BODY))
; ALL_VERTICES: (#[vertex 16 1] #[vertex 17 1] #[vertex 18 1] ...)

These functions can be used, for example, to round all edges associated with a certain face
of an object. Here, a simple cube is created, then the top face is identified using the function
find-face-id (see Script-Based Object Selection on page 325).

For this face, all edges are identified using the entity:edges function, and finally these
edges are rounded using the sdegeo:fillet function:
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "region_1")
(define top_face (find-face-id (position 5 5 10)))
(define top_edges (entity:edges top_face))
(sdegeo:fillet top_edges 2)

Figure 132 Example of finding geometric entities

Bounding Box Query

To find the bounding box of an entity or a group of entities, use the Scheme command:
(entity:box entity|entity-list)

For example:
(define BODY1 (sdegeo:create-cuboid (position 0.0 0.0 0.0)
(position 1.0 1.0 1) "Silicon" "region_1"))

Sentaurus™ Structure Editor User Guide 332

V-2024.03
Chapter 10: Geometric Query Functions
Scheme Functions for Entity Queries

(define BODY2 (sdegeo:create-cuboid

(position 0.3 -0.2 0.0) (position 0.7 0.0 1) "SiO2" "region_2"))
(define BODY1BBOX (entity:box BODY1))
; BODY1BOX: (#[ position 0 0 0 ] . #[ position 1 1 1 ])
(define GlobalBBBOX (entity:box (get-body-list)))
; GlobalBBBOX: (#[ position 0 -0.2 0 ] . #[ position 1 1 1 ])
(display " Ymin=") (display (position:y (car GlobalBBBOX)))
(display " Ymax=") (display (position:y (cdr GlobalBBBOX)))
(newline)
; -> Ymin=-0.2 Ymax=1

Scheme Functions for Entity Queries

Table 39 lists the Scheme functions that can be used to query entities and to find the type of
the selected entities.
Table 39 Scheme functions for entity queries

Scheme function Description

body? Determines whether a Scheme object is a body.

curve:circular? Determines whether a Scheme object is a curve–circular.

curve:elliptical? Determines whether a Scheme object is a curve–elliptical.

curve:linear? Determines whether a Scheme object is a linear curve.

curve? Determines whether a Scheme object is a curve.

edge:circular? Determines whether a Scheme object is a circular edge.

edge:curve? Determines whether a Scheme object is a curve–edge.

edge:elliptical? Determines whether a Scheme object is an elliptical edge.

edge:linear? Determines whether a Scheme object is a linear edge.

edge:spline? Determines whether a Scheme object is a spline–edge.

edge? Determines whether a Scheme object is an edge.

entity? Determines whether a Scheme object is an entity.

face:conical? Determines whether a Scheme object is a conical face.

face:cylindrical? Determines whether a Scheme object is a cylindrical face.

Sentaurus™ Structure Editor User Guide 333

V-2024.03
Chapter 10: Geometric Query Functions
Scheme Functions for Entity Queries

Table 39 Scheme functions for entity queries (Continued)

Scheme function Description

face:planar? Determines whether a Scheme object is a planar face.

face:spherical? Determines whether a Scheme object is a spherical face.

face:spline? Determines whether a Scheme object is a face–spline.

face:toroidal? Determines whether a Scheme object is a toroidal face.

face? Determines whether a Scheme object is a face.

loop:external? Determines whether a loop is internal or external.

loop? Determines whether a Scheme object is a loop.

lump? Determines whether a Scheme object is a lump.

position? Determines whether a Scheme object is a position.

shell? Determines whether a Scheme object is a shell.

solid:closed? Determines whether a Scheme object is a closed solid.

solid:manifold? Determines whether a Scheme object has a positive volume.

solid? Determines whether a Scheme object is a solid.

vertex? Determines whether a Scheme object is a vertex.

wire:closed? Determines whether a Scheme object is a closed wire.

wire:planar? Determines whether a Scheme object is a planar wire.

wire? Determines whether a Scheme object is a wire.

wire-body? Determines whether a Scheme object is a wire body.

For example:
(define BODY (sdegeo:create-rectangle
(position 0 0 0) (position 1 1 0) "Silicon" "region_1"))
(body? BODY)
; -> #t
(face? BODY)
; -> #f

Sentaurus™ Structure Editor User Guide 334

V-2024.03
11
11 Miscellaneous Utilities

This chapter outlines additional Sentaurus Structure Editor features.

Background Image Loader

Sentaurus Structure Editor supports the creation of device geometries by digitizing images,
for example, transmission electron micrographs (TEMs). These images can be loaded as a
background image into the view window. Table 40 lists the relevant Scheme extensions.
Note:
This feature is accessible only using Scheme commands in the command-line
window.
The image loader supports only images in the older GIF format, GIF87a. Most
current graphic programs use the GIF format GIF89a. To check the format version
of a GIF file, look at the first line of the file using, for example, the UNIX command:
> head --lines=1 filename.gif

The first six characters are either GIF87a or GIF89a. If the GIF file is in GIF89
format, use an older graphics utility program such as xv 3.10a (a shareware
program written by John Bradley) to convert the GIF file to GIF87a.

Table 40 Scheme extensions for manipulating background image

Scheme extension Definition Arguments

(sde:create-bg-image filename Loads an image file (in filename: STRING

hsize vsize) GIF format) hsize: horizontal size, REAL
vsize: vertical size, REAL

(sde:show-bg-image) Shows the image None

(sde:hide-bg-image) Hides the image None

(sde:delete-bg-image) Removes the image None

from memory

Sentaurus™ Structure Editor User Guide 335

V-2024.03
Chapter 11: Miscellaneous Utilities
User-Defined Dialog Boxes

Table 40 Scheme extensions for manipulating background image (Continued)

Scheme extension Definition Arguments

(sde:bg-image-transparency value) Sets the transparency transparency value, REAL

of the image (0-1) (0-1)

To convert an image from the GIF89a format to GIF87a format:

1. Open the GIF89a file in a graphics program.
2. Start xv, and grab the opened GIF89a image with xv.
3. Save the image in GIF format.
xv will save the captured image using the older GIF87a format.
To load an image into Sentaurus Structure Editor and scale it to 0.2 µm × 0.2 µm:
(sde:create-bg-image "TEM.gif" 0.2 0.2)
(sde:show-bg-image)

To digitize a region of the device structure, follow the procedure for creating arbitrary
polygons (see Drawing Polygons on page 82).

User-Defined Dialog Boxes

User-defined dialog boxes can be created to assist with the generation of parametric
devices. This feature is accessible only from Scheme.
This feature can be used to create a convenient central template library for company-wide
use. Users of this central template library would only need to enter the necessary
parameters in the custom dialog box and the structure is created automatically.
To create a user-defined dialog box, first declare the dialog box, using sde:create-dialog.
Then, input fields, which will serve as the argument list of the associated Scheme function,
must be defined using sde:dialog-add-input. An optional bitmap icon can also added to
the dialog box, using sde:dialog-add-pixmap.
Note:
Only bitmaps in BMP format are supported.

The OK button of the dialog box can be attached to execute an already defined Scheme
script using the sde:dialog-ok-command command. The dialog box can be displayed
using sde:dialog-show and can be removed from memory using sde:dialog-delete.
The following Scheme commands can be used to create user-defined dialog boxes:

Sentaurus™ Structure Editor User Guide 336

V-2024.03
Chapter 11: Miscellaneous Utilities
User-Defined Dialog Boxes

(define dialog-id (sde:create-dialog dialog-label))

(sde:dialog-add-input dialog-id varname labeltext inputtype
[defaultvalue])
(sde:dialog-add-pixmap dialog-id bmpfilename)
(sde:dialog-ok-command dialog-id schemefnname argument-list)
(sde:dialog-show dialog-id)
(sde:dialog-delete dialog-id)

Detailed syntax descriptions of these commands can be found in Appendix A on page 341.
To create and launch a user-defined dialog box:
1. Define a Scheme function that the dialog box will execute when the OK button is clicked.
2. Define the dialog box, create a bitmap image that shows all the necessary parameters,
and add the bitmap image and the necessary parameters to the dialog box.
3. Launch the dialog box.

Example: Defining a Dialog Box

The following example illustrates how to define and use a dialog box.

Step 1: Define a Scheme Function That the Dialog Box Executes

(define create-3d-mosfet
(lambda (Lsub Wsub Hsti Wsti Toxi Lgat)
(define Hsil 1.0) (define Hpol 0.3)
(define Xgat1 (* 0.5 (- Lsub Lgat)))
(define Xgat2 (* 0.5 (+ Lsub Lgat)))
(sdegeo:create-cuboid (position 0.0 0.0 0.0)
(position Lsub Wsub Hsil) "Silicon" "R.Substrate")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0.0 (- Wsub Wsti) (- Hsil Hsti))
(position Lsub Wsub Hsil) "Oxide" "R.STI")
(sdegeo:create-cuboid (position Xgat1 0.0 Hsil)
(position Xgat2 Wsub (+ Hsil Toxi)) "Oxide" "R.Gox")
(sdegeo:create-cuboid (position Xgat1 0.0 (+ Hsil Toxi))
(position Xgat2 Wsub (+ Hsil Hpol)) "PolySilicon" "R.Poly")
)
)

Step 2: Define and Configure the Dialog Box

(define mos-3d-dialog (sde:create-dialog "Simple 3D MOSFET"))
(sde:dialog-add-pixmap mos-3d-dialog "MOS3D.bmp")
(sde:dialog-add-input mos-3d-dialog "Lsub" "Substrate Length: Lsub="
"real" 1.2)
(sde:dialog-add-input mos-3d-dialog "Wsub" "Substrate Width: Wsub="
"real" 0.8)

Sentaurus™ Structure Editor User Guide 337

V-2024.03
Chapter 11: Miscellaneous Utilities
Starting Sentaurus Structure Editor With User-Defined Variables

(sde:dialog-add-input mos-3d-dialog "Hsti"

"Trench Height (<1.0): Hsti= " "real" 0.5)
(sde:dialog-add-input mos-3d-dialog "Wsti"
"Trench Width (<Wsub): Wsti= " "real" 0.3)
(sde:dialog-add-input mos-3d-dialog "Toxi" "Oxide Thickness: Toxi="
"real" 0.02)
(sde:dialog-add-input mos-3d-dialog "Lgat"
"Gate Length (<Lsub): Lgat=" "real" 0.4)
(sde:dialog-ok-command mos-3d-dialog "create-3d-mosfet"
"Lsub Wsub Hsti Wsti Toxi Lgat")

Step 3: Launch the Dialog Box

(sde:dialog-show mos-3d-dialog)

Figure 133 shows the dialog box that was defined and created in Step 2, and launched in
Step 3.

Figure 133 User-defined dialog box

Lgat

Toxi

Hsti

Wsti
Lsub
Wsub

Starting Sentaurus Structure Editor With User-Defined Variables

Scheme variables can be specified at the command line. When Sentaurus Structure Editor
is launched, these variables are accessible from the Scheme command-line window (or in
batch mode, the variables are defined for script execution).
In this way, a Scheme script can be started in such a way that the argument variables are
passed to the script from the command line.

Sentaurus™ Structure Editor User Guide 338

V-2024.03
Chapter 11: Miscellaneous Utilities
User-Defined GUI Interactions

The syntax is:

-var varName=varValue

Neither varName nor varValue can contain any space characters (that is, the
varName=varValue construct should be seen as one argument). varValue can be either a
string or number. For example:
> sde -l cmdinputdemo.scm -e -var mw=10 -var mh=5

where cmdinputdemo.scm is defined as:

(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position mw mh 0)
"Silicon" "region_1")
(sdeio:save-tdr-bnd (get-body-list) "testarginput.tdr")

User-Defined GUI Interactions

This section discusses user-defined GUI interactions.

Dialog Boxes for Obtaining Values

The following functions can be used to interact with the GUI and to receive user input:
(sde:gui-get-integer entry-field-label default-integer title)
(sde:gui-get-real entry-field-label default-real title)
(sde:gui-get-string entry-field-label default-string title)

For example, to display a custom dialog box with the title CMOS and a field Total Width,
which expects a real number that defaults to 10:
(define Wtot (sde:gui-get-real "Total Width" 10 "CMOS"))

The entered value is stored here in the Scheme variable Wtot.

GUI Actions for Obtaining Positions

Simple support functions are also provided to perform interactive model manipulation.
To select a position from the view window:
(define MyPosition (sde:pick-point-on-wp))

After this Scheme command is given, move the mouse in the view window and click the
position of interest. The resulting position is stored here in the Scheme variable
MyPosition.

Sentaurus™ Structure Editor User Guide 339

V-2024.03
Chapter 11: Miscellaneous Utilities
User-Defined GUI Interactions

To select a pair of positions from the view window:

(define MyPositionPair (sde:pick-two-points-on-wp))

After this Scheme command is given, move the mouse in the view window to the first point
of interest, drag to the second point of interest and release the left mouse button. The
resulting list of two position is stored here in the Scheme variable MyPositionPair.

Message Boxes
To post a message box:
(sde:post-message message)

For example:
(sde:post-message "This is a message\n from SDE")

The dialog box has an OK button that must be clicked to continue. No new-line character is
needed. Multiple lines must be separated by "\n".

Sentaurus™ Structure Editor User Guide 340

V-2024.03
A
A Commands

This appendix describes the supported Scheme commands, functions, and extensions.

Presentation of Commands
Each Scheme command, function, or extension accepts zero or more arguments, and can
return a value. The type of arguments and the return type are written in uppercase.
If a Scheme list of a certain data type is used, then it is indicated as <DATATYPE> LIST, for
example, STRING LIST or ENTITY LIST.
For an explanation of the data types used in Sentaurus Structure Editor, see Chapter 9 on
page 311.

Renamed Commands and Obsolete Commands

The following Scheme commands have been renamed or replaced to follow a more
consistent Scheme naming convention. The old command names still work but are replaced
internally with the new command name. The argument lists are the same, and there are no
compatibility issues.
Note:
Do not use old command names in command files.

Old Scheme command name New Scheme command name

dnce sdegeo:dnce

sde:selected-refinements sde:selected-refeval-windows

sdeaxisaligned:set-parameters sdesnmesh:axisaligned

sdedelaunizer:set-parameters sdesnmesh:delaunizer

Sentaurus™ Structure Editor User Guide 341

V-2024.03
Appendix A: Commands
Presentation of Commands

Old Scheme command name New Scheme command name

sdedelaunizer:set-tolerance sdesnmesh:delaunizer-tolerance

sdedr:define-refinement-window sdedr:define-refeval-window

sdedr:delete-refinement-window sdedr:delete-refeval-window

sdedr:redefine-refinement-window sdedr:redefine-refeval-window

sdefloops:begin sdesp:begin

sdefloops:define-step sdesp:define-step

sdefloops:finalize sdesp:finalize

sdefloops:restore-state sdesp:restore-state

sdefloops:tag-initial sdesp:tag-initial

sdegeo:define-2d-contact sdegeo:set-contact

sdegeo:define-3d-contact sdegeo:set-contact

sdegeo:fillet-edges sdegeo:fillet

sdegeo:split-solid sde:split-solid

sdeinterpolate:set-parameters sdesnmesh:interpolate

sdeio:read_dfise_mask sdeio:read-dfise-mask

sdenoffset:create-noffset-block sdedr:offset-block

sdenoffset:create-noffset-interface sdedr:offset-interface

sdesnmesh:replace-tensor-block sdesnmesh:tensor

sdesnmesh:replace-tools-block sdesnmesh:tools

sdesnmesh:set-iocontrols sdesnmesh:iocontrols

Sentaurus™ Structure Editor User Guide 342

V-2024.03
Appendix A: Commands
Presentation of Commands

The following Scheme commands are obsolete and no longer supported. There are no
replacements for these commands. If you execute a script containing any of these
commands, then the script execution terminates, and an error message is written to
the .log and .log.err files.
Note:
Remove these obsolete commands from scripts.

Obsolete Scheme command

sdedr:offset-boundary

sdedr:offset-isoline

sdenoffset:create-boundary

sdenoffset:create-global

sdenoffset:create-isoline

Sentaurus™ Structure Editor User Guide 343

V-2024.03
Appendix A: Commands
afm-smooth-layers

afm-smooth-layers
This Scheme extension creates a layered lens structure with a texture map. The texture map
is defined in a CSV file.

Syntax
(afm-smooth-layers fname z0 zplanar layerregion layermaterial
layerthickness)

Returns
BOOLEAN

Arguments

Argument Description

fname The name of the input file. Argument type: STRING

z0 The bottom z-coordinate. Argument type: REAL

zplanar The top planar z-coordinate. Argument type: REAL

layerregion List of region names. Argument type: STRING LIST

layermaterial List of DATEX materials. Argument type: DATEXMAT LIST

layerthickness Specifies the thickness of each layer. Argument type: REAL LIST

Examples
(define n 10)
(define a (* 2 PI))
(define oport (open-output-file "xx.csv"))
(display ", " oport)
(do ((i 0 (+ i 1))) ((> i n))
(display (/ (* i a) n) oport)
(display ", " oport)
)
(display "\n" oport)
(do ((i 0 (+ i 1))) ((> i n))
(display (/ (* i a) n) oport)
(display ", " oport)
(do ((j 0 (+ j 1))) ((> j n))
(define yp (* (sin (* j (/ a n))) (cos (* i (/ a n)))))
(display yp oport)
(if (not (equal? j n))
(display ", " oport))

Sentaurus™ Structure Editor User Guide 344

V-2024.03
Appendix A: Commands
bbox

)
(display "\n" oport)
)
(close-output-port oport)

(sde:clear)
(define layermaterial (list "TCO" "Copper" "PolySi"))
(define layerregion (list "tco" "copper" "polysi"))
(define layerthickness (list 2 2 2))
(sdegeo:create-cuboid (position 0 0 0) (position (* 2 PI) (* 2 PI) 4)
"Silicon" "xx")
(afm-smooth-layers "xx.csv" 0 4 layerregion layermaterial
layerthickness)

bbox
This Scheme extension returns the minimum and maximum values corresponding to a
diagonal across the bounding box of a body, relative to the active coordinate system
orientation.
This Scheme extension returns a pair comprising (min-pt . max-pt). The returned
bounding box is tight (exact).

Syntax
(bbox entity-list)

Returns
POSITION LIST

Arguments

Argument Description

entity-list This argument comprises an entity or a list of entities. Each entity or list of
entities can be a body, a wire body, a face, or an edge.
Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 345

V-2024.03
Appendix A: Commands
bbox-exact

bbox-exact
This Scheme extension returns the exact minimum and maximum values corresponding to
a diagonal across the tight bounding box of a body, relative to the active coordinate system
orientation.
This Scheme extension returns a pair comprising (min-pt . max-pt). The returned
bounding box is tight (exact).

Syntax
(bbox-exact entity-list)

Returns
POSITION LIST

Arguments

Argument Description

entity-list This argument comprises an entity or a list of entities. Each entity or list of
entities can be a body, a wire, a face, or an edge.
Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 346

V-2024.03
Appendix A: Commands
body?

body?
This Scheme function determines whether a Scheme object is a body. It returns #t if the
object is a body; otherwise, it returns #f.

Syntax
(body? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Examples
(define myrect (sdegeo:create-rectangle (position 0 0 0)
(position 1 1 0) "Silicon" "Region_1"))
(body? myrect)
;; #t

Sentaurus™ Structure Editor User Guide 347

V-2024.03
Appendix A: Commands
build-csv-lens

build-csv-lens
This Scheme extension creates a solid body from user-defined data.

Syntax
(build-csv-lens fname bottom-z material-name [region-name])

Returns
ENTITY ID (body)

Arguments

Argument Description

fname The name of the input data file in CSV format. Argument type: STRING

bottom-z Argument type: REAL

material-name Argument type: DATEXMAT

region-name Optional. Argument type: STRING

Description
The input data file is a CSV file, which defines the user data over a tensor grid, in the
following format (n × m grid):
,x1, x2, ..., xn
y1, f11, f12, ..., f1n
y2, f21, f22, ..., f2n
...
ym, fm1, fm2, ..., fmn

The x1, x2, ..., xn values define the x-coordinates of the tensor grid.
The y1, y2, ..., ym values define the y-coordinates of the tensor grid.
The fij values define the function values at the given (xj, yi) tensor-grid points. The
base of the created solid body is placed in the xy plane at z = bottom-z, and the tensor-grid
points define the top surface in the +z-direction.

Sentaurus™ Structure Editor User Guide 348

V-2024.03
Appendix A: Commands
color:rgb

color:rgb
This Scheme extension specifies the red, green, and blue (RGB) color components with
normalized real numbers, ranging from 0 to 1.

Syntax
(color:rgb red green blue)

Returns
COLOR

Arguments

Argument Description

red Specifies the red color component. Argument type: REAL

green Specifies the green color component. Argument type: REAL

blue Specifies the blue color component. Argument type: REAL

Description
Some colors are predefined as follows:
(define rgb:red (color:rgb 1 0 0))
(define rgb:green (color:rgb 0 1 0))
(define rgb:blue (color:rgb 0 0 1))
(define rgb:yellow (color:rgb 1 1 0))
(define rgb:magenta (color:rgb 1 0 1))
(define rgb:cyan (color:rgb 0 1 1))
(define rgb:black (color:rgb 0 0 0))
(define rgb:white (color:rgb 1 1 1))

Therefore, rgb:red, rgb:green, and so on can also be used as color:rgb values.

Sentaurus™ Structure Editor User Guide 349

V-2024.03
Appendix A: Commands
complete-edge-list

complete-edge-list
This Scheme extension appends the specified edge list, with all neighboring linear edges.
If some 2D boundary simplification algorithms are used, which require an edge list as input,
then extend the edge list with all neighboring linear edges. This ensures that the boundary
simplification algorithm does not leave gaps or does not create overlaps between
neighboring bodies.

Syntax
(complete-edge-list edge-list)

Returns
LIST

Arguments

Argument Description

edge-list Specifies an edge list. Argument type: EDGE LIST

Examples
(sde:clear)
(define mb1 (sdegeo:create-rectangle (position 0 0 0)
(position 10 10 0) "Silicon" "x1"))
(define mb2 (sdegeo:create-rectangle (position 5 5 0)
(position 15 15 0) "PolySilicon" "x2"))
(define elist (entity:edges mb1))
(length elist)
;; 6
(define elistc (complete-edge-list elist))
(length elistc)
;; 8

Sentaurus™ Structure Editor User Guide 350

V-2024.03
Appendix A: Commands
convert-to-degree

convert-to-degree
This Scheme extension converts an angle from radian to degree.

Syntax
(convert-to-degree angle)

Returns
REAL

Arguments

Argument Description

angle Argument type: REAL

convert-to-radian
This Scheme extension converts an angle from degree to radian.

Syntax
(convert-to-radian angle)

Returns
REAL

Arguments

Argument Description

angle Argument type: REAL

Sentaurus™ Structure Editor User Guide 351

V-2024.03
Appendix A: Commands
edge?

edge?
This Scheme function determines whether a Scheme object is an edge. It returns #t if a
Scheme object is an edge.

Syntax
(edge? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 352

V-2024.03
Appendix A: Commands
edge:circular

edge:circular
This Scheme function creates an arc with the specified center position and radius.
The start and end of the angle are measured counterclockwise from the x-axis of the active
coordinate system orientation. The start and end locations must be in the current xy
construction plane.

Syntax
(edge:circular center-position radius [start-angle=0 [end-angle=360]])

Returns
ENTITY (EDGE)

Arguments

Argument Description

center-position Specifies the center position of the arc. Argument type: POSITION

radius Specifies an implicit line between the center position and the edge of the arc.
Argument type: REAL

start-angle Optional. Specifies the starting point of the arc in degrees.

Argument type: REAL

end-angle Optional. Specifies the end angle of the arc in degrees. Argument type: REAL

Sentaurus™ Structure Editor User Guide 353

V-2024.03
Appendix A: Commands
edge:circular?

edge:circular?
This Scheme function determines whether a Scheme object is a circular edge.
It returns #t if a Scheme object is a circular edge.

Syntax
(edge:circular? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

edge:elliptical?
This Scheme function determines if a Scheme object is an elliptical edge.
It returns #t if a Scheme object is an elliptical edge.

Syntax
(edge:elliptical? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 354

V-2024.03
Appendix A: Commands
edge:end

edge:end
This Scheme function returns the end position of an edge.

Syntax
(edge:end edge)

Returns
POSITION

Arguments

Argument Description

edge Specifies an input edge. Argument type: EDGE

edge:length
This Scheme function returns the length of an edge.

Syntax
(edge:length edge)

Returns
REAL

Arguments

Argument Description

edge Specifies an input edge. Argument type: EDGE

Sentaurus™ Structure Editor User Guide 355

V-2024.03
Appendix A: Commands
edge:linear

edge:linear
This Scheme function specifies locations as positions and creates a linear edge between
two locations.

Syntax
(edge:linear position position)

Returns
ENTITY (EDGE)

Arguments

Argument Description

position The first position argument specifies the start location of the line. The second
position argument specifies the end location of the line.
Argument type: POSITION

Examples
; Scheme function
; edge:linear
; Create two linear edges given two positions.
(define edge1 (edge:linear (position 0 0 0) (position 30 30 0)))

Sentaurus™ Structure Editor User Guide 356

V-2024.03
Appendix A: Commands
edge:linear?

edge:linear?
This Scheme function determines whether a Scheme object is a linear edge.
It returns #t if a Scheme object is a linear edge.

Syntax
(edge:linear? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Examples
(define myrect (sdegeo:create-rectangle (position 0 0 0)
(position 1 1 0) "Silicon" "Region_1"))
(define myedges (entity:edges myrect))
(edge:linear? (list-ref myedges 0))
;; #t

Sentaurus™ Structure Editor User Guide 357

V-2024.03
Appendix A: Commands
edge:mid-point

edge:mid-point
This Scheme function returns the midpoint position of an edge.

Syntax
(edge:mid-point edge [approximation=#t])

Returns
POSITION

Arguments

Argument Description

edge Specifies an input entity. Argument type: EDGE

approximation Optional. If this argument is set to true (#t), then the Scheme function returns
the exact geometric midpoint of the edge. If it is set to false (#f), then the
Scheme function returns the midpoint in parameter space. The default is #t.
Argument type: BOOLEAN

edge:start
This Scheme function returns the starting position of an edge.

Syntax
(edge:start edge)

Returns
POSITION

Arguments

Argument Description

edge Specifies an input entity. Argument type: EDGE

Sentaurus™ Structure Editor User Guide 358

V-2024.03
Appendix A: Commands
edge:type

edge:type
This Scheme function determines the type of an edge.

Syntax
(edge:type edge)

Returns
STRING

Arguments

Argument Description

edge Specifies an input edge. Argument type: EDGE

entity:box
This Scheme function returns the extrema box (minimum and maximum values)
corresponding to a diagonal across the bounding box of a body, relative to the active
coordinate system orientation.
It returns a pair comprising (min-pt . max-pt). It returns a solid box if create-box is
specified.

Syntax
(entity:box entity-list [create-box])

Returns
POSITION LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Each entity or list of entities can be a
body, a wire, a face, or an edge. Argument type: ENTITY | ENTITY LIST

create-box Optional. If this argument is specified, then a solid box is returned.

Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 359

V-2024.03
Appendix A: Commands
entity:copy

entity:copy
This Scheme function copies any entity (such as a solid, a face, and an edge) and all entities
attached to it.

Syntax
(entity:copy entity-list)

Returns
ENTITY | ENTITY LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be copied.

Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 360

V-2024.03
Appendix A: Commands
entity:debug

entity:debug
This Scheme function prints information about the data structure of an entity.

Syntax
(entity:debug entity [level])

Returns
STRING

Arguments

Argument Description

entity Specifies an entity to be queried. Argument type: ENTITY

level Optional. Controls the amount of debug information generated, where:

• 0 writes no output and only returns the entity type.
• 1 writes only data specific to the given entity.
• 2 writes additional information for some entity types.
For example, if the entity is an edge, then the coordinates of the endpoints and
the curve data also are written. This Scheme function writes only data specific
to the given entity.
• 3 writes the size of the entity and all associated entities.
• 4 writes the complete information for the entity and all associated entities.
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 361

V-2024.03
Appendix A: Commands
entity:deep-copy

entity:deep-copy
This Scheme function deep copies an entity (solid, face, edge, and so on) as well as all
attached entities.
The difference between entity:deep-copy and entity:copy is that entity:deep-copy
makes a copy of splf_splf; whereas, entity:copy creates a pointer to splf_splf.
The deep-copy functionality is used instead of the regular copy when it is required that no
links exist with shared information between the original and deep copies.

Syntax
(entity:deep-copy entity-list)

Returns
ENTITY | ENTITY LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be deep copied.

Argument type: ENTITY | ENTITY LIST

entity:delete
This Scheme function deletes an entity or a list of entities, and any attributes attached to
those entities.

Syntax
(entity:delete entity-list)

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be deleted.

Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 362

V-2024.03
Appendix A: Commands
entity:dist

entity:dist
This Scheme function finds the minimum distance between two entities, or an entity and a
position.
Using two input entities, this Scheme function finds a position on each entity such that the
distance between the two is the minimum distance. Supported entities include BODY, EDGE,
FACE, LOOP, LUMP, SHELL, VERTEX, and WIRE.

Syntax
(entity:dist part1 part2 [acis-opts])

Returns
(REAL POSITION (ENTITY | ENTITY LIST . STRING))

Arguments

Argument Description

part1 Specifies either an entity or a position.

Caution:
If part1 is defined as a position, then part2 must be an entity.

Argument type: ENTITY | POSITION

part2 Specifies either an entity or a position. Argument type: ENTITY | POSITION

acis-opts Optional. Use this argument to switch on journaling and versioning options.
Argument type: ACIS OPTIONS

Sentaurus™ Structure Editor User Guide 363

V-2024.03
Appendix A: Commands
entity:edges

entity:edges
This Scheme function returns a list of all edge entities of an entity or a list of entities.
It returns an empty list when no edges are found.

Syntax
(entity:edges entity-list)

Returns
EDGE | EDGE LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Argument type: ENTITY | ENTITY LIST

entity:erase
This Scheme function erases, but does not remove, the specified entity or list of entities.
The entities remain available for later redisplay. To redisplay an erased entity or a list of
entities, use the Scheme function render:rebuild.

Syntax
(entity:erase entity-list)

Returns
Input entity-list

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be erased from the display.

Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 364

V-2024.03
Appendix A: Commands
entity:faces

entity:faces
This Scheme function returns a list of all face entities of an entity or a list of entities. It returns
an empty list when no faces are found. The input argument is an entity-list from which
a list of all faces is to be obtained.

Syntax
(entity:faces entity-list)

Returns
FACE | FACE LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 365

V-2024.03
Appendix A: Commands
entity:loops

entity:loops
This Scheme function returns a list of all the loops of an entity or a list of entities. If no loops
are found, then it returns an empty list.

Syntax
(entity:loops entity-list [include-pat])

Returns
LOOP | LOOP LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be queried.

Argument type: ENTITY | ENTITY LIST

include-pat Optional. Determines how this Scheme function deals with patterned objects.
By default, patterned objects are included in the list of entities. You can specify
any one of the following:
• 0 – Patterned objects are created if they do not already exist and are
included in the list.
• 1 – Only those patterned objects that already exist are included in the list.
• 2 – No patterned objects, except seed pattern objects, are included in the list.
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 366

V-2024.03
Appendix A: Commands
entity:lumps

entity:lumps
This Scheme function returns a list of all the lumps of an entity or a list of entities. If no lumps
are found, then it returns an empty list.

Syntax
(entity:lumps entity-list)

Returns
LUMP | LUMP LIST

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be queried.

Argument type ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 367

V-2024.03
Appendix A: Commands
entity:set-color

entity:set-color
This Scheme function sets the display color for an entity or a list of entities.

Syntax
(entity:set-color entity-list color)

Returns
Previous color of entity

Arguments

Argument Description

entity-list Specifies an entity or a list of entities to be assigned a color.

Argument type: ENTITY | ENTITY LIST

color This argument can accept an integer or a color:rgb value. It specifies a new
color to be assigned to entities. The predefined color values include:
• BLACK = 0 = #[color 0 0 0]
• RED = 1 = #[color 1 0 0]
• GREEN = 2 = #[color 0 1 0]
• BLUE = 3 = #[color 0 0 1]
• CYAN = 4 = #[color 0 1 1]
• YELLOW = 5 = #[color 1 1 0]
• MAGENTA = 6 = #[color 1 0 1]
• WHITE = 7 = #[color 1 1 1]
These color variable names are already defined in the Sentaurus Structure
Editor Scheme interpreter and can be used instead of the numeric values.
Argument type: COLOR

Examples
Example 1
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silver"
"region_1")
(sdegeo:create-sphere (position 1 1 1) 0.5 "SiliconCarbide"
"region_2")
(entity:set-color (find-face-id (position 0.1 0.1 1)) RED)

Sentaurus™ Structure Editor User Guide 368

V-2024.03
Appendix A: Commands
entity:shells

Example 2
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon" "xx")
(entity:set-color (find-face-id (position 0.5 0.5 1)) 3)
(entity:set-color (find-face-id (position 1 0.5 0.5)) rgb:yellow)
(entity:set-color (find-face-id (position 0.5 1 0.5)) CYAN)

entity:shells
This Scheme function returns a list of shell entities from a topological entity or a list of
entities. If no shell entities are found, then this Scheme function returns an empty list.

Syntax
(entity:shells entity-list [include-pat])

Returns
SHELL | SHELL LIST

Arguments

Argument Description

entity-list Specifies a topological entity or a list of entities.

Argument type: ENTITY | ENTITY LIST

include-pat Optional. Determines how this Scheme function deals with patterned objects.
By default, patterned objects are included in the list of entities. You can specify
any one of the following:
• 0 – Patterned objects are created if they do not already exist and are
included in the list.
• 1 – Only those patterned objects that already exist are included in the list.
• 2 – No patterned objects, except seed pattern objects, are included in the list.
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 369

V-2024.03
Appendix A: Commands
entity:vertices

entity:vertices
This Scheme function returns a list of all the vertices in an entity or a list of entities. It returns
an empty list if no vertices are found.

Syntax
(entity:vertices entity-list)

Returns
VERTEX | VERTEX LIST

Arguments

Argument Description

entity-list Specifies an entity or an entity list. Argument type: ENTITY | ENTITY LIST

Sentaurus™ Structure Editor User Guide 370

V-2024.03
Appendix A: Commands
env:set-tolerance

env:set-tolerance
This Scheme function sets modeling tolerances. The system tolerances are set in the
following order: resabs, resnor, resfit, and resmch. The ratio of resabs to resnor is the
largest number that can be represented, that is, the modeling range must be within this ratio.
Note:
For each argument, REAL sets the value, BOOLEAN #f leaves the value
unchanged, and BOOLEAN #t sets the value to the default.

Syntax
(env:set-tolerance resabs resnor resfit resmch)

Returns
The set tolerance values: (REAL REAL REAL REAL)

Arguments

Argument Description

resabs Determines whether two positions in space are equal. This tolerance defines the
smallest distance between two distinct points.
Argument type: REAL (default=1e-6)

resnor Checks a number for equality with 0. This tolerance checks the components of
numbers that are 0 to determine whether vectors are parallel or perpendicular, or
to check for zero lengths.
Argument type: REAL (default=1e-10)

resfit Fits interpolation curves when intersecting surfaces.

Argument type: REAL (default=1e-3)

resmch Used by the spline functions for purposes similar to resnor.

Argument type: REAL (default=1e-11)

Sentaurus™ Structure Editor User Guide 371

V-2024.03
Appendix A: Commands
env:tolerance

env:tolerance
This Scheme function returns the system tolerances as a list, in the following order: resabs,
resnor, resfit, resmch. The Scheme function env:set-tolerance explains each
tolerance value (see env:set-tolerance on page 371).

Syntax
(env:tolerance)

Returns
The set tolerance values: (REAL REAL REAL REAL)

erf
This Scheme function returns the error function (erf) value of the input.

Syntax
(erf value)

Returns
REAL

Arguments

Argument Description

value Argument type: REAL

Sentaurus™ Structure Editor User Guide 372

V-2024.03
Appendix A: Commands
erfc

erfc
This Scheme function returns the complementary error function (erfc) value of the input.

Syntax
(erfc value)

Returns
REAL

Arguments

Argument Description

value Argument type: REAL

exists-empty-mask-name
This Scheme function checks whether the specified empty mask exists.

Syntax
(exists-empty-mask-name maskname)

Returns
BOOLEAN

Arguments

Argument Description

maskname Specifies the name of an empty mask. Argument type: STRING

Sentaurus™ Structure Editor User Guide 373

V-2024.03
Appendix A: Commands
exists-mask-name

exists-mask-name
This Scheme function checks whether the specified mask exists.

Syntax
(exists-mask-name maskname)

Returns
BOOLEAN

Arguments

Argument Description

maskname Specifies the name of a mask. Argument type: STRING

Sentaurus™ Structure Editor User Guide 374

V-2024.03
Appendix A: Commands
extract-interface-normal-offset-refwindow

extract-interface-normal-offset-refwindow
This command generates the non-regularized intersection between two bodies and creates
a 3D offset body from the non-regularized intersection, by offsetting the faces of the
interface body in the normal direction, and assigns it as a doping/refinement/submesh
(DRS) body.

Syntax
(extract-interface-normal-offset-refwindow body1 body2
offset-distance refwindowname)

Returns
ENTITY ID of the created Ref/Eval window

Arguments

Argument Description

body1 Argument type: ENTITY

body2 Argument type: ENTITY

offset-distance Argument type: REAL

refwindowname Argument type: STRING

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cylinder (position 5 5 4) (position 5 5 8)
2 "PolySilicon" "x2"))
(extract-interface-normal-offset-refwindow mb1 mb2 1 "rw1")

Sentaurus™ Structure Editor User Guide 375

V-2024.03
Appendix A: Commands
extract-interface-offset-refwindow

extract-interface-offset-refwindow
This command generates the non-regularized intersection between two bodies and creates
a 3D offset body from the non-regularized intersection and assigns it as a DRS body.

Syntax
(extract-interface-offset-refwindow body1 body2 offset-distance
refwindowname)

Returns
ENTITY ID of the created Ref/Eval window

Arguments

Argument Description

body1 Argument type: ENTITY

body2 Argument type: ENTITY

offset-distance Argument type: REAL

refwindowname Argument type: STRING

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cylinder (position 5 5 4) (position 5 5 8)
2 "PolySilicon" "x2"))
(extract-interface-offset-refwindow mb1 mb2 1 "rw1")

Sentaurus™ Structure Editor User Guide 376

V-2024.03
Appendix A: Commands
extract-refpolyhedron

extract-refpolyhedron
This Scheme extension converts a 3D geometric body to a polyhedral refinement window.
The ACIS surface mesher of Sentaurus Structure Editor, which saves the tessellated
polyhedral boundary for meshing, converts the 3D geometric body (possibly with nonplanar
faces) to a polyhedral refinement window.

Syntax
(extract-refpolyhedron bodyid refwindowname)

Returns
ENTITY

Arguments

Argument Description

bodyid Argument type: ENTITY

refwindowname Argument type: STRING

Examples
Example 1
(sde:clear)
(define mb (sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"Silicon" "x1"))
(extract-refpolyhedron mb "ref1")

Example 2
(sde:clear)
(define mb (sdegeo:create-cylinder (position 0 0 0) (position 0 0 1)
0.1 "Silicon" "x1"))
(extract-refpolyhedron mb "ref1")
(sdedr:define-refinement-size "RD_1" .2 .2 .1 .1)
(sdedr:define-refinement-placement "RP_1" "RD_1" "ref1")
(sdedr:write-cmd-file "xx.cmd")

extract-refpolyhedron-facets
This Scheme extension converts a 3D geometric body to a polyhedral refinement window
using the triangular facets of the solid boundary. It can handle either a polyhedron with
nonplanar surfaces or any solid with voids.

Sentaurus™ Structure Editor User Guide 377

V-2024.03
Appendix A: Commands
extract-refpolyhedron-facets

Syntax
(extract-refpolyhedron-facets body-id refwindow-name)

Returns
ENTITY

Arguments

Argument Description

body-id Argument type: ENTITY

refwindow-name Argument type: STRING

Examples
Example 1
(sde:clear)
;Create a box with void
(define mb (sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "x1"))
(sdegeo:create-cuboid (position 2 2 2) (position 8 8 8) "Gas" "x1")
(entity:delete (find-material-id "Gas"))

;Create the polyhedron refinement based on triangular facets

(extract-refpolyhedron-facets mb "ref1")
(sdedr:define-refinement-size "RD_1" .2 .2 .1 .1)
(sdedr:define-refinement-placement "RP_1" "RD_1" "ref1")

;Write the cmd file

(sdedr:write-cmd-file "cuboid_polyhedron_refinement.cmd")

Sentaurus™ Structure Editor User Guide 378

V-2024.03
Appendix A: Commands
extract-refwindow

extract-refwindow
This Scheme extension defines refinement windows, matching the specified geometry face
or faces.

Syntax
(extract-refwindow faceid refwindowname)

Returns
None

Arguments

Argument Description

faceid Argument type: FACE | FACE LIST | EDGE

refwindowname Argument type: STRING

Description
This Scheme extension goes through the specified face list (or the specified single face list),
extracts the vertex list for each face, and defines a separate polygonal refinement window
for each face. Planar faces will have the corresponding refinement polygon defined as one
single refinement polygon. However, for curved faces, the geometric face will be
triangulated first and a separate refinement polygon (triangle) will be defined for each
triangle. The coplanar triangular faces of the extracted refinement body are merged by
default. Merging the coplanar triangular faces can be switched off by setting the
merge-extracted-drs-faces global variable to #f. (It is set to #t by default.)

The extract-refwindow Scheme extension also supports converting linear geometric

edges to Ref/Eval windows (line elements). The argument list is unchanged; however, in this
case, the first argument must be a linear edge.

Examples
Example 1
(sde:clear)
(define mypyramid (sdegeo:create-pyramid
(position 0 0 0) 20 40 40 6 12 "PolySilicon" "r1"))
(define myface (list-ref (entity:faces mypyramid) 2))
(extract-refwindow myface "refinement1")

Sentaurus™ Structure Editor User Guide 379

V-2024.03
Appendix A: Commands
face:area

Example 2
(sde:clear)
(define mycube (sdegeo:create-cuboid (position 0 0 0)
(position 10 10 10) "Silicon" "r1"))
(define myedge (car (find-edge-id (position 10 5 10))))
(sdegeo:fillet myedge 4)
(define mflist (entity:faces mycube))
(extract-refwindow (list-ref mflist 2) "refwin1")
(extract-refwindow (list-ref mflist 5) "refwin2")
(extract-refwindow (list-ref mflist 0) "refwin3")

Example 3
(sde:clear)
(define mb (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "xx"))
(extract-refwindow (car (entity:edges mb)) "rw1")

face:area
This Scheme function calculates the area of a specified face. The accuracy of the
calculation is fixed at 0.001 for an area of geometry that cannot be determined analytically.

Syntax
(face:area face)

Returns
REAL

Arguments

Argument Description

face Specifies an input face. Argument type: FACE

Sentaurus™ Structure Editor User Guide 380

V-2024.03
Appendix A: Commands
face:conical?

face:conical?
This Scheme function determines whether a Scheme object is a conical face.
It returns #t if the object is a conical face; otherwise, it returns #f.

Syntax
(face:conical? object

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

face:cylindrical?
This Scheme function determines whether a Scheme object is a cylindrical face.
The returned Boolean specifies whether the supplied entity input is a cylindrical face.

Syntax
(face:cylindrical? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried.

Note:
This input argument is a cylindrical face and not a solid cylinder.

Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 381

V-2024.03
Appendix A: Commands
face:planar?

face:planar?
This Scheme function determines whether a Scheme object is a planar face.
It returns #t if the specified object is a planar face.

Syntax
(face:planar? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

face:plane-normal
This Scheme function returns the face normal of the specified planar face.

Syntax
(face:plane-normal face)

Returns
GVECTOR

Arguments

Argument Description

face Specifies a planar face to be queried. Argument type: ENTITY FACE

Sentaurus™ Structure Editor User Guide 382

V-2024.03
Appendix A: Commands
face:spherical?

face:spherical?
This Scheme function determines whether a Scheme object is a spherical face.
It returns #t if the specified object is a spherical face.

Syntax
(face:spherical? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

face:spline?
This Scheme function determines whether a Scheme object is a face–spline.

Syntax
(face:spline? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 383

V-2024.03
Appendix A: Commands
face:toroidal?

face:toroidal?
This Scheme function determines whether a Scheme object is a toroidal face.

Syntax
(face:toroidal? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

filter:type
This Scheme function creates the specified type-name as a filter, which specifies the type
of entity to be used in another filter operation. If a new type filter is created, then it replaces
the previously defined type.
Use this Scheme function to display a list of available filter types.

Syntax
(filter:type type-name)

Returns
FILTER

Arguments

Argument Description

type-name Specifies the entity filter to be created. Possible values are:

"body?" | "edge?" | "edge:circular?" | "edge:curve?" |
"edge:elliptical?" | "edge:linear?" | "edge:spline?" | "face?" |
"face:conical?" | "face:cylindrical?" | "face:planar?" |
"face:spherical?" | "face:spline?" | "face:toroidal?" |
"mixed-body?" | "point?" | "solid?" | "text?" | "vertex?" |
"wcs?" | "wire?" | "wire-body?"
Argument type: STRING

Sentaurus™ Structure Editor User Guide 384

V-2024.03
Appendix A: Commands
find-body-id

find-body-id
This Scheme extension finds the entity numbers of a body. It goes through all bodies,
(get-body-list), and returns the ACIS entity IDs of all bodies that contain the specified
position. The position can be on a boundary face or vertex or can be an internal point.

Syntax
(find-body-id position)

Returns
BODY LIST

Arguments

Argument Description

position Argument type: POSITION

find-body-id-drs
This Scheme extension finds the entity numbers of a body for a refinement/evaluation (Ref/
Eval) window body. It goes through the body list of all defined Ref/Eval window bodies and
returns the ACIS entity IDs of all bodies that contain the specified position. The position can
be on a boundary face or can be an internal point.

Syntax
(find-body-id-drs position)

Returns
BODY LIST

Arguments

Argument Description

position Argument type: POSITION

Sentaurus™ Structure Editor User Guide 385

V-2024.03
Appendix A: Commands
find-drs-id

find-drs-id
This Scheme extension returns the entity numbers of a Ref/Eval window body. It goes
through all defined Ref/Eval window bodies and returns the ACIS entity IDs of the Ref/Eval
window body that matches the specified DRS name. (The DRS name is a unique identifier
of each Ref/Eval window body.)

Syntax
(find-drs-id DRSname)

Returns
BODY

Arguments

Argument Description

DRSname Argument type: STRING

Sentaurus™ Structure Editor User Guide 386

V-2024.03
Appendix A: Commands
find-edge-id

find-edge-id
This Scheme extension finds the entity numbers of an edge. It goes through the edge list of
all defined bodies, (entity:edges (get-body-list)), and returns the ACIS entity IDs of
all edges that contain the specified position. The position can be either an end vertex
position of the edge or an internal position.
This Scheme extension provides an additional filter for selecting bodies.

Syntax
(find-edge-id position body)

Returns
SYNTAX LIST

Arguments

Argument Description

position Argument type: POSITION

body Argument type: BODY | BODY LIST

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon" "x1")
(sdegeo:create-cuboid (position 1 0 0) (position 2 1 1) "PolySilicon"
"x2")
(define chamferedges (find-edge-id (position 1 0.5 1)
(find-material-id "Silicon")))
(sdegeo:chamfer chamferedges 0.2)

Sentaurus™ Structure Editor User Guide 387

V-2024.03
Appendix A: Commands
find-edge-id-drs

find-edge-id-drs
This Scheme extension finds the entity numbers of an edge for a Ref/Eval window body. It
goes through the edge list of all defined Ref/Eval window bodies and returns the ACIS entity
IDs of all edges that contain the specified position. The position can be either an end vertex
position of the edge or an internal position.

Syntax
(find-edge-id-drs position)

Returns
EDGE LIST

Arguments

Argument Description

position Argument type: POSITION

find-face-id
This Scheme extension finds the entity numbers of a face. It goes through the face list of all
defined bodies, (entity:faces (get-body-list)), and returns the ACIS entity IDs of all
faces that contain the specified position. If the input argument is a gvector, then all the planar
faces with the specified face normal are returned.

Syntax
(find-face-id position | gvector)

Returns
FACE LIST

Arguments

Argument Description

position Specifies either a position lying on a boundary edge or an internal position.

Argument type: POSITION

gvector Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 388

V-2024.03
Appendix A: Commands
find-face-id-drs

find-face-id-drs
This Scheme extension finds the entity numbers of a face for a Ref/Eval window body. It
goes through the face list of all defined Ref/Eval window bodies and returns the ACIS entity
IDs of all faces that contain the specified position.

Syntax
(find-face-id-drs position)

Returns
FACE LIST

Arguments

Argument Description

position Specifies either a position lying on a boundary edge or an internal position.

Argument type: POSITION

find-material-id
This Scheme extension finds and returns all entities that have the given material attribute. It
goes through every region in the model and selects all regions that have the specified
material-name as the material attribute.

Syntax
(find-material-id material-name)

Returns
BODY | BODY LIST

If only one body is found with the specified material-name as the material attribute, then
the entity ID of the material is returned. If more than one region has the material-name as
the material attribute, then a list of all entities is returned. If no entity is found, then an empty
list is returned.

Arguments

Argument Description

material-name Specifies the name of a material. Argument type: DATEXMAT

Sentaurus™ Structure Editor User Guide 389

V-2024.03
Appendix A: Commands
find-region

find-region
This Scheme extension returns the entity IDs for a specific region name. It examines every
region in the model and selects all regions that have the specified region-name as the
region attribute.

Syntax
(find-region region-name [partial-match])

Returns
BODY | BODY LIST

If only one body is found with the specified region-name as the region attribute, then the
entity ID of the region is returned. If more than one region has the region-name as the
region attribute, then a list of all entities is returned. If no entity is found, then an empty list
is returned.

Arguments

Argument Description

region-name Specifies the name of a region. Argument type: STRING

partial-match Optional. If this argument is used, then the Scheme extension returns the
partially matched region names as well, as long as the partial match criterion is
incremental (that is, it is satisfied from the beginning of the string).
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 390

V-2024.03
Appendix A: Commands
find-region-id

find-region-id
This Scheme extension returns the entity IDs for a specific region name. It goes through
every region in the model and selects all regions that have the specified region-name as the
region attribute.

Syntax
(find-region-id region-name)

Returns
BODY | BODY LIST

If only one body is found with the specified region-name as the region attribute, then the
entity ID of the region is returned. If more than one region has the region-name as the
region attribute, then a list of all entities is returned. If no entity is found, then an empty list
is returned.

Arguments

Argument Description

region-name Argument type: STRING

find-vertex-id
This Scheme extension finds the entity numbers of a vertex. It goes through the vertex list
of all defined bodies, (entity:vertices (get-body-list)), and returns the ACIS entity
IDs of all vertices that are placed at the specified position.

Syntax
(find-vertex-id position)

Returns
VERTEX LIST

Arguments

Argument Description

position Argument type: POSITION

Sentaurus™ Structure Editor User Guide 391

V-2024.03
Appendix A: Commands
find-vertex-id-drs

find-vertex-id-drs
This Scheme extension finds the entity numbers of a vertex for a Ref/Eval window body. It
goes through the vertex list of all defined Ref/Eval window bodies and returns the ACIS
entity IDs of all vertices that contain the specified position.

Syntax
(find-vertex-id-drs position)

Returns
VERTEX LIST

Arguments

Argument Description

position Argument type: POSITION

Sentaurus™ Structure Editor User Guide 392

V-2024.03
Appendix A: Commands
generic:get

generic:get
This Scheme function returns the value of a named generic attribute attached to an entity. It
returns an empty list when no attribute is found.

Syntax
(generic:get entity attribute-name)

Returns
INTEGER | REAL | STRING

Arguments

Argument Description

entity Specifies an entity. Argument type: ENTITY

attribute-name Specifies the name of an attribute. Argument type: STRING

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(generic:set mb1 "DRS" "test")
; A new attribute DRS is added to the entity: #[body 17 1]!

(generic:get mb1 "DRS")

; "Test"

Sentaurus™ Structure Editor User Guide 393

V-2024.03
Appendix A: Commands
generic:list-attributes

generic:list-attributes
This Scheme function returns a list of the generic attribute names of an entity.

Syntax
(generic:list-attributes entity)

Returns
STRING LIST

Arguments

Argument Description

entity Specifies an entity. Argument type: ENTITY

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
; ("material" "region" "transmission") is defined inside the function.

(generic:list-attributes mb1)
; ("material" "region" "transmission") is returned.

Sentaurus™ Structure Editor User Guide 394

V-2024.03
Appendix A: Commands
generic:set

generic:set
This Scheme function attaches the value of a named generic attribute attached to an entity.
It displays a warning message if the specified attribute has not been previously defined.

Syntax
(generic:set entity attribute-name attribute-value)

Returns
INTEGER | REAL | STRING

Arguments

Argument Description

entity Specifies an entity. Argument type: ENTITY

attribute-name Specifies the name of an attribute. Argument type: STRING

attribute-value Specifies a value for an attribute. Argument type: INTEGER | REAL | STRING

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(generic:set mb1 "DRS" "test")
; A new attribute DRS is added to the entity: #[body 17 1]!

(generic:list-attributes mb1)
; ("material" "region" "transmission" "DRS")

Sentaurus™ Structure Editor User Guide 395

V-2024.03
Appendix A: Commands
get-body-list

get-body-list
This Scheme extension returns a list of all 2D and 3D bodies that are defined in the model,
except the mask bodies and the doping-related or refinement-related Ref/Eval windows.
Since mask bodies and Ref/Eval windows are also sheet bodies, (part:entities
(filter:type "solid?")) also returns these entities.

Since most of the geometric operations are performed only on 2D and 3D bodies, and not
on masks and Ref/Eval windows, this Scheme extension is used to distinguish easily
between masks, Ref/Eval windows, and regular bodies.

Syntax
(get-body-list)

Returns
BODY LIST

get-drs-list
This Scheme extension returns a list of all 2D and 3D Ref/Eval windows that are defined in
the model.

Syntax
(get-drs-list)

Returns
BODY LIST

Sentaurus™ Structure Editor User Guide 396

V-2024.03
Appendix A: Commands
get-empty-mask-list

get-empty-mask-list
This Scheme extension returns a list of all defined empty masks.
If no empty mask is defined, then an empty list is returned.

Syntax
(get-empty-mask-list)

Returns
LIST

get-mask-list
This Scheme extension returns a list of all defined (geometric) masks.
If no mask is defined, then an empty list is returned.

Syntax
(get-mask-list)

Returns
LIST

Sentaurus™ Structure Editor User Guide 397

V-2024.03
Appendix A: Commands
gvector

gvector
This Scheme function creates a new gvector with the specified x-, y-, and z-coordinates,
relative to the active coordinate system orientation.

Syntax
(gvector x y z [space=model])

Returns
GVECTOR

Arguments

Argument Description

x Defines the x-coordinate. Argument type: REAL

y Defines the y-coordinate. Argument type: REAL

z Defines the z-coordinate. Argument type: REAL

space Optional. This argument defaults to WCS for the active (working) coordinate
system orientation. If no active work plane exists, then space defaults to
model. The other optional space arguments return a gvector in the new
coordinate system orientation:
• The value model means that the x-, y-, and z-values are represented with
respect to the model. If the model has an origin other than the active work
plane, this returns the position relative to the active coordinate system
orientation in rectangular Cartesian coordinates.
• The value polar or cylindrical means that the x-, y-, and z-values are
interpreted as the radial distance from the z-axis, the polar angle in degrees
measured from the xz plane (using the right-hand rule), and the
z-coordinate, respectively. This returns the x-, y-, and z-terms with respect to
the active coordinate system orientation.
• The value spherical means that the provided x-, y-, and z-values are the
radial distance from the origin, the angle of declination from the z-axis in
degrees, and the polar angle measured from the xz plane in degrees,
respectively. This returns the x-, y-, and z-terms relative to the active
coordinate system orientation.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 398

V-2024.03
Appendix A: Commands
gvector?

gvector?
This Scheme function determines whether a Scheme object is a gvector.

Syntax
(gvector? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

gvector:+
This Scheme function returns the result of adding gvector1 + gvector2 as a gvector.

Syntax
(gvector:+ gvector1 gvector2)

Returns
GVECTOR

Arguments

Argument Description

gvector1 Defines the first gvector. Argument type: GVECTOR

gvector2 Defines the second gvector. Argument type: GVECTOR

Examples
(gvector:+ (gvector 1 3 2) (gvector 2 2 2))

Sentaurus™ Structure Editor User Guide 399

V-2024.03
Appendix A: Commands
gvector:-

gvector:-
This Scheme function returns the result of subtracting gvector1 – gvector2 as a gvector.

Syntax
(gvector:- gvector1 gvector2)

Returns
GVECTOR

Arguments

Argument Description

gvector1 Defines the start location for both vectors. Argument type: GVECTOR

gvector2 Defines the end location for both vectors. Argument type: GVECTOR

Examples
(gvector:- (gvector 1 3 2) (gvector 2 2 2))

gvector:copy
This Scheme function creates a gvector by copying an existing gvector.

Syntax
(gvector:copy gvector)

Returns
GVECTOR

Arguments

Argument Description

gvector Argument type: GVECTOR

Examples
(define gvcopy (gvector:copy (gvector 6 5 2)))

Sentaurus™ Structure Editor User Guide 400

V-2024.03
Appendix A: Commands
gvector:cross

gvector:cross
This Scheme function returns the cross product of two gvectors.

Syntax
(gvector:cross gvector1 gvector2)

Returns
GVECTOR

Arguments

Argument Description

gvector1 Argument type: GVECTOR

gvector2 Argument type: GVECTOR

gvector:dot
This Scheme function returns the dot product of two gvectors.

Syntax
(gvector:dot gvector1 gvector2)

Returns
REAL

Arguments

Argument Description

gvector1 Argument type: GVECTOR

gvector2 Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 401

V-2024.03
Appendix A: Commands
gvector:from-to

gvector:from-to
This Scheme function returns the gvector between two positions.

Syntax
(gvector:from-to position1 position2)

Returns
GVECTOR

Arguments

Argument Description

position1 Defines first position. Argument type: POSITION

position2 Defines second position. Argument type: POSITION

gvector:length
This Scheme function returns the length of a gvector as a real value.

Syntax
(gvector:length gvector)

Returns
REAL

Arguments

Argument Description

gvector Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 402

V-2024.03
Appendix A: Commands
gvector:parallel?

gvector:parallel?
This Scheme function determines whether two gvectors are parallel.
It returns #t if the two gvectors are parallel; otherwise, it returns #f. A zero gvector is not
parallel to anything including itself, so the Scheme function returns #t.

Syntax
(gvector:parallel? gvector1 gvector2)

Returns
BOOLEAN

Arguments

Argument Description

gvector1 Defines the first gvector. Argument type: GVECTOR

gvector2 Defines the second gvector. Argument type: GVECTOR

gvector:perpendicular?
This Scheme function determines whether two gvectors are perpendicular.
It returns #t if the gvectors are perpendicular; otherwise, it returns #f. A zero gvector is
perpendicular to all gvectors including itself, so the Scheme function returns #f.

Syntax
(gvector:perpendicular? gvector1 gvector2)

Returns
BOOLEAN

Arguments

Argument Description

gvector1 Defines the first gvector. Argument type: GVECTOR

gvector2 Defines the second gvector. Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 403

V-2024.03
Appendix A: Commands
gvector:reverse

gvector:reverse
This Scheme function reverses the direction of a gvector.

Syntax
(gvector:reverse gvector)

Returns
GVECTOR

Arguments

Argument Description

gvector Argument type: GVECTOR

gvector:scale
This Scheme function multiplies a gvector by a scalar number to produce a new gvector.
Using this Scheme function, the resulting gvector is the original gvector scaled by the
number.

Syntax
(gvector:scale gvector scale)

Returns
GVECTOR

Arguments

Argument Description

gvector Argument type: GVECTOR

scale Argument type: REAL

Sentaurus™ Structure Editor User Guide 404

V-2024.03
Appendix A: Commands
gvector:set!

gvector:set!
This Scheme function sets the direction of a gvector given the components of x, y, and z.
The coordinates are computed relative to the active coordinate system orientation.

Syntax
(gvector:set! gvector {x y z})

Returns
GVECTOR

Arguments

Argument Description

gvector Specifies the original x-, y-, and z-components. Argument type: GVECTOR

x Specifies the value to replace the original x-value specified in gvector.

Argument type: REAL

y Specifies the value to replace the original y-value specified in gvector.

Argument type: REAL

z Specifies the value to replace the original z-value specified in gvector.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 405

V-2024.03
Appendix A: Commands
gvector:set-x!

gvector:set-x!
This Scheme function sets the x-direction component of a gvector. The coordinates are
computed relative to the active coordinate system orientation.
This Scheme function returns the x-value as a real.

Syntax
(gvector:set-x! gvector x)

Returns
REAL

Arguments

Argument Description

gvector Specifies the original x-, y-, and z-values. Argument type: GVECTOR

x Specifies the value to replace the original x-value specified in gvector.

Argument type: REAL

Examples
(gvector:set-x! vector1 3)

Sentaurus™ Structure Editor User Guide 406

V-2024.03
Appendix A: Commands
gvector:set-y!

gvector:set-y!
This Scheme function sets the y-direction component of a gvector. The coordinates are
computed relative to the active coordinate system orientation.
This Scheme function returns the y-value as a real.

Syntax
(gvector:set-y! gvector y)

Returns
REAL

Arguments

Argument Description

gvector Specifies the original x-, y-, and z-values. Argument type: GVECTOR

y Specifies the value to replace the original y-value specified in gvector.

Argument type: REAL

Examples
(gvector:set-y! vector1 3)

Sentaurus™ Structure Editor User Guide 407

V-2024.03
Appendix A: Commands
gvector:set-z!

gvector:set-z!
This Scheme function sets the z-direction component of a gvector. The coordinates are
computed relative to the active coordinate system orientation.
This Scheme function returns the z-value as a real.

Syntax
(gvector:set-z! gvector z)

Returns
REAL

Arguments

Argument Description

gvector Specifies the original x-, y-, and z-values. Argument type: GVECTOR

z Specifies the value to replace the original z-value specified in gvector.

Argument type: REAL

Examples
(gvector:set-z! vector1 3)

Sentaurus™ Structure Editor User Guide 408

V-2024.03
Appendix A: Commands
gvector:transform

gvector:transform
This Scheme function applies a transform to a gvector.

Syntax
(gvector:transform gvector transform)

Returns
GVECTOR

Arguments

Argument Description

gvector Argument type: GVECTOR

transform Argument type: TRANSFORM

gvector:unitize
This Scheme function creates a new gvector as a unit vector in the same direction as the
specified gvector.

Syntax
(gvector:unitize gvector)

Returns
GVECTOR

Arguments

Argument Description

gvector Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 409

V-2024.03
Appendix A: Commands
gvector:x

gvector:x
This Scheme function returns the x-component of a gvector relative to the active coordinate
system orientation.The x-coordinate is transformed to the active work plane.

Syntax
(gvector:x gvector)

Returns
REAL

Arguments

Argument Description

gvector Argument type: GVECTOR

gvector:y
This Scheme function returns the y-component of a gvector relative to the active coordinate
system orientation. The y-coordinate is transformed to the active work plane.

Syntax
(gvector:y gvector)

Returns
REAL

Arguments

Argument Description

gvector Argument type: GVECTOR

Sentaurus™ Structure Editor User Guide 410

V-2024.03
Appendix A: Commands
gvector:z

gvector:z
This Scheme function returns the z-component of a gvector relative to the active coordinate
system orientation. The z-coordinate is transformed to the active work plane.

Syntax
(gvector:z gvector)

Returns
REAL

Arguments

Argument Description

gvector Argument type: GVECTOR

journal:abort
This Scheme function terminates the current load without executing the rest of the
commands in the file.

Syntax
(journal:abort)

Returns
None

Sentaurus™ Structure Editor User Guide 411

V-2024.03
Appendix A: Commands
journal:append

journal:append
This Scheme function opens a journal file and appends additional journal data to the end of
the file. The time and date of the append to the file are indicated in the journal.

Syntax
(journal:append [filename])

Returns
None

Arguments

Argument Description

filename Optional. If a file name is not specified, then a unique name is created after
reading the current directory. The unique name is sequenced numerically from
the last journal file created or named j(last number+1).jrl.
Argument type: STRING

journal:clean
This Scheme function cleans the journal file. It removes all nonexecutable content (such as
comments and return values) from the specified script file. Only the executable Scheme
commands remain; therefore, parameterizing and debugging the journal file are easier if the
saved journal file is cleaned up first.

Syntax
(journal:clean jname)

Returns
None

Arguments

Argument Description

jname Argument type: STRING

Sentaurus™ Structure Editor User Guide 412

V-2024.03
Appendix A: Commands
journal:load

journal:load
This Scheme function loads a journal file and runs each command contained in that file.
Each line is journaled if journaling is switched on. This Scheme function works like the load
primitive, except that the file is evaluated one line at a time instead of all lines simultaneously
with the Scheme load primitive.
Encountered errors do not terminate the load operation and are reported in the
command-line window. This Scheme function is useful for debugging Scheme files and for
rerunning the commands given in another Scheme session.
An error in the loaded file does not terminate the evaluation. This Scheme function permits
single stepping through a loaded file, one line at a time. The Scheme function
(journal:step #t) switches it on and should be run before loading the journal file.

In addition, you can use (option:set "timing" #t) to show the execution time for each
command in the command-line window. Before loading, the directory where the load file is
found is added to the global variable part-load-path.

Syntax
(journal:load filename)

Returns
None

Arguments

Argument Description

filename Specifies the name of a journal file. Argument type: STRING

journal:off
This Scheme function closes the current journal file and switches off journaling. All Scheme
extensions executed after journaling has been switched off are not retained in the journal
file.

Syntax
(journal:off)

Returns
None

Sentaurus™ Structure Editor User Guide 413

V-2024.03
Appendix A: Commands
journal:on

journal:on
This Scheme function closes the current journal file and opens a new journal file. All future
commands are journaled to this file.

Syntax
(journal:on [filename])

Returns
None

Arguments

Argument Description

filename Optional. If a file name is not specified, then the Scheme function creates a
unique name after reading the current directory. The unique name is
sequenced numerically from the last journal file created or named j(last
number+1).jrl. If the file exists, then it is truncated to zero length.
Argument type: STRING

Examples
; Scheme function journal:on
; Close current journal file and open new journal file called new_jrl.
(journal:on "new_jrl")
;; "new_jrl"
; Create solid cuboid.
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10) "Silicon"
"region_1")
; Switch off journaling.
(journal:off)
;; ()
; Save the resulting journal.
(journal:save "new_jrl")
;; "new_jrl" ; Clear the part.
(sde:clear)
;; #t
; Load the journal file to recreate and redisplay the solid cube.
(journal:load "new_jrl")
;; "new_jrl"

Sentaurus™ Structure Editor User Guide 414

V-2024.03
Appendix A: Commands
journal:pause

journal:pause
This Scheme function deactivates journaling temporarily but leaves the journal file open. It
does not record in the journal file any procedure evaluated while the journal file is paused.

Syntax
(journal:pause)

Returns
None

journal:resume
This Scheme function resumes journaling in the journal file after a pause.

Syntax
(journal:resume)

Returns
None

journal:save
This Scheme function saves the current journal to a file, and it is ignored if journaling is not
active. An error is generated if filename is the same as the current journal file. See
journal:on on page 414.

Syntax
(journal:save filename)

Returns
None

Arguments

Argument Description

filename Specifies the name of the file in which the journal is saved.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 415

V-2024.03
Appendix A: Commands
journal:step

journal:step
This Scheme function sets a flag to control stepping through the journal file. When stepping
is switched on, the system waits for input after printing, but before executing each line. A
single return causes the line to be executed. Anything else is evaluated and the system
waits for more input. This allows you to set up demonstrations and to debug Scheme scripts
one line at a time.
To run a demonstration, enter (journal:step #f), but include (journal:step #t) at
points in the script where you want to interact with the graphical user interface (GUI) or enter
commands in the command-line window. Otherwise, press the Return key a few times to
step through it slowly. Use (journal:step #f) to return to the free-running mode.

Syntax
(journal:step value)

Returns
None

Arguments

Argument Description

value Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 416

V-2024.03
Appendix A: Commands
loop?

loop?
This Scheme function determines whether a Scheme object is a loop.
It returns #t if the object is a loop; otherwise, it returns #f.

Syntax
(loop? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

loop:external?
This Scheme function determines whether a loop is internal or external.

Syntax
(loop:external? loop)

Returns
BOOLEAN

Arguments

Argument Description

loop Argument type: LOOP

Errors
Returns an error if the argument loop is not a loop.

Sentaurus™ Structure Editor User Guide 417

V-2024.03
Appendix A: Commands
lump?

lump?
This Scheme function determines whether a Scheme object is a lump.
It returns #t if the object is a lump; otherwise it returns #f.

Syntax
(lump? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 418

V-2024.03
Appendix A: Commands
mask-refevalwin-extract-2d

mask-refevalwin-extract-2d
This Scheme extension extracts a 2D Ref/Eval window from the specified mask. It assumes
that the domain boundary was set previously. (This information is needed for "dark" mask
extraction.)
If the mask consists of several disjoint lumps, then a separate Ref/Eval window is extracted
from each disjoint lump. In this case, the specified rwname is appended with a counter _N
where N is the lump counter (from 1 onwards).
Caution:
The domain boundary must be set before this Scheme extension is called.

Syntax
(mask-refevalwin-extract-2d rwname maskname polarity)

Returns
ENTITY IDs of the created Ref/Eval windows

Arguments

Argument Description

rwname Specifies the name of the extracted mask. Argument type: STRING

maskname Specifies the name (and not the entity ID) of the used mask.
Argument type: STRING

polarity Specifies the mask polarity that is used for the extraction. The options are
"light" and "dark". The default is "light".
Argument type: STRING

Examples
(sde:clear)
(sdepe:define-pe-domain 0 0 40 30)
(sdepe:generate-mask "M1" (list (list 0 0 10 10)
(list 20 0 30 0 30 10 25 15 20 10))))
(mask-refevalwin-extract-2d "RW1" "M1" "light")
(mask-refevalwin-extract-2d "RW2" "M1" "dark")

Sentaurus™ Structure Editor User Guide 419

V-2024.03
Appendix A: Commands
mask-refevalwin-extract-3d

mask-refevalwin-extract-3d
This Scheme extension extracts a 3D Ref/Eval window from the specified mask. It assumes
that the domain boundary was set previously. (This information is needed for "dark" mask
extraction.)
The 3D Ref/Eval window is placed between coord_bottom and coord_top in the 3D space.
If the mask consists of several disjoint lumps, then a separate Ref/Eval window is extracted
from each disjoint lump. In this case, the specified rwname is appended with a counter _N
where N is the lump counter (from 1 onward).
Caution:
The domain boundary must be set before this Scheme extension is called.

Syntax
(mask-refevalwin-extract-3d rwname maskname polarity coord_bottom
coord_top)

Returns
ENTITY IDs of the created Ref/Eval windows

Arguments

Argument Description

rwname Specifies the name of the extracted mask. Argument type: STRING

maskname Specifies the name (and not the entity ID) of the used mask.
Argument type: STRING

polarity Specifies the mask polarity that is used for the extraction. The options are
"light" and "dark". The default is "light".
Argument type: STRING

coord_bottom Specifies the coordinate for the bottom of the Ref/Eval window.
Argument type: REAL

coord_top Specifies the coordinate for the top of the Ref/Eval window.
Argument type: REAL

Examples
(sde:clear)
(sdepe:define-pe-domain 0 0 40 30)
(sdepe:generate-mask "M1" (list (list 0 0 10 10)

Sentaurus™ Structure Editor User Guide 420

V-2024.03
Appendix A: Commands
member?

(list 20 0 30 0 30 10 25 15 20 10))))
(mask-refevalwin-extract-3d "RW1" "M1" "light" -0.1 0.5)
(mask-refevalwin-extract-3d "RW2" "M1" "dark" -0.1 0.5)

member?
This Scheme extension checks whether the specified element is part of the specified list.
It returns #t if the specified element is part of the specified list and, if not, #f is returned.

Syntax
(member? element list)

Returns
BOOLEAN

Arguments

Argument Description

element Argument type: VARIABLE (INTEGER | REAL | STRING | ...)

list Argument type: LIST (Scheme list)

Examples
(member? 2 (list 1 2 3 4))
#t

(member? 0 (list 1 2 3 4))

#f

(member? "apple" (list 1 2 "apple" 3 4))

#t

Sentaurus™ Structure Editor User Guide 421

V-2024.03
Appendix A: Commands
merge-collinear-edges-2d

merge-collinear-edges-2d
This Scheme extension merges all collinear edges of the specified bodies.
Note:
This Scheme extension applies to 2D models only.

Syntax
(merge-collinear-edges-2d body-list [angular-tolerance])

Returns
None

Arguments

Argument Description

body-list Argument type: BODY LIST

angular-tolerance Optional. If this argument is specified, then besides perfectly collinear

edges, the edges that close an angle, which is larger than the specified
threshold, also merge (that is, the two edges are replaced by one edge,
connecting the other endpoints).
Argument type: REAL

Sentaurus™ Structure Editor User Guide 422

V-2024.03
Appendix A: Commands
part:entities

part:entities
This Scheme function returns a list of all top-level entities in a part.

Syntax
(part:entities [filter=NULL])

Returns
ENTITY LIST

Arguments

Argument DescriptionArgument Type

filter Optional. Controls the types of entity that are returned by this Scheme function.
This argument is an entity-filter, which is a procedural object that selects
entities from an entity-list. Argument type: FILTER

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silver"
"region_3")
(part:entities)
(part:entities (filter:type "solid?"))

Sentaurus™ Structure Editor User Guide 423

V-2024.03
Appendix A: Commands
part:load

part:load
This Scheme function loads a part from a file into the active part. It is a merge function,
which means that the restore does not replace entities; it adds them to the current working
session. A list of entities is returned.
If the global variable part-load-path is set to a list of strings, then the strings are
interpreted as directories to be searched for the part file: part-load-path is to part-load
as load-path is to load. Set part-load-path in an initialization file. When a part is saved
using part:save and a filename, the filename becomes the new name for the part.

Syntax
(part:load filename [textmode=#t] [part=active] [with-history=#f])

Returns
ENTITY LIST

Arguments

Argument Description

filename Specifies a file name in the current working directory or a path that includes the
file name. Argument type: STRING

textmode Optional. Describes the type of file to be loaded:

• If textmode is #t, then the data in filename is saved in text mode as a .sat
file.
• If textmode is #f, then filename is loaded as a binary file.
• If textmode is not specified, then the mode is determined by the extension
of the file name. If the file name string ends in .sab or .SAB, then the file is
saved in binary mode; otherwise, the file is saved in text mode.
Argument type: BOOLEAN

part Optional. If this argument is not specified, then the entities in the part file merge
into the active part; otherwise, they merge into the specified part.
Argument type: PART

with-history Optional. After specifying the text mode, this argument specifies whether to
restore the rollback history data. History data can only be restored into an
empty part. The default, #f, does not restore the history.
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 424

V-2024.03
Appendix A: Commands
part:save

part:save
This Scheme function saves all entities in a part to a file.
When a part is saved using part:save and a filename, the filename becomes the new
name for the part. Part files can be saved in the format of an earlier version by setting the
global option save_version.

Syntax
(part:save [filename=partname.sat] [textmode=#t] [part=active]
[with-history=#f] [mainline-only=#f])

Returns
BOOLEAN

Arguments

Argument Description

filename Optional. Specifies a file name to be saved in the current working directory or
specifies a path that includes the file name to be saved to a directory. If no file
name is specified, then the Scheme function uses the name given to the part
with the part:set-name function. Argument type: STRING

textmode Optional. Describes the type of file to be loaded:

• If textmode is #t, then the data in filename is saved in text mode as
a .sat file.
• If textmode is #f, then filename is loaded as a binary file.
• If textmode is not specified, then the mode is determined by the extension
of the file name. If the file name string ends in .sab or .SAB, then the file is
saved in binary mode; otherwise, the file is saved in text mode.
Argument type: BOOLEAN

part Optional. Specifies the part to save; the default is the active part.
Argument type: PART

with-history Optional. After specifying the text mode, this argument specifies whether to
save entity-specific rolled back history data (that is, the history attached to the
entity through an attribute). The default, #f, does not save the history.
Argument type: BOOLEAN

mainline-only Optional. Specifies whether to save rolled back branches. The default, #f,
indicates that the entire history should be saved. The saved file can be
restored at any time. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 425

V-2024.03
Appendix A: Commands
part:save-selection

part:save-selection
This Scheme function saves a list of entities to a file.
Part files can be saved in the format of an earlier version by setting the global option
save_version.

Syntax
(part:save-selection ent-list filename [textmode=#f] [with-history=#f])

Returns
BOOLEAN

Arguments

Argument Description

ent-list Specifies a list of entities to be saved in the output file.

Argument type: ENTITY | ENTITY LIST

filename Specifies a file name to be saved in the current working directory or specifies a
path that includes the file name to be saved to a directory.
Argument type: STRING

textmode Optional. Describes the type of file to be loaded:

• If textmode is #t, then the data in filename is saved in text mode as a .sat
file.
• If textmode is #f, then filename is loaded as a binary file.
• If textmode is not specified, then the mode is determined by the extension of
the file name. If the file name string ends in .sab or .SAB, then the file is
saved in binary mode; otherwise, the file is saved in text mode. The saved
file can be restored at any time.
Argument type: BOOLEAN

with-history Optional. This argument allows you to save entity-specific history (that is,
history attached to the entity through an attribute).
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 426

V-2024.03
Appendix A: Commands
part:set-name

part:set-name
This Scheme function assigns a name to the specified part, or to the active part if part is
omitted. If the part is saved without specifying a file name, then the part:save Scheme
extension uses the identification name assigned to the part as the file name of the saved
part.

Syntax
(part:set-name [name] [part=active])

Returns
None

Arguments

Argument Description

name Optional. Specifies the required string identification of the part.

Argument type: STRING
Note:
If name is omitted, then the name of the part is cleared.

part Optional. Specifies the name of a part. Argument type: PART

Sentaurus™ Structure Editor User Guide 427

V-2024.03
Appendix A: Commands
position

position
This Scheme function creates a new position with x-, y-, and z-coordinates.
If the model has an origin other than the active work plane, this Scheme function returns the
position relative to the active coordinate system orientation in rectangular Cartesian
coordinates.
A position is not saved with the part, but it is used to help define geometry. Positions are not
displayed in Scheme.
A point is an entity that differs from a vertex in that it has no edge associations. Use
env:set-point-size and env:set-point-style to change its appearance.

Syntax
(position x y z [space="model"])

Returns
BOOLEAN

Arguments

Argument Description

x Defines the x-coordinate relative to the active coordinate system orientation.

Argument type: REAL

y Defines the y-coordinate relative to the active coordinate system orientation.

Argument type: REAL

z Defines the z-coordinate relative to the active coordinate system orientation.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 428

V-2024.03
Appendix A: Commands
position?

Argument Description

space Optional. This argument defaults to WCS for the active (working) coordinate
system orientation. If no active work plane exists, then space defaults to model.
The other optional space arguments return a gvector in the new coordinate
system orientation:
• The value model means that the x-, y-, and z-values are represented with
respect to the model. If the model has an origin other than the active work
plane, this returns the position relative to the active coordinate system
orientation in rectangular Cartesian coordinates.
• The value polar or cylindrical means that the x-, y-, and z-values are
interpreted as the radial distance from the z-axis, the polar angle in degrees
measured from the xz plane (using the right-hand rule), and the
z-coordinate, respectively. This returns the x-, y-, and z-terms with respect to
the active coordinate system orientation.
• The value spherical means that the provided x-, y-, and z-values are the
radial distance from the origin, the angle of declination from the z-axis in
degrees, and the polar angle measured from the xz plane in degrees,
respectively. This returns the x-, y-, and z-terms relative to the active
coordinate system orientation.
Argument type: STRING

position?
This Scheme function determines whether a Scheme object is a position.

Syntax
(position? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies a Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 429

V-2024.03
Appendix A: Commands
position:+

position:+
This Scheme function adds a position or gvector to a position or gvector, and returns the
sum as a position.

Syntax
(position:+ arg1 arg2)

Returns
POSITION

Arguments

Argument Description

arg1 Argument type: POSITION | GVECTOR

arg2 Argument type: POSITION | GVECTOR

position:-
This Scheme function subtracts a position or gvector from a position or gvector, and returns
the result as a position.

Syntax
(position:- arg1 arg2)

Returns
POSITION

Arguments

Argument Description

arg1 Argument type: POSITION | GVECTOR

arg2 Argument type: POSITION | GVECTOR

Sentaurus™ Structure Editor User Guide 430

V-2024.03
Appendix A: Commands
position:distance

position:distance
This Scheme function returns the distance between two positions.

Syntax
(position:distance position1 {position2 | ray})

Returns
REAL

Arguments

Argument Description

position1 Defines the start location. Argument type: POSITION

position2 Defines the end location. Argument type: POSITION

ray Defines the ray to calculate the distance. Argument type: RAY

Sentaurus™ Structure Editor User Guide 431

V-2024.03
Appendix A: Commands
position:set!

position:set!
This Scheme function sets the x-, y-, and z-components of a position.

Syntax
(position:set! position1 {x y z} | {position2})

Returns
POSITION

Arguments

Argument Description

position1 Specifies the position to be set. Argument type: POSITION

x Specify the x-value. If this value is specified, then it is copied into position1.
Argument type: REAL

y Specifies the y-value. If this value is specified, then it is copied into position1.
Argument type: REAL

z Specifies the z-value. If this value is specified, then it is copied into position1.
Argument type: REAL

position2 If this argument is specified, then its position value is copied into position1.
Argument type: POSITION

Sentaurus™ Structure Editor User Guide 432

V-2024.03
Appendix A: Commands
position:set-x!

position:set-x!
This Scheme function sets the x-component of a position. The coordinates are computed
relative to the active coordinate system orientation.

Syntax
(position:set-x! position x)

Returns
REAL

Arguments

Argument Description

position Identifies the original y- and z-values. Argument type: POSITION

x Specifies the value to replace the original x-value specified in position.

Argument type: REAL

position:set-y!
This Scheme function sets the y-component of a position. The coordinates are computed
relative to the active coordinate system orientation.

Syntax
(position:set-y! position y)

Returns
REAL

Arguments

Argument Description

position Identifies the original x- and z-values. Argument type: POSITION

y Specifies the value to replace the original y-value specified in position.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 433

V-2024.03
Appendix A: Commands
position:set-z!

position:set-z!
This Scheme function sets the z-component of a position. The coordinates are computed
relative to the active coordinate system orientation.

Syntax
(position:set-z! position z)

Returns
REAL

Arguments

Argument Description

position Identifies the original x- and y-values. Argument type: POSITION

z Specifies the value to replace the original z-value specified in position.

Argument type: REAL

position:x
This Scheme function returns the x-component of a position relative to the active coordinate
system orientation.

Syntax
(position:x position)

Returns
REAL

Arguments

Argument Description

position Specifies a position. Argument type: POSITION

Sentaurus™ Structure Editor User Guide 434

V-2024.03
Appendix A: Commands
position:y

position:y
This Scheme function returns the y-component of a position relative to the active coordinate
system orientation.

Syntax
(position:y position)

Returns
REAL

Arguments

Argument Description

position Specifies a position. Argument type: POSITION

position:z
This Scheme function returns the z-component of a position relative to the active coordinate
system orientation.

Syntax
(position:z position)

Returns
REAL

Arguments

Argument Description

position Specifies a position. Argument type: POSITION

Sentaurus™ Structure Editor User Guide 435

V-2024.03
Appendix A: Commands
protect-all-contacts

protect-all-contacts
This Scheme function protects all 2D and 3D contacts against merging and deleting. If
contacts are assigned to edges and faces using any of the sdegeo contact assignment
commands, these contacts are protected. The 2D boundary simplification commands do not
remove or merge contact edges, and also the 3D boundary regularization command
(sde:bool-regularise) does not merge coplanar contact faces with adjoining faces.

If an application defines the edge or face contacts directly, by attaching the "2d-contact"
or "3d-contact" attributes to the contact edges or faces, these contacts are not protected.
In this case, you can use the (protect-all-contacts) command to add the necessary no
merge attribute to the contact edges or faces.

Syntax
(protect-all-contacts)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 436

V-2024.03
Appendix A: Commands
random-sd

random-sd
This Scheme function returns a seeded random number. The seeded random number
generator always generates the same random number sequence (normalized in [0-1]). This
Scheme function uses a hard-coded, fixed seed. A different seed can be set by adding the
initial seed to the function argument, for example, (random-sd 987654321). However, this
must be done only once.
The next random number, which uses this seed, is generated by (random-sd). If you
specify the seed, for example (random-sd 987654321), this always resets the random
number sequence to the first value, which is generated by the given seed.

Syntax
(random-sd [initial-seed])

Returns
REAL random number, (normalized in [0-1])

Arguments

Argument Description

initial-seed Optional. Argument type: INTEGER

Examples
(random-sd)

Sentaurus™ Structure Editor User Guide 437

V-2024.03
Appendix A: Commands
remove-body-ABA

remove-body-ABA
This Scheme extension subtracts the specified input body from all the other existing bodies
if there is an overlap between the input body and the other bodies.
The result is similar to the case where the input body is created when the “new replaces old”
("ABA") automatic overlap removal rule is used. Overlapping bodies are not allowed in the
final tessellated model. If overlaps are created, the overlaps must be removed manually.
Overlapping bodies can be created only if the automatic overlap handling is switched off or
if some direct geometry manipulation is used, which is not detected by the automatic overlap
removal procedure.

Syntax
(remove-body-ABA rbody)

Returns
None

Arguments

Argument Description

rbody Argument type: ENTITY

Sentaurus™ Structure Editor User Guide 438

V-2024.03
Appendix A: Commands
remove-body-BAB

remove-body-BAB
This Scheme extension subtracts all other existing bodies from the specified input body if
there is an overlap between the input body and the other bodies.
The result is similar to the case where the input body is created when the “old replaces new”
("BAB") automatic overlap removal rule is used. Overlapping bodies are not allowed in the
final tessellated model. If overlaps are created, the overlaps must be removed manually.
Overlapping bodies can be created only if the automatic overlap handling is switched off or
if some direct geometry manipulation is used, which is not detected by the automatic overlap
removal procedure.

Syntax
(remove-body-BAB rbody)

Returns
None

Arguments

Argument Description

rbody Argument type: ENTITY

Sentaurus™ Structure Editor User Guide 439

V-2024.03
Appendix A: Commands
render:rebuild

render:rebuild
This Scheme function refreshes the display list for a view.
Use this Scheme function after changing viewing parameters.

Syntax
(render:rebuild [clear])

Returns
None

Arguments

Argument Description

clear Optional. If clear is #t or not present, then the view window is cleared and the
wire frame is redisplayed from the display list contents.
If clear is #f, then the view window is not cleared before redisplaying the
display list (that is, no ‘new page’ is written to the file).
Argument type: BOOLEAN

roll
This Scheme function can undo or redo geometry-related and doping-related, or
refinement-related operations.

Syntax
(roll [num])

Returns
INTEGER (number of steps rolled)

Arguments

Argument DescriptionArgument Type

num Optional. Specifies the number of states the model can roll. A negative number
means to roll to a previous state, and a positive number means to roll to a later
state. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 440

V-2024.03
Appendix A: Commands
sde:add-material

sde:add-material
This Scheme extension assigns the material and region attributes to a body.

Syntax
(sde:add-material body material-name region-name)

Returns
None

Arguments

Argument Description

body Defines the body. This is the first argument. Argument type: ACIS ENTITY

material-name This argument must be a valid DATEX name, which is defined in the
datexcodes.txt file. This argument is assigned as a material attribute to the
body. When the tessellated boundary output is generated, the material attribute
is the material of the region. Argument type: DATEXMAT

region-name Defines the region name in the tessellated boundary output.

Argument type: STRING

Sentaurus™ Structure Editor User Guide 441

V-2024.03
Appendix A: Commands
sde:back-coord

sde:back-coord
This Scheme extension returns the back coordinate of the specified body or body list. The
back coordinate depends on the coordinate system orientation used:
• For the unified coordinate system (UCS) orientation, the back coordinate is the minimum
z-coordinate.
• For the traditional (DF–ISE) coordinate system orientation, the back coordinate is the
minimum x-coordinate.

Syntax
(sde:back-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a body list. Argument type: BODY LIST

sde:bg-image-transparency
This Scheme extension sets the transparency of the loaded image.

Syntax
(sde:bg-image-transparency transparency-value)

Returns
None

Arguments

Argument Description

transparency-value Specifies the value of the transparency. It must be between 0 and 1.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 442

V-2024.03
Appendix A: Commands
sde:bool-regularise

sde:bool-regularise
This Scheme function merges the coplanar faces of the specified 3D bodies. After
(sde:bool-regularise) is applied, it is recommended to call (sde:fix-imprint) to
ensure a conformal model.

Syntax
(sde:bool-regularise body-list)

Returns
None

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

sde:bottom-coord
This Scheme extension returns the bottom coordinate of the specified body or body list. The
bottom coordinate depends on the coordinate system orientation used:
• For the UCS orientation, the bottom coordinate is the maximum x-coordinate.
• For the traditional coordinate system orientation, the bottom coordinate is the minimum
z-coordinate.

Syntax
(sde:bottom-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a body list. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 443

V-2024.03
Appendix A: Commands
sde:build-mesh

sde:build-mesh
This Scheme extension generates a 2D or 3D TDR tessellated boundary output and a mesh
command file, and calls Sentaurus Mesh using a system command call. Sentaurus Structure
Editor then waits for the meshing to be completed. No further interaction is possible during
this time, until the meshing is completed.
The input argument string file-basename is first stripped from the file extension (if it is part
of the input argument string). Then, if the stripped file-basename ends with _msh, that is
removed as well. The TDR boundary file is saved as file-basename_bnd.tdr and the
mesh command file is saved as file-basename_msh.cmd.
Note:
The default name of the TDR boundary file is file-basename_bnd.tdr.
The default name of the mesh command file is file-basename_msh.cmd.

Syntax
(sde:build-mesh file-basename)

Returns
Prints a message showing a successful or failed meshing.
Returns #t or #f to indicate success or failure, respectively.

Arguments

Argument Description

file-basename Argument type: STRING

Sentaurus™ Structure Editor User Guide 444

V-2024.03
Appendix A: Commands
sde:change-datex-color-scheme

sde:change-datex-color-scheme
This Scheme extension changes the DATEX color scheme used for rendering in the
Sentaurus Structure Editor GUI. See Selecting the DATEX Color Scheme on page 68.

Syntax
(sde:change-datex-color-scheme color-scheme)

Returns
BOOLEAN

Arguments

Argument Description

color-scheme Specifies the color scheme to use. The datexcodes.txt file contains two
different color schemes for each DATEX material. Possible values are "Vivid"
and "Classic". Argument type: STRING

Examples
Change to the Vivid color scheme:
(sde:change-datex-color-scheme "Vivid")

Change to the Classic color scheme:

(sde:change-datex-color-scheme "Classic")

sde:check-3d-license-status
This Scheme extension checks the status of the 3D license. It returns #t or #f depending
on whether a 3D license is checked out.

Syntax
(sde:check-3d-license-status)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 445

V-2024.03
Appendix A: Commands
sde:check-model

sde:check-model
This Scheme extension checks a model for possible issues that are reported in a report file
including:
• Mixed dimensional models
• Overlaps
• Multiple region names
• Entity check issues

Syntax
(sde:check-model [filename])

Returns
BODY LIST

Arguments

Argument Description

filename Optional. Specifies the name of a file. The default file name is
sde-model-debug.log. Argument type: STRING

sde:checkout-3d-license
This Scheme extension checks out a 3D license explicitly. By default, Sentaurus Structure
Editor starts with a 2D license and only checks out (automatically) a 3D license when it is
needed (for 3D solid creation, 2D to 3D operations, process emulation operations, and so
on).

Syntax
(sde:checkout-3d-license)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 446

V-2024.03
Appendix A: Commands
sde:clear

sde:clear
This Scheme extension clears the database of Sentaurus Structure Editor and restores all
settings to their initial values, and it should always be used as the first call when a new script
is executed that requires a clean database. This Scheme extension also restores the view
window to its initial settings.
Caution:
This Scheme extension does not clear the Scheme interpreter. If global Scheme
variables are used, then they are still initialized and valid after an (sde:clear)
call.

Syntax
(sde:clear)

Returns
None

Sentaurus™ Structure Editor User Guide 447

V-2024.03
Appendix A: Commands
sde:create-bg-image

sde:create-bg-image
This Scheme extension loads an image file (GIF). The image is not shown automatically;
this Scheme extension must be called to show the image.
Note:
The image loader supports only images in the older GIF format, GIF87a. Most
current graphic programs use the GIF format GIF89a. See Background Image
Loader on page 335.

Syntax
(sde:create-bg-image filename horizontal-size vertical-size)

Returns
None

Arguments

Argument Description

filename Specifies the name of a file. Argument type: STRING

horizontal-size Defines the GUI size of the image – horizontal value. Argument type: REAL

vertical-size Defines the GUI size of the image – vertical value. Argument type: REAL

Sentaurus™ Structure Editor User Guide 448

V-2024.03
Appendix A: Commands
sde:create-dialog

sde:create-dialog
This Scheme extension creates a dialog box and registers a dialog object, and returns the
dialog entity ID. (The dialog box is handled as a Scheme object.)
All subsequent sde:dialog functions use this dialog ID to add input fields, a bitmap image,
and an OK button to the dialog box.

Syntax
(sde:create-dialog dlg-name)

Returns
Dialog ID

Arguments

Argument Description

dlg-name Specifies the name of the dialog box. Argument type: STRING

Examples
(define dlg (sde:create-dialog "2D MOSFET DEVICE"))

Sentaurus™ Structure Editor User Guide 449

V-2024.03
Appendix A: Commands
sde:define-parameter

sde:define-parameter
The Scheme extension defines a Scheme parameter. The defined parameter can be used
later in any Scheme command. The parameter value can be accessed by typing
parameter-name. The parameter can hold any Scheme type variable. Typically, it is a REAL
or STRING type. For REAL values, two optional values also can be added: min-value and
max-value. This might be useful when you write a parametric script, where a given
parameter can be used and modified only within a certain range.
If parameter-name is width, for example, width_min will contain min-value and
width_max will contain max-value. A Scheme variable also can be defined using the
Scheme command define.
The difference is that the Scheme extension (sde:save-parameters) saves only those
Scheme variables that were defined using the Scheme extension
(sde:define-parameter).

Syntax
(sde:define-parameter parameter-name value [min-value max-value])

Returns
BOOLEAN

Arguments

Argument Description

parameter-name Argument type: STRING

value Argument type: REAL | STRING

min-value Optional. Argument type: REAL

max-value Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 450

V-2024.03
Appendix A: Commands
sde:delay-graphics-update

sde:delay-graphics-update
This Scheme extension switches on or off the refreshing or updating of the view window. By
default, automatic refreshing of the view window is switched on. When a new body is
created or the model is changed in any way that affects the graphical representation of the
model, the view window is refreshed automatically.
In this way, the display always reflects the actual state of the database of the modeler. This
behavior can be changed and the graphical update can be suppressed using this Scheme
extension. By switching on the update option, the buffer is flushed and the screen is
updated.

Syntax
(sde:delay-graphics-update flag)

Returns
None

Arguments

Argument Description

flag Argument type: BOOLEAN

sde:delay-graphics-update?
This Scheme extension returns the status of the sde:delay-graphics-update Scheme
extension.

Syntax
(sde:delay-graphics-update?)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 451

V-2024.03
Appendix A: Commands
sde:delete-bg-image

sde:delete-bg-image
This Scheme extension removes the previously loaded image from memory.

Syntax
(sde:delete-bg-image)

Returns
None

sde:delete-materials
This Scheme extension deletes the geometric bodies with the specified DATEX material.

Syntax
(sde:delete-materials materials)

Returns
None

Arguments

Argument Description

materials Argument type: DATEXMAT | DATEXMAT LIST

Sentaurus™ Structure Editor User Guide 452

V-2024.03
Appendix A: Commands
sde:delete-parameter

sde:delete-parameter
This Scheme extension deletes a previously defined parameter.
The parameter must be previously defined using sde:define-parameter (see
sde:define-parameter on page 450).

Syntax
(sde:delete-parameter parameter-name)

Returns
BOOLEAN

Arguments

Argument Description

parameter-name Argument type: STRING

Sentaurus™ Structure Editor User Guide 453

V-2024.03
Appendix A: Commands
sde:dialog-add-input

sde:dialog-add-input
This Scheme extension adds an input field to a dialog box. See sde:create-dialog on
page 449.
Caution:
No default value can be assigned to the input fields and variables.

Syntax
(sde:dialog-add-input dlgid varname inputstrfield inputtype
[default-value])

Returns
None

Arguments

Argument Description

dlgid Specifies the ID of the dialog box. Argument type: STRING DIALOG TYPE
(object returned by sde:create-dialog)

varname Specifies the Scheme variable name that is passed to the executed Scheme
script. Argument type: STRING

inputstrfield The value of this argument is displayed in the input dialog box.
Argument type: STRING

inputtype Specifies the type of input. Possible values are INTEGER, REAL, and STRING.
Argument type: STRING

default-value Optional. Specifies a default value for the field. Argument type: VALUE
(according to inputtype)

Examples
(sde:dialog-add-input dlg "width1" "Base Width" "real")

Sentaurus™ Structure Editor User Guide 454

V-2024.03
Appendix A: Commands
sde:dialog-add-pixmap

sde:dialog-add-pixmap
This Scheme extension adds a predefined bitmap image to a dialog box. The bitmap image
must be scaled to the proper size before it is added to the dialog box. See sde:create-dialog
on page 449.

Syntax
(sde:dialog-add-pixmap dlgid bmpfilename)

Returns
None

Arguments

Argument Description

dlgid Specifies the ID of the dialog box. Argument type: STRING DIALOG TYPE
(object returned by sde:create-dialog)

bmpfilename Specifies the name of a bitmap image. Argument type: STRING

Examples
(sde:dialog-add-pixmap dlg "mosfet2d.bmp")

Sentaurus™ Structure Editor User Guide 455

V-2024.03
Appendix A: Commands
sde:dialog-delete

sde:dialog-delete
This Scheme extension removes a predefined dialog box from memory. See
sde:create-dialog on page 449.

Syntax
(sde:dialog-delete dlgid)

Returns
None

Arguments

Argument Description

dlgid Specifies the ID of the dialog box. Argument type: STRING DIALOG TYPE
(object returned by sde:create-dialog)

Examples
(sde:dialog-delete dlg)

Sentaurus™ Structure Editor User Guide 456

V-2024.03
Appendix A: Commands
sde:dialog-ok-command

sde:dialog-ok-command
When the OK button of the dialog box is clicked, this Scheme extension is called with the
supplied argument list. See sde:create-dialog on page 449.

Syntax
(sde:dialog-ok-command dlgid schemefnname argument-list)

Returns
None

Arguments

Argument Description

dlgid Specifies the ID of the dialog box. Argument type: STRING DIALOG TYPE
(object returned by sde:create-dialog)

schemefnname Specifies the name of a Scheme function. Argument type: STRING

argument-list Specifies an argument list in double quotation marks.

Argument type: STRING LIST

Examples
(sde:dialog-ok-command dlg "create-2d-mosfet"
"width1 width2 width3 height1 height2 height3")

Sentaurus™ Structure Editor User Guide 457

V-2024.03
Appendix A: Commands
sde:dialog-show

sde:dialog-show
This Scheme extension displays a predefined dialog box. See sde:create-dialog on
page 449.

Syntax
(sde:dialog-show dlgid)

Returns
None

Arguments

Argument Description

dlgid Specifies the ID of the dialog box. Argument type: STRING DIALOG TYPE
(object returned by sde:create-dialog)

Examples
(sde:dialog-show dlg)

Sentaurus™ Structure Editor User Guide 458

V-2024.03
Appendix A: Commands
sde:display

sde:display
This Scheme extension displays the specified string in the command-line window. A new
line character is required to send the contents of the sde:display buffer to the
command-line window. This Scheme extension is useful if you write your own Scheme
scripts and the function needs to display some information.
The input values are connected by the Scheme extension sdestr:concat (see Examples
in sdestr:concat on page 799).

Syntax
(sde:display values)

Returns
None

Arguments

Argument Description

values Specifies a string to be displayed, value1 value2 ... valueN.

Argument type: INTEGER | REAL | STRING | ...

sde:display-err
This Scheme extension writes a specified string in a terminal window. A new line character
is added to the argument string. The input values are connected by the Scheme extension
sdestr:concat (see Examples in sdestr:concat on page 799).

Syntax
(sde:display-err values)

Returns
None

Arguments

Argument Description

values Specifies a string to be displayed, value1 value2 ... valueN.

Argument type: INTEGER | REAL | STRING | ...

Sentaurus™ Structure Editor User Guide 459

V-2024.03
Appendix A: Commands
sde:display-std

sde:display-std
This Scheme extension writes a specified string in a terminal window. A new line character
is added to the argument string.
The input values are connected by the Scheme extension sdestr:concat (see Examples
in sdestr:concat on page 799).
For the design-of-experiments (DoE) parameter extraction of Sentaurus Workbench, this
Scheme extension must be used to send the information to Sentaurus Workbench.
(Sentaurus Workbench collects the DoE-marked output from standard output.)

Syntax
(sde:display-std values)

Returns
None

Arguments

Argument Description

values Specifies a string to be displayed, value1 value2 ... valueN.

Argument type: INTEGER | REAL | STRING | ...

Examples
For the DoE parameter extraction, the output string must contain the DOE: string, followed
by the variable name and the value of the variable:
(sde:display-std "DOE: VARNAME VARVALUE")

For example:
(sde:display-std "DOE: width 2.5")
(sde:display-std "DOE: doping @value@")
(define Xmin 1.05)
(sde:display-std (string-append "DOE: Xmin " (number->string Xmin)))

Note:
You must initialize the VARNAME variable in the Sentaurus Workbench script to
avoid preprocessing errors. For example:
#set width 0
#set doping 0

Sentaurus™ Structure Editor User Guide 460

V-2024.03
Appendix A: Commands
sde:display-std

The following examples demonstrate the concatenation of values:

(sde:display-std "a" 1 #t '(1 2 3))
> "a1#t(1|2|3)"

(sde:display-std "a" 1 #t 2.3 (list 4 5.6) (list 7 "te") (list 8 #t))

> "a1#t2.3(4|5.6)(7|te)(8|#t)"

Sentaurus™ Structure Editor User Guide 461

V-2024.03
Appendix A: Commands
sde:draw-ruler

sde:draw-ruler
This Scheme extension draws a user-defined ruler that can be displayed in the GUI.
You can hide user-defined rulers in the GUI using the sde:hide-ruler Scheme extension.
See sde:hide-ruler on page 478.
Note:
If you change the parameters of a user-defined ruler, then you must use the
sde:hide-ruler Scheme extension first to erase the previously defined ruler.
After this step, the ruler can be redrawn with the new parameters using the
sde:draw-ruler Scheme extension.

Syntax
(sde:draw-ruler "startpos" startpos "alength" alength "adir" adir
"startval" startval "endval" endval
["numdiv" numdiv] ["numdiv2" numdiv2]
["npos" npos] ["acolor" acolor]
["tcolor" tcolor])

Returns
BOOLEAN

Arguments

Argument Description

startpos Defines the starting position of the ruler in 3D space. Argument type: POSITION

alength Specifies the length of the ruler. Argument type: REAL

adir Specifies the ruler direction, where:

• "adir" 0 specifies the global x-axis direction.
• "adir" 1 specifies the y-axis direction.
• "adir" 2 specifies the z-axis direction.
Argument type: INTEGER

startval Defines the start value of the coordinate axes. Argument type: REAL

endval Defines the end value of the coordinate axes. Argument type: REAL

numdiv Optional. Specifies the number of main tick divisions. The default is 5.
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 462

V-2024.03
Appendix A: Commands
sde:draw-ruler

Argument Description

numdiv2 Optional. Specifies the number of subdivisions in each main tick division, where
the ruler will draw the subdivision ticks. The default is 2.
Argument type: INTEGER

npos Optional. Specifies the position of the displayed numbers:

For an x-axis ruler ("adir" 0):
• "npos" 1 specifies that the numbers are drawn below the axis.
• "npos" 0 specifies that the numbers are drawn above the axis.
For a y-axis ruler ("adir" 1):
• "npos" 1 indicates the right y-axis.
• "npos" 0 indicates the left y-axis.
The default is 1. Argument type: INTEGER

acolor Optional. Specifies the axis color and takes a color:rgb value. This color can
also be set by specifying BLACK, BLUE, CYAN, GREEN, MAGENTA, RED, WHITE, or
YELLOW.
Argument type: COLOR

tcolor Optional. Specifies the text color and takes a color:rgb value. This color can
also be set by specifying BLACK, BLUE, CYAN, GREEN, MAGENTA, RED, WHITE, or
YELLOW.
Argument type: COLOR

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0)(position 5 4 2) "Silicon" "xx")
(sde:draw-ruler "startpos" (position 0 4 0) "alength" 6 "adir" 0
"startval" 0 "endval" 6 "numdiv" 6 "numdiv2" 5 "npos" 1
"acolor" GREEN "tcolor" BLUE)
(sde:draw-ruler "startpos" (position 5 0 0) "alength" 5 "adir" 1
"startval" 0 "endval" 5 "numdiv" 5 "numdiv2" 5 "npos" 1
"acolor" GREEN "tcolor" BLUE)
(sde:draw-ruler "startpos" (position 5 4 0) "alength" 3 "adir" 2
"startval" 0 "endval" 3 "numdiv" 3 "numdiv2" 5 "npos" 1
"acolor" GREEN "tcolor" BLUE)

Sentaurus™ Structure Editor User Guide 463

V-2024.03
Appendix A: Commands
sde:dump-non-default-options

sde:dump-non-default-options
This Scheme extension saves a text file containing all the ACIS options that are set to
nondefault values. This helps to debug and report problems because, in some cases,
nondefault option settings can cause problems or can trigger a different behavior than
expected.

Syntax
(sde:dump-non-default-options filename)

Returns
BOOLEAN

Arguments

Argument Description

filename Specifies a file name. Argument type: STRING

sde:exact-coords?
This Scheme extension checks the status of the Exact Coordinates mode.
If exact coordinates are used, then this Scheme extension returns #t.
If the Exact Coordinates mode is switched off, then it returns #f.

Syntax
(sde:exact-coords?)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 464

V-2024.03
Appendix A: Commands
sde:extract-tdr-boundary

sde:extract-tdr-boundary
This Scheme extension extracts the boundary and saves it in a TDR boundary file from a
TDR grid file. This Scheme extension uses Sentaurus Mesh through a system call to extract
the boundary.

Syntax
(sde:extract-tdr-boundary fname [file-name])

Returns
BOOLEAN

Arguments

Argument Description

fname Specifies the name of a TDR boundary file. Argument type: STRING

file-name Optional. Specifies a file name for the extracted TDR boundary.
Argument type: STRING

sde:fix-imprint
This Scheme extension generates a conformal model by imprinting the model edges and
faces to neighboring bodies.
The generated model must be tessellated before meshing, and several different conformity
requirements must be satisfied. One of the most important requirements is that neighboring
bodies share the boundary edges (in two dimensions) and the boundary faces (in three
dimensions). Before the tessellated model is generated, Sentaurus Structure Editor
automatically imprints the edges and faces of the neighboring bodies to each other. During
model generation, the modeler tries to create a conformal model in each modeling step, but
several operations can destroy model conformity by merging collinear edges and coplanar
faces. In this case, the sde:fix-imprint Scheme extension restores model conformity.

Syntax
(sde:fix-imprint)

Returns
None

Sentaurus™ Structure Editor User Guide 465

V-2024.03
Appendix A: Commands
sde:fix-orientation

sde:fix-orientation
This Scheme extension modifies the orientation of 3D regions, with surface normals pointing
‘inside’ the body. Mainly native ACIS models, generated by other CAD tools and imported
as .sat files, might have this problem. Direct-geometry generation functions in Sentaurus
Structure Editor always generate 3D bodies with positive volume and surface normals
pointing outside.

Syntax
(sde:fix-orientation)

Returns
None

sde:front-coord
This Scheme extension returns the front coordinate of the specified body or body list. The
front coordinate depends on the coordinate system orientation used:
• For the UCS orientation, the front coordinate is the maximum z-coordinate.
• For the traditional coordinate system orientation, the front coordinate is the maximum
x-coordinate.

Syntax
(sde:front-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a list of bodies. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 466

V-2024.03
Appendix A: Commands
sde:ft_scalar

sde:ft_scalar
This Scheme extension writes the specified string or string–value pair in a terminal window.
A new line character is added to the argument string.
For the design-of-experiments (DoE) parameter extraction of Sentaurus Workbench, this
Scheme extension must be used to send the information to Sentaurus Workbench.
(Sentaurus Workbench collects the DoE-marked output from standard output.)

Syntax
(sde:ft_scalar string [value])

Returns
None

Arguments

Argument Description

string Specifies a string to be written in a terminal window. Argument type: STRING

value Optional. Specifies a string–value pair to be written in a terminal window.

Argument type: STRING | REAL

Examples
(sde:ft_scalar "aval 3")

(sde:ft_scalar "aval" 3)

Sentaurus™ Structure Editor User Guide 467

V-2024.03
Appendix A: Commands
sde:get-backwards-compatibility

sde:get-backwards-compatibility
This Scheme extension returns the value of the given backward-compatibility parameter.
Backward-compatibility parameters are specific, internally defined, parameters that are
used to reproduce certain defined functionality from previous releases of Sentaurus
Structure Editor.
For the available backward-compatibility parameters, see sde:set-backwards-compatibility
on page 506.

Syntax
(sde:get-backwards-compatibility backcompat-param)

Returns
Value of the given backward-compatibility parameter backcompat-param; otherwise,
returns #f if the given backcompat-param does not exist

Arguments

Argument Description

backcompat-param Specifies a backward-compatibility parameter. Argument type: STRING

sde:get-datex-color-scheme
This Scheme extension returns the current setting of the DATEX color scheme.

Syntax
(sde:get-datex-color-scheme)

Returns
"Vivid" or "Classic"

Sentaurus™ Structure Editor User Guide 468

V-2024.03
Appendix A: Commands
sde:get-default-material

sde:get-default-material
This Scheme extension returns the selected DATEX material in a string. The DATEX
material can be selected from the GUI using the material list or the Scheme extension
sde:set-default-material.

Syntax
(sde:get-default-material)

Returns
None

sde:get-view-params
This Scheme extension takes no arguments and returns a list, which contains all the
necessary data to restore the GUI view to the recorded state.
The Scheme extension sde:set-view-params can be used to restore the settings (see
sde:set-view-params on page 513).

Syntax
(sde:get-view-params)

Returns
A list containing:

eye position POSITION

target position POSITION

up-vector GVECTOR

width REAL

height REAL

projection STRING

Examples
(define myview (sde:get-view-params))
(sde:set-view-params myview)

Sentaurus™ Structure Editor User Guide 469

V-2024.03
Appendix A: Commands
sde:gui-get-integer

sde:gui-get-integer
This Scheme extension displays a dialog box that can be used to enter an integer variable.
When the OK button is clicked, the function returns the entered integer, or #f if incorrect
input was given or the Cancel button was clicked.
Note:
This Scheme extension can be used in GUI mode only.

Syntax
(sde:gui-get-integer variable-name default-value [dialog-name])

Returns
INTEGER or #f

Arguments

Argument Description

variable-name Specifies the name of a variable to be displayed. Argument type: STRING

default-value Specifies the default value of the variable. Argument type: INTEGER

dialog-name Optional. Defines the name of the input dialog box. Argument type: STRING

Sentaurus™ Structure Editor User Guide 470

V-2024.03
Appendix A: Commands
sde:gui-get-real

sde:gui-get-real
This Scheme extension displays a dialog box that can be used to enter a real variable.
When the OK button is clicked, the function returns the entered integer, or #f if incorrect
input was given, or the Cancel button was clicked.
Note:
This Scheme extension can be used in GUI mode only.

Syntax
(sde:gui-get-real variable-name default-value [dialog-name])

Returns
REAL or #f

Arguments

Argument Description

variable-name Specifies the name of a variable to be displayed. Argument type: STRING

default-value Specifies the default value of the variable. Argument type: INTEGER

dialog-name Optional. Defines the name of the input dialog box. Argument type: STRING

Sentaurus™ Structure Editor User Guide 471

V-2024.03
Appendix A: Commands
sde:gui-get-string

sde:gui-get-string
This Scheme extension displays a dialog box that can be used to enter a string variable.
When the OK button is clicked, the function returns the entered string value, or #f if incorrect
input was given or the Cancel button was clicked.
Note:
This Scheme extension can be used in GUI mode only.

Syntax
(sde:gui-get-string variable-name default-value [dialog-name])

Returns
STRING or #f

Arguments

Argument Description

variable-name Specifies the name of a variable to be displayed. Argument type: STRING

default-value Specifies the default value of the variable. Argument type: STRING

dialog-name Optional. Defines the name of the input dialog box. Argument type: STRING

Sentaurus™ Structure Editor User Guide 472

V-2024.03
Appendix A: Commands
sde:hide

sde:hide
This Scheme extension removes the specified entity or entities from the view window, and
the view window is refreshed. If the entities are already removed from the view window, then
there is no change in the view window.

Syntax
(sde:hide entity | entity-list)

Returns
None

Arguments

Argument Description

entity Specifies an entity to be removed. Argument type: ENTITY

entity-list Specifies a list of entities to be removed. Argument type: ENTITY LIST

Examples
(sde:clear)
(define r1 (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "r_1"))
(define r2 (sdegeo:create-rectangle (position 2 0 0) (position 3 1 0)
"Silicon" "r_2"))
(define r3 (sdegeo:create-rectangle (position 4 0 0) (position 5 1 0)
"Resist" "r_3"))
(define r4 (sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "r_4"))
(sde:hide r1)
(sde:hide (list r3 r4))

sde:hide-bg-image
This Scheme extension hides the previously loaded image.

Syntax
(sde:hide-bg-image)

Returns
None

Sentaurus™ Structure Editor User Guide 473

V-2024.03
Appendix A: Commands
sde:hide-contact

sde:hide-contact
This Scheme extension removes from the view window all regions that have contacts
defined with the specified contact attributes. Contacts are identified with the attribute name
contact. In two dimensions, contacts are edges and, in three dimensions, contacts are
faces.

Syntax
(sde:hide-contact contact-name | contact-name-list)

Returns
None

Arguments

Argument Description

contact-name Argument type: STRING

contact-name-list Argument type: STRING LIST

sde:hide-interface
This Scheme extension removes from the view all regions that have interfaces defined with
the specified interface attributes. Interfaces are identified with the attribute name
interface. In two dimensions, interfaces are edges between neighboring regions and, in
three dimensions, interfaces are faces between neighboring regions.

Syntax
(sde:hide-interface interface-name | interface-name-list)

Returns
None

Arguments

Argument Description

interface-name Argument type: STRING

interface-name-list Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 474

V-2024.03
Appendix A: Commands
sde:hide-mask

sde:hide-mask
This Scheme extension removes the specified masks from the view window. Masks are
planar wire bodies that have the specified mask names as mask name attributes.

Syntax
(sde:hide-mask mask-name | mask-name-list)

Returns
None

Arguments

Argument Description

mask-name Specifies the name of a mask. Argument type: STRING

mask-name-list Specifies a list of mark names. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 475

V-2024.03
Appendix A: Commands
sde:hide-material

sde:hide-material
This Scheme extension removes regions that have the specified material names as material
attributes from the view window. The region is removed from the view window, and the view
window is refreshed.
If the region is already removed from the view window, then there is no change in the view
window.

Syntax
(sde:hide-material datex-material | datex-material-list)

Returns
None

Arguments

Argument Description

datex-material Specifies a DATEX material. Argument type: DATEXMAT

datex-material-list Specifies a list of DATEX materials. Argument type: DATEXMAT LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:hide-material "Silicon")

Sentaurus™ Structure Editor User Guide 476

V-2024.03
Appendix A: Commands
sde:hide-region

sde:hide-region
This Scheme extension removes the specified regions from the view window. The bodies
that have the specified region names as region attributes are removed from the view
window, and the view window is refreshed.
If the region is already removed from the view window, there is no change in the view
window.

Syntax
(sde:hide-region region-name | region-name-list)

Returns
None

Arguments

Argument Description

region-name Specifies a region name, which must be an existing region name.

Argument type: STRING

region-name-list Specifies a list of region names, which must be existing region names.
Argument type: STRING LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:hide-region "region_1")
(sde:hide-region (list "region_3" "region_4"))

Sentaurus™ Structure Editor User Guide 477

V-2024.03
Appendix A: Commands
sde:hide-ruler

sde:hide-ruler
This Scheme extension hides all user-defined rulers in the GUI. See sde:draw-ruler on
page 462.

Syntax
(sde:hide-ruler)

Returns
BOOLEAN

sde:info
This Scheme extension returns the attributes of Sentaurus Structure Editor attached to the
specified bodies. It displays the entity number, and material and region attributes that are
attached to the body.

Syntax
(sde:info entity-list)

Returns
STRING

Arguments

Argument Description

entity-list Argument type: ENTITY LIST

Sentaurus™ Structure Editor User Guide 478

V-2024.03
Appendix A: Commands
sde:left-coord

sde:left-coord
This Scheme extension returns the left coordinate of the specified body or body list. The left
coordinate is the minimum y-coordinate.

Syntax
(sde:left-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

sde:load-sat
This Scheme extension loads a native ACIS .sat file, with correct overlap handling.
The difference between part:load and sde:load-sat is that the latter handles overlapping
regions correctly, according to the active Boolean setting. If a .sat file is loaded into the
modeler, which already has some bodies defined, then the overlaps are resolved according
to the Boolean setting.

Syntax
(sde:load-sat file-name)

Returns
None

Arguments

Argument Description

file-name Argument type: STRING

Sentaurus™ Structure Editor User Guide 479

V-2024.03
Appendix A: Commands
sde:material-type

sde:material-type
This Scheme extension returns the group type from the datexcodes.txt file for the given
material. The group type can be Semiconductor, or Conductor, or Insulator.

Syntax
(sde:material-type material-name)

Returns
group-name or an empty string if the specified material is not found in the
datexcodes.txt file

Arguments

Argument Description

material-name Argument type: DATEXMAT

sde:max-x
This Scheme extension returns the maximum x-dimension of the specified body or body list.

Syntax
(sde:max-x body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 480

V-2024.03
Appendix A: Commands
sde:max-y

sde:max-y
This Scheme extension returns the maximum y-dimension of the specified body or body list.

Syntax
(sde:max-y body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

sde:max-z
This Scheme extension returns the maximum z-dimension of the specified body or body list.

Syntax
(sde:max-z body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 481

V-2024.03
Appendix A: Commands
sde:merge-materials

sde:merge-materials
This Scheme extension merges (unites) a copy of the geometric bodies with the specified
DATEX materials, and the newmaterial DATEX material is assigned to the new united
body.
Note:
The new united body overlaps with the original bodies. The entity:delete
Scheme function must be used to delete the original bodies, or the overlaps must
be removed by other operations before the tessellated boundary file is created.

Syntax
(sde:merge-materials materials newmaterial)

Returns
None

Arguments

Argument Description

materials Specifies a DATEX material or a list of DATEX materials.

Argument type: DATEXMAT | DATEXMAT LIST

newmaterial Specifies a DATEX material to assign to the new united body.

Argument type: DATEXMAT

Sentaurus™ Structure Editor User Guide 482

V-2024.03
Appendix A: Commands
sde:min-x

sde:min-x
This Scheme extension returns the smallest x-dimension of the specified body or body list.

Syntax
(sde:min-x body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

sde:min-y
This Scheme extension returns the smallest y-dimension of the specified body or body list.

Syntax
(sde:min-y body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 483

V-2024.03
Appendix A: Commands
sde:min-z

sde:min-z
This Scheme extension returns the smallest z-dimension of the specified body or body list.

Syntax
(sde:min-z body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

sde:new-region-name
This Scheme extension returns an automatically generated region name region_%N,
where %N is the actual region counter. If the region counter is set correctly, then this Scheme
extension always returns a unique region name.

Syntax
(sde:new-region-name)

Returns
STRING

sde:off-lights
This Scheme extension switches off the lights in the view window.

Syntax
(sde:off-lights)

Returns
None

Sentaurus™ Structure Editor User Guide 484

V-2024.03
Appendix A: Commands
sde:offset-mask

sde:offset-mask
This Scheme extension offsets (or biases) the specified mask.

Syntax
(sde:offset-mask mask-name offset-distance)

Returns
None

Arguments

Argument Description

mask-name Specifies the name of a mask. Argument type: STRING

offset-distance Specifies the offset distance. Argument type: REAL

sde:on-lights
This Scheme extension switches on the lights in the view window.

Syntax
(sde:on-lights)

Returns
None

Sentaurus™ Structure Editor User Guide 485

V-2024.03
Appendix A: Commands
sde:open-model

sde:open-model
This Scheme extension loads a complete Sentaurus Structure Editor model.

Syntax
(sde:open-model filename)

Returns
None

Arguments

Argument Description

filename Specifies the name of a file to load. Argument type: STRING

Description
This Scheme extension is the counterpart of sde:save-model. It restores the complete
state of the modeler. First, filename.sat is loaded if it exists. It is a native ACIS .sat file
that contains the geometric description of the model, including Ref/Eval windows, with all the
attributes and contacts of Sentaurus Structure Editor that are attached.
The .sat file is loaded using the sde:part-load command, so the automatic overlap
resolution works the same way as for the sde:part-load command. Check the usage of
the global Boolean variable aut-overlap-control in sde:part-load on page 487.
If the working directory does not include a filename.sat file, the loader checks for the
existence of a TDR boundary file, filename_bnd.tdr (or if it is not found, the loader checks
for filename.tdr). If a TDR boundary file is found, this file is imported into Sentaurus
Structure Editor.
A filename.scm file also is loaded if it exists. This file contains all of the defined parameters.
Finally, a mesh command file, filename_msh.cmd, is loaded if it exists. If this file does not
exist, the loader checks for filename.cmd and loads it if it is found. This file contains all
refinement-related and doping-related information.
See also Sentaurus™ Mesh User Guide, Chapter 2.

Sentaurus™ Structure Editor User Guide 486

V-2024.03
Appendix A: Commands
sde:part-load

sde:part-load
This Scheme extension loads a native ACIS .sat file, with correct automatic overlap
handling.

Syntax
(sde:part-load filename [loadoption])

Returns
None

Arguments

Argument Description

filename Specifies the name of .sat file. Argument type: STRING

loadoption Optional. Argument type: BOOLEAN

Description
A global Boolean variable, aut-overlap-control, determines whether to load .sat files
with automatic overlap control. If it is #f (default value), the newly loaded .sat file is loaded
without checking for overlaps. If it is set to #t, the newly loaded .sat file is loaded in such a
way that the default Boolean overlap setting will be taken into consideration and the
overlaps will be resolved.
Note:
Use (sdegeo:get-default-boolean) to check the current status of the
automatic overlap-handling setting (see sdegeo:get-default-boolean on
page 668).

Since the automatic overlap control slows down model loading considerably, it is helpful to
use the default #f value for aut-overlap-control if it is known that the loaded files contain
only conformal, non-overlapping regions.
When aut-overlap-control #t is set, the overlaps are checked and resolved within the
loaded model.

Sentaurus™ Structure Editor User Guide 487

V-2024.03
Appendix A: Commands
sde:pick-point-on-wp

sde:pick-point-on-wp
This Scheme extension selects a point on the view window.
The global xyz coordinates of the selected point are returned as a position entity. The point
is always selected in the active work plane. (This Scheme extension draws a cross-hair
cursor on the screen, and a horizontal line and vertical line also help the positioning.) In
addition, the exact coordinates and snap-to-grid options can be used together with this
Scheme extension.

Syntax
(sde:pick-point-on-wp)

Returns
POSITION

sde:pick-two-points-on-wp
This Scheme extension selects two points on the view window.
The global xyz coordinates of the selected points are returned as a list of two position
entities. The points are always selected in the active work plane. (This Scheme extension
draws a cross-hair cursor on the screen, and a horizontal and vertical line also help the
positioning.)
In addition, the exact coordinates and snap-to-grid options can be used together with this
Scheme extension. The first point is selected by pressing the mouse button; drag to draw a
line from the first point. When the mouse button is released, the two positions are returned.

Syntax
(sde:pick-two-points-on-wp)

Returns
POSITION LIST

Sentaurus™ Structure Editor User Guide 488

V-2024.03
Appendix A: Commands
sde:post-message

sde:post-message
This Scheme extension displays a message in a dialog box. The OK button of the dialog box
must be clicked to cancel the message.

Syntax
(sde:post-message message)

Returns
None

Arguments

Argument Description

message Specifies a message to be displayed in a dialog box. Argument type: STRING

Examples
(sde:post-message "Hello World")

sde:project-name
This Scheme extension returns the project name, which is used in the Build Mesh dialog box
to save the created mesh file. The project name can be set using the
sde:set-project-name command. See sde:set-project-name on page 509.

Syntax
(sde:project-name)

Returns
STRING

Sentaurus™ Structure Editor User Guide 489

V-2024.03
Appendix A: Commands
sde:refresh

sde:refresh
This Scheme extension refreshes and rebuilds the view window. It discards the existing
entity display list and regenerates it from the entity data. This is useful when the view zooms
in on entities, because the display might appear jagged.
This Scheme extension destroys the existing display list, regenerates it from the entities at
the new zoom level, and redisplays the entities in all views associated with the part.
If only GUI actions are used to manipulate the view and modeler, then the view is always
updated and there is no need to call (sde:refresh).

Syntax
(sde:refresh)

Returns
None

Sentaurus™ Structure Editor User Guide 490

V-2024.03
Appendix A: Commands
sde:rename-regions

sde:rename-regions
This Scheme extension automatically renames regions based on spatial criteria.
The geometric bodies are ordered, based on the specified direction, and a region name
sequence is attached to the bodies.

Syntax
(sde:rename-regions entity-list direction)

Returns
None

Arguments

Argument Description

entity-list Specifies a list of entities. Argument type: ENTITY LIST

direction Specifies the direction in which the geometric bodies are ordered. Options are
"+x" | "-x" | "+y" | "-y" | "+z" | "-z".
For example, if the direction is "+x", then bodies are ordered based on their
minimal bounding box x-coordinates. Then, a "region_RC" region name is
attached to each body, where RC is a numeric region counter, starting from 0.
The "region_0" region name is attached to the body with the smallest minimal
bounding box x-coordinate, "region_1" is the body with the second minimal
bounding box x-coordinate, and so on.
If the direction is "-x", then the largest bounding box x-coordinates are ordered
in a decreasing sequence.
Similar rules apply to "+y", "-y", "+z", and "-z".

sde:restore-cursor
This Scheme extension reverts the pointer to the default pointer.

Syntax
(sde:restore-cursor)

Returns
None

Sentaurus™ Structure Editor User Guide 491

V-2024.03
Appendix A: Commands
sde:right-coord

sde:right-coord
This Scheme extension returns the right coordinate of the specified body or body list. The
right coordinate is the maximum y-coordinate.

Syntax
(sde:right-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body to be queried. Argument type: BODY

body-list Specifies a list of bodies to be queried. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 492

V-2024.03
Appendix A: Commands
sde:save-model

sde:save-model
This Scheme extension saves all the information about a model.

Syntax
(sde:save-model filename)

Returns
None

Arguments

Argument Description

filename Specifies the name of a file. Argument type: STRING

Description
This Scheme extension performs a complex task. It calls several other functions to save the
complete model. The Scheme extension sde:open-model is the counterpart of this Scheme
extension that loads the model and restores the original model completely. It saves a native
ACIS .sat file to store the model geometry and Ref/Eval windows. The .sat file stores the
curved boundaries and all the attributes of Sentaurus Structure Editor that are attached to
the model.
This Scheme extension also saves a mesh command file that contains all refinement-related
and doping-related information. A Scheme file also is saved containing all of the defined
parameters.
These three files are sufficient to save and restore the complete state of the modeler. In
addition, a TDR boundary file is saved. This file contains a tessellated model, so it cannot
be used to restore the complete geometric model if curved boundaries are present.

Sentaurus™ Structure Editor User Guide 493

V-2024.03
Appendix A: Commands
sde:save-parameters

sde:save-parameters
This Scheme extension saves all defined parameters (Scheme variables) that were created
using sde:define-parameter.
The saved Scheme (.scm) file can be edited and used for later sessions to restore the
complete previous state of the modeler. Some information about the GUI (such as size and
background color) is recorded as well.

Syntax
(sde:save-parameters filename)

Returns
BOOLEAN

Arguments

Argument Description

filename Specifies the name of a file in which to save all of the defined parameters.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 494

V-2024.03
Appendix A: Commands
sde:save-tcl-parameters

sde:save-tcl-parameters
This Scheme extension saves the defined contact colors to a Tcl file, using the contact color
assignment syntax of Sentaurus Visual. The saved Tcl file can be loaded into Sentaurus
Visual, after a TDR file is loaded. The contacts of the TDR file will have the same colors in
Sentaurus Visual as in Sentaurus Structure Editor.

Syntax
(sde:save-tcl-parameters filename)

Returns
BOOLEAN

Arguments

Argument Description

filename Specifies the name of a Tcl file. Argument type: STRING

Examples
Example 1
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "x1")
(sdegeo:create-rectangle (position 0.3 1 0) (position 0.7 1.5 0)
"PolySilicon" "x2")
(sdegeo:define-contact-set "red" 4 (color:rgb 1 0 0) "##")
(sdegeo:define-contact-set "green" 4 (color:rgb 0 1 0) "##")
(sdegeo:define-contact-set "blue" 4 (color:rgb 0 0 1) "##")
(sdegeo:define-contact-set "black" 4 (color:rgb 0 0 0) "##")

(sdegeo:set-contact (list (car (find-edge-id (position 0.1 1 0))))

"red")
(sdegeo:set-contact (list (car (find-edge-id (position 0.5 1.5 0))))
"green")
(sdegeo:set-contact (list (car (find-edge-id (position 0.9 1 0))))
"blue")
(sdegeo:set-contact (list (car (find-edge-id (position 0.1 0 0))))
"black")

(sdeio:save-tdr-bnd (get-body-list) "xx2d.tdr")

(sde:save-tcl-parameters "xx2d.tcl")

Sentaurus™ Structure Editor User Guide 495

V-2024.03
Appendix A: Commands
sde:save-tcl-parameters

The file xx2d.tcl contains the following:

set_region_prop {red} -color #FF0000
set_region_prop {green} -color #00FF00
set_region_prop {blue} -color #0000FF
set_region_prop {black} -color #000000

Example 2
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 0.4)
"Silicon" "x1")
(sdegeo:create-cuboid (position 0.3 0 0.4) (position 0.7 1 0.6)
"PolySilicon" "x2")
(sdegeo:define-contact-set "red" 4 (color:rgb 1 0 0) "##")
(sdegeo:define-contact-set "green" 4 (color:rgb 0 1 0) "##")
(sdegeo:define-contact-set "blue" 4 (color:rgb 0 0 1) "##")
(sdegeo:define-contact-set "black" 4 (color:rgb 0 0 0) "##")
(sdegeo:set-contact (list (car (find-face-id (position 0.1 0.1 0.4))))
"red")
(sdegeo:set-contact (list (car (find-face-id (position 0.5 0.1 0.6))))
"green")
(sdegeo:set-contact (list (car (find-face-id (position 0.9 0.1 0.4))))
"blue")
(sdegeo:set-contact (list (car (find-face-id (position 0.1 0.1 0))))
"black")
(sdeio:save-tdr-bnd (get-body-list) "xx3d.tdr")
(sde:save-tcl-parameters "xx3d.tcl")

The file xx3d.tcl is the same as xx2d.tcl.

Sentaurus™ Structure Editor User Guide 496

V-2024.03
Appendix A: Commands
sde:scale-scene

sde:scale-scene
This Scheme extension scales the model in the view window. This is only a view scale. The
model coordinates do not change. The operation can be used to magnify, for example, thin
layers.

Syntax
(sde:scale-scene xs ys zs)

Returns
None

Arguments

Argument Description

xs Argument type: REAL

ys Argument type: REAL

zs Argument type: REAL

Examples
To return to the original view, use:
(sde:scale-scene 1 1 1)

sde:scmwin-get-font-families
This Scheme extension returns the available font types that are used in the command-line
window.

Syntax
(sde:scmwin-get-font-families)

Returns
STRING

Sentaurus™ Structure Editor User Guide 497

V-2024.03
Appendix A: Commands
sde:scmwin-get-font-family

sde:scmwin-get-font-family
This Scheme extension returns the font type used in the command-line window.

Syntax
(sde:scmwin-get-font-family)

Returns
STRING

sde:scmwin-get-font-size
This Scheme extension returns the font size used in the command-line window.

Syntax
(sde:scmwin-get-font-size)

Returns
INTEGER

sde:scmwin-get-font-style
This Scheme extension returns the font style used in the command-line window. It returns a
pair:
• The first value is 0 (Normal), or 1 (Italic), or 2 (Oblique).
• The second value is either #t (Bold) or #f.

Syntax
(sde:scmwin-get-font-style)

Returns
PAIR

Sentaurus™ Structure Editor User Guide 498

V-2024.03
Appendix A: Commands
sde:scmwin-get-window-height

sde:scmwin-get-window-height
This Scheme extension returns the height of the command-line window in terms of number
of lines (or rows).

Syntax
(sde:scmwin-get-window-height)

Returns
INTEGER

sde:scmwin-select-font
This Scheme extension opens the Select Font dialog box, which is used to select the font,
the font style, and the size of the command-line window.

Syntax
(sde:scmwin-select-font)

Returns
BOOLEAN

sde:scmwin-set-font-family
This Scheme extension sets the font type to be used in the command-line window.

Syntax
(sde:scmwin-set-font-family font-type)

Returns
BOOLEAN

Arguments

Argument Description

font-type Specifies the font type to be used. Argument type: STRING

Sentaurus™ Structure Editor User Guide 499

V-2024.03
Appendix A: Commands
sde:scmwin-set-font-size

sde:scmwin-set-font-size
This Scheme extension sets the font size to be used in the command-line window.

Syntax
(sde:scmwin-set-font-size font-size)

Returns
BOOLEAN

Arguments

Argument Description

font-size Specifies the font size to be used. Argument type: INTEGER

sde:scmwin-set-prefs
This Scheme extension sets the preferences of the command-line window.
The Scheme extension sde:scmwin-select-font opens the Select Font dialog box, which
can be used to change font styles.

Syntax
(sde:scmwin-set-prefs font-type font-style font-size cmdwin-height)

Returns
BOOLEAN

Arguments

Argument Description

font-type Specifies the command-line window font. Use

sde:scmwin-get-font-families for the available fonts and
sde:scmwin-get-font-family for the active setting. Argument type: STRING

font-style Sets the actual font style. Argument type: STRING

font-size Sets the font size. Argument type: INTEGER

cmdwin-height Specifies the height of the command-line window. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 500

V-2024.03
Appendix A: Commands
sde:scmwin-set-window-height

sde:scmwin-set-window-height
This Scheme extension sets the height (in pixels) of the command-line window.

Syntax
(sde:scmwin-set-window-height height)

Returns
BOOLEAN

Arguments

Argument Description

height Specifies the height of the command-line window. Argument type: INTEGER

sde:scmwin-suppress-output
This Scheme extension shows or hides messages in the command-line window.

Syntax
(sde:scmwin-suppress-output bool)

Returns
None

Arguments

Argument Description

bool Specifies whether to show or hide messages. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 501

V-2024.03
Appendix A: Commands
sde:selected-entities

sde:selected-entities
This Scheme extension returns the currently active selected entities in a Scheme list. The
selection tools of the GUI (Select mode) can be used to select geometric entities (body, face,
edge, vertex). The selected entities are highlighted.

Syntax
(sde:selected-entities)

Returns
ENTITY LIST

sde:selected-refeval-windows
This Scheme extension returns the names of the currently selected Ref/Eval windows in a
Scheme list.
The selection tools of the GUI (Select mode) can be used to select previously defined Ref/
Eval windows. The selected Ref/Eval windows are highlighted.

Syntax
(sde:selected-refeval-windows)

Returns
ENTITY LIST

Sentaurus™ Structure Editor User Guide 502

V-2024.03
Appendix A: Commands
sde:separate-lumps

sde:separate-lumps
This Scheme extension separates the lumps in a body.

Syntax
(sde:separate-lumps [NULL | body | body-list])

Returns
ENTITY LIST

Arguments

Argument Description

NULL Specifies an empty list. Argument type: STRING

body Specifies the name of a body. Argument type: BODY

body-list Specifies a list of bodies. Argument type: BODY LIST

Description
Geometric operations can result in models with bodies that have multiple lumps (disjoint
parts of a body). Since each body has a unique region-name attribute, these separate lumps
in a body will have the same region name. As the Synopsys meshing engines require a
unique region name for each disjoint region, bodies with multiple lumps must be separated
before a TDR boundary file is generated.
This Scheme extension separates lumps and is also called automatically before a TDR
boundary file is generated. For example, if the original region name was region_1 and it
has three lumps before sde:separate-lumps is called, this Scheme extension breaks the
body into three parts and assigns a unique region name to each. A _lump_N string is added
to each lump, where N is the lump counter, starting from 1. Therefore, three new bodies are
generated with the region names region_1_lump_1, region_1_lump_2, and
region_1_lump_3.

If the argument list is empty, then all geometric bodies are separated. Alternatively, either a
single body or a body list can be specified in the argument list, in which case, only the
specified entities are separated.
This Scheme extension returns the newly created body list (which contains the entity IDs of
the separated lumps).

Sentaurus™ Structure Editor User Guide 503

V-2024.03
Appendix A: Commands
sde:separate-lumps

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 10 3 0) "Silver"
"region_1")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 4 -1 0) (position 6 4 0) "Silicon"
"region_2")
; region_1 will have two lumps !
(get-body-list)
; returns the entity ids of the two bodies
(sde:separate-lumps)
(get-body-list)
; returns the entity ids of the three bodies
; region_1 was separated into two bodies, with region names
; region_1_lump_1 and region_1_lump_2

Sentaurus™ Structure Editor User Guide 504

V-2024.03
Appendix A: Commands
sde:set-background-color

sde:set-background-color
This Scheme extension sets the background color of the main window of the GUI.
The RGB colors for the top and bottom must be specified (0–255). If the top and bottom
colors differ, then a graded background is used. If the top and bottom colors match, then the
background is uniform.

Syntax
(sde:set-background-color rtop gtop btop rbottom gbottom bbottom)

Returns
None

Arguments

Argument Description

rtop Specifies the red value for the top of the background color.
Argument type: INTEGER

gtop Specifies the green value for the top of the background color.
Argument type: INTEGER

btop Specifies the blue value for the top of the background color.
Argument type: INTEGER

rbottom Specifies the red value for the bottom of the background color.
Argument type: INTEGER

gbottom Specifies the green value for the bottom of the background color.
Argument type: INTEGER

bbottom Specifies the blue value for the bottom of the background color.
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 505

V-2024.03
Appendix A: Commands
sde:set-backwards-compatibility

sde:set-backwards-compatibility
This Scheme extension sets the value of the overall backward compatibility or the given
backward-compatibility parameter. See sde:get-backwards-compatibility on page 468.
This Scheme extension, if called with one parameter, sets the general backward
compatibility to the given release version. If one or more pairs of parameters are given, then
the corresponding backward-compatibility parameters are set to the corresponding release
values.

Syntax
(sde:set-backwards-compatibility { backcompat-release |
backcompat-param1 backcompat-release1
[backcompat-param2 backcompat-release2 ...]})

Returns
Returns #t upon successful setting of overall backward compatibility or
backward-compatibility parameters

Arguments

Argument Description

backcompat-release Specifies the release version. For example: "U-2022.12"

Argument type: STRING

backcompat-param Specifies backward-compatibility parameters, which are specific,

internally defined, parameters that are used to reproduce certain defined
functionality from previous releases of Sentaurus Structure Editor. The
available backward-compatibility parameters are:
• "Save Part at End"
Defaults to #t, such that when saving the model, the .sat file is saved
after changes to the structure are made, which are needed to save
the .cmd file and the .scm file. This parameter is #f for compatibility
with releases E-2010.12 and earlier, where the .sat file is saved first,
before the model is modified for saving the .cmd file and the .scm file.
• "Z Align Polygons"
Defaults to #f. This parameter is #t in Version E-2010.12 and earlier,
leading to the automatic reversal of polygon direction for coplanar
polygons whose face normal is not parallel to the z-axis in the active
coordinate system orientation.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 506

V-2024.03
Appendix A: Commands
sde:set-default-material

sde:set-default-material
This Scheme extension sets the active DATEX material to the specified value.
This Scheme extension also changes the selected DATEX material in the DATEX list.

Syntax
(sde:set-default-material datex-material)

Returns
None

Arguments

Argument Description

datex-material Specifies one of the DATEX colors, specified in the datexcodes.txt file.
Argument type: DATEXMAT

sde:set-menubar-font-size
This Scheme extension changes the font size of the menu bar of the GUI.
You can also use the menu command View > GUI Font Size to change the font size.

Syntax
(sde:set-menubar-font-size font-size)

Returns
None

Arguments

Argument Description

font-size Specifies the font size. Suggested values [10-14]. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 507

V-2024.03
Appendix A: Commands
sde:set-process-up-direction

sde:set-process-up-direction
This Scheme extension specifies the up-direction convention of the coordinate system
orientation to be used during process emulation.
If you use the Sentaurus Process–Sentaurus Structure Editor interface to perform process
emulation, then the Scheme script generated by Sentaurus Process will contain instructions
to select the correct coordinate system orientation automatically.

Syntax
(sde:set-process-up-direction up-direction)

Returns
BOOLEAN

Arguments

Argument Description

up-direction Specifies the up direction. Options are:

• If you specify "-x", then the up direction changes to -x (default).
• If you specify "+z", then the up direction is set to +z.
Argument type: STRING

Examples
(sde:set-process-up-direction "+z")

Sentaurus™ Structure Editor User Guide 508

V-2024.03
Appendix A: Commands
sde:set-project-name

sde:set-project-name
This Scheme extension sets the project name, which is used in the Build Mesh dialog box
as the name of the saved mesh.

Syntax
(sde:set-project-name project-name)

Returns
STRING

Arguments

Argument Description

project-name Specifies the name of a project. Argument type: STRING

sde:set-rendering-mode
This Scheme extension sets the rendering mode.

Syntax
(sde:set-rendering-mode rendering-mode)

Returns
Previous setting (STRING)

Arguments

Argument Description

rendering-mode Specifies the rendering mode. Options are facet, flat, gouraud (or
alternatively, smooth), hidden, or wire. Argument type: STRING

Sentaurus™ Structure Editor User Guide 509

V-2024.03
Appendix A: Commands
sde:set-selection-level

sde:set-selection-level
This Scheme extension sets the selection filter to the specified value. All subsequent
selection operations will use the specified filter to select only those entities that correspond
to the specified type.

Syntax
(sde:set-selection-level filter-type)

Returns
None

Arguments

Argument DescriptionArgument Type

filter-type Specifies the filter type. Options are "body" | "face" | "edge" | "vertex"
| "other".
Argument type: STRING

Examples
(sde:set-selection-level "edge")

Sentaurus™ Structure Editor User Guide 510

V-2024.03
Appendix A: Commands
sde:set-translucency

sde:set-translucency
This Scheme extension sets the translucency of the main window of the GUI.

Syntax
(sde:set-translucency body(list) tflag)

Returns
None

Arguments

Argument Description

body(list) Specifies an entity or a list of entities. Argument type: ENTITY | ENTITY LIST

tflag Specifies whether the main window is translucent:

• true means to make the main window translucent.
• false means to make the main window opaque.
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 511

V-2024.03
Appendix A: Commands
sde:set-view-mode

sde:set-view-mode
This Scheme extension sets the view to the specified value, and it also performs a zoom
extent operation.

Syntax
(sde:set-view-mode view-mode)

Returns
None

Arguments

Argument Description

view-mode Specifies the view mode from one of the following:

• ISO specifies the isometric view.
• XY sets the view to the xy plane.
• XZ sets the view to the xz plane.
• YZ sets the view to the yz plane.
• X-Y sets the view window in such a way that the x-axis points horizontally
and the y-axis points downward.
Argument type: STRING

sde:set-view-operator
This Scheme extension manipulates the toolbar, by setting the active actions to the specified
mode.

Syntax
(sde:set-view-operator op-mode)

Returns
Previous setting (STRING)

Arguments

Argument Description

op-mode Specifies the operation mode. Options are orbit, pan, select, or zoom.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 512

V-2024.03
Appendix A: Commands
sde:set-view-params

sde:set-view-params
This Scheme extension sets the GUI view (rotation, zoom, and so on) to a previously
recorded state.
The order of parameters is not significant, but eye must precede target and, if given, width
must precede height. Existing settings are extracted from the current camera position if the
optional values are not given.

Syntax
(sde:set-view-params view-params)

Returns
None

Arguments

Argument Description

view-params Specifies a list containing the same parameters that are returned by
sde:get-view-params, but with some less rigid constraints. The parameters
are:
• eye, Argument type: POSITION
• target, Argument type: POSITION
• up-vector (optional), Argument type: GVECTOR
• width (optional), Argument type: REAL
• height (optional), Argument type: REAL
• projection (optional), Argument type: STRING

Examples
(define myview (sde:get-view-params))
(sde:set-view-params myview)

Sentaurus™ Structure Editor User Guide 513

V-2024.03
Appendix A: Commands
sde:set-window-position

sde:set-window-position
This Scheme extension positions the main window of the GUI.

Syntax
(sde:set-window-position xpos ypos)

Returns
None

Arguments

Argument Description

xpos Specifies the horizontal placement of the GUI. Argument type: INTEGER

ypos Specifies the vertical placement of the GUI. Argument type: INTEGER

sde:set-window-size
This Scheme extension resizes the main window of the GUI.

Syntax
(sde:set-window-size xsize ysize)

Returns
None

Arguments

Argument Description

xsize Specifies the horizontal size (in pixels) of the GUI. Argument type: INTEGER

ysize Specifies the vertical size (in pixels) of the GUI. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 514

V-2024.03
Appendix A: Commands
sde:set-window-style

sde:set-window-style
This Scheme extension sets the GUI style.

Syntax
(sde:set-window-style wstyle)

Returns
None

Arguments

Argument Description

wstyle Sets the GUI style. The available styles are Windows, Motif, Cleanlooks,
Plastique, and CDE. Argument type: STRING

Sentaurus™ Structure Editor User Guide 515

V-2024.03
Appendix A: Commands
sde:setrefprops

sde:setrefprops
This Scheme extension controls the refinement properties of the internal faceter of
Sentaurus Structure Editor, which is an important link between Sentaurus Structure Editor
and other Synopsys tools. When Sentaurus Structure Editor contains a model with curved
boundaries, this internal curved representation must be tessellated before a TDR boundary
file is generated.
Note:
This Scheme extension is deprecated. Instead, use the aspect-ratio,
max-edge-length, normal-tolerance, and surface-tolerance arguments of
the sdeio:save-tdr-bnd Scheme extension to control the properties of the
faceter (see sdeio:save-tdr-bnd on page 752).

Syntax
(sde:setrefprops surface-tolerance normal-tolerance
[aspect-ratio max-edge-length])

Returns
None

Arguments

Argument Description

surface-tolerance Specifies the surface tolerance. It is an absolute number. It is the allowable

maximum distance between the original model and tessellated output. By
specifying a smaller value, the tessellated model deviates less from the
original model. Argument type: REAL

normal-tolerance Specifies the normal tolerance. It is the allowable maximum difference

between the surface normals of the original and tessellated models. Both
values are global and apply to the complete model.
In the case of a thin curved channel, the refinement based on surface
tolerance is not recommended. It is better to control the normal tolerance.
Argument type: REAL

aspect-ratio Optional. Controls the maximum aspect ratio of the triangles in the
tessellated boundary. Using an aspect ratio control can prevent the
creation of sliver faces (triangles with a close to zero angle). The
recommended aspect ratio value is [2–4]. Argument type: REAL

max-edge-length Optional. Controls the maximum-allowable edge length in the tessellated

boundary. In some cases, a more regular tessellation can be created using
max-edge-length, which helps meshing. A small max-edge-length value
might cause unnecessary overrefinement. Argument type: REAL

Sentaurus™ Structure Editor User Guide 516

V-2024.03
Appendix A: Commands
sde:setup-grid

sde:setup-grid
This Scheme extension sets the basic parameters for the grid.

Syntax
(sde:setup-grid x-spacing y-spacing edge-weight edge-pattern)

Returns
None

Arguments

Argument Description

x-spacing Specifies the horizontal grid size. Argument type: REAL

y-spacing Specifies the vertical grid size. Argument type: REAL

edge-weight Specifies the line thickness. Argument type: INTEGER

edge-pattern Specifies the line pattern that is used to draw the grid. Possible values are:
• A solid line: "---"
• A simple dashed line: "- -"
• A dotted line: "..."
• Dash and dot alternating: "-.-."
• Dash and two dots alternating: "-..-.."
• Dash and three dots alternating: "-...-..."
• Long dashes: "---- ----"
• Very long dash and short dash alternating: "center"
• Very long dash and two short dashes alternating: "phantom"
Argument type: STRING

Examples
(sde:setup-grid 1 1 2 "...")
(sde:show-grid #t)

Sentaurus™ Structure Editor User Guide 517

V-2024.03
Appendix A: Commands
sde:show

sde:show
This Scheme extension is used to show the specified entity or entities in the view window.
The bodies are added to the view window, and the view window is refreshed. If the entity is
already visible, then there is no change in the view window.

Syntax
(sde:show entity | entity-list)

Returns
None

Arguments

Argument Description

entity Specifies an entity. Argument type: ENTITY

entity-list Specifies a list of entities. Argument type: ENTITY LIST

Examples
(sde:clear)
(define r1 (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "r_1"))
(define r2 (sdegeo:create-rectangle (position 2 0 0) (position 3 1 0)
"Silicon" "r_2"))
(define r3 (sdegeo:create-rectangle (position 4 0 0) (position 5 1 0)
"Resist" "r_3"))
(define r4 (sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "r_4"))
(sde:xshow-material "")
(sde:show r1)
(sde:show (list r3 r4))

Sentaurus™ Structure Editor User Guide 518

V-2024.03
Appendix A: Commands
sde:showattribs

sde:showattribs
This Scheme extension shows the attached attributes for the specified entity list.
This Scheme extension can display the ACIS part number, and the material and region
attributes of Sentaurus Structure Editor that are attached to the bodies.

Syntax
(sde:showattribs entity-list | "all")

Returns
None

Arguments

Argument Description

entity-list Specifies a list of entities. Alternatively, you can specify the keyword "all", in
which case, all ACIS bodies are shown. Argument type: ENTITY LIST

sde:show-bg-image
This Scheme extension displays the previously loaded image.

Syntax
(sde:show-bg-image)

Returns
None

Sentaurus™ Structure Editor User Guide 519

V-2024.03
Appendix A: Commands
sde:show-contact

sde:show-contact
This Scheme extension adds to the view all regions that have contacts defined with the
specified contact attributes. Contacts are identified with the attribute name contact. In two
dimensions, contacts are edges and, in three dimensions, contacts are faces.

Syntax
(sde:show-contact contact-name | contact-name-list)

Returns
None

Arguments

Argument Description

contact-name Specifies the name of a contact. Argument type: STRING

contact-name-list Specifies a list of contact names. Argument type: STRING LIST

sde:show-grid
This Scheme extension switches on and off visualization of the grid in the view window.

Syntax
(sde:show-grid on-off)

Returns
BOOLEAN

Arguments

Argument Description

on-off Specifies whether to switch on or off visualization of the grid.

Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 520

V-2024.03
Appendix A: Commands
sde:show-interface

sde:show-interface
This Scheme extension adds to the view window all regions that have interfaces defined
with the specified interface attributes. Interfaces are identified with the attribute name
interface.

In two dimensions, interfaces are edges between neighboring regions. In three dimensions,
interfaces are faces between neighboring regions.

Syntax
(sde:show-interface interface-name | interface-name-list)

Returns
None

Arguments

Argument Description

interface-name Specifies the name of an interface. Argument type: STRING

interface-name-list Specifies a list of interface names. Argument type: STRING LIST

sde:show-mask
This Scheme extension adds the specified masks to the view window. Masks are planar wire
bodies that have the specified mask names as mask name attributes.

Syntax
(sde:show-mask mask-name | mask-name-list)

Returns
None

Arguments

Argument Description

mask-name Specifies the name of a mask. Argument type: STRING

mask-name-list Specifies a list of mask names. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 521

V-2024.03
Appendix A: Commands
sde:show-material

sde:show-material
This Scheme extension is used to show the regions that have the specified material names
as material attributes. The regions are added to the view window, and the view window is
refreshed. If a region is already visible, there is no change in the view window.

Syntax
(sde:show-material datex-material | datex-material-list)

Returns
None

Arguments

Argument Description

datex-material Specifies a DATEX material. Argument type: DATEXMAT

datex-material-list Specifies a list of DATEX materials. Argument type: DATEXMAT LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:xshow-material "")
(sde:show-material "Silicon")

Sentaurus™ Structure Editor User Guide 522

V-2024.03
Appendix A: Commands
sde:show-pcurves

sde:show-pcurves
This Scheme extension visualizes the parametric curves for each entity, defined in the
database.
Note:
Only the wire frame view is affected by this Scheme extension, by rendering the
parameter lines.

Syntax
(sde:show-pcurves rendering-flag [u-params [v-params]])

Returns
None

Arguments

Argument Description

rendering-flag Specifies whether to switch on or off the parameter line visualization.

Argument type: BOOLEAN

u-params Optional. If this argument is not specified, then the default is 5.

Argument type: INTEGER

v-params Optional. If this argument is not specified, then the default is 5.

Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 523

V-2024.03
Appendix A: Commands
sde:show-region

sde:show-region
This Scheme extension shows the specified regions in the view window. The bodies that
have the specified region name as a region attribute are added to the view window, and the
view window is refreshed. If the region is already visible, there is no change in the view
window.

Syntax
(sde:show-region region-name | region-name-list)

Returns
None

Arguments

Argument Description

region-name Specifies the name of a region. It must be an existing region name.

Argument type: STRING

region-name-list Specifies a list of region names. They must be existing region names.
Argument type: STRING LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:xshow-material "")
(sde:show-region "region_1")
(sde:show-region (list "region_3" "region_4"))

Sentaurus™ Structure Editor User Guide 524

V-2024.03
Appendix A: Commands
sde:split-solid

sde:split-solid
This Scheme extension splits the specified solid (2D and 3D) into separate bodies.
The new split bodies can be treated as high-level entities. They can be deleted, new material
and region properties can be assigned to them, and any geometry operations can be applied
to them that can be applied to high-level entities only.
Note:
After a solid entity is split into parts, region names are no longer unique. All split
parts will have the same region name, therefore, renaming of these parts might
be necessary.

Syntax
(sde:split-solid solid-body base-position plane-normal)

Returns
BODY LIST

Arguments

Argument Description

solid-body Specifies a body to be split. Argument type: BODY

base-position Defines the base position (that is, a position variable) for the cutplane.
Argument type: POSITION

plane-normal Defines the normal vector (that is, a gvector variable) for the cutplane.
Argument type: GVECTOR

Examples
(sde:clear)
(define my_cube (sdegeo:create-cuboid (position -1 -1 -1)
(position 1 1 1) "Silver" "xx"))
(sde:split-solid my_cube (position 0 0 0) (gvector 1 1 0))
(sde:split-solid my_cube (position 0 0 0) (gvector 1 -1 0))

Sentaurus™ Structure Editor User Guide 525

V-2024.03
Appendix A: Commands
sde:stripextension

sde:stripextension
This Scheme extension locates the last dot (.) in a specified string and removes all
characters that follow. The stripped string is returned. If the input string does not have a dot,
then the input string is returned.

Syntax
(sde:stripextension name)

Returns
STRING

Arguments

Argument Description

name Specifies an input string. Argument type: STRING

sde:substring
This Scheme extension returns a substring of the input string. If the length of the input string
is smaller than max, then an empty string is returned. (The string-length command
returns the length of a string.)

Syntax
(sde:substring string min max)

Returns
STRING

Arguments

Argument Description

string Specifies an input string. Argument type: STRING

min Specifies a number that denotes the first character position (starting from zero).
Argument type: INTEGER

max Specifies a number that denotes the last character position.

Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 526

V-2024.03
Appendix A: Commands
sde:test-entity

sde:test-entity
This Scheme extension returns the entity types.

Syntax
(sde:test-entity entities)

Returns
Possible return values are:

"unknown"

"solid" Solid with a positive volume (manifold)

"non-manifold" Solid with zero volume (non-manifold)

"mask" Mask (same conditions as for "non-manifold", but also the maskname
attribute is defined)

Arguments

Argument Description

entities Specifies an entity or a list of entities. Argument type: ENTITY | ENTITY LIST

sde:toggle-lights
This Scheme extension switches on or off the lights of the view window, that is, this Scheme
extension behaves like a light switch.

Syntax
(sde:toggle-lights)

Returns
None

Sentaurus™ Structure Editor User Guide 527

V-2024.03
Appendix A: Commands
sde:top-coord

sde:top-coord
This Scheme extension returns the top coordinate of the specified body or body list The top
coordinate depends on the coordinate system orientation used:
• For the UCS orientation, the top coordinate is the minimum x-coordinate.
• For the traditional coordinate system orientation, the top coordinate is the maximum
z-coordinate.

Syntax
(sde:top-coord body | body-list)

Returns
REAL

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a list of bodies. Argument type: BODY LIST

sde:tr-get
This Scheme extension returns the transformation that was used to place the 3D cut on the
xy plane, using sdegeo:3d-cut.
The transformation is composed of a rotation component (3 × 3 matrix) and a translation
component (3D vector). The extension returns 12 real numbers in a list. The first nine
numbers represent the 3 × 3 rotation matrix (A) and the last three numbers (T) represent the
xyz part of the translation component. The new position of any point in the cut can be
calculated by Pcut = Poriginal × A +T.

Syntax
(sde:tr-get)

Returns
LIST

Sentaurus™ Structure Editor User Guide 528

V-2024.03
Appendix A: Commands
sde:view-filter-reset

sde:view-filter-reset
This Scheme extension resets the view window to the default value. All regions and contacts
are shown, and interfaces are hidden.

Syntax
(sde:view-filter-reset)

Returns
None

sde:view-set-light-intensity
This Scheme extension sets the light intensity of the view window.

Syntax
(sde:view-set-light-intensity lintensity)

Returns
None

Arguments

Argument Description

lintensity Sets the light intensity to a value between 0 and 1. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 529

V-2024.03
Appendix A: Commands
sde:view-set-visible-area

sde:view-set-visible-area
This Scheme extension resizes the GUI drawing area explicitly. If the bounding box of the
created device is known, then it might be convenient to preset the view area to that size.

Syntax
(sde:view-set-visible-area xmin xmax ymin ymax)

Returns
None

Arguments

Argument Description

xmin Argument type: REAL

xmax Argument type: REAL

ymin Argument type: REAL

ymax Argument type: REAL

sde:wait-cursor
This Scheme extension changes the cursor to an hourglass pointer.

Syntax
(sde:wait-cursor)

Returns
None

Sentaurus™ Structure Editor User Guide 530

V-2024.03
Appendix A: Commands
sde:window-select-2d

sde:window-select-2d
This Scheme extension selects all entities (of the specified type, stype) lying in the specified
2D window. It returns a list containing all vertex, edge, or body entities that are inside the
specified 2D window. A similar Scheme extension sde:window-select-3d applies to 3D
models.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sde:window-select-2d x-left y-left x-right y-right elist stype)

Returns
LIST

Arguments

Argument Description

x-left Defines the rectangular window to be used during the selection.

Argument type: REAL

y-left Defines the rectangular window to be used during the selection.

Argument type: REAL

x-right Defines the rectangular window to be used during the selection.

Argument type: REAL

y-right Defines the rectangular window to be used during the selection.

Argument type: REAL

elist Specifies a list of bodies. Alternatively, if you specify "all", then all entities in
the model are used for the selection. Argument type: BODY LIST

stype Specifies the selection criterion, that is, the entity type. Possible values are
"vertex" | "edge" | "body".
If "vertex" is specified, then a vertex list is returned.
If "edge" is specified, then an edge list is returned.
If "body", is specified, then a body list is returned.
If no entity is found, then an empty list is returned.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 531

V-2024.03
Appendix A: Commands
sde:window-select-3d

Examples
(sde:clear)
(sdegeo:set-default-boolean "AB")
(sdegeo:create-rectangle (position 0 0 0) (position 2 2 0) "Silicon"
"region_1")
(sdegeo:create-circle (position 1 2 0) 1 "Silicon" "region_2")
(define vlist (sde:window-select-2d -1 -1 3 4 "all" "vertex"))
(define elist (sde:window-select-2d -1 -1 3 4 "all" "edge"))
(define blist (sde:window-select-2d -1 -1 3 4 "all" "body"))

sde:window-select-3d
This Scheme extension selects all entities (of the specified type, stype) lying in the specified
3D window. It returns a list containing all vertex, edge, or face entities that are inside the
specified 3D window. A similar Scheme extension sde:window-select-2d applies to 2D
models.
Note:
This Scheme extension applies to 3D models only.

Syntax
(sde:window-select-3d pmin pmax elist stype)

Returns
LIST

Arguments

Argument Description

pmin Defines the 3D window (cuboid) to be used during the selection.

Argument type: POSITION

pmax Defines the 3D window (cuboid) to be used during the selection.

Argument type: POSITION

elist Specifies a list of bodies. Alternatively, if you specify "all", then all entities in
the model are used for the selection.
Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 532

V-2024.03
Appendix A: Commands
sde:xshow

Argument Description

stype Specifies the selection criterion, that is, the entity type. Possible values are
"vertex" | "edge" | "face" | "body".
If "vertex" is specified, then a vertex list is returned.
If "edge" is specified, then an edge list is returned.
If "face" is specified, then a face list is returned.
If "body", is specified, then a body list is returned.
If no entity is found, then an empty list is returned.
Argument type: STRING

sde:xshow
This Scheme extension shows the specified entities exclusively in the view window. The
entities are added to the view window. All other entities are removed from the view window,
and the view window is refreshed.

Syntax
(sde:xshow entity | entity-list)

Returns
None

Arguments

Argument Description

entity Specifies an entity. Argument type: ENTITY

entity-list Specifies a list of entities. Argument type: ENTITY LIST

Examples
(sde:clear)
(define r1 (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "r_1"))
(define r2 (sdegeo:create-rectangle (position 2 0 0) (position 3 1 0)
"Silicon" "r_2"))
(define r3 (sdegeo:create-rectangle (position 4 0 0) (position 5 1 0)
"Resist" "r_3"))
(define r4 (sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "r_4"))
(sde:xshow r1)
(sde:xshow (list r3 r4))

Sentaurus™ Structure Editor User Guide 533

V-2024.03
Appendix A: Commands
sde:xshow-contact

sde:xshow-contact
This Scheme extension exclusively adds all regions to the view that have contacts defined
with the specified contact attributes and removes all other regions. Contacts are identified
with the attribute name contact. In two dimensions, contacts are edges and, in three
dimensions, contacts are faces.

Syntax
(sde:xshow-contact contact-name | contact-name-list)

Returns
None

Arguments

Argument Description

contact-name Specifies the name of a contact. Argument type: STRING

contact-name-list Specifies a list of contact names. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 534

V-2024.03
Appendix A: Commands
sde:xshow-interface

sde:xshow-interface
This Scheme extension exclusively adds all regions to the view window, which have
interfaces defined, with the specified interface attributes, and it removes all other interfaces.
Interfaces are identified with the attribute name interface. In two dimensions, interfaces
are edges between neighboring regions and, in three dimensions, interfaces are faces
between neighboring regions.

Syntax
(sde:xshow-interface interface-name | interface-name-list)

Returns
None

Arguments

Argument Description

interface-name Specifies the name of an interface. Argument type: STRING

interface-name-list Specifies a list of interface names. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 535

V-2024.03
Appendix A: Commands
sde:xshow-mask

sde:xshow-mask
This Scheme extension exclusively adds the specified masks to the view window, that is, the
specified masks are added and all other masks are removed. Masks are planar wire bodies
that have the specified mask names as mask name attributes.

Syntax
(sde:xshow-mask mask-name | mask-name-list)

Returns
None

Arguments

Argument Description

mask-name Specifies the name of a mask. Argument type: STRING

mask-name-list Specifies a list of mask names. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 536

V-2024.03
Appendix A: Commands
sde:xshow-material

sde:xshow-material
This Scheme extension shows exclusively the regions that have the specified material
names as material attributes in the view window. The region is added to the view window, all
other regions are removed from the view window, and the view window is refreshed.

Syntax
(sde:xshow-material datex-material | datex-material-list)

Returns
None

Arguments

Argument Description

datex-material Specifies the name of a DATEX material. Argument type: DATEXMAT

datex-material-list Specifies a list of DATEX materials. Argument type: DATEXMAT LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:xshow-material "Silicon")

Sentaurus™ Structure Editor User Guide 537

V-2024.03
Appendix A: Commands
sde:xshow-region

sde:xshow-region
This Scheme extension shows the specified regions exclusively in the view window. The
bodies, which have the specified region names as region attributes, are added to the view
window. All other bodies are removed from the view window, and the view window is
refreshed.

Syntax
(sde:xshow-region region-name | region-name-list)

Returns
None

Arguments

Argument Description

region-name Specifies the name of a region. The region name must exist.
Argument type: STRING

region-name-list Specifies a list of region names. The region names must exist.
Argument type: STRING LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Photoresist" "region_1")
(sdegeo:create-rectangle (position 2 0 0) (position 3 1 0) "Silicon"
"region_2")
(sdegeo:create-rectangle (position 4 0 0) (position 5 1 0) "Resist"
"region_3")
(sdegeo:create-rectangle (position 6 0 0) (position 7 1 0)
"PolySilicon" "region_4")
(sde:xshow-region "region_1")
(sde:xshow-region (list "region_3" "region_4"))

Sentaurus™ Structure Editor User Guide 538

V-2024.03
Appendix A: Commands
sde:zoom-all

sde:zoom-all
This Scheme extension fits the model to the view window.

Syntax
(sde:zoom-all)

Returns
None

sdedr:append-cmd-file
This Scheme extension appends a text file to the end of a mesh command file. The mesh
command file is not created by this Scheme extension.
You must call sdedr:write-cmd-file after sdedr:append-cmd-file to create the mesh
command file.

Syntax
(sdedr:append-cmd-file filename)

Returns
None

Arguments

Argument Description

filename Specifies the name of a text file to be appended. Argument type: STRING

Sentaurus™ Structure Editor User Guide 539

V-2024.03
Appendix A: Commands
sdedr:clear

sdedr:clear
This Scheme extension clears all doping-related and refinement-related data from
Sentaurus Structure Editor. A subsequent sdedr:write-cmd-file call creates an empty
command file. (Choose Mesh > Clear All > Profiles and Definitions.)

Syntax
(sdedr:clear)

Returns
None

sdedr:clear-multibox-definitions
This Scheme extension deletes all multibox definition–related data from the doping and
refinement container. (Choose Mesh > Clear All > Multibox Definitions.)

Syntax
(sdedr:clear-multibox-definitions)

Returns
None

sdedr:clear-multibox-placements
This Scheme extension deletes all multibox placement–related data from the doping and
refinement container. (Choose Mesh > Clear All > Multibox Placements.)

Syntax
(sdedr:clear-multibox-placements)

Returns
None

Sentaurus™ Structure Editor User Guide 540

V-2024.03
Appendix A: Commands
sdedr:clear-profile-definitions

sdedr:clear-profile-definitions
This Scheme extension deletes all profile definition–related data from the doping and
refinement container. (Choose Mesh > Clear All > Profile Definitions.)

Syntax
(sdedr:clear-profile-definitions)

Returns
None

sdedr:clear-profile-placements
This Scheme extension deletes all profile placement–related data from the doping and
refinement container. (Choose Mesh > Clear All > Profile Placements.)

Syntax
(sdedr:clear-profile-placements)

Returns
None

sdedr:clear-ref-windows
This Scheme extension deletes all previously defined Ref/Eval windows from the database.
(Choose Mesh > Clear All > Ref/Eval Windows.)

Syntax
(sdedr:clear-ref-windows)

Returns
None

Sentaurus™ Structure Editor User Guide 541

V-2024.03
Appendix A: Commands
sdedr:clear-refinement-definitions

sdedr:clear-refinement-definitions
This Scheme extension deletes all refinement definition–related data from the doping and
refinement container. The mesh command files contain all refinement-related data. The
command file includes two data sections that are related to doping and refinement:
Definitions and Placements.

The Definitions section contains the definitions of the refinement entities (definition
name, refinement size information), and the Placements section contains the named
placements for refinements (associated refinement windows). This Scheme extension
deletes all refinement-related data only from the Definitions section. (Choose Mesh >
Clear All > Refinement Definitions.)

Syntax
(sdedr:clear-refinement-definitions)

Returns
None

sdedr:clear-refinement-placements
This Scheme extension deletes all refinement placement–related data from the doping and
refinement container. The mesh command files contain all refinement-related data. The
command file includes two data sections that are related to doping and refinement:
Definitions and Placements.

The Definitions section contains the definitions of the refinement entities (definition
name, refinement size information), and the Placements section contains the named
placements for refinements (associated refinement windows). This Scheme extension
deletes all refinement-related data only from the Placements section. (Choose Mesh >
Clear All > Refinement Placements.)

Syntax
(sdedr:clear-refinement-placements)

Returns
None

Sentaurus™ Structure Editor User Guide 542

V-2024.03
Appendix A: Commands
sdedr:clear-submesh-placement-transform

sdedr:clear-submesh-placement-transform
This Scheme extension clears all transform operations (Reflect, Rotation, and
ShiftVector) as defined for the named external profile placement through the Scheme
extension sdedr:transform-submesh-placement. See
sdedr:transform-submesh-placement on page 589.

Syntax
(sdedr:clear-submesh-placement-transform placement-name)

Returns
None

Arguments

Argument Description

placement-name Specifies a placement name. Argument type: STRING

sdedr:convert-mask-to-drs-body
This Scheme extension converts the specified mask into a Ref/Eval window.
If the mask is not found, then this Scheme extension returns #f. If the conversion is
successful, then it returns #t.

Syntax
(sdedr:convert-mask-to-drs-body maskname refwindowname)

Returns
BOOLEAN

Arguments

Argument Description

maskname Specifies the name of a mask. Argument type: STRING

refwindowname Specifies the name of a Ref/Eval window. Argument type: STRING

Sentaurus™ Structure Editor User Guide 543

V-2024.03
Appendix A: Commands
sdedr:define-1d-external-profile

sdedr:define-1d-external-profile
This Scheme extension creates a 1D external profile in the mesh command file.
The default unit is micrometer. The lateral profile can be given as a Gaussian function or an
error function. The "Range" keyword with its parameters range-from and range-to is
optional.
See Sentaurus™ Mesh User Guide, Defining Analytic Profiles, for detailed descriptions of
parameters.

Syntax
(sdedr:define-1d-external-profile name filename "Scale" scale
"DataScale" data-scale ["Range" range-from range-to]
[lateral-function])

Returns
None

Arguments

Argument Description

name Argument type: STRING

filename Argument type: STRING

scale Argument type: REAL

data-scale Argument type: REAL

range-from Optional. Argument type: REAL

range-to Optional. Argument type: REAL

lateral-function Optional. Specifies the lateral function. Possible values are "Erf",
"Eval", or "Gauss". For example:
"Erf" {"Factor" lateral-factor | "Length" length}
or:
"Eval" {eval-init eval-function}
or:
"Gauss" {"Factor" lateral-factor | "Length" length |
"StdDev" standard-deviation}
Argument type: STRING

Sentaurus™ Structure Editor User Guide 544

V-2024.03
Appendix A: Commands
sdedr:define-1d-external-profile

Argument Description

lateral-factor Argument type: REAL

length Argument type: REAL

standard-deviation Argument type: REAL

eval-init Argument type: STRING

eval-function Argument type: STRING

Sentaurus™ Structure Editor User Guide 545

V-2024.03
Appendix A: Commands
sdedr:define-analytical-profile

sdedr:define-analytical-profile
This Scheme extension creates a user-defined analytic function that describes doping in the
mesh command file.
The optional definition of lateral diffusion is not available if the definition in the primary
direction is the analytic type "General". The "General" type includes both the primary and
lateral distributions in its definition and, therefore, it is not intended to have a separate lateral
diffusion.
See Sentaurus™ Mesh User Guide, Defining Analytic Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-analytical-profile name species initialization function
start-value analytic-type
[lateral-type-gauss-erf lateral-parameter lateral-value |
"Eval" lateral-eval-init lateral-eval-func])

Returns
None

Arguments

Argument Description

name Argument type: STRING

species Argument type: STRING

initialization Argument type: STRING

function Argument type: STRING

start-value Argument type: REAL

analytic-type Specifies the analytic type. Options are "General" | "Eval".

Argument type: STRING

lateral-type-gauss-erf Optional. Specifies the lateral function. Options are "Gauss" |

"Erf". Argument type: STRING

lateral-parameter Optional. Specifies the lateral parameter. Options are "factor" |

"length" | "stddev". Argument type: STRING

lateral-value Optional. Specifies the lateral value. Argument type: REAL

Sentaurus™ Structure Editor User Guide 546

V-2024.03
Appendix A: Commands
sdedr:define-analytical-profile-placement

Argument Description

lateral-eval-init Optional. Argument type: STRING

lateral-eval-func Optional. Argument type: STRING

sdedr:define-analytical-profile-placement
This Scheme extension creates a placement for an analytic profile definition in the mesh
command file.
See Sentaurus™ Mesh User Guide, Placing Analytic Profiles, for descriptions of arguments.

Syntax
(sdedr:define-analytical-profile-placement placement-name
definition-name ref-eval-window symmetry replacement evaluation
eval-window decay-length ["Gauss"] eval-window-type)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

ref-eval-window Argument type: STRING

symmetry Specifies the symmetry. Options are "Both" | "Positive" |

"Negative". Argument type: STRING

replacement Specifies the type of replacement. Options are "Replace" |

"NoReplace" | "LocalReplace". Argument type: STRING

evaluation Specifies the type of evaluation. Options are "Eval" | "NoEval".

Specifying "NoEval" causes Sentaurus Structure Editor to write the
"notevalline" keyword to the AnalyticalProfile statement of the
Placements section of the Sentaurus Mesh command file. The
AnalyticalProfile statement instructs Sentaurus Mesh not to include
the base line or base polygons in the evaluation of the analytic doping
profiles. Argument type: STRING

Sentaurus™ Structure Editor User Guide 547

V-2024.03
Appendix A: Commands
sdedr:define-analytical-profile-placement

Argument Description

eval-window Argument type: STRING

decay-length This argument corresponds to the mesh command file parameter

"DecayLength" unless the optional string "Gauss" is also present, in
which case, decay-length is interpreted instead as corresponding to the
"GaussDecayLength" parameter of the mesh command file.
Argument type: REAL

"Gauss" Optional. Argument type: STRING

eval-window-type Specifies the type of Ref/Eval window. Options are "region" |

"material" | "evalwin". Argument type: STRING

Sentaurus™ Structure Editor User Guide 548

V-2024.03
Appendix A: Commands
sdedr:define-body-interface-refwin

sdedr:define-body-interface-refwin
This Scheme extension defines a refinement window between the interfaces of the specified
geometric bodies.
If the refinement window is already defined, then the Scheme extension returns #f. If there
is an interface between the input bodies, then a refinement window is created, which
conforms to the interface.
Note:
The interface between bodies can be a geometric object that is not supported in
the mesh command file and that is not supported by the other sdedr Scheme
extensions. For example, if the interface is a polygon (wire body in two
dimensions), this entity type is not supported by other sdedr extensions. In this
case, the wire body is converted to an edge list, and a refinement window is
created from each edge. If the original refinement window name is, for example,
"rw", the "_edge_EN" string is appended to the name, where EN is an edge
counter (rw_edge_1, rw_edge_2, and so on). Similarly, if the interface is a face
list (3D), each face is converted to a polygon and the mesh command file includes
these polygons if the interface refinement window is used to define doping/
refinement. The refinement window name will have the "_lump_FN" string
appended, where FN is a face number counter.

Syntax
(sdedr:define-body-interface-refwin body-list ref-eval-window)

Returns
BOOLEAN

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

ref-eval-window Specifies the name of a refinement window. Argument type: STRING

Sentaurus™ Structure Editor User Guide 549

V-2024.03
Appendix A: Commands
sdedr:define-constant-profile

sdedr:define-constant-profile
This Scheme extension creates a definition for a constant doping profile in the mesh
command file.
See Sentaurus™ Mesh User Guide, Defining Constant Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-constant-profile definition-name species concentration)

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

species Argument type: STRING

concentration Argument type: REAL

Sentaurus™ Structure Editor User Guide 550

V-2024.03
Appendix A: Commands
sdedr:define-constant-profile-material

sdedr:define-constant-profile-material
This Scheme extension creates a constant doping profile placement based on a material in
the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Constant Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-constant-profile-material placement-name definition-name
material [decay-length ["Gauss"]] [replace])

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

material Argument type: DATEXMAT

decay-length Optional. This argument corresponds to the mesh command file parameter
"DecayLength" unless the optional string "Gauss" is also present, in which
case, decay-length is interpreted instead as corresponding to the
"GaussDecayLength" parameter of the mesh command file.
Argument type: REAL

"Gauss" Optional. Argument type: STRING

replace Optional. Specifies the replacement method. Options are "Replace" |

"LocalReplace". Argument type: STRING

Sentaurus™ Structure Editor User Guide 551

V-2024.03
Appendix A: Commands
sdedr:define-constant-profile-placement

sdedr:define-constant-profile-placement
This Scheme extension creates a Ref/Eval window placement of a constant doping profile
definition in the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Constant Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-constant-profile-placement placement-name
definition-name ref-win-name [decay-length ["Gauss"]] [replace])

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

ref-win-name Argument type: STRING

decay-length Optional. This argument corresponds to the mesh command file parameter
"DecayLength" unless the optional string "Gauss" is also present, in which
case, decay-length is interpreted instead as corresponding to the
"GaussDecayLength" parameter of the mesh command file.
Argument type: REAL

"Gauss" Optional. Argument type: STRING

replace Optional. Specifies the replacement method. Options are "Replace" |

"LocalReplace". Argument type: STRING

Sentaurus™ Structure Editor User Guide 552

V-2024.03
Appendix A: Commands
sdedr:define-constant-profile-region

sdedr:define-constant-profile-region
This Scheme extension creates a constant doping profile placement based on a region in
the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Constant Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-constant-profile-region placement-name definition-name
region-name [decay-length ["Gauss"]] [replace])

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

region-name Argument type: STRING

decay-length Optional. This argument corresponds to the mesh command file parameter
"DecayLength" unless the optional string "Gauss" is also present, in which
case, decay-length is interpreted instead as corresponding to the
"GaussDecayLength" parameter of the mesh command file.
Argument type: REAL

"Gauss" Optional. Argument type: STRING

replace Optional. Specifies the replacement method. Options are "Replace" |

"LocalReplace". Argument type: STRING

Sentaurus™ Structure Editor User Guide 553

V-2024.03
Appendix A: Commands
sdedr:define-erf-profile

sdedr:define-erf-profile
This Scheme extension creates a definition of an error-function doping profile in the mesh
command file.
See Sentaurus™ Mesh User Guide, Defining Constant Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-erf-profile definition-name species
"SymPos" symmetry-position
"MaxVal" max-value | "Dose" dose "Junction" junction
"ValueAtDepth" value-at-depth "Depth" depth "Length" length
"StdDev" standard-deviation [lateral-function])

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

species Argument type: STRING

symmetry-position Argument type: REAL

max-value Argument type: REAL

dose Argument type: REAL

junction Argument type: REAL

value-at-depth Argument type: REAL

depth Argument type: REAL

length Argument type: REAL

standard-deviation Argument type: REAL

Sentaurus™ Structure Editor User Guide 554

V-2024.03
Appendix A: Commands
sdedr:define-gaussian-profile

Argument Description

lateral-function Optional. Specifies the lateral function. Possible values are "Erf",
"Eval", or "Gauss". For example:
"Erf" {"Factor" lateral-factor | "Length" length}
or:
"Eval" {eval-init eval-function}
or:
"Gauss" {"Factor" lateral-factor | "Length" length |
"StdDev" standard-deviation}
Argument type: STRING

lateral-factor Argument type: REAL

eval-init Argument type: STRING

eval-function Argument type: STRING

sdedr:define-gaussian-profile
This Scheme extension creates a definition of a Gaussian-function doping profile in the
mesh command file.
See Sentaurus™ Mesh User Guide, Defining Analytic Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-gaussian-profile definition-name species
"PeakPos" peak-position
{"PeakVal" peak-concentration | "Dose" dose}
{"ValueAtDepth" concentration-at-depth "Depth" depth |
"Length" diffusion-length | "StdDev" standard-deviation}
[lateral-function])

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

species Argument type: STRING

Sentaurus™ Structure Editor User Guide 555

V-2024.03
Appendix A: Commands
sdedr:define-gaussian-profile

Argument Description

peak-position Argument type: REAL

peak-concentration Argument type: REAL

dose Argument type: REAL

concentration-at-depth Argument type: REAL

depth Argument type: REAL

diffusion-length Argument type: REAL

standard-deviation Argument type: REAL

lateral-function Optional. Specifies the lateral function. Possible values are "Erf",
"Eval", or "Gauss". For example:
"Erf" {"Factor" lateral-factor | "Length" length}
or:
"Eval" {eval-init eval-function}
or:
"Gauss" {"Factor" lateral-factor | "Length" length |
"StdDev" standard-deviation}
Argument type: STRING

lateral-factor Argument type: REAL

length Argument type: REAL

eval-init Argument type: STRING

eval-function Argument type: STRING

Sentaurus™ Structure Editor User Guide 556

V-2024.03
Appendix A: Commands
sdedr:define-multibox-placement

sdedr:define-multibox-placement
This Scheme extension defines the placements part of a multibox definition.

Syntax
(sdedr:define-multibox-placement placement-name definition-name
refwindow-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

refwindow-name Argument type: STRING

Examples
(sdedr:define-multibox-placement "p1" "d1" "refwindow1")

Sentaurus™ Structure Editor User Guide 557

V-2024.03
Appendix A: Commands
sdedr:define-multibox-size

sdedr:define-multibox-size
This Scheme extension defines the definitions part of a multibox definition.

Syntax
(sdedr:define-multibox-size mbox-name max-x max-y [max-z]
min-x min-y [min-z] ratio-x ratio-y [ratio-z])

Returns
None

Arguments

Argument Description

mbox-name Argument type: STRING

max-x Argument type: REAL

max-y Argument type: REAL

max-z Optional. Argument type: REAL

min-x Argument type: REAL

min-y Argument type: REAL

min-z Optional. Argument type: REAL

ratio-x Argument type: REAL

ratio-y Argument type: REAL

ratio-z Optional. Argument type: REAL

Examples
(sdedr:define-multibox-size "multibox-2d" 10 10 1 1 2 2)
(sdedr:define-multibox-size "multibox-3d" 10 10 10 1 1 1 2 2 2)

Sentaurus™ Structure Editor User Guide 558

V-2024.03
Appendix A: Commands
sdedr:define-particle-profile

sdedr:define-particle-profile
This Scheme extension creates a particle doping profile in the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Particle Profiles, for descriptions of
arguments.

Syntax
(sdedr:define-particle-profile name file
["AutoScreeningFactor" auto-screening-factor]
["BoundaryExtension" boundary-extension]
["Divisions" divisions]
["DopingAssignment" doping-assignment]
["Normalization" normalization]
["NumberOfThreads" number-of-threads]
["ScreeningFactor" screening-factor]
["ScreeningScalingFactor" screening-scaling-factor]
["Species" species])

Returns
BOOLEAN

Arguments

Argument Description

name Argument type: STRING

file Argument type: STRING

auto-screening-factor Optional. Argument type: BOOLEAN

boundary-extension Optional. Argument type: REAL

divisions Optional. Argument type: INTEGER

doping-assignment Optional. Specifies the doping assignment. Options are "CIC" |

"NGP" | "Sano". Argument type: STRING

normalization Optional. Argument type: BOOLEAN

number-of-threads Optional. Argument type: INTEGER

screening-factor Optional. Argument type: REAL

screening-scaling-factor Optional. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 559

V-2024.03
Appendix A: Commands
sdedr:define-particle-profile-placement

Argument Description

species Optional. Argument type: STRING

sdedr:define-particle-profile-placement
This Scheme extension creates a placement for a particle profile definition in the mesh
command file.
See Sentaurus™ Mesh User Guide, Placing Particle Profiles, for descriptions of arguments.
Note:
Only "Replace" or "LocalReplace" can be set to true at the same time.

Syntax
(sdedr:define-particle-profile-placement placement-name
definition-name "EvalWindow" eval-window eval-window-type
["Replace" replace | "LocalReplace" local-replace])

Returns

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

eval-window Argument type: STRING

eval-window-type Specifies the type of evaluation window. Options are "region" |

"material" | "evalwin". Argument type: STRING

replace Optional. Argument type: BOOLEAN

local-replace Optional. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 560

V-2024.03
Appendix A: Commands
sdedr:define-refeval-window

sdedr:define-refeval-window
This Scheme extension defines a geometric region that can be used as a Ref/Eval window.
You can create multiple body shapes by listing multiple single shapes. (Choose Mesh >
Define Ref/Eval Window.)
The faces of the defined Ref/Eval windows are oriented. The face normal direction follows
the right-hand rule (for polygonal Ref/Eval windows, the vertex list must be
counterclockwise). In this case, the Ref/Eval windows are used in the
sdedr:define-analytical-profile-placement Scheme extension for reference. The
"Positive" and "Negative" arguments in this Scheme extension must be adjusted to the
Ref/Eval window normal direction.

Syntax
(sdedr:define-refeval-window rfwin-name {multi-shape | single-shape})

Returns
ENTITY of the ACIS body Ref/Eval window if it is created successfully; otherwise, #f if the
operation failed

Arguments

Argument Description

rfwin-name Specifies the name of a Ref/Eval window. Argument type: STRING

multi-shape Specifies a list of single shapes by using the format:

(list single-shape1 single-shape2 ... single-shapen)
Argument type: STRING

Sentaurus™ Structure Editor User Guide 561

V-2024.03
Appendix A: Commands
sdedr:define-refeval-window

Argument Description

single-shape Specifies a single body shape by using the format rfwin-type data, where:
• rfwin-type can be one of the following: "ComplexPolygon" | "Cuboid" |
"Line" | "Point" | "Polygon" | "Polyhedron" | "Rectangle".
• data can be one of the following: POSITION | POSITION LIST.
Note:
The rfwin-type object is not case sensitive.

For rfwin-type:
• If set to "ComplexPolygon", which is used for multiconnected polygons, that
is, polygons with internal doughnut holes, then data is a list of polygon
shapes where the first polygon given is the outer perimeter, and the
subsequent polygon shapes in the list represent internal holes.
• If set to "Cuboid", "Line", or "Rectangle", then data is POSITION
POSITION (the two opposite corners). The keywords "Cuboid" and
"Rectangle" are axis aligned.
• If set to "Point", then data is a position.
• If set to "Polygon", then data is a position list (the first and last positions
must be the same).
• If set to "Polyhedron", then data is a list of polygon definitions creating a
closed polyhedral solid from the union of the polygon faces.
Argument type: STRING

Examples
; Line
(sdedr:define-refeval-window "rfwin1" "Line" (position 0 0 0)
(position 1 0 0))

; Rectangle
(sdedr:define-refeval-window "rfwin2" "Rectangle" (position 0 -2 0)
(position 1 -1 0))

; Polygon
(sdedr:define-refeval-window "rfwin3" "Polygon" (list
(position 1 2 0.0) (position 0.75 2 0.0) (position 1 2.5 0.0)
(position 1.25 3 0.0) (position 1.5 3.5 0.0) (position 1.75 4 0.0)
(position 2 4.25 0.0) (position 2.25 4.5 0.0) (position 2.5 2 0.0)
(position 1.5 2 0.0) (position 1 2 0.0)))

; Cuboid
(sdedr:define-refeval-window "rfwin4" "Cuboid" (position 0 0 0)
(position 1 2 3))

; Multiconnected Polygon = ComplexPolygon

(sdedr:define-refeval-window "polygon-multiconnected" "ComplexPolygon"
(list
(list (position 0 0 0) (position 0 3 0) (position 3 3 0)
(position 3 0 0))

Sentaurus™ Structure Editor User Guide 562

V-2024.03
Appendix A: Commands
sdedr:define-refeval-window

(list (position 1 1 0) (position 1 2 0) (position 2 2 0)

(position 2 1 0))))

; Polyhedron
(sdedr:define-refeval-window "polyhedron_shape" "Polyhedron" (list
(list (position 0 0 0) (position 0 3 0) (position 3 3 0)
(position 3 0 0))
(list (position 0 0 3) (position 0 3 3) (position 3 3 3)
(position 3 0 3))
(list (position 0 0 0) (position 0 0 3) (position 3 0 3)
(position 3 0 0))
(list (position 0 3 0) (position 0 3 3) (position 3 3 3)
(position 3 3 0))
(list (position 0 0 0) (position 0 3 0) (position 0 3 3)
(position 0 0 3))
(list (position 3 0 0) (position 3 3 0) (position 3 3 3)
(position 3 0 3))))

; Multiple body
(sdedr:define-refeval-window "multiple_body" (list
(list "Point" (position 0.15 0.25 0))
(list "Rectangle" (position 0.1 0.2 0) (position 0.3 0.4 0))
(list "Line" (position 1.5 1.6 0) (position 1.7 1.8 0))
(list "Polygon" (list (position 0 0 0) (position 0.1 0.3 0)
(position 0.2 0.4 0) (position 0.3 0.2 0) (position 0.2 0.0 0)
(position 0.1 -0.1 0) (position 0 0 0)))
(list "Cuboid" (position 3.1 3.2 3.3) (position 3.4 3.5 3.6))))

Sentaurus™ Structure Editor User Guide 563

V-2024.03
Appendix A: Commands
sdedr:define-refinement-function

sdedr:define-refinement-function
This Scheme extension adds a refinement function to the specified refinement.
See Sentaurus™ Mesh User Guide, Defining Refinement Regions, for descriptions of
arguments.

Syntax
(sdedr:define-refinement-function definition-name function-name
{"MaxLenInt" mat-reg mat-reg value [factor] ["DoubleSide"]
["UseRegionNames"] |
"MaxInterval" "Variable" dopant-name "Cmin" cmin "Cmax" cmax
["Scaling" scaling] ["TargetLength" targetLength] ["Rolloff"] |
"MaxGradient" value | "MaxTransDiff" value})

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

function-name Specifies the name of the function to be used for refinement.

Argument type: STRING

mat-reg Specifies the material name or region name defining the interface.
Argument type: STRING

value Argument type: REAL

factor Optional. Argument type: REAL

"DoubleSide" Optional. Argument type: STRING

"UseRegionNames" Optional. Argument type: STRING

dopant-name Argument type: STRING

cmin Argument type: REAL | REAL LIST

cmax Argument type: REAL | REAL LIST

scaling Argument type: REAL

Sentaurus™ Structure Editor User Guide 564

V-2024.03
Appendix A: Commands
sdedr:define-refinement-material

Argument Description

targetLength Optional. Argument type: REAL

"Rolloff" Optional. Argument type: STRING

sdedr:define-refinement-material
This Scheme extension defines the placements information for a materialwise refinement.

Syntax
(sdedr:define-refinement-material placement-name definition-name
material-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

material-name Argument type: DATEXMAT

Examples
(sdedr:define-refinement-material "p1" "d1" "Silicon")

Sentaurus™ Structure Editor User Guide 565

V-2024.03
Appendix A: Commands
sdedr:define-refinement-placement

sdedr:define-refinement-placement
This Scheme extension creates a refinement placement in the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Refinement Regions, for descriptions of
arguments.

Syntax
(sdedr:define-refinement-placement refinement-name definition-name
ref-eval-window)

Returns
None

Arguments

Argument Description

refinement-name Argument type: STRING

definition-name Argument type: STRING

ref-eval-window Specifies either the name of a defined refinement window or a list of Ref/Eval
windows, materials, and regions in the form:
(list "window" "refevalwin1" "window" "refevalwindow2" ...
"material" "material1" ... "region" "region1" ...)
If a list is specified, then the refinement is performed at the intersection of all
the criteria.
Argument type: STRING | STRING LIST

Sentaurus™ Structure Editor User Guide 566

V-2024.03
Appendix A: Commands
sdedr:define-refinement-region

sdedr:define-refinement-region
This Scheme extension defines the placements information for a regionwise refinement.

Syntax
(sdedr:define-refinement-region placement-name definition-name
region-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

region-name Argument type: STRING

Examples
(sdedr:define-refinement-region "p1" "d1" "Region_1")

Sentaurus™ Structure Editor User Guide 567

V-2024.03
Appendix A: Commands
sdedr:define-refinement-size

sdedr:define-refinement-size
This Scheme extension creates a refinement size definition in the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Refinement Regions, for descriptions of
arguments.

Syntax
(sdedr:define-refinement-size definition-name max-x [max-y] [max-z]
min-x [min-y] [min-z])

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

max-x Argument type: REAL

max-y Optional. Argument type: REAL

max-z Optional. Argument type: REAL

min-x Argument type: REAL

min-y Optional. Argument type: REAL

min-z Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 568

V-2024.03
Appendix A: Commands
sdedr:define-submesh

sdedr:define-submesh
This Scheme extension creates a 1D external profile in the mesh command file.
See Sentaurus™ Mesh User Guide, Defining Submeshes, for descriptions of arguments.

Syntax
(sdedr:define-submesh definition-name geofile-name
file1 mode1 file2 mode2 ... filen moden
[ (list field1 field2 ... fieldn) ])

or:
(sdedr:define-submesh definition-name geofile-name
file1 mode1 file2 mode2 ... filen moden
[ (list field1 conc1 field2 conc2 ... fieldn concn) ])

Returns
None

Arguments

Argument Description

definition-name Argument type: STRING

geofile-name Argument type: STRING

file[1...n] Argument type: STRING | STRING LIST

mode[1...n] Options are "r" | "i" | "o" | "w" | "w=outfile-name".

Argument type: STRING

field[1...n] Optional. Argument type: STRING | STRING LIST

conc[1...n] Optional. Argument type: REAL | REAL LIST

Sentaurus™ Structure Editor User Guide 569

V-2024.03
Appendix A: Commands
sdedr:define-submesh-placement

sdedr:define-submesh-placement
This Scheme extension creates a submesh placement in the mesh command file.
To rotate, shift, or reflect submesh placements, use the Scheme extension
sdedr:transform-submesh-placement.

See Sentaurus™ Mesh User Guide, Placements Section, for descriptions of arguments.

Syntax
(sdedr:define-submesh-placement placement-name definition-name
evaluation-window
["PlacementType" eval-window-type]
["DecayLength" decay-length | "GaussDecayLength" gauss-decay-length]
["Replace" | "NoReplace" | "LocalReplace"]
["IgnoreMat"] ["MatchMaterialType"])

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

definition-name Argument type: STRING

evaluation-window Specifies the name of a region, material, or Ref/Eval window, depending

on eval-window-type. Argument type: STRING

eval-window-type Optional. Specifies the type of evaluation window. Options are

"evalwin" | "material" | "region". The default is "evalwin".
Argument type: STRING

decay-length Optional. Argument type: REAL

gauss-decay-length Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 570

V-2024.03
Appendix A: Commands
sdedr:del-selected-drentity

sdedr:del-selected-drentity
This Scheme extension deletes a specified entity or list of entities.

Syntax
(sdedr:del-selected-drentity entity | entity-list)

Returns
None

Arguments

Argument Description

entity Specifies the name of an entity to be deleted. Argument type: ENTITY

entity-list Specifies a list of entity names to be deleted. Argument type: ENTITY LIST

sdedr:delete-multibox-placement
This Scheme extension deletes the specified multibox placement from the placements part
of the command file.

Syntax
(sdedr:delete-multibox-placement placement-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

Examples
(sdedr:delete-multibox-placement "multibox_1")

Sentaurus™ Structure Editor User Guide 571

V-2024.03
Appendix A: Commands
sdedr:delete-profile-placement

sdedr:delete-profile-placement
This Scheme extension deletes the specified placement.

Syntax
(sdedr:delete-profile-placement placement-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

sdedr:delete-refeval-window
This Scheme extension deletes a Ref/Eval window or list of Ref/Eval windows.

Syntax
(sdedr:delete-refeval-window bodies)

Returns
None

Arguments

Argument Description

bodies Specifies either a Ref/Eval window or a list of Ref/Eval windows to be deleted.

Argument type: BODY | BODY LIST

Examples
(sdedr:define-refeval-window "rw1" "Rectangle" (position 0 0 0)
(position 1 1 0))
(sdedr:define-refeval-window "rw2" "Rectangle" (position 1 0 0)
(position 2 1 0))
(sdedr:define-refeval-window "rw3" "Rectangle" (position 2 0 0)
(position 3 1 0))
(sdedr:delete-refeval-window "rw1") ; or equivalently

Sentaurus™ Structure Editor User Guide 572

V-2024.03
Appendix A: Commands
sdedr:delete-refinement-placement

(sdedr:delete-refeval-window (list "rw1"))

(sdedr:delete-refeval-window (list "rw2" "rw3"))
; Refinement/evaluation windows can also be deleted, by selecting
; them and using (sde:selected-refeval-windows)
(sdedr:delete-refeval-window (sde:selected-refeval-windows))

sdedr:delete-refinement-placement
This Scheme extension deletes the specified refinement placement from the Placements
section of the command file.

Syntax
(sdedr:delete-refinement-placement placement-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

Examples
(sdedr:delete-refinement-placement "refinement_1")

Sentaurus™ Structure Editor User Guide 573

V-2024.03
Appendix A: Commands
sdedr:delete-submesh-placement

sdedr:delete-submesh-placement
This Scheme extension deletes the specified placement.

Syntax
(sdedr:delete-submesh-placement placement-name)

Returns
None

Arguments

Argument Description

placement-name Argument type: STRING

sdedr:get-cmdprecision
This Scheme extension returns the precision value of the mesh command file. The default
value is 12.

Syntax
(sdedr:get-cmdprecision)

Returns
INTEGER

sdedr:get-definition-list
This Scheme extension returns a list of definition names of one of the placement types.

Syntax
(sdedr:get-definition-list "multibox" | "profile" | "refinement")

Returns
STRING LIST

Sentaurus™ Structure Editor User Guide 574

V-2024.03
Appendix A: Commands
sdedr:get-placement-list

sdedr:get-placement-list
This Scheme extension returns a list of placement names of one of the placement types.

Syntax
(sdedr:get-placement-list "multibox" | "profile" | "refinement")

Returns
STRING LIST

sdedr:hide-mbox
This Scheme extension hides the specified multiboxes.

Syntax
(sdedr:hide-mbox mbox-list)

Returns
None

Arguments

Argument Description

mbox-list Specifies a list of multiboxes to hide. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 575

V-2024.03
Appendix A: Commands
sdedr:hide-profile

sdedr:hide-profile
This Scheme extension hides the specified analytic doping profiles.

Syntax
(sdedr:hide-profile profile-list)

Returns
None

Arguments

Argument Description

profile-list Specifies a list of doping profiles to hide. Argument type: STRING LIST

sdedr:hide-refinement
This Scheme extension hides the specified refinements.

Syntax
(sdedr:hide-refinement refinement-list)

Returns
None

Arguments

Argument Description

refinement-list Specifies a list of refinements to hide. Argument type: STRING LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 4 10 0) (position 6 12 0)
"PolySilicon" "region_2")
(sdedr:define-refinement-size "ref1" 2 2 2 1 1 1)
(sdedr:define-refinement-region "ref1" "ref1" "region_1")

Sentaurus™ Structure Editor User Guide 576

V-2024.03
Appendix A: Commands
sdedr:hide-rewin

(sdedr:show-refinement "ref1")
(sdedr:hide-refinement "ref1")

sdedr:hide-rewin
This Scheme extension hides the specified Ref/Eval window or windows.

Syntax
(sdedr:hide-rewin rewin-list)

Returns
None

Arguments

Argument Description

rewin-list Specifies a Ref/Eval window or a list of Ref/Eval windows to hide.

Argument type: STRING LIST

Examples
(sdedr:define-refeval-window "N1" "Rectangle" (position 0 0 0)
(position 1 1 0))
(sdedr:define-refeval-window "N2" "Rectangle" (position 2 0 0)
(position 3 1 0))
(sdedr:define-refeval-window "N3" "Rectangle" (position 4 0 0)
(position 5 1 0))
(sdedr:define-refeval-window "N4" "Rectangle" (position 0 2 0)
(position 1 3 0))
(sdedr:define-refeval-window "N5" "Rectangle" (position 2 2 0)
(position 3 3 0))
(sdedr:define-refeval-window "N6" "Rectangle" (position 4 2 0)
(position 5 3 0))
(sdedr:define-refeval-window "N7" "Rectangle" (position 0 4 0)
(position 1 5 0))
(sdedr:define-refeval-window "N8" "Rectangle" (position 2 4 0)
(position 3 5 0))
(sdedr:define-refeval-window "N9" "Rectangle" (position 4 4 0)
(position 5 5 0))
(sdedr:hide-rewin (list "N1" "N2" "N3" "N4" "N5" "N6" "N7" "N8" "N9"))
(sdedr:show-rewin "N1")
(sdedr:show-rewin (list "N2" "N3" "N4"))

Sentaurus™ Structure Editor User Guide 577

V-2024.03
Appendix A: Commands
sdedr:offset-block

sdedr:offset-block
This Scheme extension generates a new offsetting block inside the Offsetting section of
the mesh command file.

Syntax
(sdedr:offset-block "material" material "maxlevel" maxlevel)

(sdedr:offset-block "region" region "maxlevel" maxlevel)

Returns
None

Arguments

Argument Description

material Argument type: DATEXMAT

maxlevel Argument type: INTEGER

region Argument type: STRING

Sentaurus™ Structure Editor User Guide 578

V-2024.03
Appendix A: Commands
sdedr:offset-interface

sdedr:offset-interface
This Scheme extension generates a new offsetting interface block inside the Offsetting
section of the mesh command file.

Syntax
(sdedr:offset-interface "region" region1 region2
"hlocal" hlocal "factor" factor "window" x1 y1 z1 x2 y2 z2)

(sdedr:offset-interface "material" material1 material2

"hlocal" hlocal "factor" factor "window" x1 y1 z1 x2 y2 z2)

Returns
None

Arguments

Argument Description

region Argument type: STRING

material Argument type: DATEXMAT

hlocal Argument type: REAL

factor Argument type: REAL

x1 y1 z1 x2 y2 z2 Argument type: REAL

Sentaurus™ Structure Editor User Guide 579

V-2024.03
Appendix A: Commands
sdedr:read-cmd-file

sdedr:read-cmd-file
This Scheme extension parses a specified mesh command file and initializes the
doping-related and refinement-related data structures in Sentaurus Structure Editor. The
command file entities can be visualized using the Placements Viewer.
The command file entities can be manipulated by using the sdedr Scheme extensions or the
Sentaurus Structure Editor GUI menus.

Syntax
(sdedr:read-cmd-file cmd-file)

Returns
None

Arguments

Argument Description

cmd-file Specifies the name of a mesh command file to load. Argument type: STRING

Sentaurus™ Structure Editor User Guide 580

V-2024.03
Appendix A: Commands
sdedr:redefine-refeval-window

sdedr:redefine-refeval-window
This Scheme extension redefines a previously defined geometric Ref/Eval window. It is used
mainly in renaming existing Ref/Eval windows.

Syntax
(sdedr:redefine-refeval-window rfwin-name new-rfwin-name
rfwin-type data)

Returns
ENTITY ID of the redefined ACIS body Ref/Eval window; otherwise, #f if the operation fails

Arguments

Argument Description

rfwin-name Specifies the name of a Ref/Eval window. Argument type: STRING

new-rfwin-name Specifies the new name of a Ref/Eval window. Argument type: STRING

rfwin-type Specifies the type of Ref/Eval window. Options are "Cuboid" | "Line" |
"Point" | "Polygon" | "Rectangle".
For rfwin-type:
• If set to "Cuboid", "Line", or "Rectangle", then data is POSITION
POSITION (the two opposite corners).
• If set to "Point", then data is a position.
• If set to "Polygon", then data is a position list (the first and last positions
must be the same).
Argument type: STRING

data Specifies the data for a Ref/Eval window.

Argument type: POSITION | POSITION LIST

Sentaurus™ Structure Editor User Guide 581

V-2024.03
Appendix A: Commands
sdedr:refine-box

sdedr:refine-box
This Scheme extension defines a refinement window–style refinement box.
It defines a refinement rectangle in two dimensions and a refinement cuboid in three
dimensions.

Syntax
(sdedr:refine-box refinement-name pos-min pos-max spacing)

Returns
None

Arguments

Argument Description

refinement-name Specifies the name of a refinement box. Argument type: STRING

pos-min Specifies the minimum coordinate of the box. Argument type: POSITION

pos-max Specifies the maximum coordinate of the box. Argument type: POSITION

spacing Specifies either a single value, which denotes the mesh spacing in all
directions, or a list of three values for spacing in each direction.
Argument type: REAL | REAL REAL REAL

Sentaurus™ Structure Editor User Guide 582

V-2024.03
Appendix A: Commands
sdedr:refine-doping

sdedr:refine-doping
This Scheme extension adds a refinement based on doping
(field:DopingConcentration) in an entire region or material.

Syntax
(sdedr:refine-doping spacing | sx sy sz
["MaxTransDiff" asinhdiff]
["material" material-name | "region" region-name])

Returns
None

Arguments

Argument Description

spacing Specifies either a single value, which denotes the mesh spacing in all
directions, or a list of three values for spacing in each direction.
Argument type: REAL | REAL REAL REAL

sx sy sz Argument type: REAL REAL REAL

asinhdiff Optional. Specifies the value for "MaxTransDiff". If you do not specify any
value, then 1.0 is used. Argument type: REAL

material-name Optional. Specifies the name of the material in which the refinement is
performed. If you do not specify any value, then material = "Silicon" is
used. Argument type: STRING

region-name Optional. Specifies the name of a region in which the refinement is performed.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 583

V-2024.03
Appendix A: Commands
sdedr:refine-interface

sdedr:refine-interface
This Scheme extension creates a refined mesh at an interface.
Note:
Following the convention used in Sentaurus Structure Editor and Sentaurus
Mesh, but unlike Sentaurus Process, the refinement is placed only in region r1 or
material m1, unless you specify a window, in which case, the placement is
performed in the entire window.

Syntax
(sdedr:refine-interface "region" r1 r2 | "material" m1 m2
"hlocal" spacing
["factor" factor] ["window" x1 y1 z1 x2 y2 z2])

Returns
None

Arguments

Argument Description

"region" r1 r2 Specifies a region interface, where r1 specifies the first region and r2
specifies the second region. Argument type: STRING

"material" m1 m2 Specifies a material interface, where m1 specifies the first material and m2
specifies the second material. Argument type: STRING

spacing Specifies the initial normal spacing at the interface (scalar).

Argument type: REAL

factor Optional. Determines how fast the spacing increases. The default is 2.0.
Argument type: REAL

x1 y1 z1 x2 y2 z2 Optional. Define the window corners if the placement should be restricted to

a window. The default is no window; placement in r1 or m1.
Argument type: REAL

Sentaurus™ Structure Editor User Guide 584

V-2024.03
Appendix A: Commands
sdedr:set-cmdprecision

sdedr:set-cmdprecision
This Scheme extension sets the precision value of the mesh command file. The number of
digits that is written in the mesh command file for Ref/Eval window coordinates can be
controlled. The vertex coordinates of the Ref/Eval windows that are written to the mesh
command file can be chopped and rounded.
Rounding the vertex coordinates of the Ref/Eval objects might be needed, for example,
when a rigid body rotation is performed on a Ref/Eval window, which will introduce some
rounding errors.
The default is 12.

Syntax
(sdedr:set-cmdprecision cmdprecision)

Returns
None

Arguments

Argument Description

cmdprecision Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 585

V-2024.03
Appendix A: Commands
sdedr:set-title

sdedr:set-title
This Scheme extension sets the title of the command file.
Information is written to the Title section of the command file. If this Scheme extension is
not called explicitly, then the title of the command file is set to Untitled.

Syntax
(sdedr:set-title cmd-file-title)

Returns
None

Arguments

Argument Description

cmd-file-title Specifies the title of the command file. Argument type: STRING

sdedr:show-mbox
This Scheme extension displays the specified multiboxes.

Syntax
(sdedr:show-mbox mbox-list)

Returns
None

Arguments

Argument Description

mbox-list Specifies a list of multiboxes to be displayed. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 586

V-2024.03
Appendix A: Commands
sdedr:show-profile

sdedr:show-profile
This Scheme extension displays the specified analytic doping profiles.

Syntax
(sdedr:show-profile profile-list)

Returns
None

Arguments

Argument Description

profile-list Specifies a list of doping profiles to be displayed. Argument type: STRING LIST

sdedr:show-refinement
This Scheme extension displays the specified refinements.

Syntax
(sdedr:show-refinement refinement-list)

Returns
None

Arguments

Argument Description

refinement-list Specifies a list of refinements to be displayed. Argument type: STRING LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0) "Silicon"
"region_1")
(sdegeo:create-rectangle (position 4 10 0) (position 6 12 0)
"PolySilicon" "region_2")
(sdedr:define-refinement-size "ref1" 2 2 2 1 1 1)
(sdedr:define-refinement-region "ref1" "ref1" "region_1")
(sdedr:show-refinement "ref1")

Sentaurus™ Structure Editor User Guide 587

V-2024.03
Appendix A: Commands
sdedr:show-rewin

sdedr:show-rewin
This Scheme extension displays the specified Ref/Eval window or windows.

Syntax
(sdedr:show-rewin rewin-list)

Returns
None

Arguments

Argument Description

rewin-list Specifies a Ref/Eval window or a list of Ref/Eval windows to be displayed.

Argument type: STRING LIST

Examples
(sdedr:define-refeval-window "N1" "Rectangle" (position 0 0 0)
(position 1 1 0))
(sdedr:define-refeval-window "N2" "Rectangle" (position 2 0 0)
(position 3 1 0))
(sdedr:define-refeval-window "N3" "Rectangle" (position 4 0 0)
(position 5 1 0))
(sdedr:define-refeval-window "N4" "Rectangle" (position 0 2 0)
(position 1 3 0))
(sdedr:define-refeval-window "N5" "Rectangle" (position 2 2 0)
(position 3 3 0))
(sdedr:define-refeval-window "N6" "Rectangle" (position 4 2 0)
(position 5 3 0))
(sdedr:define-refeval-window "N7" "Rectangle" (position 0 4 0)
(position 1 5 0))
(sdedr:define-refeval-window "N8" "Rectangle" (position 2 4 0)
(position 3 5 0))
(sdedr:define-refeval-window "N9" "Rectangle" (position 4 4 0)
(position 5 5 0))
(sdedr:hide-rewin (list "N1" "N2" "N3" "N4" "N5" "N6" "N7" "N8" "N9"))
(sdedr:show-rewin "N1")
(sdedr:show-rewin (list "N2" "N3" "N4"))

Sentaurus™ Structure Editor User Guide 588

V-2024.03
Appendix A: Commands
sdedr:transform-submesh-placement

sdedr:transform-submesh-placement
This Scheme extension defines a transform operation, or a series of transform operations,
applied to the named external profile placement. The operation or series of operations is
appended to any existing series of operations already applied to the placement.
You can specify any number of operations in this Scheme extension, and you can this
Scheme extension any number of times. Operations are performed in the order of calls to
this extension and in the order listed within each call.
The Scheme extension sdedr:clear-submesh-placement-transform is used to clear the
list of transformation operations for a given external profile placement.

Syntax
(sdedr:transform-submesh-placement placement-name
[<transform1> <transform2> ... <transformN>])

Returns
None

Arguments

Argument Description

placement-name Specifies the name of an external profile placement. Argument type: STRING

<transform1>... Specifies any of the following transformations:

<transformN> • "Reflect" axis
• "Rotation" angle axis
• "ShiftVector" (gvector x y z)
For these transformations:
• axis specifies the axis of the transformation. Options are "X" | "Y" |
"Z". Argument type: STRING
• angle specifies the angle of the transformation. Argument type: REAL
• x, y, z specify the values of the gvector. Argument type: REAL

Sentaurus™ Structure Editor User Guide 589

V-2024.03
Appendix A: Commands
sdedr:write-cmd-file

sdedr:write-cmd-file
This Scheme extension writes all doping-related and refinement-related data to the
specified mesh command file. The command file can be used during a subsequent meshing
action, together with the generated boundary file. By using a command file, you can control,
for example, local mesh refinements during meshing.

Syntax
(sdedr:write-cmd-file cmd-file)

Returns
None

Arguments

Argument Description

cmd-file Specifies the name of a mesh command file. Argument type: STRING

sdedr:write-scaled-cmd-file
This Scheme extension writes all doping-related and refinement-related data to the
specified mesh command file (after scaling some dimensions), which can be used during a
subsequent meshing action, together with the generated boundary file. By using a command
file, you can control, for example, local mesh refinements, during meshing.

Syntax
(sdedr:write-scaled-cmd-file cmd-file scaling-factor)

Returns
None

Arguments

Argument Description

cmd-file Specifies the name of a mesh command file. Argument type: STRING

scaling-factor Specifies a scaling factor. All position and length parameters are multiplied by
this factor. All gradient parameters are divided by this factor.
Argument type: REAL

Sentaurus™ Structure Editor User Guide 590

V-2024.03
Appendix A: Commands
sdeepi:create-layerstack

sdeepi:create-layerstack
This Scheme extension creates a planar layer stack structure from the CSV input data.
If the global Scheme variable sdeepi:use-global-vars is set to #t (default: #f), then the
global and layer variables of the sdeepi Scheme extensions also are initialized as global
Scheme variables and can be used for subsequent computations.

Syntax
(sdeepi:create-layerstack file-name)

Returns
None

Arguments

Argument Description

file-name Specifies the name of a CSV file. Argument type: STRING

Sentaurus™ Structure Editor User Guide 591

V-2024.03
Appendix A: Commands
sdeepi:publish-global-vars

sdeepi:publish-global-vars
This Scheme extension defines the global and layer variables of the sdeepi Scheme
extensions as global Scheme variables.
If you call this Scheme extension with a #t argument, then all the published global and layer
variables are available as global Scheme variables after the epi layers are created using the
sdeepi:create-layerstack Scheme extension. By default, to avoid overwriting existing
Scheme variables, no layer stack variables are retained after the stack creation.

Syntax
(sdeepi:publish-global-vars make-global-vars)

Returns
None

Arguments

Argument Description

make-global-vars Specifies whether to define the global and layer variables of sdeepi Scheme
extensions as global Scheme variables. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 592

V-2024.03
Appendix A: Commands
sdeepi:scm

sdeepi:scm
This Scheme extension generates a Scheme script for creating a planar layer stack
structure from CSV input data. This can be useful to investigate the layer stack creation in
more detail. The Scheme script is named like filename but with .scm as the file extension
unless it is specified explicitly using the optional output-filename argument.

Syntax
(sdeepi:scm filename [output-filename])

Returns
None

Arguments

Argument Description

filename Specifies the name of a Scheme script. Argument type: STRING

output-filename Optional. Specifies the name of an output script. Argument type: STRING

Sentaurus™ Structure Editor User Guide 593

V-2024.03
Appendix A: Commands
sdeepi:tcl

sdeepi:tcl
This Scheme extension creates a Tcl script that contains all layer stack–specific data from
the CSV input file in the form of Tcl variables. This file can be easily sourced in Tcl
preprocessing blocks or any other Tcl interpreter such as Sentaurus Visual or Inspect to
access layer data (see Global Section on page 291 for an example).
The Tcl file is named like filename but with .tcl as the file extension unless it is specified
explicitly using the optional output-filename argument.

Syntax
(sdeepi:tcl filename [output-filename])

Returns
None

Arguments

Argument Description

filename Specifies the name of a Tcl file. Argument type: STRING

output-filename Optional. Specifies the name of an output file. Argument type: STRING

Sentaurus™ Structure Editor User Guide 594

V-2024.03
Appendix A: Commands
sdegeo:2d-cut

sdegeo:2d-cut
This Scheme extension extracts a 2D rectangular part from a 2D device.

Syntax
(sdegeo:2d-cut p1 p2)

Returns
None

Arguments

Argument Description

p1 Specifies one of the opposite corners of the rectangle.

Argument type: POSITION

p2 Specifies the other opposite corner of the rectangle.

Argument type: POSITION

Sentaurus™ Structure Editor User Guide 595

V-2024.03
Appendix A: Commands
sdegeo:3d-cut

sdegeo:3d-cut
This Scheme extension cuts a 2D slice from a 3D device. It transfers 3D face contacts to 2D
edge contacts.

Syntax
(sdegeo:3d-cut base-position normal-vector
[tr-xy] [tr-record] [tr-axisaligned])

Returns
None

Arguments

Argument Description

base-position Specifies the base point used to define the cutplane.

Argument type: POSITION

normal-vector Specifies the normal vector to the cutplane. Argument type: GVECTOR

tr-xy Optional. Specifies whether to transform the 2D cut to the xy plane. This is
needed when the 2D cut is to be meshed. The default is #f.
Argument type: BOOLEAN

tr-record Optional. Specifies whether to record the transform (rotation and translation)
that transforms the 2D cut on the xy plane. The default is #f.
Argument type: BOOLEAN

tr-axisaligned Optional. Specifies whether to trigger new transformation rules for

axis-aligned cuts. If the new transformation rule is applied, then the
positioning of the 2D cut can be calculated explicitly following the rules in
Table 41. The default is #f. Argument type: BOOLEAN

Description
You can use the sde:tr-get Scheme extension to return the rotation (3 × 3 matrix) and
translation (vector) components of the transform (see sde:tr-get on page 528).
The sdegeo:3d-cut Scheme extension always creates a well-defined 2D model. If the
original 3D model contains multiple touching faces at the cut position in the cutplane
(material or region interfaces), then the direction of the normal vector (specified in the
argument list) defines which regions to keep in the 2D model.

Sentaurus™ Structure Editor User Guide 596

V-2024.03
Appendix A: Commands
sdegeo:3d-cut

The 2D cut will contain only those faces that are visible from the normal plane direction in
the 3D model. In this way, the outcome of the sdegeo:3d-cut operation is always well
defined, and the 2D cut does not contain overlapping faces. If the 2D sheet bodies in the 2D
cut contain multiple faces, then these faces are merged to one face.

Transformation Rules for Axis-Aligned Cuts

The model is placed such that the minimum bounding box position (lower-left corner) is the
same as the minimum bounding box position of the 3D model at the cutplane position. The
axis-aligned transformation rule determines which coordinates to use for xmin and ymin for
the 2D cut from the global x,y,z bounding box minimum.
Table 41 Transformation rules for axis-aligned cuts

Cutplane normal New 2D coordinate axes (x, y) with respect to global coordinate system

( 1, 0, 0 ) (0,1,0) (0,0,1)

(-1, 0, 0 ) (0,1,0) (0,0,1)

( 0, 1, 0 ) (1,0,0) (0,0,1)

( 0, -1, 0 ) (1,0,0) (0,0,1)

( 0, 0, 1 ) (1,0,0) (0,1,0)

( 0, 0, -1 ) (1,0,0) (0,1,0)

Note:
The + and – face normal directions are not distinguished, so the (1,0,0) cutplane
normal generates the same result as the (-1,0,0) normal.

The transformation rules for axis-aligned cuts are:

• If the gvector is parallel to the x-axis, then the 2D cut x-axis is the global y-axis, and the
2D cut y-axis is the global z-axis. The global bounding box minimum coordinates bbymin
and bbzmin are the minimum coordinates of the 2D cut: xmin = bbymin, ymin =
bbzmin.

• If the gvector is parallel to the y-axis, then the 2D cut x-axis is the global x-axis, and the
2D cut y-axis is the global z-axis. The global bounding box minimum coordinates bbxmin
and bbzmin are the minimum coordinates of the 2D cut: xmin = bbxmin, ymin =
bbzmin.

• If the gvector is parallel to the z-axis, then the 2D cut x-axis is the global x-axis, and the
2D cut y-axis is the global y-axis. The global bounding box minimum coordinates bbxmin

Sentaurus™ Structure Editor User Guide 597

V-2024.03
Appendix A: Commands
sdegeo:align-horizontal

and bbymin are the minimum coordinates of the 2D cut: xmin = bbxmin, ymin =
bbymin.

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0) "Silicon"
"region_1")
(sdegeo:define-contact-set "cstop" 4 (color:rgb 1 0 0) "##")
(sdegeo:define-contact-set "csbottom-middle" 4 (color:rgb 1 1 0) "||")
(sdegeo:set-contact (find-edge-id (position 5 10 0)) "cstop")
(sdegeo:insert-vertex (position 3 0 0))
(sdegeo:insert-vertex (position 7 0 0))
(sdegeo:set-current-contact-set "csbottom-middle")
(sdegeo:set-contact (find-edge-id (position 5 0 0)) "csbottom-middle")
; 2D model containing edge contacts
(sdegeo:extrude (find-face-id (position 5 5 0)) 6)
; 3D model containing face contacts
(sdegeo:3d-cut (position 5 0 2) (gvector 0 0 1))
; 2D model containing edge contacts

sdegeo:align-horizontal
This Scheme extension aligns the specified vertices to a horizontal line.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:align-horizontal vertex-list align-position)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

align-position Specifies the position (y-coordinate) of the horizontal line.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 598

V-2024.03
Appendix A: Commands
sdegeo:align-horizontal-aut

sdegeo:align-horizontal-aut
This Scheme extension aligns the specified vertices to a horizontal line. The align position
(y-coordinate) of the line is defined using the average y-coordinate of the specified vertices,
which is calculated automatically.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:align-horizontal-aut vertex-list)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

Sentaurus™ Structure Editor User Guide 599

V-2024.03
Appendix A: Commands
sdegeo:align-to-line

sdegeo:align-to-line
This Scheme extension aligns the specified vertices to a line.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:align-to-line vertex-list pos1 pos2)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

pos1, pos2 Specify the two points of the line. The points must lie on the same work plane
as the listed vertices. The vertices are projected on to the specified line.
Argument type: POSITION

Sentaurus™ Structure Editor User Guide 600

V-2024.03
Appendix A: Commands
sdegeo:align-vertical

sdegeo:align-vertical
This Scheme extension aligns the specified vertices to a vertical line.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:align-vertical vertex-list align-position)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

align-position Specifies the new position (x-coordinate) of the vertical line.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 601

V-2024.03
Appendix A: Commands
sdegeo:align-vertical-aut

sdegeo:align-vertical-aut
This Scheme extension aligns the specified vertices to a vertical line. The align position
(x-coordinate) of the line is defined using the average x-coordinate of the specified vertices,
which is calculated automatically.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:align-vertical-aut vertex-list)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

Sentaurus™ Structure Editor User Guide 602

V-2024.03
Appendix A: Commands
sdegeo:average-edge-length

sdegeo:average-edge-length
This Scheme extension computes the length of each edge in the list and returns the average
edge length.

Syntax
(sdegeo:average-edge-length edge-list)

Returns
REAL

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "AB")
(sdegeo:create-rectangle (position 0 0 0) (position 2 2 0) "Silicon"
"region_1")
(sdegeo:create-circle (position 1 2 0) 1 "Silicon" "region_2")
(define elist (entity:edges (get-body-list)))
(sdegeo:average-edge-length elist)

Sentaurus™ Structure Editor User Guide 603

V-2024.03
Appendix A: Commands
sdegeo:body-trim

sdegeo:body-trim
This Scheme extension trims the model to the specified box. All parts of the geometric
bodies that lie outside of the specified box are removed.

Syntax
(sdegeo:body-trim x0 y0 z0 x1 y1 z1)

Returns
None

Arguments

Argument Description

x0 Argument type: REAL

y0 Argument type: REAL

z0 Argument type: REAL

x1 Argument type: REAL

y1 Argument type: REAL

z1 Argument type: REAL

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 5) (position 10 10 10)
"Silicon" "x1")
(sdegeo:create-cuboid (position 0 0 10) (position 10 10 11)
"PolySilicon" "x2")
(sdegeo:create-cuboid (position 2 2 11) (position 8 8 14) "Copper"
"x3")
(sdegeo:create-cylinder (position 5 5 14) (position 5 5 18) 3 "Silver"
"x4")
(sdegeo:body-trim 5 5 5 20 20 20)

Sentaurus™ Structure Editor User Guide 604

V-2024.03
Appendix A: Commands
sdegeo:bool-intersect

sdegeo:bool-intersect
This Scheme extension performs a Boolean intersection operation, that is, it intersects the
first body from the specified body list with the rest of the bodies from the list. The resulting
body inherits the DATEX material attribute from the first body. Similarly, the region-name
attribute is inherited from the first entity in the body list.
This Scheme extension applies to both 2D and 3D bodies.
If the specified body list contains empty bodies, then the Scheme extension returns #f.
If the result of the Boolean operation is an empty body, then the empty body is removed from
the entity list, and #t is returned.

Syntax
(sdegeo:bool-intersect body-list)

Returns
ENTITY | BOOLEAN

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "XX")
(define b1 (sdegeo:create-rectangle (position 0 0 0)
(position 10 10 0) "Silicon" "region_1"))
(define b2 (sdegeo:create-rectangle (position 5 5 0)
(position 12 12 0) "PolySilicon" "region_2"))
(sdegeo:bool-intersect (list b2 b1))

Sentaurus™ Structure Editor User Guide 605

V-2024.03
Appendix A: Commands
sdegeo:bool-subtract

sdegeo:bool-subtract
This Scheme extension performs a Boolean subtraction operation, that is, it subtracts the
first body from the specified body list with the rest of the bodies from the list. The resulting
body inherits the DATEX material attribute of the first body. Similarly, the region-name
attribute is inherited from the first entity in the body list.
This Scheme extension applies to both 2D and 3D bodies.
If the specified body list contains empty bodies, then the Scheme extension returns #f.
If the result of the Boolean operation is an empty body, then the empty body is removed from
the entity list, and #t is returned.

Syntax
(sdegeo:bool-subtract body-list)

Returns
ENTITY | BOOLEAN

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "XX")
(define b1 (sdegeo:create-rectangle (position 0 0 0)
(position 10 10 0) "Silicon" "region_1"))
(define b2 (sdegeo:create-rectangle (position 5 5 0)
(position 12 12 0) "Silicon" "region_2"))
(sdegeo:bool-subtract (list b2 b1))

Sentaurus™ Structure Editor User Guide 606

V-2024.03
Appendix A: Commands
sdegeo:bool-unite

sdegeo:bool-unite
This Scheme extension performs a Boolean unite operation on the specified body list. The
newly united body inherits the DATEX material attribute of the first body from the specified
list of bodies. Similarly, the region-name attribute is inherited from the first entity in the body
list.
This Scheme extension applies to both 2D and 3D bodies.
If the specified body list contains empty bodies, then the Scheme extension returns #f.
If the result of the Boolean operation is an empty body, then the empty body is removed from
the entity list, and #t is returned.

Syntax
(sdegeo:bool-unite body-list)

Returns
ENTITY | BOOLEAN

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position -10 -8 0) (position -5 -3 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position -6 -7 0) (position 1 -4 0)
"Silicon" "region_2")
(sdegeo:create-rectangle (position -1 -9 0) (position 3 -3 0)
"PolySilicon" "region_3")
(sdegeo:create-polygon (list (position 1 -7 0) (position 5 -9 0)
(position 10 -9 0) (position 11 -4 0) (position 3 -1 0)
(position 1 -7 0)) "Silver" "region_4")
(sdegeo:bool-unite (get-body-list))

Sentaurus™ Structure Editor User Guide 607

V-2024.03
Appendix A: Commands
sdegeo:break-nearly-axis-aligned-edges

sdegeo:break-nearly-axis-aligned-edges
This Scheme extension changes nearly axis-aligned edges to axis-aligned edges by
inserting additional vertices and staircase edges to the model. This step might be needed
before meshing because some meshing algorithms (typically, quadtree-based meshing
engines) might have difficulties handling nearly axis-aligned edges.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:break-nearly-axis-aligned-edges edge-list [angular-tolerance])

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

angular-tolerance Optional. Specifies the minimal angle, in degrees, that is permitted

between model edges and between the x-axis and y-axis of the model. If
the angle between the edge and the horizontal and vertical direction is
smaller than angular-tolerance, then the edge is split into horizontal
and vertical components. If this argument is not specified, then the default
(5°) is used. Argument type: REAL

Sentaurus™ Structure Editor User Guide 608

V-2024.03
Appendix A: Commands
sdegeo:chamfer

sdegeo:chamfer
This Scheme extension performs edge or vertex chamfering operations for 3D bodies.

Syntax
(sdegeo:chamfer edge-list | vertex-list
chamfer-dist [adaptive-chamfering])

Returns
None

Arguments

Argument Description

edge-list | Specifies either a list of edges or a list of vertices to be chamfered.

vertex-list Argument type: EDGE LIST | VERTEX LIST

chamfer-dist Specifies the chamfering distance used for the operation.

Argument type: REAL

adaptive-chamfering Optional. Specifies whether to perform adaptive chamfering.

If you set this argument to #t, then if the chamfering operation fails using
the original chamfer-dist value, then the operation is repeated with a
sequence of chamfering operations, using an adaptive approach, to set
the chamfer distance to smaller values until the operation succeeds.
Argument type: BOOLEAN

Description
You can use the GUI to select the edges to be operated on, or some other method can be
used to find the edge entity IDs. For example, you can use find-edge-id to find the edge
IDs.
Chamfering is a complex operation and can fail for several reasons. A common issue is
using an incorrect chamfer distance, which is usually too large. The chamfer distance must
be selected so that the resulting model (after performing the chamfering operation) is
physically (topologically) correct. Another typical issue is the incorrect selection of the edges
to be chamfered. The edge or vertex list must contain all tangent continuous edges;
otherwise, the operation might fail.
Chamfering changes the model topology; new faces (and edges) are created, and old faces
(edges) are removed from the model. When chamfering is performed in several steps, the
order of performing the sdegeo:chamfer operation can be important.

Sentaurus™ Structure Editor User Guide 609

V-2024.03
Appendix A: Commands
sdegeo:chamfer

If a vertex list is specified, then all the edges that are connected in the specified vertices are
chamfered.

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10) "Silver"
"region_1")
(define edge1 (find-edge-id (position 5 0 0)))
(sdegeo:chamfer edge1 2)
(define face1 (find-face-id (position 5 5 10)))
(sdegeo:chamfer (entity:edges face1) 1)
(define face1 (find-face-id (position 5 0 5)))
(sdegeo:chamfer (entity:edges face1) 3)

Sentaurus™ Structure Editor User Guide 610

V-2024.03
Appendix A: Commands
sdegeo:chamfer-2d

sdegeo:chamfer-2d
This Scheme extension performs a 2D chamfering operation on a specified vertex or a list
of vertices. When you use the GUI, this operation is applied to the selected entities. The
Scheme extension (sde:selected-entities) returns the selected entity list. (Choose
Edit > Edit 2D > Chamfer.)
Note:
When the chamfering is to be performed on a vertex (or vertices) shared by
neighboring regions, all vertices must be added to the argument list.

Syntax
(sdegeo:chamfer-2d vertex chamfer-dist)

Returns
None

Arguments

Argument Description

vertex Specifies a vertex or a list of vertices to be chamfered.

Argument type: VERTEX | VERTEX LIST

chamfer-dist Specifies the chamfering distance used for the operation.

Note:
The chamfering distance must be selected so that the operation does not
result in an invalid geometry.

Argument type: REAL

Examples
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(define mybody (car (reverse (part:entities))))
define myvertices (entity:vertices mybody))
sdegeo:chamfer-2d (list (list-ref myvertices 0)
(list-ref myvertices 1)) 3)

Sentaurus™ Structure Editor User Guide 611

V-2024.03
Appendix A: Commands
sdegeo:check-overlap

sdegeo:check-overlap
This Scheme extension checks for possible overlaps between geometric bodies.
If the body list is specified by using the (get-body-list) command, then the entire model
is checked for overlaps. The default overlap check looks only for a possible bounding box
overlap. This operation is very fast but can report false overlaps. To provide a more reliable
result, set use-bbox-check to #f.
If no overlap is found, then the Scheme extension returns null (an empty list). If overlaps are
found, then it returns a list with all overlapping body pairs. If overlaps are found, then these
overlaps must be removed manually before the tessellated boundary output is generated;
otherwise, meshing will not work correctly.
Note:
This Scheme extension applies to both 2D and 3D models.

Syntax
(sdegeo:check-overlap body-list [use-bbox-check])

Returns
BODY LIST

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

Note:
This list should contain only geometric bodies. DRS entities (Ref/Eval
windows) are ignored, since Ref/Eval windows can overlap. Existing
overlaps are not reported for these entities.

use-bbox-check Optional. Specify #f for this argument to provide a more reliable result. The
default is #t. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 612

V-2024.03
Appendix A: Commands
sdegeo:chop-domain

sdegeo:chop-domain
This Scheme extension performs a 3D domain boundary cut.
If the base of the device is placed at the xy plane, then the device can be cut off to cover only
the specified polygonal base.
Note:
The device must be placed at the –y-plane, and the cut is performed in the
z-direction.

Syntax
(sdegeo:chop-domain point-pairs)

Returns
None

Arguments

Argument Description

point-pairs Specifies a list of x,y point pairs. Argument type: REAL REAL

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 5) (position 10 10 10) "Silicon"
"x1")
(sdegeo:create-cuboid (position 0 0 10) (position 10 10 11)
"PolySilicon" "x2")
(sdegeo:create-cuboid (position 2 2 11) (position 8 8 14) "Copper"
"x3")
(sdegeo:create-cylinder (position 5 5 14) (position 5 5 18) 3 "Silver"
"x4")
(sdegeo:chop-domain (list 0 0 2 2 6 0 10 4 3 10 0 4))

Sentaurus™ Structure Editor User Guide 613

V-2024.03
Appendix A: Commands
sdegeo:chull2d

sdegeo:chull2d
This Scheme extension computes the 2D convex hull of the specified points (position list).
The 2D convex hull is returned in a POSITION LIST.
Note:
The input position list must be defined at the xy plane, and the z-coordinate must
be 0.

Syntax
(sdegeo:chull2d position-list)

Returns
POSITION LIST

Arguments

Argument Description

position-list Argument type: POSITION LIST

Examples
(sde:clear)
(define pl1 (list
(position 8 4 0) (position 0 0 0) (position 5 -4 0)
(position 7 -1 0) (position 10 0 0) (position 10 5 0)
(position 2 1 0) (position 4 1 0) (position 4 3 0)
(position 8 3 0) (position 9 4 0) (position 9 3 0)
(position 8.5 3.5 0) (position 2 3 0) (position 0 5 0)
(position 5 -2 0)))
(sdegeo:create-polygon (sdegeo:chull2d pl1) "Silicon" "xx")

sdegeo:contact-sets
This Scheme extension returns the names of all the defined contact sets.

Syntax
(sdegeo:contact-sets)

Returns
A Scheme list containing the names of the defined contact sets

Sentaurus™ Structure Editor User Guide 614

V-2024.03
Appendix A: Commands
sdegeo:create-circle

sdegeo:create-circle
This Scheme extension adds a 2D circular region to the model. The circle is defined by
specifying the center position and the radius. If the generated polygon overlaps already
existing regions, the default Boolean behavior determines the topology of the newly inserted
region and the overlapping regions. The material attribute is set to region-material and
the region attribute is set to region-name.
If you specify start-angle and end-angle, then a circular arch is generated.

Syntax
(sdegeo:create-circle center-pos radius region-material region-name
[start-angle end-angle])

Returns
ENTITY (BODY)

Arguments

Argument Description

center-pos Argument type: POSITION

radius Argument type: REAL

region-material Specifies the name of a material. Argument type: DATEXMAT

region-name Specifies the name of a region. Argument type: STRING

start-angle Optional. Argument type: REAL

end-angle Optional. Argument type: REAL

Examples
(sdegeo:create-circle (position 0 0 0) 10 "Silicon" "Region_1")

Sentaurus™ Structure Editor User Guide 615

V-2024.03
Appendix A: Commands
sdegeo:create-cone

sdegeo:create-cone
This Scheme extension creates a circular cone.

Syntax
(sdegeo:create-cone {{start-axis end-axis} | {start-axis-x
start-axis-y start-axis-z end-axis-x end-axis-y end-axis-z}}
base-radius top-radius [ratio=1 [position3 | {x3 y3 z3}]]
region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

start-axis Specifies the start axis position or base of the cone. See Description.
Argument type: POSITION

end-axis Specifies the end axis position or top of the cone. See Description.
Argument type: POSITION

start-axis-x Argument type: REAL

start-axis-y Argument type: REAL

start-axis-z Argument type: REAL

end-axis-x Argument type: REAL

end-axis-y Argument type: REAL

end-axis-z Argument type: REAL

base-radius Specifies the radius at start-axis (must be greater than zero).

Argument type: REAL

top-radius Specifies radius at end-axis, which can be zero. Argument type: REAL

ratio Optional. Argument type: REAL

position3 Optional. Argument type: POSITION

x3 y3 z3 Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 616

V-2024.03
Appendix A: Commands
sdegeo:create-cone

Argument Description

region-material Argument type: DATEXMAT

region-name Argument type: STRING

Description
Two syntax formats are available for defining the start-axis and end-axis positional
arguments:
• The first (original) syntax format defines all positional arguments by placing them in
‘position’ statements enclosed in parentheses.
• The second syntax format defines positional arguments without using the ‘position’
statement or the additional set of parentheses.
Otherwise, the two formats are identical. The format selected must be used for all three
positional arguments.
If you specify ratio and position3, an elliptical cone is created. If you specify ratio, the
ratio between the major and minor axes of the ellipse is used.
If position3 (or x3 y3 z3) is specified, then the vector from the projection of position3
(or x3 y3 z3) onto the axis of the cone to position3 (or x3 y3 z3) specifies the major axis.
If position3 (or x3 y3 z3) is not specified, then the major axis is defined by the projection
of the x-axis of the active coordinate system onto the plane that is defined by start-axis
and the vector from start-axis to end-axis.
Note:
The argument position3 cannot lie on the axis of the cone; otherwise, an error
occurs.

If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Examples
(sdegeo:create-cone (position -20 -5 -9) (position 15 20 10) 10 2
"Gold" "")
(sdegeo:create-cone -20 -5 -9 5 15 7.5 10 2 3 "Silver" "")
(sdegeo:create-cone -2 -5 -9 15 20 10 10 2 3 17 22 12 "Copper" "")

Sentaurus™ Structure Editor User Guide 617

V-2024.03
Appendix A: Commands
sdegeo:create-cuboid

sdegeo:create-cuboid
This Scheme extension creates a solid block. The block is oriented with respect to the
current work plane.
If the generated body overlaps already existing regions, then the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-cuboid diagonal1 diagonal2 region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

diagonal1 Specifies the first diagonal corner of the block. Argument type: POSITION

diagonal2 Specifies the second diagonal corner of the block. Argument type: POSITION

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
(sde:get-default-material) "r1")

Sentaurus™ Structure Editor User Guide 618

V-2024.03
Appendix A: Commands
sdegeo:create-cylinder

sdegeo:create-cylinder
This Scheme extension creates a cylinder.

Syntax
(sdegeo:create-cylinder {{start-pos end-pos} |
{x-start y-start z-start x-end y-end z-end}} radius
[ratio=1 {position3 | {x3 y3 z3}}] region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

start-pos Specifies the start position of the cylinder. Argument type: POSITION

end-pos Specifies the end position of the cylinder. Argument type: POSITION

x-start y-start Specify the start position of the cylinder. Argument type: REAL
z-start

x-end y-end z-end Specify the end position of the cylinder. Argument type: REAL

radius Specifies the radii for the base and top. Argument type: REAL

ratio Optional. Argument type: REAL

position3 Optional. Argument type: POSITION

x3 y3 z3 Optional. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Description
Two syntax formats are available for defining the start and end positions for creating a
cylinder:
• The first (original) syntax format defines the positional arguments by placing them in
‘position’ statements enclosed in parentheses.

Sentaurus™ Structure Editor User Guide 619

V-2024.03
Appendix A: Commands
sdegeo:create-cylinder

• The second syntax format defines the positional arguments without using the ‘position’
statement or the additional set of parentheses.
Otherwise, the two formats are identical. The format selected must be used for all three
positional arguments.
If you specify ratio and position3 (or x3 y3 z3), an elliptical cylinder is created. If you
specify ratio, the ratio between the major and minor axes of the ellipse is used.
If position3 (or x3, y3, and z3) is specified, the vector from the projection of position3 (or
x3 y3 z3) on to the axis of the cylinder to position3 (or x3 y3 z3) specifies the major axis.
If position3 (or x3 y3 z3) is not specified, the major axis is defined by the projection of the
x-axis of the active coordinate system onto the plane that is defined by position1 and the
vector from position1 to position2.
Note:
The argument position3 cannot lie on the axis of the cylinder; otherwise, an
error occurs.

If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Examples
(sde:clear)
(sdegeo:create-cylinder (position 0 0 0) (position 25 25 0) 30
"Gold" "")
(sdegeo:create-cylinder 2 2 2 -20 -20 0 15 3 "Gold" "")
(sdegeo:create-cylinder 2 2 2 -20 -20 0 15 3 -5 -5 0 "Gold" "")

Sentaurus™ Structure Editor User Guide 620

V-2024.03
Appendix A: Commands
sdegeo:create-ellipse

sdegeo:create-ellipse
This Scheme extension creates a 2D elliptical region (ellipse). It generates the ellipse on the
active work plane, using the active coordinate system orientation. The default Boolean
setting is respected by the Scheme extension.

Syntax
(sdegeo:create-ellipse position1 position2 ratio lmat lreg)

Returns
ENTITY (BODY)

Arguments

Argument Description

position1 Specifies the center position of an ellipse. Argument type: POSITION

position2 Specifies the endpoint of the major axis. Argument type: POSITION

ratio Specifies the ratio of the major and minor axes. The ratio value can be greater
than 1, in which case, the minor axis becomes the major axis.
Argument type: REAL

lmat Specifies a DATEX material. Argument type: DATEXMAT

lreg Specifies the name of the region. Argument type: STRING

Examples
; Scheme Extension
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-ellipse (position 0 0 0) (position 10 0 0) 0.5
"PolySi" "x1")
(sdegeo:create-ellipse (position 0 0 0) (position 3 0 0) 3
"Silver" "x2")
(sdegeo:create-ellipse (position 0 0 0) (position 8 8 0) 0.2
"Oxide" "x3")

Sentaurus™ Structure Editor User Guide 621

V-2024.03
Appendix A: Commands
sdegeo:create-ellipsoid

sdegeo:create-ellipsoid
This Scheme extension creates a 3D ellipsoid. It generates the ellipse on the active work
plane, using the active coordinate system orientation.
The default Boolean setting is respected by the Scheme extension.

Syntax
(sdegeo:create-ellipsoid position1 position2 ratio lmat lreg)

Returns
ENTITY (BODY)

Arguments

Argument Description

position1 Specifies the center position of an ellipse. Argument type: POSITION

position2 Specifies the endpoint of the major axis. Argument type: POSITION

ratio Specifies the ratio of the major and minor axes. The ratio value can be greater
than 1, in which case, the minor axis becomes the major axis.
Argument type: REAL

lmat Specifies a DATEX material. Argument type: DATEXMAT

lreg Specifies the name of the region. Argument type: STRING

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-ellipsoid (position 0 0 0) (position 10 0 0) 0.5
"PolySi" "x1")
(sdegeo:create-ellipsoid (position 0 0 0) (position 3 0 0) 3
"Silver" "x2")
(sdegeo:create-ellipsoid (position 0 0 0) (position 8 8 0) 0.2
"Oxide" "x3")

Sentaurus™ Structure Editor User Guide 622

V-2024.03
Appendix A: Commands
sdegeo:create-ellipsoid-d

sdegeo:create-ellipsoid-d
This Scheme extension creates a polyhedral ellipsoid with triangular faces. It generates the
triangulated ellipsoid on the active work plane, using the active coordinate system
orientation.
The default Boolean setting is respected by the Scheme extension.

Syntax
(sdegeo:create-ellipsoid-d position1 position2 ratio lmat lreg
nseg1 nseg2)

Returns
ENTITY (BODY)

Arguments

Argument Description

position1 Specifies the center position of the ellipse. Argument type: POSITION

position2 Specifies the endpoint of the major axis. Argument type: POSITION

ratio Specifies the ratio of the major and minor axes. The ratio value can be greater
than 1, in which case, the minor axis becomes the major axis.
Argument type: REAL

lmat Specifies a DATEX material. Argument type: DATEXMAT

lreg Specifies the name of the region. Argument type: STRING

nseg1 Specifies the number of segments (planar faces) along the major axis.
Argument type: INTEGER

nseg2 Specifies the number of segments about the major axis.

Argument type: INTEGER

Examples
(sde:clear)
(sdegeo:create-ellipsoid-d (position 0 0 0) (position 10 0 0) 0.25
"Silicon" "xx" 10 20)

Sentaurus™ Structure Editor User Guide 623

V-2024.03
Appendix A: Commands
sdegeo:create-linear-edge

sdegeo:create-linear-edge
This Scheme extension creates a linear edge.

Syntax
(sdegeo:create-linear-edge pos1 pos2)

Returns
ENTITY (BODY)

Arguments

Argument Description

pos1 pos2 Specify the end positions of the line. Argument type: POSITION

sdegeo:create-ot-ellipsoid
This Scheme extension creates an oriented and truncated (ot) ellipsoid.
If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-ot-ellipsoid center-position major-axis-position ratio
truncate-angle1 truncate-angle2 region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center position of the ellipsoid. Argument type: POSITION

major-axis-position Specifies the endpoint of the major axis of the untruncated ellipsoid.
Argument type: POSITION

ratio Specifies the ratio of the major and minor axes. Argument type: REAL

Sentaurus™ Structure Editor User Guide 624

V-2024.03
Appendix A: Commands
sdegeo:create-ot-ellipsoid

Argument Description

truncate-angle1 Determine the cut-off angles where the ellipsoidal top and bottom are
truncate-angle2 replaced by a flat top and bottom. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sde:clear)
(define mb
(sdegeo:create-polygon (list (position 0 3 0) (position 1 3 0)
(position 2 2 0) (position 3 2 0) (position 4 3 0)
(position 5 3 0) (position 5 0 0) (position 0 0 0))
"Silicon" "xx"))
(sdegeo:extrude (list mb) 2)
(do ((i 0 (+ i 1))) ((>= i 5))
(define mf (caar (sdegeo:ray-test mb (ray
(position (+ i 0.5) 5 1.0) (gvector 0 -1 0)) 0.01)))
(define mp (cdar (sdegeo:ray-test mb (ray
(position (+ i 0.5) 5 1.0) (gvector 0 -1 0)) 0.01)))
(define mn (face:plane-normal mf))
(define sf 0.5)
(define mp1 (position (+ (position:x mp) (* sf (gvector:x mn)))
(+ (position:y mp) (* sf (gvector:y mn)))
(+ (position:z mp) (* sf (gvector:z mn)))))
(define sf 1.2)
(define mp2 (position (+ (position:x mp) (* sf (gvector:x mn)))
(+ (position:y mp) (* sf (gvector:y mn)))
(+ (position:z mp) (* sf (gvector:z mn)))))
(sdegeo:create-ot-ellipsoid mp1 mp2 0.5 20 80 "Gold" "xx")
)

Sentaurus™ Structure Editor User Guide 625

V-2024.03
Appendix A: Commands
sdegeo:create-ot-sphere

sdegeo:create-ot-sphere
This Scheme extension creates an oriented and truncated (ot) sphere.
If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-ot-sphere center-position orientation radius
truncate-angle1 truncate-angle2 region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center position of the sphere. Argument type: POSITION

orientation Specifies the normal vector of the truncated top and bottom. The sphere is
oriented in such a way that the poles of the sphere are placed in the
orientation direction. Argument type: GVECTOR

radius Specifies the size of the sphere. Argument type: REAL

truncate-angle1 Determine the cut-off angles where the spherical top and bottom are
truncate-angle2 replaced by a flat top and bottom. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sde:clear)
(sdegeo:create-ot-sphere (position 0 0 0) (gvector 1 0 0) 1 65 65
"Silicon" "x1")
(sdegeo:create-ot-sphere (position 0 0 3) (gvector 1 1 0) 1 50 50
"PolySilicon" "x2")
(sdegeo:create-ot-sphere (position 0 0 6) (gvector 0 1 0) 1 40 40
"Copper" "x3")
(sdegeo:create-ot-sphere (position 0 0 9) (gvector -1 1 0) 1 30 30
"Oxide" "x4")

Sentaurus™ Structure Editor User Guide 626

V-2024.03
Appendix A: Commands
sdegeo:create-polygon

sdegeo:create-polygon
This Scheme extension adds a closed 2D polygonal region to the model.
The polygon is defined by specifying the vertex list of the polygon (either closed or not
closed). If the last vertex differs from the first vertex, then the first vertex closes the polygon.
If the generated polygon overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted region and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-polygon vertex-list region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: POSITION LIST

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Sentaurus™ Structure Editor User Guide 627

V-2024.03
Appendix A: Commands
sdegeo:create-polyline-wire

sdegeo:create-polyline-wire
This Scheme extension defines a wire body consisting of linear edges only. The vertex
positions of the wire are specified in the argument list as a position list. The wire body does
not have an attached material or region-name attribute and is not written to the output
boundary file. The wire body can be used, for example, during a sweep operation when the
sweep along a wire option is used.

Syntax
(sdegeo:create-polyline-wire vertex-list)

Returns
ENTITY (BODY)

Arguments

Argument DescriptionArgument Type

vertex-list Specifies a list of vertices. Argument type: POSITION LIST

Sentaurus™ Structure Editor User Guide 628

V-2024.03
Appendix A: Commands
sdegeo:create-prism

sdegeo:create-prism
This Scheme extension creates an n-sided prism where n is greater than or equal to three.
If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-prism center-position height major-radius minor-radius
nsides region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center position of the prism. Argument type: POSITION

height Specifies the height of the prism along the z-axis. If set to zero, then the
resulting body consists of only one polygonal-sided sheet face, lying in the
xy plane. Argument type: POSITION

major-radius Specifies the major radius along the x-axis of the prism.
Argument type: REAL

minor-radius Specifies the minor radius along the y-axis of the prism.
Argument type: REAL

nsides Specifies the number of sides of the prism. The number of sides must be
greater than or equal to three. Argument type: INTEGER

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sdegeo:create-prism (position 0 0 0) 20 40 40 6 "PolySilicon" "")

Sentaurus™ Structure Editor User Guide 629

V-2024.03
Appendix A: Commands
sdegeo:create-pyramid

sdegeo:create-pyramid
This Scheme extension creates a solid pyramid.
The pyramid is centered about the origin:
• If the up direction is set to "-x" (UCS), then its height is along the x-axis, the
major-radius is along the z-axis, and the minor-radius is along the y-axis.

• If the up direction is set to "+z", then its height is along the z-axis, the major-radius
is along the x-axis, and the minor-radius is along the y-axis.
If the generated body overlaps already existing regions, then the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-pyramid center-position height major-radius
minor-radius nsides top region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center position of the pyramid. Argument type: POSITION

height Specifies the height of the pyramid. If set to zero, then the resulting body
consists of only one polygonal-sided sheet face, lying in the xy plane.
Argument type: REAL

major-radius Specifies the major radius of the pyramid. Argument type: REAL

minor-radius Specifies the minor radius of the pyramid. Argument type: REAL

nsides Specifies the number of sides of the pyramid. The number of sides must be
greater than or equal to three. Argument type: INTEGER

top Specifies the major axis length at the top of the pyramid.
Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Sentaurus™ Structure Editor User Guide 630

V-2024.03
Appendix A: Commands
sdegeo:create-pyramid

Examples
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-pyramid (position 0 0 0) 20 40 40 6 12
"PolySilicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-pyramid (position 0 0 0) 30 30 20 5 5
"Gold" "region_2")
(sde:clear)
(sde:set-process-up-direction "-x")
(sdegeo:create-pyramid (position 0 0 0) 20 40 40 6 12
"PolySilicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-pyramid (position 0 0 0) 30 30 20 5 5
"Gold" "region_2")

Sentaurus™ Structure Editor User Guide 631

V-2024.03
Appendix A: Commands
sdegeo:create-rectangle

sdegeo:create-rectangle
This Scheme extension adds a 2D rectangular region to the model. The rectangle is defined
by specifying two opposite corner vertices.
If the generated rectangle overlaps with already existing regions, the default Boolean
behavior determines the topology of the newly inserted region and the overlapping regions.
The material attribute is set to region-material and the region attribute is set to
region-name.

Syntax
(sdegeo:create-rectangle v1 v2 material-name region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

v1 v2 Specifies the two opposite corner vertices of the rectangle.

Argument type: POSITION

material-name Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0))
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "sir")

Sentaurus™ Structure Editor User Guide 632

V-2024.03
Appendix A: Commands
sdegeo:create-reg-polygon

sdegeo:create-reg-polygon
This Scheme extension adds a regular 2D polygonal region to the model. The regular
polygon is defined by specifying the center position of the polygon, the radius, and the
number of segments.
If the generated polygon overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted region and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-reg-polygon v1 rad
[nsides] [angle] region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

v1 Specifies the center of the regular polygon. Argument type: POSITION

rad Specifies the radius of the circle that defines the vertex points.
Argument type: REAL

nsides Optional. Specifies the number of sides of the polygonal region.

Argument type: INTEGER

angle Optional. Specifies the angle [degree], counterclockwise from the x-axis,
which defines the ‘rotation’ of the regular polygon. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sdegeo:create-reg-polygon (position 0 0 0) 1 10 0 "Silicon"
"region_1")

Sentaurus™ Structure Editor User Guide 633

V-2024.03
Appendix A: Commands
sdegeo:create-ruled-region

sdegeo:create-ruled-region
This Scheme extension adds a 2D ruled region to the model.
The ruled region is defined by specifying two existing edges. Edge orientation is not
important, since the ruled region is always created in such a way that a simply connected
region is created. The selected edges cannot intersect each other.
If the ruled region overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted region and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-ruled-region edge1 edge2 region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

edge1 Specifies one existing edge. Argument type: EDGE

edge2 Specifies a second existing edge. Argument type: EDGE

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Sentaurus™ Structure Editor User Guide 634

V-2024.03
Appendix A: Commands
sdegeo:create-sphere

sdegeo:create-sphere
This Scheme extension creates a sphere that is centered at a specified position.

Syntax
(sdegeo:create-sphere {center-position | {center-x center-y center-z}}
radius region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center position of the sphere. Argument type: POSITION

center-x Specify the center position of the sphere. Argument type: REAL
center-y
center-z

radius Specifies the size of the sphere. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Description
Two syntax formats are available for defining center-position:
• The first (original) syntax format defines the center-position by placing the xyz
coordinates in a ‘position’ statement enclosed in parentheses (as shown in the example
creating sphere1).
• The second syntax format defines the center position xyz coordinates without using the
‘position’ statement or the additional set of parentheses (as shown in the example
defining sphere2 and sphere3).
Otherwise, the two formats are identical.
If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Sentaurus™ Structure Editor User Guide 635

V-2024.03
Appendix A: Commands
sdegeo:create-spline-wire

Examples
(sde:clear)
(define sphere1 (sdegeo:create-sphere (position -4 -4 0) 1.5
"Gold" ""))
(define sphere2 (sdegeo:create-sphere -30 0 0 15 "Silver" ""))
(define sphere3 (sdegeo:create-sphere 10 10 10 5 "Copper" ""))

sdegeo:create-spline-wire
This Scheme extension defines a spline wire body.
The vertex positions of the wire are specified in the argument list as a position list. The wire
body does not have an attached material or region-name attribute, and is not written to the
output boundary file. The wire body can be used, for example, during a sweep operation
when the sweep along a wire option is used.

Syntax
(sdegeo:create-spline-wire vertex-list)

Returns
ENTITY (BODY)

Arguments

Argument Description

vertex-list Specifies a list of vertex positions. Argument type: POSITION LIST

Sentaurus™ Structure Editor User Guide 636

V-2024.03
Appendix A: Commands
sdegeo:create-torus

sdegeo:create-torus
This Scheme extension creates a solid torus of given radii centered at the origin.

Syntax
(sdegeo:create-torus {center-position | {center-x center-y center-z}}
major-radius minor-radius region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

center-position Specifies the center location of the torus. Argument type: POSITION

center-x Specify the center location of the torus. Argument type: REAL
center-y
center-z

major-radius Specifies the distance from the center to the spine curve lying in this plane. It
is specified around a circle having the minor axis and is swept to define the
torus. Three shapes of tori can be specified (donut, apple, or lemon)
depending on the relative magnitudes of the major and minor radii:
• If major-radius is greater than minor-radius, the torus is a donut.
• If major-radius is positive but smaller than minor-radius, the torus is an
apple.
• If major-radius is negative, the torus is a lemon.
Argument type: REAL

minor-radius Specifies the minor radius. Argument type: REAL

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Description
The torus is defined in the xy plane of the active coordinate system and is oriented using the
normal gvector of the active coordinate system.
Two syntax formats are available for the center position argument:
• The first (original) syntax format defines center-position by placing it in a ‘position’
statement enclosed in parentheses.

Sentaurus™ Structure Editor User Guide 637

V-2024.03
Appendix A: Commands
sdegeo:create-torus

• The second format defines the xyz coordinates of the center position without using the
‘position’ statement or the additional set of parentheses.
Otherwise, the two formats are identical.
If the generated body overlaps already existing regions, the default Boolean behavior
determines the topology of the newly inserted body and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Examples
(sde:clear)
(sdegeo:create-torus (position -10 -5 -10) 7 3 "Gold" "")
(sdegeo:create-torus 10 15 20 10 5 "Gold" "")

Sentaurus™ Structure Editor User Guide 638

V-2024.03
Appendix A: Commands
sdegeo:create-triangle

sdegeo:create-triangle
This Scheme extension adds a 2D triangular region to the model. The triangle is defined by
specifying three vertices.
If the generated triangle overlaps with existing regions, the default Boolean behavior
determines the topology of the newly inserted region and the overlapping regions. The
material attribute is set to region-material and the region attribute is set to region-name.

Syntax
(sdegeo:create-triangle v1 v2 v3 region-material region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

v1 v2 v3 Specify the three vertices that define the triangle. Argument type: POSITION

region-material Specifies the material of the region. Argument type: DATEXMAT

region-name Specifies the name of the region. Argument type: STRING

Examples
(sdegeo:create-triangle (position 0 0 0) (position 1 0 0)
(position 0.5 1 0) "Silicon" "sir")

Sentaurus™ Structure Editor User Guide 639

V-2024.03
Appendix A: Commands
sdegeo:curve-intersect

sdegeo:curve-intersect
This Scheme extension returns the intersection positions between the specified curves.

Syntax
(sdegeo:curve-intersect edge1 edge2)

Returns
POSITION LIST

Arguments

Argument Description

edge1 Specifies one existing edge. Argument type: EDGE

edge2 Specifies a second existing edge. Argument type: EDGE

Examples
(define e1 (edge:linear (position 0 0 0) (position 10 10 0)))
(define e2 (edge:linear (position 0 10 0) (position 10 0 0)))
(sdegeo:curve-intersect e1 e2)
; (#[position 5 5 0])
(define e3 (edge:circular (position 5 5 0) 3))
(sdegeo:curve-intersect e1 e3)
; (#[position 7.12132034355964 7.12132034355964 0]
#[position 2.87867965644036 2.87867965644036 0])

Sentaurus™ Structure Editor User Guide 640

V-2024.03
Appendix A: Commands
sdegeo:define-3d-contact-by-polygon

sdegeo:define-3d-contact-by-polygon
This Scheme extension defines a 3D face contact by a polygon, that is, it imprints a general
polygon wire to an existing body. The imprinted wire splits the faces of the body.
This Scheme extension can be used to define a polygonal contact area. The imprint
functions split faces to surface patches. After the face split, the newly created face segments
to be marked as contacts must be identified. During the assignment of contacts, these face
ID numbers can be used explicitly.

Syntax
(sdegeo:define-3d-contact-by-polygon pos-list dir-vector contact-name)

Returns
None

Arguments

Argument Description

pos-list Specifies a list of the vertices of the imprinted polygon. The polygon must be
closed to imprint it, so the first position must be repeated as the last position.
Argument type: POSITION LIST

dir-vector Specifies the direction in which the polygon is projected for the imprint step.
Argument type: GVECTOR

contact-name Specifies the name of the contact set. Argument type: STRING

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10) "Silicon"
"region_1")
(sdegeo:define-contact-set "demo" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "demo")
(sdegeo:define-3d-contact-by-polygon (list (position 1 1 10)
(position 5 1 10) (position 5 5 10) (position 3 2 10)
(position 1 5 10) (position 1 1 10))
(gvector 0 0 -1) "demo")

Sentaurus™ Structure Editor User Guide 641

V-2024.03
Appendix A: Commands
sdegeo:define-contact-set

sdegeo:define-contact-set
This Scheme extension defines a contact set name and initializes the supporting data.
For edge contacts (2D), the edgeThickness and color arguments are used. For face
contacts (3D), the color and facePattern arguments are used. (The argument that is not
used is ignored if it is specified in the argument list.)
You can use the Contact Sets button of the GUI to display the corresponding Contact Set
dialog box, which can be used to define the arguments interactively. (Choose Device >
Contacts > Contact Sets.)
Note:
The optional arguments can be given in any order.

Syntax
(sdegeo:define-contact-set name
[edgeThickness color] | [color facePattern])

Returns
Unspecified

Arguments

Argument DescriptionArgument Type

name Specifies the name of a contact set. If the contact set name is already defined,
then the existing contact set is replaced by the new definition.
Argument type: STRING

edgeThickness Optional. Specifies the thickness of the edge. The default is 4.0.
Argument type: INTEGER

color Optional. Specifies an RGB color object, for example, (color:rgb 0 1 0). The
color:rgb command takes three real-number arguments, each in the range
[0,1]. The default is (color:rgb 1.0 0.0 0.0). Argument type: COLOR

facePattern Optional. Specifies the pattern to be used for the face. Options are "solid" |
"##" | "||" | "==" | "//" | "::" | "<><>" | "[] []".
The default is "##". Argument type: STRING

Examples
(sdegeo:define-contact-set "Drain")
(sdegeo:define-contact-set "Source" 4.0 (color:rgb 1.0 0.0 0.0) "##")

Sentaurus™ Structure Editor User Guide 642

V-2024.03
Appendix A: Commands
sdegeo:define-coord-sys

sdegeo:define-coord-sys
This Scheme extension creates a new coordinate system in the active work plane.
If the active work plane is called awp, then the newly created coordinate system is called
awp_cs-name. The origin of the new coordinate system is based at x-pos and y-pos,
relative to the origin of the active work plane.
The coordinate system is rotated by angle. Counterclockwise rotation is positive (looking
from the positive z-axis of the active work plane).

Syntax
(sdegeo:define-coord-sys cs-name x-pos y-pos angle)

Returns
BOOLEAN

Arguments

Argument Description

cs-name Specifies the name of the coordinate system. Argument type: STRING

x-pos Argument type: REAL

y-pos Argument type: REAL

angle Specifies the angle (in degrees) by which to rotate the coordinate system.
Argument type: REAL

Sentaurus™ Structure Editor User Guide 643

V-2024.03
Appendix A: Commands
sdegeo:define-work-plane

sdegeo:define-work-plane
This Scheme extension creates a new work plane.
The x-axis points toward x-axis and the y-axis points toward y-axis. The z-axis is defined
by the right-hand rule. The origin must be considered when you define the x-axis and
y-axis.

Syntax
(sdegeo:define-work-plane wp-name origin x-axis y-axis)

Returns
BOOLEAN

Arguments

Argument Description

wp-name Specifies the name of the work plane. Argument type: STRING

origin Specifies where to place the origin of the work plane. Argument type: POSITION

x-axis Specifies the direction of the x-axis. Argument type: POSITION

y-axis Specifies the direction of the y-axis. Argument type: POSITION

Examples
Define a new work plane, wp1, parallel to the global xy plane, located at z = 1:
(sdegeo:define-work-plane "wp1" (position 0 0 1) (position 1 0 1)
(position 0 1 1))

Sentaurus™ Structure Editor User Guide 644

V-2024.03
Appendix A: Commands
sdegeo:del-short-edges

sdegeo:del-short-edges
This Scheme extension deletes linear edges if the edge length is shorter than the specified
edge-length.

Ridges can be protected by an angular tolerance. If the vertex normal difference is larger
than angular-tolerance at a given vertex location, then the vertex (and adjoining edges)
are protected. In this case, even if the edge length is smaller than edge-length, the edge is
not removed.
This Scheme extension is fast, very robust, and recommended to simplify 2D geometry.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:del-short-edges entity edge-length angular-tolerance)

Returns
None

Arguments

Argument Description

entity Specifies a list of entities. Argument type: ENTITY LIST

edge-length Specifies the edge length that determines whether linear edges are
deleted. Argument type: REAL

angular-tolerance Specifies the angular tolerance. Argument type: REAL

Sentaurus™ Structure Editor User Guide 645

V-2024.03
Appendix A: Commands
sdegeo:delete-collinear-edges

sdegeo:delete-collinear-edges
This Scheme extension removes collinear edges from the specified edge list by merging the
neighboring collinear edges into one single-edge entity.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:delete-collinear-edges edge-list)

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

sdegeo:delete-contact-boundary-edges
This Scheme extension deletes the current contact set attributes from all edges of the
selected body or bodies. Alternatively, a body or body list can be given in the argument list.
Only the active contacts are removed.

Syntax
(sdegeo:delete-contact-boundary-edges [body | body-list])

Returns
None

Arguments

Argument Description

body | body-list Optional. Specifies a body or a list of bodies.

Argument type: BODY | BODY LIST

Sentaurus™ Structure Editor User Guide 646

V-2024.03
Appendix A: Commands
sdegeo:delete-contact-boundary-faces

sdegeo:delete-contact-boundary-faces
This Scheme extension removes a contact attribute from all faces of each specified body in
body-list. If the argument list is empty and body-list is not defined, then the Scheme
extension takes the body or bodies from (sde:selected-entities). The active contact
set name is taken to specify the contacts. Alternatively, to the selected faces, a face list can
be given explicitly in the argument list.

Syntax
(sdegeo:delete-contact-boundary-faces [body | body-list])

Returns
None

Arguments

Argument DescriptionArgument Type

body | body-list Optional. Specifies a body or a list of bodies.

Argument type: BODY | BODY LIST

Examples
(sde:clear)
(sdegeo:define-contact-set "xx" 4.0 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "xx")
(define mycube (sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"PolySilicon" "region_1"))
(sdegeo:set-contact-boundary-faces mycube)
(sdegeo:delete-contact-boundary-faces mycube)

Sentaurus™ Structure Editor User Guide 647

V-2024.03
Appendix A: Commands
sdegeo:delete-contact-edges

sdegeo:delete-contact-edges
This Scheme extension deletes the current contact set attributes from the selected edges.
Alternatively, an edge or edge list can be given in the argument list. Only the active contacts
are removed. (Choose Device > Contacts > Unset Edges.)

Syntax
(sdegeo:delete-contact-edges [edge | edge-list])

Returns
None

Arguments

Argument Description

edge | edge-list Optional. Specifies an edge or a list of edges.

Argument type: EDGE | EDGE LIST

sdegeo:delete-contact-faces
This Scheme extension removes the contact attribute from the specified faces.
If the argument list is empty and face-list is not defined, then the Scheme extension takes
the faces from (sde:selected-entities). The name of the active contact set is taken to
specify the contacts. Alternatively, to the selected faces, a face list can be given explicitly in
the argument list.

Syntax
(sdegeo:delete-contact-faces [face | face-list])

Returns
None

Arguments

Argument Description

face | face-list Optional. Specifies a face or a list of faces.

Argument type: FACE | FACE LIST

Sentaurus™ Structure Editor User Guide 648

V-2024.03
Appendix A: Commands
sdegeo:delete-contact-set

sdegeo:delete-contact-set
This Scheme extension deletes the specified contact set and removes the corresponding
contact attributes (either ‘2D contact’ or ‘3D contact’).

Syntax
(sdegeo:delete-contact-set) contact-name

Returns
None

Arguments

Argument Description

contact-name Specifies the name of a contact set. Argument type: STRING

sdegeo:delete-coord-sys
This Scheme extension deletes the specified coordinate system orientation.

Syntax
(sdegeo:delete-coord-sys cs-name)

Returns
BOOLEAN

Arguments

Argument Description

cs-name Specifies the name of a coordinate system orientation. Argument type: STRING

Sentaurus™ Structure Editor User Guide 649

V-2024.03
Appendix A: Commands
sdegeo:delete-edges

sdegeo:delete-edges
This Scheme extension removes the specified edges from the model. If there are
neighboring regions, edges that are shared by more than one body must be selected from
all bodies. Otherwise, model conformity is not preserved.
By default, a 90° angular tolerance is used to protect model features (that is, only those
edges from the specified entity list that enclose an angle greater than 90° are removed from
the edge list).
You can use the optional argument angular-tolerance to modify the default setting.
This Scheme extension appends the input edge list with all the matching neighbor edges to
provide a conformal result (no gaps or overlaps are created by sdegeo:delete-edges
between the originally matching neighbor bodies).
Note:
This Scheme extension applies to 2D models only. Only linear edges can be
deleted.

Syntax
(sdegeo:delete-edges edge-list [angular-tolerance])

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

angular-tolerance Optional. Specifies the angular tolerance in degrees. The default is 90°.
Argument type: REAL

Sentaurus™ Structure Editor User Guide 650

V-2024.03
Appendix A: Commands
sdegeo:delete-nearly-collinear-edges

sdegeo:delete-nearly-collinear-edges
This Scheme extension deletes nearly collinear edges from the specified edge list.
Nearly collinear edges are defined as follows: If the distance from the point between the two
edges is closer than the specified distance (dist) to the edge that is defined by the other
two noncommon endpoints of the two edges, then they are classified as nearly collinear. All
nearly collinear edges are removed from the edge list.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:delete-nearly-collinear-edges edge-list dist)

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

dist Specifies a distance to the edge. Argument type: EDGE

Sentaurus™ Structure Editor User Guide 651

V-2024.03
Appendix A: Commands
sdegeo:delete-region

sdegeo:delete-region
This Scheme extension deletes the specified region or regions, including Ref/Eval window
bodies. The body is specified by its entity number. The specified regions are permanently
removed from the model.

Syntax
(sdegeo:delete-region bodies)

Returns
None

Arguments

Argument Description

bodies Specifies a region or a list of regions. Argument type: BODY | BODY LIST

sdegeo:delete-short-edges
This Scheme extension removes edges from the specified list of edges. An edge is deleted
from the model only if the length of the edge is shorter than the specified edge length,
max-edge-length. If there are neighboring regions, edges that are shared by more than
one body must be selected from all bodies. Otherwise, model conformity is not preserved.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:delete-short-edges edge-list max-edge-length)

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

max-edge-length Specifies the maximum edge length. Argument type: REAL

Sentaurus™ Structure Editor User Guide 652

V-2024.03
Appendix A: Commands
sdegeo:delete-vertices

sdegeo:delete-vertices
This Scheme extension removes the specified vertices from the model. If there are
neighboring regions, vertices that are located at the same position and are shared by more
than one body must be selected from all bodies. Otherwise, model conformity is not
preserved.
Note:
This Scheme extension applies to 2D models only. Only vertices that are shared
by linear edges can be deleted.

Syntax
(sdegeo:delete-vertices vertex-list)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

sdegeo:delete-work-plane
This Scheme extension deletes the specified work plane.
Note:
The global work plane ‘base’ is created automatically and cannot be deleted.

Syntax
(sdegeo:delete-work-plane wp-name)

Returns
BOOLEAN

Arguments

Argument Description

wp-name Specifies the name of a work plane. Argument type: STRING

Sentaurus™ Structure Editor User Guide 653

V-2024.03
Appendix A: Commands
sdegeo:distance

sdegeo:distance
This Scheme extension returns the distance between two vertices.

Syntax
(sdegeo:distance vertex-list)

Returns
REAL

Arguments

Argument Description

vertex-list Specifies two vertices. Argument type: VERTEX LIST

sdegeo:dnce
This Scheme extension removes nearly collinear edges from a 2D model. The specified
angular tolerance determines which linear edges are removed.
If the edge normals differ less than the angular tolerance (in degrees) at a given vertex, then
the two neighboring edges are deleted and they are replaced by a linear edge connecting
the other two vertices of the two original edges that shared the given vertex.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:dnce angular-tolerance)

Returns
None

Arguments

Argument Description

angular-tolerance Specifies the angular tolerance. Argument type: REAL

Sentaurus™ Structure Editor User Guide 654

V-2024.03
Appendix A: Commands
sdegeo:extend-device

sdegeo:extend-device
This Scheme extension extends a device around its axis-aligned perimeter.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:extend-device {"right" extension} {"left" extension}
{"top" extension} {"bottom" extension})

Returns
BOOLEAN

Arguments

Argument Description

"right" extension Specifies to extend a device in the right direction by a specified extension
distance. Argument type: REAL

"left" extension Specifies to extend a device in the left direction by a specified extension
distance. Argument type: REAL

"top" extension Specifies to extend a device in the top direction by a specified extension
distance. Argument type: REAL

"bottom" extension Specifies to extend a device in the bottom direction by a specified

extension distance. Argument type: REAL

Description
The keywords specify the direction of the extension. At least one keyword must be used in
the argument list. More than one keyword can be used together with the actual extension
distance.
If an extension is defined around a corner (for example, both "top" and "right" are
specified), then the rounded corner is filled as well. The region names of the extended strips
are derived from the original region names. The extended sides must be axis aligned.
The sdegeo:extend-device command takes the process up direction into consideration. If
the process up direction is set to "-x":
• "left" is interpreted as "bottom".

• "right" is interpreted as "top".

Sentaurus™ Structure Editor User Guide 655

V-2024.03
Appendix A: Commands
sdegeo:extend-device

• "top" is interpreted as "left".

• "bottom" is interpreted as "right".

Examples
(sde:clear)
(degeo:create-rectangle (position 0 0 0) (position 1 0.2 0)
"Silicon" "xx1")
(sdegeo:create-rectangle (position 0 0.2 0) (position 1 0.3 0)
"Copper" "xx2")
(sdegeo:create-rectangle (position 0 0.3 0) (position 1 0.6 0)
"Silver" "xx3")
(sdegeo:create-rectangle (position 0 0.6 0) (position 1 0.7 0)
"PolySi" "xx4")
(sdegeo:extend-device "right" 0.3 "top" 0.2)

Sentaurus™ Structure Editor User Guide 656

V-2024.03
Appendix A: Commands
sdegeo:extrude

sdegeo:extrude
This Scheme extension extrudes a 2D device to a 3D model. It takes a list of 2D bodies
(specified by body-list) and extrudes them in the positive z-direction by
extrusion-depth. Instead of body-list, you can use the keyword all, in which case, the
complete model is extruded.
This Scheme extension also applies to Ref/Eval windows. In the case of a submesh
reference, information regarding the extruded Ref/Eval window before the extrusion and the
extrusion-depth are stored in the command file, so that the meshing engine can
reproduce doping information in the 3D extruded profile. For other doping profile types, the
extruded Ref/Eval window is stored directly in the command file without extrusion
information.

Syntax
(sdegeo:extrude body-list extrusion-depth [extrude-option])

Returns
None

Arguments

Argument Description

body-list Specifies a list of 2D bodies. Argument type: BODY LIST

extrusion-depth Specifies the extrusion depth in the positive z-direction. Argument type: REAL

extrude-option Optional. Specifies an extrusion option that is used to filter the input
body-list. Possible values are:
• If set to "2D" (default), then only 2D entities (sheet bodies) from the input
body-list are extruded.
• If set to "3D", then only the faces of 3D entities (solid bodies with a positive
volume) from the input body-list are extruded.
• If set to "Mixed", then both 2D and 3D entities are extruded (the entire
body-list).

Examples
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 0 10 0) (position 10 10.1 0)
"Oxide" "region_2")
(sdegeo:create-rectangle (position 4 10.1 0) (position 6 14 0)
"PolySilicon" "region_3")
(sdegeo:extrude "all" 4)

Sentaurus™ Structure Editor User Guide 657

V-2024.03
Appendix A: Commands
sdegeo:face-find-interior-point

sdegeo:face-find-interior-point
This Scheme extension takes a face Scheme object and returns a position object for an
interior point of that face.

Syntax
(sdegeo:face-find-interior-point position)

Returns
ENTITY (FACE)

Arguments

Argument Description

position Specifies a face Scheme object. Argument type: POSITION

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(define myface (car (find-face-id (position 5 5 10))))
(sdegeo:face-find-interior-point myface)
;; #[ position 5 5 10 ]

(sde:clear)
(define mybody (sdegeo:create-polygon (list (position 0 0 0)
(position 10 0 0) (position 10 5 0) (position 9 5 0)
(position 9 1 0) (position 1 1 0) (position 1 5 0)
(position 0 5 0) (position 0 0 0)) "Silicon" "xx"))
(define myface (car (entity:faces mybody)))
(sdegeo:face-find-interior-point myface)
;; #[ position 5 0.5 0 ]

Sentaurus™ Structure Editor User Guide 658

V-2024.03
Appendix A: Commands
sdegeo:fillet

sdegeo:fillet
This Scheme extension performs edge or vertex rounding operations on 3D bodies.

Syntax
(sdegeo:fillet edge-list | vertex-list
fillet-radius [adaptive-filleting])

Returns
None

Arguments

Argument Description

edge-list | Specifies either a list of edges or a list of vertices to be rounded.

vertex-list Argument type: EDGE LIST | VERTEX LIST

fillet-radius Specifies the rounding radius to be used for the operation.

Argument type: REAL

adaptive-filleting Optional. Specifies whether to perform adaptive filleting.

If you set the argument to #t, then if the filleting operation fails using the
original fillet-radius value, the operation is repeated with a
sequence of filleting operations, using an adaptive approach, to set the
fillet radius to smaller values until the operation succeeds.
Argument type: BOOLEAN

Description
You can use the GUI to select the edges to be rounded or you can use other methods to find
the edge entity IDs. For example, find-edge-id can be used to find the edge IDs.
Rounding is a complex operation and can fail for several reasons. A common problem is the
use of an incorrect fillet-radius, which is usually too large. The fillet-radius must be
selected so that the resulting model (after performing the filleting operation) is physically
(topologically) correct. Another typical problem is the incorrect selection of the edges to be
filleted. The edge or vertex list must contain all tangent continuous edges if an edge list is
specified; otherwise, rounding fails. Rounding changes model topology; new faces (and
edges) are created and old faces (edges) are removed from the model. When rounding is
performed in several steps, the order of performing the sdegeo:fillet operation can be
important. The rounding uses a constant-radius rounding for all edges in the edge or vertex
list.

Sentaurus™ Structure Editor User Guide 659

V-2024.03
Appendix A: Commands
sdegeo:fillet

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silver" "region_1")
(define edge1 (find-edge-id (position 5 0 0)))
(sdegeo:fillet edge1 2)
(define face1 (find-face-id (position 5 5 10)))
(sdegeo:fillet (entity:edges face1) 1)
(define face1 (find-face-id (position 5 0 5)))
(sdegeo:fillet (entity:edges face1) 3)

Sentaurus™ Structure Editor User Guide 660

V-2024.03
Appendix A: Commands
sdegeo:fillet-2d

sdegeo:fillet-2d
This Scheme extension rounds the specified vertex or list of vertices.
When you use the GUI, this operation is applied to the selected entities. The
(sde:selected-entities) Scheme extension returns the selected entity list. (Choose
Edit > Edit 2D > Fillet.)
Note:
When the rounding should be performed on a vertex (or vertices) shared by
neighboring regions, all vertices must be added to the argument list.
The fillet-radius must be selected so that the operation does not result in an
invalid geometry. Small roundings can result in an excessive number of small
elements during meshing.

Syntax
(sdegeo:fillet-2d vertex fillet-radius)

Returns
None

Arguments

Argument Description

vertex Specifies either a vertex or a list of vertices.

Argument type: ACIS VERTEX | ACIS VERTEX LIST

fillet-radius Specifies the rounding radius to be used for the operation.

Argument type: REAL

Examples
(define mybody (sdegeo:create-rectangle (position 0 0 0)
(position 10 10 0) "Silicon" "region_1"))
(define myvertices (entity:vertices mybody))
(sdegeo:fillet-2d (list (list-ref myvertices 0)
(list-ref myvertices 1)) 3)

Sentaurus™ Structure Editor User Guide 661

V-2024.03
Appendix A: Commands
sdegeo:find-closest-edge

sdegeo:find-closest-edge
This Scheme extension goes through the edge list of all defined geometric bodies and
returns the entity ID of the closest edge to the specified position.

Syntax
(sdegeo:find-closest-edge position)

Returns
(EDGE.REAL)

Arguments

Argument Description

position Argument type: POSITION

sdegeo:find-closest-face
This Scheme extension goes through the face list of all defined geometric bodies and
returns the entity ID of the closest face to the specified position.

Syntax
(sdegeo:find-closest-face position)

Returns
(FACE.REAL)

Arguments

Argument Description

position Argument type: POSITION

Sentaurus™ Structure Editor User Guide 662

V-2024.03
Appendix A: Commands
sdegeo:find-closest-vertex

sdegeo:find-closest-vertex
This Scheme extension goes through the vertex list of all defined geometric bodies and
returns the entity ID of the closest vertex to the specified position.

Syntax
(sdegeo:find-closest-vertex position)

Returns
(VERTEX.REAL)

Arguments

Argument Description

position Argument type: POSITION

Sentaurus™ Structure Editor User Guide 663

V-2024.03
Appendix A: Commands
sdegeo:find-touching-faces

sdegeo:find-touching-faces
This Scheme extension takes a list of faces and returns a list of pairs. The face pair list
contains entries only for those faces from the input list that have neighbor faces. For these
faces, the input face entity ID and the entity ID of the neighboring touching face are returned
as a pair.

Syntax
(sdegeo:find-touching-faces face-list)

Returns
ENTITY (FACE PAIR) | (FACE PAIR LIST)

Arguments

Argument Description

face-list Specifies a face or list of faces. Argument type: FACE | FACE LIST

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cuboid (position 3 3 6) (position 7 7 12)
"PolySilicon" "x2"))
(define nfl (sdegeo:find-touching-faces (car (find-face-id
(position 5 3 7) mb2))))
;; In this case, (cdar nfl) returns the face on the Silicon body
;; that is neighbor to the PolySilicon (car (find-face-id (position 5
;; 3 7) mb2)) face (there is only one such face).
(define nfl (sdegeo:find-touching-faces (entity:faces mb2)))
;; Return a list that contains all neighbor Silicon faces (listing as
;; PAIRs with the corresponding PolySilicon face). There are 5 such
;; face pairs returned in the nfl list, since there are 5 neighbor
;; Silicon faces to the PolySilicon body.

Sentaurus™ Structure Editor User Guide 664

V-2024.03
Appendix A: Commands
sdegeo:find-touching-faces-global

sdegeo:find-touching-faces-global
This Scheme extension takes a list of faces and returns a face list. The returned list contains
entries only for those faces from the input list that have neighbor faces. For these faces, the
neighboring touching face IDs are returned.

Syntax
(sdegeo:find-touching-faces-global face-list)

Returns
ENTITY FACE LIST

Arguments

Argument Description

face-list Specifies a face or list of faces. Argument type: FACE | FACE LIST

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cuboid (position 3 3 6) (position 7 7 12)
"PolySilicon" "x2"))
(define nfl (sdegeo:find-touching-faces-global (car (find-face-id
(position 5 3 7) mb2))))
(define nfl (sdegeo:find-touching-faces-global (entity:faces mb2)))

sdegeo:get-active-work-plane
This Scheme extension returns the name of the active work plane.

Syntax
(sdegeo:get-active-work-plane)

Returns
STRING

Sentaurus™ Structure Editor User Guide 665

V-2024.03
Appendix A: Commands
sdegeo:get-auto-region-naming

sdegeo:get-auto-region-naming
This Scheme extension returns the status of the automatic region-naming option. It returns
#t if the automatic region-naming option is switched on. It returns #f if it is switched off.

Syntax
(sdegeo:get-auto-region-naming)

Returns
BOOLEAN

sdegeo:get-contact-edgelist
This Scheme extension returns all the edges that have the specified contact set name
attached as a 2d-contact attribute.

Syntax
(sdegeo:get-contact-edgelist contact-set-name)

Returns
EDGE LIST

Arguments

Argument Description

contact-set-name Specifies the name of a contact set. Argument type: STRING

Sentaurus™ Structure Editor User Guide 666

V-2024.03
Appendix A: Commands
sdegeo:get-contact-facelist

sdegeo:get-contact-facelist
This Scheme extension returns all faces that have the specified contact set name attached
as a 3d-contact attribute.

Syntax
(sdegeo:get-contact-facelist contact-set-name)

Returns
FACE LIST

Arguments

Argument Description

contact-set-name Specifies the name of a contact set. Argument type: STRING

sdegeo:get-current-contact-set
This Scheme extension returns the name of the current (active) contact set.

Syntax
(sdegeo:get-current-contact-set)

Returns
STRING

Examples
(sdegeo:define-contact-set "Drain")
(sdegeo:define-contact-set "Source" 4.0 (color:rgb 1.0 0.0 0.0) "##")
(sdegeo:set-current-contact-set "Drain")
(sdegeo:get-current-contact-set)

Sentaurus™ Structure Editor User Guide 667

V-2024.03
Appendix A: Commands
sdegeo:get-default-boolean

sdegeo:get-default-boolean
This Scheme extension returns the default Boolean behavior as a string, which can be any
of the following predefined values: "AB", "ABA", "BAB", "ABiA", "ABiB", and "XX".

Syntax
(sdegeo:get-default-boolean)

Returns
STRING

sdegeo:get-region-counter
This Scheme extension returns the valid region counter.
By default, region names are assigned automatically to the generated regions. The
generated region names are region_%N, where %N is the region counter. The Scheme
extension returns %N.

Syntax
(sdegeo:get-region-counter)

Returns
INTEGER

Sentaurus™ Structure Editor User Guide 668

V-2024.03
Appendix A: Commands
sdegeo:imprint-circular-wire

sdegeo:imprint-circular-wire
This Scheme extension imprints a circular wire to an existing body. The imprinted wire splits
the faces of the existing bodies. This Scheme extension can be used to prescribe a circular
contact area.
The imprint functions split existing faces to surface patches. After the face split, the newly
created face patches to be marked as contacts must be identified. During the assignment of
contacts, these face ID numbers can be used explicitly.

Syntax
(sdegeo:imprint-circular-wire center-position radius)

Returns
FACE ID | FACE ID LIST of imprinted faces

Arguments

Argument Description

center-position Specifies the center of the circular wire body. Argument type: POSITION

radius Specifies the radius of the circular patch. Argument type: REAL

Sentaurus™ Structure Editor User Guide 669

V-2024.03
Appendix A: Commands
sdegeo:imprint-contact

sdegeo:imprint-contact
This Scheme extension imprints all 3D contacts (face contacts) to the neighboring touching
faces.

Syntax
(sdegeo:imprint-contact)

Returns
None

Examples
(sde:clear)
(define mb1 (sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "x1"))
(define mb2 (sdegeo:create-cuboid (position 3 3 4) (position 7 7 6)
"PolySilicon" "x2"))
(sdegeo:define-contact-set "base" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "base")
(define siliconface (car (find-face-id (position 5 5 4) mb1)))
(sdegeo:set-contact-faces (list siliconface) "base")
;; Now the contact face is defined on the Silicon body (mb1) but the
;; contact is not yet defined on the touching face of the PolySilicon
;; body (mb2).
(sdegeo:imprint-contact)
;; The contact is transferred to the neighbor face of the PolySilicon
;; body as well.

Sentaurus™ Structure Editor User Guide 670

V-2024.03
Appendix A: Commands
sdegeo:imprint-polygonal-wire

sdegeo:imprint-polygonal-wire
This Scheme extension imprints a polygonal wire to an existing body. The imprinted wire
splits the faces of the existing body. This Scheme extension can be used to prescribe a
polygonal contact area. The imprint functions split existing faces to surface patches. After
the face split, the newly created face patches to be marked as contacts must be identified.
During the assignment of contacts, these face ID numbers can be used explicitly.
The argument vertex-list contains the vertices of the imprinted polygon. The polygon
must be closed to imprint it, so the first position must be repeated as the last position.

Syntax
(sdegeo:imprint-polygonal-wire vertex-list)

Returns
None

Arguments

Argument Description

vertex-list Specifies the vertices of the imprinted polygon. Argument type: POSITION LIST

Sentaurus™ Structure Editor User Guide 671

V-2024.03
Appendix A: Commands
sdegeo:imprint-rectangular-wire

sdegeo:imprint-rectangular-wire
This Scheme extension imprints a rectangular wire to an existing body. The imprinted wire
splits the faces of the existing body. This Scheme extension can be used to prescribe a
rectangular contact area. The imprint functions split existing faces to surface patches. After
the face split, the newly created face patches to be marked as contacts must be identified.
During the assignment of contacts, these face ID numbers can be used explicitly.

Syntax
(sdegeo:imprint-rectangular-wire position1 position2)

Returns
None

Arguments

Argument Description

position1 position2 Specify the two opposite corners of the imprinted rectangular body.
Argument type: POSITION

Sentaurus™ Structure Editor User Guide 672

V-2024.03
Appendix A: Commands
sdegeo:imprint-triangular-wire

sdegeo:imprint-triangular-wire
This Scheme extension imprints a triangular wire to an existing body. The imprinted wire
splits the faces of the existing body. This Scheme extension can be used to prescribe a
triangular contact area. The imprint functions split existing faces to surface patches. After
the face split, the newly created face patches to be marked as contacts must be identified.
During the assignment of contacts, these face ID numbers can be used explicitly.

Syntax
(sdegeo:imprint-triangular-wire position1 position2 position3)

Returns
None

Arguments

Argument Description

position1 position2 Specify the three vertices of the imprinted triangular wire.
position3 Argument type: POSITION

sdegeo:insert-vertex
This Scheme extension inserts a vertex in a 2D model by projecting the specified insert
position to the nearest edge.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:insert-vertex vertex-list)

Returns
None

Arguments

Argument Description

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

Sentaurus™ Structure Editor User Guide 673

V-2024.03
Appendix A: Commands
sdegeo:max-edge-length

sdegeo:max-edge-length
This Scheme extension computes the length of each edge in edge-list and returns the
length of the longest edge.

Syntax
(sdegeo:max-edge-length edge-list)

Returns
REAL

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "AB")
(sdegeo:create-rectangle (position 0 0 0) (position 2 2 0) "Silicon"
"region_1")
(sdegeo:create-circle (position 1 2 0) 1 "Silicon" "region_2")
(define elist (entity:edges (get-body-list)))
(sdegeo:max-edge-length elist)

Sentaurus™ Structure Editor User Guide 674

V-2024.03
Appendix A: Commands
sdegeo:min-edge-length

sdegeo:min-edge-length
This Scheme extension computes the length of each edge in edge-list and returns the
length of the shortest edge.

Syntax
(sdegeo:min-edge-length edge-list)

Returns
REAL

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

Examples
(sde:clear)
(sdegeo:set-default-boolean "AB")
(sdegeo:create-rectangle (position 0 0 0) (position 2 2 0) "Silicon"
"region_1")
(sdegeo:create-circle (position 1 2 0) 1 "Silicon" "region_2")
(define elist (entity:edges (get-body-list)))
(sdegeo:min-edge-length elist)

Sentaurus™ Structure Editor User Guide 675

V-2024.03
Appendix A: Commands
sdegeo:mirror-selected

sdegeo:mirror-selected
This Scheme extension reflects the specified entities.
The reflection data is specified through a transform, which is a
transform:reflection-type transform object.

If keep-flag is #t and the mirrored body overlaps the original body, then the two bodies are
merged in the case of geometric bodies. Doping and Ref/Eval bodies are merged even if the
original and the mirrored bodies are disjoint.

Syntax
(sdegeo:mirror-selected entity-list transform keep-flag
[reverse-DRS-flag])

Returns
None

Arguments

Argument Description

entity-list Specifies a list of entities. Argument type: ENTITY LIST

transform Argument type: transform:reflection

keep-flag Argument type: BOOLEAN

reverse-DRS-flag Optional. If this argument is set to #t, then doping and Ref/Eval wire bodies
such as the direction of the doping baselines are reversed before being
mirrored. So that after mirroring, the doping direction remains the same as
the original. The default is #f.
Argument type: BOOLEAN

Examples
(sde:clear)
(define mb (sdegeo:create-rectangle (position 1 1 0) (position 2 2 0)
"Silicon" "xx"))
(define tr1 (transform:reflection (position 0 0 0) (gvector -1 0 0)))
(sdegeo:mirror-selected (get-body-list) tr1 #t)

Sentaurus™ Structure Editor User Guide 676

V-2024.03
Appendix A: Commands
sdegeo:move-2d-regions

sdegeo:move-2d-regions
This Scheme extension moves the specified regions (identified by their entity IDs) to a new
location.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:move-2d-regions body | body-list gvector)

Returns
BOOLEAN

Arguments

Argument Description

body | body-list Specifies a region or a list of regions (identified by their entity IDs) to be
moved. Argument type: BODY | BODY LIST

gvector Specifies the new position of the regions. Argument type: GVECTOR

Examples
(sde:clear)
(define mb1 (sdegeo:create-rectangle (position 0 0 0)
(position 1 1 0) "Silver" "region_1"))
(sdegeo:move-2d-regions mb1 (gvector 1 1 0))

Sentaurus™ Structure Editor User Guide 677

V-2024.03
Appendix A: Commands
sdegeo:move-edge

sdegeo:move-edge
This Scheme extension moves the specified edge (identified by its entity ID) to a new
location.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:move-edge edge gvector)

Returns
None

Arguments

Argument Description

edge Specifies an edge to be moved. Argument type: EDGE

gvector Specifies the new position of the edge. Argument type: GVECTOR

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silver" "region_1")
(define top-edge (car (find-edge-id (position 0.5 1 0))))
(sdegeo:move-edge top-edge (gvector 0.2 0.2 0))

Sentaurus™ Structure Editor User Guide 678

V-2024.03
Appendix A: Commands
sdegeo:move-vertex

sdegeo:move-vertex
This Scheme extension moves the specified vertex or vertex list (identified by its entity IDs)
to a new location.
Note:
This Scheme extension applies to 2D models only. Vertices of 2D geometric
bodies, as well as vertices of 2D DRS bodies (Ref/Eval windows), can be used.

Syntax
(sdegeo:move-vertex ve pe)

Returns
None

Arguments

Argument Description

ve Specifies a vertex or a list of vertices to be moved.

Argument type: VERTEX | VERTEX LIST

pe Specifies the new location of the vertex or vertices. The new location can be
given by a position entity or by a gvector (if a single vertex is the input).
If the input is a vertex list, then the new vertex positions can be specified by
either a gvector or a position list.
Argument type: POSITION | GVECTOR | POSITION LIST

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silver" "region_1")
(define lower-left-vertex (car (find-vertex-id (position 0 0 0))))
(sdegeo:move-vertex lower-left-vertex (position -0.2 0.2 0))

Sentaurus™ Structure Editor User Guide 679

V-2024.03
Appendix A: Commands
sdegeo:point-entity-relationship

sdegeo:point-entity-relationship
This Scheme extension determines the containment relationship of the specified position
with respect to the specified body:
• If the body contains the specified position, then the Scheme extension returns inside.
• If the body lies on a face of the body, then it returns boundary.
• If the point is not contained, then it returns outside.

Syntax
(sdegeo:point-entity-relationship body lposition)

Returns
STRING

Arguments

Argument Description

body Specifies a body. Argument type: BODY

lposition Argument type: POSITION

Sentaurus™ Structure Editor User Guide 680

V-2024.03
Appendix A: Commands
sdegeo:polygonal-split

sdegeo:polygonal-split
This Scheme extension splits a 2D device along the specified path. The first and last
positions in the argument list snap to the closest boundary edge. All device bodies are split
along the specified path, and a new unique region name is assigned to each split part
(original region name plus _N, where N is a counter, which counts the split parts for each
region separately).

Syntax
(sdegeo:polygonal-split plist)

Returns
None

Arguments

Argument Description

plist Specifies a list of positions. Argument type: POSITION LIST

Examples
(sdegeo:create-circle (position 7 5 0) 3 "Copper" "r3")
(sdegeo:create-rectangle (position 0 0 0) (position 10 5 0) "Silicon"
"r1")
(sdegeo:create-rectangle (position 3 5 0) (position 7 9 0) "PolySi"
"r2")
(sdegeo:polygonal-split (list (position 2 4.5 0) (position 4 1 0)
(position 9 1 0) (position 9 6 0) (position 9 6 0)))

Sentaurus™ Structure Editor User Guide 681

V-2024.03
Appendix A: Commands
sdegeo:prune-vertices

sdegeo:prune-vertices
This Scheme extension merges neighboring edges by pruning the vertices. It is fast, very
robust, and recommended to simplify 2D geometry.
The Scheme extension sdegeo:dnce (delete nearly collinear edges) calls
sdegeo:prune-vertices for all bodies. See sdegeo:dnce on page 654.
Note:
This Scheme extension applies to 2D models only.

Syntax
(sdegeo:prune-vertices {body-list | edge-list | vertex-list}
angular-tolerance)

Returns
None

Arguments

Argument Description

body-list Specifies a list of bodies. Argument type: BODY LIST

edge-list Specifies a list of edges. Argument type: EDGE LIST

vertex-list Specifies a list of vertices. Argument type: VERTEX LIST

angular-tolerance Specifies the angular threshold for the operation. If the edge normals (at
the common vertex position) are less than the specified
angular-tolerance (in degrees), then the edges merge by removing the
common vertex and replacing the two neighboring linear edges by a single
edge. Argument type: REAL

Sentaurus™ Structure Editor User Guide 682

V-2024.03
Appendix A: Commands
sdegeo:ray-test

sdegeo:ray-test
This Scheme extension returns the positions where a ray intersects a solid as pairs. The first
element of each pair is the entity hit by the ray, and the second element of the pair is the
position where the ray intersects the solid. The pairs are sorted along the direction of the
ray. If the ray intersects a single face more than once, then the Scheme extension returns
the first intersection.

Syntax
(sdegeo:ray-test entity ray radius)

Returns
((ENTITY . POSITION) ...)

Arguments

Argument Description

entity Specifies an entity. It must be a solid body. Argument type: BODY

ray Specifies a ray, which consists of a position and a direction. Argument type: RAY

radius Specifies a radius. Argument type: REAL

Examples
; solid:ray-test
; Create a solid block.
(define block1 (solid:block (position 0 0 0) (position 40 40 40)))
; Determine where the ray intersects the solid block.
(sdegeo:ray-test block1 (ray (position 10 20 60) (gvector 0 0 -1)) 0.1)
; ((#[face 20 1] . #[position 10 20 40]) (#[face 19 1] .
; #[position 10 20 0]))

(sde:clear)
(define mysphere (sdegeo:create-sphere (position 5 5 10) 3 "Gold" "x2"))
(sdegeo:ray-test mysphere (ray (position 5 5 20) (gvector 0 0 -1)) 0.1)
; ((#[face 27 1] . #[position 5 5 13]))

Sentaurus™ Structure Editor User Guide 683

V-2024.03
Appendix A: Commands
sdegeo:reflect

sdegeo:reflect
This Scheme extension reflects the specified entities.
Note:
This Scheme extension is available but obsolete. Instead, use
sdegeo:mirror-selected (see sdegeo:mirror-selected on page 676).

Syntax
(sdegeo:reflect entity-list base-position base-vector keep-flag)

Returns
None

Arguments

Argument Description

entity-list Specifies a list of entities. Instead of an entity list, you can use the keyword
"all", in which case, the operation is performed on all entities.
Argument type: BODY | BODY LIST

base-position Specifies the base position that is used for the operation.
Argument type: POSITION

base-vector Specifies the direction of the reflection as a gvector. The reflect operation
generates new bodies that inherit the material properties of the parent bodies.
If base-vector points to the x-direction, then the region names for the new
regions are inherited from the parent region names and .x is appended to the
region names.
If base-vector points to the y-direction, then .y is appended to the region
names.
Similarly, for the z-direction, .z is used.
In all other cases, .tr is added to the region names.
Argument type: GVECTOR

keep-flag Specifies whether the parent elements are kept. If keep-flag is #t, then the
parent elements are kept. If it is #f, then the parent elements are deleted.
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 684

V-2024.03
Appendix A: Commands
sdegeo:rename-contact

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 0 10 0) (position 10 10.1 0)
"Oxide" "region_2")
(sdegeo:create-rectangle (position 4 10.1 0) (position 6 14 0)
"PolySilicon" "region_3")
; (sdegeo:extrude "all" 4)
(sdegeo:reflect "all" (position 10 0 0) (gvector 1 0 0) #t)

sdegeo:rename-contact
This Scheme extension renames an existing contact.

Syntax
(sdegeo:rename-contact oldContName newContName)

Returns
None

Arguments

Argument Description

oldContName Specifies the name of a contact set. Argument type: STRING

newContName Specifies the new name of a contact set. Argument type: STRING

Sentaurus™ Structure Editor User Guide 685

V-2024.03
Appendix A: Commands
sdegeo:revolve

sdegeo:revolve
This Scheme extension revolves the specified entity or entities with the specified
base-position and base-vector. The revolve operation is always performed with respect
to the active coordinate system orientation.
When you use the GUI, the revolve operation is applied to the selected entities. The Scheme
extension (sde:selected-entities) returns the selected entity list. If no entities are
selected and the GUI is used, then the operation is performed for the complete model.
Caution:
When the revolve operation is applied to only some parts of a device, overlapping
regions or gaps can be created. In this case, explicit Boolean operations must be
performed on the model to avoid overlapping regions.

Syntax
(sdegeo:revolve entity-list base-position base-vector angle)

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Instead of an entity list, you can use the
keyword "all", in which case, the entire device is revolved.
Argument type: BODY | BODY LIST

base-position Specifies the base position about which the listed entities are revolved.
Argument type: POSITION

base-vector Specifies the axis of the revolve operation. Argument type: GVECTOR

angle Specifies an angle. Argument type: REAL

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0) "Silicon"
"region_1")
(sdegeo:create-rectangle (position 0 10 0) (position 10 10.1 0)
"Oxide" "region_2")
(sdegeo:create-rectangle (position 4 10.1 0) (position 6 14 0)
"PolySilicon" "region_3")

Sentaurus™ Structure Editor User Guide 686

V-2024.03
Appendix A: Commands
sdegeo:rotate-selected

(sdegeo:revolve "all" (position 0 0 0) (gvector 0 1 0) 90)

(sdegeo:reflect "all" (position 0 0 0) (gvector -1 0 0) #t)

sdegeo:rotate-selected
This Scheme extension rotates the specified entities.
The rotation data is specified through a transform, which is a transform:rotation-type
transform object.

Syntax
(sdegeo:rotate-selected entity-list transform
{[keep-flag]} |
{[keep-flag] [overlap-rule]} |
{[keep-flag] [repeat-number]} |
{[keep-flag] [overlap-rule] [repeat-number]})

Returns
BOOLEAN

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Argument type: BODY | BODY LIST

transform Specifies a transformation. Argument type: transform:rotation

keep-flag Optional. If keep-flag is #t, then you can also specify repeat-number. If
keep-flag is #t and the transformed entities overlap existing entities, then the
default overlap removal rule is used to delete the overlaps, or another overlap
removal rule can be specified using the overlap-rule argument.
Argument type: BOOLEAN

overlap-rule Optional. Specifies whether there is automatic Boolean overlap removal. The
default is #t, in which case, overlaps are removed automatically.
If overlap-rule is set to #f, then automatic overlap control is switched off. In
addition, this argument can be any of the valid automatic Boolean overlap
removal methods (such as "ABA" and "BAB"), in which case, the specified
Boolean overlap removal rule is used when overlaps are deleted.
Argument type: BOOLEAN or "ABA", "BAB"

repeat-number Optional. Specifies another overlap removal rule. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 687

V-2024.03
Appendix A: Commands
sdegeo:rotate-selected

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(define mb (sdegeo:create-rectangle (position 10 0 0)
(position 20 10 0) "Silicon" "xx"))
(define tr (transform:rotation (position 0 0 0) (gvector 0 0 1) 30))
(sdegeo:rotate-selected mb tr #t 6)
;; overlaps are not removed

(roll)
(sdegeo:rotate-selected mb tr #t 6 #f)
;; same as above, the overlaps are not removed

(roll)
(sdegeo:rotate-selected mb tr #t 6 #t)
;; overlaps are removed, using the current "ABA" rule

(roll)
(sdegeo:rotate-selected mb tr #t 6 "BAB")
;; overlaps are removed, using the specified "BAB" rule

Sentaurus™ Structure Editor User Guide 688

V-2024.03
Appendix A: Commands
sdegeo:scale

sdegeo:scale
This Scheme extension scales the specified entity or entities with the specified scaling
factors. Scaling is defined by its xyz components. The z-component is optional.
When you use the GUI, scaling is applied to the selected entities. The Scheme extension
(sde:selected-entities) returns the selected entity list. If no entities are selected and
the GUI is used, then the operation is performed for the complete model.
The scale operation is always performed with respect to the active coordinate system
orientation, that is, the xyz values are applied in the active coordinate system orientation, in
the local xyz directions. (Choose Edit > Transform > Scale.)
Note:
When the operation is applied to only some parts of a device, overlapping regions
or gaps can be created. In this case, explicit Boolean operations must be
performed on the model to avoid overlapping regions.

Syntax
(sdegeo:scale entity-list scale-x scale-y [scale-z])

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Instead of an entity or an entity list, you
can use the keyword "all", in which case, the entire device is scaled.
Argument type: BODY | BODY LIST

scale-x Specifies the scaling factor for the x-component. Argument type: REAL

scale-y Specifies the scaling factor for the y-component. Argument type: REAL

scale-z Optional. Specifies the scaling factor for the z-component.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 689

V-2024.03
Appendix A: Commands
sdegeo:scale-selected

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0) "Silicon"
"region_1")
(sdegeo:create-rectangle (position 4 8 0) (position 6 14 0)
"PolySilicon" "region_2")
(sdegeo:scale "all" 2 1 1)

sdegeo:scale-selected
This Scheme extension scales the specified entities.
The scaling data is specified through a transform, which is a transform:scaling-type
transform object.

Syntax
(sdegeo:scale-selected entity-list transform)

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Argument type: BODY | BODY LIST

transform Specifies a transformation. Argument type: transform:scaling

Sentaurus™ Structure Editor User Guide 690

V-2024.03
Appendix A: Commands
sdegeo:set-active-coord-sys

sdegeo:set-active-coord-sys
This Scheme extension sets the specified coordinate system orientation as the active
coordinate system orientation. All subsequent geometry creation commands are applied to
that coordinate system orientation.

Syntax
(sdegeo:set-active-coord-sys cs-name)

Returns
BOOLEAN

Arguments

Argument Description

cs-name Specifies the name of a coordinate system orientation. Argument type: STRING

sdegeo:set-active-work-plane
This Scheme extension sets the specified work plane as the active work plane. All
subsequent geometry creation commands are applied to that work plane.

Syntax
(sdegeo:set-active-work-plane wp-name)

Returns
BOOLEAN

Arguments

Argument Description

wp-name Specifies the name of a work plane. Argument type: STRING

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"region_1")
(sdegeo:define-work-plane "wp1" (position 0 0 1) (position 1 0 1)
(position 0 1 1))

Sentaurus™ Structure Editor User Guide 691

V-2024.03
Appendix A: Commands
sdegeo:set-auto-region-naming

(sdegeo:set-active-work-plane "wp1")
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"PolySilicon" "region_2")
; view the model, by rotating the view.

sdegeo:set-auto-region-naming
This Scheme extension switches on or off the automatic region-naming option.
Regions are named using region_%d, where %d is an increasing integer.

Syntax
(sdegeo:set-auto-region-naming on-off)

Returns
BOOLEAN

Arguments

Argument Description

on-off Specifies whether to switch on automatic region naming.

Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 692

V-2024.03
Appendix A: Commands
sdegeo:set-contact

sdegeo:set-contact
This Scheme extension assigns the active contact to the specified entities.

Syntax
(sdegeo:set-contact entity-list
[contact-name ["remove"] ["imprint" BOOLEAN]])

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities.

Argument type: ENTITY | ENTITY LIST

contact-name Optional. Specifies a contact name. Argument type: STRING

"remove" Optional. If you specify this option with the contact name, then the specified
entity or list of entity bodies are deleted, and the contacts are defined only for
the imprinted edges or faces. Argument type: STRING

"imprint" Optional. Specifies whether 3D contacts are imprinted automatically to the

touching neighbor faces. The default is #t.
Three-dimensional contacts are imprinted automatically to the touching
neighbor faces, unless you specify "imprint" #f in the argument list.
Argument type: BOOLEAN

Description
This Scheme extension attaches the active contact to the specified entity, or entities, if you
do not specify the optional contact-name argument. If you specify contact-name, then it is
activated (or created as a contact if it does not exist).
If the entity type is EDGE, then a 2D contact is defined. If the entity type is FACE (and the entity
belongs to a 3D body), then a 3D contact is assigned. If the entity is a 2D body, then a 2D
contact is defined on all edges of the entity. If the entity is a 3D body, a 3D contact is defined
on all faces of the entity. (Choose Device > Contacts > Contact.)

Sentaurus™ Structure Editor User Guide 693

V-2024.03
Appendix A: Commands
sdegeo:set-contact-boundary-edges

This Scheme extension is more convenient and can replace the following Scheme
extensions:
• sdegeo:set-contact-boundary-edges

• sdegeo:set-contact-boundary-faces

• sdegeo:set-contact-edges

• sdegeo:set-contact-faces

sdegeo:set-contact-boundary-edges
This Scheme extension attaches the name of the active contact set to all edges of a
specified body. It defines all edges of a selected region or regions as contacts, using the
name of the active contact set and the selected entities (sde:selected-entities).
Alternatively, a body list can be specified in the argument list. In this case,
(sde:selected-entities) is ignored and the edge list is extracted from the specified body
list. (Choose Device > Contacts > Set Region Boundary Edges.)

Syntax
(sdegeo:set-contact-boundary-edges body | body-list)

Returns
None

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a list of bodies. Argument type: BODY LIST

Sentaurus™ Structure Editor User Guide 694

V-2024.03
Appendix A: Commands
sdegeo:set-contact-boundary-faces

sdegeo:set-contact-boundary-faces
This Scheme extension attaches a contact attribute to each face of the specified body or
bodies. If the argument list is empty, then the Scheme extension takes the bodies from
(sde:selected-entities).

The name of the active contact set is taken to specify the contacts. Alternatively, to the
selected faces, a face list can be given explicitly in the argument list.

Syntax
(sdegeo:set-contact-boundary-faces body | body-list)

Returns
None

Arguments

Argument Description

body Specifies a body. Argument type: BODY

body-list Specifies a list of bodies. Argument type: BODY LIST

Examples
(sde:clear)
(sdegeo:define-contact-set "xx" 4.0 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "xx")
(define mycube (sdegeo:create-cuboid (position 0 0 0) (position 1 1 1)
"PolySilicon" "region_1"))
(sdegeo:set-contact-boundary-faces mycube)

Sentaurus™ Structure Editor User Guide 695

V-2024.03
Appendix A: Commands
sdegeo:set-contact-edges

sdegeo:set-contact-edges
This Scheme extension marks all listed edges as contacts.
When you use the GUI to add contact attributes to the edges, the selected entities are used
to initialize the edge list. The Scheme extension (sde:selected-entities) returns the
edges that were previously selected (and that are highlighted) from the GUI as contacts. The
contact set name is the active contact set name. (Choose Device > Contacts > Set Edges.)

Syntax
(sdegeo:set-contact-edges edge-list contact-set-name)

Returns
None

Arguments

Argument Description

edge-list Specifies a list of edges. Argument type: EDGE LIST

contact-set-name Specifies the name of the contact set to which the contact edges will belong.
The specified contact set must be predefined. Argument type: STRING

Sentaurus™ Structure Editor User Guide 696

V-2024.03
Appendix A: Commands
sdegeo:set-contact-faces

sdegeo:set-contact-faces
This Scheme extension attaches a contact attribute to faces. If the argument list is empty,
then the Scheme extension takes the faces from (sde:selected-entities). The name of
the active contact set is taken to specify the contacts. Alternatively, to the selected faces, a
face list can be given explicitly in the argument list. (Choose Device > Contacts > Set
Faces.)

Syntax
(sdegeo:set-contact-faces face-list)

Returns
None

Arguments

Argument Description

face-list Specifies a face or a list of faces. Argument type: FACE | FACE LIST

Sentaurus™ Structure Editor User Guide 697

V-2024.03
Appendix A: Commands
sdegeo:set-contact-faces-by-polygon

sdegeo:set-contact-faces-by-polygon
This Scheme extension provides an alternative way to prescribe contacts. It can attach a
contact attribute to only a part of an existing face (or list of faces).
The specified polygons are imprinted on the faces of the existing model. After the imprint
operation, the original faces are split and the contact attribute is attached to the imprinted
face segment.

Syntax
(sdegeo:set-contact-faces-by-polygon polygon-list normal-list
contact-set-name)

Returns
None

Arguments

Argument Description

polygon-list Specifies a list of polygons. A polygon is a POSITION list.

Argument type: POLYGON LIST

normal-list Specifies a list of normal vectors. A normal vector must be specified for each
face to mark the direction of the imprint. Argument type: GVECTOR LIST

contact-set-name Specif-es the name of the contact set. Argument type: STRING

Examples
; To define a polygonal contact region, use sde:define-contact
; which is a list of polygons (a polygon is a list of 3D vertices).
; Example:
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10) "Silicon"
"r1")
(sdegeo:define-contact-set "c1" 4 (color:rgb 1 0 0) "##")
(sdegeo:define-contact-set "c2" 4 (color:rgb 1 0 0) "==")
(sdegeo:define-contact-set "c3" 4 (color:rgb 1 0 0) "//")
(sdegeo:set-current-contact-set "c1")
(sdegeo:set-contact-faces-by-polygon (list (list (position 8 7 10)
(position 9 8 10) (position 8 9 10) (position 7 8 10)
(position 8 7 10)))
(list (gvector 0 0 -1)) "c1")
(sdegeo:set-contact-faces-by-polygon (list (list (position 0 0 0)
(position 2 0 0) (position 2 3 0) (position 0 3 0)
(position 0 0 0)))

Sentaurus™ Structure Editor User Guide 698

V-2024.03
Appendix A: Commands
sdegeo:set-current-contact-set

(list (gvector 0 0 1)) "c2")

(sdegeo:set-contact-faces-by-polygon (list (list (position 0 5 2)
(position 0 8 5) (position 0 5 8) (position 0 2 5))
(list (position 10 5 2) (position 10 8 5) (position 10 5 8)
(position 10 2 5)))
(list (gvector 1 0 0) (gvector -1 0 0)) "c3")
(sdegeo:set-contact-faces-by-polygon (list (list (position 0 5 2)
(position 0 8 5) (position 0 5 8) (position 0 2 5))
(list (position 10 5 2)(position 10 8 5) (position 10 5 8)
(position 10 2 5)))
(list (gvector 1 0 0) (gvector -1 0 0)) "c3")

sdegeo:set-current-contact-set
This Scheme extension sets the name of the current (active) contact to the specified contact
set. An error occurs if the specified contact set is not yet defined.

Syntax
(sdegeo:set-current-contact-set cs-name)

Returns
Name of the previously defined contact set

Arguments

Argument Description

cs-name Specifies the name of a contact set. Argument type: STRING

Examples
(sdegeo:define-contact-set "Drain")
(sdegeo:define-contact-set "Source" 4.0 (color:rgb 1.0 0.0 0.0) "##")
(sdegeo:set-current-contact-set "Drain")

Sentaurus™ Structure Editor User Guide 699

V-2024.03
Appendix A: Commands
sdegeo:set-default-boolean

sdegeo:set-default-boolean
This Scheme extension sets the default Boolean behavior.

Syntax
(sdegeo:set-default-boolean boolean-value)

Returns
STRING

Arguments

Argument Description

boolean-value Specifies the default Boolean behavior. This argument can be any of the
following predefined values (the default behavior determines how overlapping
regions are treated):
• When set to "AB", the newly created regions are merged (united)
automatically with all existing overlapping regions. The merged regions
inherit the DATEX material (and region name) from the new region.
• "ABA" subtracts all overlapping regions from the existing regions.
• "BAB" subtracts all existing regions from the newly created regions.
• The "ABiA" behavior is similar to the "ABA" behavior, except that the
overlaps are separate regions (with the DATEX material inherited from the
new regions).
• "ABiB" is similar to "ABiA", except that the overlap regions inherit the
DATEX material from the existing regions.
• "XX" allows the creation of overlapping regions. In this case, you must
modify the model by explicitly deleting the overlapping parts, before
generating the tessellated boundary output.
Argument type: STRING

Examples
(sde:clear)
(sdegeo:set-default-boolean "AB")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(sdegeo:create-rectangle (position 3 8 0) (position 7 13 0)
"PolySilicon" "region_2")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 20 0 0) (position 30 10 0)
"Silicon" "region_3")
(sdegeo:create-rectangle (position 23 8 0) (position 27 13 0)
"PolySilicon" "region_4")
(sdegeo:set-default-boolean "BAB")
(sdegeo:create-rectangle (position 40 0 0) (position 50 10 0)
"Silicon" "region_5")

Sentaurus™ Structure Editor User Guide 700

V-2024.03
Appendix A: Commands
sdegeo:set-region-counter

(sdegeo:create-rectangle (position 43 8 0) (position 47 13 0)

"PolySilicon" "region_6")
(sdegeo:set-default-boolean "ABiA")
(sdegeo:create-rectangle (position 0 20 0) (position 10 30 0)
"Silicon" "region_7")
(sdegeo:create-rectangle (position 3 28 0) (position 7 33 0)
"PolySilicon" "region_8")
(sdegeo:set-default-boolean "ABiB")
(sdegeo:create-rectangle (position 20 20 0) (position 30 30 0)
"Silicon" "region_9")
(sdegeo:create-rectangle (position 23 28 0) (position 27 33 0)
"PolySilicon" "region_10")
(sdegeo:set-default-boolean "XX")
(sdegeo:create-rectangle (position 40 20 0) (position 50 30 0)
"Silicon" "region_11")
(sdegeo:create-rectangle (position 43 28 0) (position 47 33 0)
"PolySilicon" "region_12")

sdegeo:set-region-counter
This Scheme extension sets the region counter explicitly.
When the automatic region-naming option is selected, the generated regions are numbered
sequentially using the region counter. Regions are named automatically as Region_1,
Region_2, and so on. When the region counter is set to N, the next generated region is
named Region_N.

Syntax
(sdegeo:set-region-counter counter)

Returns
None

Arguments

Argument Description

counter Specifies the region counter. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 701

V-2024.03
Appendix A: Commands
sdegeo:set-region-counter-aut

sdegeo:set-region-counter-aut
This Scheme extension sets the region counter automatically.
The region attribute is checked for each existing regions and, if a Region_N attribute is
found, the region counter attribute is set to the next available number N+1. When a boundary
file is loaded, this Scheme extension is called automatically.

Syntax
(sdegeo:set-region-counter-aut)

Returns
None

Sentaurus™ Structure Editor User Guide 702

V-2024.03
Appendix A: Commands
sdegeo:skin-wires

sdegeo:skin-wires
This Scheme extension defines a 3D body such that the given wires or faces define the
cross sections to be interpolated by the resulting 3D body.
At least two wire bodies or faces must be specified. The wires can be open or closed. The
wires are copies, that is, the originals remain. The wires can share endpoints and do not
have to be C1 continuous.

Syntax
(sdegeo:skin-wires body-list [path] [skin-options])

Returns
ENTITY (BODY)

Arguments

Argument Description

body-list Specifies a list of wire bodies. Argument type: WIRE LIST | FACE LIST

path Optional. Defines a curve that is intersected with the plane of each profile. At
each of the resulting intersection points on the curve, the tangent vector is
calculated and is applied to the surface as a constraint at that profile.
Argument type: WIRE

skin-options Optional. Defines different skinning options. For a complete list of skinning
options, see skin:options on page 838. Argument type: SKIN OPTIONS

Examples
(sde:clear)
(define b1 (sdegeo:create-circle (position 0 0 0) 10 "Copper" "r1"))
(define b2 (sdegeo:create-ellipse (position 0 0 20)
(position 20 0 20) 0.5 "Copper" "r2"))
(define f1 (car (entity:faces b1)))
(define f2 (car (entity:faces b2)))
(define bs (sdegeo:skin-wires (list f1 f2)))
(sde:add-material bs "Copper" "bs")
(entity:delete (list b1 b2))

Sentaurus™ Structure Editor User Guide 703

V-2024.03
Appendix A: Commands
sdegeo:skin-wires-guides

sdegeo:skin-wires-guides
This Scheme extension creates a sheet body that interpolates a series of wires or faces with
a guide curve.
The given wires or faces define the cross sections to be interpolated by the resulting sheet
body. The wire bodies are assumed to be simple and well-behaved. The wires can be open
or closed. The wires are copies, that is, the originals remain. The wires can share endpoints
and do not have to be C1 continuous.

Syntax
(sdegeo:skin-wires-guides body-list guides [skin-options])

Returns
ENTITY (BODY)

Arguments

Argument Description

body-list Specifies a list of wire bodies. Argument type: WIRE LIST | FACE LIST

guides Specifies the curves that the skinning surface directly follows (in the skinning
direction). The guides must intersect each wire profile within 1.0e-06 and must
start and end on the first and last profile exactly. Any number of guides can be
added, and they can fall directly on vertices or not. Guides must be C1
continuous and well-behaved (no looping). Argument type: EDGE LIST

skin-options Optional. Defines different skinning options. For a complete list of skinning
options, see skin:options on page 838. Argument type: SKIN OPTIONS

Sentaurus™ Structure Editor User Guide 704

V-2024.03
Appendix A: Commands
sdegeo:skin-wires-normal

sdegeo:skin-wires-normal
This Scheme extension creates a sheet body that interpolates a series of wires or faces with
take-off vectors normal to the plane of the wire body.
The given wires or faces define the cross sections to be interpolated by the resulting sheet
body with the additional constraint of the surface take-off vectors leaving normal to the plane
of each of the wire bodies.
There must be at least two wire bodies. The wire bodies are assumed to be simple, meaning
only the first wire of each body is used for skinning. The wires can be open or closed. The
wires are copies, that is, the originals remain. The wires can share endpoints and do not
have to be C1 continuous.

Syntax
(sdegeo:skin-wires-normal body-list normal-type [skin-options])

Returns
ENTITY (BODY)

Arguments

Argument Description

body-list Specifies a list of wire bodies. Argument type: WIRE LIST | FACE LIST

normal-type Specifies to which profiles the normal constraint must be applied. Values are:
• "first_normal"
• "last_normal"
• "ends_normal"
• "all_normal"
In the case of "first_normal", the constraint is applied only to the first profile.
Other values follow similarly.
Argument type: STRING

skin-options Optional. Defines different skinning options. For a complete list of skinning
options, see skin:options on page 838. Argument type: SKIN OPTIONS

Sentaurus™ Structure Editor User Guide 705

V-2024.03
Appendix A: Commands
sdegeo:skin-wires-vectors

sdegeo:skin-wires-vectors
This Scheme extension creates a sheet body that interpolates a series of wires with take-off
vectors as constraints.
The wires specified in the argument list define the cross sections to be interpolated by the
resulting sheet body. There must be at least two wire bodies. Wire bodies are assumed to
be simple, meaning only the first wire of each body is used for skinning. Wires can be open
or closed. Wires are copies, that is, the originals remain. Wires can share endpoints and do
not have to be C1 continuous.
The argument magnitude-list is a list of magnitudes. Skinning with vectors accepts as
additional constraints a list of vectors and, optionally, a list of magnitudes to control the
take-off directions with which the skin surface leaves the profiles. The number of supplied
vectors must equal the number of profiles if the closed option is set to FALSE. If closed is
set to TRUE, then one more vector can be given. It is used on the copy that is made of the
first profile to create a closed body. If no additional vector is provided, then the first vector is
used also on the first profile copy. In a similar way, magnitudes can be provided. A profile is
interpolated without constraint if the vector supplied for it is the zero vector.

Syntax
(sdegeo:skin-wires-vectors body-list SPAvector-list
([guide-list] | [magnitude-list]) [skin-options])

Returns
ENTITY (BODY)

Arguments

Argument Description

body-list Specifies a list of wire bodies. Argument type: WIRE LIST | FACE LIST

SPAvector-list Specifies a list of vectors. Argument type: GVECTOR LIST

guide-list Optional. Specifies a list of guides. Argument type: EDGE LIST

magnitude-list Optional. Specifies a list of magnitudes. Argument type: REAL LIST

skin-options Optional. Defines different skinning options. For a complete list of skinning
options, see skin:options on page 838. Argument type: SKIN OPTIONS

Sentaurus™ Structure Editor User Guide 706

V-2024.03
Appendix A: Commands
sdegeo:split-insert-device

sdegeo:split-insert-device
This Scheme extension splits a device at a specified position and inserts a part between the
split bodies. The Scheme extension applies to both 2D and 3D devices. In addition, the
Scheme extension supports the splitting of wire bodies.

Syntax
(sdegeo:split-insert-device splitpos splitdir splitlength splitmerge)

Returns
BOOLEAN

Arguments

Argument Description

splitpos Specifies the position of the split. Argument type: POSITION

splitdir Specifies the direction of the split. Argument type: GVECTOR

splitlength Specifies the length of the split. Argument type: REAL

splitmerge Specifies whether to merge the split faces. If set to #t, then the split faces
merge. Argument type: BOOLEAN

Examples
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "xx")
(sdegeo:split-insert-device (position 0.2 0 0) (gvector 1 0 0) 0.4 #t)
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon" "xx")
(sdegeo:split-insert-device (position 0.2 0 0) (gvector 1 0 0) 0.4 #t)
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 1 1 1) "Silicon" "xx")
(sdegeo:split-insert-device (position 0.5 0.5 0.5) (gvector 1 1 0)
0.4 #t)
(sde:clear)
(sdegeo:create-sphere (position 0 0 0) 1 "Silicon" "xx")
(sdegeo:split-insert-device (position 0 0 0) (gvector 1 0 0) 0.4 #t)

Sentaurus™ Structure Editor User Guide 707

V-2024.03
Appendix A: Commands
sdegeo:sweep

sdegeo:sweep
This Scheme extension performs a sweep operation. It creates a sheet body or solid body
from a profile and a path.
The amount to revolve is controlled by the sweep-angle option.
This Scheme extension also applies to Ref/Eval windows. In the case of a submesh
reference, information regarding the sweep parameters and the pre-swept Ref/Eval window
is stored in the command file so that the meshing engine can reproduce doping information
in the 3D swept profile. For other doping profile types, the swept Ref/Eval window must be
a valid 2D shape (for reference/baseline) or a 3D shape (for evaluation window) since only
the final swept element is stored in the command file.

Syntax
(sdegeo:sweep profile path [sweep-options])

Returns
ENTITY

Arguments

Argument Description

profile Specifies a profile. This argument is a pointer to a face, which in turn, defines
the sweep geometry and becomes the base of the solid or the edge of the
surface. Argument type: FACE

path This argument is a wire body along which the profile is swept, and path can
be defined as one of the following:
• A path
• A distance if profile is a planar face
Specifies the distance to sweep along the face normal. Argument type: REAL
• A vector if rail_law is used (no twist)
Specifies the direction and distance to sweep. Argument type: GVECTOR
• An axis (defined as position and vector) if rail_law is used (no twist)
Specifies a position and vector that defines the axis to revolve about.
Argument type: POSITION . VECTOR
Argument type: WIRE | EDGE

Sentaurus™ Structure Editor User Guide 708

V-2024.03
Appendix A: Commands
sdegeo:sweep

Argument Description

sweep-options Optional. Creates the data structure. If sweep-options is not specified, then
the defaults are used as follows:
• Create a solid.
• Draft angle is 0.
• Gap type is 2 (natural).
• Twist angle is 0.
• Rail law is minimum rotation.
Argument type: SWEEP OPTIONS

Errors
An error is reported if the result of the sweep operation is unsuccessful.

Sentaurus™ Structure Editor User Guide 709

V-2024.03
Appendix A: Commands
sdegeo:sweep-corner

sdegeo:sweep-corner
This Scheme extension performs a corner sweep operation. It creates a sheet body or solid
body from a profile and an axis (position, vector).
The generated solid body is similar to the generated solid body using sdegeo:sweep (when
the same axis method is used), except that the swept body is extended to form a right
corner.

Syntax
(sdegeo:sweep-corner profile axis)

Returns
ENTITY

Arguments

Argument Description

profile Specifies a profile. Argument type: FACE | FACE LIST

axis Specifies a position and vector that defines the axis to revolve about. The
amount to revolve is 90° for the corner sweep operation.
Argument type: POSITION . VECTOR

Errors
An error is reported if the result of the corner sweep operation is unsuccessful.

Examples
(sde:clear)
(sdegeo:create-rectangle (position 1 0 0) (position 2 1 0)
"Silicon" "region_1")
(sdegeo:sweep-corner (find-face-id (position 1.5 1 0))
(position 0 0 0) (gvector 0 1 0))

Sentaurus™ Structure Editor User Guide 710

V-2024.03
Appendix A: Commands
sdegeo:taper-faces

sdegeo:taper-faces
This Scheme extension tapers a list of faces by the supplied draft angle about an axis
defined by the intersection between the plane of the face and a taper plane, which is defined
by a point and normal given as arguments to the Scheme extension.
The direction of the normal defines the direction of the angle, that is, the resulting angled
plane will slope in the direction of the draft plane normal. The taper plane need not intersect
the face to be tapered and, even when it does, this intersection need not be an edge of the
body (unlike in edge tapering).
Note:
Only planes, cones, ruled surfaces, and previously plane-tapered surfaces
(provided the same taper plane is used) can be plane tapered.

Syntax
(sdegeo:taper-faces face-list point normal angle)

Returns
BODY

Arguments

Argument Description

face-list Specifies the faces of a body to be tapered. Argument type: FACE LIST

point Specifies a position on the taper plane. Argument type: POSITION

normal Specifies the normal of the taper plane at the point specified.
Argument type: GVECTOR

angle Specifies the rotation angle in degrees. Argument type: REAL

Sentaurus™ Structure Editor User Guide 711

V-2024.03
Appendix A: Commands
sdegeo:translate

sdegeo:translate
This Scheme extension translates the specified entity or entities with the specified distance.
When you use the GUI, the translate operation is applied to the selected entities. The
Scheme extension (sde:selected-entities) returns the selected entity list. If no entities
are selected and the GUI is used, then the operation is performed for the complete model.
The translation is defined by its xyz components. (Choose Edit > Transform > Translate.)
Note:
This Scheme extension is available but is obsolete. Instead, use
sdegeo:translate-selected (see sdegeo:translate-selected on page 713).
The translate operation is always performed with respect to the active coordinate
system orientation, that is, the xyz values are applied in the active coordinate
system orientation, in the local xyz directions.
When the Scheme extension is applied only to some parts of a device,
overlapping regions or gaps can be created. In this case, explicit Boolean
operations must be performed on the model to avoid overlapping regions.

Syntax
(sdegeo:translate entity-list translate-x translate-y [translate-z])

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Alternatively, if you specify "all", then
the entire device is translated. Argument type: BODY | BODY LIST

translate-x Specifies the translation for the x-component. Argument type: REAL

translate-y Specifies the translation for the y-component. Argument type: REAL

translate-z Optional. Specifies the translation for the z-component. Argument type: REAL

Sentaurus™ Structure Editor User Guide 712

V-2024.03
Appendix A: Commands
sdegeo:translate-selected

Examples
(sde:clear)
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "region_1")
(sdegeo:create-polygon (list (position 2 0 0) (position 3 2 0)
(position 7 2 0) (position 8 0 0) (position 8 -3 0)
(position 7 -4 0) (position 3 -4 0) (position 2 -3 0)
(position 2 0 0)) "PolySilicon" "region_2")
(sdegeo:translate "all" 1 0)
(sdegeo:define-coord-sys "cs" 0 0 45)
(sdegeo:set-active-coord-sys "cs")
(sdegeo:translate "all" 1 0)

sdegeo:translate-selected
This Scheme extension translates the specified entities. The translate data is specified
through a transform, which is a transform:translation-type transform object.

Syntax
(sdegeo:translate-selected entity-list transform keep-flag
[repeat-number])

Returns
None

Arguments

Argument Description

entity-list Specifies an entity or a list of entities. Argument type: BODY | BODY LIST

transform Specifies a transformation. Argument type: transform:translation

keep-flag Specifies whether the translated geometric body overlaps the original body. If
set to #t and the translated geometric body overlaps the original body, then
the overlap is removed using the default overlap handling rule.
Argument type: BOOLEAN

repeat-number Optional. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 713

V-2024.03
Appendix A: Commands
sdegeo:vsmooth

sdegeo:vsmooth
This Scheme extension is used for 2D boundary smoothing and can be called multiple
times. It uses a least squares fit of a small set of consecutive data points (vertices) to a
polynomial and takes the calculated central point of the fitted polynomial curve as the new
smoothed data point (vertex). The fitted polynomial can be either quadratic or cubic.
The first argument of the function is the polynomial order (2 or 3). The second argument is
the vertex list that should be smoothed. You can specify all the vertices of the model as input
by using the (entity:vertices (get-body-list)) command.
The global Scheme variable bsmooth-ac specifies an angular criterion (in degrees) for
shape preservation (preserving ridges). The default is 100.

Syntax
(sdegeo:vsmooth polynomial-degree vertex-list)

Returns
None

Arguments

Argument Description

polynomial-degree Specifies the polynomial order (2 or 3). Argument type: INTEGER

vertex-list Specifies the list of vertices to be smoothed. Argument type: VERTEX LIST

sdeicwb:clear
This Scheme extension removes from memory all data related to IC WorkBench.

Syntax
(sdeicwb:clear)

Returns
None

Sentaurus™ Structure Editor User Guide 714

V-2024.03
Appendix A: Commands
sdeicwb:contact

sdeicwb:contact
This Scheme extension creates contacts for subsequent device simulations that are tied to
a mask or a text label in the TCAD layout file.

Syntax
(sdeicwb:contact ("label.name" label-name | "layer.name" layer-name)
"type" "box" "material" material
["adjacent.material" adjacent-material]
(["boxheight" boxheight] | ["hi" hi "lo" lo]) ["name" name])

(sdeicwb:contact ("label.name" label-name | "layer.name" layer-name)

"type" "point" "material" material
["height" height] ["replace" #t | #f] ["name" name])

Returns
Returns #t if successful. Otherwise, #f if the contact cannot be created.

Arguments

Argument Description

label-name Argument type: STRING

layer-name Argument type: STRING

"type" Specifies the type of contact: box-type contact or point-type contact. Options
are "box" | "point". Argument type: STRING

material Argument type: STRING

adjacent-material Optional. Argument type: STRING

boxheight Optional. Argument type: REAL

hi, lo Optional. Define the box extent, where the contact faces are assigned, in the
x-direction or z-direction (depending on the up direction, which is set by the
sde:set-process-up-direction Scheme extension).
Argument type: REAL

height Optional. Argument type: REAL

replace Optional. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 715

V-2024.03
Appendix A: Commands
sdeicwb:contact

Argument Description

name Optional. The name of the contact defaults to the name of the layer or the
text label, depending on whichever is specified. Use the name argument to
overwrite the default name.
Argument type: STRING

Description
This Scheme extension extracts the lateral placement of a contact from either the mask
specified in the "layer.name" argument or the anchor point location (or locations) of the
text label specified in the "label.name" argument.
Note:
Before you can refer to a mask in sdeicwb:contact with the "layer.name"
argument, you must create it first, for example, with the
sdeicwb:generate-mask-by-layer-name Scheme extension or the
sdepe:generate-mask Scheme extension.

Invoke sde:separate-lumps before calling sdeicwb:contact to avoid that a point-type

contact is assigned erroneously to other lumps in the requested material, which are not
connected to the lump marked with the text label.
This Scheme extension supports both box-type and point-type contacts:
• A box-type contact ("type" "box") consists of elements at the surface of one region or
material inside the box. The lateral extent of the box is determined automatically from the
layer polygons, while the vertical extent is taken from the lo and hi arguments. If the lo
argument is not explicitly given, the vertical extent is determined automatically, based on
the topmost interface with the material in the command call. The vertical extent of the box
is controlled by boxheight.
The contact area is defined by the surface of the material specified with the material
argument, which lies inside the mentioned box. The contact area can be further
restricted to only the part of the surface that also touches the material specified with the
"adjacent.material" argument.

If a text label name is given, the layer associated with that text label is used.
• A point-type contact ("type" "point") contains all the boundary elements of one
region. The lateral position of the point is determined automatically as a point inside the
polygon, while the vertical position is taken from the height argument. If the height
argument is not explicitly given, then the vertical position is determined automatically,
based on the interfaces with the material specified with the material argument. If
"replace" #t is set, then the original region of a contact is removed.

If a text label name is given, then the anchor point of the text label is used.

Sentaurus™ Structure Editor User Guide 716

V-2024.03
Appendix A: Commands
sdeicwb:contact

Note:
It might be advantageous to create auxiliary layers or text labels in Silicon
WorkBench for the placement of contacts.

Examples
The location of contact faces can be defined using different argument combinations. The
following examples illustrate the use of the sdeicwb:contact arguments.

Example 1
The hi and lo arguments define the box extent, where the contact faces are assigned, in
the x-direction or z-direction (depending on the up direction, which can be set by the
sde:set-process-up-direction Scheme extension). The following example creates a
simple cube with a mask, which covers the complete domain (base):
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(sde:addmasktomodel "m1" (list (list 0 0 10 10)))

If a mask covers only part of the specified material, then the contact is assigned only that
part of the device, as follows:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 5 10 10)
"Silicon" "xx1")
(sdegeo:create-cuboid (position 5 0 0) (position 10 10 10)
"PolySilicon" "xx2")
(sde:addmasktomodel "m1" (list (list 0 0 10 10)))

If the contact should be assigned to the complete bottom and top faces, specify the lo and
hi arguments such that the bottom and the top faces are between the lo – hi interval, as
follows:
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"lo" -1 "hi" 11)

or:
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"lo" (- (position:z (car (bbox-exact (get-body-list)))) 0.1)
"hi" (+ (position:z (cdr (bbox-exact (get-body-list)))) 0.1))

Sentaurus™ Structure Editor User Guide 717

V-2024.03
Appendix A: Commands
sdeicwb:contact

Note:
Both lo and hi must be below or above the bottom or top face z-coordinate.
Therefore, the following command does not work:
(sdeicwb:contact "layer.name" "m1" "type" "box" "material"
"Silicon" "lo" (position:z (car (bbox-exact (get-body-list))))
"hi" (position:z (cdr (bbox-exact (get-body-list)))))

Example 2
If you use the default up direction "-x", then you must reverse the lo and hi coordinates by
specifying:
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(sde:addmasktomodel "m1" (list (list 0 0 10 10)))
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"lo" 11 "hi" -1)

or:
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"lo" (+ (position:x (cdr (bbox-exact (get-body-list)))) 0.1)
"hi" (- (position:x (car (bbox-exact (get-body-list)))) 0.1))

Example 3
Instead of using the lo and hi arguments, you can use boxheight. If neither lo nor hi is
given, but boxheight is specified, then the top of the region is computed (x) and lo is set to
x – boxheight and hi is set to x + boxheight:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(sde:addmasktomodel "m1" (list (list 2 2 8 8)))
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"boxheight" 11)

Since boxheight is larger than the vertical extent of the device, the contacts are assigned
to both the top and the bottom faces, which are covered by the mask.

Example 4
If boxheight is less than the height of the device, then the contact is assigned only to the
top face as follows:
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")

Sentaurus™ Structure Editor User Guide 718

V-2024.03
Appendix A: Commands
sdeicwb:contact

(sde:addmasktomodel "m1" (list (list 2 2 8 8)))

(sdeicwb:contact "layer.name" "m1" "type" "box" "material"
"Silicon" "boxheight" 9)

Similarly for the default "-x" up direction:

(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(sde:addmasktomodel "m1" (list (list 2 2 8 8)))
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"boxheight" 11)
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "xx")
(sde:addmasktomodel "m1" (list (list 2 2 8 8)))
(sdeicwb:contact "layer.name" "m1" "type" "box" "material" "Silicon"
"boxheight" 9)

Sentaurus™ Structure Editor User Guide 719

V-2024.03
Appendix A: Commands
sdeicwb:create-boxes-from-layer

sdeicwb:create-boxes-from-layer
This Scheme extension creates cuboids with a lateral extent given by the polygon bounding
boxes from the layer in an IC WorkBench TCAD layout. The vertical extent is taken from the
argument list.
This Scheme extension supports layout-driven structural operations, with a syntax
independent of the coordinate system orientation used in the currently active IC WorkBench
simulation domain.
Use this Scheme extension, for example, to superimpose a temporary region onto a
structure to turn its interfaces into contacts and delete it afterwards.

Syntax
(sdeicwb:create-boxes-from-layer lname top bot region-material
region-name)

Returns
ENTITY (BODY)

Arguments

Argument Description

lname Specifies the name of a layer. Argument type: STRING

top Specifies the top coordinate of a box. Argument type: REAL

bot Specifies the bottom coordinate of a box. Argument type: REAL

region-material Specifies the name of a region material. Argument type: STRING

region-name Specifies the name of a region. Argument type: STRING

Examples
(define PoTop (sdeicwb:get-region-top (find-material-id "PolySilicon")))
(sdegeo:set-current-contact-set "gate")
(sdegeo:set-default-boolean "ABA")
(define GATEMETAL (sdeicwb:create-boxes-from-layer "ngate"
(sdeicwb:down PoTop 0.05) (sdeicwb:up PoTop 0.1) "Metal"
"R.temporary"))
(sdegeo:set-contact-boundary-faces GATEMETAL)
(sdegeo:delete-region GATEMETAL)

Sentaurus™ Structure Editor User Guide 720

V-2024.03
Appendix A: Commands
sdeicwb:define-refinement-from-layer

sdeicwb:define-refinement-from-layer
This Scheme extension creates refinement windows with a lateral extent given by layers in
an IC WorkBench TCAD layout. The vertical extent is taken from the argument list. In
addition, it generates 3D refinement size settings with syntax that is independent of the
coordinate system orientation.

Syntax
(sdeicwb:define-refinement-from-layer "lname" lname ["rname" rname]
["oversize" oversize] "top" top "bot" bot
"dlrmin" dlrmin "dlrmax" dlrmax
"dbtmin" dbtmin "dbtmax" dbtmax
["dbfmin" dbfmin] ["dbfmax" dbfmax]
["material" material] ["region" region] ["use-bbox" use-bbox])

Returns
None

Arguments

Argument Description

lname Specifies the name of a layer. Argument type: STRING

rname Optional. Specifies an optional name of a refinement window. The default is the
layer name. Argument type: STRING

oversize Optional. Use this argument to extend the refinement window beyond the
lateral extent of the actual segments or polygon bounding boxes. A nonzero
value is subtracted from or added to the minimum and maximum segment or
the polygon bounding box coordinates, respectively. Argument type: REAL
Note:
To use oversize for a non-rectangular mask while continuing to avoid
unnecessary refinement, use Silicon WorkBench to break, for example, an
L-shaped polygon into two rectangular polygons such that the union of the
polygon bounding boxes coincides with the shape itself.

top Specifies the top coordinate of a refinement window. Argument type: REAL

bot Specifies the bottom coordinate of a refinement window. Argument type: REAL

dlrmin Specifies the minimum refinement in the left-right dimension.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 721

V-2024.03
Appendix A: Commands
sdeicwb:define-refinement-from-layer

Argument Description

dlrmax Specifies the maximum refinement in the left-right dimension.

Argument type: REAL

dbtmin Specifies the minimum refinement in the bottom-top dimension.

Argument type: REAL

dbtmax Specifies the maximum refinement in the bottom-top dimension.

Argument type: REAL

dbfmin Optional. Specifies the minimum refinement in the back-front dimension.

Argument type: REAL

dbfmax Optional. Specifies the maximum refinement in the back-front dimension.

Argument type: REAL

material Optional. Specifies a material or a list of materials.

Argument type: DATEXMAT | DATEXMAT LIST

region Optional. Specifies a region or a list of regions.

Argument type: STRING | STRING LIST

use-bbox Optional. This argument specifies, when set to #t, that when creating 3D
refinement volumes from 2D polygons, the bounding box of the polygon must
be used as the basis for a cuboid volume.
If set to #f, then the polygon shape itself is used to create a 3D prism using the
polygon as the top and bottom faces, with rectangular sides.
Note:
This argument is used only for 2D polygons in 3D structures.

When "use-bbox" #f is set, oversize is ignored.

The default is #t. Argument type: BOOLEAN

Description
This Scheme extension supports layout-driven mesh refinements, with syntax that is
independent of the coordinate system orientation of the currently active IC WorkBench
simulation domain.
The Scheme extension serves as an interface between the IC WorkBench TCAD layout and
the Sentaurus Structure Editor commands sdedr:define-refeval-window,
sdedr:define-refinement-size, and sdedr:define-refinement-placement by
automatically obtaining the lateral dimension of the refinement box from the specified
IC WorkBench layers, taking the vertical refinement box dimensions from the argument list.

Sentaurus™ Structure Editor User Guide 722

V-2024.03
Appendix A: Commands
sdeicwb:define-refinement-from-layer

For a 3D IC WorkBench simulation domain, a refinement window is created for each

polygon found in the specified layers. The lateral extent of the respective refinement
windows is given by the bounding box of the polygon. The name of the refinement window
has the form RPlace.<rname>_<counter>. The name of the refinement size setting is
RSize.<rname>.

You can use the "material" and "region" arguments to restrict the refinement to the
specified bodies within the refinement box. The "material" argument is followed by either
a DATEX material name or a list of materials. For example:
"material" "Silicon"
"material" (list "Silicon" "PolySilicon" ...)

The "region" argument is followed by either a region name or a list of region names. For
example:
"region" "region_1"
"region" (list "region_1" "region_2" ...)

The Scheme extension also generates the appropriate calls to

sdedr:define-refinement-placement to complete the refinement definition.

You can make explicit calls to sdedr:define-refinement-function to activate other

meshing-specific options such as refinement on doping gradients or interface refinements.

Limitations
Layout-driven refinement is available only for the area under the given layer itself, not for the
inverse of a layer. If refinement is needed in an area not covered by the layer, you must
create the inverse of the layer as an auxiliary layer explicitly in Silicon WorkBench.

Examples
(sdeicwb:define-refinement-from-layer "lname" "POLY" "rname" "Channel"
"oversize" 0.15 "top" (sdeicwb:up SiTop 0.03)
"bot" (sdeicwb:down SiTop 0.1)
"dlrmax" 0.05 "dlrmin" 0.025 "dbtmax" 0.02 "dbtmin" 0.01
"dbfmax" 0.05 "dbfmin" 0.025)
(sdedr:define-refinement-function "RSize.Channel"
"DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-refinement-function "RSize.Channel" "MaxLenInt"
"Silicon" "Oxide" 0.0002 1.41)

Sentaurus™ Structure Editor User Guide 723

V-2024.03
Appendix A: Commands
sdeicwb:down

sdeicwb:down
This Scheme extension increases or decreases the vertical positions depending on the
coordinate system orientation. It supports layout-driven mesh generation and structural
operations, with a syntax independent of the coordinate system of the currently active
IC WorkBench simulation domain. See sdeicwb:up on page 746.
For the UCS orientation, the x-axis points downward. For the traditional coordinate system
orientation, the y-axis points backward and the z-axis points upward.

Syntax
(sdeicwb:down value increment)

Returns
For the UCS orientation, sdeicwb:down returns value + increment.
For the traditional coordinate system orientation, it returns value – increment.

Arguments

Argument Description

value Argument type: REAL

increment Argument type: REAL

Examples
(define SiTop (sdeicwb:get-region-top (find-material-id "Silicon")))
(define epsilon 0.1)
(define AboveSiInterface (sdeicwb:up SiTop epsilon))
(define BelowSiInterface (sdeicwb:down SiTop epsilon))

Sentaurus™ Structure Editor User Guide 724

V-2024.03
Appendix A: Commands
sdeicwb:gds2mac

sdeicwb:gds2mac
This Scheme extension converts a GDS layout file to a .mac file, which is then loaded
automatically and is ready to be processed further by other sdeicwb commands.

Syntax
(sdeicwb:gds2mac "gds.file" gdsfile "cell" cellname
"layer.names" lnames "layer.numbers" lnumbers
"sim3d" sim3ddomain "scale" scale
"domain.name" dname "mac.file" macfile
["recenter" #t | #f] ["stretches" stretches]
["loadmacfile" #t | #f])

Returns
BOOLEAN

Arguments

Argument Description

gdsfile Specifies the name of a GDS file. Argument type: STRING

cellname Specifies the name of a GDS cell. The keyword "cell" can be the "?" wildcard
character. In this case, the active (open) GDS cell is used for the .mac file
conversion. Argument type: STRING

lnames Specifies the names of the layers (see sdeicwb:mapreader on page 744 for
how to initialize this variable easily). Argument type: STRING LIST
Note:
If the lengths of the lnames and lnumbers lists differ, then a warning
message is added to the log file, and the file conversion is not performed.

lnumbers Specifies the corresponding layer numbers of the named layers (see
sdeicwb:mapreader on page 744 for how to initialize this variable easily).
Argument type: STRING LIST
Note:
If the lengths of the lnames and lnumbers lists differ, then a warning
message is added to the log file, and the file conversion is not performed.

sim3ddomain Specifies a real list that defines the layout area to be converted. It uses a list of
four real numbers. The domain coordinates are given in (unscaled) layout
coordinates. Argument type: REAL LIST

scale Specifies the mask scaling factor. Argument type: REAL

dname Specifies the name of the domain. Argument type: STRING

Sentaurus™ Structure Editor User Guide 725

V-2024.03
Appendix A: Commands
sdeicwb:gds2mac

Argument Description

macfile Specifies the name of the output .mac file. Argument type: STRING

"recenter" Optional. Specifies whether to recenter the converted .mac file.

When sdeicwb:gds2mac loads the converted .mac file, recentering is not
performed by default. To center the loaded mask, use "recenter" #t.
Translation of the IC WorkBench file coordinates to the (0,0) origin is switched
off when "recenter" #f is set.
The default is #f. Argument type: BOOLEAN

"stretches" Optional. Specifies a list of stretches, with each stretch having a name and
being defined by a segment with two points. The segment must cross the
bounding box of the 3D domain. Argument type: STRING

"loadmacfile" Optional. Specifies whether to load the converted .mac file automatically. By
default, the converted .mac file is loaded in to Sentaurus Structure Editor. Set
"loadmacfile" #f to suppress the automatic loading of the converted file.
The default is #t. Argument type: BOOLEAN

Examples

Example 1: Layer Names and Layer Numbers Read From External *.map File
Using sdeicwb:gds2mac requires the specification of the layer names and the layer
numbers from the .gds file. You can obtain this information using the sdeicwb:mapreader
Scheme extension, which returns the layer names and layer numbers in a list. The first
element in this list contains the layer names and the second element in this list contains the
layer numbers. In this example, all layers are converted:
(define map-content (sdeicwb:mapreader MAPFILE))
(define LAYERNAMES (list-ref map-content 0))
(define LAYERNUMBERS (list-ref map-content 1))

where MAPFILE is the name of the GDS .map file.

(define GDSFILE "mygdsfile.gds")
(define CELLNAME "gdscellname")
(define MAPFILE "mygdsfile.map")
(define DOMAIN "SIM3D1")
(define map-content (sdeicwb:mapreader MAPFILE))
(define LAYERNAMES (list-ref map-content 0))
(define LAYERNUMBERS (list-ref map-content 1))
(sdeicwb:gds2mac "gds.file" GDSFILE "cell" CELLNAME "layer.names"
LAYERNAMES "layer.numbers" LAYERNUMBERS "sim3d"
(list 115 115 985 485) "scale" 1.e-3 "mac.file" "xx")

Sentaurus™ Structure Editor User Guide 726

V-2024.03
Appendix A: Commands
sdeicwb:gds2mac

Example 2: User-Defined Layer Names and Layer Numbers

(define GDSFILE "mygdsfile.gds")
(define CELLNAME "gdscellname")
(define DOMAIN "SIM3D1")
(define LAYERNAMES (list "POLY" "CONTACT" "METAL1" "METAL2" "RECESS"
"source" "drain" "gate"))
(define LAYERNUMBERS (list "1:0" "2:0" "3:0" "4:0" "5:0" "9:1" "9:2"
"9:3"))
(define STRETCH "{S1 = {850 50 850 550} S2 = {50 150 1000 150}}")
(sdeicwb:gds2mac "gds.file" GDSFILE "cell" CELLNAME
"layer.names" LAYERNAMES "layer.numbers" LAYERNUMBERS
"sim3d" (list 115 115 985 485) "scale" 1.e-3
"mac.file" "xx" "stretches" STRETCH)

The .map file format is a two-column format:

<layername0> <layernumber0>
<layername1> <layernumber1>
<layername2> <layernumber2>

Sentaurus™ Structure Editor User Guide 727

V-2024.03
Appendix A: Commands
sdeicwb:generate-mask-by-layer-name

sdeicwb:generate-mask-by-layer-name
This Scheme extension creates a mask based on the given layer names referencing an
IC WorkBench macro file previously loaded using the Scheme extension
(sdeicwb:load-file) and based on the IC WorkBench domain previously selected with
(sdeicwb:set-domain).
Note:
The IC WorkBench macro file must have been previously loaded and the
IC WorkBench domain previously selected. The IC WorkBench domain must be
three dimensional.

Syntax
(sdeicwb:generate-mask-by-layer-name maskname layernames
[with-overlaps do-entity-check])

Returns
BODYID (the ENTITY ID of the generated mask)

() (Empty list) if the layer is defined in the IC WorkBench file, but the IC WorkBench mask
does not contain any mask polygon definitions
#f if the IC WorkBench file does not contain the specified layer, or if the IC WorkBench
domain is not three dimensional

Arguments

Argument Description

maskname Specifies the name of a mask. Argument type: STRING

layernames Specifies the name of a layer or a list of layer names.

Argument type: STRING | STRING LIST

with-overlaps Optional. If the IC WorkBench mask polygons overlap, for correct handling,
you must set with-overlaps to #t. In this case, the overlaps are resolved by
uniting the overlapping parts of the mask polygons.
The default is #f. Argument type: BOOLEAN

do-entity-check Optional. If do-entity-check is set to #t, then an additional entity check is

performed. If the entity checker finds a problem, then an additional boundary
repair step tries to resolve the problem.
The default is #f. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 728

V-2024.03
Appendix A: Commands
sdeicwb:get-back

sdeicwb:get-back
This Scheme extension returns the back bounding-box coordinate of the current domains in
Sentaurus Structure Editor coordinates with stretches already applied. The bounding box
includes all stretches applied by sdeicwb:stretch.
When sdeicwb:set-domain has set the current domains, the coordinates of the domain
bounding box can be obtained.

Syntax
(sdeicwb:get-back)

Returns
REAL

sdeicwb:get-dimension
This Scheme extension returns the dimension of the current domain. The current domain
defines a layout area for simulation. The dimension value as an integer is returned
according to the domain type as follows:
• Point: 1
• Gauge: 2
• Highlight: 3
Note:
Sentaurus Structure Editor supports only 3D simulation domains (highlights).

Syntax
(sdeicwb:get-dimension)

Returns
INTEGER

Sentaurus™ Structure Editor User Guide 729

V-2024.03
Appendix A: Commands
sdeicwb:get-domains

sdeicwb:get-domains
This Scheme extension returns a list of current domain names.
Current domains are set with sdeicwb:set-domain. The list of current domains is returned
with sdeicwb:get-domains. If only one domain is the current domain, a list of length one is
returned.

Syntax
(sdeicwb:get-domains)

Returns
STRING LIST

sdeicwb:get-front
This Scheme extension returns the front bounding-box coordinate of the current domains in
Sentaurus Structure Editor coordinates with stretches already applied. The bounding box
includes all stretches applied by sdeicwb:stretch.
When sdeicwb:set-domain has set the current domains, the coordinates of the domain
bounding box can be obtained.

Syntax
(sdeicwb:get-front)

Returns
REAL

Sentaurus™ Structure Editor User Guide 730

V-2024.03
Appendix A: Commands
sdeicwb:get-global-bot

sdeicwb:get-global-bot
This Scheme extension returns the bottom coordinate of the global bounding box using
syntax that is independent of the coordinate system orientation.
This Scheme extension supports layout-driven mesh generation and structural operations,
with a syntax independent of the coordinate system orientation used.
Use this Scheme extension to obtain the bottommost coordinate for both coordinate system
orientations. See sdeicwb:get-global-top.

Syntax
(sdeicwb:get-global-bot)

Returns
For UCS orientation, it returns the maximum x-coordinate. For the traditional coordinate
system orientation, it returns the minimum z-coordinate of the global bounding box.

Examples
(define GBot (sdeicwb:get-global-bot))

sdeicwb:get-global-top
This Scheme extension returns the top coordinate of the global bounding box using syntax
that is independent of the coordinate system orientation.
This Scheme extension supports layout-driven mesh generation and structural operations,
with a syntax independent of the coordinate system orientation used.
Use this Scheme extension to obtain the topmost coordinate for both coordinate system
orientations. See sdeicwb:get-global-bot.

Syntax
(sdeicwb:get-global-top)

Returns
For the UCS orientation, it returns the minimum x-coordinate. For the traditional coordinate
system orientation, it returns the maximum z-coordinate of the global bounding box.

Examples
(define GTop (sdeicwb:get-global-top))

Sentaurus™ Structure Editor User Guide 731

V-2024.03
Appendix A: Commands
sdeicwb:get-label

sdeicwb:get-label
This Scheme extension returns a list containing information (the layer name, the text label,
and the label text coordinates) that belongs to the specified label name. The layer name and
the text label are strings, and the label text coordinates are two real numbers.

Syntax
(sdeicwb:get-label label-name)

Returns
LIST

Arguments

Argument Description

label-name Specifies the name of a label. Argument type: STRING

sdeicwb:get-label-for-layer
This Scheme extension returns a list containing label information (the layer name, the text
label, and the label text coordinates) that belongs to the specified layer. The layer name and
the text label are strings, and the label text coordinates are two real numbers.

Syntax
(sdeicwb:get-label-for-layer layer-name)

Returns
LIST

Arguments

Argument Description

label-name Specifies the name of a layer. Argument type: STRING

Sentaurus™ Structure Editor User Guide 732

V-2024.03
Appendix A: Commands
sdeicwb:get-labels

sdeicwb:get-labels
This Scheme extension returns a list, containing all the label information lists. Each returned
list item contains a full label information list (the layer name, the text label, and the label text
coordinates).

Syntax
(sdeicwb:get-labels)

Returns
LIST

sdeicwb:get-layer-ids
This Scheme extension returns a list of layer IDs from the IC WorkBench mask file
previously loaded by sdeicwb:load-file.

Syntax
(sdeicwb:get-layer-ids)

Returns
STRING LIST

sdeicwb:get-layer-names
This Scheme extension returns a list of layer names from the IC WorkBench mask file
previously loaded by sdeicwb:load-file.

Syntax
(sdeicwb:get-layer-names)

Returns
STRING LIST

Sentaurus™ Structure Editor User Guide 733

V-2024.03
Appendix A: Commands
sdeicwb:get-layer-polygon-midpoints

sdeicwb:get-layer-polygon-midpoints
This Scheme extension computes the midpoints of the segments or polygons in a layer. It
locates objects created by layout-driven operations. For example, for a layout-driven contact
assignment, you might want to select a backend metal region using an (auxiliary) layer and
turn all its interfaces into a contact region.

Syntax
(sdeicwb:get-layer-polygon-midpoints layer-name height)

Returns
A list of positions given by the midpoints of the polygon bounding box and the height as the
third coordinate

Arguments

Argument Description

layer-name Specifies the name of a layer. Argument type: STRING

height Argument type: REAL

Examples
(sdegeo:set-current-contact-set "drain")
(define DRAINMETAL (find-body-id (car
(sdeicwb:get-layer-polygon-midpoints
"ndrain" (sdeicwb:up SiTop epsilon)))))
(sdegeo:set-contact-boundary-faces DRAINMETAL)
(sdegeo:delete-region DRAINMETAL)

Sentaurus™ Structure Editor User Guide 734

V-2024.03
Appendix A: Commands
sdeicwb:get-left

sdeicwb:get-left
This Scheme extension returns the left bounding-box coordinate of the current domains in
Sentaurus Structure Editor coordinates with stretches already applied. The bounding box
includes all stretches applied by sdeicwb:stretch.
When sdeicwb:set-domain has set the current domains, the coordinates of the domain
bounding box can be obtained.

Syntax
(sdeicwb:get-left)

Returns
REAL

sdeicwb:get-polygon-bounding-boxes-by-layer-name
This Scheme extension returns the bounding boxes for polygons on a given layer and the
given current domain as segments representing the diagonal of the bounding box for that
polygon. The returned values are represented as:
(list (list a_1 b_1) (list a_2 b_2) ... (list a_n b_n))

where a_n and b_n are the corner POSITIONs of the bounding box of each polygon on that
layer.
Note:
The current domain must first be set using the sdeicwb:set-domain Scheme
extension.

Syntax
(sdeicwb:get-polygon-bounding-boxes-by-layer-name layer-name)

Returns
POSITION LIST

Arguments

Argument Description

layer-name Specifies the name of a layer. Argument type: STRING

Sentaurus™ Structure Editor User Guide 735

V-2024.03
Appendix A: Commands
sdeicwb:get-polygon-by-name

sdeicwb:get-polygon-by-name
This Scheme extension returns the polygon coordinates for a given polygon name.
Polygons are named as they are read in using sdeicwb:load-file.
A list of polygon names is available on a given layer using the Scheme extension
sdeicwb:get-polygon-names-by-layer-name.

Syntax
(sdeicwb:get-polygon-by-name polygon-name)

Returns
POSITION LIST

Arguments

Argument Description

polygon-name Specifies the name of a polygon. Argument type: STRING

sdeicwb:get-polygon-names-by-layer-name
This Scheme extension returns the names of polygons on the given layer.

Syntax
(sdeicwb:get-polygon-names-by-layer-name layer-name)

Returns
STRING LIST

Arguments

Argument Description

layer-name Specifies the name of a layer. Argument type: STRING

Sentaurus™ Structure Editor User Guide 736

V-2024.03
Appendix A: Commands
sdeicwb:get-region-bot

sdeicwb:get-region-bot
This Scheme extension returns the bottom coordinate of a given region using syntax that is
independent of the coordinate system orientation.
This Scheme extension supports layout-driven mesh generation and structural operations,
with a syntax independent of the coordinate system orientation used.
Use this Scheme extension to obtain the bottommost coordinate of the specified region for
both coordinate system orientations. See sdeicwb:get-region-top on page 738.

Syntax
(sdeicwb:get-region-bot body)

Returns
For the UCS orientation, it returns the maximum x-coordinate. For the traditional coordinate
system orientation, it returns the minimum z-coordinate of the region bounding box.

Arguments

Argument Description

body Specifies a body. Argument type: BODY

Examples
(define SubstrateID (find-material-id "Silicon"))
(define SiBottom (sdeicwb:get-region-bot SubstrateID))
(define PolyID (find-material-id "PolySilicon"))
(define PoBottom (sdeicwb:get-region-bot PolyID))

Sentaurus™ Structure Editor User Guide 737

V-2024.03
Appendix A: Commands
sdeicwb:get-region-top

sdeicwb:get-region-top
This Scheme extension returns the top coordinate of a given region using syntax that is
independent of the coordinate system orientation.
This Scheme extension supports layout-driven mesh generation and structural operations,
with a syntax independent of the coordinate system orientation used.
Use this Scheme extension to obtain the topmost coordinate of the specified region for both
coordinate system orientations. See sdeicwb:get-region-bot on page 737.

Syntax
(sdeicwb:get-region-top body)

Returns
For the UCS orientation, it returns the minimum x-coordinate. For the traditional coordinate
system orientation, it returns the maximum z-coordinate of the region bounding box.

Arguments

Argument Description

body Specifies a body. Argument type: BODY

Examples
(define SubstrateID (find-material-id "Silicon"))
(define SiTop (sdeicwb:get-region-top SubstrateID))

(define PolyID (find-material-id "PolySilicon"))

(define PoTop (sdeicwb:get-region-top PolyID))

Sentaurus™ Structure Editor User Guide 738

V-2024.03
Appendix A: Commands
sdeicwb:get-right

sdeicwb:get-right
This Scheme extension returns the right bounding-box coordinate of the current domains in
Sentaurus Structure Editor coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the coordinates of the domain
bounding box can be obtained.
Calling the Scheme extension sdeicwb:get-right returns the right coordinate. The
bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-right)

Returns
REAL

sdeicwb:get-xmax
This Scheme extension returns the ‘xmax’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘xmax’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-xmax. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-xmax)

Returns
REAL

Sentaurus™ Structure Editor User Guide 739

V-2024.03
Appendix A: Commands
sdeicwb:get-xmin

sdeicwb:get-xmin
This Scheme extension returns the ‘xmin’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘xmin’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-xmin. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-xmin)

Returns
REAL

sdeicwb:get-ymax
This Scheme extension returns the ‘ymax’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘ymax’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-ymax. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-ymax)

Returns
REAL

Sentaurus™ Structure Editor User Guide 740

V-2024.03
Appendix A: Commands
sdeicwb:get-ymin

sdeicwb:get-ymin
This Scheme extension returns the ‘ymin’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘ymin’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-ymin. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-ymin)

Returns
REAL

sdeicwb:get-zmax
This Scheme extension returns the ‘zmax’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘zmax’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-zmax. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-zmax)

Returns
REAL

Sentaurus™ Structure Editor User Guide 741

V-2024.03
Appendix A: Commands
sdeicwb:get-zmin

sdeicwb:get-zmin
This Scheme extension returns the ‘zmin’ bounding-box coordinate of the current domains
in IC WorkBench coordinates with stretches already applied.
When sdeicwb:set-domain has set the current domains, the ‘zmin’ coordinate of the
domain bounding box is returned in IC WorkBench coordinates by calling
sdeicwb:get-zmin. The bounding box includes all stretches applied by sdeicwb:stretch.

Syntax
(sdeicwb:get-zmin)

Returns
REAL

Sentaurus™ Structure Editor User Guide 742

V-2024.03
Appendix A: Commands
sdeicwb:load-file

sdeicwb:load-file
This Scheme extension loads an IC WorkBench macro file.
The IC WorkBench macro file must be read in using sdeicwb:load-file as a prerequisite
to other sdeicwb Scheme extensions that act on the domains and masks defined in that file.
All IC WorkBench coordinates in the macro file are multiplied by the optional scale
argument as they are read.
Caution:
The IC WorkBench macro file must be readable.
If the .mac file is already loaded, it is not reloaded by sdeicwb:load-file. If you
used sdeicwb:gds2mac to convert and load a layout file, different scaling and
centering specified in the sdeicwb:load-file Scheme extension have no effect.

Syntax
(sdeicwb:load-file filename [(scale | center?) | (scale center?)])

Returns
Returns #t if successful. Otherwise, #f if the file cannot be read.

Arguments

Argument Description

filename Specifies a macro file to load. Argument type: STRING

scale Optional. Specifies a scaling factor. Argument type: REAL

center? Optional. Specifies whether to center the loaded mask.

Set center? to #t to center the loaded mask. If it is set to #t, then the mask
vertex coordinates are modified by the value of the vertex coordinate minus the
value of the highlight coordinate.
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 743

V-2024.03
Appendix A: Commands
sdeicwb:mapreader

sdeicwb:mapreader
This Scheme extension parses a .map file, and returns the layer names and the layer
numbers. The first returned list is the layer name list, and the second is the layer number list.

Syntax
(sdeicwb:mapreader filename)

Returns
List of two STRING lists

Arguments

Argument Description

filename Specifies the name of a file. Argument type: STRING

Description
After sdeicwb:mapreader is called, you can call sdeicwb:gds2mac with the layernames
and layernumbers arguments, so that when the map file is available, there is no need to
add the layernames and numbers manually to the sdeicwb:gds2mac call (see
sdeicwb:gds2mac on page 725).

Map File Format

The .map file has a two-column format (<layername> <space or tab> <layernumber>):
<layername0> <layernumber0>
<layername1> <layernumber1>
<layername2> <layernumber2>

If the layer .map file is exported from a third-party layout editor, then you might have to edit
the file manually. The exported .map file might contain some other information and might be
in a different format than the required two-column format.

Examples
(define map-content (sdeicwb:mapreader "layer.map"))
(define layernames (list-ref map-content 0))
(define layernumbers (list-ref map-content 1))

Then, the sdeicwb:gds2mac command can be called with the layernames and
layernumbers arguments.

Sentaurus™ Structure Editor User Guide 744

V-2024.03
Appendix A: Commands
sdeicwb:set-domain

sdeicwb:set-domain
This Scheme extension sets the current domain to the given domain name or list of domain
names.
Setting the current domain is a prerequisite for other sdeicwb Scheme extensions that
implicitly depend on the current domain being defined.

Syntax
(sdeicwb:set-domain domain)

Returns
None

Arguments

Argument Description

domain Specifies the name of a domain or a list of domain names.

Argument type: STRING | STRING LIST

sdeicwb:stretch
This Scheme extension applies a given stretch by a given amount to the current domains.
The order of applied stretches is important because the location of other stretches can
change given the application of one stretch.

Syntax
(sdeicwb:stretch stretch-name stretch-amount)

Returns
None

Arguments

Argument Description

stretch-name Specifies the stretch. Argument type: STRING

stretch-amount Specifies the amount of stretch. Argument type: REAL

Sentaurus™ Structure Editor User Guide 745

V-2024.03
Appendix A: Commands
sdeicwb:up

sdeicwb:up
This Scheme extension increases or decreases the vertical positions depending on the
coordinate system orientation. It supports layout-driven mesh generation and structural
operations, with a syntax independent of the coordinate system orientation of the currently
active IC WorkBench simulation domain. See sdeicwb:down on page 724.
For the UCS orientation, the x-axis points downward. For the traditional coordinate system
orientation, the y-axis points backward and the z-axis points upward.

Syntax
(sdeicwb:up value increment)

Returns
For the UCS orientation, it returns value – increment. For the traditional coordinate system
orientation, it returns value + increment.

Arguments

Argument Description

value Argument type: REAL

increment Argument type: REAL

Examples
(define SiTop (sdeicwb:get-region-top (find-material-id "Silicon")))
(define epsilon 0.1)
(define AboveSiInterface (sdeicwb:up SiTop epsilon))
(define BelowSiInterface (sdeicwb:down SiTop epsilon))

Sentaurus™ Structure Editor User Guide 746

V-2024.03
Appendix A: Commands
sdeio:read-dfise-mask

sdeio:read-dfise-mask
This Scheme extension loads the specified layout file (.lyt) into the modeler and initializes
the data structure that defines the mask layouts inside Procem.
During process emulation, the initialized mask layouts can be used in pattern operations.
Mask polarities are not fixed; each mask can be used either as a ‘light’ or ‘dark’ field mask.

Syntax
(sdeio:read-dfise-mask filename)

Returns
BOOLEAN (#t for success; #f for failure)

Arguments

Argument Description

filename Specifies the name of the mask layout file, with the file extension .lyt. It can
also contain a path. Argument type: STRING

Sentaurus™ Structure Editor User Guide 747

V-2024.03
Appendix A: Commands
sdeio:read-tdr

sdeio:read-tdr
This Scheme extension extracts the boundary and loads a TDR boundary file into Sentaurus
Structure Editor.

Syntax
(sdeio:read-tdr file-name ["skip-doping"])

Returns
None

Arguments

Argument Description

file-name Specifies the name of a TDR boundary file. Argument type: STRING

"skip-doping" Optional. Specify this option to omit doping information contained in the TDR
file. Argument type: STRING

Description
This Scheme extension performs the following operations:
1. It takes a TDR mesh file and extracts the boundary, unless the TDR file already contains
the boundary as geometry (which is typical of TDR files saved by Sentaurus Process and
Sentaurus Interconnect).
2. It loads the boundary.
3. It creates a submesh definition and placement using the doping information contained in
the TDR file, unless you have specified "skip-doping".

Sentaurus™ Structure Editor User Guide 748

V-2024.03
Appendix A: Commands
sdeio:read-tdr-bnd

sdeio:read-tdr-bnd
This Scheme extension loads a TDR boundary file into Sentaurus Structure Editor.
Each TDR region element is converted to an ACIS body. For 2D models, contact attributes
are attached to the corresponding edges of the ACIS model and to the corresponding faces
for 3D models. Two-dimensional regions are converted to nonuniform sheet bodies, while
3D regions are converted to manifold solids. The material properties and region names are
attached as attributes to the ACIS bodies.

Syntax
(sdeio:read-tdr-bnd file-name)

Returns
None

Arguments

Argument Description

file-name Specifies the name of a TDR boundary file. Argument type: STRING

Sentaurus™ Structure Editor User Guide 749

V-2024.03
Appendix A: Commands
sdeio:save-1d-tdr-bnd

sdeio:save-1d-tdr-bnd
This Scheme extension creates a 1D TDR boundary output file extracted from a simple 2D
geometry along the up coordinate axis defined by (sde:set-process-up-direction).
See sde:set-process-up-direction on page 508.
The 1D geometry is extracted from the entities listed in body-list in the up direction along
the corresponding axis (at x=0 in the vertical direction, or y=0 in the horizontal direction).
The 2D geometry should be a simple 2D representation of the required 1D geometry,
extruded in the corresponding direction.
The Scheme extension sde:set-process-up-direction defines the up direction –
vertical versus horizontal – and takes either "-x" (default) or "+z". The default value
corresponds to the up direction being along the x-axis. The value "+z" corresponds to the
up direction being along the z-axis.
The output file is extracted from the entities listed in body-list. The 2D geometry is
tessellated first, using the same process as in two dimensions. These parameters are
described in sdeio:save-tdr-bnd on page 752.

Syntax
(sdeio:save-1d-tdr-bnd body-list file-name
["aspect ratio" aspect-ratio]
["aut-tolerance-control" aut-tolerance-control]
["faceter" faceter]
["max edge length" max-edge-length]
["normal tolerance" normal-tolerance]
["surface tolerance" surface-tolerance]
["vertex-precision" vertex-precision]
[writeinterface saveprecision])

Returns
Returns #t if the boundary is saved successfully; otherwise, returns #f

Arguments

Argument Description

body-list Specifies a body list. Alternatively, you can specify "all".

Argument type: BODY LIST

file-name Specifies the name of a TDR boundary file. Argument type: STRING

aspect-ratio Optional. Specifies the aspect ratio. The default is 0.

Argument type: REAL

Sentaurus™ Structure Editor User Guide 750

V-2024.03
Appendix A: Commands
sdeio:save-1d-tdr-bnd

Argument Description

aut-tolerance-control Optional. Specifies whether to use automatic tolerance control. The

default is #t. Argument type: BOOLEAN

faceter Optional. Specifies the faceter to use. Options are "v1" | "v2". The
default is "v1". Argument type: STRING

max-edge-length Optional. Specifies the maximum edge length. The default is 0.

Argument type: REAL

normal-tolerance Optional. Specifies the normal tolerance. The default is 15. Argument
type: REAL

surface-tolerance Optional. Specifies the surface tolerance. The default is 0. Argument

type: REAL

vertex-precision Optional. Specifies the vertex precision in the range [8-16]. The
default is bndprecision. Argument type: INTEGER

writeinterface Optional. Specifies whether to write the interface.

Argument type: BOOLEAN

saveprecision Optional. Specifies the precision with which to save the boundary.
Argument type: INTEGER

Examples
; Create three regions in two dimensions bordering the y-axis
(sdegeo:create-rectangle (position 0 0 0) (position 1 5 0)
"Silicon" "body")
(sdegeo:create-rectangle (position 0 -0.1 0) (position 1 0 0)
"Oxide" "gateox")
(sdegeo:create-rectangle (position 0 -1 0) (position 1 -0.1 0)
"PolySilicon" "gatepoly")

; Add contacts to top and bottom of the structure

(sdegeo:define-contact-set "gate" 4 (color:rgb 1 0 0) "##")
(sdegeo:define-contact-set "substrate" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "substrate")
(sdegeo:set-contact-edges (list (car (find-edge-id
(position 0.5 5 0)))) "substrate")
(sdegeo:set-current-contact-set "gate")
(sdegeo:set-contact-edges (list (car (find-edge-id
(position 0.5 -1 0)))) "gate")

; Save 1D extraction to boundary file in TDR format

(sdeio:save-1d-tdr-bnd (get-body-list) "1D.tdr")

Sentaurus™ Structure Editor User Guide 751

V-2024.03
Appendix A: Commands
sdeio:save-tdr-bnd

sdeio:save-tdr-bnd
This Scheme extension generates an output TDR boundary file.
Note:
The order of arguments in the argument list is arbitrary. However, the first two
arguments must be body-list file-name. Each keyword must be followed by
a value.

Syntax
(sdeio:save-tdr-bnd body-list file-name
["aspect ratio" aspect-ratio]
["aut tolerance control" aut-tolerance-control]
["faceter" faceter] ["grid mode" grid-mode]
["max edge length" max-edge-length]
["normal tolerance" normal-tolerance]
["separate lumps" separate-lumps]
["surface tolerance" surface-tolerance]
["triangulate" triangulate]
["unique region names" unique-region-names]
["vertex precision" vertex-precision])

Returns
(BOOLEAN, faceter)

Arguments

Argument Description

body-list Specifies a body list. Alternatively, you can specify "all", in which
case, all geometry regions are saved in the TDR boundary file.
Argument type: ENTITY LIST

file-name Specifies the name of a TDR boundary file. Argument type: STRING

aspect-ratio Optional. Sets the aspect ratio of the triangles in the surface
tessellation. The default is 0, which means no restriction.
Argument type: REAL

aut-tolerance-control Optional. Specifies whether to use automatic tolerance control. The

default is aut-adjust-refinement-tolerance.
The aut-adjust-refinement-tolerance global Scheme variable is
set to #f by default.
Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 752

V-2024.03
Appendix A: Commands
sdeio:save-tdr-bnd

Argument Description

faceter Optional. Specifies the faceter to use. Options are "v1" | "v2", which
are different algorithms that can be used for the tessellation. The
default is "v1". Argument type: STRING
The "v2" faceter satisfies the refinement criteria (surface and normal
tolerances) more precisely than the "v1" faceter; therefore, it creates
denser meshes and more elements in the tessellated boundary file.
The "v2" faceter creates a better tessellation for spline faces than the
"v1" faceter. However, if layering is applied in Sentaurus Mesh, then
using the "v1" faceter in Sentaurus Structure Editor is recommended
to avoid a possible overrefinement in the bulk by the layering
operation.

grid-mode Optional. Specifies the grid mode. Options are "AF_GRID_ONE_DIR" |

"AF_GRID_TO_EDGES".
The default "grid mode" "AF_GRID_ONE_DIR" is used to avoid poles
for spherical faces.
Argument type: STRING

max-edge-length Optional. Specifies the maximum edge length. The default is 0, which
deactivates this control. Argument type: REAL

normal-tolerance Optional. Specifies the normal tolerance. The default is 15. Argument
type: REAL

separate-lumps Optional. Specifies whether to separate lumps. The default is #t.

Argument type: BOOLEAN

surface-tolerance Optional. Specifies the surface tolerance. The default is 0, which

deactivates this control. Argument type: REAL

triangulate Optional. Specifies whether to triangulate. The default is #t.

Argument type: BOOLEAN
Note:
This argument works only for 3D models with planar faces and
linear edges.

unique-region-names Optional. The default is #t. Argument type: BOOLEAN

vertex-precision Optional. Specifies an integer ([8–16]) indicating how many decimal

digits the vertex coordinate list in the tessellated boundary file should
contain. The default is bndprecision (14). Argument type: REAL

Sentaurus™ Structure Editor User Guide 753

V-2024.03
Appendix A: Commands
sdeio:save-tdr-bnd

Description
Depending on model dimensionality, this Scheme extension generates a 2D or 3D TDR
boundary file. Model dimensionality is determined by the solids in the body-list argument.
Mixed dimensionality is not supported, so all entities in body-list must be either 2D or 3D
solid entities.
By default in three dimensions, the model boundary is triangulated and the triangulated
boundary (satisfying all the specified refinement criteria) is saved to the TDR boundary file.
If you set "triangulate" #f and only planar faces are present with linear edges, the TDR
boundary contains only the face polygons; no triangulation is performed. In this case, all
other controls are ignored.
By default, before the TDR boundary file is written, the structure is triangulated, that is,
polygonal faces are split into multiple triangles. For very complex geometries, triangulation
can take a considerable amount of time, but the triangulation can be switched off by setting
"triangulate" #f. Consequently, face polygons are written to the TDR boundary file as
polygons.
However, you can use "triangulate" #f only if the model is polyhedral. (Only planar
faces and planar edges are supported.)
One restriction for "triangulate" #f is that polyhedron faces cannot contain internal
holes. (Only one edge loop per face is allowed.)
If you set "aut tolerance control" #f (default), then the faceter uses the user-specified
tolerance controls. If you set "aut tolerance control" #t, then the value of
"surface tolerance" changes if the model contains nonplanar faces and small edges,
with the edge length smaller than twice the surface tolerance. In this case, the surface
tolerance refinement control is adjusted automatically to half of the smallest edge length.
This automatic adjustment avoids having intersecting boundaries in the tessellated
boundary file. (This can occur when very thin curved regions are present in the model and
the surface tolerance is greater than the thickness of the region.)
The global Scheme variable aut-adjust-refinement-tolerance can also be used to
control the automatic readjustment of the surface tolerance. The default value of this
variable is #f.
The (set! aut-adjust-refinement-tolerance #t) command switches on automatic
setting of the surface tolerance.
When the tessellated boundary file is saved, the refinement control values (surface, normal
tolerance, and so on) are satisfied by the surface triangulation.
The surface tessellation controls "surface tolerance", "aspect ratio", "normal
tolerance", and "max edge length" affect the quality of the surface triangulation. Smaller
values result in a denser surface triangulation for curved faces. For planar faces, "surface
tolerance" and "normal tolerance" do not change the triangulation.

Sentaurus™ Structure Editor User Guide 754

V-2024.03
Appendix A: Commands
sdepe:add-substrate

sdepe:add-substrate
This Scheme extension adds an initial substrate layer to the device. The domain boundary
must be set before this function is called.
See sdepe:pattern on page 773.

Syntax
(sdepe:add-substrate "material" material "thickness" thickness
["base" base] ["region" region-name])

Returns
ENTITY (BODY)

Arguments

Argument Description

material Identifies the DATEX material of the generated body. Argument type: DATEXMAT

thickness Specifies the thickness of the substrate layer. Argument type: REAL

base Optional. Assigns a value for the bottom z-coordinate of the substrate layer for
process-up-direction "-x" or the top x-coordinate of the substrate layer for
process-up-direction "+z".
If you do not specify "base", then the substrate layer is placed such that the
bottom is placed at z=0 for process-up-direction "-x" or at x=0 for
process-up-direction "+z".
Argument type: REAL

region-name Optional. Assigns an explicit region name to the generated substrate.

Argument type: STRING

Sentaurus™ Structure Editor User Guide 755

V-2024.03
Appendix A: Commands
sdepe:clean

sdepe:clean
This Scheme extension cleans the model before a process emulation operation. It
regularizes all the bodies and fixes the imprints. It can be used to simplify or clean the
Procem model, especially if the input model is generated by other tools and a tessellated
boundary is imported to Sentaurus Structure Editor first, as the initial structure.

Syntax
(sdepe:clean)

Returns
None

Sentaurus™ Structure Editor User Guide 756

V-2024.03
Appendix A: Commands
sdepe:define-pe-domain

sdepe:define-pe-domain
This Scheme extension defines a base domain for the process emulation. It creates the
simulation domain for subsequent Procem operations.

Syntax
(sdepe:define-pe-domain {{X0 Y0 X1 Y1} | {polygon}})

Returns
None

Arguments

Argument Description

X0 Y0 X1 Y1 Specify four real numbers to define the simulation domain.

If the argument list contains four real numbers, then a rectangle is defined,
using the four numbers as the xy coordinates as the two opposite corners of the
simulation domain. Argument type: REAL

polygon Specifies a list of real pairs to define the simulation domain.

If you define a list of real pairs, then these pairs define the vertex points of the
simulation domain in the xy plane for process-up-direction "+z" and in the
yz plane for process-up-direction "-x".
If a polygon is used to define the simulation domain, then the only restriction is
that the polygon must be a simply connected convex polygon. The domain is
defined in the xy plane at z=0 for process-up-direction "+z", and the
domain is defined in the yz plane at x=0 for process-up-direction "-x".
Argument type: REAL LIST

Description
The argument list can be either four real numbers or a list of real pairs.
This Scheme extension creates a wire body, representing the simulation domain. This wire
body is called domainboundary, and this global variable can be accessed directly from
Scheme. The domainboundary is an artificial object that is needed for other Procem
commands to identify the simulation domain.
The domainboundary is not written separately to the output boundary file. If, after some
Procem operations, you want to change the simulation domain, domainboundary must be
deleted using the command (entity:delete domainboundary). This might be necessary,
for example, if the model was reflected after some Procem operations, which changed the
bounding box of the model.

Sentaurus™ Structure Editor User Guide 757

V-2024.03
Appendix A: Commands
sdepe:define-pe-domain

If a 3D model is already defined, Procem operations can be applied directly, without the
need to define the domain boundary explicitly. In this case, the domain boundary is
computed automatically from the existing model when the first Procem operation is used.
The domain boundary is computed as the xy cross section of the model at the minimal
z-position.
Note:
The process emulation commands operate on the entire device and cannot be
restricted to operate only on a certain part (defined by a rectangular domain).
However, if you want to modify the process emulation domain, use the
sdegeo:chop-domain command to remove the unwanted part of the model. After
the unwanted part is removed, the previously computed domain boundary must
be deleted using the (entity:delete domainboundary) command.

Examples
; to define a polygonal simulation domain use:
(sdepe:define-pe-domain (list 0 0 10 0 15 2.5 10 5 0 5))
; or equivalently
(sdepe:define-pe-domain 0 0 10 0 15 2.5 10 5 0 5)
; to define a rectangular simulation domain use:
(sdepe:define-pe-domain (list 0 0 10 5))
; or equivalently
(sdepe:define-pe-domain 0 0 10 5)

Sentaurus™ Structure Editor User Guide 758

V-2024.03
Appendix A: Commands
sdepe:depo

sdepe:depo
This Scheme extension performs a deposition step (see Deposition on page 194). For
details about the arguments, see Table 29 on page 207.
Note:
The order of arguments in the argument list is not relevant, but the correct data
values must always follow the keywords. Certain options might be contradictory,
for example, the "lopx" algorithm cannot be used for anisotropic deposition, and
the "PT" algorithm cannot be used with rounding. In addition, certain arguments
must be specified together. The Scheme extension sdepe:depo performs a
preprocessing consistency check of the arguments. If a keyword does not match,
then an error message is displayed and the function execution is terminated.

Syntax
(sdepe:depo "material" material "thickness" thickness
["region" region-name] ["type" depo-type] ["algorithm" depo-alg]
( ["radius" radius] ["vexity" vexity-type]
["advanced-rounding" advrounding] | ["rounding" rounding] )
( ["chamfer" cutback-distance] ["vexity" vexity-type] )
( ["taper-angle" taper-angle] ["taper-direction" taper-direction] )
( ["initial-thickness" initial-thickness]
["selective-material" selective-material]
["selective-taper" selective-taper] )
( ["ray-vector" ray-vector] ["BC" BC] ["ext-dist" ext-dist]
["shadowing" shadowing] )
["steps" nsteps] ["adaptive" adaptive] [PT keywords and values])

Returns
ENTITY of the generated deposit layer

Arguments

Argument Description

material Argument type: DATEXMAT

thickness Argument type: REAL

region-name Optional. Argument type: STRING

depo-type Optional. Specifies the deposition type. Options are "iso" |

"aniso".
Argument type: STRING

Sentaurus™ Structure Editor User Guide 759

V-2024.03
Appendix A: Commands
sdepe:depo

Argument Description

depo-alg Optional. Specifies the deposition algorithm to use. Options are

"lopx" | "lop-move" | "sweep" | "PT".
Argument type: STRING

radius Optional. Specifies the radius. Argument type: REAL

vexity-type Optional. Specifies the vexity type. Options are "convex" |

"concave" | "all".
Argument type: VEXITY TYPE

advrounding Optional. Argument type: BOOLEAN

rounding Optional. Argument type: BOOLEAN

chamfer Optional. Argument type: REAL

taper-angle Optional. Argument type: REAL

taper-direction Optional. Specifies the taper direction as a list as follows:

• (list "x" "-x" "y" "-y") (or any combination of these
directions) for process-up-direction "+z"
• (list "y" "-y" "z" "-z") (or any combination of these
directions) for process-up-direction "-x"

initial-thickness Optional. Specifies the initial thickness, between (0-1). Argument

type: REAL

selective-material Optional. Argument type: DATEXMAT

selective-taper Optional. Argument type: BOOLEAN

ray-vector Optional. Argument type: GVECTOR

BC Optional. Specifies the boundary conditions. Options are "none" |

"Reflect" | "Periodic" |"ext-dist". Argument type: STRING

ext-dist Optional. Argument type: REAL

shadowing Optional. Argument type: BOOLEAN

nsteps Optional. Specifies the number of steps, which must be equal to or

greater than 1. Argument type: INTEGER

adaptive Optional. Argument type: BOOLEAN

PT keywords and values Optional. See Table 26 on page 189.

Sentaurus™ Structure Editor User Guide 760

V-2024.03
Appendix A: Commands
sdepe:doping-constant-placement

sdepe:doping-constant-placement
This Scheme extension defines and applies a constant doping to a given region.
In the case of constant doping, a separate implant command is not necessary, as is the
case with Gaussian doping profiles.

Syntax
(sdepe:doping-constant-placement name species concentration
region-name)

Returns
None

Arguments

Argument Description

name Argument type: STRING

species Argument type: STRING

concentration Argument type: REAL

region-name Argument type: STRING

Sentaurus™ Structure Editor User Guide 761

V-2024.03
Appendix A: Commands
sdepe:etch-material

sdepe:etch-material
This Scheme extension performs an etching step operation.
The etching step is very similar to the deposition step, except that the deposition is
performed on a complementary body. The deposition is performed on the complementary
body and, as a last step, this deposited layer is removed from the original device (only using
the bodies with the specified material attribute). All regions with a different material attribute
that are originally on top of the material being etched will protect the etch material
underneath.
For detailed descriptions of the available keywords and effects, see sdepe:depo on
page 759.
Note:
The deposition offset is specified using the "thickness" attribute, and the etch
offset is specified using the "depth" attribute. This is the only difference between
the argument names for these two Scheme extensions (sdepe:depo and
sdepe:etch-material).

Syntax
(sdepe:etch-material "material" material "depth" depth
+ all deposition arguments for sdepe:depo
["overetch" overetch] ["ebl" ebl] [PT keywords and values])

Returns
None

Arguments

Argument Description

material Argument type: DATEXMAT

depth Argument type: REAL

overetch Optional. Specifies an offset by which to move the vertical etch

faces. Argument type: REAL

ebl Optional. Determines during etching whether only the initially

exposed bodies (with the given etching material) are affected (if
"ebl" "top" is specified) or whether initially unexposed layers
of the specified materials are affected (if "ebl" "all" is
specified).
The default is "ebl" "all". Argument type: STRING

Sentaurus™ Structure Editor User Guide 762

V-2024.03
Appendix A: Commands
sdepe:extend-masks

Argument Description

PT keywords and values Optional. See Table 26 on page 189.

+ all deposition arguments See sdepe:depo on page 759.

for sdepe:depo

sdepe:extend-masks
This Scheme extension extends all masks about the boundary, which is specified by pminx,
pminy, pmaxx, and pmaxy. All existing masks are affected.

Syntax
(sdepe:extend-masks pminx pminy pmaxx pmaxy extension-distance)

Returns
BOOLEAN

Arguments

Argument Description

pminx pminy pmaxx pmaxy Specify the boundary. Argument type: REAL

extension-distance Specifies the extension distance. Argument type: REAL

Examples
(sde:clear)
(sdepe:generate-mask "M1" (list (list 0 0 10 5)))
(sdepe:extend-masks 0 0 10 5 2)

(sde:clear)
(sdepe:generate-mask "M1" (list (list 0 0 10 5)))
(sdepe:extend-masks 0 0 5 2 2)
(sdepe:extend-masks 6 3 10 5 2)

Sentaurus™ Structure Editor User Guide 763

V-2024.03
Appendix A: Commands
sdepe:fill-device

sdepe:fill-device
This Scheme extension fills the device with the specified material up to the specified height.

Syntax
(sdepe:fill-device "material" material
["height" height] ["region" region-name])

Returns
ENTITY of the generated fill region

Arguments

Argument Description

material Specifies the DATEX material with which to fill the device.
Argument type: DATEXMAT

height Optional. Specifies the height. If this argument is not specified, then the
Scheme extension fills up the device to the top position. Argument type: REAL

region-name Optional. Specifies a name for the filled region. Argument type: STRING

Sentaurus™ Structure Editor User Guide 764

V-2024.03
Appendix A: Commands
sdepe:generate-domainboundary

sdepe:generate-domainboundary
This Scheme extension extracts the simulation boundary from an existing model.
When Procem is started from an empty model, one of the first commands should be
(sdepe:define-pe-domain) to define the domain boundary. All subsequent functions work
on that domain.
If you want to perform additional process steps on a model, this step is not needed. It is
sufficient to call (sdepe:generate-domainboundary), which extracts the domainboundary
wire from the model. (The same restrictions apply here as for
(sdepe:define-pe-domain).) The extracted boundary must be convex and can contain
only one lump. The Scheme extension initializes the Scheme variable domainboundary
(wire body).

Syntax
(sdepe:generate-domainboundary)

Returns
None

Examples
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:set-default-boolean "AB")
(sdegeo:create-cylinder (position 0 0 0) (position 0 0 1) 5
"Silicon" "region_1")
(sdegeo:create-cuboid (position 0 -5 0) (position 15 5 1)
"Silicon" "region_2")
(sdepe:generate-domainboundary)
(sdepe:depo "PolySilicon" 0.5)

Sentaurus™ Structure Editor User Guide 765

V-2024.03
Appendix A: Commands
sdepe:generate-empty-mask

sdepe:generate-empty-mask
This Scheme extension creates a new empty mask.
Empty masks behave the same way in Procem operations as regular masks, except no
geometry is attached to the empty masks. The name of the empty mask is registered, and
query functions can be used to find it (get-empty-mask-list, exists-empty-mask-name).
When mask polarity "light" is used, an empty mask behaves like a regular mask that is
placed completely outside of the simulation domain.
When mask polarity "dark" is used, an empty mask behaves like a regular mask that
covers the complete simulation domain.

Syntax
(sdepe:generate-empty-mask maskname)

Returns
BOOLEAN

Arguments

Argument Description

maskname Specifies the name of a mask. Argument type: STRING

Examples
(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 4)
"Silicon" "base")
(sdepe:generate-empty-mask "M1")
(sdepe:pattern "mask" "M1" "thickness" 1 "material" "Resist")
(sdepe:pattern "mask" "M1" "thickness" 1 "material" "Resist"
"polarity" "dark")

Sentaurus™ Structure Editor User Guide 766

V-2024.03
Appendix A: Commands
sdepe:generate-mask

sdepe:generate-mask
This Scheme extension creates a mask for further process operations in Procem.

Syntax
(sdepe:generate-mask mask-name polygon-list)

Returns
None

Arguments

Argument Description

mask-name Specifies the name of the generated mask. Argument type: STRING

polygon-list Specifies the vertex points for the generated mask.

Argument type: POLYGON LIST

Description
The defined masks can be used in further patterning operations. (The used masks are not
deleted.) Each mask is defined as a polygon list. When the polygon list is converted to a
mask, first each polygon is converted to a 2D sheet body. Then, a containment check is
performed, and the partially overlapping converted sheet bodies are united. If a sheet body
is completely contained inside another body, it will be subtracted from that body and an
internal void will form. In this way, multiply connected mask sheet bodies can be created.
A single mask polygon list cannot contain intersecting edges, and the polygon vertex list
must define a manifold sheet body for each polygon. (No cutlines or dangling edges are
allowed.) If the vertex list is not closed, the converter will close it automatically. Zero length
edges are not allowed in the polygon vertex list (that is, there should be at least a 1.0e-06
distance between the vertices). Different masks can have intersecting polygonal
boundaries. If a mask contains rectangular polygons, it is sufficient to specify only two
opposite corners of such polygons. Each polygon is defined as an xy coordinate list.
The generated mask will be a 2D sheet body, and a ‘mask name’ mask-name attribute will be
attached to the mask body. If a mask with the specified name already exists, subsequent
operations will use the newly created mask.

Sentaurus™ Structure Editor User Guide 767

V-2024.03
Appendix A: Commands
sdepe:generate-mask

Examples
(sde:clear)
(sdepe:generate-mask "DEMO-MASK-1" (list (list 2 2 5 2 5 3 2 3)
(list 5 6 9 6 7 9)))
(sdepe:generate-mask "DEMO-MASK-2" (list (list 14 7 13.73 8 13 8.73
12 9 11 8.73 10.27 8 10 7 10.27 6 11 5.27 12 5 13 5.23 13.73 6)))
(sdepe:generate-mask "DEMO-MASK-3" (list (list 11 3 10.73 4 10 4.73 9
5 8 4.73 7.27 4 7 3 7.27 2 8 1.27 9 1 10 1.23 10.73 2)))

(sde:clear)
(sdepe:generate-mask "MASK1" (list (list 1 1 3 3) (list 7 7 9 9)))
(sdepe:generate-mask "MASK2" (list (list 7 1 9 3 3 9 1 7)))
(sdepe:generate-mask "MASK3" (list (list 2 1 3 2 2 3 1 2)
(list 8 1 9 2 8 3 7 2) (list 8 7 9 8 8 9 8)
(list 2 7 3 8 2 9 1 8)))
(sdepe:generate-mask "MASK4" (list (list 3 3 7 7)))
(sdepe:generate-mask "MASK5" (list (list 3 0 8 2) (list 8 3 10 7)
(list 3 8 7 10) (list 0 3 2 7)))

Sentaurus™ Structure Editor User Guide 768

V-2024.03
Appendix A: Commands
sdepe:icon_layer

sdepe:icon_layer
This Scheme extension creates interconnect structures. It can be used like other sdepe
Scheme extensions.
The arguments must be added as keyword–value pairs. The "mask" and "thickness"
arguments must be specified.
If the region names are not given, then different layers will have the same region names
("ic-region" and "env-region"). Before the generation of boundary output, these
regions can be united or renamed to have unique region names.

Syntax
(sdepe:icon_layer "mask" mname "thickness" lth
["polarity" mpolarity] ["taper-angle" tang] ["ic-material" icmat]
["env-material" envmat] ["ic-region" icr] ["env-region" envr]
["base-coord" bc] ["taper-position" tpos])

Returns
None

Arguments

Argument Description

mname Specifies the name of the mask. The default is "". Argument type: STRING

lth Specifies the layer thickness. The default is 0. Argument type: REAL

mpolarity Optional. Specifies the mask polarity. Options are "light" | "dark".
The default is "light". Argument type: STRING

tang Optional. Specifies the taper angle. The default is 0. Argument type: REAL

icmat Optional. Specifies the interconnect material. The default is "Metal".

Argument type: DATEXMAT

envmat Optional. Specifies the material used for the fill. The default is "Gas".
Argument type: DATEXMAT

icr Optional. Specifies the name of the interconnect region.

The default is "ic-region". Argument type: STRING

envr Optional. Specifies the region name of the filled part.

The default is "env-region". Argument type: STRING

Sentaurus™ Structure Editor User Guide 769

V-2024.03
Appendix A: Commands
sdepe:icon_layer

Argument Description

bc Optional. Specifies the base coordinate of the created layer in the z-direction for
process-up-direction "+z" and in the x-direction for
process-up-direction "-x".
The default is the previous maximal z-coordinate for process-up-direction
"+z" and the minimal x-coordinate for process-up-direction "-x".
Argument type: REAL

tpos Optional. Specifies the taper position. Options are "top" | "bottom". The
default is "bottom".
If "taper-position" "bottom" is used, then the mask is tapered from the
bottom position of the interconnect layer.
If "taper-position" "top" is used, then the initial mask is extruded first and,
then the sidewalls are tapered from the top position of the interconnect layer.
Argument type: STRING

Examples
Example: Generating an Interconnect Structure on page 213

Sentaurus™ Structure Editor User Guide 770

V-2024.03
Appendix A: Commands
sdepe:implant

sdepe:implant
This Scheme extension creates a doping distribution using analytic functions to emulate an
implantation operation that can include diffusion.

Syntax
(sdepe:implant doping-name
["flat"] ["abs-height" abs-height | "delta-height" delta-height]
["pmat" pmatlist] ["direction" direction])

Returns
None

Arguments

Argument Description

doping-name Specifies the name of the doping profile. Argument type: STRING

"flat" Optional. By specifying "flat", the contour of the exposed surface is projected
onto the xy plane, and this planar surface is used as the reference for the
placement of the doping profile doping-name. Argument type: STRING

abs-height Optional. Specifies the absolute height. Argument type: REAL

delta-height Optional. Specifies the delta height. Argument type: REAL

pmatlist Optional. Specifies either a DATEX material or a list of DATEX materials that
will behave like resist. The specified materials also protect the top exposed
surface from doping implantation.
Argument type: DATEXMAT | DATEXMAT LIST

direction Optional. Determines the direction of the profile with respect to the baseline
computed by sdepe:implant. Options are "Positive" | "Negative" |
"Both". The default is "Both".
Argument type: STRING

Sentaurus™ Structure Editor User Guide 771

V-2024.03
Appendix A: Commands
sdepe:implant

Description
This Scheme extension applies the doping profile doping-name to the top surface of a
device. Areas of ‘resist’ and device features covered by resist are protected from doping
implantation.
The doping profile must be previously defined using one of the sdedr doping definition
commands:
• sdedr:define-1d-external-profile

• sdedr:define-analytical-profile

• sdedr:define-constant-profile

• sdedr:define-erf-profile

• sdedr:define-gaussian-profile

Sentaurus Structure Editor analyzes the geometry of the surface of the structure to find
resist layers blocking the interface with the gas. By default, the doping profile doping-name
is placed at all surface faces exposed to the gas.
By specifying the "flat" option, the contour of the exposed surface is projected onto the xy
plane, and this planar surface is used as the reference for the placement of the doping
profile doping-name. By default, this plane is positioned along the z-axis at the uppermost
nonresist device feature. This z-coordinate can be adjusted by using the option
delta-height (in this case, the maximum z-coordinate is offset by delta-height) or can
be set to an absolute value (fixed value) using the option abs-height.
Note:
By default, the sdepe:implant command places the doping profile at all surfaces
exposed to gas, including the vertical sidewalls. If implantation should be
performed only on the inclined (nonvertical) faces, then you must add the "flat"
option to the sdepe:implant argument list.
A refinement window defined by using the sdepe:implant command, which is
used for the doping, extends to the domain boundary by default. You can change
this behavior by setting the global Scheme variable extend-implant-window to
#t. Its default value is #f, but you can use the
(set! extend-implant-window #t) Scheme command to change it. If you set
extend-implant-window #t, then the refinement window extends from the
domain boundary by 3 × Length, where the Length value is taken from the doping
profile definition. If the Factor parameter was used in the doping definition, then
the extension distance will be 3 × Factor.

Sentaurus™ Structure Editor User Guide 772

V-2024.03
Appendix A: Commands
sdepe:pattern

sdepe:pattern
This Scheme extension generates a patterned layer. The "mask" keyword identifies the
mask to be used for the pattern operation. The mask must be already defined.
Since the pattern operation is analogous to a deposition step, for detailed explanations of
the used algorithms and types, see sdepe:depo on page 759.

Syntax
(sdepe:pattern "mask" mask-name "polarity" polarity
["type" depo-type] ["algorithm" depo-alg]
"material" material "thickness" thickness
["steps" nsteps] ["region" region] [PT keywords and values])

Returns
ENTITY of the generated pattern layer

Arguments

Argument Description

mask-name Specifies the name of an existing mask to be used for the pattern
operation. Argument type: STRING

polarity Specifies the mask polarity. Options are "light" | "dark".

Argument type: STRING

depo-type Optional. Specifies the deposition type. Options are "aniso" |

"iso". Argument type: STRING

depo-alg Optional. Specifies the deposition algorithm to use. Options are

"lopx" | "lop-move" | "sweep" | "PT".
Argument type: STRING

material Specifies the name of a material. Argument type: DATEXMAT

thickness Specifies the thickness. Argument type: REAL

nsteps Optional. Specifies the number of steps, which is greater than or

equal to 1. Argument type: INTEGER

region Optional. Specifies the region name of the patterned body.

Argument type: STRING

PT keywords and values Optional. See Table 26 on page 189.

Sentaurus™ Structure Editor User Guide 773

V-2024.03
Appendix A: Commands
sdepe:photo

sdepe:photo
This Scheme extension generates a photo (flat pattern) layer. The "mask" keyword
identifies the mask to be used for the operation. The mask must be already defined.
The photo operation is similar to a combined sequence of a fill, a pattern, and an etch step.
The used algorithms for the sdepe:photo operation are selected automatically to provide
more robustness. Users cannot change these algorithms.
Note:
The difference between sdepe:photo and sdepe:pattern is that the
sdepe:photo operation creates a flat top.

Syntax
(sdepe:photo "mask" mask-name "polarity" polarity ["type" depo-type]
"material" material { "thickness" thickness | "height" height }
["steps" nsteps] ["region" region])

Returns
ENTITY of the generated pattern layer

Arguments

Argument Description

mask-name Specifies the name of an existing mask to be used for the operation.
Argument type: STRING

polarity Specifies the mask polarity. Options are "light" | "dark".

Argument type: STRING

depo-type Optional. Specifies the deposition type. Options are "aniso" | "iso".
Argument type: STRING

material Specifies the name of a material. Argument type: DATEXMAT

thickness Specifies the thickness. Argument type: REAL

height Specifies the height. Argument type: REAL

nsteps Optional. Specifies the number of steps, which is greater than or equal to 1.
Argument type: INTEGER

region Optional. Specifies the region name of the patterned body.

Argument type: STRING

Sentaurus™ Structure Editor User Guide 774

V-2024.03
Appendix A: Commands
sdepe:polish-device

sdepe:polish-device
This Scheme extension removes the top part of the device.

Syntax
(sdepe:polish-device {"thickness" thickness | "height" height}
["material" material])

Returns
None

Arguments

Argument Description

thickness If you specify "thickness", then the distance is measured from the top device
position, and all materials from the top are removed. Argument type: REAL

height If you specify "height", then all material above the specified height is
removed. Argument type: REAL

material Optional. If you specify "material", then only the top exposed bodies with the
specified material attribute are polished. (This behavior is similar to a selective
polish operation.) Argument type: DATEXMAT

Sentaurus™ Structure Editor User Guide 775

V-2024.03
Appendix A: Commands
sdepe:remove

sdepe:remove
This Scheme extension removes either a specified material or specified region.
Note:
This Scheme extension removes only exposed materials or regions.

Syntax
(sdepe:remove "material" material-name | "region" region-name)

Returns
None

Arguments

Argument Description

material-name Specifies a material to remove. Argument type: DATEXMAT

region-name Specifies a region to remove. Argument type: STRING

Sentaurus™ Structure Editor User Guide 776

V-2024.03
Appendix A: Commands
sdepe:trim-masks

sdepe:trim-masks
This Scheme extension trims masks so that they do not extend outside the domain
boundary. When sdepe:define-pe-domain is used to define the simulation domain, the
global variable domainboundary is initialized. It is set to the wire body that represents the
domain boundary. After domainboundary is set, (sdepe:trim-masks domainboundary) is
used, which trims all masks to the specified domain.
Note:
If the domain boundary is not set explicitly and the sdepe commands are used on
an existing body, then the domain boundary is extracted automatically and the
domainboundary variable is set as well.

Syntax
(sdepe:trim-masks domainboundary)

Returns
None

Arguments

Argument Description

domainboundary Specifies a domain boundary. Argument type: WIRE BODY

Sentaurus™ Structure Editor User Guide 777

V-2024.03
Appendix A: Commands
sdesnmesh:axisaligned

sdesnmesh:axisaligned
This Scheme extension sets the global axis-aligned parameters used in the AxisAligned
section of the mesh command file (see AxisAligned Section on page 279).
Note:
In earlier versions, you could specify xCuts, yCuts, and zCuts using a REAL or
REAL LIST value. For example:
(sdesnmesh:axisaligned "xCuts" 1 "yCuts" (list 0.1 0.2 0.3))

This syntax has been extended. For backward compatibility, the earlier syntax
(allowing a REAL or REAL LIST value for xCuts, yCuts, and zCuts) is still
supported. In addition, xCuts, yCuts, and zCuts can accept a STRING value. With
a string syntax, these parameters can be specified as:
(sdesnmesh:axisaligned "xCuts" "1" "yCuts" "0.1 0.2 0.3")

Both example commands generate the same AxisAligned section in the

Sentaurus Mesh command file. Using a STRING value for xCuts, yCuts, and
zCuts also allows you to specify a series of cutlines using the more compact
notation that Sentaurus Mesh supports. For example, the following command:
(sdesnmesh:axisaligned "xCuts" "1" "yCuts" "0.1 0.2 0.3"
"zCuts" "(0 0.001) (1 0.002) 2")

causes Sentaurus Structure Editor to generate the following section in the

Sentaurus Mesh command file:
AxisAligned {
xCuts=(1)
yCuts=(0.1 0.2 0.3)
zCuts=((0 0.001) (1 0.002) 2)
}

This syntax for zCuts generates a series of mesh lines as described in the
Sentaurus™ Mesh User Guide, AxisAligned Section (see the description of the
xCuts, yCuts, and zCuts parameters).

Syntax
(sdesnmesh:axisaligned
["binaryTreeSplitBox" binaryTreeSplitBox]
["binaryTreeSplitFactorX" binaryTreeSplitFactorX]
["binaryTreeSplitFactorY" binaryTreeSplitFactorY]
["binaryTreeSplitFactorZ" binaryTreeSplitFactorZ]
["convexTriangulation" convexTriangulation]
["fitInterfaces" fitInterfaces] ["hintBoxSize" hintBoxSize]
["imprintAccuracy" imprintAccuracy]
["imprintCoplanarFacesOnly" imprintCoplanarFacesOnly]
["imprintCoplanarityAngle" imprintCoplanarityAngle]

Sentaurus™ Structure Editor User Guide 778

V-2024.03
Appendix A: Commands
sdesnmesh:axisaligned

["imprintCoplanarityDistance" imprintCoplanarityDistance]
["latticeCellSize" latticeCellSize]
["latticeDimensions" latticeDimensions]
["maxAngle" maxAngle] ["maxAspectRatio" maxAspectRatio]
["maxBoundaryCutRatio" maxBoundaryCutRatio]
["maxNeighborRatio" maxNeighborRatio]
["overscan" overscan] ["overscanResolution" overscanResolution]
["skipSameMaterialInterfaces" skipSameMaterialInterfaces]
["smoothing" smoothing] ["spacingMethod" spacingMethod]
["splitDisconnectedRegions" splitDisconnectedRegions]
["virtualSpacing" virtualSpacing]
["xCuts" xCuts] ["yCuts" yCuts] ["zCuts" zCuts])

Returns
None

Arguments

Argument Description

binaryTreeSplitBox Optional. For 2D structures, this argument requires four

numbers: (list REAL REAL REAL REAL).
For 3D structures, this argument requires six numbers:
(list REAL REAL REAL REAL REAL REAL)
Argument type: LIST

binaryTreeSplitFactorX Optional. Argument type: REAL

binaryTreeSplitFactorY Optional. Argument type: REAL

binaryTreeSplitFactorZ Optional. Argument type: REAL

convexTriangulation Optional. Argument type: BOOLEAN

fitInterfaces Optional. Argument type: BOOLEAN

hintBoxSize Optional. Argument type: REAL

imprintAccuracy Optional. Argument type: REAL

imprintCoplanarFacesOnly Optional. Argument type: BOOLEAN

imprintCoplanarityAngle Optional. Argument type: REAL

imprintCoplanarityDistance Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 779

V-2024.03
Appendix A: Commands
sdesnmesh:axisaligned

Argument Description

latticeCellSize Optional. For 2D structures, this argument requires two

numbers: (list REAL REAL).
For 3D structures, this argument requires three numbers:
(list REAL REAL REAL)
Argument type: LIST

latticeDimensions Optional. For 2D structures, this argument requires two

numbers: (list REAL REAL).
For 3D structures, this argument requires three numbers:
(list REAL REAL REAL)
Argument type: LIST

maxAngle Optional. Argument type: REAL

maxAspectRatio Optional. Argument type: REAL

maxBoundaryCutRatio Optional. Argument type: REAL

maxNeighborRatio Optional. Argument type: REAL

overscan Optional. Argument type: BOOLEAN

overscanResolution Optional. Argument type: REAL

skipSameMaterialInterfaces Optional. Argument type: BOOLEAN

smoothing Optional. Argument type: BOOLEAN

spacingMethod Optional. Options are "even" | "none" | "regular" |

"smooth". Argument type: STRING

splitDisconnectedRegions Optional. Argument type: BOOLEAN

virtualSpacing Optional. Argument type: BOOLEAN

xCuts Optional. Argument type: REAL LIST | STRING

yCuts Optional. Argument type: REAL LIST | STRING

zCuts Optional. Argument type: REAL LIST | STRING

Sentaurus™ Structure Editor User Guide 780

V-2024.03
Appendix A: Commands
sdesnmesh:boundary

sdesnmesh:boundary
This Scheme extension sets the parameters of the Boundary section of the mesh command
file (see Boundary Section on page 283).

Syntax
(sdesnmesh:boundary "Decimation"
["apply" applydecimation] ["accuracy" accuracydecimation]
["coplanarityAngle" coplanarityAngle]
["minDihedralAngle" minDihedralAngledecimation]
["shortEdge" shortEdge])

(sdesnmesh:boundary "DelPSC"
["apply" applyDelPSC] ["accuracy" accuracyDelPSC]
["ridgeAngle" ridgeAngle] ["ridgeSampling" ridgeSampling]
["skipFeatureSize" skipFeatureSize])

(sdesnmesh:boundary "DualContouring"
["apply" applydualContouring] ["decimation" decimation]
["minAngle" minAngle]
["minDihedralAngle" minDihedralAngledualContouring]
["resolution" resolution])

sdesnmesh:boundary "RegionMismatch"
["allow" allowregionMismatch] ["minVolume" minVolume])

(sdesnmesh:boundary "Save" "filename" filename)

Returns
None

Arguments

Argument Description

accuracydecimation Optional. Argument type: REAL

accuracyDelPSC Optional. Argument type: REAL

allowregionMismatch Optional. Argument type: BOOLEAN

applydecimation Optional. Argument type: BOOLEAN

applyDelPSC Optional. Argument type: BOOLEAN

applydualContouring Optional. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 781

V-2024.03
Appendix A: Commands
sdesnmesh:boundary-clear

Argument Description

coplanarityAngle Optional. Argument type: REAL

decimation Optional. Argument type: BOOLEAN

filename Specifies the name of a file. Argument type: STRING

minAngle Optional. Argument type: REAL

minDihedralAngledecimation Optional. Argument type: REAL

minDihedralAngledualContouring Optional. Argument type: REAL

minVolume Optional. Argument type: REAL

resolution Optional. Argument type: REAL

ridgeAngle Optional. Argument type: REAL

ridgeSampling Optional. Argument type: REAL

shortEdge Optional. Argument type: REAL

skipFeatureSize Optional. Argument type: REAL

sdesnmesh:boundary-clear
This Scheme extension deletes all boundary definition–related data that was previously
defined by the sdesnmesh:boundary Scheme extension.
This means that after (sdesnmesh:boundary-clear) is called the Boundary section will
not be added to the Sentaurus Mesh command file.

Syntax
(sdesnmesh:boundary-clear)

Returns
BOOLEAN

Sentaurus™ Structure Editor User Guide 782

V-2024.03
Appendix A: Commands
sdesnmesh:delaunizer

sdesnmesh:delaunizer
This Scheme extension sets the global parameters of the Delaunizer section of the mesh
command file (see Delaunizer Section on page 281). These are the parameters for the
delaunizer module.

Syntax
(sdesnmesh:delaunizer
"coplanarityAngle" coplanarityAngle
"coplanarityDistance" coplanarityDistance
"delaunayTolerance" delaunayTolerance
"edgeProximity" edgeProximity "faceProximity" faceProximity
"maxAngle" maxAngle "maxConnectivity" maxConnectivity
"maxNeighborRatio" maxNeighborRatio "maxPoints" maxPoints
"maxSolidAngle" maxSolidAngle "maxTetQuality" maxTetQuality
"minAngle" minAngle
"minDihedralAngleAllowed" minDihedralAngleAllowed
"minEdgeLength" minEdgeLength
"minEdgeLengthAllowed" minEdgeLengthAllowed
"sliverAngle" sliverAngle "sliverDistance" sliverDistance
"sliverRemovalAlgorithm" sliverRemovalAlgorithm
"storeDelaunayWeight" storeDelaunayWeight
"type" type)

Returns
None

Arguments

Argument Description

coplanarityAngle Argument type: REAL

coplanarityDistance Argument type: REAL

delaunayTolerance Argument type: REAL

edgeProximity Argument type: REAL

faceProximity Argument type: REAL

maxAngle Argument type: REAL

maxConnectivity Argument type: REAL

maxNeighborRatio Argument type: REAL

Sentaurus™ Structure Editor User Guide 783

V-2024.03
Appendix A: Commands
sdesnmesh:delaunizer

Argument Description

maxPoints Argument type: REAL

maxSolidAngle Argument type: REAL

maxTetQuality Argument type: REAL

minAngle Argument type: REAL

minDihedralAngleAllowed Argument type: REAL

minEdgeLength Argument type: REAL

minEdgeLengthAllowed Argument type: REAL

sliverAngle Argument type: REAL

sliverDistance Argument type: REAL

sliverRemovalAlgorithm Argument type: INTEGER

storeDelaunayWeight Argument type: BOOLEAN

type Options are "boxmethod" | "conforming" | "constrained".

Argument type: STRING

Sentaurus™ Structure Editor User Guide 784

V-2024.03
Appendix A: Commands
sdesnmesh:delaunizer-tolerance

sdesnmesh:delaunizer-tolerance
This Scheme extension sets the tolerance parameters for the delaunizer in the Sentaurus
Mesh command file (see Delaunizer Section on page 281).

Syntax
(sdesnmesh:delaunizer-tolerance tolerance location location-type
window)

Returns
None

Arguments

Argument Description

tolerance Specifies the tolerance. Argument type: REAL

location Specifies the location. Options are "boundary" | "surface".

Argument type: STRING

location-type Specifies the location type. Options are:

"region" ["region1" ["region2"]] |
"material" ["material1" ["material2"]] |
"global"

window Specifies the dimensions of a window by using the format "window" x0 y0

z0 x1 y1 z1.

Sentaurus™ Structure Editor User Guide 785

V-2024.03
Appendix A: Commands
sdesnmesh:interpolate

sdesnmesh:interpolate
This Scheme extension sets the parameters of the Interpolate section of the mesh
command file (see IOControls Section and Interpolate Section on page 278).

Syntax
(sdesnmesh:interpolate
["interpolateElements" interpolateElements]
["interpolateInterfaces" interpolateInterfaces]
["keepTotalConcentration" keepTotalConcentration]
["lateralDiffusion" lateralDiffusion])

Returns
BOOLEAN

Arguments

Argument Description

interpolateElements Optional. The default is #f. Argument type: BOOLEAN

interpolateInterfaces Optional. The default is #f. Argument type: BOOLEAN

keepTotalConcentration Optional. The default is #f. Argument type: BOOLEAN

lateralDiffusion Optional. The default is #f. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 786

V-2024.03
Appendix A: Commands
sdesnmesh:iocontrols

sdesnmesh:iocontrols
This Scheme extension sets the parameters of the IOControls section of the mesh
command file (see IOControls Section and Interpolate Section on page 278).

Syntax
(sdesnmesh:iocontrols
["inputFile" inputFile] ["outputFile" outputFile]
["EnableSections" EnableSections] ["EnableEMW" EnableEMW]
["EnableIsotropic" EnableIsotropic]
["EnableOffset" EnableOffset] ["EnableTensor" EnableTensor]
["EnableTools" EnableTools]
["numThreads" numThreads]
["saveInterfaceRegions" saveInterfaceRegions]
["unstructuredTensorMesh" unstructuredTensorMesh]
["useDFISEcoordinates" useDFISE | "useUCScoordinates" useUCS]
["verbosity" verbosity])

Returns
BOOLEAN

Arguments

Argument Description

inputFile Optional. Argument type: STRING

outputFile Optional. Argument type: STRING

EnableSections Optional. Argument type: BOOLEAN

EnableEMW Optional. Argument type: BOOLEAN

EnableIsotropic Optional. Argument type: BOOLEAN

EnableOffset Optional. Argument type: BOOLEAN

EnableTensor Optional. Argument type: BOOLEAN

EnableTools Optional. Argument type: BOOLEAN

numThreads Optional. Argument type: INTEGER

saveInterfaceRegions Optional. The default is #t. Argument type: BOOLEAN

unstructuredTensorMesh Optional. The default is #f. Argument type: BOOLEAN

Sentaurus™ Structure Editor User Guide 787

V-2024.03
Appendix A: Commands
sdesnmesh:offsetting

Argument Description

useDFISE Optional. The default is #f. Argument type: BOOLEAN

useUCS Optional. The default is #t. Argument type: BOOLEAN

verbosity Optional. Argument type: INTEGER

sdesnmesh:offsetting
This Scheme extension sets the global parameters for offsetting (see Offsetting
Refinements on page 254). These parameters are added to the Offsetting section of the
mesh command file.

Syntax
(sdesnmesh:offsetting ["includeExterior" includeExterior]
["normalSmoothing" normalSmoothing])

Returns
BOOLEAN

Arguments

Argument Description

includeExterior Optional. Argument type: BOOLEAN

normalSmoothing Optional. Argument type: BOOLEAN

Examples
(sdesnmesh:offsetting "includeExterior" #t "normalSmoothing" #t)

Sentaurus™ Structure Editor User Guide 788

V-2024.03
Appendix A: Commands
sdesnmesh:qualityreport

sdesnmesh:qualityreport
This Scheme extension sets the parameters of the QualityReport section of the Sentaurus
Mesh command file (see QualityReport Section on page 286).
See Sentaurus™ Mesh User Guide, QualityReport Section, for detailed descriptions of
arguments.

Syntax
(sdesnmesh:qualityreport qrtype qrelements
["limitMaxConnectivity" limitMaxConnectivity]
["limitMaxNonDelaunay" limitMaxNonDelaunay]
["limitMinAngle" limitMinAngle]
["limitMinEdgeLength" limitMinEdgeLength]
["limitMinVolume" limitMinVolume])

Returns
BOOLEAN

Arguments

Argument Description

qrtype Specifies the type of quality report. Options are "Global" |

"Material" | "Region".
The QualityReport section can contain one global block, and multiple
material and region blocks defined by qrtype as follows:
• "Global" defines a global block. In this case, the qrelements
argument is not used.
• "Material" defines a material block. In this case, qrelements is a
list of DATEX materials.
• "Region" defines a region block. In this case, qrelements is a list of
region names.
Argument type: STRING

qrelements Argument type: STRING LIST

limitMaxConnectivity Optional. Argument type: INTEGER

limitMaxNonDelaunay Optional. Argument type: REAL

limitMinAngle Optional. Argument type: REAL

limitMinEdgeLength Optional. Argument type: REAL

limitMinVolume Optional. Argument type: REAL

Sentaurus™ Structure Editor User Guide 789

V-2024.03
Appendix A: Commands
sdesnmesh:qualityreport

Examples
(sde:clear)
(sdesnmesh:qualityreport "Global" "limitMaxConnectivity" 100)

(sdesnmesh:qualityreport "Material" (list "Silicon" "PolySilicon")

"limitMaxNonDelaunay" 5 "limitMinEdgeLength" 0.01)

(sdesnmesh:qualityreport "Region" (list "region1")

"limitMaxNonDelaunay" 10 "limitMinAngle" 60
"limitMinEdgeLength" 0.001 "limitMinVolume" 0.0001)

These Scheme extensions generate the following QualityReport section in the Sentaurus
Mesh command file:
QualityReport {
Global {
limitMaxConnectivity = 100
}
Material = { "Silicon" "PolySilicon" } {
limitMaxNonDelaunay = 5
limitMinEdgeLength = 0.01
}
Region = {"region1"} {
limitMaxNonDelaunay = 10
limitMinAngle = 60
limitMinEdgeLength = 0.001
limitMinVolume = 0.0001
}
}

Sentaurus™ Structure Editor User Guide 790

V-2024.03
Appendix A: Commands
sdesnmesh:tensor

sdesnmesh:tensor
This Scheme extension replaces the Tensor section of the mesh command file with the
given string. It allows direct specification of the Tensor section without syntax-checking (see
Tensor Section on page 283).
Note:
Double quotation marks within the string must be escaped with the backslash. For
example:
\"example string\"

Syntax
(sdesnmesh:tensor value)

Returns
BOOLEAN

Arguments

Argument Description

value Specifies content that will replace the Tensor section of the mesh command
file. Argument type: STRING

Sentaurus™ Structure Editor User Guide 791

V-2024.03
Appendix A: Commands
sdesnmesh:tools

sdesnmesh:tools
This Scheme extension replaces the Tools section of the mesh command file with the given
string. It allows direct manipulation of the Tools section without syntax-checking (see Tools
Section on page 286).
Note:
Double quotation marks within the string must be escaped with the backslash. For
example:
\"example string\"

Syntax
(sdesnmesh:tools value)

Returns
BOOLEAN

Arguments

Argument Description

value Specifies content that will replace the Tools section of the mesh command file.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 792

V-2024.03
Appendix A: Commands
sdesp:begin

sdesp:begin
This Scheme extension begins the Sentaurus Process and Sentaurus Structure Editor
boundary-merging mode.
This Scheme extension is called before beginning the merging of .sat file boundaries. It
must be called before the sdesp:define-step command can be used. For that reason, it is
necessary to begin the Sentaurus Process and Sentaurus Structure Editor mode, which is
terminated with sdesp:finalize.
Note:
This Scheme extension applies to 3D models only.

Syntax
(sdesp:begin)

Returns
None

Examples
; Create Sentaurus Process Tcl file using sdesp commands
; Start Sentaurus Process/Sentaurus Structure Editor mode
(sdesp:begin)

; Load .sat files, each time defining a step name to be reproduced

; in Sentaurus Process
(sdesp:define-step "step1" "_step1.sat")
(sdesp:define-step "step2" "_step2.sat")
(sdesp:define-step "step3" "_step3.sat")
(sdesp:define-step "step4" "_step4.sat")

; Conclude Sentaurus Process/Sentaurus Structure Editor mode,

; write Tcl file
(sdesp:finalize "sprocess_sde.tcl")

Sentaurus™ Structure Editor User Guide 793

V-2024.03
Appendix A: Commands
sdesp:define-step

sdesp:define-step
This Scheme extension merges a boundary (in a .sat file) and defines a structure step to
be reproduced in Sentaurus Process. It loads a .sat file and merges with the currently
loaded geometry and associates step-name with the current step. See sdesp:begin on
page 793.

Syntax
(sdesp:define-step step-name file-name)

Returns
None

Arguments

Argument Description

step-name Specifies the name of a step. Argument type: STRING

file-name Specifies the .sat file to load. Argument type: STRING

sdesp:finalize
This Scheme extension completes the merging of boundaries in the Sentaurus Process and
Sentaurus Structure Editor mode. It writes a Tcl file defining the recreate_step Tcl
procedure called from within Sentaurus Process to recreate model geometry by redefining
region materials. See sdesp:begin on page 793.

Syntax
(sdesp:finalize Tcl-file-name)

Returns
None

Arguments

Argument Description

Tcl-file-name Specifies the name of a Tcl file. Argument type: STRING

Sentaurus™ Structure Editor User Guide 794

V-2024.03
Appendix A: Commands
sdesp:restore-state

sdesp:restore-state
This Scheme extension restores the internal state of Sentaurus Process and Sentaurus
Structure Editor to permit the restarting of the boundary-merging process.
During boundary merging by Sentaurus Process and Sentaurus Structure Editor, you might
want to save the state and restore it later (perhaps in a different Sentaurus Structure Editor
session) before continuing with the merging leading to its finalization.
To restore: Most of the internal bookkeeping is stored in the .sat file that is reloaded.
However, the sequence of steps that have been defined so far must be restored using this
Scheme extension. The list of all steps in the correct order is given as an argument list to
this extension.
See sdesp:begin on page 793.

Syntax
(sdesp:restore-state step-name-list)

Returns
None

Arguments

Argument Description

step-name-list Specifies a list of steps in the correct order. Argument type: STRING LIST

Sentaurus™ Structure Editor User Guide 795

V-2024.03
Appendix A: Commands
sdestr:capitalize

sdestr:capitalize
This Scheme extension changes the first character of the input string to uppercase if it is a
lowercase alphabetic character. It returns either the capitalized string or the unchanged
string.
Note:
The input parameter and the returned value of the sdestr:capitalize Scheme
extension are the same as for the Python capitalize method (see https://
www.javatpoint.com/python-string-capitalize-method).

Syntax
(sdestr:capitalize input-string)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:capitalize "try this.")
> "Try this."

(sdestr:capitalize "javatpoint")
> "Javatpoint"

(sdestr:capitalize "Javatpoint")
> "Javatpoint"

(sdestr:capitalize "#javatpoint")
> "#javatpoint"

(sdestr:capitalize "1-javatpoint")
> "1-javatpoint"

Sentaurus™ Structure Editor User Guide 796

V-2024.03
Appendix A: Commands
sdestr:casefold

sdestr:casefold
This Scheme extension returns a lowercase copy of the string.
Note:
The input parameter and the returned value of the sdestr:casefold Scheme
extension are the same as for the Python casefold method (see
https://www.javatpoint.com/python-string-casefold-method).

Syntax
(sdestr:casefold input-string)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:casefold "JAVATPOINT")
> "javatpoint"

(sdestr:casefold "JAVATPOINT - ß"

> "javatpoint ? ss"

(sdestr:casefold "JaVaTpOiNt"
> "javatpoint"

Sentaurus™ Structure Editor User Guide 797

V-2024.03
Appendix A: Commands
sdestr:center

sdestr:center
This Scheme extension takes an input string and a string length.
Note:
The input parameter and the returned value of the sdestr:center Scheme
extension are the same as for the Python center method (see
https://www.javatpoint.com/python-string-center-method).

Syntax
(sdestr:center input-string str-length [fill-char])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

str-length Specifies the string length. Argument type: INTEGER

fill-char Optional. Specifies a character with which to fill the left and right padding of
the string. If fill-char is not specified, then the default character is the hash
character (#). Argument type: STRING

Examples
(sdestr:center "Hello World!" 30)
> "#########Hello World!#########"

(sdestr:center "Hello World!" 30 #\;)

> ";Hello World!;"

Sentaurus™ Structure Editor User Guide 798

V-2024.03
Appendix A: Commands
sdestr:concat

sdestr:concat
This Scheme extension concatenates input values. It returns a new string that is the
concatenation of the entire list.

Syntax
(sdestr:concat values)

Returns
STRING

Arguments

Argument Description

values Specifies an input string, value1 value2 ... valueN.

Argument type: INTEGER | REAL | STRING | ...

Examples
(sdestr:concat "a" 1 #t '(1 2 3))
> "a1#t(1|2|3)"

(sdestr:concat "a" 1 #t 2.3 (list 4 5.6) (list 7 "te") (list 8 #t))

> "a1#t2.3(4|5.6)(7|te)(8|#t)"

Sentaurus™ Structure Editor User Guide 799

V-2024.03
Appendix A: Commands
sdestr:count

sdestr:count
This Scheme extension returns the number of occurrences of a specified substring in the
input string, in the specified range.
Note:
The input parameter and the returned value of the sdestr:count Scheme
extension are the same as for the Python count method (see
https://www.javatpoint.com/python-string-count-method).

Syntax
(sdestr:count input-string substring [start-index end-index])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

substring Specifies the substring. Argument type: STRING

start-index Optional. Specifies the start index of the range. Argument type: INTEGER

end-index Optional. Specifies the end index of the range. Argument type: INTEGER

Examples
(sdestr:count "Hello Javatpoint" "t")
> 2

(sdestr:count "ab bc ca de ed ad da ab bc ca" "a")

> 6

(sdestr:count "ab bc ca de ed ad da ab bc ca" "a" 3)

> 5

(sdestr:count "ab bc ca de ed ad da ab bc ca" "a" 3 8)

> 1

(sdestr:count "ab bc ca de ed ad da ab bc ca 12 23 35 62" "2")

> 3

Sentaurus™ Structure Editor User Guide 800

V-2024.03
Appendix A: Commands
sdestr:endswith

sdestr:endswith
This Scheme extension returns true if the input string terminates with the specified suffix
between the optional start index and end index. Otherwise, it returns false.
Note:
The input parameter and the returned value of the sdestr:endswith Scheme
extension are the same as for the Python endswith method (see
https://www.javatpoint.com/python-string-endswith-method).

Syntax
(sdestr:endswith input-string suffix
[start-index = 0 end-index]) = (length-input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

suffix Specifies the suffix. Argument type: STRING

start-index Optional. Specifies the start index. If it is not specified, then start-index=0.
Argument type: INTEGER

end-index Optional. Specifies the end index. If it is not specified, then end-index is the
length of the input string. Argument type: INTEGER

Examples
(sdestr:endswith "Hello this is javatpoint." ".")
> #t

(sdestr:endswith "Hello this is javatpoint." "is")

> #f

(sdestr:endswith "Hello this is javatpoint." "is" 10)

> #f

(sdestr:endswith "Hello this is javatpoint." "is" 0 13)

> #t

Sentaurus™ Structure Editor User Guide 801

V-2024.03
Appendix A: Commands
sdestr:expandtabs

sdestr:expandtabs
This Scheme extension replaces all tab characters (\t) in a string with the number of
specified spaces.
Note:
The input parameter and the returned value of the sdestr:expandtabs Scheme
extension are the same as for the Python expandtabs method (see https://
www.javatpoint.com/python-string-expandtabs-method).

Syntax
(sdestr:expandtabs input-string [tabsize])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

tabsize Optional. Specifies the specifies the number of spaces that replaces a tab (\t)
character (default is 8). This value can be overridden as required. Argument
type: INTEGER

Examples
(sdestr:expandtabs "Welcome \t to \t the \t Javatpoint.")
> "Welcome to the Javatpoint."

(sdestr:expandtabs "Welcome \t to \t the \t Javatpoint." 1)

> "Welcome to the Javatpoint."

(sdestr:expandtabs "Welcome \t to \t the \t Javatpoint." 2)

> "Welcome to the Javatpoint."

(sdestr:expandtabs "Welcome \t to \t the \t Javatpoint." 3)

> "Welcome to the Javatpoint."

Sentaurus™ Structure Editor User Guide 802

V-2024.03
Appendix A: Commands
sdestr:find

sdestr:find
This Scheme extension returns the index value of the string, where the substring is found
between the start index and the end index.
Note:
The input parameter and the returned value of the sdestr:find Scheme
extension are the same as for the Python find method (see
https://www.javatpoint.com/python-string-find-method).

Syntax
(sdestr:find input-string substring start-index end-index)

Returns
If found, it returns the index of the substring. Otherwise, it returns -1.

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

substring Specifies the substring. Argument type: STRING

start-index Specifies the start index. Argument type: INTEGER

end-index Specifies the end index. Argument type: INTEGER

Examples
(sdestr:find "Welcome to the Javatpoint." "the")
> 11

(sdestr:find "Welcome to the Javatpoint." "is")

> -1

(sdestr:find "Welcome to the Javatpoint." "t")

> 8

(sdestr:find "Welcome to the Javatpoint." "t" 25)

> -1

(sdestr:find "Welcome to the Javatpoint." "t" 20 25)

> 24

Sentaurus™ Structure Editor User Guide 803

V-2024.03
Appendix A: Commands
sdestr:format

sdestr:format
This Scheme extension performs format operations on the input string.
Braces {} are used in the input string, to be replaced with the specified value or values.
Braces can contain either an index argument or a positional argument.
The Scheme extension returns the formatted input string, using the passed value or values.
Note:
The input parameter and the returned value of the sdestr:format Scheme
extension are the same as for the Python format method (see
https://www.javatpoint.com/python-string-format-method).

Syntax
(sdestr:format input-string values)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

values Specifies values. Argument type: STRING or STRING STRING ...

Examples
The following example formats the input string using positional delimiters:
(define str "Java")
(define str2 "C#")
(sdestr:format "{} and {} both are programming languages" str str2)
> "Java and C# both are programming languages"

In the following example, the delimiters (braces) use numeric indices to replace and format
the input string:
(define str "Java")
(define str2 "C#")
(sdestr:format "{1} and {0} both are programming languages" str str2)
> "C# and Java both are programming languages"

Sentaurus™ Structure Editor User Guide 804

V-2024.03
Appendix A: Commands
sdestr:format

The following examples format the input string in different number systems:
(define val 10)
(sdestr:format "decimal: {0:d}" val) ;; # display decimal result
> "decimal: 10"

(sdestr:format "hex: {0:x}" val) ;; # display hexadecimal result

> "hex: a"

(sdestr:format "octal: {0:o}" val) ;; # display octal result

> " octal: 12"

(sdestr:format "binary: {0:b}" val) ;; # display binary result

> "binary: 1010"

The following examples format the value as a floating-point value or as a percentile:

(define val 100000000)
(sdestr:format "decimal: {:,}" val) ;; # formatting float value
> "decimal: 100,000,000"

(sdestr:format "decimal: {:.2%}" (/ 56 9))

;; # formatting percentile value
> "decimal: 622.22%"

Sentaurus™ Structure Editor User Guide 805

V-2024.03
Appendix A: Commands
sdestr:index

sdestr:index
This Scheme extension returns the index value of the input string, where the substring is
found between the start index and the end index.
It throws an exception if the string is not found. It works in the same way as sdestr:find.
Note:
The input parameter and the returned value of the sdestr:index Scheme
extension are the same as for the Python index method (see
https://www.javatpoint.com/python-string-index-method).

Syntax
(sdestr:index input-string substring start-index end-index)

Returns
INTEGER

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

substring Specifies the substring. Argument type: STRING

start-index Specifies the start index. Argument type: INTEGER

end-index Specifies the end index. Argument type: INTEGER

Examples
(sdestr:index "Welcome to the Javatpoint." "at")
> 18

(sdestr:index "Welcome to the Javatpoint." "ate")

> *** Error sde:error: ValueError: substring not found

(sdestr:index "Welcome to the Javatpoint." "p" 19 21)

> 20

Sentaurus™ Structure Editor User Guide 806

V-2024.03
Appendix A: Commands
sdestr:isalnum

sdestr:isalnum
This Scheme extension returns true if the characters in the string are alphanumeric, that is,
alphabetic characters or numerals, and there is at least one character. Otherwise, this
Scheme extension returns false.
Note:
The input parameter and the returned value of the sdestr:isalnum Scheme
extension are the same as for the Python isalnum method (see
https://www.javatpoint.com/python-string-isalnum-method).

Syntax
(sdestr:isalnum input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isalnum "Welcome")
> #t

(sdestr:isalnum "Welcome ")

> #f

(sdestr:isalnum "Welcome123")
> #t

(sdestr:isalnum "Welcome 123")

> #f

(sdestr:isalnum "123456")
> #t

Sentaurus™ Structure Editor User Guide 807

V-2024.03
Appendix A: Commands
sdestr:isalpha

sdestr:isalpha
This Scheme extension returns true if the input string contains only alphanumeric
characters, and there is at least one character. Otherwise, it returns false.
Note:
The input parameter and the returned value of the sdestr:isalpha Scheme
extension are the same as for the Python isalpha method (see
https://www.javatpoint.com/python-string-isalpha-method).

Syntax
(sdestr:isalnum input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isalpha "Javatpoint")
> #t

(sdestr:isalpha "Welcome to the Javatpoint")

> #f

(sdestr:isalpha "Javatpoint12345")
> #f

Sentaurus™ Structure Editor User Guide 808

V-2024.03
Appendix A: Commands
sdestr:isdecimal

sdestr:isdecimal
This Scheme extension returns true if the input string contains only decimal digits, and there
is at least one digit. Otherwise, it returns false.
Note:
The input parameter and the returned value of the sdestr:isdecimal Scheme
extension are the same as for the Python isdecimal method (see
https://www.javatpoint.com/python-string-isdecimal-method).

Syntax
(sdestr:isdecimal input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isdecimal "Javatpoint")
> #f

(sdestr:isdecimal "123")
> #t

(sdestr:isdecimal "2.50")
> #f

(sdestr:isdecimal "@#$")
> #f

Sentaurus™ Structure Editor User Guide 809

V-2024.03
Appendix A: Commands
sdestr:isdigit

sdestr:isdigit
This Scheme extension returns true if the input string contains only decimal digits, and there
is at least one digit. Otherwise, it returns false.
Note:
The input parameter and the returned value of the sdestr:isdigit Scheme
extension are the same as for the Python isdigit method (see
https://www.javatpoint.com/python-string-isdigit-method).

Syntax
(sdestr:isdigit input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isdigit "12345")
> #t

(sdestr:isdigit "120-2569-854")
> #f

(sdestr:isdigit "123!@#$")
> #f

Sentaurus™ Structure Editor User Guide 810

V-2024.03
Appendix A: Commands
sdestr:islower

sdestr:islower
This Scheme extension returns true if the input string contains only lowercase alphabetic
characters, among other non-alphabetic characters. Otherwise, it returns false.
Note:
The input parameter and the returned value of the sdestr:islower Scheme
extension are the same as for the Python islower method (see
https://www.javatpoint.com/python-string-islower-method).

Syntax
(sdestr:islower input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:islower "javatpoint")
> #t

(sdestr:islower "Welcome To JavaTpoint")

> #f

(sdestr:islower "hi, my contact is 9856******")

> #t

Sentaurus™ Structure Editor User Guide 811

V-2024.03
Appendix A: Commands
sdestr:isnumeric

sdestr:isnumeric
This Scheme extension returns true if the input string contains only numeric characters.
Otherwise, it returns false. Numeric characters include digits (0, 1, 2, ..., 9) and all
characters that have the Unicode numeric value property (+, -, e).
Note:
The input parameter and the returned value of the sdestr:isnumeric Scheme
extension are the same as for the Python isnumeric method (see
https://www.javatpoint.com/python-string-isnumeric-method).

Syntax
(sdestr:isnumeric input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isnumeric "12345")
> #t

(sdestr:isnumeric "java12345")
> #f

(sdestr:isnumeric "123-4525-00")
> #f

(sdestr:isnumeric "-123.45e2")
> #t

(sdestr:isnumeric "-123.45E2")
> #f

Sentaurus™ Structure Editor User Guide 812

V-2024.03
Appendix A: Commands
sdestr:isspace

sdestr:isspace
This Scheme extension returns true if the input string contains only whitespace characters.
Otherwise, it returns false.
Here, whitespace characters includes space, new lines, and tabs. Such characters are
defined in the Unicode Character Database as Other or Separator and include:
• " ": Space

• \t: Horizontal tab

• \n: New line

• \v: Vertical tab

• \f: Feed

• \r: Return
Note:
The input parameter and the returned value of the sdestr:isspace Scheme
extension are the same as for the Python isspace method (see
https://www.javatpoint.com/python-string-isspace-method).

Syntax
(sdestr:isspace input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isspace " ")
> #t
(sdestr:isspace "ab cd ef")
> #f
(sdestr:isspace "ab cd ef \n")
> #f
(sdestr:isspace "\t \r \n")
> #t

Sentaurus™ Structure Editor User Guide 813

V-2024.03
Appendix A: Commands
sdestr:istitle

sdestr:istitle
This Scheme extension returns true if the input string is titled correctly. Otherwise, it returns
false.
A title is considered correct if an uppercase alphabetic character is the first character in the
input string.
Note:
The input parameter and the returned value of the sdestr:istitle Scheme
extension are the same as for the Python istitle method (see
https://www.javatpoint.com/python-string-istitle-method).

Syntax
(sdestr:istitle input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:istitle "Welcome To Javatpoint")
> #t

(sdestr:istitle "hello javatpoint")

> #f

(sdestr:istitle "ab cd ef")

> #f

(sdestr:istitle "Ab Cd Ef")

> #t

(sdestr:istitle "1b 2d 3f")

> #f

Sentaurus™ Structure Editor User Guide 814

V-2024.03
Appendix A: Commands
sdestr:isupper

sdestr:isupper
This Scheme extension returns true if the input string has only uppercase alphabetic
characters, if there are alphabetic characters. It returns false if any alphabetic characters are
lowercase.
Note:
The input parameter and the returned value of the sdestr:isupper Scheme
extension are the same as for the Python isupper method (see
https://www.javatpoint.com/python-string-isupper-method).

Syntax
(sdestr:isupper input-string)

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:isupper "WELCOME TO JAVATPOINT.")
> #t

(sdestr:isupper "WELCOME To JAVATPOINT.")

> #f

(sdestr:isupper "Learn Java Here.")

> #f

(sdestr:isupper "123 @#$ -JAVA.")

> #t

Sentaurus™ Structure Editor User Guide 815

V-2024.03
Appendix A: Commands
sdestr:join

sdestr:join
This Scheme extension merges the string representation of the given string list with the
specified pattern.
It returns a new string that is the concatenation of the strings in the list with the specified
pattern string.
Note:
The input parameter and the returned value of the sdestr:join Scheme
extension are the same as for the Python join method (see
https://www.javatpoint.com/python-string-join-method).

Syntax
(sdestr:join input-string-list pattern)

Returns
STRING

Arguments

Argument Description

input-string-list Specifies a list of input strings. Argument type: STRING LIST

pattern Specifies a pattern. Argument type: STRING

Examples
(sdestr:join (list "1" "2" "3" "4") ":")
> "1:2:3:4"

(sdestr:join (list "J" "a" "v" "a" "t" "p" "o" "i" "n" "t") "")
> "Javatpoint"

(sdestr:join (list "Java" "C#" "Python") "->")

> "Java->C#->Python"

(sdestr:join (list "key1" "key2") "&")

> "key1&key2"

Sentaurus™ Structure Editor User Guide 816

V-2024.03
Appendix A: Commands
sdestr:length

sdestr:length
This Scheme extension returns the number of characters in the input string.
Note:
The input parameter and the returned value of the sdestr:length Scheme
extension are the same as for the Python length method (see
https://www.javatpoint.com/java-string-length).

Syntax
(sdestr:length input-string)

Returns
INTEGER

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:length "javatpoint")
> 10

Sentaurus™ Structure Editor User Guide 817

V-2024.03
Appendix A: Commands
sdestr:ljust

sdestr:ljust
This Scheme extension returns the input string aligned to the left and, depending on the
specified string length, it fills any remaining space with the specified character.
Note:
The input parameter and the returned value of the sdestr:ljust Scheme
extension are the same as for the Python ljust method (see
https://www.javatpoint.com/python-string-ljust-method).

Syntax
(sdestr:ljust input-string str-length [fill-char])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

str-length Specifies the string length. Argument type: INTEGER

fill-char Optional. Specifies a character with which to fill the left padding of the string. If
fill-char is not specified, then the default fill character is "".
Argument type: STRING

Examples
(sdestr:ljust "Javatpoint" 20)
> "Javatpoint "

(sdestr:ljust "Javatpoint" 15 "$")

> "Javatpoint$$$$$"

(sdestr:ljust "Javatpoint" 5)
> "Javatpoint"

(sdestr:ljust "Javatpoint" 5 "$")

> "Javatpoint"

Sentaurus™ Structure Editor User Guide 818

V-2024.03
Appendix A: Commands
sdestr:lower

sdestr:lower
This Scheme extension converts any uppercase alphabetic characters in the input string to
lowercase. It returns the converted input string, depending on the specified string length, it
fills any remaining space with the specified character.
Note:
The input parameter and the returned value of the sdestr:lower Scheme
extension are the same as for the Python lower method (see
https://www.javatpoint.com/python-string-lower-method).

Syntax
(sdestr:lower input-string)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:lower "Javatpoint")
> "javatpoint"

(sdestr:lower "Welcome To JAVAtpoint, WWW.JAVATPOINT.COM")

> "welcome to javatpoint, www.javatpoint.com"

Sentaurus™ Structure Editor User Guide 819

V-2024.03
Appendix A: Commands
sdestr:lstrip

sdestr:lstrip
This Scheme extension removes all leading space or characters from the input string.
Note:
The input parameter and the returned value of the sdestr:lstrip Scheme
extension are the same as for the Python lstrip method (see
https://www.javatpoint.com/python-string-lstrip-method).

Syntax
(sdestr:lstrip input-string [remove-string])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

remove-string Optional. Specifies particular characters to remove if they are leading

characters in the input string. If you do not specify remove-string, then the
Scheme extension removes all the leading space from the string.
Argument type: STRING

Examples
(sdestr:lstrip " Javatpoint ")
> "Javatpoint "

(sdestr:lstrip "$$$$-Javatpoint-$$$$" "$")

> "-Javatpoint-$$$$"

(sdestr:lstrip "http://www.javatpoint.com" "http://www.")

> "javatpoint.com"

Sentaurus™ Structure Editor User Guide 820

V-2024.03
Appendix A: Commands
sdestr:partition

sdestr:partition
This Scheme extension splits the input string at the first occurrence of the specified
separator. It returns the part of the input string before the separator string, the separator
itself, and the part after it. If the separator is not found, then this Scheme extension returns
the separator and two empty strings.
Note:
The input parameter and the returned value of the sdestr:partition Scheme
extension are the same as for the Python partition method (see
https://www.javatpoint.com/python-string-partition-method).

Syntax
(sdestr:partition input-string separator)

Returns
List with three members

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

separator Specifies a separator. Argument type: STRING

Examples
(sdestr:partition "Java is a programming language" "is")
> ("Java " "is" " a programming language")

(sdestr:partition "Java is a programming language" "Java")

> (" " "Java" " is a programming language")

(sdestr:partition "Java is a programming language" "language")

> ("Java is a programming " "language" "")

(sdestr:partition "Java is a programming language" "av")

> ("J" "av" "a is a programming language")

(sdestr:partition "Java is a programming language" "not")

> ("Java is a programming language" "" "")

Sentaurus™ Structure Editor User Guide 821

V-2024.03
Appendix A: Commands
sdestr:replace

sdestr:replace
This Scheme extension replaces a part of the input string with a new string. It returns the
input string with the replaced string.
Note:
The input parameter and the returned value of the sdestr:replace Scheme
extension are the same as for the Python replace method (see
https://www.javatpoint.com/python-string-replace-method).

Syntax
(sdestr:replace input-string old-string new-string [ncount])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

old-string Specifies the old string. Argument type: STRING

new-string Specifies the new string. Argument type: STRING

ncount Optional. If you specify this argument, then the Scheme extension replaces one
string with a new string for the specified number of occurrences of the old string.
If ncount is not specified, then all occurrences of the old string are replaced.
Argument type: INTEGER

Examples
(sdestr:replace "Java is a programming language" "Java" "C")
> "C is a programming language"

(sdestr:replace "Java C C# Java Php Python Java" "Java" "Fennel")

> "Fennel C C# Fennel Php Python Fennel"

(sdestr:replace "Java C C# Java Php Python Java" "Java" "Fennel" 1)

> "Fennel C C# Java Php Python Java"

Sentaurus™ Structure Editor User Guide 822

V-2024.03
Appendix A: Commands
sdestr:rfind

sdestr:rfind
This Scheme extension is similar to sdestr:find, but it traverses the input string in a
backward direction.
It returns the index value of the input string, where the substring is found between the start
index and the end index.
Note:
The input parameter and the returned value of the sdestr:rfind Scheme
extension are the same as for the Python rfind method (see
https://www.javatpoint.com/python-string-rfind-method).

Syntax
(sdestr:rfind input-string substring start-index end-index)

Returns
If found, it returns the index of the substring; otherwise, -1.

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

substring Specifies the substring. Argument type: STRING

start-index Specifies the start index. Argument type: INTEGER

end-index Specifies the end index. Argument type: INTEGER

Examples
(sdestr:rfind "Learn Java from Javatpoint" "Java")
> 16

(sdestr:rfind "It is technical tutorial" "t")

> 18

(sdestr:rfind "It is technical tutorial" "t" 5)

> 18

(sdestr:rfind "It is technical tutorial" "t" 5 10)

> 6

Sentaurus™ Structure Editor User Guide 823

V-2024.03
Appendix A: Commands
sdestr:rindex

sdestr:rindex
This Scheme extension is the same as sdestr:index, but it traverses the input string in a
backward direction.
It returns the index value of the input string where the substring is found between the start
index and the end index.
It throws an exception if the substring is not found. It works in the same way as
sdestr:find.
Note:
The input parameter and the returned value of the sdestr:rindex Scheme
extension are the same as for the Python rindex method (see
https://www.javatpoint.com/python-string-rindex-method).

Syntax
(sdestr:rindex input-string substring start-index end-index)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

substring Specifies the substring. Argument type: STRING

start-index Specifies the start index. Argument type: INTEGER

end-index Specifies the end index. Argument type: INTEGER

Examples
(sdestr:rindex "It is technical tutorial" "t")
> 18
(sdestr:rindex "It is technical tutorial" "t" 5 15)
> 6
(sdestr:rindex "Hello C Language" "t")
> "ValueError: substring not found"
(sdestr:rindex "Hello C Language" "t" 5 15)
> "ValueError: substring not found"

Sentaurus™ Structure Editor User Guide 824

V-2024.03
Appendix A: Commands
sdestr:rjust

sdestr:rjust
This Scheme extension returns the input string aligned to the right and, depending on the
specified string length, it fills any remaining space with the specified character.
Note:
The input parameter and the returned value of the sdestr:rjust Scheme
extension are the same as for the Python rjust method (see
https://www.javatpoint.com/python-string-rjust-method).

Syntax
(sdestr:rjust input-string str-length [fill-char])

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

str-length Specifies the string length. Argument type: INTEGER

fill-char Optional. Specifies a character with which to fill the right padding of the string.
Argument type: STRING

Examples
(sdestr:rjust "Javatpoint" 20)
> " Javatpoint"

(sdestr:rjust "Javatpoint" 15 "$")

> "$$$$$Javatpoint"

(sdestr:rjust "Javatpoint" 5)
> "Javatpoint"

(sdestr:rjust "Javatpoint" 5 "$")

> "Javatpoint"

Sentaurus™ Structure Editor User Guide 825

V-2024.03
Appendix A: Commands
sdestr:rpartition

sdestr:rpartition
This Scheme extension splits the input string at the last occurrence of the separator string.
It returns the part of the input string before the separator string, the separator itself, and the
part after it. If the separator is not found, then the Scheme extension returns the separator
and two empty strings.
Note:
The input parameter and the returned value of the sdestr:rpartition Scheme
extension are the same as for the Python rpartition method (see https://
www.javatpoint.com/python-string-rpartition-method).

Syntax
(sdestr:rpartition input-string separator)

Returns
List with three members

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

separator Specifies the separator. Argument type: STRING

Examples
(sdestr:rpartition "Java is a programming language" "is")
> ("Java ", "is", " a programming language")

(sdestr:rpartition "Java is a programming language" "Java")

> ("", "Java", " is a programming language")

(sdestr:rpartition "Java is a programming language" "language")

> ("Java is a programming ", "language", "")

(sdestr:rpartition "Java is a programming language" "av")

> ("J", "av", "a is a programming language")

Sentaurus™ Structure Editor User Guide 826

V-2024.03
Appendix A: Commands
sdestr:rsplit

sdestr:rsplit
This Scheme extension separates the input string and returns a list. It splits the string from
the right, using the separator string as a delimiter.
This Scheme extension works the same way as sdestr:split except that splitting the input
string occurs from the right.
Note:
The input parameter and the returned value of the sdestr:rsplit Scheme
extension are the same as for the Python rsplit method (see
https://www.javatpoint.com/python-string-rsplit-method).

Syntax
(sdestr:rsplit input-string [separator] [ncount])

Returns
STRING LIST

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

separator Optional. Specifies the separator. If the separator is not specified, then any
space string is a separator. Argument type: STRING

ncount Optional. If you specify this argument, then the Scheme extension replaces one
string with a new string for the specified number of occurrences of the old string.
If ncount is not specified, then all occurrences of the old string are replaced.
Argument type: INTEGER

Examples
(sdestr:rsplit "Java is a programming language")
> ("Java" "is" "a" "programming" "language")
(sdestr:rsplit "Java is a programming language" "Java")
> ("" " is a programming language")
(sdestr:rsplit "Java is a programming language" "a")
> ("J" "v" " is " " progr" "mming l" "ngu" "ge")
(sdestr:rsplit "Java is a programming language" "a" 1)
> ("J" "va is a programming language")
(sdestr:rsplit "Java is a programming language" "a" 3)
> ("J" "v" " is " " programming language")

Sentaurus™ Structure Editor User Guide 827

V-2024.03
Appendix A: Commands
sdestr:rstrip

sdestr:rstrip
This Scheme extension is the same as sdestr:split, but it processes the input string in a
backward direction.
Note:
The input parameter and the returned value of the sdestr:rstrip Scheme
extension are the same as for the Python rstrip method (see
https://www.javatpoint.com/python-string-rstrip-method).

Syntax
(sdestr:rstrip input-string [separator])

Returns
List of words in string

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

separator Optional. Specifies the separator. If the separator is not specified, then the
string splits according to space. Argument type: STRING

Examples
(sdestr:rstrip "Java and C# ")
> "Java and C#"

(sdestr:rstrip "Java and C#" "#")

> "Java and C"

(sdestr:rstrip "Java and C#" "#")

> "Java and C"

Sentaurus™ Structure Editor User Guide 828

V-2024.03
Appendix A: Commands
sdestr:split

sdestr:split
This Scheme extension splits the input string into a list, based on the delimiter specified as
the separator string.
The input string is split according to the space if the delimiter is not specified. It returns a list
of substrings concatenated with the delimiter.
Note:
The input parameter and the returned value of the sdestr:split Scheme
extension are the same as for the Python split method (see
https://www.javatpoint.com/python-string-split-method).

Syntax
(sdestr:split input-string [separator] [maxsplit])

Returns
STRING LIST

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

separator Optional. Specifies the separator. If the separator is not specified, then the
string splits according to space. Argument type: STRING

maxsplit Optional. Argument type: INTEGER

Examples
(sdestr:split "Java is a programming language")
> ("Java" "is" "a" "programming" "language")
(sdestr:split "Java is a programming language" "Java")
> ("" " is a programming language")
(sdestr:split "Java is a programming language" "a")
> ("J" "v" " is " " progr" "mming l" "ngu" "ge")
(sdestr:split "Java is a programming language" "a" 1)
> ("J" "va is a programming language")
(sdestr:split "Java is a programming language" "a" 3)
> ("J" "v" " is " " programming language")

Sentaurus™ Structure Editor User Guide 829

V-2024.03
Appendix A: Commands
sdestr:splitlines

sdestr:splitlines
This Scheme extension splits the input string at line boundaries. It returns a list of strings at
each line with new lines removed.
Elements that can break lines are:
• New line (\n)
• Return (\r)
• Return + line feed (\r\n)
• Line tabulation (\v or \x0b)
• Form feed (\f or \x0c)
• File separator (\x1c)
• Group separator (\x1d)
• Record Separator (\x1e)
• Next line (C1 control code) (\x85)
• Line separator (\u2028)
• Paragraph separator (\u2029)
Note:
The input parameter and the returned value of the sdestr:splitlines Scheme
extension are the same as for the Python splitlines method (see https://
www.javatpoint.com/python-string-splitlines-method).

Syntax
(sdestr:splitlines input-string)

Returns
STRING LIST

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Sentaurus™ Structure Editor User Guide 830

V-2024.03
Appendix A: Commands
sdestr:splitlines

Examples
(sdestr:splitlines "Java is a programming language")
> ("Java is a programming language")

(sdestr:splitlines "Java \n is a programming \r language")

> ("Java " " is a programming " " language")

(sdestr:splitlines "Java \n is a programming \r language")

> ("Java \n" " is a programming \r" " language")
(sdestr:splitlines "Java \n is a programming \r language for \r\n
software development")
> ("Java " " is a programming " " language for " "
software development")

Sentaurus™ Structure Editor User Guide 831

V-2024.03
Appendix A: Commands
sdestr:startswith

sdestr:startswith
This Scheme extension returns true if the input string starts with the specified prefix.
Otherwise, it returns false.
Optionally, you can specify a start index from where search starts and an end index where
the search stops.
Note:
The input parameter and the returned value of the sdestr:startswith Scheme
extension are the same as for the Python startswith method (see https://
www.javatpoint.com/python-string-startswith-method).

Syntax
(sdestr:startswith input-string prefix [start-index] [end-index])

Returns
BOOLEAN

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

prefix Specifies the prefix. Argument type: STRING

start-index Optional. Specifies the start index from where the search starts.
Argument type: INTEGER

end-index Optional. Specifies the end index from where the search stops.
Argument type: INTEGER

Examples
(sdestr:startswith "Hello Javatpoint" "Hello")
> #t
(sdestr:startswith "Hello Javatpoint" "Java")
> #f
(sdestr:startswith "Hello Javatpoint" "Java" 6)
> #t
(sdestr:startswith "Hello Javatpoint" "Java" 6 10)
> #t
(sdestr:startswith "Hello Javatpoint" "Java" 6 12)
> #f

Sentaurus™ Structure Editor User Guide 832

V-2024.03
Appendix A: Commands
sdestr:swapcase

sdestr:swapcase
This Scheme extension converts uppercase alphabetic characters to lowercase and
lowercase alphabetic characters to uppercase in the input string.
Note:
The input parameter and the returned value of the sdestr:swapcase Scheme
extension are the same as for the Python swapcase method (see
https://www.javatpoint.com/python-string-swapcase-method).

Syntax
(sdestr:swapcase input-string)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:swapcase "HELLO JAVATPOINT")
> "hello javatpoint"

(sdestr:swapcase "hello javatpoint")

> "HELLO JAVATPOINT"

(sdestr:swapcase "Hello JavaTpoint")

> "hELLO jAVAtPOINT"

Sentaurus™ Structure Editor User Guide 833

V-2024.03
Appendix A: Commands
sdestr:upper

sdestr:upper
This Scheme extension converts any alphabetic characters in the input string to uppercase.
Note:
The input parameter and the returned value of the sdestr:upper Scheme
extension are the same as for the Python upper method (see
https://www.javatpoint.com/python-string-upper-method).

Syntax
(sdestr:upper input-string)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

Examples
(sdestr:upper "Hello javatpoint")
> "HELLO JAVATPOINT"

Sentaurus™ Structure Editor User Guide 834

V-2024.03
Appendix A: Commands
sdestr:zfill

sdestr:zfill
This Scheme extension adds zeros (0) to the left of the input string to a specified length.
It returns the input string padded with zeros, up to the specified length. However, if the
specified length is less than the number of characters in the input string, then the Scheme
extension returns the input string.
If the input string starts with a plus (+) or minus (-) sign, then the Scheme extension returns
the input string padded with zeros, up to the specified length, with the plus or minus sign as
the first character.
Note:
The input parameter and the returned value of the sdestr:zfill Scheme
extension are the same as for the Python zfill method (see
https://www.javatpoint.com/python-string-zfill-method).

Syntax
(sdestr:zfill input-string str-length)

Returns
STRING

Arguments

Argument Description

input-string Specifies an input string. Argument type: STRING

str-length Specifies the length of the string. Argument type: INTEGER

Examples
(sdestr:zfill "Zfill Example" 20)
> "0000000Zfill Example"
(sdestr:zfill "Zfill Example" 5)
> "Zfill Example"
(sdestr:zfill "+100" 10)
> "+000000100"
(sdestr:zfill "-200" 10)
> "-000000200"
(sdestr:zfill "--River--" 10)
> "-0-River--"

Sentaurus™ Structure Editor User Guide 835

V-2024.03
Appendix A: Commands
set-interface-contact

set-interface-contact
This Scheme extension attaches a contact attribute to the common faces of the specified
regions.
Note:
This Scheme extension applies to 3D models only.

Syntax
(set-interface-contact region1 region2 contact-name)

Returns
None

Arguments

Argument Description

region1 Specifies a region name. Argument type: STRING

region2 Specifies a region name. Argument type: STRING

contact-name Specifies the name of a contact. Argument type: STRING

Examples
(sde:clear)
(sdegeo:create-cuboid (position 0 0 0) (position 10 10 10)
"Silicon" "mb1")
(sdegeo:create-sphere (position 10 10 0) 4 "PolySilicon" "mb2")
(sdegeo:define-contact-set "ifcontact" 4 (color:rgb 1 0 0) "##")
(set-interface-contact "mb1" "mb2" "ifcontact")

Sentaurus™ Structure Editor User Guide 836

V-2024.03
Appendix A: Commands
shell?

shell?
This Scheme extension determines whether a Scheme object is a shell.
It returns #t if the specified object is a shell; otherwise, it returns #f.

Syntax
(shell? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queries. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 837

V-2024.03
Appendix A: Commands
skin:options

skin:options
This Scheme extension sets the options in the data structure to be used by skinning APIs.

Syntax
(skin:options {skin-option-name value} [skin-options])

Returns
sweep-options

Arguments

Argument Description

skin-option-name Specifies the name of a skinning option. See Description for a list of
available options. Argument type: STRING

value Specifies the value of a skinning option. Argument type: BOOLEAN

skin-options Optional. Argument type: SKIN OPTIONS

Description
This Scheme extension sets the Scheme object skin-options that is used by the skinning
and lofting Scheme extensions.
The following skinning options, for skin-option-name are available:

Skinning option Description

align (Boolean) Aligns the direction of the cross-section curves such that the
normal of the first profile points toward the second profile. All other
profiles are aligned to follow the first and second. If the sections are not
oriented in the same direction, then the align option can be used to
avoid producing a twisted, self-intersecting body.
The default is #t.

allow_same_uv (Boolean) Allows surfaces with the same u and v direction to be

created. If the option is set to #t and a surface with the same u and v
directions is created, then a warning message is displayed. If set to #f,
then an error message is displayed.
Note:
If this option is set to #t and a surface with the same u and v
directions is created, then modeling problems might appear later.

Sentaurus™ Structure Editor User Guide 838

V-2024.03
Appendix A: Commands
skin:options

Skinning option Description

arc_length, (Boolean) The arc_length option is used to select the arc length or
arc_length_u isoparametric parameterization of the skinning surface. For basic
skinning and lofting in isoparametric parameterization, the surface
parameter in the v direction follows the cross-section curves. For
arc-length parameterization, the surface parameter follows lines of
constant length. The default is isoparametric parameterization. In the
case of skinning with guide curves, with arc-length parameterization,
the guide curve is arc-length parameterized; however, the surface is
still isoparametric.
The arc_length_u option reparameterizes curves of the skinning or
lofting profiles to arc length.
The default is #f for both options.

closed (Boolean) Used to construct a solid body closed in v (that is, a torus).
A solid body is constructed only when all the wires supplied are closed.
At least three profiles must be provided to create a closed body. The
default is #f.

estimate_loft_tanfacs (Boolean) When this option is switched on, the weight factor for the
tangent continuous of the loft is determined such that it minimizes the
average radius of curvature of the lofting surfaces. The resulting bodies
should support shelling to greater thickness and also blending of their
edges to larger blend radii. The default is #f.

gap_type (String) Specifies the type of gap that is placed between the new faces.
The type can be:
• "extended" (default) – extending the surfaces and intersecting
• "chamfered" – a linear fill between both lateral faces
• "rounded" – tangent surface to both lateral faces

guidePreference (String) Specifies how an over-constrained guide is resolved. It is an

enumerated type with the following possible values:
• If "constrain_to_guide" (default) is specified, then the resulting
lofting surface always stays with the defining guide curve.
• If "constrain_to_tangent" is specified, then the lofting surface
always follows the tangent constraint.

match_vertices (Boolean) Suppresses the vertex-matching algorithm that ensures that

all profiles consist of the same number of coedges. A heuristic
approach is used to determine which vertex pairs are good matches.
Profile coedges are then split where additional vertices are needed.
This option is forced to #t if the coedge numbers of the profiles are not
equal. The default is #t.

Sentaurus™ Structure Editor User Guide 839

V-2024.03
Appendix A: Commands
skin:options

Skinning option Description

merge_wirecoedges (Boolean) When this option is set to #t, the G1 vertices of the skinning
and lofting wire profiles are removed by merging adjacent coedges/
edges. This improves operations such as blending and shelling as it
reduces the coedge/edge count and the number of surfaces, and
eliminates near tangent edges. The default is #t.

no_new_twist_vertices (Boolean) The algorithm that minimizes the surface twist can add
vertices to some of the profiles if none of the existing vertices match
well. This option allows you to force the algorithm to choose matching
vertices from the existing vertices. The default is #f.

no_twist (Boolean) Minimizes the twist of the surface produced. Twist

minimization aligns closed curves such that the start of the second
curve is aligned to the start of the first curve. Even if the shape of a
body is unaffected by twisting, a surface with a twist could produce
unexpected results when faceting and rendering. The default is #t.

periodic (Boolean) Allows the construction of loft bodies that are periodic in v,
that is, bodies that close back on themselves smoothly (continuously)
at the start and end profiles. This option is activated in the skinning
APIs by giving the closed option a value of 2. In Scheme, this is
achieved by setting the periodic flag to #t. As for the closed option, at
least three profiles must be supplied to create a periodic loft body.

perpendicular (Boolean) The take-off vector is a tangent vector going out of the
starting edge or surface and into the skinned or lofted surface. The
perpendicular option (for lofting only) is used to specify the direction
of the take-off vector, perpendicular to the coedge or in the loft
direction. (This removes any restriction that the take-off vector for the
loft has to be determined by the cross product of the coedge tangent
vector and the surface normal scaled by the tangent factor.) The default
is #f.

postprocess_stitch (Boolean) Stitches the resulting lofting body to the original bodies from
which its coedge definition came. This option only works with
api_loft_coedges (lofting) and not with any skinning operation
(api_skin_wires). It is identical in nature to the stitching operation
performed in api_loft_faces. The default is #t.

self_int_test (Integer) Checks for self-intersecting skin surfaces. Commonly,

self-intersecting skin surfaces can be made based on poor tangent
factor magnitudes, poor profiles, or an incorrect use of the
perpendicular option.
If set to 0, then the check does not occur and a body is built; however,
modeling problems might appear later. If set to 2, then the check is
performed but a warning message is displayed. The default is 1.

Sentaurus™ Structure Editor User Guide 840

V-2024.03
Appendix A: Commands
solid?

solid?
This Scheme extension determines whether a Scheme object is a solid.

Syntax
(solid? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

solid:area
This Scheme extension returns the surface area of a solid as a pair of values: the total face
area of the body and the relative accuracy (absolute accuracy/area) achieved in the
computation.
Cases that are treated analytically (tolerance is 0) are planes with straight or elliptical edges,
cones with straight edges, circular cylinders with elliptical edges, and special cases of
latitudinal and longitudinal edges on spheres.

Syntax
(solid:area solid-body [tolerance=0.01])

Returns
REAL LIST

Arguments

Argument Description

solid-body Specifies a solid body. If the solid body entity has not been explicitly defined,
then the argument should be (entity # [#]), where the first # is its entity
number and the second # is its part number. Argument type: BODY

tolerance Optional. Specifies the tolerance, that is, the accuracy of the calculation.
Argument type: REAL

Sentaurus™ Structure Editor User Guide 841

V-2024.03
Appendix A: Commands
solid:massprop

solid:massprop
This Scheme extension analyzes the mass properties of a solid.

Syntax
(solid:massprop entity [compute-type])

Returns
LIST

Arguments

Argument Description

entity Specifies a solid body to compute the mass properties. Argument type: BODY

compute-type Optional. Specifies the type of calculation to perform. Valid options are:
• 0: Volume and tolerance only
• 1: Volume, tolerance, center of mass, principal moments, and principal axes
• 2: Volume, center of mass, principal moments, principal axes, and inertial
tensor
Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 842

V-2024.03
Appendix A: Commands
sort

sort
This Scheme extension sorts a supplied list based on the sort criteria.

Syntax
(sort sort-criteria sort-list)

Returns
REAL

Arguments

Argument Description

sort-criteria Specifies the criteria with which to sort the supplied list.
The criteria can be <, <=, >, >= ...
Argument type: STRING

sort-list Specifies a list. Argument type: LIST

Errors
List

Examples
(sort < (list 1 2 3 4 9 8 7 6))

Sentaurus™ Structure Editor User Guide 843

V-2024.03
Appendix A: Commands
string:head

string:head
This Scheme extension returns a substring of the input string.
The returned string starts at the first character of the input string and contains snum number
of characters. If snum is larger than the string length, an empty string is returned.

Syntax
(string:head string snum)

Returns
STRING

Arguments

Argument Description

string Specifies an input string. Argument type: STRING

snum Specifies the number of characters to be returned. If snum is larger than the
string length, then an empty string is returned. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 844

V-2024.03
Appendix A: Commands
string:tail

string:tail
This Scheme extension returns a substring of the input string.
The returned string starts at the snum-th character of the input string and contains string
until the last character. If snum is larger than the string length, an empty string is returned.

Syntax
(string:tail string snum)

Returns
STRING

Arguments

Argument Description

string Specifies an input string. Argument type: STRING

snum Specifies the number of characters to be returned. If snum is larger than the
string length, then an empty string is returned. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 845

V-2024.03
Appendix A: Commands
sweep:law

sweep:law
This Scheme function creates a surface or solid by sweeping a profile along a path. The path
can be defined as a path, a distance, a vector, or an axis (position and vector).
This Scheme function is complex. In some cases, the provided input defines topologically
correct output. However, it can cause self-intersections, in which case, the function fails.
See sweep:options on page 848.

Syntax
(sweep:law profile {path | distance | vector | axis} [sweep-options])

Returns
ENTITY

Arguments

Argument Description

profile Specifies a profile. It is a pointer to a wire body, a face, or an edge that, in turn,
defines the sweep geometry and becomes the base of the solid or the edge of
the surface. A planar sheet body containing nonadjacent faces is also
permissible. Argument type: WIRE BODY | FACE | EDGE

path Specifies wire body or an edge along which the profile is swept. It can be
defined as a distance if profile is a planar face. It can be defined as a vector
if "rail_law" is used (no twist). It can be defined as an axis (defined as a
position and vector) if "rail_law" is used (no twist).
Argument type: WIRE BODY | EDGE

distance Defines the distance to sweep along the face normal. Argument type: REAL

vector Defines the direction and distance to sweep. Argument type: GVECTOR

axis Specifies is a position and vector that defines the axis to revolve around. The
amount to revolve is controlled by the "sweep_angle" option.
Argument type: POSITION | GVECTOR

sweep-options Optional. This argument contains the Sweep_Options data structure. This data
structure is created by sweep:options. If sweep-options is not specified, then
the default sweep option values are used.
Argument type: SWEEP OPTIONS

Sentaurus™ Structure Editor User Guide 846

V-2024.03
Appendix A: Commands
sweep:law

Examples
Sweeping an Edge Along a Vector
(sde:clear)
(define edge1 (wire-body (edge:linear (position 10 0 0)
(position 10 10 0))))
(define sweep1 (sweep:law edge1 (gvector 10 0 0)))

Sweeping a Face Along a Distance

(sde:clear)
(define face2 (face:plane (position 0 20 0) 10 10 (gvector 0 0 1)))
(define sweep2 (sweep:law face2 5))

Revolving a Face
(sde:clear)
; Create a solid block.
(define block1 (solid:block (position -10 -10 0) (position 25 25 25)))
; Separate faces from block1.
(define entities (entity:faces block1))
; Extract a single planar face.
(define face1 (car (cdr (cdr entities))))
; Verify transform applied.
(define fix (entity:fix-transform block1))
; Define extent of sweep.
(define opts (sweep:options "sweep_angle" 60))
; Revolve the planar face by a gvector around a position.
(define sweep3 (sweep:law face1 (position -10 -10 -10)
(gvector 1 0 0) opts))

Revolving a Wire
(sde:clear)
; Create 4 linear edges.
(define edge1 (edge:linear (position 0 0 0) (position 20 0 0)))
(define edge2 (edge:linear (position 20 0 0) (position 20 20 0)))
(define edge3 (edge:linear (position 20 20 0) (position 0 20 0)))
(define edge4 (edge:linear (position 0 20 0) (position 0 0 0)))
; Create a wire body from the 4 edges.
(define wirebody (wire-body (list edge1 edge2 edge3 edge4)))
; Create a solid by revolving the wire body.
(define sweep4 (sweep:law wirebody (position 0 0 0) (gvector 0 1 0)
sweep:options "sweep_angle" 60)))

Sweeping a Planar Face

(sde:clear)
; Create a solid block.
(define block1 (solid:block (position -10 -10 -10)
(position 30 30 30)))
; Get a list of the faces of the solid block.
(define faces (entity:faces block1))

Sentaurus™ Structure Editor User Guide 847

V-2024.03
Appendix A: Commands
sweep:options

; Select a single face to sweep.

(define face (car (cdr (cdr faces))))
; Create a new solid by sweeping the face along a gvector.
(define sweep5 (sweep:law face (gvector 0 -5 0)
(sweep:options "draft_angle" -45)))

sweep:options
This Scheme function sets the options for sdegeo:sweep. It defines elements in the
sweep-options data structure that are used later for the sdegeo:sweep operation. See
sdegeo:sweep on page 708.
Multiple pairs of sweep-option-name and value can be specified simultaneously. For
example:
(sweep:options "draft_angle" 5 "solid" #f)

Syntax
(sweep:options sweep-option-name {value | location direction})

Returns
sweep-options

Arguments

Argument Description

sweep-option-name Specifies an option. The following sweep options can be used:

• "draft_angle"
• "gap_type"
• "miter"
• "rigid"
• "sweep_angle"
The option "draft_angle" is a real number that represents the angle with
which the swept profile is to draft while sweeping. Drafting has two mutually
exclusive options: "draft_angle" and "draft_law". The default for
"draft_angle" is 0.
One application of drafting is for molded items. As the profile is swept, the
ending profile has been offset by an equal distance, which helps with the
removal of the item from a mold. Extreme draft angles or draft laws can
result in errors due to self-intersecting bodies, incomplete lateral faces
(likely at corners), or unsupported topologies.
Argument type: STRING

Sentaurus™ Structure Editor User Guide 848

V-2024.03
Appendix A: Commands
sweep:options

Argument Description

value Specifies a value for the named option.

If value is a real, it does not require delimiters.
If value is a string representing a law, it should be enclosed in double
quotation marks.
If value is a law, only the variable name for the law is required.
Argument type: STRING | law | REAL | GVECTOR | ENTITY | BOOLEAN
| INTEGER

location Specifies a location. Argument type: POSITION

direction Specifies a direction. Argument type: GVECTOR

Examples
(define plist1 (list (position 0 0 0) (position 20 0 0)
(position 20 20 0) (position 20 20 20)))
(define start1 (gvector 1 0 0))
(define end1 (gvector 0 0 10))
(define path1 (edge:spline plist1 start1 end1))
(render:rebuild)
(define edgelist1 (list
(edge:linear (position 0 3 3) (position 0 3 -3))
(edge:linear (position 0 3 -3) (position 0 -3 -3))
(edge:linear (position 0 -3 -3) (position 0 -3 3))
(edge:linear (position 0 -3 3) (position 0 3 3))))
(define profile1 (wire-body edgelist1))
(define sweep1 (sweep:law profile1 path1))

Sentaurus™ Structure Editor User Guide 849

V-2024.03
Appendix A: Commands
system:command

system:command
This Scheme function executes a system command from the Scheme command-line
window. The command results are displayed in the UNIX window. If you use the
system:command Scheme function, then the return value must be processed correctly;
otherwise, Sentaurus Workbench cannot find possible errors. For details, see Error
Signaling to Sentaurus Workbench on page 321.

Syntax
(system:command cmd)

Returns
None

Arguments

Argument Description

cmd Specifies a system command. Argument type: STRING

system:getenv
This Scheme function returns the value of an environment variable.

Syntax
(system:getenv name-string)

Returns
Value of the environment variable if it is found; otherwise, it returns #f

Arguments

Argument Description

name-string Specifies a name of an environment variable. Argument type: STRING

Sentaurus™ Structure Editor User Guide 850

V-2024.03
Appendix A: Commands
timer:end

timer:end
This Scheme command stops the timer.
The commands timer:start, timer:end, timer:show-time, and timer:get-time are
used to measure the performance of a command or a series of commands. They measure
only the CPU time required to execute the command and not any delays incurred from
entering the commands into Scheme.

Syntax
(timer:end)

Returns
STRING

timer:get-time
This Scheme command calculates and returns the amount of time elapsed since
timer:start was executed.

The commands timer:start, timer:end, timer:show-time, and timer:get-time are

used to measure the performance of a command or a series of commands. They measure
only the CPU time required to execute the command and not any delays incurred from
entering the commands into Scheme. They are used most often to determine the time
required to execute one or more commands.
The command timer:get-time can be executed or interspersed any number of times
throughout a command or a series of commands. You also can use timer:show-time to
display the amount of time elapsed since timer:start was executed.

Syntax
(timer:get-time)

Returns
REAL

Sentaurus™ Structure Editor User Guide 851

V-2024.03
Appendix A: Commands
timer:show-time

timer:show-time
This Scheme command calculates and returns the amount of time elapsed since
timer:start was executed.

The commands timer:start, timer:end, timer:show-time, and timer:get-time are

used to measure the performance of a command or a series of commands. They measure
only the CPU time required to execute the command and not any delays incurred from
entering the commands into Scheme, or any other interference or condition.
The command timer:show-time can be executed or interspersed any number of times
throughout a command or a series of commands. It returns a real number only after
timer:start is executed. If timer:start has not been executed, timer:show-time
returns zero (0). You also can use timer:get-time to display the amount of time elapsed
since timer:start was executed.

Syntax
(timer:show-time)

Returns
REAL

timer:start
This Scheme command starts an internal clock or timer.
The commands timer:start, timer:end, timer:show-time, and timer:get-time are
used to measure the performance of a command or a series of commands. They measure
only the CPU time required to execute the command and not any delays incurred from
entering the commands into Scheme.

Syntax
(timer:start)

Returns
STRING

Sentaurus™ Structure Editor User Guide 852

V-2024.03
Appendix A: Commands
transform:reflection

transform:reflection
This Scheme function creates a transform to mirror an object through an axis. It is used to
define a reflection transform, which can be used in sdegeo:mirror-selected.

Syntax
(transform:reflection plane-position plane-direction)

Returns
transform

Arguments

Argument Description

plane-position Specifies the location to mirror an object. Argument type: POSITION

plane-direction Specifies the normal of the mirror in the plane. Argument type: GVECTOR

Examples
(sde:clear)
(define mb (sdegeo:create-rectangle (position 1 1 0) (position 2 2 0)
"Silicon" "xx"))
(define tr1 (transform:reflection (position 0 0 0) (gvector -1 0 0)))
(set! tr1 (transform:reflection (position 0 0 0) (gvector 0 1 0)))
(sdegeo:mirror-selected (get-body-list) tr1 #t)

Sentaurus™ Structure Editor User Guide 853

V-2024.03
Appendix A: Commands
transform:rotation

transform:rotation
This Scheme function creates a transform to rotate an object about an axis. It defines a
rotation transform, which can be used in sdegeo:rotate-selected.

Syntax
(transform:rotation origin-position axis-direction angle)

Returns
transform

Arguments

Argument Description

origin-position Specifies the start location of the rotation. Argument type: POSITION

axis-direction Specifies the axis direction of rotation. Argument type: GVECTOR

angle Specifies the angle in degrees to rotate the object. Argument type: REAL

Examples
(sde:clear)
(sdegeo:create-circle (position 0 0 0) 0.1 "PolySilicon" "xx")
(define mb (sdegeo:create-rectangle (position 1 1 0) (position 2 2 0)
"Silicon" "xx"))
(define tr1 (transform:rotation (position 0 0 0) (gvector 0 0 1) 45))
(sdegeo:rotate-selected mb tr1 #t 7)

Sentaurus™ Structure Editor User Guide 854

V-2024.03
Appendix A: Commands
transform:scaling

transform:scaling
This Scheme function defines a scaling transform, which can be used in
sdegeo:scale-selected.

Although the Scheme function accepts a scaling factor (x-scale, y-scale, or z-scale) 0
or less, only a positive scale factor is recommended. When uniform scaling is used, only the
x-scale term can be supplied.

In this case, all three components of the gvector are multiplied by the same x-scale factor.

Syntax
(transform:scaling x-scale [y-scale z-scale])

Returns
transform

Arguments

Argument Description

x-scale Specifies the scaling factor for the x-axis direction. Argument type: REAL

y-scale Optional. Specifies the scaling factor for the y-axis direction.
Argument type: REAL

z-scale Optional. Specifies the scaling factor for the z-axis direction.
Argument type: REAL

Examples
(sde:clear)
(define mb (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "xx"))
(define tr1 (transform:scaling 1.0 2.0 1.0))
(sdegeo:scale-selected mb tr1)

Sentaurus™ Structure Editor User Guide 855

V-2024.03
Appendix A: Commands
transform:translation

transform:translation
This Scheme function is used to define a translation transform, which can be used in
sdegeo:translate-selected.

Syntax
(transform:translation gvector)

Returns
transform

Arguments

Argument Description

gvector Argument type: GVECTOR

Examples
(sde:clear)
(define mb (sdegeo:create-rectangle (position 0 0 0) (position 1 1 0)
"Silicon" "xx"))
(define tr1 (transform:translation (gvector 3.0 0.0 0.0)))
(sdegeo:translate-selected mb tr1 #t 5)

Sentaurus™ Structure Editor User Guide 856

V-2024.03
Appendix A: Commands
util:make-bot-contact

util:make-bot-contact
This Scheme extension assigns a contact to the bottom of a 2D or 3D device. In two
dimensions, the bottom edges of the device are defined as contacts. In three dimensions,
the bottom faces of the device are defined as contacts.

Syntax
(util:make-bot-contact contact-name [contact-argument])

Returns
None

Arguments

Argument Description

contact-name Specifies the name of a contact. If the given contact is not yet defined, then
util:make-bot-contact will define the contact. Argument type: STRING

contact-argument Optional. Specifies either a color (color name or RGB color) in two
dimensions or a face pattern string ("solid" "##" "||" "==" "//" "\\"
"::" "<><>" "[] []") in three dimensions.
Argument type: INTEGER | RGB COLOR (2D) or STRING (3D)

Examples
Example: Two Dimensions
(sde:clear)
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "x1")
(sdegeo:create-rectangle (position 3 10 0) (position 7 14 0)
"PolySilicon" "x2")
(sdegeo:insert-vertex (position 1 0 0))
(sdegeo:insert-vertex (position 5 0 0))
(sdegeo:insert-vertex (position 9 0 0))
(sdegeo:insert-vertex (position 4 14 0))
(sdegeo:insert-vertex (position 5 14 0))
(sdegeo:insert-vertex (position 6 14 0))

(util:make-bot-contact "c1" GREEN)

(util:make-top-contact "c2" BLUE)

Example: Three Dimensions

(sde:clear)
(sde:set-process-up-direction "+z")
(sdegeo:create-rectangle (position 0 0 0) (position 10 10 0)
"Silicon" "x1")

Sentaurus™ Structure Editor User Guide 857

V-2024.03
Appendix A: Commands
util:make-top-contact

(sdegeo:create-rectangle (position 3 10 0) (position 7 14 0)

"PolySilicon" "x2")
(sdegeo:insert-vertex (position 1 0 0))
(sdegeo:insert-vertex (position 5 0 0))
(sdegeo:insert-vertex (position 9 0 0))
(sdegeo:insert-vertex (position 4 14 0))
(sdegeo:insert-vertex (position 5 14 0))
(sdegeo:insert-vertex (position 6 14 0))
(entity:rotate (get-body-list) 0 0 0 1 0 0 90)
(sdegeo:extrude (get-body-list) 5)

(util:make-bot-contact "c1" "##")

(util:make-top-contact "c2" "//")

util:make-top-contact
This Scheme extension assigns a contact to the top of a 2D or 3D device. In two dimensions,
the top edges of the device are defined as contacts. In three dimensions, the top faces of the
device are defined as contacts.

Syntax
(util:make-top-contact contact-name [contact-argument])

Returns
None

Arguments

Argument Description

contact-name Specifies the name of a contact. If the given contact is not yet defined, then
util:make-top-contact will define the contact. Argument type: STRING

contact-argument Optional. Specifies either a color (color name or RGB color) in two
dimensions or a face pattern string ("solid" "##" "||" "==" "//" "\\"
"::" "<><>" "[] []") in three dimensions.
Argument type: INTEGER | RGB COLOR (2D) or STRING (3D)

Examples
See examples of util:make-bot-contact on page 857.

Sentaurus™ Structure Editor User Guide 858

V-2024.03
Appendix A: Commands
vertex?

vertex?
This Scheme function determines whether a Scheme object is a vertex.

Syntax
(vertex? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

view:set-point-size
This Scheme function sets the size of the rendered vertices in the main window of the GUI.

Syntax
(view:set-point-size vertex-size)

Returns
None

Arguments

Argument Description

vertex-size Specifies the vertex size. The default is 10, and 0 switches off the vertex
rendering and removes the vertex markings. Argument type: INTEGER

Sentaurus™ Structure Editor User Guide 859

V-2024.03
Appendix A: Commands
wire?

wire?
This Scheme function determines whether a Scheme object is a wire.

Syntax
(wire? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

wire-body?
This Scheme function determines whether a Scheme object is a wire body.

Syntax
(wire-body? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 860

V-2024.03
Appendix A: Commands
wire:planar?

wire:planar?
This Scheme function determines whether a Scheme object is a planar wire.

Syntax
(wire:planar? object)

Returns
BOOLEAN

Arguments

Argument Description

object Specifies the Scheme object to be queried. Argument type: SCHEME OBJECT

Sentaurus™ Structure Editor User Guide 861

V-2024.03
B
B Error Handling

This appendix presents the procedures to handle errors encountered with geometry
creations. It introduces the essential workflow for error handling and presents a variety of
functions that help find and solve these geometric issues.

Workflow
For Sentaurus Structure Editor, the most important feature is solid modeling. But when
handling complex geometry modeling, it is possible to have issues such as unknown
warning messages, misleading guidance, and even crashes. The reason for these issues is
that the general geometric algorithm is like a black box for many users. Finding the source
of the failures is difficult when dealing with complex geometry modeling. To solve the issues,
a general error handling workflow is introduced, which helps you get an analysis-suitable
geometry in a fast and efficient way.
The basic procedure of the error handling of the geometry modeling workflow is to generate
the geometry based on user-specified parameters, 2D geometries, and other options as
inputs for the 3D geometry operations. If the geometry operation succeeds, the final
geometry is output. However, if it fails, the failed procedure almost provides bare hints or
guidance in most cases, which are relatively not user friendly. As shown in Figure 134 on
page 863, appropriate guidance is shown when verbosity is turned on. A summary of the
internal procedures and functions is output as a warning or error message.
In the section Functions on page 863, important functions such as enabling verbosity,
warning and error message handing, geometry entity hide and show, and entity quality
check are discussed. In the section Examples on page 872, geometry modeling examples
such as handling skinning and sweeping are illustrated.

Sentaurus™ Structure Editor User Guide 862

V-2024.03
Appendix B: Error Handling
Functions

Figure 134 Error handling workflow

Functions

Enable Verbosity
By default, verbosity is not enabled and the variable value is 0. And when the verbosity is
set larger than 0, necessary detailed guidance is output. Two functions are available to set
the verbosity level and check the verbosity level.

Set Verbosity Level

The corresponding Scheme command is (sde:set-verbosity level), where the level is
a non-negative integer.
• Set the global verbosity level.
;Example
(sde:set-verbosity 1)
;Result
#t

Check Verbosity
The corresponding Scheme command is (sde:get-verbosity) and an integer is returned
in the console.
• Get the global verbosity level.

Sentaurus™ Structure Editor User Guide 863

V-2024.03
Appendix B: Error Handling
Functions

;Example
(sde:get-verbosity)
;Result
0; Or any positive number defined by the user

Output Message
For message handling, different users might have different needs. The following
subsections summarize the available message functions.

Output in SSE Console

The corresponding Scheme command is (sde:display message), and the message is a
string and is output in the SSE console. This is purely a display message function and not
going to break any function.
• Display the message in the SSE console.
;Example
(sde:display (format #f " Edge (~a) has a geometric problem.\n" message))
; Result output in SDE console
Edge (#[body 5 1]) has a geometric problem.

Output in SSE Console and Break Function

The corresponding Scheme command is (sde:error message) or (sde:warning
message), and the message is a string and is output in the SSE console. If this function is
included in a geometric operation, the operation is broken when calling the function.
• Output the error/warning message in the SSE console and break function execution.
; Example
(sde:error (format #f " Edge (~a) has a geometric problem.\n" message))
; Result output in SDE console
*** Error sde:error: Edge (#[body 5 1]) has a geometric problem.

Output in Terminal Console

The corresponding Scheme command is (sde:display-err message),
(sde:display-std message), or (sde:warning-2 message), and the message is a string
and is output in the regular terminal console. This is purely a display message function and
not going to break any function.
• Output the message in the regular terminal console and not break function execution.
; Example
(sde:display-err (format #f " Edge (~a) has a geometric problem.\n"
message))
; Result output in regular terminal console
Edge (#[body 5 1]) has a geometric problem.

Sentaurus™ Structure Editor User Guide 864

V-2024.03
Appendix B: Error Handling
Functions

Output in Terminal Console and SSE Console

The corresponding Scheme command is (sde:display-warning message), and the
message is a string and is output in the regular terminal console and the SSE console. This
is purely a display message function and not going to break any function.
• Output the message in the SDE console and the regular terminal console and not break
function execution.
; Example
(sde:display-warning (format #f " Edge (~a) has a geometric problem."
message))
; Result output in the SDE console if in the gui mode
; Result output in the regular terminal console if not in the gui mode
Edge (#[body 5 1]) has a geometric problem.

Display and Highlight

For identifying geometric issues, proper functions to display or highlight selected geometry
entities are necessary.

Show Entity
Show the input entity. The corresponding Scheme command is (sde:show entityId),
where entityId is the entity id.
(sde:show entityId)

Hide Entity
Hide the input entity. The corresponding Scheme command is (sde:hide entityId),
where entityId is the entity id.
(sde:hide entityId)

Highlight Entity
Highlight the input entity. The corresponding Scheme command is (view:highlight
entityId), where entityId is the entity id.
(view:highlight entityId)

Disable Highlight Entity

Disable the highlighted entity. The corresponding Scheme command is
(view:disable-highlight entityId), where entityId is the entity id.
(view:disable-highlight entityId)

Sentaurus™ Structure Editor User Guide 865

V-2024.03
Appendix B: Error Handling
Functions

Highlight Vertices
Highlight vertices of the input entity. The corresponding Scheme command is
(view:highlight-vertices entityId), where entityId is the entity id.
(view:highlight-vertices entityId)

Disable Highlight Vertices

Disable highlight vertices of the input entity. The corresponding Scheme command is
(view:disable-highlight-vertices entityId), where entityId is the entity id.
(view:disable-highlight-vertices entityId)

Check Quality
For geometry modeling, even if a geometry is created in SSE, it might still have some
geometry issues. There are mainly two things to be checked. One is to make sure whether
the geometry is having a problem. The other is to check the location of the geometry, if there
is a problem.

Check Entity
A quick way to check the geometry is important to make sure whether further investigation
is needed. The corresponding Scheme command is (sdegeo:check-geometry entityId
[option]), where entityId is the entity id, option is a bool variable (which is false by
default) to print the error message. Here are two examples to show how to use this
command.
Check Polygon
• Here is a polyline wire which has two self-intersections, as shown in Figure 135 on
page 867.
; Build polygon
(define self_intersected_wire
(sdegeo:create-polyline-wire (list (position 0 3 0) (position 1 3 0)
(position -2 1 0) (position 3 2 0) (position 4 3 0)
(position 5 3 0) (position 5 0 0) (position 0 0 0) (position 0 3 0))))

Sentaurus™ Structure Editor User Guide 866

V-2024.03
Appendix B: Error Handling
Functions

Figure 135 Polygons created by the function sdego:create-polyline-wire

• Check with printing error message option is false.

; Example
(sdegeo:check-geometry self_intersected_wire #f)

; Result
#f ; or #t if passed)

• Check with printing error message option is true.

; Example
(sdegeo:check-geometry self_intersected_wire #t)

; Error message is printed

entid 18209600 param: 1.2018504251546633
entid 18232064 param: 2.3333333333333330
entid 18209600 & 18232064: Error: improper edge intersection
entid 18226512 param: 2.0396078054371141
entid 18232064 param: 1.4000000000000001
entid 18226512 & 18232064: Error: improper edge intersection

; Result
#f

Check Surface
• Here is a surface which has self-intersections, as shown in Figure 136 on page 868.

Sentaurus™ Structure Editor User Guide 867

V-2024.03
Appendix B: Error Handling
Functions

(sde:clear)
(define index 0)
(define PolWires (list))

(define MakeWires
(lambda (Xl Xr Yo)
(define PWname (string-append "PolWire_" (number->string index)))
(define PWname (sdegeo:create-polyline-wire (list
(position Xl Yo 0.1)
(position Xr Yo 0.1)
(position (- Xr 0.1) Yo 0.5)
(position (+ Xl 0.1) Yo 0.5)
(position Xl Yo 0.1))))
(set! index (+ index 1))
(set! PolWires (append PolWires (list PWname)))
)
)
(MakeWires -0.20 0.20 0.0)
(MakeWires -0.23 0.18 0.2)
(MakeWires -0.19 0.22 0.4)

(define new-PolWires (list (car PolWires) (caddr PolWires) (cadr

PolWires)))
(define new-POL (sdegeo:skin-wires new-PolWires))

Figure 136 Skinning surface created by the function sdegeo:skin-wires

Sentaurus™ Structure Editor User Guide 868

V-2024.03
Appendix B: Error Handling
Functions

• Check with printing error message option is false.

;Example
(sdegeo:check-geometry new-POL)
; or (sdegeo:check-geometry new-POL #f)

; Result
#f

• Check with printing error message option is true.

;Example
(sdegeo:check-geometry new-POL #t)

; Error message is printed

entid 13569360 param: 0.0435858117228911
entid 18463456 param: 0.1671771615497390
entid 13569360 & 18463456: Error: improper edge intersection
entid 18463280 param: 0.1671771615497390
entid 18442592 param: 0.1664141882771090
entid 18463280 & 18442592: Error: improper edge intersection
entid 18463280 param: 0.1671771615497390
entid 18442592 param: 0.1664141882771090
entid 18463280 & 18442592: Error: improper edge intersection

; Result
#f

Find Geometric Issue

After finding that the geometry has an issue, a good way to find the problematic area is also
important. The corresponding Scheme command is (sdegeo:find-geometric-issues
entityId), where entityId is the entity id. Here are two examples to show how to use this
command.
Preview the self-intersection points of a wire body. See Figure 137 on page 870.

Sentaurus™ Structure Editor User Guide 869

V-2024.03
Appendix B: Error Handling
Functions

Figure 137 Preview intersection points using function sdegeo:find-geometric-issues

; Example
(define path-curve (wire-body
(list
(edge:linear (position 0 6 0) (position 6 6 6))
(edge:linear (position 6 6 6) (position 12 6 6))
(edge:linear (position 12 6 6) (position 6 6 2))
(edge:linear (position 6 6 2) (position 3 6 5))
(edge:linear (position 3 6 5) (position 0 6 5) )
)))
; Results will be highlighted in the screen
(define inter_pts (sdegeo:find-geometric-issues path-curve))

; Hide the highlighted points if needs

(view:disable-highlight inter_pts)

; Delete the intersection points which is unneeded

(entity:delete inter_pts)

Preview the self-intersection points of a skinning body. See Figure 138 on page 871.

Sentaurus™ Structure Editor User Guide 870

V-2024.03
Appendix B: Error Handling
Functions

Figure 138 Preview intersection points using function sdego:find-geometric-issues

; Results will be highlighted in the screen

(define inter_body (sdegeo:find-geometric-issues mb))

; Hide the highlighted points if needs

(view:disable-highlight inter_body)

; Delete the intersection points which is unneeded

(entity:delete inter_body)

Filter Useful Polygons

If you want to skip the problematic polygons, use this new function to filter out polygons with
geometric problems and return the list of useful polygons. The corresponding Scheme
command is (sdegeo:filter-useful-polygons polygonList), where polygonList is a
list of polygons.
If verbosity is set to 0, it does not show any error messages.
; Example
(sdegeo:filter-useful-polygons polygonList)
; Result: A list of useful polygons
(#[body 6 1] ...)

If verbosity is set to 1, it shows the problematic entity numbers in the list. See Figure 139 on
page 872.

Sentaurus™ Structure Editor User Guide 871

V-2024.03
Appendix B: Error Handling
Examples

Figure 139 Verbosity = 1 for function sdegeo:filter-useful-polygons

If verbosity is set to 2, it shows all the details of the error messages. See Figure 140 on
page 872.

Figure 140 Verbosity = 2 for function sdegeo:filter-useful-polygons

Examples

Skinning

sdegeo:skin-wires With Problematic poly-line Wires

Skinning is one of the most used surfacing algorithms when building 3D geometry. Here is a
case to show how to use the previous functions finding the geometric issue in skinning
operation.
First, you build a test case for testing which is shown in Figure 141 on page 873. There are
three polygons in this group, and one of them has self-intersections. If you run the example
script below, it shows only one error message and no geometry is created because the
default verbosity level is 0. If there are more than 100 polygons, it is very frustrating to find
the problematic polygon to build a skinning object.

Sentaurus™ Structure Editor User Guide 872

V-2024.03
Appendix B: Error Handling
Examples

Figure 141 Polygons used for the skinning operation

; Example
(sde:clear)
(define self_intersected_wire
(sdegeo:create-polyline-wire (list (position 0 3 0) (position 1 3 0)
(position -2 1 0) (position 3 2 0) (position 4 3 0)
(position 5 3 0) (position 5 0 0) (position 0 0 0) (position 0 3 0))))

(define self_intersected_wire2
(sdegeo:create-polyline-wire (list (position 0 3 1) (position 1 3 1)
(position 2 1 1) (position 3 2 1) (position 4 3 1)
(position 5 3 1) (position 5 0 1) (position 0 0 1) (position 0 3 1))))

(define self_intersected_wire3
(sdegeo:create-polyline-wire (list (position 0 3 2) (position 1 3 2)
(position 2 1 2) (position 3 2 2) (position 4 3 2)
(position 5 3 2) (position 5 0 2) (position 0 0 2) (position 0 3 2))))

(define polygon_list (list self_intersected_wire self_intersected_wire2

self_intersected_wire3))

(sdegeo:skin-wires polygon_list)

; Result:
The skinning failed and call (sde:set-verbosity 1) to check the details.

*** Error sdegeo:skin-wires: Intersecting profiles were detected.

Second, after increasing the verbosity level to level 1, it shows the error messages and
provide some guidance. You can later either find the geometric issue or filter the useful
polygons for skinning operation.

Sentaurus™ Structure Editor User Guide 873

V-2024.03
Appendix B: Error Handling
Examples

; Example
(sde:set-verbosity 1)
(sdegeo:skin-wires polygon_list)
; Result:
Skinning operation is printed since the verbosity is 1.
Face to wire is done.
Edge type check is done.
Wire check is done.
Skin options setting is done .
Internal geometry creation function is called.
Please check the input polygon quality (sdegeo:find-geometric-issues wire)
or filter out the problematic polygons (sdegeo:filter-useful-polygons
polygon_list).
The geometry creation failed.
*** Error sdegeo:skin-wires: Intersecting profiles were detected.

Third, if the filter function is used, it shows the running history and generate a partial
geometry. The error message is printed out from the function
sdegeo:filter-useful-polygons. See Figure 142 on page 874.
; Example
(sde:set-verbosity 1)
(define new_polygon_list (sdegeo:filter-useful-polygons polygon_list))
(define skin_body (sdegeo:skin-wires new_polygon_list))

; Error message is printed out

Skinning operation is printed since the verbosity is 1.
Face to wire is done.
Edge type check is done.
Wire check is done.
Skin options setting is done.
Internal geometry creation function is called.
Use the sdegeo:find-geometric-issues or sdegeo:check-geometry to check this
new entity if needed
Entity is successfully created.
skin_body

; Result :
skin_body

Figure 142 Verbosity = 1 for function sdegeo:filter-useful-polygons and sdegeo:skin-wires

Sentaurus™ Structure Editor User Guide 874

V-2024.03
Appendix B: Error Handling
Examples

Sweeping
The sweeping function is also a very important modeling technique in geometry creation.
But a successful geometry creation for this method is not very easy or stable in many
scenarios. Even for a small use case, it is not a trivial job. For the sweeping operation to be
successful, both the input profile and path should be proper inputs. Especially, the input path
should not have a self-intersection. But sometimes, even if the input profile and input path
are good, the final sweeping algorithm still fails. There are many potential reasons, but the
main outcome could be the surface intersections for the final sweeping solid. A typical
requirement is to identify potential solutions for these geometric issues, particularly to find
possible intersection locations to help fix the geometry. In this section, two examples are
provided to explain a feasible practice to solve the sweeping issues.

Example With a Problematic poly-line Wire

The first example is using a rectangle to sweep through a path curve. The path curve has a
self-intersected point, which is shown in Figure 137 on page 870. After sdegeo:sweep is
called, the sweeping object has a self-intersection in the middle, too, which is shown in
Figure 143 on page 877. The intersection points are highlighted by the function
sdegeo:find-geometric-issues. Once the geometric issue is found, there are two ways
to solve the issue: One is to correct the input path which should not have the
self-intersection. The second is to repair the geometry if it is required to keep the
intersection. We propose sdegeo:repair-solid-self-intersection to fix this sweep
geometry. If it fixes successfully, it passes the function sdegeo:check-geometry. And
finally, these intersection points need to be deleted after all the checks.

Sentaurus™ Structure Editor User Guide 875

V-2024.03
Appendix B: Error Handling
Examples

; Example
(sde:clear)
(sdesnmesh:iocontrols "EnableOffset" #f)
(set! bndprecision 12)
(sdedr:set-cmdprecision 14)

(define path-curve (wire-body

(list
(edge:linear (position 0 6 0) (position 6 6 6))
(edge:linear (position 6 6 6) (position 12 6 6))
(edge:linear (position 12 6 6) (position 6 6 2))
(edge:linear (position 6 6 2) (position 3 6 5))
(edge:linear (position 3 6 5) (position 0 6 5) )
)))

(define rect (sdegeo:create-rectangle

(position 0 0 0) (position 1 -1 0) "Silicon" "region_1" ))

; sweep body
(define mb (car (sdegeo:sweep rect path-curve)))

; Highlight the intersection points for the sweeping object

(define int_body (sdegeo:find-geometric-issues mb))

; Find the intersection point of the path curve

(define int_points (sdegeo:find-geometric-issues path-curve))

; Repair geometry
(sdegeo:repair-solid-self-intersection mb)

; Check geometry
(sdegeo:check-geometry mb)

; Delete intersection points

(entity:delete int_points)
(entity:delete int_body)

Sentaurus™ Structure Editor User Guide 876

V-2024.03
Appendix B: Error Handling
Examples

Figure 143 sdegeo:find-geometric-issues is used to highlight the intersection points

Figure 144 sdegeo:repair-solid-self-intersection is used to get a non-manifold solid

Sentaurus™ Structure Editor User Guide 877

V-2024.03
Appendix B: Error Handling
Examples

Example With a Problematic Sweeping Result

The second case is possibly more common. The profile and the path are both correct inputs.
But there is no sweeping result after calling the sdegeo:sweep function. Only an error
message is shown in the console. The internal function calls the self-intersection check by
default during the geometry creation, so when an error is reported, it deletes the problematic
entity in the end. This self-intersection check can be disabled if a customized sweep option
(sweep:options "self_int_test" 0) is appended in the sdegeo:sweep function. But not
all customers know this option, so they would be confused to find their sweeping geometric
issue. Plus even if you disable the option, it does not show where the potential issue is. The
proposal is to add some guidance during the sweeping.
First, create a polygon and square for the sweeping, as shown in Figure 145 on page 878.
If you encounter failure during sweeping, it gives a suggestion to turn the verbosity on, as
shown in the following script.

Figure 145 sdegeo:sweep function failed with guidance

Sentaurus™ Structure Editor User Guide 878

V-2024.03
Appendix B: Error Handling
Examples

; Example
(sde:clear)
(define self_intersected_wire
(sdegeo:create-polyline-wire (list (position 0 3 0) (position 1 3 0)
(position -2 1 0)
(position 3 2 0) (position 4 3 0)
(position 5 3 0) (position 5 0 0) (position 0 1 0) )))

(define rect (sdegeo:create-rectangle

(position 0 0 0) (position 0 1 -1) "Silicon" "region_1" ))

(define sweep1 (sdegeo:sweep rect self_intersected_wire))

; Result
The sweeping failed and please call (sde:set-verbosity 1) to check the
details.
*** Error sdegeo:sweep: Top and bottom profiles of sweep would intersect.

If the verbosity is set as 1, the self-intersection check is disabled and a running history is
given in the console. And it also creates a self-intersected geometry and shows further
guidance. See the Figure 146 on page 880, which suggests to use the function
sdegeo:find-geometric-issues.
; Example
(sde:set-verbosity 1)
(define sweep1 (sdegeo:sweep rect self_intersected_wire))

; Result
The profile check is done.
The profile is separated.
The sweeping procedure for body 1 is started.
The sweep type is supported.
The sweep options setting is done.
The sweeping along the path is done.
There is a new body generated by the sweeping.
The sweeping procedure for body 1 is done.
The sweeping for all bodies is done.
The self-intersection check for the sweeping method is disabled when
verbosity is on, please use the sdegeo:find-geometric-issues to find any
geometry problem.
sweep1

Sentaurus™ Structure Editor User Guide 879

V-2024.03
Appendix B: Error Handling
Examples

Figure 146 sweep function created a geometry when verbosity = 1

Then if the function sdegeo:find-geometric-issues is called, it highlights the vertices.

See Figure 147 on page 881. There are multiple red points highlighted in the graphics which
makes it easier to find the potential solution to solve this sweeping issue.
; Example
(define inter_pts (sdegeo:find-geometric-issues (car sweep1)))

Sentaurus™ Structure Editor User Guide 880

V-2024.03
Appendix B: Error Handling
Examples

Figure 147 sdegeo:sweep function with sdegeo:find-geometric-issues

One way is that you could easily check these vertices manually. If you select any vertices,
the color of the selected points is orange. And you could use the function vertex:position
to show the physical location of the selected vertex. See Figure 148 on page 882.
; Example
(vertex:position (car (ise:selected-entities)))

; Result
#[ position -2 1 0 ]

Sentaurus™ Structure Editor User Guide 881

V-2024.03
Appendix B: Error Handling
Examples

Figure 148 sdegeo:sweep function with sdegeo:find-geometric-issues

You could then either modify the vertex or remove the vertex at (-2 1 0), and then have a
proper sweeping result now. See Figure 149 on page 883.
; Example
(sde:clear)
(define self_intersected_wire
(sdegeo:create-polyline-wire (list (position 0 3 0) (position 1 3 0)
(position 3 2 0) (position 4 3 0)
(position 5 3 0) (position 5 0 0) (position 0 1 0) )))

(define rect (sdegeo:create-rectangle

(position 0 0 0) (position 0 1 -1) "Silicon" "region_1" ))

(define sweep1 (sdegeo:sweep rect self_intersected_wire))

; Result
sweep1

Sentaurus™ Structure Editor User Guide 882

V-2024.03
Appendix B: Error Handling
Examples

Figure 149 sdegeo:sweep function with correct input positions by removing (-2 1 0)

Sentaurus™ Structure Editor User Guide 883

V-2024.03
Index of Scheme Extensions

Index of Scheme Extensions

A entity:copy 360
afm-smooth-layers 107, 344 entity:debug 330, 361
entity:deep-copy 362
entity:delete 190, 362
B entity:dist 363
bbox 345
entity:edges 331, 332, 364
bbox-exact 346
entity:erase 364
body? 333, 347
entity:faces 156, 331, 365
build-csv-lens 348
entity:loops 331, 366
entity:lumps 331, 367
C entity:set-color 368
color:rgb 229, 349 entity:shells 331, 369
complete-edge-list 350 entity:vertices 331, 370
convert-to-degree 351 entity? 333
convert-to-radian 351 env:set-tolerance 371
curve:circular? 333 env:tolerance 372
curve:elliptical? 333 erf 372
curve:linear? 333 erfc 373
curve? 333 exists-empty-mask-name 168, 373
exists-mask-name 168, 374
D extract-interface-normal-offset-refwindow 244,
375
define 63
extract-interface-offset-refwindow 244, 376
extract-refpolyhedron 243, 244, 377
E extract-refpolyhedron-facets 377
edge:circular 353 extract-refwindow 243, 379
edge:circular? 333, 354
edge:curve? 333 F
edge:elliptical? 333, 354
face:area 380
edge:end 355
face:conical? 333, 381
edge:length 355
face:cylindrical? 333, 381
edge:linear 156, 356
face:planar? 334, 382
edge:linear? 333, 357
face:plane-normal 382
edge:mid-point 358
face:spherical? 334, 383
edge:spline? 333
face:spline? 334, 383
edge:start 358
face:toroidal? 334, 384
edge:type 359
face? 334
edge? 333, 352
filter:type 325
entity:box 332, 359
find-body-id 326, 385

884
Index of Scheme Extensions

find-body-id-drs 385 J
find-drs-id 386 journal:abort 411
find-edge-id 326, 387 journal:append 412
find-edge-id-drs 388 journal:clean 56, 412
find-face-id 117, 326, 332, 388 journal:load 56, 413
find-face-id-drs 389 journal:off 56, 413
find-mask 168 journal:on 56, 414
find-material-id 326, 327, 389 journal:pause 56, 415
find-region 390 journal:resume 56, 415
find-region-id 326, 327, 391 journal:save 56, 415
find-vertex-id 326, 327, 391 journal:step 56, 416
find-vertex-id-drs 392
L
G load 55
generic:get 327, 393 loop:external? 334, 417
generic:list-attributes 327, 394 loop? 334, 417
generic:set 327, 395 lump? 334, 418
get-body-list 396
get-drs-list 396
get-empty-mask-list 168, 397
M
get-mask-list 168, 397 mask-refevalwin-extract-2d 168, 419
mask-refevalwin-extract-3d 168, 420
gvector 398
member? 421
gvector:- 400
gvector:+ 399 merge-collinear-edges-2d 98, 103, 422
gvector:copy 400
gvector:cross 401 O
gvector:dot 401 option:set 277
gvector:from-to 402
gvector:length 402 P
gvector:parallel? 403
part:entities 325, 330, 423
gvector:perpendicular? 403 part:load 54, 55, 424
gvector:reverse 404
part:save 425
gvector:scale 404
part:save-selection 426
gvector:set! 405
part:set-name 427
gvector:set-x! 406 PolygonSTI 215
gvector:set-y! 407
PolygonWaferMask 215
gvector:set-z! 408
PolyHedronCylinder 216
gvector:transform 409 PolyHedronEllipticCylinder 216
gvector:unitize 409
PolyHedronEpiDiamond 218
gvector:x 410
PolyHedronSTI 218
gvector:y 410 PolyHedronSTIaccc 220
gvector:z 411
PolyHedronSTIaccv 221
gvector? 399
position 428
position:- 430

885
Index of Scheme Extensions

position:+ 430 sde:display 459

position:distance 431 sde:display-err 459
position:set! 432 sde:display-std 460
position:set-x! 433 sde:draw-ruler 462
position:set-y! 433 sde:dump-non-default-options 464
position:set-z! 434 sde:exact-coords? 464
position:x 434 sde:extract-tdr-boundary 465
position:y 435 sde:fix-imprint 465
position:z 435 sde:fix-orientation 466
position? 334, 429 sde:front-coord 466
protect-all-contacts 235, 436 sde:ft_scalar 467
sde:get-backwards-compatibility 468
R sde:get-datex-color-scheme 68, 468
random-sd 437 sde:get-default-material 329, 469
remove-body-ABA 81, 438 sde:get-view-params 60, 469
sde:gui-get-integer 339, 470
remove-body-BAB 81, 439
sde:gui-get-real 339, 471
render:rebuild 70, 277, 440
roll 57, 440 sde:gui-get-string 339, 472
sde:hide 473
sde:hide-bg-image 335, 473
S sde:hide-contact 73, 474
sde:add-material 143, 144, 441 sde:hide-interface 474
sde:back-coord 442 sde:hide-mask 168, 475
sde:bg-image-transparency 336, 442 sde:hide-material 476
sde:bool-regularise 443 sde:hide-region 477
sde:bottom-coord 443 sde:hide-ruler 478
sde:build-mesh 278, 444 sde:info 328, 478
sde:change-datex-color-scheme 68, 445 sde:left-coord 479
sde:check-3d-license-status 445 sde:load-sat 55, 479
sde:check-model 446 sde:material-type 480
sde:checkout-3d-license 446 sde:max-x 480
sde:clear 77, 447 sde:max-y 481
sde:create-bg-image 335, 448 sde:max-z 481
sde:create-dialog 336, 449 sde:merge-materials 482
sde:define-parameter 62, 450 sde:min-x 483
sde:delay-graphics-update 451 sde:min-y 483
sde:delay-graphics-update? 451 sde:min-z 484
sde:delete-bg-image 335, 452 sde:new-region-name 484
sde:delete-materials 452 sde:off-lights 484
sde:delete-parameter 62, 453 sde:offset-mask 168, 170, 485
sde:dialog-add-input 336, 454 sde:on-lights 485
sde:dialog-add-pixmap 336, 455 sde:open-model 54, 59, 486
sde:dialog-delete 336, 456 sde:part-load 487
sde:dialog-ok-command 336, 457 sde:pick-point-on-wp 339, 488
sde:dialog-show 336, 458 sde:pick-two-points-on-wp 340, 488

886
Index of Scheme Extensions

sde:post-message 340, 489 sde:show-contact 73, 520

sde:project-name 489 sde:show-grid 520
sde:refresh 490 sde:show-interface 521
sde:rename-regions 491 sde:show-mask 168, 521
sde:restore-cursor 491 sde:show-material 522
sde:right-coord 492 sde:show-pcurves 523
sde:save-model 54, 59, 493 sde:show-region 524
sde:save-parameters 494 sde:split-solid 525
sde:save-tcl-parameters 495 sde:stripextension 526
sde:scale-scene 72, 497 sde:substring 526
sde:scmwin-get-font-families 58, 497 sde:test-entity 527
sde:scmwin-get-font-family 58, 498 sde:toggle-lights 527
sde:scmwin-get-font-size 58, 498 sde:top-coord 528
sde:scmwin-get-font-style 58, 498 sde:tr-get 528
sde:scmwin-get-window-height 58, 499 sde:use-camera-manipulator 51, 66
sde:scmwin-select-font 58, 499 sde:view-filter-reset 529
sde:scmwin-set-font-family 58, 499 sde:view-set-light-intensity 529
sde:scmwin-set-font-size 58, 500 sde:view-set-visible-area 530
sde:scmwin-set-prefs 58, 500 sde:wait-cursor 530
sde:scmwin-set-window-height 58, 501 sde:window-select-2d 103, 531
sde:scmwin-suppress-output 501 sde:window-select-3d 532
sde:selected-entities 38, 325, 502 sde:xshow 533
sde:selected-refeval-windows 502 sde:xshow-contact 73, 534
sde:separate-lumps 145, 323, 329, 503 sde:xshow-interface 535
sde:set-background-color 59, 505 sde:xshow-mask 168, 536
sde:set-backwards-compatibility 506 sde:xshow-material 537
sde:set-default-material 329, 507 sde:xshow-region 538
sde:set-menubar-font-size 59, 507 sde:zoom-all 539
sde:set-process-up-direction 167, 508 sdedr:append-cmd-file 539
sde:set-project-name 509 sdedr:clear 540
sde:setrefprops 273, 516 sdedr:clear-multibox-definitions 540
sde:set-region-counter 328 sdedr:clear-multibox-placements 540
sde:set-rendering-mode 509 sdedr:clear-profile-definitions 541
sde:set-selection-level 325, 510 sdedr:clear-profile-placements 541
sde:set-translucency 511 sdedr:clear-refinement-definitions 542
sde:setup-grid 517 sdedr:clear-refinement-placements 542
sde:set-view-mode 512 sdedr:clear-ref-windows 541
sde:set-view-operator 512 sdedr:clear-submesh-placement-transform 543
sde:set-view-params 60, 513 sdedr:convert-mask-to-drs-body 543
sde:set-window-position 60, 514 sdedr:define-1d-external-profile 262, 544
sde:set-window-size 59, 514 sdedr:define-analytical-profile 262, 546
sde:set-window-style 515 sdedr:define-analytical-profile-placement 241,
sde:show 518 262, 547
sde:showattribs 519 sdedr:define-body-interface-refwin 243, 549
sde:show-bg-image 335, 519 sdedr:define-constant-profile 257, 550

887
Index of Scheme Extensions

sdedr:define-constant-profile-material 257, 551 sdedr:write-cmd-file 590

sdedr:define-constant-profile-placement 257, 552 sdedr:write-scaled-cmd-file 155, 590
sdedr:define-constant-profile-region 258, 553 sdeepi:create-layerstack 289, 296, 591
sdedr:define-erf-profile 261, 554 sdeepi:publish-global-vars 309, 592
sdedr:define-gaussian-profile 261, 555 sdeepi:scm 593
sdedr:define-multibox-placement 557 sdeepi:tcl 594
sdedr:define-multibox-size 253, 558 sdegeo:2d-cut 91, 595
sdedr:define-particle-profile 271, 559 sdegeo:3d-cut 146, 596
sdedr:define-particle-profile-placement 271, 560 sdegeo:align-horizontal 93, 103, 598
sdedr:define-refeval-window 240, 241, 242, 250, sdegeo:align-horizontal-aut 93, 103, 599
253, 257, 271, 561 sdegeo:align-to-line 94, 103, 600
sdedr:define-refinement-function 250, 564 sdegeo:align-vertical 93, 103, 601
sdedr:define-refinement-material 250, 565 sdegeo:align-vertical-aut 93, 103, 602
sdedr:define-refinement-placement 250, 566 sdegeo:average-edge-length 94, 102, 103, 603
sdedr:define-refinement-region 250, 567 sdegeo:body-trim 604
sdedr:define-refinement-size 250, 568 sdegeo:bool-intersect 142, 605
sdedr:define-submesh 265, 569 sdegeo:bool-subtract 142, 606
sdedr:define-submesh-placement 265, 570 sdegeo:bool-unite 141, 607
sdedr:delete-multibox-placement 571 sdegeo:break-nearly-axis-aligned-edges 100,
sdedr:delete-profile-placement 572 103, 608
sdedr:delete-refeval-window 246, 572 sdegeo:chamfer 110, 609
sdedr:delete-refinement-placement 573 sdegeo:chamfer-2d 90, 611
sdedr:delete-submesh-placement 574 sdegeo:check-overlap 81, 612
sdedr:del-selected-drentity 571 sdegeo:chop-domain 151, 613
sdedr:get-cmdprecision 574 sdegeo:chull2d 91, 614
sdedr:get-definition-list 574 sdegeo:contact-sets 614
sdedr:get-placement-list 575 sdegeo:create-circle 615
sdedr:hide-mbox 575 sdegeo:create-cone 616
sdedr:hide-profile 576 sdegeo:create-cuboid 105, 117, 618
sdedr:hide-refinement 576 sdegeo:create-cylinder 105, 619
sdedr:hide-rewin 577 sdegeo:create-ellipse 621
sdedr:offset-block 255, 578 sdegeo:create-ellipsoid 106, 622, 623
sdedr:offset-interface 255, 579 sdegeo:create-linear-edge 624
sdedr:read-cmd-file 55, 580 sdegeo:create-ot-ellipsoid 624
sdedr:redefine-refeval-window 581 sdegeo:create-ot-sphere 626
sdedr:refine-box 582 sdegeo:create-polygon 627
sdedr:refine-doping 583 sdegeo:create-polyline-wire 119, 628
sdedr:refine-interface 584 sdegeo:create-prism 629
sdedr:set-cmdprecision 585 sdegeo:create-pyramid 630
sdedr:set-title 586 sdegeo:create-rectangle 145, 632
sdedr:show-mbox 586 sdegeo:create-reg-polygon 633
sdedr:show-profile 587 sdegeo:create-ruled-region 634
sdedr:show-refinement 587 sdegeo:create-sphere 106, 635
sdedr:show-rewin 588 sdegeo:create-spline-wire 119, 636
sdedr:transform-submesh-placement 265, 589 sdegeo:create-torus 637

888
Index of Scheme Extensions

sdegeo:create-triangle 85, 639 sdegeo:insert-vertex 85, 233, 673

sdegeo:curve-intersect 640 sdegeo:max-edge-length 102, 104, 674
sdegeo:define-3d-contact-by-polygon 641 sdegeo:min-edge-length 102, 104, 675
sdegeo:define-contact-set 229, 642 sdegeo:mirror-selected 163, 164, 676
sdegeo:define-coord-sys 155, 643 sdegeo:move-2d-regions 87, 677
sdegeo:define-work-plane 152, 644 sdegeo:move-edge 87, 678
sdegeo:delete-collinear-edges 95, 103, 646 sdegeo:move-vertex 86, 679
sdegeo:delete-contact-boundary-edges 232, 646 sdegeo:point-entity-relationship 680
sdegeo:delete-contact-boundary-faces 232, 647 sdegeo:polygonal-split 92, 681
sdegeo:delete-contact-edges 232, 648 sdegeo:prune-vertices 98, 104, 682
sdegeo:delete-contact-faces 232, 648 sdegeo:ray-test 683
sdegeo:delete-contact-set 230, 649 sdegeo:reflect 684
sdegeo:delete-coord-sys 155, 649 sdegeo:rename-contact 685
sdegeo:delete-edges 103, 650 sdegeo:revolve 686
sdegeo:delete-nearly-collinear-edges 96, 103, sdegeo:rotate-selected 162, 164, 167, 687
651 sdegeo:scale 155, 689
sdegeo:delete-region 117, 144, 652 sdegeo:scale-selected 158, 161, 164, 690
sdegeo:delete-short-edges 94, 97, 104, 652 sdegeo:set-active-coord-sys 155, 691
sdegeo:delete-vertices 88, 95, 104, 653 sdegeo:set-active-work-plane 152, 691
sdegeo:delete-work-plane 154, 653 sdegeo:set-auto-region-naming 328, 692
sdegeo:del-short-edges 99, 104, 645 sdegeo:set-contact 231, 232, 693
sdegeo:distance 330, 654 sdegeo:set-contact-boundary-edges 694
sdegeo:dnce 98, 104, 654 sdegeo:set-contact-boundary-faces 695
sdegeo:extend-device 150, 655 sdegeo:set-contact-edges 696
sdegeo:extrude 120, 657 sdegeo:set-contact-faces 697
sdegeo:face-find-interior-point 658 sdegeo:set-contact-faces-by-polygon 698
sdegeo:fillet 111, 332, 659 sdegeo:set-current-contact-set 699
sdegeo:fillet-2d 89, 661 sdegeo:set-default-boolean 80, 145, 700
sdegeo:find-closest-edge 327, 662 sdegeo:set-region-counter 701
sdegeo:find-closest-face 327, 662 sdegeo:set-region-counter-aut 702
sdegeo:find-closest-vertex 327, 663 sdegeo:skin-wire 137
sdegeo:find-touching-faces 664 sdegeo:skin-wire-guide 139
sdegeo:find-touching-faces-global 665 sdegeo:skin-wires 703
sdegeo:get-active-work-plane 665 sdegeo:skin-wires-guides 704
sdegeo:get-auto-region-naming 328, 666 sdegeo:skin-wires-normal 138, 705
sdegeo:get-contact-edgelist 666 sdegeo:skin-wires-vectors 139, 706
sdegeo:get-contact-facelist 667 sdegeo:split-insert-device 148, 707
sdegeo:get-current-contact-set 667 sdegeo:sweep 123, 125, 127, 130, 708
sdegeo:get-default-boolean 668 sdegeo:sweep-corner 128, 710
sdegeo:get-region-counter 668 sdegeo:taper-faces 113, 117, 118, 711
sdegeo:imprint-circular-wire 234, 669 sdegeo:translate 712
sdegeo:imprint-contact 670 sdegeo:translate-selected 164, 713
sdegeo:imprint-polygonal-wire 234, 671 sdegeo:vsmooth 101, 104, 714
sdegeo:imprint-rectangular-wire 234, 672 sdeicwb:clear 714
sdegeo:imprint-triangular-wire 673 sdeicwb:contact 168, 175, 715

889
Index of Scheme Extensions

sdeicwb:create-boxes-from-layer 720 sdepe:depo 178, 194, 759

sdeicwb:define-refinement-from-layer 175, 721 sdepe:doping-constant-placement 178, 761
sdeicwb:down 175, 724 sdepe:etch-material 178, 206, 762
sdeicwb:gds2mac 168, 725 sdepe:extend-masks 168, 763
sdeicwb:generate-mask-by-layer-name 167, 168, sdepe:fill-device 178, 211, 764
173, 728 sdepe:generate-domainboundary 765
sdeicwb:get-back 173, 729 sdepe:generate-empty-mask 168, 766
sdeicwb:get-dimension 729 sdepe:generate-mask 169, 767
sdeicwb:get-domains 730 sdepe:icon_layer 178, 212, 769
sdeicwb:get-front 173, 730 sdepe:implant 178, 771
sdeicwb:get-global-bot 174, 731 sdepe:pattern 178, 191, 773
sdeicwb:get-global-top 174, 731 sdepe:photo 178, 193, 774
sdeicwb:get-label 732 sdepe:polish-device 178, 211, 775
sdeicwb:get-label-for-layer 732 sdepe:remove 178, 222, 776
sdeicwb:get-labels 733 sdepe:trim-masks 169, 777
sdeicwb:get-layer-ids 172, 733 sdesnmesh:axisaligned 281, 778
sdeicwb:get-layer-names 171, 733 sdesnmesh:boundary 284, 285, 781
sdeicwb:get-layer-polygon-midpoints 734 sdesnmesh:boundary-clear 782
sdeicwb:get-left 173, 735 sdesnmesh:delaunizer 282, 783
sdeicwb:get-polygon-bounding-boxes-by-layer- sdesnmesh:delaunizer-tolerance 282, 785
name 735 sdesnmesh:interpolate 786
sdeicwb:get-polygon-by-name 736 sdesnmesh:iocontrols 787
sdeicwb:get-polygon-names-by-layer-name 736 sdesnmesh:offsetting 255, 788
sdeicwb:get-region-bot 174, 737 sdesnmesh:qualityreport 789
sdeicwb:get-region-top 174, 738 sdesnmesh:tensor 283, 791
sdeicwb:get-right 173, 739 sdesnmesh:tools 286, 792
sdeicwb:get-xmax 173, 739 sdesp:begin 793
sdeicwb:get-xmin 173, 740 sdesp:define-step 794
sdeicwb:get-ymax 173, 740 sdesp:finalize 794
sdeicwb:get-ymin 173, 741 sdesp:restore-state 795
sdeicwb:get-zmax 173, 741 sdestr:capitalize 796
sdeicwb:get-zmin 173, 742 sdestr:casefold 797
sdeicwb:load-file 171, 743 sdestr:center 798
sdeicwb:mapreader 744 sdestr:concat 799
sdeicwb:set-domain 172, 745 sdestr:count 800
sdeicwb:stretch 172, 745 sdestr:endswith 801
sdeicwb:up 175, 746 sdestr:expandtabs 802
sdeio:read-dfise-mask 55, 168, 747 sdestr:find 803
sdeio:read-tdr 748 sdestr:format 804
sdeio:read-tdr-bnd 55, 749 sdestr:index 806
sdeio:save-1d-tdr-bnd 750 sdestr:isalnum 807
sdeio:save-tdr-bnd 272, 277, 752 sdestr:isalpha 808
sdepe:add-substrate 178, 191, 755 sdestr:isdecimal 809
sdepe:clean 756 sdestr:isdigit 810
sdepe:define-pe-domain 178, 190, 757 sdestr:islower 811

890
Index of Scheme Extensions

sdestr:isnumeric 812 string:tail 845

sdestr:isspace 813 sweep:law 846
sdestr:istitle 814 sweep:options 123, 131, 848
sdestr:isupper 815 system:command 850
sdestr:join 816 system:getenv 850
sdestr:length 817
sdestr:ljust 818 T
sdestr:lower 819
timer:end 851
sdestr:lstrip 820
timer:get-time 851
sdestr:partition 821
timer:show-time 852
sdestr:replace 822
timer:start 852
sdestr:rfind 823
transform:reflection 164, 853
sdestr:rindex 824
transform:rotation 164, 854
sdestr:rjust 825 transform:scaling 164, 855
sdestr:rpartition 826 transform:translation 161, 164, 856
sdestr:rsplit 827
sdestr:rstrip 828
sdestr:split 829 U
sdestr:splitlines 830 util:make-bot-contact 857
sdestr:startswith 832 util:make-top-contact 858
sdestr:swapcase 833
sdestr:upper 834 V
sdestr:zfill 835 vertex:position 329
set-interface-contact 836 vertex? 334, 859
shell? 334, 837 view:set-point-size 70, 859
skin:options 838
solid:area 841
W
solid:closed? 334
wire:closed? 334
solid:manifold? 334
wire:planar? 334, 861
solid:massprop 842
wire? 334, 860
solid? 334, 841
sort 843 wire-body? 334, 860
string:head 844

891