Appendix A - DVD Specifications 276
Appendix A - DVD Specifications
The following pages contain engineering drawings of the e-beam gun, the processing
chamber, and the water-cooled crucible as provided by the various manufacturing compa-
nies. Clearly the schematic illustrations do not provide all of the design details necessary
to reconstruct the DVD system. However, these diagrams, in combination with the system
description of Chapter 4, should provide sufficient information to allow critical evaluation
of the design of the first generation DVD system. These diagrams should also represent a
reasonable departure point for someone interested in further developing DVD technology.
A.1 E-beam Gun Design Drawings
wire cathode
electrical
connection bolt cathode
(current = electrical
about 8 A connection
at 10 V) (current =
1-170 mA
at 60 kV)
Wehnelt wire
cup bolt cathode
cathode
Figure A.1 Wehnelt cup assembly which generates the e-beam.
Appendix A - DVD Specifications 277
Anode current
and
“gun closed” sensor
x/y deflection
coils
cross
dynamic
valve
lens
sensors
coil
static
lens
coil
Figure A.2 Overview drawing of traditional components of DVD e-beam gun. The
pressure decoupling system unique to the DVD system is not shown.
Appendix A - DVD Specifications 278
high voltage cable
connection point eye-rings
for lifting
gun
insulating
silicon
oil
reservoir
oil
drain
anode Wehnelt
(copper) cup
assembly
lever arm x/y deflection
assembly coils ceramic,
to open conductively-coated
gun for protective tube
cathode
replacement
Figure A.3 Beam Generating Assembly, top portion of DVD e-beam gun.
Appendix A - DVD Specifications 279
cross-valve mechanism
(pneumatically actuated)
electromagnetic
cross-valve
position sensors
cross-valve
sensors
ceramic,
conductively-coated
static protective tube
lens
coil
Figure A.4 Beam Guidance System, center section of DVD e-beam gun.
Appendix A - DVD Specifications 280
gas flow limiting
medium protective shutter
vacuum
pump lead-glass
attachment viewport
port
attachment
to chamber
chamber electrically-isolated
sealing aperture attachment
water
o-ring cooling
gas flow jacket
limiting
copper tungsten
plug plug
Figure A.5 Pressure Decoupling Chamber, bottom section of DVD e-beam gun.
Figure A.6 Stainless steel processing chamber with 2.54 cm thick walls.
A.2 Processing Chamber Design Drawings
Appendix A - DVD Specifications
Note: These drawings incorrectly indicate that
the hinged door assembly is opposite the
wall containing the two angled vapor
source introduction ports. The final design
actually placed the door opposite the wall
containing the chamber pump port.
281
Appendix A - DVD Specifications 282
A.3 Water-Cooled Crucible Design Drawings
Figure A.7 Specially designed DVD water-cooled crucible.
Appendix A - DVD Specifications 283
A.4 Processing Chamber Pumping Capacity Design Calculations
Note: The description and calculations in this section were generated by D. Hill and are
included here to provide a more complete description of the design of the original
Directed Vapor Deposition system. Simulation of the reconfigured DVD system in Chap-
ter 10 suggests that the calculations of this subsection may not be entirely correct. The
Chapter 10 simulations suggest that the required pumping capacity does not go through a
maximum at Mach 1.0 as shown in Fig. A.9 below. Instead the required pumping capacity
appears to continue to increase as the Mach number is increased. Equations A.2 and A.3
were used to calculate required pumping capacity in Chapter 10.
During the design of the original DVD system, the following equations describing carrier
gas flow through the DVD processing chamber were used. They employ the flow’s desired
Mach number at the tube exit, the stagnation temperature of the carrier gas (helium), and
the inside diameter of the inlet flow tube to determine required pumping capacity. This
analysis assumed that the inlet flow tube was smooth and not excessively long (< 2 m).
Thus, friction and heat transfer through the pipe wall were assumed to be negligible. Fig.
A.8 shows the assumed geometry of the modeled system.
Important flow geometry features assumed in the analysis included:
1. The inside diameter of the settling chamber was at least five times that of the flow
tube, ensuring nearly zero velocity and stagnation conditions in the chamber.
2. The diameter of the chamber pump inlet was at least three times the diameter of
the inlet flow tube, ensuring that the at-pump gas velocity is extremely low.
3. The inlet flow tube was straight.
The controlling variables for pumping capacity are Mach number (at the pipe exit), stag-
nation temperature (in the settling chamber), and pipe diameter. Equations (2.19), (2.20),
Appendix A - DVD Specifications 284
Mechanical
chamber
pump
Settling
Inlet
chamber
flow
tube
To, Po, ρo
v~0
Conditions at flow tube exit:
T, P, ρ, M, v
Figure A.8 Estimation of chamber pumping requirements. Isentropic flow
calculations provide a means for estimating the chamber vacuum pumping
capacity required in the DVD system.
and (8.1) were used in conjunction with the following equation to compute the necessary
pumping capacity.
1
-----------
ρ γ–1 γ–1
----o- = 1 + ----------- M 2 . (A.1)
ρ 2
where ρo = Settling chamber gas density and
ρ = Downstream gas density (e.g. in the inlet flow tube).
·
The necessary chamber pumping capacity ( U pump ) was computed from the following
equation:
· · ρ pipe
U pump = U pipe -------------- (A.2)
ρ pump
·
where U pipe = A pipe U pipe (A.3)
with Apipe= Area of the inlet flow tube and
Appendix A - DVD Specifications 285
Upipe= Velocity of the carrier gas through the inlet flow tube.
The calculated required pumping capacity for the original DVD processing chamber pump
system is shown in Fig. A.9.
30000
3.0 cm pipe
Pump capacity @ 1 Torr (l/m)
400 K
300 K
20000 250 K
2.5 cm pipe
2.0 cm pipe
10000
0
0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8
Mach number
Figure A.9 Achievable gas flow velocity for various pumping configurations. The
results of the isentropic flow calculations show the pumping capacity required
to achieve supersonic carrier gas flows in the original DVD system under
typical processing conditions.
