micromachines

Article
Design, Modeling, and Testing of a Novel XY
Piezo-Actuated Compliant Micro-Positioning Stage
Quan Zhang 1 , Jianguo Zhao 1 , Xin Shen 1 , Qing Xiao 1 , Jun Huang 2, * and Yuan Wang 3
1 School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
2 National Research Center of Pumps, Jiangsu University, Zhenjiang 212013, China
3 College of Communication Engineering, Army Engineering University of PLA, Nanjing 210007, China
* Correspondance: [email protected]




Received: 26 July 2019; Accepted: 30 August 2019; Published: 31 August 2019


Abstract: A novel decoupled XY compliant micro-positioning stage, based on a bridge-type

amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical
models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by
Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness,
and output stiffness of the stage are further derived, based on the proposed model. In order to verify
the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis,
and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output
stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%,
respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the
maximum error between the theoretical model and the FEM is less than 4%, which further validates
the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio,
cross-coupling error, and workspace. The experimental results demonstrate that the stage has a
relatively large workspace, of 346.1 µm × 357.2 µm, with corresponding amplification ratios of 5.39 in
the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.

Keywords: compliant mechanism; micro-positioning stage; Castigliano’s second theorem; beam

constrained model; bridge-type amplification mechanism

1. Introduction
With the rapid development of microelectromechanical systems (MEMS), nanotechnology, and
precision engineering, the demands on precision positioning technology have been increasing.
Conventional rigid positioning stages composed of transmission gears and rigid joints are no longer
suitable, due to the backlash and friction. New micro/nano-positioning stages based on compliant
mechanisms has attracted the attention of many scholars, due to their characteristics of no friction,
no backlash, no lubrication, and ease of fabrication [1]. Moreover, it is vital to employ actuators with
high resolution for precision positioning. Commonly used actuators in precision driving fields can
be classified as follows: piezoelectric actuators (PEAs), voice coil motors (VCMs), electromagnetic
actuators, magnetostrictive actuators, shape memory alloy (SMA) actuators, and electrostatic actuators,
among others. [2–5]. Due to the requirements of the external magnetic field, which usually makes the
structure of the system hard to miniaturize, electromagnetic actuators and magnetostrictive actuators
have rarely been adopted in micro-positioning stages. Shape memory alloy actuators have complex
force-electric-thermal coupling relationships, making it difficult to achieve precise control when using
them. Common electrostatic actuators usually require a large driving voltage to achieve a desired
output displacement. However, a large driving voltage will tend to cause electrostatic breakdown,
affecting reliability [6]. Thus, PEAs and VCMs have typically been adopted to actuate compliant

Micromachines 2019, 10, 581; doi:10.3390/mi10090581 www.mdpi.com/journal/micromachines

Micromachines 2019, 10, 581 2 of 19

micro/nano positioning stages [7–11]. The advantages of PEAs are high motion resolution, large output
force, and fast response; however, the output displacement is usually small, with only a 0.1–0.2% range
of its own length, which does not meet the requirements of some applications requiring compact size
and large stroke [12]. Moreover, the inherent non-linear effects of these actuators, such as hysteresis
and creep, also decrease the motion accuracy and positioning resolution of the micro-positioning
system [13]. VCMs have the advantages of simple structure, small volume, high frequency response,
and high precision, but their output force is small, making them difficult to apply in stages with large
input stiffness and compact size [14]. Compared with VCMs, piezoelectric transducers have also been
widely applied in active vibration control and precision driving fields [15,16]. Thus, the PEA was
selected as the driving component in this study.
To overcome the difficulties caused by the small stroke of the PEAs, a compliant displacement
amplification mechanism is usually introduced, between the actuator and the micro-positioning stage,
to improve the output displacements of the system. Commonly used displacement amplification
mechanisms include lever [17,18], bridge-type [19,20], and Scott–Russell [21,22] amplification
mechanisms. Awtar et al. [23] presented a two degrees of freedom (2-DOFs) planar X–Y flexure
mechanism based on flexible beams. The stiffness characteristics and cross-coupling errors of the
stage were investigated. Due to the low cross-coupling characteristics of the double parallelogram
mechanism, kinematic decoupling was almost achieved. A novel 2-DOFs micro-positioning stage has
been developed by Wang [24] using corrugated flexible (CF) beams, instead of notched flexible hinges
and rigid beams. The stiffness characteristics of the stage were analyzed by the stiffness matrix method
and the dimensions of the stage were optimized with the aim of a higher off-axis/axial stiffness ratio and
larger motion stroke. A 1-DOF stage with a sandwich-like structure has been devised by Wu [25] for
micro/nano-positioning in the vertical direction. The actuator was placed in the middle plane and two
orthogonal bridge-type amplification mechanisms were placed in the other two planes, which made it
a sandwich structure. Such a design made the structure of the stage more compact. Tang et al. [26]
designed a parallel X–Y micromanipulator using compound parallelogram mechanisms based on
flexible hinges and lever amplification mechanisms. Theoretical modeling and finite element simulation
of the static and dynamic characteristics of the stage were investigated, and the results indicated
that the theoretical model and the finite element model had high consistency. Li et al. [27] combined
compound bridge-type amplification mechanisms and compound parallelogram mechanisms based on
flexible beams to design a completely decoupled micro-motion stage. The stiffness characteristics and
amplification ratio were analyzed by the compliance matrix method. An experiment was set up, and
the results showed that the cross-coupling error of the stage was less than 2%. Wu et al. [28] proposed
a 2-DOFs nano-positioning stage with stacked structure. A bridge-type amplification mechanism was
employed to amplify the output displacement of the PEA and a new decoupling mechanism based
on compound parallelogram flexures was developed. FEA-based optimization aimed at maximizing
the natural frequency was also conducted. The experimental results indicated that the fundamental
frequencies of the X-axis and Y-axis were 64.03 Hz and 54.75 Hz, and that the workspace of the stage
was 212.48 × 219.24 µm2 with a resolution of 7 nm. Lin et al. [29] analyzed the characteristics of a
6-DOFs compliant stage using a bond graph approach, by combining a pseudo-rigid-body (PRB) model
and elastic beam theory. The kinematic performance, dynamic responses, and load capacity were
investigated. Qin et al [30] designed a 3-DOFs planar compliant manipulator based on the improved
Scott–Russell mechanism, and the inverse kinematics model, dynamics model, and the workspace of
the manipulator was developed.
In addition, many hybrid amplification mechanisms, consisting of commonly used amplification
mechanisms, have recently been developed [12,31–34]. Zhu et al. [31] proposed a novel displacement
amplification mechanism, which was composed of two Scott–Russell mechanisms and a half bridge-type
amplification mechanism. Combined with the positioning stage, a decoupled 2-DOFs nano-positioning
stage was designed, and the displacement amplification ratio, stiffness model, maximum stress, and
dynamic characteristics of the stage were analyzed. Zhang et al. [33] proposed a 3-DOFs spatial
Micromachines 2019, 10, 581 3 of 19
Micromachines 2019, 10, x 3 of 20

compliant micro-positioning
spatial compliant stage which
micro-positioning waswhich
stage able towasmove along
able the X,along
to move Y, andthe
Z axes. The bridge-type
X, Y, and Z axes. The
amplification mechanism and the lever amplification mechanism were
bridge-type amplification mechanism and the lever amplification mechanism were connected connected in series to formin a
two-stage
series to formamplification
a two-stagemechanism. Experimental
amplification mechanism. results demonstrated
Experimental that the
results cross-coupling
demonstrated thaterror
the
along X, Y, and Z axes was less than 5%. The above achievements were mostly combined
cross-coupling error along X, Y, and Z axes was less than 5%. The above achievements were mostly by displacement
amplification mechanisms and
combined by displacement compoundmechanisms
amplification parallelogram andmechanisms
compound to devise a positioning
parallelogram stage,
mechanisms to
and
devisea combination
a positioning ofstage,
displacement amplification
and a combination mechanism and
of displacement double parallelogram
amplification mechanism mechanisms
and double
was rarely used.mechanisms
parallelogram Hence, in thiswaspaper, a decoupled
rarely used. Hence,2-DOFs planar
in this compliant
paper, micro-positioning
a decoupled stage
2-DOFs planar
was designed
compliant using bridge-type
micro-positioning amplification
stage was designed mechanisms, as wellamplification
using bridge-type as double-parallelogram
mechanisms,and as
compound-parallelogram mechanisms, to achieve high decoupling characteristics
well as double-parallelogram and compound-parallelogram mechanisms, to achieve high decoupling with a relatively
long stroke.
characteristics with a relatively long stroke.
The
The rest
restofofthis
thispaper
paperisisorganized
organized asas
follows:
follows:The mechanical
The mechanical design andand
design working
workingprinciple of the
principle of
compliant
the compliant positioning stage are introduced in Section 2; In Section 3, mathematical modelsa,
positioning stage are introduced in Section 2; In Section 3, mathematical models, including
stiffness
including model of the parallelogram
a stiffness mechanism, a model
model of the parallelogram of bridge-type
mechanism, a modelamplification
of bridge-type mechanism, and
amplification
amechanism,
stiffness modelandofa the positioning
stiffness model stage,
of thearepositioning
established stage,
by Beam areconstrained
established model and Castigliano’s
by Beam constrained
second theorem. In Section 4, the finite element simulation is presented. In Section
model and Castigliano’s second theorem. In Section 4, the finite element simulation is presented. In 5, experimental
verification is conducted.verification
Section 5, experimental Finally, conclusions
is conducted.are provided in Section 6.are provided in Section 6.
Finally, conclusions

2.
2. Mechanical
Mechanical Design and Working
Design and Working Principle
Principle of
of Compliant
Compliant Positioning
Positioning Stage
Stage
The
Thecompliant
compliantpositioning
positioning stage, with
stage, witha symmetrical design,
a symmetrical is mainly
design, composed
is mainly of two
composed ofbridge-type
two bridge-
amplification mechanisms (Amplification Module), four double parallelogram mechanisms
type amplification mechanisms (Amplification Module), four double parallelogram mechanisms (Compliant
Module 1), four
(Compliant compound
Module parallelogram
1), four compound mechanisms
parallelogram(Compliant
mechanismsModule 2), and a motion
(Compliant Module platform,
2) , andasa
shown
motion platform, as shown in Figure 1. Based on the aforementioned discussion of the precision
in Figure 1. Based on the aforementioned discussion of the different actuators used in different
driving fields,
actuators usedPEAs were selected
in precision drivingasfields,
the driving
PEAs components
were selectedandas installed intocomponents
the driving the bridge-typeand
amplification
installed into mechanisms.
the bridge-type amplification mechanisms.

Figure 1. Mechanical
Figure 1. Mechanical design
design of
of compliant
compliant positioning
positioning stage.
stage.

In the literature, various types of flexible hinges with different notches have been developed [35–39],
In the literature, various types of flexible hinges with different notches have been developed
including the commonly used circular notch type, hyperbolic notch type, elliptical notch type, and
[35–39], including the commonly used circular notch type, hyperbolic notch type, elliptical notch
right angle notch type, as shown in Figure 2. In order to obtain the stiffness characteristics, the
type, and right angle notch type, as shown in Figure 2. In order to obtain the stiffness characteristics,
force-displacement relationship of four common flexure hinges was analyzed by ANSYS. It should
the force-displacement relationship of four common flexure hinges was analyzed by ANSYS. It
be noted that the dimension parameters and material of each flexure hinge are the same in the finite
should be noted that the dimension parameters and material of each flexure hinge are the same in
element analysis. The results, as shown in Figure 3, indicate that the displacement of the right
the finite element analysis. The results, as shown in Figure 3, indicate that the displacement of the
angle notch flexible hinge was the largest when an equivalent force was applied. The parallelogram
right angle notch flexible hinge was the largest when an equivalent force was applied. The
mechanism constructed by flexible beams provided a larger linear deformation region than that
parallelogram mechanism constructed by flexible beams provided a larger linear deformation region
constructed by flexible hinges and rigid beams [40]. In addition, it is easier to achieve higher accuracy
than that constructed by flexible hinges and rigid beams [40]. In addition, it is easier to achieve higher
when machining straight contours, rather than curved contours. For large motion stroke and ease of
accuracy when machining straight contours, rather than curved contours. For large motion stroke
and ease of fabrication, the bridge-type amplification mechanism and parallelogram mechanism were
 Micromachines 2019, 10, 581 4 of 19

Micromachines 2019, 10, x 4 of 20

fabrication, the bridge-type amplification mechanism and parallelogram mechanism were constructed
Micromachines 2019, 10, x 4 of 20
constructed
using rightusing
angle right angle
notch notchhinges
flexible flexible hinges
with withcompliance
lumped lumped compliance andbeams
and flexible flexible beams
with with
distributed
compliance,using
constructed respectively.
right angle notch flexible hinges with lumped compliance and flexible beams with

(a) (b) (c) (d)

Figure 2. (a)
Four commonly used flexure (b)hinges: (a) Circular notch,(c)(b) hyperbolic notch, (c) elliptical
(d)
notch, and2.
Figure
Figure 2.(d) right
Four
Four angle notch.
commonly
commonly used
used flexure
flexure hinges:
hinges: (a)
(a) Circular
Circular notch,
notch, (b)
(b) hyperbolic
hyperbolic notch,
notch, (c) elliptical
elliptical
notch,
notch, and
and (d)
(d) right
right angle
angle notch.
notch.

Figure
Figure 3. Force-displacement
3. Force-displacement relationship
relationship of four
of four common
common flexure
flexure hinges.
hinges.
Figure 3. Force-displacement relationship of four common flexure hinges.
Due Due
to theto the symmetry
symmetry of the
of the stage,
stage, only only motion
motion in the
in the Y-axisY-axis of the
of the stage
stage is taken
is taken as as
an an example
example
to demonstrate
to demonstrate the the working
workingof principle.
principle. The working principle and PRB model of the bridge-type
Due to the symmetry the stage,The onlyworking
motion principle
in the Y-axis andofPRB modelisof
the stage takenthe as bridge-type
an example
amplification
amplification mechanism
mechanism areare illustrated
illustrated in in Figure
Figure 4. 4. As
As the the bridge-type
bridge-type amplification
amplification mechanism
mechanism is is
to demonstrate the working principle. The working principle and PRB model of the bridge-type
composed
composed of
of four four symmetrical
symmetrical branches,
branches, in one
one of the
of the branches
branches is taken to present
is takenamplification the
to present the working principle,
working is
amplification mechanism are illustrated Figure 4. As the bridge-type mechanism
and
principle,the equivalent
andofthe model
equivalent is shown
modelbranches, in Figure
is shown inone 4a.
Figure When an
4a. branches input
When an input displacement
displacement x in is applied to the
composed four symmetrical of the is taken to presentxinthe is applied
working
point O
to principle,
the point O 1 along
1 along
the X-axis, a
the X-axis,model displacement
a displacement x out along
xout the
along4a. Y-axis
theWhen is generated
Y-axisanisinput generated at the point
at the point O 2 . As
Oapplied
2. As
can
and the equivalent is shown in Figure displacement xin is
be observed from Figure 4b, the motion state of the branch J J is similar to that of O O . The only
cantobetheobserved
point O1from along Figure 4b, thea motion
the X-axis, state ofxthe
displacement branch
out along theJ22Y-axis
J77is similar to that of
is generated atOthe 1 2. 2The only
1O point O2. As
difference
difference is that
is that the thepointpoint J 7
J7 is4b, is a
a fixed fixed hinge,
hinge,state so
so point point J 2
J2 branchmoves
moves the the displacement of xout along the
can be observed from Figure the motion of the J2J7 isdisplacement
similar to that ofofxoutO1along
O2. Thethe only
positive
positive direction
direction of Y-axis while moving along X-axis. Similarly, when point J1 moves along the
difference is thatofthe Y-axis
point while
J7 is moving along so
a fixed hinge, X-axis.
pointSimilarly,
J2 moves the when point J1 moves
displacement along
of xout along thethe
negative
negative direction of X-axis, the output displacement xalong
out out
along the positive direction of Y-axis is
positive direction of Y-axis while moving along X-axis. Similarly, when point J1 moves alongisthe
direction of X-axis, the output displacement x the positive direction of Y-axis
generated point
generated at point J . However, as point J2 raises the initial position ofJ5point J by xout , the actual
negativeatdirection J5. However,
of5 X-axis, as thepointoutput J2 raises the initial
displacement xposition
out alongof thepoint by xdirection
positive out5, the actual output
of Y-axis is
output
displacement displacement
of point J of
is point
2x . TheJ is 2x
5 output out displacement of point J6 is the same6as point J5, due to the J5 ,
. The output displacement of point J is the same as point
generated at point J5. However, as point J2 raises the initial position of point J5 by x out, the actual output
5 out
due to the structure.
symmetrical symmetrical structure. It should be
thenoted thatof the values of the displacement along X-axis
displacement of pointItJ5should
is 2xoutbe . Thenotedoutputthatdisplacement
values the displacement
of point J6 is the same along asX-axis
point Jare5, due equal
to the
and are
theequal and
directions the
are directions
opposite; are opposite;
therefore, therefore,
link B only link
moves B 1 only
along moves
the along
Y-axis. the
Thus, Y-axis.
when Thus,
the inputswhen
symmetrical structure. It should be noted that the values of the displacement along X-axis are equal
1
the
A1and inputs
andtheA2 of A and A
the1 bridge-type of the bridge-type
amplification amplification
mechanism mechanism are driven by a force F along thethe
directions are2
opposite; therefore, link B1 onlyare movesdriven alongby athe force Fin along
Y-axis. Thus,the when X-axis,
in
the inputs
X-axis,
input the input displacements
displacements xin will be xapplied
in will beinapplied in the positive
the positive and and negative
negative directions
directions of theof the
the X-axis,
X-axis,
A1 and A2 of the bridge-type amplification mechanism are driven by a force Fin along X-axis, the
respectively.
respectively. Simultaneously,
Simultaneously, an an output
output displacement
displacement of of
2x 2x out
in in
the the positive
positive direction
direction of of
the the Y-axis
Y-axis
input displacements xin will be applied in the positive and negative directions of the X-axis, out

willwill
be be produced
produced at link
at link B1. BDue
1 . Due to the to high
the highaxialaxial stiffness
stiffness and low transverse stiffness of flexible
respectively. Simultaneously, an output displacement of and
2xoutlow in thetransverse stiffness
positive direction of flexible
the Y-axis
beams,
beams, thethe compound
compound parallelogram mechanisms C1 and C2C2 and double parallelogram mechanisms
will be produced at parallelogram
link B1. Due to mechanisms the high axial C1stiffness
and and
anddouble parallelogram
low transverse stiffness mechanisms
of flexible
D3
D3beams, and
and D4the D4 can
cancompound be
be assumedassumed to be
to be prismatic prismatic pairs
pairs of the of the motion. While the compound parallelogram
parallelogram mechanisms C1motion.
and C2 While and double the compound
parallelogram parallelogram
mechanisms
mechanisms
D3 and D4 C3 canand C4 and double
be assumed parallelogram
to be prismatic pairsmechanisms
of the motion. D1While
and D2 thecan be assumed
compound to be rigid
parallelogram
bodies,
mechanisms C3 and C4 and double parallelogram mechanisms D1 and D2 can be assumed to beas
the linear motion of the motion platform is finally achieved through motion transmission, rigid
shown
bodies,in Figure
the linear 5. The
motionworkingof theprinciple is similarisin
motion platform the X-axis,
finally achieved butthrough
the prismatic
motion pairs and rigid as
transmission,
shown in Figure 5. The working principle is similar in the X-axis, but the prismatic pairs and rigid
Micromachines 2019, 10, 581 5 of 19

mechanisms C3 and C4 and double parallelogram mechanisms D1 and D2 can be assumed to be rigid
bodies, the linear motion of the motion platform is finally achieved through motion transmission,
Micromachines 2019, 10, x
as
5 of 20
shown in Figure
Micromachines 2019,5.
10,The
x working principle is similar in the X-axis, but the prismatic pairs and rigid5 of 20
bodies
bodies are exchanged. Thus, 2-DOFs
are exchanged. Thus, 2-DOFsofofmotion
motion(i.e.,
(i.e.,in
inthe
theXXand
andYYdirections)
directions)are
areobtained.
obtained. Double
Double
parallelogram
parallelogram mechanisms
bodies are exchanged.
mechanisms and
Thus,
andcompound
2-DOFs parallelogram
of motion
compound (i.e., in mechanisms
parallelogram themechanismswithwith
small
X and Y directions) cross-coupling
are
small obtained.
cross error
Double
-coup
are adopted in the
parallelogram design, which
mechanisms andcan effectively
compound attenuate themechanisms
parallelogram cross-coupling displacement.
with small cross -coup

(a) (b)
(a) (b)
Figure 4. PRB model of the bridge-type amplification mechanism: (a) Working principle, and (b)
Figure4.
overall
Figure 4.PRB
PRBmodel
scheme. model
(PRB ofofthe
model: thepseudo-rigid-body
bridge-typeamplification
bridge-type amplification mechanism:
model, mechanism:
PEA: (a)Working
piezoelectric
(a) Working
actuator) principle,and
principle, and(b)
(b)
overall scheme. (PRB model: pseudo-rigid-body model, PEA: piezoelectric actuator)
overall scheme. (PRB model: pseudo-rigid-body model, PEA: piezoelectric actuator)

Figure 5. Working
Figure5. Workingprinciple
principleof
ofparallelogram
parallelogram mechanisms.
mechanisms.
Figure 5. Working principle of parallelogram mechanisms.
3. Mathematical Model of the Positioning Stage
3. Mathematical Model of the Positioning Stage
3. Mathematical Model of the Positioning Stage
3.1. Stiffness Model of the Parallelogram Mechanism
3.1. Stiffness Model of the Parallelogram Mechanism
3.1.The double
Stiffness parallelogram
Model mechanism
of the Parallelogram and the compound parallelogram mechanism are both
Mechanism
The double parallelogram mechanism and the compound parallelogram mechanism are both
composed of flexible beams. In general, the flexible beam is in a state of large deflection and, so, the
composedThe double parallelogram
of flexible mechanism
beams. In general, and the
the flexible compound
beam parallelogram
is in a state mechanism
of large deflection and,are
so,both
the
analysis of the flexible beam involves complicated non-linear factors. The models for the non-linear
composed
analysis of flexible
of the flexiblebeams. In general,
beam involves the flexible
complicated beam is in
non-linear a stateThe
factors. of large deflection
models and, so, the
for the non-linear
deflection of a beam are: The PRB model (including the improved PRB model, which can be utilized
analysis of
deflection ofthe flexible
a beam are:beam involves
The PRB model complicated
(including non-linear
the improved factors. The models
PRB model, which for thebe
can non-linear
utilized
to analyze flexible beams with inflection points) [41–43], the Beam constraint model, the non-linear
deflection of a beam are: The PRB model (including the improved PRB model, which
to analyze flexible beams with inflection points) [41–43], the Beam constraint model, the non-linear can be utilized
finite element method, and the elliptic integral method. When the transverse displacements of
to analyze
finite element flexible beams
method, andwith inflection
the elliptic points)
integral [41–43],
method. the Beam
When constraintdisplacements
the transverse model, the non-linear
of the
the flexible beam are as small as the thickness of the beam, the non-linearity caused by the force
finite element
flexible beam are method,
as smallandasthethe
elliptic integral
thickness of method.
the beam, When
the the transversecaused
non-linearity displacements of the
by the force
equilibrium conditions becomes significant, due to the load-stiffening and elastokinematic effects.
flexible beam are as small as the thickness of the beam, the non-linearity
equilibrium conditions becomes significant, due to the load-stiffening and elastokinematic effects.caused by the force
While PRB models capture load-stiffening, their inherent lumped-compliance assumption precludes
equilibrium
While PRB modelsconditions
capture becomes significant,
load-stiffening, due
their to the load-stiffening
inherent lumped-complianceand elastokinematic effects.
assumption precludes
While PRB models
elastokinematic capture
effects load-stiffening,
(for more details, seetheir inherent
[44]). lumped-compliance
High calculation accuracy can assumption
be obtained precludes
by the
elastokinematic effects (for more details, see [44]). High calculation accuracy
non-linear finite element and ellipse integral methods, while a large number of nodes and complex can be obtained by the
non-linear
integral finite element
calculation make suchand ellipse
methodsintegral methods,
unfavorable for while a large In
early design. number of nodes
contrast, and complex
high precision with
integral calculation make such methods unfavorable for early design. In contrast,
a simple calculation can be achieved using the beam constraint model when the beam deformation high precision with
a simple
does calculation
not exceed 10% ofcanthebe achieved
beam length,using
and the
thisbeam
model constraint
is a generalmodel when
method the beam
which deformation
can calculate the
Micromachines 2019, 10, 581 6 of 19

elastokinematic effects (for more details, see [44]). High calculation accuracy can be obtained by the
non-linear finite element and ellipse integral methods, while a large number of nodes and complex
integral calculation make such methods unfavorable for early design. In contrast, high precision with
a simple calculation can be achieved using the beam constraint model when the beam deformation
Micromachines 2019, 10, x 6 of 20
does not exceed 10% of the beam length, and this model is a general method which can calculate the
deformation
deformation of of flexible
flexible beams
beams regardless
regardlessof ofwhether
whether there
there are
areinflection
inflectionpoints
points [45].
[45].Therefore,
Therefore,the the
Beam constrained model was applied to model the flexible beams in this paper. As
Beam constrained model was applied to model the flexible beams in this paper. As the parallelogramthe parallelogram
mechanisms
mechanismsare arecomposed
composedofofflexible
flexiblebeams,
beams,a asingle
singleflexible
flexiblebeam
beam was
wasfirst modeled.
first modeled. The
Thestructural
structural
parameters and deformation are shown in Figure 6, where F, P, and M
parameters and deformation are shown in Figure 6, where F, P, and M are the lateral andaxial
are the lateral and axialforces
forces
and
andmoment
momentof of the
the flexible
flexible beam,
beam,respectively, andb,b,t,t,and
respectively,and andLLare
arethe
thewidth,
width, thickness,
thickness,and
andlength
lengthof of
the flexible beam, respectively.
the flexible beam, respectively.

Figure 6. Large
Figure6. Large deflection
deflection of
of the
theflexible
flexiblebeam.
beam.

The
Thebeam
beamconstraint
constraintmodel
modelcan
canbe
beexpressed
expressedas: as:
f f  aa cc  δ y  hh  δyy
+ p e
" # " #" # " #" #
e
m   c b   θ   p  h
= y (1)
g   θ (1)
m  c b    h g    
δ
q  δyy  .
" #" # " #" #
p h
p δ y θ  i k  y y + p δ y
i i k i r q
r
h
δx = + θ (2)
x d   y   k j  θ  +p  y
  k  q q s  θ . (2)
d  j     s   
The corresponding parameters in Equations (1) and (2) are shown in Table 1. We have:
The corresponding parameters in Equations (1) and (2) are shown in Table 1. We have:
FL2 ML PL2
f = FL2 , m = ML, p = PL,2 (3)
f  EI , m  EI , p  EI , (3)
EI EI EI
∆x ∆y t 12
δx = ,δ = ,T = ,d = 2. (4)
Lx y Ly Lt T12
x  , y  ,T  ,d  . (4)
L L L T2
Table 1. Calculation parameters of beam constraint model.

Table 1. Calculation
Parameters ValuesparametersParameters
of beam constraint model.
Values
Parameters a 12
Values i Parameters −0.6 Values
a b 4
12 j i −1/15 −0.6
b c −6
4 k j 1/20 −1/15
c e 1.2
−6 r k 1/700 1/20
g 2/15 s 11/6300
e 1.2 r 1/700
h −0.1 q −1/1400
g 2/15 s 11/6300
h −0.1 q −1/1400
In the actual motion of the positioning stage, the deformation of the double parallelogram
In the actual
mechanism is shownmotion of the
in Figure positioning
7. The stage, the of
same deformation deformation ofbeam
each flexible the double
can be parallelogram
assumed, due
mechanism
to is shown in
the same structure. Figure
Due 7.two-stage
to the The same deformation,
deformation of eachthe
when flexible
movingbeam can bemoves
platform ∆y, due
assumed, the
to the same structure.
displacement at the endDue to the
of each two-stage
beam to ∆y/2. The middle
is equaldeformation, when the moving
platform platform
can moves
move along theΔy, the
X-axis
displacement at the end of each beam is equal to Δy/2. The middle platform can move along the X-
axis during the motion; therefore, P can be approximated as equal to 0. Substituting P = 0 into
Equation (1), the relationship between force and displacement for a double parallelogram mechanism
can be derived as
Micromachines 2019, 10, 581 7 of 19

during the motion; therefore, P can be approximated as equal to 0. Substituting P = 0 into Equation
(1), the relationship between force and displacement for a double parallelogram mechanism can be
derivedMicromachines
as 2019, 10, x 7 of 20
Micromachines 2019, 10, x 7 of 20
f = 12δ y . (5)

Figure 7. Deformation of the double parallelogram mechanism.

Figure 7. Deformation of the double parallelogram mechanism.
Figure 7. Deformation of the double parallelogram mechanism.
The deformation
The deformation of theof the compound
compound parallelogram
parallelogram mechanism
mechanism is shownis shown in Figure
in Figure 8. Each8.flexible
Each flexible
The deformation
be consideredof the
to compound
be a fixed parallelogram
guiding beam mechanism
(i.e., Δx = 0 is
and shown
the tip in Figure
beam can be considered to be a fixed guiding beam (i.e., ∆x = 0 and the tip deflection angle isisθθ = 0).
beam can deflection8. Each
angle flexible
beam can be considered to θbe a fixed guiding beam(1) (i.e., Δx(2),
= 0 and relationship
the tip deflection angleforce
is θ = 0).
= 0). Substituting Δx == 00 and
Substituting ∆x and θ ==0 0into
intoEquations
Equations(1) andand(2), the the
relationship betweenbetween
force and and
Substituting
displacement Δx = 0 and
of a compound θ = 0 into Equations
parallelogram (1)
mechanism and (2), the relationship between force and
displacement of a compound parallelogram mechanism can becan be derived
derived as: as:
displacement of a compound parallelogram mechanism can be derived as:
0.6δ2y 0.62y
2

p= p 0.62y (6) (6)

+
p1/d   y / 700
1/δd2y /700 (6)
1/ d   y2 / 700
f y 12
f = 12δ  y  1.2
+ 1.2pδ y . p y . (7) (7)
f  12 y  1.2 p y . (7)

Figure 8. Deformation of the compound parallelogram mechanism.

Figure 8. Deformation of the compound parallelogram mechanism.
Figure 8. Deformation of the compound parallelogram mechanism.
When the compound parallelogram mechanism moves along the y-axis, it can be considered as a
When the compound parallelogram mechanism moves along the y-axis, it can be considered as
parallel arrangement
When of four fixed
the compound guiding beams. Therefore, thealong
driving force required toconsidered
produce as
a parallel arrangement ofparallelogram mechanism
four fixed guiding moves
beams. Therefore, thethe y-axis,
driving it can
force be
required to produce
the same displacement becomes four times larger than that of a single flexible beam. The relationship
athe
parallel
samearrangement
displacementofbecomes
four fixed guiding
four times beams. Therefore,
larger than that of the driving
a single forcebeam.
flexible required
Theto produce
relationship
between force and displacement of a compound parallelogram mechanism is formulated as:
the same displacement becomes four times larger than that of a single flexible
between force and displacement of a compound parallelogram mechanism is formulated as: beam. The relationship
between force and displacement of a compound 0.6δparallelogram
2 mechanism is formulated as:
p=
y
0.6 2
(8)
p  + δ2y0.6
1/d 2y2
/700
y
(8)
p  1/ d  2y / 700 (8)
1/ d   / 700
f = 48δ y + 4.8pδyy . (9)
f  48 y  4.8 p y . (9)
f  48 y  4.8 p y . (9)
Substituting Equation (3) into Equations (5), (8), and (9), the lateral stiffness of the double
Substituting
parallelogram Equation K(3)
mechanism DPMinto Equations
can be (5), (8), and (9), the lateral stiffness of the double
derived as
parallelogram mechanism KDPM can be derived as
Micromachines 2019, 10, 581 8 of 19

Substituting Equation (3) into Equations (5), (8), and (9), the lateral stiffness of the double
parallelogram mechanism KDPM can be derived as

12EI
KDPM = . (10)
L3
The lateral stiffness of the compound parallelogram mechanism KCBPM is calculated as:

2.88δ2y
 
  EI
KCBPM = 48 +  · . (11)
1/d + δ y /700 L3
2 

3.2. Model of Bridge-type Amplification Mechanism

The bridge-type amplification mechanism consists of four symmetrical branches and, hence,
only one of the branches is required to be mathematically modeled. The input and output ends are
considered as rigid parts, due to the high stiffness. The force analysis and structural parameters of the
remaining parts are shown in Figure 9. As the deformations of the two flexible hinges are basically the
same, it can be assumed that the moments M of the two flexible hinges are equal. According to the
force and moment balance equations, the following equations can be obtained:

1
FAx = FBx = Fin = fx , (12)
2
1
FAy = FBy = Fout = f y , (13)
2
2M = fx · w − f y · (l1 + l2 ). (14)

The input and output displacements of the bridge-type amplification mechanism can be obtained
by Castigliano’s second theorem. The branch of the bridge-type amplification mechanism is considered
as a three-segment beam; that is, right angle flexible hinges are treated as short flexible beams.

Rl1 F (x) ∂Fl (x) Rl1 M(x) ∂M(x)

l
xin = 2 EA 1
· ∂ fx
+2 EI1 · ∂ fx
0 0
l1R+l2 l1R+l2 , (15)
Fl (x) ∂Fl (x) M(x) ∂M(x)
+ EA2 · ∂ fx
+ EI2 · ∂ fx
l1 l1

Rl1 F (x) ∂Fl (x) Rl1 M(x) ∂M(x)

l
xout = 2 EA 1
· ∂ fy
+2 EI1 · ∂ fy
0 0
l1R+l2 l1R+l2 , (16)
Fl ( x ) ∂Fl (x) M(x) ∂M(x)
+ EA2 · ∂ fy
+ EI2 · ∂ fy
l1 l1

where A1 and A2 are the axial cross-sectional areas of the flexible hinges and connecting beams,
respectively; I1 and I2 are moment of inertia of the axial cross sections of the flexible hinges and
connecting beams, respectively; and E is Young’s modulus. Uniform flexible beams have been
investigated comprehensively over recent years [46,47]. However, the three-segment beam is a
non-uniform flexure, which will be analyzed in the future. Here, to simplify the calculation, the same
hypothesis as in the literature [48] is adopted, as follows:

Fl (x) = fx , (17)

1
M(x) = [ fx · w − f y · (l1 + l2 )]. (18)
2
 Micromachines 2019, 10, x 9 of 20

Substituting Equations (15) and (16) into Equations (13) and (14), the results are further
rearranged to obtain the following matrix expression:
Micromachines 2019, 10, 581 9 of 19
 xin   C11 C12   f x 
    f  , (19)
 xout  (15)
Substituting Equations 22  into
C21andC(16)  yEquations
 (13) and (14), the results are further rearranged
to obtain
wherethe
C11following matrix
, C12, C21, and expression:
C22 are the compliance matrix parameters of the bridge-type amplification
mechanism, detailed as: ! " # !
xin C11 C12 fx
2 1 xout w=2 C21w2 C22 · f y w,(l1  l2 ) w(l1  l2 ) (19)
C11     ， C12   ,
K l1 Kl 2 2 K 1 4 K 2 2 K 1 4 K 2
where C11 , C12 , C21 , and C22 are the compliance matrix parameters of the bridge-type amplification
mechanism, detailed as: w(l1  l2 ) w(l1  l2 ) (l1  l2 )2 (l1  l2 ) 2
C21   C22  
2
2 K11 w2
4K w22 ， 2K 4K
w(l +l )  1 w(l +l )  2 ,
C11 = Kl1 + Kl2 + 2K + 4K , C12 = 2K1 2 + 4K1 2 ,
θ1 θ2 θ1 θ2
where K l1 , K l 2 , K 1 , and wK 2 l2are
(l1+ ) the axial
w ( l1 + l2 ) tensile(l1stiffnesses
+ l2 ) 2 (l1 +and
l2 )2 rotational
stiffnesses of the
C21 = 2Kθ1 + 4Kθ2 , C 22 = 2Kθ1 + 4Kθ2 ,
flexible hinges and connecting beams, respectively. As only the plane stiffness of the bridge-type
amplification
where Kl1 , Kl2 , Kθ1mechanism
, and Kθ2 areneeds to be
the axial considered
tensile (according
stiffnesses to reference
and rotational [49]),
stiffnesses theflexible
of the following
simplified
hinges results are
and connecting obtained:
beams, respectively. As only the plane stiffness of the bridge-type amplification
mechanism needs to be considered Ebt1(accordingEbt to reference Ebt13the following
[49]), 3
Ebtsimplified results are
obtained:
K l1 = ， K l2 = 2
， K1 = ， K 2 = 2
.
l1 l 12l
Ebt31 1 Ebt32
12l2
Ebt 1 Ebt22
If the condition ofKl1
Fout== 0 is ,assumed,
Kl2 = the θ1 =
, Kamplification , Kθ2 = and .input stiffness of the bridge-
ratio
l1 l2 12l1 12l2
type amplification mechanism can be expressed as [50]:
If the condition of Fout = 0 is assumed, the amplification ratio and input stiffness of the bridge-type
amplification mechanism can be expressed as [50]: 2 xout C21
Ramp   , (20)
2 x
2xout in C21 11 C
Ramp = = , (20)
2xin
Fin C112
Kin   . (21)
F x 2 C
Kin = in = in . 11 (21)
xin C11
When Fin = 0, the output stiffness of the bridge-type amplification mechanism is formulated as:
When Fin = 0, the output stiffness of the bridge-type amplification mechanism is formulated as:
F 1
K Fout out 1 . (22)
Kout =out 2 x= . (22)
2xout outC22 C22

Therefore, thethe
Therefore, amplification ratio
amplification model
ratio of the
model bridge-type
of the amplification
bridge-type mechanism
amplification cancan
mechanism be be
expressed as follows:
expressed as follows:

2 )  2/K 1 +1/K 2  .
(l1l2)(l2/K
2xout2 x w(l1w+ θ1 +1/Kθ2 )
=
Ramp R  =out = . (23)
(23)
8/Kl1 +4/Kl 2 +w  2/K 1 +1/K 2 
amp2xin 8/Kl1 +4/Kl2 + w (2/K2
2 θ1 +1/Kθ2 )
2 xin

Figure 9. Mechanical
Figure analysis
9. Mechanical of the
analysis of bridge-type amplification
the bridge-type mechanism.
amplification mechanism.
Micromachines 2019, 10, 581 10 of 19

3.3. Stiffness Model of the Positioning Stage

According to the parallel relationship among the bridge-type amplification mechanism, compound
parallelogram mechanism, double parallelogram mechanism, and motion platform in the precision
positioning stage, the equivalent stiffness model of a single motion platform moving in the X-axis
(similarly for the Y-axis) is shown in Figure 10. The compound parallelogram mechanisms, C3 and C4 ,
and the double parallelogram mechanisms, D1 and D2 , are all connected in parallel with the motion
platform. As a result, the input stiffness of a single motion platform is expressed as:

Kload = 2(KCBPM + KDPM ). (24)

If the motion platform is regarded as the elastic load of the bridge-type amplification mechanism,
the stiffness of the elastic load is Kload , and the loading force can be obtained as

Fload = Kload · Xstage , (25)

where Xstage is the output displacement of the positioning stage. The introduction of the loading force
causes the input and output ends of the bridge-type amplification mechanism to generate displacements
opposite to the intended direction of motion. Therefore, the relationship between the input force
and the output displacement of the entire positioning stage is different from that of the bridge-type
amplification mechanism at no-loading status; hence, further analysis is required. The displacement of
the input and output ends of the bridge-type amplification mechanism under the actuation of input
force Fin alone can be defined as xin1 and 2xout1 , respectively. Similarly, the displacement of the input
and output ends under the actuation of loading force Fload alone can be defined as xin2 and 2xout2 ,
respectively. The actual displacement of the input and output ends are presented as:

Xin = xin1 − xin2 , (26)

Xstage = 2xout1 − 2xout2 , (27)

where,
Fin F
xin1 = , xout2 = load .
Kin 2Kout
According to equation (18), the following equations are derived:

xout1 = xin1 · Ramp , (28)

xin2 = xout2 /Ramp . (29)

The relationship between the actual input displacement and the output displacement of the
positioning stage is shown below:
Xstage = 2Xin · Ramp . (30)

Substituting Equations (25)–(29) into Equation (30), the relationship between input force and
output displacement of the entire positioning stage can be derived:

Kin (Kout + Kload )

Fin = · Xstage . (31)
2Kout · Ramp

Substituting Equation (30) into Equation (31) and eliminating Xstage , the input stiffness of the
entire positioning stage is calculated as:

stage Kin (Kout + Kload )

Kin = . (32)
Kout
Micromachines 2019, 10, 581 11 of 19
Micromachines 2019, 10, x 11 of 20

Simultaneously, due due

Simultaneously, to the
to parallel structure
the parallel of the
structure of motion platform
the motion and and
platform the bridge-type
the bridge-type
amplification mechanism, the output stiffness of the entire positioning stage is finally obtained:
amplification mechanism, the output stiffness of the entire positioning stage is finally obtained:
stage
Kout +
Kout K=stage KKoutload. Kload . (33)(33)
out

Figure 10. Equivalent stiffness model of the motion platform.

Figure 10. Equivalent stiffness model of the motion platform.
4. Finite Element Simulation
4. Finite Element Simulation
The finite element analysis of the precision positioning stage was carried out by the finite
The finiteANSYS
element software element analysis
18.2. of the precision
The material positioning
was chosen stagewith
to be Al7075 was Young’s
carried out by theoffinite
modulus
element
71.7 GPa, software
Poisson’s ANSYS
ratio 18.2.
of 0.33, Thestrength
yield materialofwas
503chosen to bedensity
MPa, and Al7075of with
2810Young's
kg/m3 .modulus
The main of 71.7
GPa, Poisson's ratio of 0.33, yield strength of 503 MPa, and density of 2810 kg/m
dimensional parameters of the stage are shown in Table 2, where t, LDPM , and LCBPM are the thickness
3. The main

dimensional
and length parameters
of flexible beams inof the stageparallelogram
double are shown in Table 2, whereand
mechanisms t, Lcompound
DPM, and LCBPM are the thickness
parallelogram
and length of flexible
mechanisms, respectively. beams in double parallelogram mechanisms and compound parallelogram
mechanisms, respectively.
Table 2. Structural parameters of positioning stage.
Table 2. Structural parameters of positioning stage.
Parameters Values Parameters Values Parameters Values
Parameters Values Parameters Values Parameters Values
t 0.5 l1 3 LCBPM 60
t1 t 1 0.5 l2 l1 50 3 w LCBPM 8 60
t2 t 1 15 1 LDPM l2 40 50 b w 12 8
t2 15 LDPM 40 b 12
4.1. Static Analysis
4.1. Static Analysis
Static analysis was performed to verify the prediction of the deformation of the proposed stage,
input andStatic
output analysis was
stiffness, performed
and to verify
displacement the prediction
amplification ratioofofthe
thedeformation of the proposed
proposed theoretical model.stage,
input and output stiffness, and displacement amplification ratio of the proposed
When a total displacement of 10 µm was applied to the bridge-type amplification mechanism in the theoretical model.
X-axis, the resulting motion of the stage in the Y-axis is shown in Figure 11. As can be observed fromin the
When a total displacement of 10 μm was applied to the bridge-type amplification mechanism
FigureX-axis, thedisplacement
11, the resulting motion of the
of the stage
stage wasin64.2
the Y-axis
µm, andis shown in Figure 11.ratio
the amplification As can
wasbeabout
observed
6.42.from
According to Equation (16), the theoretical amplification ratio was calculated as 6.57, and the relative6.42.
Figure 11, the displacement of the stage was 64.2 μm, and the amplification ratio was about
errorAccording
was 2.34%,tocompared
Equationto (16),
thethe theoretical
finite amplification ratio was calculated as 6.57, and the relative
element value.
error
Whenwas 2.34%, force
a driving compared
of 10 to
N the finite
along theelement value.respectively, applied to the input ends of
X-axis was,
When a driving force of 10 N along the X-axis
bridge-type amplification mechanism, the resulting displacements was, respectively, applied
of the input endsto are
the shown
input ends
in of
Figure 12. As can be observed from Figure 12, the displacement of the input end along the X-axis in
bridge-type amplification mechanism, the resulting displacements of the input ends are shown
Figure
positive 12. As was
direction can 4.9
be observed
µm, and the from Figure
input 12, the
stiffness wasdisplacement
about 2.039 of the input
N/µm. end along input
The theoretical the X-axis
positive direction was 4.9 μm, and the input stiffness was about
stiffness calculated by Equation (32) was 2.118 N/µm, and the relative error was 3.87%.2.039 N/μm. The theoretical input
stiffness calculated by Equation (32) was 2.118 N/μm, and the relative error was 3.87%.
 Micromachines 2019, 10, x 12 of 20

Micromachines
Micromachines 2019,
2019, 10,10,
581x 12 12
of 20
of 19

Figure 11. Analysis of the displacement amplification ratio by ANSYS.

Figure 11.11.Analysis
Figure Analysisofofthe
thedisplacement
displacement amplification ratioby
amplification ratio byANSYS.
ANSYS.

Figure 12.Analysis
Figure12. Analysis of
of the
the input stiffnessby
input stiffness byANSYS.
ANSYS.

When a 10 N driving Figure

force along12.the
Analysis of thedirection
negative input stiffness theby
of of ANSYS.
Y-axis was applied to to
thethe
output end
When a 10 N driving force along the negative direction the Y-axis was applied output
of the
endpositioning
of stage, the
the positioning resulting
stage, thealongoutput output
resulting displacement
displacementis shown in Figure in 13. As can be observed
When a 10 N driving force the negative direction of theisY-axis
shown was Figure
applied 13. As
to the can be
output
from Figure
observed 13, the displacement of the output end was 422.1 µm, and the output stiffness was about
end of thefrom Figure 13,
positioning the displacement
stage, the resultingof the output
output end was 422.1
displacement μm, and
is shown the output
in Figure 13. As stiffness
can be
23.69
was N/mm.
about The
23.69 theoretical
N/mm. The output stiffness
theoretical calculated
output stiffness by Equation
calculated by (33) was
Equation
observed from Figure 13, the displacement of the output end was 422.1 μm, and the output stiffness
24.32
(33) N/mm,
was 24.32 and the
N/mm,
relative
and error
the was
relative 2.66%.
error It
was should
2.66%. be
It noted
should that,
be since
noted the
that, displacement
since the of the
displacement
was about 23.69 N/mm. The theoretical output stiffness calculated by Equation (33) was 24.32 N/mm, stage
of was
the a micron,
stage was athe
lateral
and the relative error was 2.66%. It should be noted that, since the displacement of the stage was aas:
stiffness
micron, the of the
lateral compound
stiffness of parallelogram
the compound mechanisms
parallelogram in the calculation
mechanisms in can
the be approximated
calculation can be
approximated as: stiffness of the compound
micron, the lateral parallelogram  mechanisms in the calculation can be
2.88δ2y

 EI 48EI
approximated as: KCBPM = 48 + 2.882 y2 · EI

≈ 483EI. (34)

KCBPM   48  1/d + δ y /700 L  L
3
. (34)
   y2/y 700  EI
1/ d2.88
2
L3 48LEI
3
KCBPM   48 
Micromachines 2019, 10, x 13 of 20
.    . (34)
 1/ d   y2 / 700  L3 L3


Figure 13.Analysis
Figure13. Analysis of
of the
the output stiffnessby
output stiffness byANSYS.
ANSYS.

The adopted PEAs had an actual stroke of 65 μm. Therefore, the input displacement of 65 μm
was applied to the bridge-type amplification mechanism along X-axis, and the resulting maximum
stress is shown in Figure 14. As can be observed from Figure 14, the maximum stress of 48.61 MPa
occurred at the surface of flexure hinge, which was far below the yield strength of Al7075.
Micromachines 2019, 10, 581 13 of 19
Figure 13. Analysis of the output stiffness by ANSYS.

The
The adopted
adoptedPEAs
PEAshad
hadananactual
actualstroke
strokeof of
65 65
µm. Therefore,
μm. thethe
Therefore, input displacement
input displacementof 65ofµm65was
μm
applied to the bridge-type amplification mechanism along X-axis, and the resulting maximum
was applied to the bridge-type amplification mechanism along X-axis, and the resulting maximum stress is
shown in shown
stress is Figure in
14.Figure
As can14.
beAs
observed
can be from Figure
observed 14, Figure
from the maximum
14, the stress of 48.61
maximum MPaofoccurred
stress 48.61 MPa at
the surface of flexure hinge, which was far below the yield strength of Al7075
occurred at the surface of flexure hinge, which was far below the yield strength of Al7075.

14. Analysis
Figure 14.
Figure of the
Analysis of the maximum
maximum stress
stress by
by ANSYS.
ANSYS.

Performances of the positioning stage are listed in Table 3 and the relationship between the output
Performances of the positioning stage are listed in Table 3 and the relationship between the
displacement and the input force of the positioning stage is presented in Figure 15. The maximum error
output displacement and the input force of the positioning stage is presented in Figure 15. The
of the theoretical model and the finite element model was less than 4%, which verifies the correctness
maximum error of the theoretical model and the finite element model was less than 4%, which verifies
of the theoretical model.
the correctness of the theoretical model.
Table 3. Performance of the proposed positioning stage.
Table 3. Performance of the proposed positioning stage.
stage stage
Model Ramp K (N/µm) Kout
stage (N/mm)
Model Ram p Kinstage (N/μm)
in K out (N/mm)
Analytical 6.57 2.118 24.32
Analytical 6.57 2.118 24.32
FEA 6.42 2.039 23.69
FEA2019, 10, x
Micromachines 6.42 2.039 23.69 14 of 20
Error 2.34% 3.87% 2.66%
Error 2.34% 3.87% 2.66%

Figure
Figure Inputforces
15.Input
15. forces and
andoutput
outputdisplacements of the
displacements ofstage.
the stage.

4.2. Dynamic Analysis

In order to investigate the dynamic characteristics of the proposed positioning stage, a modal
analysis was performed by the ANSYS Workbench and the first six modes were obtained, as shown
in Figure 16. The first and fifth modes were the stage moving along Y-axis, the second and sixth
modes were the stage moving along X-axis, and the first six modes were X–Y in-plane modes. Since
the structure of the positioning stage was completely symmetrical, deformations in the X-axis and
the Y-axis were basically similar, and the natural frequencies were very close. The first and second
resonant frequencies were 44.234 Hz and 44.335 Hz, respectively.
Micromachines 2019, 10, 581 14 of 19
Figure 15. Input forces and output displacements of the stage.

4.2. Dynamic Analysis

4.2. Dynamic Analysis
In order to investigate
In order the dynamic
to investigate characteristics
the dynamic of theofproposed
characteristics positioning
the proposed stage,
positioning a modal
stage, a modal
analysis was performed by the ANSYS Workbench and the first six modes were obtained,
analysis was performed by the ANSYS Workbench and the first six modes were obtained, as shown as shown
in Figure 16. The
in Figure firstfirst
16. The and and
fifthfifth
modes werewere
modes the stage moving
the stage movingalong Y-axis,
along the second
Y-axis, the secondand and
sixthsixth
modes werewere
modes the stage moving
the stage movingalongalong
X-axis, and the
X-axis, andfirst
the six
firstmodes werewere
six modes X–Y X–Y
in-plane modes.
in-plane SinceSince
modes.
the structure of theofpositioning
the structure the positioningstagestage
was completely symmetrical,
was completely symmetrical,deformations in theinX-axis
deformations and and
the X-axis
the Y-axis werewere
the Y-axis basically similar,
basically and the
similar, andnatural frequencies
the natural were were
frequencies very very
close.close.
The The
first first
and second
and second
resonant frequencies
resonant were were
frequencies 44.234 Hz and
44.234 Hz44.335 Hz, respectively.
and 44.335 Hz, respectively.

(a) (b) (c)

(d) (e) (f)

FigureFigure 16. Modal

16. Modal analysis analysis of the
of the stage by stage
ANSYS:by(a)
ANSYS: (a) (b)
44.234Hz, 44.234Hz, (b)(c)44.335Hz,
44.335Hz, (c) 88.393Hz,
88.232Hz, (d) 88.232Hz, (d)
88.393Hz,
(e) 98.418Hz, (e)(f)
and 98.418Hz,
98.539Hz.and (f) 98.539Hz.

5. Experiment Setup
5. Experiment Setup
The experimental setup is established in Figure 17. A prototype of the stage was fabricated
by the wire electrical discharge machining (WEDM) process with a piece of Al7075. Two PEAs
(PSt150/7/80 VS12 from COREMORROW, Inc., Harbin, China), pre-tightened by an appropriate screw,
were installed into the bridge-type amplification mechanisms to actuate the stage; the technical
parameters of the PEA are listed in Table 4. A piezo controller (E01.D3 from COREMORROW, Inc.,
Harbin, China) which realized closed-loop control through the inside position sensor was utilized
to drive the PEAs, and the influence of the hysteresis characteristics of PEA were almost eliminated.
The output displacement and cross-coupling error of the stage were measured by a laser sensor
(optoNCDT2300 from MICRO-EPSILON Messtechnik GmbH, Ortenburg, Germany) with a 2 mm
measurement range and 30 nm resolution.
 screw, were installed into the bridge-type amplification mechanisms to actuate the stage; the
technical parameters of the PEA are listed in Table 4. A piezo controller (E01.D3 from
COREMORROW, Inc., Harbin, China) which realized closed-loop control through the inside position
sensor was utilized to drive the PEAs, and the influence of the hysteresis characteristics of PEA were
almost eliminated. The output displacement and cross-coupling error of the stage were measured by
Micromachines 2019, 10,(optoNCDT2300
a laser sensor 581 from MICRO-EPSILON Messtechnik GmbH, Ortenburg, Germany) 15 of 19
with a 2 mm measurement range and 30 nm resolution.

(a)

(b)
Figure
Figure 17. Experimental
17. Experimental setup
setup of of
thethe positioning stage:
positioning stage: (a)
(a)Schematic
Schematicdiagram, andand
diagram, (b) (b)
photograph of of
photograph
the experimental setup.
the experimental setup.

Table
Table 4.4.Technical
Technicalparameters
parameters of
ofthe
thePEA.
PEA.
Properties Values
Properties Values
Nominal displacement (μm) 76 ± 10%
Nominal displacement
Stiffness (N/μm) (µm) 76 ± 10%12 ± 20%
Stiffnessforce
Blocked (N/µm)
(N) 12 ± 20% 1200
Blocked force
Capacitance (N)
(μF) 1200 7.2 ± 20%
Capacitance
Resonant frequency(µF)
(kHz) 7.2 ± 20% 12
Resonant frequency
Dimensions (mm)(kHz) 12 Φ 12 × 87.5
Dimensions (mm) Φ 12 × 87.5
First, a 1 Hz sinusoidal command signal with peak-to-peak amplitude of 30 μm was applied to
the PEA to test the amplification ratios and cross -coupling errors. The experimental results, including
First, a 1 Hz sinusoidal command signal with peak-to-peak amplitude of 30 µm was applied to the
the output displacements and cross-coupling errors were measured by the laser sensor in both
PEA directions,
to test the amplification ratios
which are shown and cross-coupling
in Figure 18. The maximumerrors. The experimental
displacements results,
in the X-axis and including
Y-axis of the
output
thedisplacements
stage were 80.89 and
μmcross-coupling errors werewhich
and 82.70 μm, respectively, measured by the
indicates thatlaser sensor in both
the amplification directions,
ratios of
which are shown in Figure 18. The maximum displacements in the X-axis and Y-axis of the stage were
80.89 µm and 82.70 µm, respectively, which indicates that the amplification ratios of the stage in the
X-axis and Y-axis were 5.39 and 5.51, respectively. Thus, the experimental amplification ratios in the
X-axis and Y-axis were 19.1% and 16.5% smaller than the FEA results, respectively. These errors were
mainly due to the fact that the tip of the PEA was a ball head and, hence, the contact area between the
spherical surface and the plane made the real contact surface in the experiment smaller than the size
set in the finite element simulation, thus leading to a deviation. In addition, Figure 18 also shows the
cross-coupling errors in the Y-axis (X-axis) when the stage moved along the X-axis (Y-axis). As depicted
in Figure 18, the maximum cross-coupling errors in the Y-axis and X-axis were approximately 1.1 µm
and 1.2 µm, respectively. Hence, the experimental cross-coupling errors in the Y-axis and X-axis were
1.36% and 1.45%, respectively. The difference in performance between the two axes may be mainly
attributed to: (1) The asymmetry of the stage due to manufacturing errors, (2) the different pre-loading
conditions of the PEAs, and (3) the influence of the contact area on one side of the input.
 of input displacements, it meant that the blocked force of the PEA was reached. Even if a larger
driving displacement was applied in the controller software under this circumstance, the actual
output displacements of the PEA remained unchanged, causing the output displacement of the stage
to remain constant. In such a case, the maximum output displacement of the PEA was 65 μm and the
maximum output displacements of the stage in the X-axis and Y-axis were 346.1 μm and 357.2 μm,
Micromachines 2019, 10, 581 16 of 19
respectively. Thus, the tested workspace of the stage was 346.1 × 357.2 μm.

(a) (b)

(c) (d)

Figure Figure 18. Experimental

18. Experimental performanceofofthe
performance the stage
stageininthethe
X-axis: (a) Output
X-axis: displacement
(a) Output under Y-axis
displacement under
actuation, (c) Cross-coupling error in Y-axis; as well as performance in the Y-axis: (b) Output
Y-axis actuation, (c) Cross-coupling error in Y-axis; as well as performance in the Y-axis: (b) Output
displacement under X-axis actuation, (d) Cross-coupling error in the X-axis.
displacement under X-axis actuation, (d) Cross-coupling error in the X-axis.

Second, the workspace of the positioning stage was tested by applying several discrete input
displacements to the PEAs. The testing results are illustrated in Figure 19. It can be observed that
the output displacements of the stage increased linearly with an increase of the input displacements.
However, when the output displacements became constant and no longer changed with the increase
of input displacements, it meant that the blocked force of the PEA was reached. Even if a larger
driving displacement was applied in the controller software under this circumstance, the actual output
displacements of the PEA remained unchanged, causing the output displacement of the stage to remain
constant. In such a case, the maximum output displacement of the PEA was 65 µm and the maximum
output displacements of the stage in the X-axis and Y-axis were 346.1 µm and 357.2 µm, respectively.
Thus, the tested workspace
Micromachines 2019, 10, x of the stage was 346.1 × 357.2 µm. 17 of 20

(a) (b)
FigureFigure 19. Experimental
19. Experimental testing
testing results
results of of
thethe strokeinin(a)
stroke (a)output
output displacement
displacement ininthe X-axis
the andand
X-axis (b) (b)
output displacement in the Y-axis.
output displacement in the Y-axis.

6. Conclusion
In this paper, a decoupled compliant positioning stage was designed, based on bridge-type
amplification mechanisms and parallelogram mechanisms. Two kinds of parallelogram mechanisms
and a bridge-type amplification mechanism were modeled by a Beam constrained model and
Castigliano’s second theorem, respectively. Based on this, the displacement amplification ratio, input
Micromachines 2019, 10, 581 17 of 19

6. Conclusions
In this paper, a decoupled compliant positioning stage was designed, based on bridge-type
amplification mechanisms and parallelogram mechanisms. Two kinds of parallelogram mechanisms
and a bridge-type amplification mechanism were modeled by a Beam constrained model and
Castigliano’s second theorem, respectively. Based on this, the displacement amplification ratio,
input stiffness, and output stiffness of the entire stage were derived, and the results of theoretical model
were verified by finite element analysis. Compared with the finite element results, the theoretical model
had an error of 2.34% in the amplification ratio, 3.87% in the input stiffness, and 2.66% in the output
stiffness, which further validated the proposed modeling method. The prototype was fabricated to test
the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrated
that the stage had a relatively large workspace, of 346.1 × 357.2 µm, with a corresponding amplification
ratio of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error was less than 1.5%.

Author Contributions: Conceptualization, Q.Z. and J.Z.; Methodology, J.H. and Y.W.; Optimization, X.S. and
Q.X.; Simulation, J.Z.; Formal Analysis, Q.Z., J.Z. and J.H.; Investigation, J.H., Q.Z. and Y.W.; Data Curation, X.S.
and Q.X.; Writing-Original Draft Preparation, Q.Z. and J.Z.; Writing-Review & Editing, Q.Z., and J.H.; Supervision,
J.H. and Q.Z.; Project Administration, J.H. and Q.Z.; Funding Acquisition, J.H. and Q.Z.
Acknowledgments: This work was supported by the National Natural Science Foundation of China under Grant
61973207, 51605271 and Grant 51605200, and the Natural Science Foundation of Shanghai 19ZR1474000.
Conflicts of Interest: The authors declare no conflict of interest.

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