micromachines

Article
Static and Dynamic Mechanical Behaviors of
Electrostatic MEMS Resonator with Surface
Processing Error
Jingjing Feng 1,2,3, *, Cheng Liu 1,3 , Wei Zhang 2, * and Shuying Hao 1,3, *
1 Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control,
School of Mechanical Engineering, Tianjin University of Technology, Tianjin 300384, China;
[email protected]
2 Beijing Key Laboratory on Nonlinear Vibrations and Strength of Mechanical Structures,
Beijing University of Technology, College of Mechanical Engineering, Beijing 100124, China
3 National Demonstration Center for Experimental Mechanical and Electrical Engineering Education,
Tianjin University of Technology, Tianjin 300384, China
* Correspondence: [email protected] (J.F.); [email protected] (W.Z.); [email protected] (S.H.);
Tel.: +86-226-021-4133 (J.F. & S.H.); +86-106-739-2867 (W.Z.)

Received: 30 November 2017; Accepted: 12 January 2018; Published: 17 January 2018

Abstract: The micro-electro-mechanical system (MEMS) resonator developed based on surface

processing technology usually changes the section shape either due to excessive etching or insufficient
etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper
and lower sections. The effect of section change on the mechanical properties is studied analytically
and verified through numerical and finite element solutions. A doubly-clamped microbeam-based
resonator, which is actuated by an electrode on one side, is investigated. The higher-order model
is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity.
Further, the Galerkin method and Newton–Cotes method are used to reduce the complexity and
order of the derived model. First of all, the influence of microbeam shape and gap variation on the
static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method
of multiple scales (MMS) is applied to determine the response of the system for small amplitude
vibrations. The relationship between the microbeam shape and the frequency response is discussed.
Results show that the change of section and gap distance can make the vibration soften, harden, and
so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect
is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with
the increase of the amplitude, the frequency response will shift from hardening to softening behavior.
The large amplitude in-well motions are studied to investigate the transitions between hardening
and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc.,
Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close
to each other in the stable region.

Keywords: MEMS; processing error; section parameter; nonlinear vibration

1. Introduction
Electrostatically-actuated microbeams have become major components in many micro-electro-
mechanical system (MEMS) devices [1] such as switches [2,3], sensors [4,5] and resonators [6] due
to their geometric simplicity, broad applicability and easy to implement characteristics. Moreover,
the existence of structure nonlinearity and nonlinear electrostatic force can make microbeams exhibit
rich static and dynamic behaviors [7,8]. These behaviors have aroused the interest of many scholars,
who have joined the study of MEMS. However, most of them have been aiming at the equal section

Micromachines 2018, 9, 34; doi:10.3390/mi9010034 www.mdpi.com/journal/micromachines

Micromachines 2018, 9, 34 2 of 19

beam under ideal conditions. However, the microbeams and microdiaphragms fabricated through
surface processing technology are prone to errors during fabrication [9]. Such errors during fabrication
of microdevices cannot be ignored as they can cause the bending of the microbeam neutral surface and
change the width, thickness and gap distance of the microresonator. Hence, it is very important to
analyze the static and dynamic behaviors of the electrostatically-actuated beam with surface processing
error for understanding its global dynamic behavior, developing a dynamic control problem and
optimizing vibration design. In the present paper, a doubly-clamped beam of variable thickness
actuated by a one-sided electrode is considered to study the influence of section variation on static and
dynamic behaviors.
The static pull-in instability is one of the key issues in the design of MEMS [10,11]. When the
direct current (DC) voltage is increased beyond a critical value, the stable equilibrium positions
of the microbeam cease to exist, and the pull-in instability will be triggered [12,13]. For example,
Abdel-Rahman et al. [14] investigated an electrically-actuated microbeam accounting for midplane
stretching and derived the static pull-in position of microbeam. Younis et al. [15] studied the effect
of residual stress on the static pull-in of microresonators and found that the residual stress would
increase the pull-in voltage. The system’s vibrations can cause an interesting nonlinear phenomenon
such as hysteresis, softening behavior, snap through and dynamic pull-in instability when it is excited
with DC and alternating current (AC) voltages [16–18]. These analyses are helpful to further grasp
the dynamic instability of microcomponents. Ghayesh and Farokh [19] investigated the static and
dynamic behavior of an electrically-actuated MEMS resonator based on the modified couple stress
theory. It is found that the pull-in voltage is larger by the coupled correction theory compared with
the classical theory. Zhang et al. [20] used the method of multiple scales (MMS) to study the response
and dynamic behaviors of the resonant parameters resonant in the MEMS resonator. The softening
behavior of the DC voltage and the effect of damping on the frequency response curve were discussed.
Ibrahim [21] investigated the effect of nonlinearities of a capacitive accelerometer due to squeeze film
damping (SQFD) and electrostatic actuation by the theoretical and experimental methods. Theoretical
results are compared to experimental data showing excellent agreement. Ghayesh, Farokh and
Gholipour [22,23] investigated the nonlinear dynamics of a microplate based on the modified couple
stress theory. The influence of system parameters on the resonant responses was highlighted by the
frequency-response and force-response curves. Alsaleem et al. [24] conducted an experimental study to
understand the dynamic pull-in voltage of the electrostatic drive microresonator. The experimental and
theoretical results are in good agreement. Furthermore, the applicable microresonator conditions are
pointed out. However, the majority of the previous studies are based on the equal section microbeam,
i.e., the impact of model errors is neglected.
With the deepening research in this discipline, the importance of understanding the processing
error of the microbeam on its performance has been realized. There are several sources of errors
possible, for example, residual [25], initial offset imperfection [26], surface processing technology
precision [27], etc. The residual stress causes the bending of the microbeam to form a microarch [28].
Farokhi and Ghayesh [29,30] established the mathematical model of a geometrically imperfect
microbeam/microplate, the nonlinear force of which was actuated on the basis of the modified
couple stress theory. The influence of physical parameters on the natural frequency and frequency
response were analyzed. What is more, Farokhi and Ghayesh [31] investigated the three-dimensional
motion characteristics of perfect and imperfect Timoshenko microbeams under mechanical and thermal
forces. Ruzziconi [32] studied many kinds of nonlinear behaviors of the microarch under different
parameters through theoretical analysis. The conclusions are in good agreement with experimental
analysis. Besides, a reliable theoretical model was obtained. Ruzziconi [33] predicted the global
bifurcation of the electrostatically-actuated microarch and studied the complex dynamics of the
microarch. Krylov et al. [34] studied the electrostatically-actuated microarch structures, focusing
on the influence of system geometry parameters on its dynamic behaviors and found that the main
influencing factors are microarch thickness, microarch height and the distance between the microarch
Micromachines 2018, 9, 34 3 of 19

and the plate. Xu et al. [35] studied the dynamic behavior of clamped-clamped carbon nanotubes with
initial bending and explored the non-resonance and resonance of carbon nanotubes by the shooting
method. Hassen et al. [36] established a clamped-clamped beam model considering the initial bending
and obtained its static and dynamic response using the Galerkin method and MMS. The microbeam
with initial offset imperfections is usually actuated by two electrodes. In this case, the microbeam is
still rectangular. However, the initial offset imperfections can break the symmetry along the transverse
vibrational direction in dynamic MEMS devices. Mobki et al. [37] discussed the influence of the initial
offset imperfections on the static bifurcation of a MEMS resonator. Han et al. [38] considered the
effect of initial offset imperfections on the mechanical behaviors of microbeam. The global static and
dynamic analysis of the microresonator is carried out using MMS and the finite difference method.
Results show that the initial offset may induce a complex frequency rebound phenomenon, and there
exists the frequency response in the medium and large amplitude in-well transitions between softening
and hardening behaviors. Although these two kinds of error forms have a great influence on the
mechanical properties of the system, the microbeam model is still an equal section beam. The error
caused due to the accuracy of surface machining will change the width or thickness of the microbeam.
Such dimensional changes affect the structural stiffness and electrostatic force, so it is necessary to
study these. However, the influence of such errors on the shape of the microbeam is random. Therefore,
scholars usually do smoothing processing by setting up the parametric equation model and adjusting
the shape of the microbeam by changing the parameters. Herrera [39] studied the resonant behavior
of a single-layered variable section microbeam. Furthermore, scholars have attempted to optimize
the MEMS device by optimizing the equation parameters. Joglekar and Trivedi [40,41] proposed
a versatile parametric width function, which can smoothly vary the width of a clamped-clamped
microbeam along its length. The parameters of the width function are optimized, and the methodology
is demonstrated in several cases [40,41]. On this basis, Zhang [42] discussed the effects of the optimized
shape on the dynamic response of the microbeam. Few researchers have considered the influence of
variations in microbeam thickness on the mechanical behavior. Kuang and Chen [43] investigated
the effect of shaping the thickness of a microactuator and gap distance on its natural frequencies.
Their study concluded that the shape variation could significantly alter the dynamic behavior of the
microbeam. In particular, the working voltage range was increased six times as compared to a uniform
rectangular cross-section microbeam with a flat electrode. Najar et al. [27,44] simulated and analyzed
the deflection and motion of variable section beams in MEMS devices, and the effect of changing their
geometrical parameters on the static bifurcation and frequency response was observed. However, only
single-sided section changes were considered in their study. The sections of the microbeam both change
up and down by taking into account the actual processing result. One section change is merely applied
to special cases. Therefore, in this paper, simultaneous changes in two sections of the microbeam
are considered to ensure that the obtained research models will be closer to reality. In addition, only
the static pull-in voltage and frequency response were studied in [27,44]. The nonlinear softening
and hardening behaviors, spring softening and other non-linear behaviors are still unclear. It is also
essential to study the scope of applications of the theoretical analysis. In this work, the influence
of processing error on the nonlinear softening and hardening behaviors, electrostatic softening and
dynamic behavior with a large amplitude are analyzed.
The structure of this paper is as follows. In Section 2, the model (partial differential equations)
based on the electrostatically-driven microbeam considering the size effect is given. A parameter
is proposed for describing the variations in the microbeam section to study the degree of influence.
The Galerkin method and Newton–Cotes method are applied to transform the original equation into
the ordinary differential equation. In Section 3, the effects of section parameters and gap distance
on the static pull-in and safety area are discussed. In Section 4, the MMS is applied to determine
the response of the system under small amplitude vibrations. The relationship between section
parameters and nonlinear characteristics and the relationship between the section parameters and the
transitions between softening and hardening are discussed. In Section 5, the results obtained using
Micromachines 2018, 9, 34 4 of 19
Micromachines 2018, 9, 34 4 of 19
2. Mathematical Model

COMSOL (COMSOL
2.1. Governing EquationInc., Stockholm, Sweden) simulations are presented to verify the theory. Finally,
the summary and conclusions are presented in the last section.
In this paper, a model considering the effect of surface machining error on the thickness of the
microbeam
2. Mathematical is studied.
Model The bending vibration equation of the system is obtained through
force analysis.
2.1. Governing Equation
The schematic diagram of microbeam is shown in Figure 1. The thickness of the microbeam is
not constant due to the
In this paper, a modelprocessing errors.
considering theIneffect
this study, a section
of surface parameter
machining errorλ on
is proposed. The of
the thickness shape
the
of the microbeam
microbeam is The
is studied. controlled
bendingbyvibration
adjusting the value
equation ofsystem
of the sectionis parameter λ. When
obtained through forceλ analysis.
< 0, the
thickness of two clamped
The schematic diagramends is greater is
of microbeam than the in
shown thickness
Figure 1.ofThe
the thickness
middle portion. When λ > is
of the microbeam 0, not
the
thickness gradually decreases from the middle to both of the clamped ends. The λ =
constant due to the processing errors. In this study, a section parameter λ is proposed. The shape of 0 case is the ideal
casemicrobeam
the where the issection beamby
controlled thickness
adjustingis the
uniform.
value of section parameter λ. When λ < 0, the thickness
Since the pull-in behavior will cause structural
of two clamped ends is greater than the thickness of the damage,
middle such instability
portion. Whenshould
λ > 0, be
theavoided
thickness in
microresonators. Stability can be ensured by considering the impact of processing
gradually decreases from the middle to both of the clamped ends. The λ = 0 case is the ideal case errors on the
pull-inthe
where effect.
section beam thickness is uniform.

Figure1.1. Schematic
Figure Schematic ofofan
anelectrically-actuated
electrically-actuated microbeam.
microbeam. (a)
(a) λλ >> 00 case.
case. (b)
(b) λλ<< 00case.
case. The
The dotted
dotted
line in red is the ideal section location of the beam.
line in red is the ideal section location of the beam.

h πx
Since
The the pull-in behavior
thickness of the will cause structural
microbeam changes damage, to y1 (x)=should
such instability
according + λ hbesinavoidedand
in
2
microresonators. Stability can be ensured by considering the impact of processing errors on the L
h πx
pull-in {−} ( + λh sin ) after considering the effect of surface processing
y2 (x)= effect. error. y1(x) is a function
2
The thickness L microbeam changes according to y1 ( x ) = h + λh sin πx and y2 ( x ) =
of the 2 L
{−}( h
consisting+ of
λh sin
the
πx
)
curve

AA
after considering
, and y 2(x) is the
a effect
function of surface
consisting processing
of the curve
A A
error. . y
As1 (x) is a function
shown in Figure
2 L 1 2 3 4
_ _
consisting
1, A1, A2 and of the
A3,curve A1 A2 , and
A4 represent the yend
2 (x) points
is a function
at the consisting
upper and of the curve
lower A3 Arespectively.
sections, 4 . As shownThein
Figure 1, A1λ, Awill
parameter 2 andbeA , A represent
investigated
3 4 to the end
observe points
its at
impact the
onupper
the and lower
system. Thesections, respectively.
cross-sectional area
The parameter λ will π xbe investigated to observe its impact on the system. πx The cross-sectional area
A( x) = A0 (1 + 2λ sin( ))πx and moment of inertia I ( x) = I 0 (1 + 2λ sin( ))3 πxare3calculated from y1(x)
A( x ) = A 0 ( 1 + 2λ sin (
L L )) and moment of inertia I ( x ) = I0 ( 1 + 2λ sin
L ( L )) are calculated from
3
y1 (x) and y2 (x). A0 = bh and Ibh 3 bh
0 = 12 are the area and the moment of inertia of the two clamped sides,
and y 2(x). A0 = bh and I 0 = are thethe
area andofthe
respectively. L and b are the length 12 and width themoment
microbeam,of inertia of the htwo
respectively. clamped
is the sides,
thickness of
the microbeam
respectively. L at theb clamped
and are the length c is the
ends. and the damping
width of coefficient system. d is the
of therespectively.
the microbeam, h isdistance from
the thickness
the board to the x-axis. E is the effective Young’s modulus, and is the material
of the microbeam at the clamped ends. c is the damping coefficient of the system. d is the distance
ρ density. The actuation
of
fromthe the
clamped-clamped microbeam
board to the x-axis. E is theiseffective
realized by using modulus,
Young’s and V
a bias voltage ρ DC andmaterial
is the AC voltage V AC The
density. cos
(Ωt). Ω is the
actuation alternating
of the current excitation
clamped-clamped microbeam frequency.
is realizedIn the
bymicroresonator, V AC V
using a bias voltage isDC
farand
lessAC
than V DC .
voltage
is cos
εV0 AC the dielectric constant in the free space,
(Ωt). Ω is the alternating current excitationand ε r is the relative permittivity of the gap space medium
frequency. In the microresonator, VAC is far less
with
than respect
VDC. ε0 to is the
the free space.constant in the free space, and εr is the relative permittivity of the gap
dielectric
space The equation
medium of respect
with motion to that
thegoverns the transverse deflection y(x,t) is written as [27]:
free space.
The equation of motion that governs the transverse deflection y(x,t) is written as [27]:
Z1
∂2 ∂2 y ∂2 y ∂y E ∂y 2 ∂2 y2 ε 0 ε r b[VDC + VAC cos(Ωt )]2
( EI ( ∂
x 2
) ) + ∂
ρA2
y ( x ) + ∂c2
y = ∂ y EA 1
( x )( ∂)y dx ∂ +
y ε ε b [V DC + V AC cos( Ω t )] 2
(1)
∂x2
∂x 2
∂x 2 ( x)
( EI
∂x 2
) + ρ∂tA2( x ) ∂t
∂t 2
∂t
+ c 2L=
0 2L 0
 A( x∂x
)( ) 2 dx∂x2 2 + 0 r 2(d − y1 ( x ) − 2y)2
∂x ∂x 2( d − y1 ( x ) − y )
(1)
Micromachines 2018, 9, 34 5 of 19

The first term on the right-hand side of Equation (1) represents the mid-plane stretching effects,
and the second term represents the electrostatic force. The following are the boundary conditions:

∂y(0, t) ∂y( L, t)
y(0, t) = = 0, y( L, t) = =0 (2)
∂x ∂x

The range of the parameter 6(d/h)2 is around 6(d/h)2 ∈ [0.1, 10] in the equal cross-section
microbeam resonator [1]. It can be deduced from 6(d/h)2 ∈ [0.1, 10] that the ratio of the gap distance
to the microbeam thickness ranges from 0.13–1.3 in equal cross-section microbeam resonator. After
adding the parameter λ, the thickness and the gap distance become h + 2λh and d – λh, respectively.
Therefore, the ratio becomes 0.13 ≤ hd+−2λh
λh
≤ 1.3. Besides, the range of λ should satisfy the physical
model. When the upper and lower sections of the microbeam are becoming thinner, the change of
section λh cannot exceed the microbeam’s neutral surface, which is λh > − 2h . The change of section
cannot contact the plate when the microbeam section is becoming thicker, which is λh < d − 2h .
Therefore, the ranges are as follows:
(
0.13 ≤ hd+−2λh
λh
≤ 1.3
(3)
− 2 < λh < d − 2h
h

It can be understood from Equation (3) that when λ = 0, the range of d/h is 0.12 ≤ d/h ≤ 1.3.
By simplification:
d d
− 0.3 ≤ 0.27 − 0.37 ≤ λ ≤ 0.79 − 0.10 ≤ 0.9 (4)
h h
For convenience, the following non-dimensional quantities are defined:
_ _ _ _ _
_ _ y _ y (x) _ y (x) A( x ) I (x) _ Ωt
x = Lx , b = db , y = d , y 1 = 1d , y 2 = 2d , A ( x ) = A0 , I ( x ) = I0 , t = t
T,ω = _ ,
q4 t (5)
l ρA0 cL4 ε 0 ε r bl 4 VDC 2 d 2
T= EI0 , µ = EI0 T , α1 = 2EI d3
,ρ = VAC
VDC , α2 = 6( h )
0

Substituting Equation (5) into Equations (1) and (2), the following non-dimensional equation of
motion can be obtained:
_ _ _ Z1 _ 2 _
∂2 _ ∂2 y _ ∂2 y ∂y _ ∂y ∂2 y α1
2
( I ( x ) 2 ) + A( x ) 2 + µ _ − α2 A( x )( _ ) dx 2 = (6)
_ _ _ _ _ _ 2
∂x ∂x ∂t ∂t 0
∂x ∂x (1 − y 1 ( x ) − y )

with boundary conditions:

_ _ _ _
_ _ ∂ y (0, t ) _ _ ∂ y (1, t )
y (0, t ) = _ = 0, y (1, t ) = _ =0 (7)
∂x ∂x
In the following simplifications, the “ˆ” notation is dropped for convenience.

2.2. Galerkin Expansion

The Galerkin method is applied to derive a reduced-order model, and the deflection is
expressed as:
∞
y( x, t) = ∑ ui (t)φi (x) (8)
i =1

The boundary conditions are as follows:

φi (0) = φi (1) = φi 0 (0) = φi 0 (1) = 0 (9)

Micromachines 2018, 9, 34 6 of 19

where ui (t) is the modal coordinate amplitude of the i-th mode. φi ( x ) is the i-th mode shapes of
the normalized undamped linear orthonormal. For an electrostatic actuated microbeam, a single
degree-of-freedom model is sufficient to capture all the key nonlinear aspects in the Galerkin
approximation [25]. However, the one-mode approximation cannot capture the mode coupling effect or
internal resonances. These phenomena can be predicted to obtain a reasonable result by implementing
the number of modes. Nevertheless, the analysis becomes computationally expensive. Since the main
objective of this paper is to explore the main resonance problem in the nonlinear dynamics problem,
the first-order mode is sufficient to obtain good results. In this paper, the first-order modal vibration
y( x, t) = u(t)φ( x ) is assumed. Substitute Equation (8) into Equation (6). Upon multiplying by φi ( x )
and integrating, the outcome is from x = 0 to 1, and one can obtain the following equation:
.. . R1 φ( x ) R1 φ( x )
u + µ u + k 1 u − α2 k 3 u3 = α1 0 (1−y1 ( x )−φ( x )u)2 dx + 2α1 ρ cos( ωt ) 0 (1−y1 ( x )−φ( x )u)2 dx
R1 φ( x )
(10)
+α1 ρ2 cos2 (ωt) 0 dx
(1−y1 ( x )−φ( x )u)2

.
where u = du/dt. The symbolic meanings of µ, k1 and k2 are discussed in Appendix A.

2.3. Newton–Cotes Method

The integral of the electrostatic force in Equation (10) is complicated; therefore, the Newton–Cotes
method is applied to fit the electrostatic force.
b] is divided into n equal divisions. The step length is set as ∆h = b−ea . The
a,e
The integral interval [e
e
n
node is xk = e
a + k∆h, where k = 0, 1, 2, . . . , n. The interpolation type quadrature formula is as follows:
Z eb n
φ( x ) φ( xk )
a) ∑ Ck
(n)
2
b−e
dx = (e (11)
a
e (1 − y1 ( x ) − φ ( x ) u ) k =0 (1 − y1 ( x k ) − φ ( x k ) u )2

(n) 1
R eb R eb (x−x j )
where Ckn is the Cotes coefficient, Ck = a lk ( x ) dx, lk ( x ) = a ∏ ( xk − x j )
dx.
b −e
e a e e
j6=k
Using the equipartition of nodes, the coordinates are transformed using x = e
a + t∆h. Using this
transformation, the Cotes coefficients can be simplified further as:

∆h n
(−1)n−k 1 n
Z n Z 1
(t − j)
∏ ∏
(n)
Ck = dt = (t − j)dt (12)
b−e
e a 0 (k − j) k!(n − k)! n 0
j=0 j=0
j 6= k j 6= k

Through Equations (10)–(12), the simplified mathematical equation can be obtained.

.. . 0.61α1 0.61
u + µ u + k 1 u − α2 k 3 u3 = + 2α1 ρ cos(ωt)
(1−δλ−1.48u)2 (1−δλ−1.48u)2
0.61 (13)
+α1 ρ2 cos2 (ωt)
(1−δλ−1.48u)2

where δ = h/d. It should be noted here that the maximum lateral displacement of the microbeam is at
the midpoint viz., ymax = φ(0.5)u ∈ [λδ, 1 − λδ]. At the middle point of microbeam, the value of the
λδ 1−λδ
modal function is φ(0.5) = 1.59. Therefore, the range of u is u ∈ [ 1.59 , 1.59 ]. The degree of matching is
illustrated in Figure 2. The displacement is shown along the transverse coordinate and the electrostatic
force along the ordinate.
Micromachines 2018, 9, 34 7 of 19

is illustrated
Micromachines in9,Figure
2018, 34 2. The displacement is shown along the transverse coordinate and
7 ofthe
19
electrostatic force along the ordinate.

Figure 2. Contrast diagram of fitting curves under different section parameters. The circle is calculated
Figure 2. Contrast diagram of fitting curves under different section parameters. The circle is calculated
using the numerical solution. The line is calculated using the Newton–Cotes method.
using the numerical solution. The line is calculated using the Newton–Cotes method.

3. Static Analysis
3. Static Analysis
The equilibrium position and the maximum pull-in voltage of MEMS can be found through static
The equilibrium position and the maximum pull-in voltage of MEMS can be found through
analysis. The geometric parameters of the microbeam are L = 400 μm, b = 45 μm, d = 2 μm, h = 2 μm,
static analysis. The geometric parameters of the microbeam are L = 400 µm, b = 45 µm, d–12 = 2 µm,
E = 165 GPa, ρ = 2.33 × 103 kg/m3 3and the dielectric constant in free space ε0 = 8.85 × 10 . Then,
h = 2 µm, E = 165 GPa, ρ = 2.33 × 10 kg/m and the dielectric constant in free space ε0 = 8.85 × 10−12 .
3
–0.1 ≤ λ ≤ 0.69 can be obtained from Equation (4). By removing the time-related items in Equation
Then, −0.1 ≤ λ ≤ 0.69 can be obtained from Equation (4). By removing the time-related items in
(13), the static response of the microresonator under the DC voltage actuation can be obtained.
Equation (13), the static response of the microresonator under the DC voltage actuation can be obtained.
0.61α 1
k1u s − α 2 k3 u s3 = 0.61α (14)
3
k 1 u s − α2 k 3 u s = (1 − δλ 1 u )2
− 1.48 s (14)
2
(1 − δλ − 1.48us )
The relationship between the transverse displacement and DC voltage of the microbeam under
The relationship
different betweeninthe
sections is shown transverse
Figure 3a. With displacement
an increase andofDCλ, voltage of thedistance
the motion microbeamus 2 under
of the
different sections is shown in Figure 3a. With an increase of λ, the motion distance us2 of the microbeam
microbeam gradually decreases. However, us 2 has only a mathematical meaning and does not have
gradually decreases. However, us2 has only a mathematical meaning and does not have any physical
any physical significance. In addition, the pull-in voltage and the pull-in location decreases as the λ
significance. In addition, the pull-in voltage and the pull-in location decreases as the λ increases. This
increases. This is because the thickness of the beam increases as λ increases. As a result, the distance
is because the thickness of the beam increases as λ increases. As a result, the distance between the
between the plate and the microbeam section decreases, which causes the axial movement distance
plate and the microbeam section decreases, which causes the axial movement distance to decrease
to decrease resulting in pull-in. The influence of gap distance d on the static bifurcation is shown in
resulting in pull-in. The influence of gap distance d on the static bifurcation is shown in Figure 3b.
Figure 3b. It can be seen from this figure that the equilibrium point us 2 is almost unchanged. The
It can be seen from this figure that the equilibrium point us2 is almost unchanged. The pull-in location
increaseslocation
pull-in slowly increases slowly with
with the increase of d, the
andincrease
this effect of d,
is and this effect
opposite that ofisλ.
opposite thatthe
Therefore, of λ. Therefore,
study of the
the study of the relationship between λ and d is very necessary. The operating
relationship between λ and d is very necessary. The operating voltage range of the microresonator voltage range ofcan
the
microresonator can be predicted through analysis. When V DC = 25 V, several cases are selected to
be predicted through analysis. When V DC = 25 V, several cases are selected to observe in Figure 4, and
observe
the yellowin regions
Figure 4,are
and thestable
the yellow regionsItare
regions. canthe be stable
foundregions. It can be found
that λ promotes that λphenomenon,
the pull-in promotes the
pull-in phenomenon, whereas d inhibits the pull-in occurrence. The results
whereas d inhibits the pull-in occurrence. The results are consistent with the situation in Figure are consistent with
3. the
situation in Figure 3.
pull-in location increases slowly with the increase of d, and this effect is opposite that of λ. Therefore,
the study of the relationship between λ and d is very necessary. The operating voltage range of the
microresonator can be predicted through analysis. When VDC = 25 V, several cases are selected to
observe in Figure 4, and the yellow regions are the stable regions. It can be found that λ promotes the
pull-in phenomenon,
Micromachines 2018, 9, 34 whereas d inhibits the pull-in occurrence. The results are consistent with the
8 of 19
situation in Figure 3.

Micromachines 2018, 9, 34 8 of 19

Figure3.3.Relationship
Figure Relationshipbetween
betweenthe theDC
DCvoltage
voltageand andstatic
staticequilibrium
equilibriumpoint
pointunder
underdifferent
differentphysical
physical
parameters.
parameters.(a)(a)The
Theinfluence
influenceof ofsection
sectionparameters
parameterswith withdd== 2.0 μm;(b)
2.0 µm; (b)the
theinfluence
influenceof ofgap
gapdistance
distance
with
with λλ==0.0. The
The solid
solid lines
lines represent
represent the
thestable
stablesolution.
solution. The
The dashed
dashed lines
lines represent
represent the
the unstable
unstable
solution.
solution.The
Thedotted
dottedlines
linesare
arealso
alsostable,
stable,but
butititisisimpossible
impossiblefor
forthem
themtotoappear
appearin inthe
thephysical
physicalmodel.
model.

Figure 4. Potential energy curves and the corresponding phase diagrams under different physical
Figure 4. Potential energy curves and the corresponding phase diagrams under different physical
parameters. (a) The potential energy curve under different section parameters with d = 2.0 μm;
parameters. (a) The potential energy curve under different section parameters with d = 2.0 µm;
(b-d) are phase diagrams of λ = –0.1, λ = 0 and λ = 0.1, respectively; (e) the potential energy curve
(b–d) are phase diagrams of λ = −0.1, λ = 0 and λ = 0.1, respectively; (e) the potential energy curve
under different gap distances with λ = 0. (f–h) are the phase diagrams of d = 1.8 μm, d = 2.0 μm and d
under different gap distances with λ = 0. (f–h) are the phase diagrams of d = 1.8 µm, d = 2.0 µm and
d==2.2
2.2μm,
µm,respectively.
respectively.

4. Dynamic Analysis
4. Dynamic Analysis
The resonance frequency and bifurcation behavior can be obtained through dynamic analysis.
The resonance frequency and bifurcation behavior can be obtained through dynamic analysis.
The MMS is used to investigate the response of the microresonator with small vibration amplitude
The MMS is used to investigate the response of the microresonator with small vibration amplitude
around the stable equilibrium positions. Introducing u = u + u , u is the response to DC voltage
around the stable equilibrium positions. Introducing u = uss + Au A , us s is the response to DC voltage
andu u Ais the
and is response
the response
to ACtovoltage.
AC voltage.
The response The response
of DC voltage of DC voltage
us is obtainedu sfrom
is obtained from
Equation (14).
A
Equation (14). u = us + u A into Equation (13), and expand the electrostatic force equation up to
Substitute
Substitute u = us +
third-order via Taylor u A into Equation
expansion; the terms (13), and expandthe
representing theequilibrium
electrostaticposition
force equation up to third-
can be eliminated.
orderV
Since via
ACTaylor expansion;
is far less than VtheDC interms
the representing
microresonator, the equilibrium
the terms VpositionDC = O(1) can V AC = O(ε3 )Since
be eliminated.
and are
VAC is far lessHere,
considered. than εVis in the microresonator,
DC regarded the terms VDC = bookkeeping
as a small non-dimensional O(1) and VAC parameter.
= O(ε3) are considered.
Therefore,
Here, ε is(13)
Equation regarded
can beas a small non-dimensional
modified as: bookkeeping parameter. Therefore, Equation (13) can
be modified as: .. .
u A + ε2 µu A2 + ωn2 u A + aq u A 2 + ac u A 3 = ε3 f cos(ωt) (15)
uA + ε μ u A + ω n2 u A + a q u A 2 + a c u A 3 = ε 3 f cos(ω t ) (15)

The symbolic meanings of ω n a q a c and f are presented in Appendix A.

ω = ω n + ε 2σ (16)

The approximate solution of Equation (15) can be obtained in the following form:
u A ( t , ε ) = ε u A1 (T0 , T1 , T2 ) + ε 2 u A 2 (T0 , T1 , T2 ) + ε 3 u A 3 (T0 , T1 , T2 ) (17)
n
Micromachines 2018, 9, 34 9 of 19

The symbolic meanings of ωn aq ac and f are presented in Appendix A.

ω = ω n + ε2 σ (16)

The approximate solution of Equation (15) can be obtained in the following form:

u A (t, ε) = εu A1 ( T0 , T1 , T2 ) + ε2 u A2 ( T0 , T1 , T2 ) + ε3 u A3 ( T0 , T1 , T2 ) (17)

where Tn = εn t, n = 0, 1, 2.
Substituting Equations (16) and (17) into Equation (15) and equating the coefficients of like powers
of ε, the following equations can be obtained:

O(ε1 ) : D02 u A1 + ωn2 u A1 = 0 (18)

O(ε2 ) : D02 u A2 + ωn2 u A2 = −2D0 D1 u A1 − aq u2A1 (19)

O ( ε3 ) : D02 u A3 + ωn2 u A3 = −2D0 D1 u A2 − 2D0 D2 u A1 − D12 u A1

−µD0 u A1 − 2aq u A1 u A2 − ac u3A1 (20)
+ f cos(ωn T0 + σT2 )

where Dn = ∂T∂ n , n = 0, 1, 2.
The general solution of Equation (18) can be written as:

u A1 ( T0 , T1 , T2 ) = A( T1 , T2 )eiωn T0 + A( T1 , T2 )e−iωn T0 (21)

Substituting Equation (21) into Equation (19), yields:

∂A iωn T0
D02 u A2 + ωn2 u A2 = −2iωn e − aq ( A2 e2iωn T0 + AA) + cc (22)
∂T1

where cc represents the complex conjugate terms.

To eliminate the secular term, one needs:

∂A iωn T0
− 2iωn e =0 (23)
∂T1

which indicates that A is only a function of T2 .

Thus, Equation (22) becomes:

D02 u A2 + ωn2 u A2 = − aq ( A2 e2iωn T0 + AA) + cc (24)

The solution of u A2 can be given as:

aq A2 2iωn T0 aq AA
u A2 ( T0 , T2 ) = e − + cc (25)
3ωn2 ωn2

Substituting Equations (21) and (25) into Equation (20) yields the secular terms:

∂A 10a2q A2 A f
2iωn + µiωn A − + 3ac A2 A − eiσT2 = 0 (26)
∂T1 3ωn 2 2

At this point, it is convenient to express A in the polar form:

1
A= a( T2 )eiβ(T2 ) + cc (27)
2
Micromachines 2018, 9, 34 10 of 19

Substituting Equation (27) into Equation (26) and separating the imaginary and real parts yield:

Da µ f
= − a+ sin ϕ (28)
DT2 2 2ωn

Dϕ 5a2q 3ac f
a = σa + a3 ( 3
− )+ cos ϕ (29)
DT2 12ωn 8ω n 2ω n

where ϕ = σT2 − β.
Da Dϕ
The steady-state response can be obtained by imposing the conditions: DT2 = DT2 = 0. Finally,
the frequency response equation can be derived as follows:

µ 2 2 f 2
a2 (( ) + (σ + a2 κ ) ) = ( ) (30)
2 2ωn

5a2q 3ac
where κ = − 8ω
12ωn3 n
.
The vibration peak value and backbone curve can be decided by amax = f /(µωn ) and
ω = ωn − κamax , respectively. The stability of the periodic solution can be determined by evaluating
the eigenvalues of Jacobian matrix of Equations (28) and (29) at ( a0 , ϕ0 ).

f
− µ2 2ωn cos ϕ0
J= f (31)
2κa0 − 2ωn a20
cos ϕ0 − 2ωfn a0 sin ϕ0

The system is stable if all the eigenvalues are negative; otherwise, the system is unstable [45].
The important dynamic properties of the microresonators include resonant frequency, frequency
response, pull-in behavior, and so on. These properties show a very significant influence on the
performance of microresonators. Therefore, the MMS and numerical analysis are used to observe the
dynamic behaviors of microresonator under the influence of various factors such as different geometric
parameters, external excitation, and so on.

4.1. Dynamic Analysis with Small Amplitude

The soft and hard nonlinearities of the system are related to k. Positive k can lead to a softening-
type behavior, while the negative value can lead to a hardening-type behavior. Meanwhile, when the k
value is approximately zero, i.e., the amplitude is small enough, the system experiences monostable
vibration, i.e., linear-like vibration, which is an ideal state for MEMS designers. From Equation (30),
one can notice that the nonlinear behaviors are affected by geometrical shape and electrostatic forces.
The shape of the section is changed by adjusting the value of λ. Further, the relationship between the
physical parameters and section shape is explored. The following physical quantities are assumed:
L = 400 µm, b = 45 µm, ρ = 2.33 × 103 kg/m3 , E = 165 GPa, dielectric constant ε0 = 8.85 × 10−12 F/m
and the clamped end thickness h = 2 µm. The other variation parameters are listed in Table 1. Next,
the relationship between frequency response and various physical parameters is investigated.
Section changes due to the processing errors will have an impact on the system vibration.
The effect of λ and d on the nonlinear behavior is shown in Figure 5, and the dimensionless damping
coefficient µ = 0.1. V DC = 20.5544 V is obtained by calculating λ = 0 and k = 0. It can be noticed
in Figure 5a,d that both λ and d can change the nonlinear soft and hard behavior. When λ = −0.1,
the system has hard nonlinear characteristics. With the increase of λ, the system transits from hard to
soft nonlinearity. λ = 0 is the dividing line. The parameters λ and d show an opposite effect. The points
P0 , P1 , P2 , P3 and P4 are selected for analysis. Figure 5c,f shows the relationship between DC voltage
and equivalent frequency at different λ and d. It can be seen that at V DC = 0, the larger the value of λ
is, the higher is the equivalent natural frequency. This is because of the increase of system stiffness,
which is caused by the increase of λ. One can see from Figure 5c,f that the pull-in phenomenon could
Micromachines 2018, 9, 34 11 of 19

be promoted with an increase in the value of λ and a decrease in the value of d. At the same time,
with the increase of the DC voltage, the equivalent frequency decreases. There is a significant “spring
softening” phenomenon. The greater the value of λ is, the more obvious the phenomenon becomes.

Table 1. Simulation cases under different parameters.

Case λ d (µm) Dynamic Behavior

P1 −0.1 2 hardening-type vibration
Micromachines 2018, 9, 34 P0 0 2 linear-like vibration 11 of 19
P2 0.1 2 softening-type vibration
P3 P3 00 1.8
1.8 softening-type vibration
softening-type vibration
P4 0 2.0 hardening-type vibration
P4 0 2.0 hardening-type vibration

Figure 5.
Figure 5. Relationship
Relationship between
between DC voltage and mechanical behaviors under under different
different physical
physical
parameters. (a–c) are the
parameters. the relationship
relationship between
between DC DC voltage
voltage and
and nondimensional
nondimensional parameter
parameter k, ĸ, static
static
equilibrium
equilibrium and equivalent
equivalent natural frequency, respectively, under different section parameters
frequency, respectively, under different section parameters with with
dd == 2.0
2.0 µm.
μm. (d–f) areare the
the relationship
relationship between
between DC DC voltage
voltage and
and nondimensional
nondimensional parameter
parameter k, ĸ, static
static
equilibrium and
equilibrium andequivalent
equivalentnatural
natural frequency,
frequency, respectively,
respectively, underunder different
different gap distance
gap distance with λwith
= 0.
λ = 0.
The Thelines
solid solidrepresent
lines represent the stable
the stable solution.
solution. The dashed
The dashed lines represent
lines represent the unstable
the unstable solution.
solution. The
The dotted
dotted linesrepresent
lines also also represent a stable
a stable case, but itcase, but it is for
is impossible impossible for them
them to appear in thetophysical
appear model.
in the
physical model.
To validate the above theoretical results, the frequency responses of five cases shown in Table 1 are
To validate the above theoretical results, the frequency responses of five cases shown in Table 1
studied using MMS. The long-time integration method of Equation (13) is used to obtain the numerical
are studied using MMS. The long-time integration method of Equation (13) is used to obtain the
solutions. The accuracy of the results is verified by comparing both results. The AC excitation
numerical solutions. The accuracy of the results is verified by comparing both results. The AC
amplitude V AC is varied to adjust the maximum amplitude. It can be known from Figure 6a–c that the
excitation amplitude VAC is varied to adjust the maximum amplitude. It can be known from Figure
nonlinear behavior changes from hardening to softening when λ = −0.1, λ = 0 and λ = 0.1. The system
6a–c that the nonlinear behavior changes from hardening to softening when λ = –0.1, λ = 0 and λ =
shows a hard nonlinearity behavior at λ = −0.1. When λ = 0.1, the system shows a soft nonlinearity
0.1. The system shows a hard nonlinearity behavior at λ = –0.1. When λ = 0.1, the system shows a soft
behavior, and λ = 0 is the dividing line, where the vibration is linear.
nonlinearity behavior, and λ = 0 is the dividing line, where the vibration is linear.
In addition to λ, the gap distance d will also affect the frequency response. The parameters λ and
In addition to λ, the gap distance d will also affect the frequency response. The parameters λ and
d affect the soft and hard behavior in the opposite way. The nonlinear behavior changes from soft
d affect the soft and hard behavior in the opposite way. The nonlinear behavior changes from soft
nonlinear to hard nonlinear when d = 1.8 µm, d = 2.0 µm and d = 2.2 µm, as shown in Figure 6a,d,e.
nonlinear to hard nonlinear when d = 1.8 μm, d = 2.0 μm and d = 2.2 μm, as shown in Figure 6a,d,e.
Therefore, adjusting the relationship between d and λ to achieve linear behavior is necessary.
Therefore, adjusting the relationship between d and λ to achieve linear behavior is necessary.
However, this time, the numerical and analytical solutions do not match at point P0 . The numerical
However, this time, the numerical and analytical solutions do not match at point P0. The
solution shows a softening behavior, whereas the analytical solution shows a linear behavior. This
numerical solution shows a softening behavior, whereas the analytical solution shows a linear
situation will be elaborated in detail below.
behavior. This situation will be elaborated in detail below.
Micromachines 2018, 9, 34 12 of 19
Micromachines 2018, 9, 34 12 of 19

Micromachines 2018, 9, 34 12 of 19

Figure 6. Frequency response curve in different situations, i.e., corresponding to cases P0, P1, P2, P3
Figure 6. Frequency response curve in different situations, i.e., corresponding to cases P0 , P1 , P2 , P3
and P4. (a) is the case of P0. (b) is the case of P1. (c) is the case of P2. (d) is the case of P3. (e) is the case
and P4 . (a) is the case of P0 . (b) is the case of P1 . (c) is the case of P2 . (d) is the case of P3 . (e) is the
Figure
of P 4. The6. Frequency
solid response stable
lines represent curve in different The
solutions. situations,
dashedi.e., corresponding
lines to cases solutions.
represent unstable P0, P1, P2, PThe
3
case of P4 . The solid lines represent stable solutions. The dashed lines represent unstable solutions.
and P . (a) is the case of P . (b)
point represents the numerical solution.
4 0 is the case of P1 . (c) is the case of P 2. (d) is the case of P 3. (e) is the case
The point represents the numerical solution.
of P4. The solid lines represent stable solutions. The dashed lines represent unstable solutions. The
point represents
4.2. Dynamic the numerical
Analysis with solution.
Large Amplitude
4.2. Dynamic Analysis with Large Amplitude
With
4.2. Dynamican increase
Analysisof ACLarge
with voltage, the MEMS resonator may undergo large amplitude vibration.
Amplitude
With an increase of AC voltage, the MEMS resonator may undergo large amplitude vibration.
When the AC voltage is increased to beyond a certain value, the analytical and numerical solutions
When the With AC anvoltage
increaseisof AC voltage,
increased the MEMS
to beyond resonator
a certain value, may theundergo
analytical large
and amplitude
numerical vibration.
solutions
will not match, for example, corresponding to the point P0 in Figure 6a. This phenomenon will be
When the AC voltage is increased to beyond a certain value, the
will not match, for example, corresponding to the point P in Figure 6a. This phenomenon will be analytical and numerical solutions
analyzed in detail in Figure 7. In addition, the VDC = 15 V0 and VDC = 23 V cases are considered to
will notinmatch,
analyzed detailforin example,
Figure 7. corresponding
In addition, the to Vthe point
= 15 PV0 andin Figure
V DC = 6a.23This phenomenon
V cases will be to
are considered
observe
analyzed theinphenomenon
detail in Figure in the In soft and hardVDC nonlinearity cases. 23The amplitude of vibration
observe the phenomenon in the7.soft addition,
and hard the DC = 15 V
nonlinearity and The
cases. V DC = V cases
amplitude ofare considered
vibration to
increases,
increases,
observe i.e.,
the shifts from left to
phenomenon in right,
the when
soft thehard
and AC voltage
nonlinearityis adjusted.
cases. When
The the vibration
amplitude of amplitude
vibration
i.e., shifts from left to right, when the AC voltage is adjusted. When the vibration amplitude is small,
is small, the i.e.,
numerical andleft
analytical solutions match veryiswell. When the theamplitude is close to u =
theincreases,
numerical shifts
and from
analytical to right, when
solutions matchthevery
AC voltage
well. When adjusted. When
the amplitude vibration
is close toamplitude
u = 0.2, this
0.2,is this
small, difference
the numerical between the solutions
and analytical begins
solutions match to very
appear.
well. This
Whenphenomenon
the amplitudeshows is closethat
to u =the
difference between the solutions begins to appear. This phenomenon shows that the softening effect
softening
0.2, this difference between the solutions begins to appear. This phenomenon shows thatTaylor
effect of analytic solutions is weakened. This is because the higher order terms in the the
of analytic solutions is weakened. This is because the higher order terms in the Taylor expansion
expansion
softeningofeffectthe ofelectrostatic force equation
analytic solutions is weakened.are This
omitted during
is because thethe simplification
higher order termsprocess. These
in the Taylor
of the electrostatic force equation are omitted during the simplification process. These higher order
higher order terms
expansion of the are negligibleforce
electrostatic when the amplitude
equation are omittedis small.
duringHowever, as the amplitude
the simplification process.increases,
These
terms are negligible when the amplitude is small. However, as the amplitude increases, these terms
these terms
higher are terms
order not negligible; especially
are negligible when the the amplitude
frequencyis response in the redasframe,
small. However, which transits
the amplitude increases,from
are not negligible; especially the frequency response in the red frame, which transits from hardening
these terms are not negligible; especially the frequency response in
hardening to softening behavior. When the vibration amplitude reaches around u = 0.3 and as the DCthe red frame, which transits from
to softening
hardening behavior.
to softening When the vibration
behavior. When theamplitude
vibration reaches around
amplitude reaches uaround
= 0.3 and as and
the DC
u = structural
0.3 voltage
as the DC
voltage increases, the influence of electrostatic force nonlinearity exceeds the stiffness
increases,
voltage the influence ofinfluence
increases, electrostatic force nonlinearity exceeds theexceedsstructural the stiffness nonlinearity.
nonlinearity. At thisthe of electrostatic
time, the electrostatic force force
plays nonlinearity
a leading role. During structural
sweep stiffness
frequency
At nonlinearity.
this time, the At electrostatic
time,force
thisresonator the atplays a leading
electrostatic role.
force During
plays sweeprole.
a leading frequency response analysis, the
response analysis, the the point of P may generate two kindsDuring sweep
of motion. Thefrequency
motion is
resonator
response at analysis,
the pointthe of Presonator
may generate two
at themotion kinds
point of
oftoPthe
maymotion.
generateThetwo motion
kinds is of
dynamic
motion.pull-in instability
The motion is
dynamic pull-in instability or jumping upper stable branch.
or dynamic
jumping pull-in
motioninstability
to the upper stable branch.
or jumping motion to the upper stable branch.

Figure 7. Cont.
Micromachines 2018, 9, 34 13 of 19
Micromachines 2018, 9, 34 13 of 19

Micromachines 2018, 9, 34 13 of 19

Figure 7. The frequency response changes with AC voltage at λ = 0. The DC voltages are VDC = 15 V,
Figure 7. The frequency response changes with AC voltage at λ = 0. The DC voltages are V DC = 15 V,
VDC = 20.5544 V and VDC = 23 V, respectively, from top to bottom in the figure. The solid lines represent
V DC = 20.5544 V and V DC = 23 V, respectively, from top to bottom in the figure. The solid lines
stable solutions.
Figure 7.
The dashed lineschanges
The frequency
represent unstable solutions. The point represents aVDC
numerical
represent stable solutions.response
The dashed lineswithrepresent
AC voltageunstable
at λ = 0. The DC voltages
solutions. The are
point = 15 V,
represents
solution.
V DC = 20.5544 V and VDC = 23 V, respectively, from top to bottom in the figure. The solid lines represent
a numerical solution.
stable solutions. The dashed lines represent unstable solutions. The point represents a numerical
The frequency response in the red frame is further considered for a detailed analysis; similarly,
solution.
theThe
twofrequency
models forresponsethe λ = –0.1 in the
andred λ =frame
0.1 casesis further
are selectedconsidered for a detailed
for analysis. It can be seen analysis;
fromsimilarly,
Figure
the8two
thatThemodels
in the for of
case
frequency thesection
λ = –0.1
response and
parameter
in theλred=λ0.1 cases
= 0,
frame is are
when the
furtherselected
AC for analysis.
voltage
considered amplitude It can
for a detailed VAC be seenV,from
≥analysis;
0.22 the Figure 8
system
similarly,
shows
thatthe thea case
in two jump
modelsofinsection
thethe
for frequency
= –0.1response.
λparameter andλλ== 0, The
0.1when vibration
cases the
are AC amplitude
voltage
selected becomes
amplitude
for analysis. It large
V AC
can ≥seen
bewith the
0.22 increase
V,
from the of
system
Figure
V8ACthat
shows , abutinthe
jump theinjumptheof
case point
frequency
sectiondoes not change.
response.
parameter λ =TheThe
0, effecttheofAC
vibration
when the sectionamplitude
amplitude
voltage parameter
becomesVlarge on
AC ≥jump with
0.22 phenomena
V, the systemis of
theincrease
shown
V ACshows
, but the in Figure
a jump
jump 9.
theThe
in point increase
frequency
does of λ willThe
notresponse.
change. promote
The effectthe
vibration occurrence
of amplitude of
the sectionbecomes the jump
parameter largeon phenomenon.
withjump thephenomena On of
increase the is
contrary,
VAC, in
shown when
butFigure
the jump λ is
9. The small,
point a higher
does not
increase voltage
ofchange. is needed
The effectthe
λ will promote to
of theobserve a similar
section parameter
occurrence behavior.
of the jump on jump At the same
phenomena
phenomenon. time,
On is the
the system
shown
contrary, when will
in Figure generate
λ is 9.
small, amore
The increase
higher energy output.
ofvoltage
λ will promote
is needed thetooccurrence
observe a of the jump
similar phenomenon.
behavior. At the same On the time,
The
contrary, frequency
when λ is is selected
small,
the system will generate more energy output. a near
higher the
voltagejump is point
needed intoeach case,
observe a and the
similar corresponding
behavior. At the time
same history
time,
curves
the system are shown in Figures
will generate more9–11.
energy By output.
setting different initial value x0, the displacement of all stable
The frequency is selected near the jump point in each case, and the corresponding time history
solutions can be obtained.
The frequency is selected If near
theretheisjump no hardening-to-softening
point in each case, and the behavior, the vibration
corresponding of the
time history
curves are shown in Figures 9–11. By setting different initial value x0 , the displacement of all
curves arewill
resonator shown
appear in Figures
from one 9–11.
stableBysolution
setting different
to two stable initialsolutions
value x0,inthe thedisplacement
vicinity of theofjump all stable
point
stable solutions can be obtained. If there is no hardening-to-softening behavior, the vibration of
SN1 as shown in Figure 9. The case of two stable solutions appears after jump point SN1. Ifthe
solutions can be obtained. If there is no hardening-to-softening behavior, the vibration of the
the resonator will appear from one stable solution to two stable solutions in the vicinity of the jump
resonator will appear from
hardening-to-softening one stable
behavior solution
appears, the to two stable
solution casesolutions
is the same in the vicinity
as the of the jump
one shown point 9
in Figure
point
SN1 SN1 as as shown in in Figure 9. 9. The case of of two stable solutions appears after jump point SN1. If the
when theshown
nonlinearity Figureis weak. TheOncase two
the contrary, stable
in this solutions
situation, appears
the twoafterstable jump point
solutions SN1.
case If the
appears
hardening-to-softening
hardening-to-softening
before the jump point SN1, behavior
behavior appears,
appears,
as shown the solution
the solution
in Figure 10. When case
case is is
the the
the same as
same as theisone
nonlinearity the one shown
shown
strong as in Figure 9in 9
in
depictedFigure
whenwhenthethe
Figure nonlinearity
11, there will is
nonlinearity weak.
beis weak.On
three Onthe
stable the contrary,
contrary,atin
solutions this situation,
inmost,
this situation, thetwo
the
and it changes two stable
stable
into two solutions
solutions
stable case case appears
appears
solutions after
before
before jump
the jump point
point SN1,
the jump at the SN2 point. As the frequency increases, the stable solution finally returns to one. in in
the SN1, as asshown
shown inin Figure
Figure 10.
10. When
When the
the nonlinearity
nonlinearity is is strong
strong as as depicted
depicted
Figure
Figure11, 11,
there willwill
there be three
be threestable
stablesolutions
solutions at at
most,
most, andandit itchanges
changesinto intotwo
twostable
stablesolutions
solutions afterafter the
the jump at the SN2 point. As the frequency increases, the
jump at the SN2 point. As the frequency increases, the stable solution finally returns to one. stable solution finally returns to one.

Figure 8. The changes in frequency response as AC voltage increases at λ = 0. (a) is the case of VAC =
210 mV. (b) is the case of VAC = 220 mV. (c) is the case of VAC = 230 mV. The solid lines represent stable
Figure 8. The changes in frequency response as AC voltage increases at λ = 0. (a) is the case of VAC =
solutions.
Figure 8. TheThe dashed
changes lines represent
in frequency unstable
response as ACsolutions. The point
voltage increases atrepresents
λ = 0. (a) isthe
thenumerical solution.
case of VAC = 210 mV.
210 mV. (b) is the case of VAC = 220 mV. (c) is the case of VAC = 230 mV. The solid lines represent stable
(b) is the case of VAC = 220 mV. (c) is the case of VAC = 230 mV. The solid lines represent stable solutions.
solutions. The dashed lines represent unstable solutions. The point represents the numerical solution.
The dashed lines represent unstable solutions. The point represents the numerical solution.
Micromachines 2018, 9, 34 14 of 19
Micromachines 2018, 9, 34 14 of 19
Micromachines 2018, 9, 34 14 of 19

Micromachines 2018, 9, 34 14 of 19

Figure 9. Phase diagram and the corresponding time history curve at λ = –0.1. The solid lines represent
Figure Phasediagram
Figure 9. Phase diagram and
and thethe corresponding
corresponding timetime history
history curvecurve
at λ =at λ =The
–0.1. −0.1.
solidThe
linessolid lines
represent
stable solutions. The dashed lines represent unstable solutions. The point represents the numerical
represent stable solutions.
stable solutions. The dashedThe dashed
lines lines represent
represent unstable solutions.
unstable solutions. The point The point represents
represents the
the numerical
solution.
Figure 9. Phase diagram and the corresponding time history curve at λ = –0.1. The solid lines represent
numerical
solution. solution.
stable solutions. The dashed lines represent unstable solutions. The point represents the numerical
solution.

Figure 10. Phase diagram and the corresponding time history curve at λ = 0.1. The solid lines represent
Figure 10. Phase diagram and the corresponding time history curve at λ = 0.1. The solid lines represent
Figure
stable 10. 10.Phase
solutions.
Figure Phasediagram
The dashed
diagram and the
lines
and the corresponding
represent timetime
unstable
corresponding history
solutions.
history curve
curveThe
at at The
λ point
= 0.1. =solid
0.1. lines
represents
λ Thethe solid lines
numerical
represent
stable solutions. The dashed lines represent unstable solutions. The point represents the numerical
represent
solution. stable solutions.
stable solutions. Thelines
The dashed dashed lines represent
represent unstableThe
unstable solutions. solutions. The point
point represents therepresents
numericalthe
solution.
numerical solution.
solution.

Figure 11. Phase diagram and the corresponding time history curve at λ = 0. The solid lines represent
Figure 11. Phase
Figure Phasediagram and
diagram andthethe
corresponding timetime
corresponding history curvecurve
history at λ = at
0. The
λ = solid linessolid
0. The represent
lines
Figure 11.solutions.
stable Phase diagram and the
The dashed corresponding
lines time solutions.
represent unstable history curve
The at λ = represents
point 0. The solid
thelines represent
numerical
stable solutions.
represent The dashed
stable solutions. lines
The represent
dashed unstable solutions.
lines represent The point The
unstable solutions. represents the numerical
point represents the
stable solutions. The dashed lines represent unstable solutions. The point represents the numerical
solution.
solution. solution.
numerical
solution.
 Micromachines 2018, 9, 34 15 of 19
Micromachines 2018, 9, 34 15 of 19

5. 5.
Finite Element
Finite Verification
Element Verification
Static
Static and
anddynamic
dynamicanalyses
analysesofofthe
thesystem
system were
were carried out through
carried out throughthethemathematical
mathematicalmodel modelininthe
the previous research. The influence of surface machining error and gap distance
previous research. The influence of surface machining error and gap distance on the nonlinear vibration on the nonlinear
vibration was obtained.
was obtained. However,However,
the resultsthe results arenot
are obviously obviously
convincing notsince
convincing since
the analysis thecarried
was analysis outwas
using
carried
the mathematical model alone. In this section, the following physical quantities are assumed: L = 400are
out using the mathematical model alone. In this section, the following physical quantities µm,
assumed:
b = 45 µm, L = d400
= 2μm,µm,b ρ= =452.33
μm,×d10 = 32 kg/m
μm, ρ3=, E2.33 × 10GPa,
= 165
3 kg/m3, E = 165 GPa, dielectric constant
dielectric constant ε0 = 8.85 × 10−12εF/m 0 =

8.85
and× 10 –12 F/m and the clamped end thickness h = 2 μm. The finite element simulations of the several
the clamped end thickness h = 2 µm. The finite element simulations of the several λ values are
λ carried
values areout carried out usingsoftware.
using COMSOL COMSOL Thesoftware. The module
module used used foristhis
for this analysis the analysis is the MEMS
MEMS module, and the
module,
electricaland the electrical
physical physicalisfield
field interface interface
selected. The is selected.
interface The interface
combines solid combines
mechanicssolid mechanics
and electrostatics
and electrostatics
with the dynamicwith gridstheto dynamic
model thegrids to model
deformation of the deformation of an electrostatically-actuated
an electrostatically-actuated structure. The number
structure. The number of degrees of freedom
of degrees of freedom for solving this system is 31,185. Some for solving this system behaviors
nonlinear is 31,185. such
Someasnonlinear
the pull-in
behaviors such as the pull-in effect and the electrostatic force softening effect are
effect and the electrostatic force softening effect are simulated in the real situation. The simulation simulated in the real
of the
situation. The simulation of the pull-in voltage is carried out in the steady-state solver.
pull-in voltage is carried out in the steady-state solver. The simulation of electrostatic force softening The simulation
offirst
electrostatic
proceedsforcethrough softening first proceeds
the parameterized through
scanning of the
DCparameterized
voltage and then scanning
calculatesof the
DC corresponding
voltage and
then
valuecalculates the corresponding
of each point voltage in the value of each
steady-state pointand
solver voltage in the steady-state
the eigenvalue solver. Thesolver
physical andmodel
the
eigenvalue solver. The physical model established through the finite element
established through the finite element software is shown in Figure 12. As shown in the figure, below software is shown in is
Figure 12. As
the beam shown
model andinabove
the figure,
is thebelow
air area. is the beam model and above is the air area.

Figure 12. COMSOL simulation model.

Figure 12. COMSOL simulation model.

A comparison between the finite element simulation and analytical solution on the electrostatic
A comparison between the finite element simulation and analytical solution on the electrostatic
softening effect is shown in Figure 13. Before V = 20 V, the two results are in the good agreement.
softening effect is shown in Figure 13. Before VDC DC = 20 V, the two results are in the good agreement.
However, the error starts to increase near the pull-in position when the DC voltage exceeds 20 V.
However, the error starts to increase near the pull-in position when the DC voltage exceeds 20 V. It
It is evident from these results that the error increases as the value of λ increases. The finite element
is evident from these results that the error increases as the value of λ increases. The finite element
simulation and analytical solution of the static pull-in effect are shown in Figure 14. It can be found
simulation and analytical solution of the static pull-in effect are shown in Figure 14. It can be found
that the pull-in position of the two results is same. The pull-in voltage is well simulated at λ = 0, while
that the pull-in position of the two results is same. The pull-in voltage is well simulated at λ = 0, while
the other two cases are slightly different. It can be seen from Figures 13 and 14 that the maximum
the other two cases are slightly different. It can be seen from Figures 13 and 14 that the maximum
error occurs near the pull-in point. The reason for the error could be as follows: the COMSOL software
error occurs near the pull-in point. The reason for the error could be as follows: the COMSOL software
acquiescent structure stiffness is linear, while the actual system contains nonlinear stiffness. Although
acquiescent structure stiffness is linear, while the actual system contains nonlinear stiffness. Although
the analytical solutions take the nonlinear factors into account in the analysis, because of the limitation
the analytical solutions take the nonlinear factors into account in the analysis, because of the
of MMS, an error between the analytical and numerical solution is inevitable especially when the
limitation of MMS, an error between the analytical and numerical solution is inevitable especially
amplitude is too large. The comprehensive mechanical behavior of the system cannot be obtained only
when the amplitude is too large. The comprehensive mechanical behavior of the system cannot be
through the numerical method. Therefore, the contradiction really needs further consideration, which
obtained only through the numerical method. Therefore, the contradiction really needs further
is not within the scope of this paper.
consideration, which is not within the scope of this paper.
Micromachines 2018, 9, 34 16 of 19
Micromachines 2018, 9, 34 16 of 19
Micromachines 2018, 9, 34 16 of 19

Figure 13. Relationship between DC voltage and equivalent frequency under different section
Figure 13.
13.Relationship
Relationship between
between DC DC voltage
voltage and equivalent
and equivalent frequency
frequency under section
under different different section
parameters.
parameters. The solid lines represent the analytic solutions. The circles represent the finite element
parameters. The
The solid lines solid lines
represent represent
the analytic the analytic
solutions. solutions.
The circles The circles
represent represent
the finite the
element finite element
solutions.
solutions.
solutions.

Figure 14. Relationship

Relationship between DCDC voltage and equilibrium
static equilibrium point under section
different section
Figure 14. Relationshipbetween
Figure 14. between voltage
DC and static
voltage point under
and static equilibrium pointdifferent
under differentparameters.
section
parameters. The
The solid linesThe solid
represent lines represent the analytic solutions. The circles represent the finite
parameters. solid the analytic
lines solutions.
represent the The circles solutions.
analytic represent the finite
The element
circles solutions.
represent the finite
element solutions.
element solutions.
6. Conclusions
6. Conclusions
6. Conclusions
In this paper, the static and dynamic characteristics of a doubly-clamped electrostatic microresonator
In this the
considering paper,
effectthe static processing
of surface and dynamic errorcharacteristics
on the thicknessof a doubly-clamped electrostatic
In this paper, the static and dynamic characteristics ofarea studied. A section parameter
doubly-clamped electrostaticis
microresonator
proposed to considering
describe the the
microbeam effect of
changessurface
in processing
the upper and error
loweron the thickness
sections. The are studied.
Galerkin A
discrete
microresonator considering the effect of surface processing error on the thickness are studied. A
section
methodparameter is proposed
is used to decouple, andto describe the microbeam changes
carriedin the upper theand lowerCOMSOL.
sections.
section parameter is proposed tothe finite element
describe analysis is
the microbeam changes out
in using
the upper software
and lower sections.
The Galerkin
To observe discrete
thediscrete
system’s method is
nonlinear used to decouple,
vibration, the MMS and the finite element analysis is carried out using
The Galerkin method is used to decouple, andistheapplied to obtainanalysis
finite element the approximate
is carried frequency
out using
the software
response COMSOL.
equation, and the To observe the system's nonlinear vibration, the MMS is applied to obtain
the software COMSOL. Tolong-time
observe integral method
the system's is used tovibration,
nonlinear verify. Thethe keyMMSconclusions
is appliedare as
tofollows.
obtain
the approximate frequency response equation, and the long-time integral method is used to verify.
the approximate frequency response equation, and the long-time integral method is used to verify.
The
(1) key
Fromconclusions
derivation, arethe
asrange
follows.of section parameter in micro resonators is λ ∈ [−0.3, 0.9].
The key conclusions are as follows.
(2) From
(1) The occurrence
derivation,of thepull-in
range phenomenon
of section parametercould be in promoted by λ increasing
micro resonators is λ ∈ [–0.3, d decreasing.
and0.9].
(1) From
Several derivation,
typical the range
cases are of section
analyzed by parameter
using the in microenergy
potential resonatorscurve λ ∈phase
is and [–0.3,diagram.
0.9]. With
(2) The occurrence of pull-in phenomenon could be promoted by λ increasing and d decreasing.
(2) The occurrence
either the increase of pull-in
ofare phenomenon
theanalyzed
parameter could
or thethe be
decrease promoted
of d,energyby λ
the barrier increasing and d decreasing.
Several typical cases byλusing potential curveenergy
and phasegradually decreases
diagram. With
Several
and the typical
safe casesreduces.
region are analyzedAs a by using
result, thethe potential
pull-in will energy curve and phase diagram. With
occur.
either the increase of the parameter λ or the decrease of d, the barrier energy gradually decreases
either
(3) and
Under the increase of the parameter λ or the decrease of d, the
thebarrier energy gradually decreases
the small perturbations,
safe region reduces. As thearesonator
result, themay vibrate
pull-in will in
occur. neighborhood of the equilibrium
and the safe
point. small region reduces.
Whenperturbations,
the gap distance As a result, the pull-in will occur.
(3) Under theisresonator
constant,may the sectional
vibrate inparameter λ > 0 willofmake
the neighborhood the system
the equilibrium
(3) Under small perturbations, the resonator may vibrate in the neighborhood ofsystem
the equilibrium
point. When the gap distance is constant, the sectional parameter λ > 0 will make thevibration
vibration tend to softening-type behavior. On the contrary, λ < 0 will make the system
point.
lean When the
towards gap distance is
hardening-type constant,When
behavior. the sectional
the parameter
section parameter λ > 0iswill make the
constant, as system
the gap
vibration tend to softening-type behavior. On the contrary, λ < 0 will make the system vibration
vibration
distance tend
of the to softening-type
microbeam is behavior.
larger, the On the
hardening-typecontrary, λ <
behavior 0 will
more make the
easily system
appears. vibration
Similarly,
lean towards hardening-type behavior. When the section parameter is constant, as the gap
lean
as thetowards
gap hardening-type
distance is smaller, behavior. When thebehavior
the softening-type section is parameter
easier is constant, as theifgap
distance of the microbeam is larger, the hardening-type behavior moretoeasily
obtain. Therefore,
appears. the
Similarly,
distance of the microbeam is larger, the hardening-type behavior more easily appears. Similarly,
as the gap distance is smaller, the softening-type behavior is easier to obtain. Therefore, if the
as the gap distance is smaller, the softening-type behavior is easier to obtain. Therefore, if the
microresonator is thinner or thicker because of the surface machining error, the gap distance d
microresonator is thinner or thicker because of the surface machining error, the gap distance d
can be adjusted to make the system vibration close to linear.
can be adjusted to make the system vibration close to linear.
Micromachines 2018, 9, 34 17 of 19

microresonator is thinner or thicker because of the surface machining error, the gap distance d
can be adjusted to make the system vibration close to linear.
(4) The frequency response is obtained by MMS will lead to the nonlinear softening effect being
weakened. This error is negligible when the amplitude of vibration is relatively small. As the
amplitude increases beyond a certain value, this error will be more obvious. If the nonlinearity
exhibits hardening-type behavior at the beginning, the nonlinearity of electrostatic force will
gradually strengthen with the increases of the amplitude. Finally, the electrostatic force began to
dominate when its nonlinearity effect on the system exceeded the influence of structural stiffness
nonlinearity. At this time, the frequency response will exhibit hardening to softening behavior.
The higher the value of λ is, the more easily it appears.

It can be concluded from the presented results that the surface processing error does affect the
static and dynamic characteristics of the microresonator. When the existing micromachining process
is not improved, it will go for a revision only after considering the processing errors in the original
theoretically-based design. It can make the final product meet the theoretical design requirements and
increase the rate of finished products.

Acknowledgments: This project was supported by the National Natural Science Foundation of China (Grant No.
11602169, No. 11772218, No. 11702192 and No. 51605330) and the Natural Science Foundation of Tianjin City
(No. 16JCQNJC04700 and No. 17JCYBJC18900).
Author Contributions: Jingjing Feng, Cheng Liu and Wei Zhang conceived and designed the model; Jingjing Feng
and Cheng Liu contributed theoretical analysis; Jingjing Feng and Shuying Hao analyzed the data; Cheng Liu,
Wei Zhang and Shuying Hao conducted the simulation; Cheng Liu and Jingjing Feng wrote the paper.
Conflicts of Interest: The authors declare no conflict of interest.

Appendix A

Z 1
g= A( x )φ2 ( x )dx (A1)
0
µ = c/g (A2)
Z 1
k1 = ( I ( x )φ00 ( x ))00 φ( x )dx/g (A3)
0
Z 1 Z 1
2
k3 = A( x )(φ0 ( x )) dx φ00 ( x )φ( x )dx/g (A4)
0 0
s
1.8056α1
ωn = k1 − 3α2 k3 us 2 − (A5)
(1 − 1.48us − δλ)3
4.00843α1
aq = −3α2 k3 us − (A6)
(1 − 1.48us − δλ)4
7.90997α1
a c = − α2 k 3 − (A7)
(1 − 1.48us − δλ)5
1.22α1 ρ
f = (A8)
(1 − 1.48us − δλ)2

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