ARTICLE IN PRESS

JOURNAL OF
SOUND AND
VIBRATION
Journal of Sound and Vibration 325 (2009) 382–396
www.elsevier.com/locate/jsvi

Semi-analytic solutions to nonlinear vibrations of microbeams

under suddenly applied voltages
M. Moghimi Zanda,, M.T. Ahmadianb,, B. Rashidianc
a
School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
b
Center of Excellence in Design, Robotics and Automation, School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
c
School of Electrical Engineering, Sharif University of Technology, Tehran, Iran
Received 26 May 2008; received in revised form 3 February 2009; accepted 12 March 2009
Handling Editor: M.P. Cartmell
Available online 20 May 2009

Abstract

In this study, nonlinear oscillations of microbeams, actuated by suddenly applied electrostatic force, are investigated.
Effects of electrostatic actuation, residual stress, midplane stretching and fringing fields are considered in modeling.
Galerkin’s decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear
ordinary differential equation. Homotopy analysis method is used to find semi-analytic solutions to the vibrations of
microbeams. Convergence regions of the solution series are determined. Influences of increasing the voltage and midplane
stretching on the frequency of vibrations are also studied. Results are in good agreement with numerical and experimental
findings.
r 2009 Elsevier Ltd. All rights reserved.

1. Introduction

A microbeam, actuated by electrostatic distributed force, is a flexible beam-shaped element attached to a

fixed rigid substrate. Electrostatically actuated microbeams are extensively used in different applications such
as signal filtering and mass sensing [1]. When the input voltage exceeds a critical value, called pull-in voltage
(Vpi), the flexible microbeam spontaneously deflects towards the rigid plate. In microbeams, pull-in instability
is a basic phenomenon considered in design. Pull-in instability was observed experimentally by Taylor [2] and
Nathanson et al. [3]. Osterberg studied microelectromechanical systems (MEMS) with circular and
rectangular shapes and achieved several closed-form models for pull-in instability in these systems [4].
When the rate of voltage variation is low and consequently inertia has almost no influence on the
microsystem behavior, the critical value of voltage is called static pull-in voltage (Vpi). However, when the rate
of voltage variation is not negligible, the effect of inertia has to be considered and the critical voltage value is
called dynamic pull-in voltage (Vpid). The pull-in instability related to this situation is called dynamic pull-in
instability [5,6].

Corresponding authors. Tel.: +98 21 66165503; fax: +98 21 66000021.

E-mail addresses: [email protected] (M. Moghimi Zand), [email protected] (M.T. Ahmadian).

0022-460X/$ - see front matter r 2009 Elsevier Ltd. All rights reserved.
doi:10.1016/j.jsv.2009.03.023
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Nomenclature V voltage
Z deflection
b width of the plate
d0 initial air gap Greek symbols
Ey effective Young’s modulus
h plate thickness e vacuum permittivity
Ib moment of inertia of the cross-section r density
l length of the plate j(x) trial function
m degree of the electrostatic force Taylor o nonlinear frequency
approximation
Ni initial (residual) axial load Special functions and parameters
Ns axial load due to the midplane stretching
p order of approximation ‘ auxiliary parameter
q embedding parameter homotopy function
t time L auxiliary linear operator
u(t) time-dependent deflection parameter N nonlinear operator

Studying vibrational behavior of MEMS is quite useful in determining design parameters of these systems.
Vibrational characteristics of microbeams have been generally studied assuming small vibrations around a
deflected position. In Ref. [7], oscillatory behavior of microbeams considering midplane stretching has been
studied. In Ref. [1] vibrations of double-clamped microbeams, predeformed by an electric field, have been
investigated. Vibrations of electrostatically actuated microstructures have also been studied in Refs. [8–10].
Different techniques have been proposed for finding solutions to nonlinear equations of MEMS, for
example the differential quadrature method [11], the finite element method [9,10] and homotopy methods [12].
Although it is difficult to get an analytic approximation for different phenomena in MEMS, there are some
analytic methods for nonlinear problems of microelectromechanical systems such as perturbation techniques
[13,14]. In general, perturbation approximations are valid only for weakly nonlinear problems [15]. Based on
the homotopy method in topology, Liao proposed homotopy analysis method (HAM) to present analytic
solutions to strongly nonlinear problems [15]. This method can also be effective in finding solutions to the
vibrations of microbeams.
In the present paper, vibrations of microbeams subjected to suddenly applied step voltages are investigated.
Different sources of nonlinearity such as electrostatic force and midplane stretching are considered. Galerkin’s
decomposition method is utilized to convert the nonlinear partial differential equation of motion to a nonlinear
ordinary differential equation. Afterward, Liao’s homotopy analysis method is utilized to find semi-analytic
solutions to the nonlinear vibrations of microbeams. Effects of increasing voltage, midplane stretching and
fringing fields are studied. Influences of different parameters on convergence regions are also investigated.

2. Modeling and formulation

Fig. 1 displays a prismatic double-clamped microbeam suspended above a rigid substrate. When a voltage V
is applied between the conductive microbeam and the substrate plate, an attractive electrostatic force causes
the microbeam to deflect. In Fig. 1, x is the coordinate along the length, z is the coordinate along the thickness,
Z is deflection in the z-direction and t is the time. The length of the microbeam is l, the width is b, the density is
r, the thickness is h, the vacuum permittivity is e, the moment of inertia of the cross-section about the y-axis is
Ib, the effective Young’s modulus of the beam is Ey and the air initial gap is d0.
The electrostatic force per unit area takes the following form:
 
V 2 d 0  Zðx; tÞ
F e ¼ 1=2 1 þ b (1)
ðd 0  Zðx; tÞÞ2 b
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Fig. 1. Schematic view of a double-clamped microbeam.

Here the term b accounts for the fringing fields effect due to the finite width of the beam. For a double-
clamped beam b ¼ 0.65.
By incorporating von Kármán nonlinearity for midplane stretching, the deflection Z in z-direction is
governed by [1]
q2 Z q4 Z q2 Z
rbh þ E y I b  ðN i þ N s Þ  bF e ¼ 0 (2)
qt2 qx4 qx2
where Ni is the residual (initial) axial load and Ns the axial load due to the midplane stretching which is
given by
Z  
E y bh l qZ 2
Ns ¼ dx (3)
2l 0 qx
The microbeam deflection is subjected to the following kinematic boundary conditions:
qZð0; tÞ qZðl; tÞ
Zð0; tÞ ¼ 0; ¼ 0; Zðl; tÞ ¼ 0; ¼0 (4)
qx qx
The initial conditions are as follows:
qZðx; 0Þ
Zðx; 0Þ ¼ 0; ¼0 (5)
qt
Based on one DOF model of the beams, Eqs. (2)–(5) can be solved by appropriate accuracy [1]. The solution is
constructed by expressing the deflection function as the product of two separate functions
Zðx; tÞ ¼ fðxÞuðtÞ (6)
where u(t) is an unknown time-dependent deflection parameter and fðxÞ is a trial function satisfying the
kinematic boundary conditions. For example, fðxÞ can be assumed as
x2  x2
fðxÞ ¼ 1 (7)
l l
The term Fe in Eq. (2) can be approximated by Taylor’s series as
  X m
1 V 2 d 0  Zðx; tÞ
Fe ¼ 2
1 þ b ¼ Zj Zðx; tÞj
2 ðd 0  Zðx; tÞÞ b j¼0
!
1 2 1 2Zðx; tÞ 3Zðx; tÞ2 4Zðx; tÞ3 5Zðx; tÞ4
¼ V þ þ þ þ þ 
2 d 20 d 30 d 40 d 50 d 60
!
1 bV 2 1 Zðx; tÞ Zðx; tÞ2 Zðx; tÞ3 Zðx; tÞ4
þ þ þ þ þ þ  (8)
2 b d0 d 20 d 30 d 40 d 50
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where m is the degree of the electrostatic force Taylor approximation. Substituting for Fe from Eq. (8) into
Eq. (2) and also for Ns from Eq. (3) into Eq. (2), one obtains
Z   !
q2 Zðx; tÞ q4 Zðx; tÞ E y bh l qZðx; tÞ 2 q2 Zðx; tÞ
TðZðx; tÞÞ ¼ rbh þ E y I b  N i þ dx
qt2 qx4 2l 0 qx qx2
!
bV 2 1 2Zðx; tÞ 3Zðx; tÞ2 4Zðx; tÞ3 5Zðx; tÞ4
 þ þ þ þ þ 
2 d 20 d 30 d 40 d 50 d 60
!
bV 2 1 Zðx; tÞ Zðx; tÞ2 Zðx; tÞ3 Zðx; tÞ4
 þ þ þ þ þ  ¼ 0 (9)
2 d0 d 20 d 30 d 40 d 50
The one-parameter Galerkin’s solution can be computed by [1]
Z l
fðxÞTðZðx; tÞÞ dx ¼ 0 (10)
0

After substituting for T(Z(x, t)) from Eq. (9) into Eq. (10) and integrating by parts in some terms, the
governing equation for u(t) becomes (for the case m ¼ 4)
d2
M uðtÞ þ MluðtÞ þ LV 2 þ DV 2 u2 ðtÞ þ ðS þ EV 2 Þu3 ðtÞ þ GV 2 u4 ðtÞ ¼ 0 (11)
dt2
where
K  V 2B
l¼ (12)
M
For more accuracy, higher degrees of the electrostatic force Taylor approximation can be used. For the cases
m ¼ 5 and 6, one obtains the following equations, respectively:
d2
M uðtÞ þ MluðtÞ þ LV 2 þ DV 2 u2 ðtÞ þ ðS þ EV 2 Þu3 ðtÞ þ GV 2 u4 ðtÞ þ JV 2 u5 ðtÞ ¼ 0 (13)
dt2

d2
M uðtÞ þ MluðtÞ þ LV 2 þ DV 2 u2 ðtÞ þ ðS þ EV 2 Þu3 ðtÞ þ GV 2 u4 ðtÞ þ JV 2 u5 ðtÞ þ PV 2 u6 ðtÞ ¼ 0 (14)
dt2
subject to zero initial conditions. Coefficients M, K, L, D, S, E, G, J, P and B are presented in Appendix A.
In the next section, homotopy analysis method is utilized to solve the microbeam problem.

3. Application of homotopy analysis method to the microbeam problem

HAM is an effective analytic method for solving nonlinear equations. This method transforms a general
nonlinear problem into an infinite number of linear problems by embedding an auxiliary parameter q [16]. As
q increases from 0 to 1, the solution varies from the initial approximation to the exact solution. The homotopy
function is constructed as [15–21]
ðF; q; ‘; HðtÞÞ ¼ ð1  qÞL½Fðt; qÞ  u0 ðtÞ  q‘HðtÞN½Fðt; qÞ (15)
where ‘, u0(t), H(t), L and N are a nonzero auxiliary parameter, an initial guess, a nonzero auxiliary function,
an auxiliary linear operator and a nonlinear operator, respectively. Quantities ‘ and H(t) adjust the
convergence region of the solution. For the microbeam problem, the auxiliary function can be chosen in the
form H(t) ¼ 1.
Consider Eq. (11) as the equation of motion (m ¼ 4). The procedures for the cases m ¼ 5 and 6 are similar
to the case m ¼ 4. From Eq. (11), the nonlinear operator N½Fðt; qÞ; LðqÞ can be defined as
q2 Fðt; qÞ LV 2 þ DV 2 F2 ðt; qÞ þ ðS þ EV 2 ÞF3 ðt; qÞ þ GV 2 F4 ðt; qÞ
N½Fðt; qÞ; LðqÞ ¼ 2
þ LðqÞFðt; qÞ þ ¼0 (16)
qt M
subject to zero initial conditions. It should be noted that Lð1Þ ¼ l ¼ ðK  BV 2 Þ=M.
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To construct the homotopy function, the auxiliary linear operator can be chosen as
q2 Fðt; qÞ
þ o2 Fðt; qÞ
L½Fðt; qÞ ¼ (17)
qt2
The function Fðt; qÞ can be expanded in a power series of the embedding parameter q using Taylor’s theorem
as follows:
Fðt; qÞ ¼ u0 ðtÞ þ qu1 ðtÞ þ q2 u2 ðtÞ þ q3 u3 ðtÞ þ q4 u4 ðtÞ þ q5 u5 ðtÞ þ q6 u6 ðtÞ þ    (18)
The function L can be expanded as
LðqÞ ¼ o2 þ qo1 ðoÞ þ q2 o2 ðoÞ þ q3 o3 ðoÞ þ q4 o4 ðoÞ þ    (19)
By equating to zero the homotopy function, the zero-order deformation equation is constructed as
ð1  qÞL½Fðt; qÞ  u0 ðtÞ ¼ q‘N½Fðt; qÞ; LðqÞ (20)

qFð0; qÞ
Fð0; qÞ ¼ 0; ¼0 (21)
qt
When q ¼ 0, Eq. (20) becomes
L½Fðt; 0Þ  u0 ðtÞ ¼ 0 (22)
which gives the zero-order approximation of u(t).
It is straightforward to set the initial guess u0(t) to zero. Differentiating Eq. (20) with respect to q and then
setting q ¼ 0, yields the first-order deformation equation, which gives the first-order approximation of u(t)
by solving

L½u1 ðtÞ ¼ ‘N½Fðt; qÞ; LðqÞq¼0 (23)

subject to zero initial conditions. The higher-order approximations of the solution u(t) can be found by solving
high-order deformation equations. Differentiating Eq. (20) j times with respect to q, and then setting q ¼ 0 and
finally dividing each side by j!, one obtains the jth-order deformation equation

1 qj1 N½Fðt; qÞ; LðqÞ
L½uj ðtÞ  wj uj1 ðtÞ ¼ ‘  (24)
ðj  1Þ! qqj1 q¼0

where

0 when jp1;
wj ¼ and LðqÞ ¼ o2 þ qo1 ðoÞ þ q2 o2 ðoÞ þ q3 o3 ðoÞ þ q4 o4 ðoÞ þ    (25)
1 otherwise:
Here, the terms oj can be identified by means of no secular terms. It is noteworthy that the vibrations of an
undamped microbeam under the actuation of the electrostatic force can be expressed by the following base
functions:
cosðkotÞ; k ¼ 1; 2; 3; . . . (26)
Therefore, to eliminate the secular terms in the jth-order approximation, one can set the coefficient of cos(ot)
in the (j1)th-order deformation equation to zero. This provides an algebraic equation. Solving this algebraic
equation yields oj2 as a function of o. After finding sufficient approximations, by setting q ¼ 1 in Eqs. (18)
and (19), one gets
X
p
Lð1Þ ¼ l ¼ o2 þ ok ðoÞ ¼ o2 þ o1 ðoÞ þ o2 ðoÞ þ    þ op ðoÞ (27)
j¼1

X
pþ2
uðtÞ ¼ uj ðtÞ ¼ u0 ðtÞ þ u1 ðtÞ þ u2 ðtÞ þ u3 ðtÞ þ u4 ðtÞ þ    þ upþ2 ðtÞ (28)
j¼0
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where p is the order of approximation. The nonlinear frequency o can be found by solving Eq. (27).
The method can also be applied for different degrees of the electrostatic force Taylor approximation (m).
The terms o1, o2, o3, o4, o5 and o6 for m ¼ 4 are presented in Appendix B.

Table 1
The parameters of the double-clamped microbeams [22].

Beam length (mm) Thickness (mm) Initial gap (mm) Width (mm) Residual axial Effective Young’s
load (N) modulus (GPa)

210 1.5 1.18 100 0.0009 (tensile) 166

310
410
510

Table 2
A comparison between the experimental and calculated results.

Beam length (mm) o0/2p (kHz)

Measured [22] Calculated [22] Calculated [11] Semi-analytic method

(present study, m ¼ 4)

210 322.05 324.70 324.70 324.78

310 163.22 164.35 163.46 163.16
410 102.17 103.80 103.70 103.42
510 73.79 74.80 73.46 74.38

Fig. 2. Variations of the nonlinear frequency (Hz) with applied step voltage (V) for different values of p (m ¼ 4).
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4. Results and discussions

To validate the model, a comparison is performed using microbeams with parameters listed in Table 1. The
effective Young’s modulus for the microbeams material is Ey ¼ 166 GPa. Further, it is assumed that the
residual axial load is Ni ¼ 0.0009 N (residual stress s ¼ 6 MPa). The residual stress may be induced during
the fabrication process. Table 2 lists the calculated and measured initial frequencies for these microbeams.
Table 2 reveals that the results obtained from the present model agree very well with numerical and
experimental results presented in the literature.
Fig. 2 shows variations of nonlinear frequency versus applied voltage using semi-analytic method for m ¼ 4
and 5. As it can be seen, when the input voltage increases, the nonlinear frequency of vibrations decreases.
This diagram signifies that for a large range of applied voltages, there exists good agreement between results
calculated by assuming m ¼ 4 and those obtained by assuming m ¼ 5.
In Fig. 3 variation of the nonlinear frequency with the input voltage for various degrees of electrostatic force
approximation is shown. The presented diagram reveals that the differences between nonlinear frequencies
computed by fourth, fifth and sixth degree approximations are negligible. It indicates that the fourth degree
approximation for electrostatic force is sufficient in calculations for these microbeams.
Fig. 4a shows deflections of the double-clamped microbeam with length l ¼ 210 mm for input voltage of
20 V. Fig. 4b depicts deflections for input voltage of 25 V. As seen, for low voltages, low orders
of approximation (p) are sufficient to find deflections accurately. Nevertheless, for high voltages, higher orders
of approximation are required. In these figures, the microbeam equation has been solved numerically by
Runge–Kutta method using MAPLE fsolve command. It is noteworthy that expanding L using Eq. (19)
effectively reduces the required order of approximation (p); however, it forces us to solve a set of nonlinear
equations to find the nonlinear frequency. A method of finding the frequency without a need for solving
nonlinear equations has been presented in [23].

Fig. 3. Variations of the nonlinear frequency (Hz) with applied step voltage (V) for the double-clamped microbeam with length l ¼ 210 mm
and different values of m (p ¼ 3).
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Fig. 4. Midpoint deflection time history for the double-clamped microbeam with length l ¼ 210 mm: (a) input voltage of 20 V and (b) input
voltage of 25 V (Vpid ¼ 26.96 V).  Runge–Kutta; — Semi-analytic.
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Fig. 5. Midpoint deflection time history for the double-clamped microbeam with length l ¼ 510 mm: (a) input voltage of 5.2 V and (b)
input voltage of 5.6 V (Vpid ¼ 6.04 V).  Runge–Kutta; — Semi-analytic.
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Fig. 6. Variations of the nonlinear frequency (Hz) with applied step voltage (V) for the double-clamped microbeam with length l ¼ 210 mm
and different residual axial loads.

Fig. 7. Midpoint deflection time history for the double-clamped microbeam with length l ¼ 210 mm and different residual axial loads
actuated by input voltage of 15 V. Runge–Kutta; — Semi-analytic.
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Fig. 8. Variations of the nonlinear frequency (Hz) with applied step voltage (V) for the double-clamped microbeam with length l ¼ 210 mm
with and without midplane stretching.

Fig. 9. Midpoint deflection time history for the double-clamped microbeam with length l ¼ 210 mm (p ¼ 6, m ¼ 4).  Runge–Kutta; —
Semi-analytic.
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Figs. 5a and b show deflection time history of a microbeam with length l ¼ 510 mm for input voltages of 5.2
and 5.6 V, respectively. It can be observed from Figs. 4 and 5 that there is excellent agreement between results
calculated by Runge–Kutta method and those obtained by the semi-analytic method (particularly for p ¼ 5, 6).
In Fig. 6 influence of residual stress on nonlinear frequency is observed. As it can be seen, pretension in
microbeams results in increasing nonlinear frequency.
Fig. 7 elaborates deflection time history of the microbeam with length 210 mm for different axial loads. As
depicted in Fig. 7, precompression increases deflections for a specific applied voltage.
In Fig. 8 influence of the midplane stretching on the nonlinear frequency is depicted. As it can be seen,
accounting for the midplane stretching decreases the amplitudes of vibrations. On the other hand, the
neglecting of the midplane stretching underestimates the microbeam stiffness and nonlinear frequency.
Fig. 9 shows deflection time history of the microbeam with length l ¼ 210 mm for low (15 V) and high (23 V)
voltages. It can be seen that midplane stretching has a relatively significant effect on deflections for high
voltages; while for low voltages, the effect is negligible.

Fig. 10. The _-curve of o for the microbeam with length l ¼ 210 mm actuated by a 10 V step-input voltage.

Fig. 11. The _-curve of o for the microbeam with length l ¼ 210 mm actuated by different voltages (p ¼ 6).
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As discussed before, there is clearly excellent agreement between numerical results calculated by
Runge–Kutta method and semi-analytic results for p ¼ 5, 6 in diagrams containing midpoint deflection
time history.
In homotopy analysis method, by plotting _-curves, it is easy to find a proper value of _ to ensure that the
solution series converge [16]. These curves (_-curves) depict variations of solutions with _. The convergence
region and rate of the solution series can be adjusted by means of the auxiliary parameter _. A proper solution
series has to be independent upon the auxiliary parameter _. In Fig. 10 the _-curve of o for the microbeam
with length l ¼ 210 mm is depicted. The microbeam is actuated by a step voltage of 10 V. As it can be seen,
using the higher orders of approximation (p) enlarges convergence regions of the solution series.
In Fig. 11 the _-curve of o for the above-mentioned microbeam is shown for different voltages. Order of
approximation (p) is equal to 6 for this figure. It can be deduced from Fig. 11 that decreasing the input voltage
enlarges convergence regions.

5. Conclusion

In this research, homotopy analysis method has been utilized to find semi-analytic solutions to nonlinear
oscillations of microbeams, actuated by step input voltages. The nonlinear ordinary differential equation of
motion has been built using the Galerkin’s decomposition method. The equation of motion has been solved by
homotopy analysis method. Influences of increasing voltage, axial load and midplane stretching on nonlinear
vibrations have been investigated. It was shown that by increasing actuation voltage, higher-order
approximations are required to find deflections accurately. Effect of auxiliary parameter on solutions has
also been considered to determine convergence regions. Results indicate that higher orders of approximation
enlarge convergence regions of the solution series. Comparing the results of the semi-analytic method with the
numerical results shows excellent agreement between them.

Acknowledgment

The authors would like to thank Professor Shijun Liao for his valuable suggestions.

Appendix A

Z Z !
l l
0:5bfðxÞ 0:5bfðxÞ
M¼ rbhfðxÞ2 dx; L¼ þ dx
0 0 d 20 d0

Z ! Z !
l
bfðxÞ2 0:5bfðxÞ2 l
1:5bfðxÞ3 0:5bfðxÞ3
B¼ þ dx; D¼ þ dx
0 d 30 d 20 0 d 40 d 30

Z ! Z !
l
2bfðxÞ4 0:5bfðxÞ4 l
2:5bfðxÞ5 0:5bfðxÞ5
E¼ þ dx; G¼ þ dx
0 d 50 d 40 0 d 60 d 50

Z ! Z !
l
3bfðxÞ6 0:5bfðxÞ6 l
3:5bfðxÞ7 0:5bfðxÞ7
J¼ þ dx; P¼ þ dx
0 d 70 d 60 0 d 80 d 70

Z l  Z Z l  !
d4 fðxÞ d2 fðxÞ l
0:5E y bh d2 fðxÞ dfðxÞ 2
K¼ E y I b fðxÞ  N i fðxÞ dx; S¼ fðxÞ dx dx
0 dx4 dx2 0 l dx2 0 dx
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Appendix B

2‘LV 4 D
o1 ¼ 
M 2 o2

‘LV 4
o2 ¼  ð8‘DMo2 þ 8DMo2 þ 15‘LS þ 15‘LEV 2 Þ
4M 3 o4

‘LV 4
o3 ¼ ð42‘2 L2 GV 4  45M‘LEo2 V 2  45M‘2 LEo2 V 2  12M 2 ‘2 Do4
6M 4 o6
 45M‘LSo2  45M‘2 LSo2 þ 7‘2 LD2 V 4  12DM 2 o4  24‘DM 2 o4 Þ

‘LV 4
o4 ¼ ð90M 2 o4 ‘2 LEV 2  84Mo2 ‘2 L2 GV 4  8M 3 Do6  45M 2 ‘LSo4
4M 5 o8
þ 14M‘3 LD2 o2 V 4 þ 30L2 ‘3 DSV 4  24M 3 ‘Do6  45M 2 ‘3 LEo4 V 2
 84Mo2 ‘3 L2 GV 4  45M 2 ‘3 LSo4  24M 3 ‘2 Do6  45‘LEM 2 o4 V 2
þ 14M‘2 LD2 o2 V 4  8M 3 ‘3 Do6  90M 2 ‘2 LSo4 þ 30‘3 L2 DEV 6 Þ

‘LV 4
o5 ¼  ð13365‘4 L3 V 4 S 2  34560Mo2 ‘4 L2 DEV 6  8064‘4 LV 4 M 2 D2 o4
1152M 6 o10
þ 1408‘4 L2 V 8 D3 þ 17280‘4 LSM 3 o6 þ 48384L2 ‘4 GM 2 V 4 o4  34560L2 ‘4 SMDV 4 o2
þ 17280‘4 LEM 3 o6  26730L3 ‘4 ESV 6  22176L3 ‘4 DGV 8  8064L‘2 M 2 D2 V 4 o4
þ 2304‘4 M 4 Do8  13365‘4 E 2 L3 V 8 þ 48384L2 ‘2 M 2 GV 4 o4 þ 9216‘M 4 Do8
þ 2304M 4 Do8 þ 51840‘2 LM 3 EV 2 o6 þ 9216‘3 M 4 Do8  16128‘3 M 2 D2 Lo4 V 4
 34560‘3 L2 MDEV 6 o2  34560‘3 L2 MDSV 4 o2 þ 13824‘2 M 4 Do8
þ 51840‘2 LM 3 So6 þ 17280‘LM 3 EV 2 o6 þ 17280‘LM 3 So6
þ 96768‘3 L2 M 2 GV 4 o4 þ 51840‘3 LM 3 EV 2 o6 þ 51840‘3 M 3 LSo6 Þ

‘LV 4
o6 ¼  ð432000M 4 o8 ‘4 LEV 2  334125‘4 L3 V 4 MS2 o2  668250‘4 L3 V 6 MESo2
5760M 7 o12
 554400‘4 L3 V 8 MDGo2  67200‘2 LV 4 M 3 D2 o6 þ 81900‘5 L3 V 10 D2 E
 864000‘4 L2 V 6 M 2 EDo4  201600‘4 M 3 LV 4 D2 o6 þ 43200‘4 LSM 4 o8
þ 1209600L2 ‘4 GM 3 V 4 o6  864000L2 ‘4 SM 2 DV 4 o4 þ 57600M 5 ‘4 Do10
þ 403200M 3 ‘2 L2 GV 4 o6 þ 57600M 5 ‘Do10 þ 11520M 5 Do10 þ 432000M 4 ‘2 LEV 2 o8
þ 115200M 5 ‘3 Do10  201600L‘3 M 3 D2 V 4 o6  432000M 2 ‘3 L2 DEV 6 o4
 432000M 2 ‘3 L2 DSV 4 o4 þ 115200M 5 ‘2 Do10 þ 432000M 4 ‘2 LSo8
þ 108000M 4 ‘LEV 2 o8 þ 108000M 4 ‘LSo8 þ 1209600M 3 ‘3 L2 GV 4 o6
þ 684000M 4 ‘3 LEV 2 o8 þ 684000M 4 ‘3 LSo8 þ 35200M‘4 L2 D3 V 8 o2
 334125M‘4 L3 E 2 V 8 o2 þ 11520M 5 ‘4 Do10  554400M‘5 L3 GDV 8 o2
þ 35200M‘5 L2 D3 V 8 o2  432000M 2 ‘5 L2 EDV 6 o4  67200M 3 ‘5 LD2 V 4 o6
 ARTICLE IN PRESS
396 M. Moghimi Zand et al. / Journal of Sound and Vibration 325 (2009) 382–396

 432000M 2 ‘5 L2 SDV 4 o4 þ 81900‘5 L3 D2 SV 8 þ 403200M 3 ‘5 L2 GV 4 o6

þ 10800M 4 ‘5 LEV 2 o8  334152‘5 L4 GEV 10  334152‘5 L4 GSV 8
 334125M‘5 L3 E 2 V 8 o2  668250M‘5 L3 ESV 6 o2  334125M‘5 L3 S 2 V 4 o2
þ 108000M 4 ‘5 LSo8 Þ

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