Exploiting Multimodal Nonlinear Interactions in
Piezoelectric MEMS Resonators for Emerging Device
Applications
Methodology and Work Plan
In recent years, there has been increasing interest in exploring coupled multi-mode dy-
namics in MEMS and NEMS resonators, as they exhibit richer physical behaviors and en-
able advanced functionalities beyond those achievable through single-mode operation [1, 2].
This shift is supported by advances in microfabrication precision and versatile transduc-
tion schemes, which allow for the systematic engineering of nonlinear modal interactions for
both fundamental physical investigations and enhanced device performance [3–6]. Modal
coupling in such structures can be activated through mechanisms such as parametric excita-
tion—where system parameters like stiffness or mass are periodically modulated—or internal
resonance, which arises due to nonlinearities when specific commensurate or combination-
type relationships exist between mode frequencies (e.g., ω2 ≈ 2ω1 , ω3 ≈ ω1 + ω2 ) [7–9].
Although significant theoretical and experimental efforts have been devoted to nonlinear
modal coupling based on these mechanisms, the effects of structural curvature, boundary-
induced stiffness gradients, and heterogeneous piezoelectric material distribution remain in-
sufficiently explored. Furthermore, the combined influence of internal resonance and para-
metric excitation in piezoelectric MEMS resonators has not been explored in detail, despite
its potential to reveal new aspects of nonlinear dynamics and push the boundaries of potential
applications. This motivates a systematic investigation of nonlinear multimodal interactions
in piezoelectric MEMS resonators with tailored geometries, material distributions, and elec-
trode engineering.
To address these challenges and meet the proposed objectives, this work follows a struc-
tured methodology along with a corresponding phase-wise work plan.
Methodology
Design and Multiphysics Simulation: The initial focus will be on designing piezoelec-
tric MEMS resonators using various mechanical structures, with an emphasis on geometric
tuning and structural curvature to support a wide range of vibrational modes. This is aimed
at enabling multiple internal resonance conditions and facilitating multimode coupling under
parametric excitation. For each resonator configuration, analytical formulations and finite
element simulations (COMSOL Multiphysics) will be carried out to determine key dynamic
characteristics such as natural frequencies, frequency spacing, and mode shapes. These anal-
yses will guide the identification of potential modal interactions and inform the optimization
1
of design parameters—including resonator dimensions, material stack composition, and elec-
trode topology—for achieving strong and controllable nonlinear modal coupling.
Numerical Modeling: Once internal resonance conditions are identified through simula-
tions, relevant beam or plate theories—including essential geometric and inertial nonlinear
terms—will be employed to develop reduced-order models that capture the key features of
nonlinear modal interactions. The governing equations will be derived using energy-based
or variational principles and projected onto the relevant mode shapes using the Galerkin
method. Perturbation techniques, such as the method of multiple scales or averaging, will
then be applied to study slow-time dynamics, bifurcation behavior, and energy exchange
mechanisms among coupled modes. These models will help predict frequency response char-
acteristics, delineate stability regimes, and guide further design optimization.
Fabrication Process: The designed devices will be fabricated using the microfabrication
facilities available at CeNSE, IISc cleanroom, leveraging standard and customizable pro-
cess flows. The process will accommodate different piezoelectric materials—such as PZT or
AlN—depending on transduction requirements, and will support both sol-gel and sputtering-
based deposition methods. Flexibility in the fabrication scheme will allow exploration of
design variations, including film thickness, electrode patterning, and device layer geometry,
to enable multimode excitation and nonlinear interactions.
Characterization: Initial characterization will focus on verifying key design parameters
after fabrication, including resonant frequencies, mode shapes, and quality factors, using
techniques such as Laser Doppler Vibrometry (LDV) and Lock-in amplifier. Subsequently,
nonlinear modal interaction analysis will be carried out by exploring signatures of mode cou-
pling induced by internal resonance and parametric excitation under varied drive conditions,
including single-tone and dual-tone AC inputs, differential AC excitation, and the presence
or absence of DC bias. These measurements will help identify the onset of mode coupling,
possible frequency comb generation, wave-mixing, and mechanical logic gates.
Application-Oriented Testing: Once nonlinear modal coupling is experimentally estab-
lished, the resonators will be evaluated for a range of targeted applications. These include
phononic frequency comb generation, wave mixing, and higher-order harmonic generation
for spectral shaping; mechanical logic elements for nonlinear computing; and multimode
transduction for advanced sensing platforms such as thermal and gas sensors. Additionally,
the potential of these coupled-mode resonators to function as tunable bandpass filters with
improved frequency selectivity will also be investigated.
Work Plan
The proposed research will be conducted over a two-year period, divided into four 6-month
phases, progressing from design and modeling to fabrication, characterization, and applica-
tion demonstration.
• Phase 1 (Months 1–6): Design, Modeling, and Fabrication Training — Ac-
quire hands-on training in cleanroom processes and initiate the design of PiezoMEMS
resonators using analytical models and FEM simulations (COMSOL) to identify inter-
nal resonance conditions. Develop reduced-order models using beam/plate theory and
perturbation techniques to analyze nonlinear modal coupling.
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• Phase 2 (Months 7–12): Device Fabrication and Process Optimization —
Fabricate devices using sol-gel or sputtered piezoelectric films with tailored electrode
configurations. Optimize fabrication parameters such as piezoelectric thickness, stress
control, and electrode topology to achieve the desired multimodal frequency spacing
and transduction efficiency.
• Phase 3 (Months 13–18): Linear and Nonlinear Characterization, Data
Analysis, and Dissemination — Perform device-level testing using LDV and Lock-
in to verify resonant frequencies, quality factors, and internal resonances. Subsequently,
nonlinear modal interactions will be explored under various excitation schemes to iden-
tify signatures of coupling via internal resonance and parametric excitation. Exper-
imental data will be analyzed to extract key nonlinear dynamic behaviors such as
coupled modal dynamics and frequency bifurcations. The results will be compiled for
manuscript preparation and submitted to appropriate peer-reviewed journals.
• Phase 4 (Months 19–24): Application Demonstration and Dissemination
— Demonstrate application-level functionalities such as phononic frequency combs,
wave mixing, mechanical logic, and multimodal sensing. Compile results for high-
impact journal publications, conference presentations, and prepare documentation for
potential patent filing.
References
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