MCC

PRODUCT ATTRIBUTES

NANO PMMA and Copolymer

Submicron linewidth control

PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited

Sub 0.1m imaging

for many imaging and non-imaging microelectronic applications. PMMA is most

commonly used as a high resolution positive resist for direct write e-beam as well as
E-beam, X-ray & deep UV imaging

x-ray and deep UV microlithographic processes. PMMA is also used as a protective

Broad range of molecular weights & dilutions

coating for wafer thinning, as a bonding adhesive and as a sacrificial layer.

Excellent adhesion to most substrates

Compatible with multi-layer processes

Standard PMMA products cover a wide range of film thicknesses and are formulated
with 495,000 & 950,000 molecular weight (MW) resins in either chlorobenzene or
the safer solvent anisole. Custom MW products ranging from 50,000 - 2.2 million are
available upon request. In addition, we offer copolymer (MMA (8.5) MAA) products
formulated in the safer solvent ethyl lactate. All MCC PMMA and copolymer resists

APPLICATIONS
Multi-layer T-gate processing

are available in package sizes from 500ml to 20 liters.

courtesy M/A Com

Direct write e-beam lithography

Protective coatings for wafer thinning
Adhesive for X-ray LIGA processing
Sacrificial layers
100nm gate profile imaged in 495K PMMA with 8.5 MAA Copolymer on top.

courtesy M/A Com

T-gate resulting from PMMA/Copolymer bilayer resist stack.

PROCESSING GUIDELINES
Typical process flow for bi-layer T-gate process

Substrate Preparation
The substrate should be clean and dry. Solvent, O2 plasma, and O3

1.

2.

Spin Coat
Bottom Layer
PMMA Resist

cleans are commonly used and recommended.

Prebake
PMMA

Coat
MicroChem PMMA resists produce low defect coatings over a broad
range of film thicknesses. The film thickness vs. spin-speed curves
displayed in Fig. 1 through 8 provide the information required to
select the appropriate PMMA dilution and spin speed needed to
achieve the desired film thickness.

3.

4.

Spin Coat
Top Layer
Copolymer Resist

Remove Resist
Edge Bead

The recommended coating conditions are:

(1) Dispense: STATIC

5 - 8ml for a 150mm wafer

(2) Spread:

DYNAMIC

500 rpm for 5 sec OR

STATIC

0 rpm for 10 sec

(3) Spin:

Ramp to final spin speed at a high acceleration

5.

rate and hold for a total of 45 seconds.

6.

Expose and
Develop
Resist Stack

Prebake
Copolymer

Pre Bake
PMMA
Hot plate:

180oC for 60 - 90 sec OR

Convection Oven:

170oC for 30 min

7.

Copolymer
Hot plate:

150oC for 60 - 90 sec OR

Convection Oven:

140oC for 30 min

*Vacuum oven bake can also be used

8.

Gate Etch and

Deposition

Strip/Remove
Resist Stack

Expose

Table 2 outlines helpful guidelines for a develop process.

PMMA can be exposed with various parts of the electromagnetic

TYPICAL DEVELOPMENT PROCESS

spectrum.
ACTION

SPRAY**

SPRAY PUDDLE

Dispense

500 rpm for 30-45 secs

500 rpm for 3-4 secs

IMMERSION (21OC)

e-beam: Dose - 50 - 500 C/cm 2 depending on radiation

source/equipment & developer used.

Dispense

0 rpm for 2 secs

Energy 20-50kV; higher kV for higher resolution, e.g. 50kV for

No Dispense

0 rpm for 25-40 secs

30 secs

0.1mm images.

Rinse *

500 rpm for 30-45 secs

500 rpm for 3-4 secs

30 secs

Dry

500 rpm for 30 secs

5000 rpm for 30 secs

Nitrogen blow dry

DUV(deep UV): Low sensitivity, requiring doses >500mJ/cm 2

* Recommended Rinse solution is MIBK to IPA 1:3 in order to reduce the possibility of scumming

at 248nm.

** Variables such as developer pressure, nozzle type & position, spray pattern, etc. should be optimized

X-ray: Sensitivity of PMMA is low, ~1-2 J/cm2 at 8.3. The

Table 2

sensitivity increases at longer x-ray wavelengths. Features of

<0.02m can be fabricated.

Postbake/Hardbake (optional)
To remove residual developer, rinse solvent, and moisture from the

Develop
PMMA and copolymer resists are compatible with immersion
(21oC), spray puddle, and spray process modes. Process variables
such as soft bake, exposure conditions, choice of resist
and developer should be optimized to achieve desired results.
For more process details see the PMMA and Copolymer DEVELOPER

resist image.
Hot Plate OR

100oC for 60 - 90 sec

Convection Oven

95oC for 30 min

Note: PMMA images will round/flow above 125oC.

data sheet. Table 1 lists commonly used developers and their

Remove

recommended usage.

NANOTM PMMA AND COPOLYMER DEVELOPERS ARE

AVAILABLE IN THE FOLLOWING BLENDS
PRODUCT

COMPOSITION

RESOLUTION

Wet:

Remover PG or ACRYL STRIP

Bath:

time as required, ambient

Spray:

time as required, 500 - 1000 rpm

Dry:

plasma O2

SENSITIVITY /
THROUGHPUT

PMMA and copolymer resists can be removed by using MCC's

M/I 1:1

1:1 MIBK to IPA

high

high

M/I 1:2

1:2 MIBK to IPA

higher

medium

M/I 1:3

1:3 MIBK to IPA

very high

low

MIBK

low

high

MIBK

Remover PG or standard cleanroom solvents, such as acetone,

photoresist thinner, or positive photoresist removers.
Resists that have seen higher processing temperatures and/or
hostile processes that have toughened the polymer will require
ACRYL STRIP or a more aggressive removal process. This can

Table 1

include Remover PG at elevated temperature followed by cleaner

baths to assure adequate material removal.

Rinse and Dry

To terminate the develop process and prevent scumming, PMMA

See appropriate product data sheet for specific process recom-

and copolymer should be immersed or sprayed with 1:3 or 1:4

mendations and safety precautions.

MIBK:IPA, alcohol or DI water immediately following develop.

Substrates are normally spin dried at 3000rpm for 20 seconds or

For additional questions or technical assistance please contact

N2 blow dried.

Technical Services.

SPIN SPEED CURVES FOR PMMA AND COPOLYMER RESISTS

The spin speed versus film thickness curves displayed in figures 1-11 provide approximate information required to select the appropriate PMMA or
copolymer resist and spin conditions needed to obtain the desired film thickness. Actual results will vary and are equipment, environment, process and
application specific. Additional resist dilutions to obtain other film thicknesses are available upon request.

10000
9000
8000
7000
6000
5000
4000
3000
2000
1000
0

495PMMA A Resists
Solids: 2% - 6% in Anisole
7000
6000
Film Thickness ()

Film Thickness ()

495PMMA C Resists
Solids: 2% - 6% in Chlorobenzene

C6

C4

5000
4000
A6

3000
2000

A4

1000

C2

A2

0
500

1000

1500

2000

2500

3000

3500

4000

500

4500

1000

1500

2000

2500

3000

3500

Spin Speed (rpm)

Spin Speed (rpm)

Figure 1

Figure 3

495PMMA C Resists
Solids: 8% - 9% in Chlorobenzene

495PMMA A Resists
Solids: 8% - 11% in Anisole

4000

4500

Film Thickness ()

C9

20000
15000
10000
A11
5000

A8

C8
0
500

1000

1500

2000

2500

3000

3500

4000

500

4500

1000

1500

2000

2500

3000

Spin Speed (rpm)

Spin Speed (rpm)

Figure 2

Figure 4

Copolymer Resists
Solids: 6% - 11% in Ethyl Lactate
12000

Film Thickness, ()

Film Thickness ()

25000
23000
21000
19000
17000
15000
13000
11000
9000
7000
5000

10000
8000
6000
EL 11

4000
EL 9

2000
EL 6

0
500

1000

1500

2000

2500

Spin Speed (rpm)

Figure 9

3000

3500

4000

4500

3500

4000

4500

950PMMA A Resists
Solids: 9% - 11% in Anisole

55000
50000
45000
40000
35000
30000
25000
20000
15000
10000

C10
C9

500

1000

1500

2000

2500

3000

3500

4000

55000
50000
45000
40000
35000
30000
25000
20000
15000
10000

Film Thickness ()

Film Thickness ()

950PMMA C Resists
Solids: 9% - 10% in Chlorobenzene

A11
A9
500

4500

1000

1500

2000

950PMMA C Resists
Solids: 2% - 7% in Chlorobenzene

3500

4000

4500

950PMMA A Resists
Solids: 2% - 7% in Anisole
12000

25000

10000

20000
Film Thickness ()

Film Thickness ()

3000

Figure 7

Figure 5

15000
10000

C7

5000

C4

0
500

2500

Spin Speed (rpm)

Spin Speed (rpm)

C2
1000

1500

2000

2500

3000

3500

4000

8000
6000
4000

A7

2000

A4

4500

A2

0
500

Spin Speed (rpm)

1000

1500

2000

2500

3000

3500

4000

4500

Spin Speed (rpm)

Figure 6

Figure 8

Optical Properties
Copolymer Resists

Optical Properties
495 and 950 PMMA Resists
1.7

1.7

Cauchy Coeffiecients
A
495 PMMA
950 PMMA

1.491
1.488

3.427 e-03
2.898 e-03

Cauchy Coeffiecients
A

C
1.65

1.819 e-04
1.579 e-04

Refractive Index

Refractive Index

1.65

1.6

1.55

1.5

8.5 mEL

1.478

7.204 e-04

-3.478 e-04

1.6

1.55

1.5

1.45
0

300

500

700

Wavelength (nm)

Figure 10

900

1.45
0

300

500

700

Wavelength (nm)

Figure 11

900

Bi-Layer Process

PMMA resists for T-gate and other imaging processes

PMMA is a high resolution positive tone resist for e-beam, deep UV

PMMA

PMMA

GaAs

GaAs

4. Develop PMMA and Copolymer

1. Coat and bake PMMA

(200-250nm) and X-ray lithographic processes. Although PMMA may

be used in a single layer resist process, it is most commonly used in

Copolymer
PMMA

multi-layer processes such as in the fabrication of mushroom or

T-gates. Images are formed through the photo scission of the
polymer backbone and subsequent development process, which

5. Deposition

e-beam
>>

removes the exposed, lower molecular weight resist. Multi-layer,

GaAs

GaAs

2. Coat and bake copolymer

PMMA

shaped resist profiles are realized and influenced through the careful
choice of PMMA molecular weight, film thickness and other process

GaAs

3. Expose resist stack, center scan dose,

then side scan dose

GaAs

6. Strip resist stack

set points.

Tri-Layer Process

In a typical bi-layer process, a combination of bottom and top layer

resists are selected such that a large difference in dissolution rates

PMMA

PMMA
Copolymer
PMMA

GaAs

GaAs

1. Coat and bake high MW PMMA

5. Develop tri-layer stack

of the layers at the developer step exists, leading to the desired

resist sidewall profile. This contrast may be further influenced with a
PMMA

PMMA
Copolymer
PMMA

GaAs

GaAs

Copolymer

variety of process strategies. Generally, dissolution rate increases as

molecular weight decreases. However, soft bake conditions, which

2. Coat and bake copolymer

6. Deposition

affect residual solvent level and subsequent development rates will

influence the bi-layer resist profile as will the exposure conditions.

PMMA
Copolymer
PMMA

3. Coat and bake low MW PMMA

7. Strip resist stack

notes concerning non-imaging PMMA processes such as wafer

e-beam
>>

thinning, bonding and sacrificial layers.

GaAs

GaAs

Please refer to our web site, www.microchem.com for applications

PMMA
Copolymer
PMMA
GaAs

4. Expose resist stack, center scan dose,

then side scan dose

OTHER RESIST AND ANCILLORY PRODUCTS FROM MICROCHEM

PMGI and LOR for lift-off processing
SU-8 resists for MEMS and ultra thick resist processing
Remover PG resist stripper
EBR PG edge bead remover
Acryl Strip resist stripper for PMMA

NOTES

HANDLING NANO PMMA

& COPOLYMER SERIES RESISTS (in Anisole or Chlorobenzene)
Use precautions in handling flammable PMMA solutions. Avoid contact with eyes,
skin, and clothing. Use with adequate ventilation. Avoid breathing fumes. Wear
chemical-resistant eye protection, chemical gloves (PVA for chlorobenzene
solutions) and protective clothing when handling NANO PMMA & Copolymer Series
Resist products. NANO PMMA & Copolymer Series Resists cause irritation in case
of contact with eyes, skin, and mucous membranes. In case of eye contact, flush
with water for 15 minutes and call a physician immediately. Review the current
MSDS (Material Safety Data Sheet) before using.

MATERIAL AND EQUIPMENT COMPATIBILITY

NANO PMMA & Copolymer Resists are compatible with glass, ceramic, unfilled
polyethylene, high-density polyethylene, polytetrafluoroethylene, stainless steel, and
equivalent materials.
Chlorobenzene is a powerful solvent and will attack various elastomers such
as BUNA N, EPDM, HYPALON, and NEOPRENE. It will also attack PVC, CPVC and
polyester. VITON A is recommended for both O-rings and tubing.

PROCESSING ENVIRONMENT
For optimum results, use NANO PMMA & Copolymer Series Resists in a
controlled environment. 20 - 25o 1oC (68 - 77oF) is suggested.

STORAGE
Store upright in original containers in a dry area above 50oF. Do not refrigerate. Keep
away from sources of ignition, light, heat, oxidants, acids, and reducers. Shelf life is
13 months from date of manufacture.

DISPOSAL
Each locality, state, and county has unique regulations regarding the disposal
of organic solvents such as NANO PMMA Series Resists. It is the responsibility of
the customer to dispose of NANO PMMA Series Resists in compliance with all
applicable codes and regulations. See MSDS for additional information.

1254 C HESTNUT S TREET

N EWTON , MA 02464
P HONE : 617.965.5511
F AX : 617.965.5818
E MAIL :

[email protected]

The information regarding these products is based on our testing to date, which we believe to
be reliable, but accuracy or completeness is not guaranteed. We make no guarantee or warranty,
expressed or implied, regarding the information, use, handling, storage, or possession of these
products, or the application of any process described herein or the results desired, since the use
and handling of these products are beyond our control.

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